Vacuum locking protection system

Abstract

The utility model provides a vacuum locking protection system which comprises a controller used for air inlet; the flow adjusting assembly is provided with a first air inlet end and a first air outlet end, the first air inlet end is connected with the air outlet end of the controller, and a plurality of circulation pipelines with different flow limiting rates are arranged in the flow adjusting assembly; the air inlet end of the vacuum cavity is connected with the first air outlet end; the air exhaust end of the molecular pump is connected with the air outlet end of the vacuum cavity; the control chip is connected with the controller, the flow adjusting assembly, the vacuum cavity and the molecular pump; the control chip controls the on-off state of the circulation pipeline and the start-stop state of the molecular pump according to the information of gas flowing through the controller and the vacuum degree information of the vacuum cavity. The molecular pump vacuum-pumping system solves the technical problems that a traditional molecular pump vacuum-pumping system cannot achieve accurate adjustment of the air inflow, when the air inflow is large, the flow is likely to be unstable or resources are consumed excessively, and unnecessary energy loss is caused.

Description

Technical Field

[0001] The utility model relates to the field of vacuum technology, in particular to a vacuum locking protection system. Background Art

[0002] Molecular pump is a vacuum pumping device that discharges gas molecules by high-speed rotating blades. When the molecular pump is running, it must be equipped with a suitable front pump to discharge the gas sucked by the molecular pump in time to keep the molecular pump outlet gas in a molecular flow state, thereby ensuring the normal operation of the molecular pump. Throttle valve is a device used to control the flow of fluids. It adjusts the flow rate and pressure of the fluid by adjusting the opening of the valve. Throttle valves are widely used in petroleum, chemical, electric power, metallurgy and other fields, and are one of the important control devices in pipeline systems.

[0003] However, in actual use, there is a problem: the traditional molecular pump vacuum system cannot achieve precise regulation of the intake volume. The pressure of the gas flowing into the pipeline is different when the intake volume is different. When the intake gas flow rate is large, it may cause unstable flow or excessive consumption of resources, resulting in unnecessary energy loss. Utility Model Content

[0004] The utility model solves the technical problem that the traditional molecular pump vacuum system cannot realize accurate regulation of the intake air volume, and when the intake gas flow rate is large, it may cause flow instability or excessive consumption of resources, resulting in unnecessary energy loss.

[0005] To solve the above problems, the utility model provides a vacuum locking protection system, comprising: a controller, the controller is used for air intake; a flow regulating component, the flow regulating component is provided with a first air inlet end and a first air outlet end, the first air inlet end is connected to the air outlet end of the controller, and a plurality of flow pipelines are provided in the flow regulating component, wherein the flow limits of the plurality of flow pipelines are different; a vacuum chamber, the air inlet end of the vacuum chamber is connected to the first air outlet end; a molecular pump, the air extraction end of the molecular pump is connected to the air outlet end of the vacuum chamber; a control chip, the control chip is connected to the controller, the flow regulating component, the vacuum chamber and the molecular pump; wherein the control chip controls the on-off state of the plurality of flow pipelines and the start-stop state of the molecular pump according to the gas information flowing through the controller and the vacuum degree information of the vacuum chamber.

[0006] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the whole system is controlled by a control chip, the control chip obtains gas information from the controller, obtains vacuum degree information of the vacuum chamber from the vacuum gauge, and controls the controller, circulation pipeline and molecular pump. Multiple circulation pipelines are connected to the controller and the vacuum chamber. By controlling the on-off state of multiple circulation pipelines, it is possible to control which circulation pipeline the gas flowing through the controller flows to the vacuum chamber. Preferably, the flow limit of each circulation pipeline is different, so according to the real-time gas information, the appropriate circulation pipeline is automatically selected for connection, which can provide stable control in a wider flow range to achieve the best flow control effect, while reducing unnecessary energy loss.

[0007] In one example of the utility model, a throttling component is provided on the circulation pipeline; wherein the control chip controls the throttling component according to the gas information, thereby controlling the on-off state of each circulation pipeline.

