Automatic shielding structure for preventing gas from volatilizing downwards in vacuum cavity
By designing an automatic shading structure in a vacuum equipment, using the shaft to drive the connecting plate and the shading plate to rotate, and controlling the starting position of the shading plate, the problem that traditional butterfly valves are difficult to ensure gas uniformity, the stability and uniformity of gas circulation are achieved, and the versatility and efficiency of the equipment are improved.
Patent Information
- Application Number
- CN202422015468.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-20
- Publication Date
- 2025-05-16
- Estimated Expiration
- 2034-08-20
AI Technical Summary
When traditional butterfly valves regulate the gas flow rate inside the vacuum equipment, it is difficult to ensure the uniformity of gas passing through the valve. Especially in application scenarios where gas uniformity is extremely high, the use of butterfly valves is often difficult to meet the needs.
An automatic shading structure is designed to drive the connecting plate and the shading plate to rotate through the shaft to control the starting position of the shading plate, thereby achieving uniformity of gas when passing through the notch. The shielding plate is a rectangular panel made of stainless steel, which can block volatile gas during rotation and allow the flow-guiding gas to pass smoothly.
It effectively maintains the stability and uniformity of gas flow, reduces changes in gas flow velocity and flow direction caused by valve opening and closing, improves the versatility and efficiency of the equipment, and reduces the cost and time consumption of replacing valves of different specifications.
Smart Images
Figure CN222880346U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to an automatic shielding structure, in particular to an automatic shielding structure for blocking gas from volatilizing downwards in a vacuum cavity. Background Art
[0002] In the field of vacuum equipment technology, especially in vacuum environments where highly uniform gas flow needs to be maintained, such as semiconductor manufacturing, materials science research, and precision instrument testing, precise control and uniform distribution of gas flow are crucial. Traditionally, the method of regulating the gas flow inside vacuum equipment mainly relies on the use of butterfly valves. The butterfly valve changes the opening of the valve by rotating its circular valve plate, thereby adjusting the gas flow. However, this adjustment method has significant limitations: since the rotational motion trajectory of the butterfly valve is circular, it is difficult to ensure the uniformity of the gas passing through the valve during its opening and closing process. Especially in application scenarios where gas uniformity is extremely high, the use of butterfly valves is often difficult to meet the needs.
[0003] Specifically, during the adjustment process of the butterfly valve, as the rotation angle of the valve plate changes, the effective flow area and flow resistance distribution of the gas through the valve will change, resulting in uneven gas flow rate and flow direction, which in turn affects the uniformity of gas distribution inside the vacuum environment. This unevenness may cause a series of problems, such as local accumulation of volatile gases after heating, increased temperature gradients, and even affect the stability of the process and product quality. Utility Model Content
[0004] In order to solve the above technical problems, the utility model provides an automatic shielding structure in a vacuum chamber to block the downward volatilization of gas. The automatic shielding structure drives the connecting plate and the shielding plate to rotate through the shaft to control the starting position of the shielding plate, so as to achieve the purpose of not affecting the uniformity of the gas passing through the slot. Among them, the design of the rectangular shielding plate made of stainless steel allows it to block the volatile gas while allowing the guide gas to pass smoothly through the gap between the shielding plate and the cavity wall during the rotation process, effectively maintaining the stability of the gas flow and improving the uniformity of the gas flow.
[0005] The technical solution adopted by the utility model to solve its technical problems is:
[0006] An automatic shielding structure for blocking gas from volatilizing downward in a vacuum chamber, the vacuum chamber comprising a chamber wall, the chamber wall being provided with a slot for gas to pass through, a gas channel being provided below the slot, the automatic shielding structure comprising a rotatable shaft located below the chamber wall, an outer surface along the axial direction of the shaft, the shaft being fixedly connected with a connecting plate, the connecting plate being fixedly connected with a shielding plate, the shielding plate being adapted to the slot, and the cross-sectional area of the shielding plate being greater than the cross-sectional area of the slot.
[0007] In one implementation of the utility model, the shielding plate is a rectangular panel made of stainless steel.
[0008] In one implementation of the present invention, the connecting plate is also a rectangular panel.
[0009] In one embodiment of the present invention, the cross section of the notch is rectangular.
[0010] In an embodiment of the present utility model, both ends of the connecting plate and the shielding plate are fixedly connected with reinforcing plates.
[0011] In one embodiment of the utility model, the cross-sections of the connecting plate and the shielding plate form a right-angled triangle structure, the connecting plate is the long right-angled side of the right-angled triangle structure, and the shielding plate is the short right-angled side of the right-angled triangle structure.
[0012] In one implementation of the present invention, the connecting plate and the shielding plate are an integrated structure.
