Active vibration isolation platform based on suspension type springs
By designing an active vibration isolation platform based on suspension springs and using a combination of parallel vibration isolation legs and voice coil motors, it solves the problem that traditional vibration isolation devices are difficult to cope with the simultaneous low-frequency and high-frequency vibration in complex environments, and achieves effective vibration isolation and high-precision positioning of 1Hz~150Hz vibrations.
Patent Information
- Application Number
- CN202421811884.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-05-16
- Estimated Expiration
- 2034-07-30
AI Technical Summary
Traditional vibration isolation devices are difficult to meet the vibration isolation requirements of low-frequency and high-frequency vibrations in complex environments, and have problems such as large space, narrow vibration isolation bandwidth, poor system positioning accuracy, and weak vibration isolation capabilities for complex vibration environments.
An active vibration isolation platform based on suspended springs is designed, using three parallel and regular triangular vibration isolation legs. Each vibration isolation leg is equipped with three parallel springs and two voice coil motors in orthogonal directions. The six-degree of freedom control of the platform is achieved through the active control device and the passive vibration damping device.
It realizes effective vibration isolation for 1Hz~150Hz vibration interference, has a strong load-bearing capacity of up to 3000kg, has a simple structure, high stability, and is accurate in positioning, which can effectively isolate vibration interference in complex environments.
Smart Images
Figure CN222880217U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vibration isolation devices, in particular to an active vibration isolation platform based on a suspension spring. Background Art
[0002] At present, the semiconductor industry is developing rapidly. The precision requirements of semiconductor production equipment are getting higher and higher, and the equipment is becoming more and more sensitive to environmental requirements such as micro-vibration. A small amount of micro-vibration will reduce the output yield of the equipment or even make the equipment unable to work normally. Therefore, the isolation of micro-vibration is becoming more and more important.
[0003] Micro-vibration caused by external environmental vibration and internal reaction force of equipment is one of the key factors restricting the measurement accuracy of ultra-precision instruments and the manufacturing accuracy of ultra-precision processing equipment. High-performance precision micro-vibration isolation technology has become a core key technology in the fields of precision engineering and ultra-precision manufacturing. The research on this technology has important practical significance and application value. The vibration control part is the core of the vibration isolation platform. For medium and high frequency vibration, passive vibration isolation is mostly used. Passive vibration isolation has a simple structure, reliable operation, and is independent of power supply. It can effectively isolate medium and high frequency vibration interference. For low frequency or even ultra-low frequency vibration, active vibration isolation is mostly used. However, the environment in which precision instruments are located is complex. It is not just a single low frequency vibration or high frequency vibration. Often low frequency vibration and high frequency vibration exist at the same time. It is difficult for traditional vibration isolation devices to meet the vibration isolation requirements of such complex environment vibration. Although active and passive hybrid vibration isolation devices have appeared, they often have problems such as large space occupation, narrow vibration isolation bandwidth, poor system positioning accuracy, and weak vibration isolation ability for complex vibration environments. Utility Model Content
[0004] The purpose of the utility model is to provide an active vibration isolation platform based on a suspension spring to solve the problems existing in the above-mentioned background technology.
[0005] The technical solution of the utility model is achieved in this way:
[0006] An active vibration isolation platform based on a suspension spring comprises a platform, a vibration isolation leg and a controller. The vibration isolation leg is composed of an active control device, a passive vibration reduction device, a leg and a support seat. The leg comprises a pillar, a top plate and a base. A top plate is vertically installed on the top of the pillar. The active control device is installed on the top of the top plate. A support seat is installed on the top of the active control device. The passive vibration reduction device comprises a spring, a connecting rod and a bracket. The support seat and the leg are fixed by a bracket. A connecting rod is installed between the top plate and the bottom of the bracket. A spring is sleeved on the periphery of the connecting rod. The active control device comprises a vertical voice coil motor, a horizontal voice coil motor, a vertical acceleration sensor and a horizontal acceleration sensor. The support seat comprises a vertical support seat and a horizontal support seat. The horizontal support seat is vertically welded to one side of the top of the vertical support seat. A ball joint is installed in the middle of the vertical support seat and the horizontal support seat. The ball joint of the vertical support seat is connected to the bottom of the platform, and the ball joint of the horizontal support seat is connected to the outside of the platform. The vibration isolation leg is three regular triangles distributed around the platform.