[0008] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the control chip automatically selects the appropriate throttling component to work according to the real-time gas flow rate of the intake air, thereby controlling the on-off of each flow pipeline to achieve the best flow control effect. At the same time, the throttling component can also reduce the gas pressure to avoid impact on the molecular pump, which helps to reduce mechanical wear and extend the service life of the molecular pump.

[0009] In one example of the utility model, the number of the multiple circulation pipelines is three, namely a first circulation pipeline, a second circulation pipeline and a third circulation pipeline; a first throttling component is provided on the first circulation pipeline, and the on-off state of the first circulation pipeline is controlled by the on-off of the first throttling component; a second throttling component is provided on the second circulation pipeline, and the on-off state of the second circulation pipeline is controlled by the on-off of the second throttling component; a third throttling component is provided on the third circulation pipeline, and the on-off state of the third circulation pipeline is controlled by the on-off of the third throttling component.

[0010] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: in this embodiment, the number of circulation pipelines is three, and each circulation pipeline is provided with a throttling component, and the throttling components and circulation pipelines correspond one to one, thereby avoiding the wear caused by a single throttling component working under high load for a long time and extending the service life of the throttling component.

[0011] In one example of the present invention, the control chip controls the on / off states of the first flow pipeline, the second flow pipeline, and the third flow pipeline according to the gas information.

[0012] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the present application can automatically select the most suitable circulation pipeline for connection according to the real-time changes in the gas flow of the intake air, so as to achieve the best flow control effect.

[0013] In an example of the present invention, the vacuum locking protection system further includes: a vacuum gauge, the vacuum gauge is connected to the vacuum chamber and the control chip, and the vacuum gauge is used to monitor vacuum degree information.

[0014] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the vacuum gauge is used to continuously monitor the vacuum degree of the vacuum cavity, and the communication end of the vacuum gauge is connected to the control chip to transmit the vacuum degree information to the control chip.

[0015] In one embodiment of the present invention, when there is an abnormality in the gas information, the control chip controls multiple flow pipelines to be disconnected.

[0016] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the present application only disconnects the circulation pipeline immediately when necessary (that is, when there is an abnormality in the gas flow) without shutting down the molecular pump. The molecular pump can continue to operate and maintain the vacuum environment in the vacuum chamber, reducing the time and energy consumption required for re-vacuuming, thereby reducing unnecessary downtime and improving production efficiency. Disconnecting the circulation pipeline immediately can quickly reduce the intake volume, thereby avoiding potential damage caused by the slow shutdown speed of the molecular pump. This rapid response mechanism greatly improves the safety and stability of the molecular pump. At the same time, it takes 5-10 minutes for the molecular pump to go from the running state to the shutdown state. The time is too long so that the shutdown plan cannot avoid the pollution of the vacuum chamber caused by abnormal conditions such as atmospheric leakage or oil vapor pollution. The present system can quickly disconnect the circulation pipeline and trap the abnormal gas in the pipeline to prevent it from polluting the vacuum chamber.

[0017] In an example of the present invention, when there is no abnormality in the gas information but there is an abnormality in the vacuum information, the control chip controls the molecular pump to shut down.

[0018] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: when the intake gas flow is normal and the vacuum degree is abnormal, it indicates that there is a leak in the vacuum chamber itself and the molecular pump needs to be shut down to prevent damage to the molecular pump; therefore, when the control chip detects that the vacuum degree data is abnormal, the control chip will send a shutdown command to the molecular pump to stop the molecular pump from running, so as to reduce the damage to the molecular pump caused by the abnormal vacuum degree in the vacuum chamber.

[0019] In one example of the utility model, the throttling component includes: a throttle valve, which is arranged on the circulation pipeline; a solenoid valve, which is arranged on the circulation pipeline, and the solenoid valve and the throttle valve correspond one to one; wherein the control chip controls the solenoid valve according to the gas information, thereby controlling the on and off state of each circulation pipeline.