[0013] In an embodiment of the present utility model, one end of the shaft is connected to a driving mechanism via a coupling, and the driving mechanism is used to drive the shaft to rotate.
[0014] In one embodiment of the present invention, the driving mechanism is a rotary cylinder.
[0015] In one implementation of the utility model, the other end of the shaft is sleeved with a shaft sleeve.
[0016] The beneficial effects of the utility model are:
[0017] The utility model provides an automatic shielding structure for blocking gas from volatilizing downward in a vacuum chamber. The shaft drives the connecting plate and the shielding plate to rotate to control the starting position of the shielding plate, so as to achieve the purpose of not affecting the uniformity of the gas passing through the notch. Among them, by adjusting the size of the shielding plate, it is suitable for the needs of different rectangular notches, so as not to affect the uniformity of the gas passing through the notch. Therefore, the automatic shielding structure adjusts the starting position of the shielding plate by controlling the rotation of the shaft, so as to achieve precise control of the uniformity of the gas passing through the notch. The design of the rectangular shielding plate made of stainless steel enables it to block the volatile gas while allowing the guide gas to pass smoothly through the gap between the shielding plate and the cavity wall during the rotation process, effectively maintaining the stability of the gas flow, reducing the changes in gas flow rate and flow direction caused by the opening and closing of the valve, and thus improving the uniformity of the gas flow. In addition, the automatic shielding structure also has a high degree of flexibility and adaptability. By adjusting the size of the rectangular shielding plate, the needs of notches of different sizes and shapes can be flexibly matched to ensure that the uniformity of gas flow can be achieved under various working conditions. This design not only improves the versatility and efficiency of the equipment, but also reduces the cost and time consumption caused by replacing valves of different specifications. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 This is a structural schematic diagram of the automatic shielding structure provided by the utility model.
[0019] Figure 2 This is a schematic diagram of the automatic shielding structure provided by the utility model in a closed state.
[0020] Figure 3 This is a schematic diagram of the automatic shielding structure provided by the utility model in an open state.
[0021] Figure 4 A three-dimensional diagram of the automatic shielding structure provided by the utility model.
[0022] Figure 5 A three-dimensional diagram of a partial structure of the automatic shielding structure provided by the utility model.
[0023] In the figure: 1. cavity wall; 2. notch; 3. shaft; 4. connecting plate; 5. shielding plate; 6. gas channel; 7. reinforcing plate; 8. coupling; 9. shaft seat. DETAILED DESCRIPTION
[0024] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.
[0025] In the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0026] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0027] See also Figure 1-5 As shown, an automatic shielding structure for blocking gas from volatilizing downward in a vacuum chamber, the vacuum chamber includes a chamber wall 1, the chamber wall 1 is provided with a slot 2 for gas to pass through, below the slot 2 is a gas channel 6, the automatic shielding structure includes a rotatable shaft 3 located below the chamber wall 1, along the outer surface of the shaft 3 in the axial direction, the shaft 3 is fixedly connected with a connecting plate 4, the connecting plate 4 is fixedly connected with a shielding plate 5, the shielding plate 5 is adapted to the slot 2, and the cross-sectional area of the shielding plate 5 is larger than the cross-sectional area of the slot 2.
[0028] In some embodiments, the shielding plate 5 is a rectangular panel made of stainless steel.
[0029] In this embodiment, when the automatic shielding structure is in the closed state, the shaft 3 drives the shielding plate 5 to rotate through the connecting plate 4, so that the shielding plate 5 rotates to be parallel to the lower surface of the cavity wall 1 and is located directly below the notch 2. At this time, there is a gap between the shielding plate 5 and the lower surface of the cavity wall 1, and the gap can be set to 1-2mm, which is not specifically limited. Since the cross-sectional area of the shielding plate 5 is larger than the cross-sectional area of the notch 2, the shielding plate 5 can completely cover the notch 2. At this time, the mixed gas in the vacuum cavity flows downward through the notch 2, and the mixed gas includes high-temperature volatile gas and guide gas (nitrogen). The high-temperature volatile gas flows downward to the shielding plate 5. Since the shielding plate 5 is a low-temperature stainless steel plate, the high-temperature volatile gas will condense on the surface of the shielding plate 5 when it encounters the low-temperature stainless steel shielding plate 5, thereby playing a role in blocking the volatile gas and preventing the volatile gas from flowing to the gas channel 6 below. The guide gas flows to the gas channel 6 below through the gap between the shielding plate 5 and the cavity wall 1, ensuring the normal flow of the guide gas.
[0030] Therefore, when the automatic shielding structure is in a closed state, the high-temperature volatile gas will condense on the surface of the shielding plate 5 when encountering the low-temperature stainless steel shielding plate 5, thereby playing a barrier role for the volatile gas; and the guide gas will flow normally through the gap between the shielding plate 5 and the cavity wall 1 to the gas channel 6 below, thereby achieving the purpose of not affecting the uniformity of the gas passing through the slot 2.