[0007] Furthermore, the platform is welded from steel plates into a circular frame in which reinforced concrete is poured.
[0008] Furthermore, the ball joint contact surface between the platform and the transverse support seat is a rectangular section.
[0009] Furthermore, the spring is a metal spring.
[0010] Furthermore, a thread is provided on the top of the connecting rod, and the connecting rod is fixed to the top plate by bolts.
[0011] Furthermore, there are three brackets distributed in an equilateral triangle.
[0012] Furthermore, a base is vertically welded to the bottom of the pillar, the base is a circular structure, and mounting holes are arranged around the top of the base.
[0013] Furthermore, the controller is placed on the ground, and the controller is connected to the vertical acceleration sensor, the horizontal acceleration sensor, the vertical voice coil motor and the horizontal voice coil motor through cables.
[0014] The beneficial effects of the utility model are:
[0015] The utility model realizes load-bearing through three vibration isolation legs arranged in parallel and in an equilateral triangle, and each vibration isolation leg is provided with three parallel springs, with strong load-bearing capacity, which can realize a load of 3000kg; and each vibration isolation leg is provided with two voice coil motors in orthogonal directions, and three vibration isolation legs have a total of six voice coil motors, which are accurately positioned and can realize six-degree-of-freedom control of the platform; the utility model has a simple structure and high stability, and has a good vibration isolation effect on vibration interference of 1Hz~150Hz. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a structural schematic diagram of the utility model.
[0017] Figure 2 This is a schematic diagram of the support leg structure of the utility model.
[0018] Figure 3 This is a schematic diagram of the disassembled structure of the supporting legs of the utility model.
[0019] In the figure, 1-platform, 2-vibration isolation leg, 201-active control device, 2011-vertical voice coil motor, 2012-horizontal voice coil motor, 2013-vertical acceleration sensor, 2014-horizontal acceleration sensor, 202-passive vibration reduction device, 2021-spring, 2022-thread, 2023-connecting rod, 2024-bracket, 2025-bolt, 203-leg, 2031-pillar, 2032-base, 2033-mounting hole, 2034-top plate, 204-support seat, 2041-vertical support seat, 2042-lateral support seat, 2043-ball joint, 3-controller. DETAILED DESCRIPTION
[0020] The following will clearly and completely describe the technical solution of the utility model in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] like Figure 1-3As shown, an active vibration isolation platform based on a suspension spring includes a platform 1, a vibration isolation leg 2 and a controller 3, wherein the vibration isolation leg 2 is composed of an active control device 201, a passive vibration reduction device 202, a leg 203 and a support seat 204, wherein the leg 203 includes a pillar 2031, a top plate 2034 and a base 2032, wherein a top plate 2034 is vertically installed on the top of the pillar 2031, wherein the active control device 201 is installed on the top of the top plate 2034, wherein a support seat 204 is installed on the top of the active control device 201, wherein the passive vibration reduction device 202 includes a spring 2021, a connecting rod 2023 and a bracket 2024, wherein the support seat 204 and the leg 203 are fixedly mounted via the bracket 2024, wherein a support seat 204 and a support seat 204 are installed between the top plate 2034 and the bottom of the bracket 2024 A connecting rod 2023, wherein a spring 2021 is sleeved on the periphery of the connecting rod 2023, the active control device 201 comprises a vertical voice coil motor 2011, a horizontal voice coil motor 2012, a vertical acceleration sensor 2013 and a horizontal acceleration sensor 2014, the support seat 204 comprises a vertical support seat 2041 and a transverse support seat 2042, the transverse support seat 2042 is vertically welded to one side of the top of the vertical support seat 2041, a ball joint 2043 is installed in the middle position of the vertical support seat 2041 and the transverse support seat 2042, the ball joint 2043 of the vertical support seat 2041 is connected to the bottom of the platform 1, the ball joint 2043 of the transverse support seat 2042 is connected to the outer side of the platform 1, and the vibration isolation legs 2 are three equilateral triangles distributed around the platform 1.