[0020] Compared with the existing technology, the technical effect achieved by adopting this technical solution is as follows: when the gas flow is abnormal, the control chip will control all solenoid valves to close quickly to prevent abnormal gas from damaging the molecular pump. The rapid response capability of the solenoid valve greatly improves the safety and stability of the molecular pump. The molecular pump avoids the stress caused by sudden flow shock, which helps to reduce mechanical wear and thus extend the service life of the molecular pump.

[0021] In one example of the utility model, a first throttle valve and a first solenoid valve are also provided on the first circulation pipeline, and the on-off state of the first circulation pipeline is controlled by the on-off state of the first solenoid valve; a second throttle valve and a second solenoid valve are also provided on the second circulation pipeline, and the on-off state of the second circulation pipeline is controlled by the on-off state of the second solenoid valve; a third throttle valve and a third solenoid valve are also provided on the third circulation pipeline, and the on-off state of the third circulation pipeline is controlled by the on-off state of the third solenoid valve.

[0022] Compared with the prior art, the technical effects achieved by adopting this technical solution are: the first circulation pipeline, the first throttle valve and the first solenoid valve correspond one to one; the second circulation pipeline, the second throttle valve and the second solenoid valve correspond one to one; the third circulation pipeline, the third throttle valve and the third solenoid valve correspond one to one.

[0023] After adopting the technical solution of the utility model, the following technical effects can be achieved:

[0024] (1) Based on real-time gas information, it automatically selects the appropriate flow pipeline for connection, providing stable control over a wider flow range to achieve the best flow control effect while reducing unnecessary energy loss;

[0025] (2) The throttle valve can also reduce the gas pressure to avoid impact on the molecular pump, which helps reduce mechanical wear and thus extend the service life of the molecular pump;

[0026] (3) The present application only disconnects the flow line immediately when necessary (i.e., when there is an abnormality in the gas flow), without shutting down the molecular pump. The molecular pump can continue to operate and maintain the vacuum environment in the vacuum chamber, thus reducing the time and energy consumption required for re-vacuuming, thereby reducing unnecessary downtime and improving production efficiency.

[0027] (4) Instantly disconnecting the flow line can quickly reduce the intake volume, thereby avoiding potential damage caused by the slow shutdown speed of the molecular pump. This rapid response mechanism greatly improves the safety and stability of the molecular pump;

[0028] (5) When the control chip detects that there is no abnormality in the gas information but the vacuum data is abnormal, the control chip will send a shutdown command to the molecular pump to stop the molecular pump from running, so as to reduce the damage to the molecular pump caused by the abnormal vacuum in the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a structural schematic diagram of a vacuum locking protection system provided in Example 1 of the utility model.

[0030] Figure 2 This is a structural schematic diagram of a vacuum locking protection system provided in Example 2 of the utility model.

[0031] Description of reference numerals:

[0032] 10. Control chip; 100. Controller; 200. Circulation pipeline; 210. First circulation pipeline; 211. First throttling component; 212. First throttling valve; 213. First solenoid valve; 220. Second circulation pipeline; 221. Second throttling component; 222. Second throttling valve; 223. Second solenoid valve; 230. Third circulation pipeline; 231. Third throttling component; 232. Third throttling valve; 233. Third solenoid valve; 300. Vacuum chamber; 400. Molecular pump; 13. Vacuum gauge. DETAILED DESCRIPTION

[0033] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the technical solutions in the embodiments of the utility model are described clearly and completely. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] [Example 1]

[0035] See also Figure 1The utility model provides a vacuum locking protection system, which includes: a controller 100, a flow regulating component, a vacuum chamber 300, a molecular pump 400 and a control chip 10, wherein the controller 100 is used for air intake; the flow regulating component is provided with a first air intake end and a first air outlet end, the first air intake end is connected to the air outlet end of the controller 100, and a plurality of flow pipes 200 are provided in the flow regulating component, wherein the flow limits of the plurality of flow pipes 200 are different; the air intake end of the vacuum chamber 300 is connected to the first air outlet end; the air extraction end of the molecular pump 400 is connected to the air outlet end of the vacuum chamber 300; the control chip 10 connects the controller 100, the flow regulating component, the vacuum chamber 300 and the molecular pump 400; wherein the control chip 10 controls the on-off state of the plurality of flow pipes 200 and the start-stop state of the molecular pump 400 according to the gas information flowing through the controller 100 and the vacuum degree information of the vacuum chamber 300.