[0022] The platform 1 is formed by welding steel plates into a circular frame in which reinforced concrete is poured.
[0023] The contact surface between the platform 1 and the ball joint 2043 of the transverse support seat 2042 is a rectangular section.
[0024] The spring 2021 is a metal spring.
[0025] The top of the connecting rod 2023 is provided with a thread 2022 , and the connecting rod 2024 is bolted and fixed to the top plate 2034 by bolts 2025 .
[0026] There are three brackets 2024 distributed in a regular triangle.
[0027] A base 2032 is vertically welded to the bottom of the pillar 2031 . The base 2032 is a circular structure, and mounting holes 2033 are formed around the top of the base 2032 .
[0028] The controller 3 is placed on the ground, and is connected to the vertical acceleration sensor 2013, the horizontal acceleration sensor 2014, the vertical voice coil motor 2011 and the horizontal voice coil motor 2012 through cables.
[0029] During operation, the precision instrument is placed on the platform 1, and the nine springs 2021 of the three vibration isolation legs 2 realize load-bearing; the vibration signal is collected by the vertical acceleration sensor 2013 and the horizontal acceleration sensor 2014, and then the signal is transmitted to the controller 3; when the vibration source is vertically high-frequency, high-frequency vibration isolation is achieved through the spring 2021; when the vibration source is vertically low-frequency, the vertical voice coil motor 2011 is controlled by the controller 3 to achieve low-frequency vibration reduction; when the vibration source is horizontal, vibration reduction is achieved through the horizontal voice coil motor 2012.
[0030] Each vibration isolation leg 2 is provided with two voice coil motors in orthogonal directions. The three vibration isolation legs 2 have a total of six voice coil motors, which can realize six-degree-of-freedom control of the platform 1.
[0031] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. An active vibration isolation platform based on a suspension spring, comprising a platform, a vibration isolation leg and a controller, characterized in that: The vibration isolation leg is composed of an active control device, a passive vibration reduction device, a leg and a support seat, the leg includes a pillar, a top plate and a base, the top plate is vertically installed on the top of the pillar, the active control device is installed on the top of the top plate, the support seat is installed on the top of the active control device, the passive vibration reduction device includes a spring, a connecting rod and a bracket, the support seat and the leg are fixed by the bracket, a connecting rod is installed between the top plate and the bottom of the bracket, and a spring is sleeved on the periphery of the connecting rod, the active control device includes a vertical voice coil motor, a horizontal voice coil motor, a vertical acceleration sensor and a horizontal acceleration sensor, the support seat includes a vertical support seat and a transverse support seat, the transverse support seat is vertically welded to one side of the top of the vertical support seat, a ball joint is installed in the middle of the vertical support seat and the transverse support seat, the ball joint of the vertical support seat is connected to the bottom of the platform, and the ball joint of the transverse support seat is connected to the outside of the platform, and the vibration isolation leg is three regular triangles distributed around the platform.
2. The active vibration isolation platform based on suspension spring according to claim 1, characterized in that: The platform is welded from steel plates into a circular frame in which reinforced concrete is poured.
3. The active vibration isolation platform based on suspension spring according to claim 1, characterized in that: The ball joint contact surface between the platform and the transverse support seat is a rectangular section.
4. The active vibration isolation platform based on suspension springs according to claim 1, characterized in that: The spring is a metal spring.
5. The active vibration isolation platform based on suspension spring according to claim 1, characterized in that: The top of the connecting rod is provided with a thread, and the connecting rod is fixed to the top plate by bolts.
6. The active vibration isolation platform based on suspension springs according to claim 1, characterized in that: There are three brackets distributed in a regular triangle.
7. The active vibration isolation platform based on suspension springs according to claim 1, characterized in that: A base is vertically welded at the bottom of the pillar, the base is in a circular structure, and mounting holes are arranged around the top of the base.
8. The active vibration isolation platform based on suspension springs according to claim 1, characterized in that: The controller is placed on the ground and is connected with a vertical acceleration sensor, a horizontal acceleration sensor, a vertical voice coil motor and a horizontal voice coil motor through cables.