[0036] In a specific embodiment, the conventional molecular pump 400 vacuum system cannot achieve precise regulation of the intake volume. The pressure of the gas flowing into the pipeline is different when the intake volume is different. When the intake gas flow rate is large, it may cause unstable flow or excessive consumption of resources, resulting in unnecessary energy loss.

[0037] Specifically, the air inlet of the vacuum locking protection system is connected to the controller 100, the flow regulating component includes a plurality of parallel flow pipes 200, the controller 100 is connected to the plurality of parallel flow pipes 200, the plurality of parallel flow pipes 200 are all connected to the vacuum chamber 300, the exhaust end of the molecular pump 400 is connected to the exhaust end of the vacuum chamber 300, and the vacuum chamber 300 is evacuated by the molecular pump 400; the entire system is controlled by a control chip 10, the control chip 10 obtains gas information from the controller 100, obtains vacuum degree information of the vacuum chamber 300 from the vacuum gauge 13, and controls the controller 100, the flow pipes 200 and the molecular pump 400. Multiple circulation pipelines 200 are all connected to the controller 100 and the vacuum chamber 300. By controlling the on and off states of the multiple circulation pipelines 200, it is possible to control which circulation pipeline 200 the gas flowing through the controller 100 flows through to the vacuum chamber 300; preferably, the flow limits of each circulation pipeline 200 are different, so that according to real-time gas information, the appropriate circulation pipeline 200 is automatically selected for connection, which can provide stable control within a wider flow range to achieve the best flow control effect while reducing unnecessary energy loss.

[0038] Preferably, the gas information includes: the gas flow rate of the intake gas; the vacuum information includes: vacuum data.

[0039] Furthermore, a throttling component is provided on the circulation pipeline 200 ; wherein the control chip 10 controls the throttling component according to the gas information, thereby controlling the on-off state of each circulation pipeline 200 .

[0040] Specifically, the throttling components and the circulation pipelines correspond one to one, and the control chip 10 automatically selects a suitable throttling component to work according to the real-time gas flow rate of the intake air, thereby controlling the on-off of the circulation pipeline 200 to achieve the best flow control effect. At the same time, the throttling component can also reduce the gas pressure to avoid impact on the molecular pump 400, which helps to reduce mechanical wear and extend the service life of the molecular pump 400.

[0041] Preferably, the throttling component can both buffer the intake air flow and control the on / off state of the circulation pipeline 200; the throttling component is an electromagnetic throttle valve, which combines the effects of a throttle valve and an electromagnetic valve, and can also achieve rapid disconnection of the circulation pipeline 200.

[0042] Furthermore, the number of the multiple circulation pipelines 200 is three, namely the first circulation pipeline 210, the second circulation pipeline 220 and the third circulation pipeline 230; the first circulation pipeline 210 is provided with a first throttling component 211, and the on-off state of the first circulation pipeline 210 is controlled by the on-off of the first throttling component 211; the second circulation pipeline 220 is provided with a second throttling component 221, and the on-off state of the second circulation pipeline 220 is controlled by the on-off of the second throttling component 221; the third circulation pipeline 230 is provided with a third throttling component 231, and the on-off state of the third circulation pipeline 230 is controlled by the on-off of the third throttling component 231.

[0043] For example, a traditional throttle valve system only uses a single throttle valve. This solution can only be optimized for a specific flow range, but cannot effectively adapt to a system with a larger flow range, which may lead to unstable flow or excessive consumption of resources. Therefore, multiple circulation pipelines 200 are set. In this embodiment, the number of circulation pipelines 200 is three, and each circulation pipeline 200 is provided with a throttling component. The throttling component corresponds to the circulation pipeline 200 one by one, avoiding the wear caused by a single throttling component working under high load for a long time, and extending the service life of the throttling component.

[0044] Preferably, the first throttling component 211 is a small-flow electromagnetic throttling valve, the second throttling component 221 is a medium-flow electromagnetic throttling valve, and the third throttling component 231 is a large-flow electromagnetic throttling valve; the first flow limit < the second flow limit < the third flow limit, the first flow limit is the maximum flow allowed to pass through the first circulation pipeline 210, the second flow limit is the maximum flow allowed to pass through the second circulation pipeline 220, and the third flow limit is the maximum flow allowed to pass through the third circulation pipeline 230.

[0045] Preferably, the flow ranges of the first throttling component 211, the second throttling component 221 and the third throttling component 231 can be selected according to actual needs, and the flow ranges of the throttling components are represented by the minimum flow rate and the maximum flow rate limit; for example: a small flow electromagnetic throttling valve is suitable for 1 to 10 SCCM, indicating that the flow range allowed by the first circulation pipeline 210 is 1 to 10 SCCM; a medium flow electromagnetic throttling valve is suitable for 10 to 100 SCCM, indicating that the flow range allowed by the second circulation pipeline 220 is 10 to 100 SCCM; a large flow electromagnetic throttling valve is suitable for 100 to 1000 SCCM, indicating that the flow range allowed by the third circulation pipeline 230 is 100 to 1000 SCCM; then the vacuum locking protection system in this embodiment can adapt to the flow range of 1 to 1000 SCCM by automatic adjustment.

[0046] Furthermore, the control chip 10 controls the on / off states of the first flow pipeline 210 , the second flow pipeline 220 , and the third flow pipeline 230 according to the gas information.

[0047] Specifically, the present application can automatically select the most appropriate flow pipe for connection according to the real-time changes in the intake gas flow rate, so as to achieve the best flow control effect.

[0048] Preferably, when the gas flow rate is greater than the maximum flow limit of the third circulation pipeline 230, the flow path of the gas can be controlled by reasonably selecting the on-off state of each circulation pipeline 200; for example, when the intake gas flow rate is large, the control chip 10 will choose to let the gas pass through the three circulation pipelines 200 at the same time, and the gas enters the vacuum chamber 300 through the three circulation pipelines 200 in parallel.

[0049] Furthermore, the vacuum locking protection system also includes: a vacuum gauge 13, the vacuum gauge 13 is connected to the vacuum chamber 300 and the control chip 10, and the vacuum gauge 13 is used to monitor vacuum degree information.

[0050] For example, the vacuum gauge 13 is used to continuously monitor the vacuum degree of the vacuum chamber 300 , and a communication terminal of the vacuum gauge 13 is connected to the control chip 10 to transmit vacuum degree information to the control chip 10 .

[0051] Furthermore, when there is an abnormality in the gas information, the control chip 10 controls the multiple flow pipelines 200 to be disconnected.

[0052] Specifically, the traditional protection method will shut down the entire molecular pump 400 when an abnormality is detected, which will not only cause production interruption, but also require additional restart and calibration time. At the same time, the shutdown of the molecular pump 400 will also cause the vacuum environment in the vacuum chamber 300 to be unable to be maintained, and it is necessary to restart and re-evacuate; while the present application only disconnects the circulation pipeline 200 in real time when necessary (that is, when there is an abnormality in the gas flow). When there is an abnormality in the gas flow, the abnormal gas flow of the intake will cause an abnormal vacuum degree, but the molecular pump 400 is not shut down, and the molecular pump 400 can continue to operate, which can restore the vacuum degree information to normal, and can maintain the vacuum environment in the vacuum chamber 300, thereby reducing the time and energy consumption required for re-evacuation, thereby reducing unnecessary downtime and improving production efficiency; after the vacuum degree information returns to normal (that is, eliminating the intake problem), it is only necessary to open the throttling component to connect the circulation pipeline 200 to restart operation. Disconnecting the circulation pipeline 200 in real time can quickly reduce the intake volume, thereby avoiding potential damage caused by the slow closing speed of the molecular pump 400. This rapid response mechanism greatly improves the safety and stability of the molecular pump 400. At the same time, it takes 5-10 minutes for the molecular pump 400 to go from the running state to the shutdown state. The time is too long so that the shutdown plan cannot prevent the vacuum chamber 300 from being contaminated by abnormal conditions such as atmospheric leakage or oil vapor pollution. However, this system can quickly disconnect the circulation pipeline and trap the abnormal gas in the pipeline to prevent it from contaminating the vacuum chamber 300.

[0053] Furthermore, when there is no abnormality in the gas information but there is an abnormality in the vacuum information, the control chip 10 controls the molecular pump 400 to shut down.

[0054] For example, when the intake gas flow is normal and the vacuum degree is abnormal, it indicates that the vacuum chamber 300 itself is leaking and the molecular pump 400 needs to be shut down to prevent the molecular pump 400 from being damaged. Therefore, when the control chip 10 detects that the vacuum degree data is abnormal, the control chip 10 sends a shutdown command to the molecular pump 400 to stop the molecular pump 400 from running, so as to reduce the damage to the molecular pump 400 caused by the abnormal vacuum degree in the vacuum chamber 300.

[0055] In a specific embodiment, see Figure 1, the gas enters the controller 100 through the sealed air intake pipe, and the controller 100 obtains the gas flow information of the intake through its internal flow meter, and uploads the flow data to the control chip 10; after the control chip 10 obtains the flow data, it compares it with the target flow, and calculates the flow control parameters, and sends them to the controller 100 for flow control; at the same time, the control chip 10 will select a suitable electromagnetic throttle valve according to the gas flow size, and open the corresponding electromagnetic throttle valve to allow the gas to pass. For example, when the gas flow is small, the control chip 10 will choose to let the gas pass through the first throttling component 211 (that is, the small flow electromagnetic throttle valve), then the control chip 10 will send an opening command to the small flow electromagnetic throttle valve, and send a closing command to the second throttling component 221 (that is, the medium flow electromagnetic throttle valve) and the third throttling component 231 (that is, the large flow electromagnetic throttle valve). At this time, the small flow electromagnetic throttle valve is opened and the medium flow electromagnetic throttle valve and the large flow electromagnetic throttle valve are closed, and the gas enters the vacuum chamber 300 through the small flow electromagnetic throttle valve. The solution can also open multiple electromagnetic throttle valves at the same time, and adapt to more intake flow rates by combining electromagnetic throttle valves. For example, when the intake flow rate is large, the control chip 10 will choose to let the gas pass through three electromagnetic throttle valves at the same time, then it will send an opening command to the electromagnetic throttle valve with a small flow rate, the electromagnetic throttle valve with a medium flow rate, and the electromagnetic throttle valve with a large flow rate, and all three electromagnetic throttle valves will be opened, and the gas will enter the vacuum chamber 300 through the three electromagnetic throttle valves in parallel.

[0056] When the control chip 10 finds that the flow data is abnormal (that is, the gas information is abnormal), it will close all the electromagnetic throttle valves, and send a closing command to the small flow electromagnetic throttle valve, the medium flow electromagnetic throttle valve and the large flow electromagnetic throttle valve; at this time, the gas will not enter the vacuum chamber 300, and the molecular pump 400 can continue to operate without being affected by the intake abnormality; until the fault is eliminated, the intake flow control part can be restarted.

[0057] The molecular pump 400 continuously evacuates the vacuum chamber 300, and the vacuum gauge 13 monitors the vacuum degree of the vacuum chamber 300 and sends a vacuum degree signal to the control chip 10; when the control chip 10 finds that the vacuum degree data is abnormal (that is, the vacuum degree information is abnormal), it will send a shutdown command to the molecular pump 400 to stop the molecular pump 400 from running, so as to reduce the damage caused to the molecular pump 400 by the vacuum degree abnormality in the vacuum chamber 300.

[0058] [Example 2]

[0059] Furthermore, the throttling component includes: a throttle valve and a solenoid valve, the throttle valve is arranged on the circulation pipeline 200; the solenoid valve is arranged on the circulation pipeline 200, and the solenoid valve and the throttle valve correspond one to one; wherein the control chip 10 controls the solenoid valve according to the gas information, thereby controlling the on and off state of each circulation pipeline 200.

[0060] Specifically, a solenoid valve is also provided on the circulation pipeline 200, and the solenoid valve corresponds to the throttle valve one by one, that is, each throttle valve is connected to a solenoid valve, and the solenoid valves are all connected to the vacuum chamber 300; the control chip 10 automatically selects a suitable throttle valve according to the real-time intake gas flow rate, and controls the on-off of the solenoid valve after the corresponding throttle valve, thereby controlling the on-off of each circulation pipeline 200. When the gas flow is abnormal, the control chip 10 will control all the solenoid valves to close quickly to prevent the abnormal gas from damaging the molecular pump 400. The rapid response capability of the solenoid valve greatly improves the safety and stability of the molecular pump 400. The molecular pump 400 avoids the stress caused by sudden flow shock, which helps to reduce mechanical wear and extend the service life of the molecular pump 400; the intake flow is buffered by the throttle valve, and the pressure is reduced to prevent shock to the molecular pump 400, and the on-off state of the corresponding circulation pipeline 200 is controlled by the solenoid valve.

[0061] Furthermore, the first circulation pipeline 210 is also provided with a first throttle valve 212 and a first solenoid valve 213, and the on-off state of the first circulation pipeline 210 is controlled by the on-off state of the first solenoid valve 213; the second circulation pipeline 220 is also provided with a second throttle valve 222 and a second solenoid valve 223, and the on-off state of the second circulation pipeline 220 is controlled by the on-off state of the second solenoid valve 223; the third circulation pipeline 230 is also provided with a third throttle valve 232 and a third solenoid valve 233, and the on-off state of the third circulation pipeline 230 is controlled by the on-off state of the third solenoid valve 233.

[0062] For example, the first circulation pipeline 210, the first throttle valve 212 and the first solenoid valve 213 correspond one to one; the second circulation pipeline 220, the second throttle valve 222 and the second solenoid valve 223 correspond one to one; the third circulation pipeline 230, the third throttle valve 232 and the third solenoid valve 233 correspond one to one.

[0063] Preferably, in this embodiment, the first throttle valve 212 is a small flow throttle valve, the second throttle valve 222 is a medium flow throttle valve, and the third throttle valve 232 is a large flow throttle valve.

[0064] In a specific embodiment, see Figure 2, the gas enters the controller 100 through the sealed air intake pipe, and the controller 100 obtains the flow information of the intake air through its internal flow meter, and uploads the flow data to the control chip 10; after the control chip 10 obtains the flow data, it compares it with the target flow, and calculates the flow control parameters, and sends them to the controller 100 for flow control. At the same time, the control chip 10 will select a suitable throttle valve according to the gas flow, and open the solenoid valve corresponding to the throttle valve to allow the gas to pass. For example, when the gas flow is small, the control chip 10 will choose to let the gas pass through the first throttle valve 212 (that is, a small flow throttle valve), then it will send an opening command to the first solenoid valve 213, and send a closing command to the second solenoid valve 223 and the third solenoid valve 233. At this time, the first solenoid valve 213 is opened and the second solenoid valve 223 and the third solenoid valve 233 are closed, and the gas enters the vacuum chamber 300 through the small flow throttle valve. This solution can also open multiple solenoid valves at the same time, and adapt to more intake flows by combining throttle valves. For example, when the intake air flow is large, the control chip 10 will choose to let the gas pass through three throttle valves at the same time, then it will send an opening command to the first solenoid valve 213, the second solenoid valve 223 and the third solenoid valve 233, all three solenoid valves are opened, and the gas enters the vacuum chamber 300 through the three throttle valves in parallel.

[0065] When the control chip 10 finds that the flow data is abnormal (that is, the gas information is abnormal), it will close all the solenoid valves and send a closing command to the first solenoid valve 213, the second solenoid valve 223 and the third solenoid valve 233; at this time, the gas will not enter the vacuum chamber 300, and the molecular pump 400 can continue to operate without being affected by the abnormal intake; until the fault is eliminated, the intake flow control part can be restarted.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A vacuum locking protection system, characterized in that: The vacuum locking protection system comprises: A controller (100), the controller (100) being used for air intake; A flow regulating component, the flow regulating component being provided with a first air inlet end and a first air outlet end, the first air inlet end being connected to the air outlet end of the controller (100), and a plurality of flow pipelines (200) being provided in the flow regulating component, wherein the flow limits of the plurality of flow pipelines (200) are different; A vacuum chamber (300), wherein an air inlet end of the vacuum chamber (300) is connected to the first air outlet end; A molecular pump (400), wherein an air extraction end of the molecular pump (400) is connected to an air outlet end of the vacuum chamber (300); A control chip (10), wherein the control chip (10) is connected to the controller (100), the flow regulating component, the vacuum chamber (300) and the molecular pump (400); The control chip (10) controls the on / off state of the plurality of flow pipes (200) and the start / stop state of the molecular pump (400) according to the gas information flowing through the controller (100) and the vacuum degree information of the vacuum chamber (300).

2. The vacuum locking protection system according to claim 1, characterized in that: The circulation pipeline (200) is provided with a throttling component; The control chip (10) controls the throttling component according to the gas information, thereby controlling the on / off state of each of the flow pipelines (200).

3. The vacuum locking protection system according to claim 1, characterized in that: The number of the plurality of circulation pipelines (200) is three, namely a first circulation pipeline (210), a second circulation pipeline (220) and a third circulation pipeline (230); The first circulation pipeline (210) is provided with a first throttling component (211), and the on-off state of the first circulation pipeline (210) is controlled by the on-off state of the first throttling component (211); The second circulation pipeline (220) is provided with a second throttling component (221), and the on-off state of the second circulation pipeline (220) is controlled by the on-off state of the second throttling component (221); The third circulation pipeline (230) is provided with a third throttling component (231), and the on-off state of the third circulation pipeline (230) is controlled by the on-off state of the third throttling component (231).

4. The vacuum locking protection system according to claim 3, characterized in that: The control chip (10) controls the on / off states of the first circulation pipeline (210), the second circulation pipeline (220) and the third circulation pipeline (230) according to the gas information.

5. The vacuum locking protection system according to claim 1, characterized in that: The vacuum locking protection system also includes: A vacuum gauge (13), wherein the vacuum gauge (13) is connected to the vacuum chamber (300) and the control chip (10), and the vacuum gauge (13) is used to monitor the vacuum degree information.

6. The vacuum locking protection system according to claim 1, characterized in that: When the gas information is abnormal, the control chip (10) controls the plurality of flow pipelines (200) to be disconnected.

7. The vacuum locking protection system according to claim 1, characterized in that: When there is no abnormality in the gas information but there is an abnormality in the vacuum degree information, the control chip (10) controls the molecular pump (400) to shut down.

8. The vacuum locking protection system according to claim 2, characterized in that: The throttling component comprises: a throttle valve, the throttle valve being arranged on the circulation pipeline (200); A solenoid valve, the solenoid valve being arranged on the circulation pipeline (200), and the solenoid valve and the throttle valve corresponding to each other one by one; The control chip (10) controls the solenoid valve according to the gas information, thereby controlling the on / off state of each of the flow pipelines (200).

9. The vacuum locking protection system according to claim 3, characterized in that: The first circulation pipeline (210) is also provided with a first throttle valve (212) and a first electromagnetic valve (213), and the on-off state of the first circulation pipeline (210) is controlled by the on-off state of the first electromagnetic valve (213); The second circulation pipeline (220) is also provided with a second throttle valve (222) and a second solenoid valve (223), and the on-off state of the second circulation pipeline (220) is controlled by the on-off state of the second solenoid valve (223); The third circulation pipeline (230) is also provided with a third throttle valve (232) and a third electromagnetic valve (233), and the on-off state of the third circulation pipeline (230) is controlled by the on-off state of the third electromagnetic valve (233).

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