[0031] When the automatic shielding structure is in the open state, the shaft 3 drives the shielding plate 5 to rotate through the connecting plate 4, so that the shielding plate 5 is away from the lower surface of the cavity wall 1, so that the high-temperature volatile gas and the guide gas in the mixed gas can flow through the slot 2 to the gas channel 6 below.
[0032] In some embodiments, the connecting plate 4 is also a rectangular panel.
[0033] In some embodiments, the cross section of the notch 2 is rectangular.
[0034] In some embodiments, both ends of the connecting plate 4 and the shielding plate 5 are fixedly connected with a reinforcing plate 7. The reinforcing plate 7 is provided to improve the connection strength between the connecting plate 4 and the shielding plate 5.
[0035] In some embodiments, the cross-sections of the connecting plate 4 and the shielding plate 5 form a right-angled triangle structure, the connecting plate 4 is the long right-angled side of the right-angled triangle structure, and the shielding plate 5 is the short right-angled side of the right-angled triangle structure.
[0036] In some embodiments, the connecting plate 4 and the shielding plate 5 are an integrated structure. The connection strength between the connecting plate 4 and the shielding plate 5 of the integrated structure is higher and the service life is longer.
[0037] In some embodiments, one end of the shaft 3 is connected to a driving mechanism (not shown in the figure) via a coupling 8, and the driving mechanism is used to drive the shaft 3 to rotate.
[0038] Optionally, the driving mechanism is a rotary cylinder.
[0039] In some embodiments, the other end of the shaft 3 is sleeved with a shaft sleeve 9. The shaft 3 is fixed to a base plate or a fixed workbench or other equipment through the shaft sleeve 9 to improve the stability of the shaft 3 during the rotational movement.
[0040] The automatic shielding structure provided by the utility model drives the connecting plate 4 and the shielding plate 5 to rotate through the shaft 3 to control the starting position of the shielding plate 5, so as to achieve the purpose of not affecting the uniformity of the gas passing through the slot 2. Among them, by adjusting the size of the shielding plate 5 to meet the needs of different rectangular slots 3, the uniformity of the gas passing through the slot 3 here is not affected. Therefore, the automatic shielding structure adjusts the starting position of the shielding plate 5 by controlling the rotation of the shaft 3, so as to achieve precise control of the uniformity of the gas passing through the slot 3. The design of the rectangular shielding plate 5 made of stainless steel enables it to block the volatile gas while allowing the guide gas to pass smoothly through the gap between the shielding plate 5 and the cavity wall 1 during the rotation process, effectively maintaining the stability of the gas flow, reducing the changes in gas flow rate and flow direction caused by the opening and closing of the valve, and thus improving the uniformity of the gas flow. In addition, the automatic shielding structure also has a high degree of flexibility and adaptability. By adjusting the size of the rectangular shielding plate 5, the needs of slots 3 of different sizes and shapes can be flexibly matched to ensure that the uniformity of gas flow can be achieved under various working conditions. This design not only improves the versatility and efficiency of the equipment, but also reduces the cost and time consumption caused by replacing valves of different specifications.
[0041] In summary, the automatic shielding structure based on the shaft-driven rectangular panel has shown significant advantages in solving the shortcomings of traditional butterfly valves in gas uniformity control, and provides a new solution for the precise adjustment and uniform distribution of gas flow inside vacuum equipment.
[0042] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0043] The above embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model.
[0044] The principles and implementation methods of the utility model are described in this article using specific examples. The description of the above examples is only used to help understand the method and core idea of the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model. Therefore, the scope of protection of the utility model patent shall be based on the attached claims.
Claims
1. An automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber, characterized in that: The vacuum chamber includes a chamber wall, the chamber wall is provided with a slot for gas to pass through, and the gas channel is below the slot. The automatic shielding structure includes a rotatable shaft located below the chamber wall, and an outer surface along the axial direction of the shaft. The shaft is fixedly connected with a connecting plate, and the connecting plate is fixedly connected with a shielding plate. The shielding plate is adapted to the slot, and the cross-sectional area of the shielding plate is larger than the cross-sectional area of the slot.
2. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 1, characterized in that: The shielding plate is a rectangular panel made of stainless steel.
3. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 2, characterized in that: The connecting plate is also a rectangular panel.
4. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 3, characterized in that: The cross section of the notch is rectangular.
5. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 4, characterized in that: Both ends of the connecting plate and the shielding plate are fixedly connected with reinforcing plates.
6. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 5, characterized in that: The cross-sections of the connecting plate and the shielding plate form a right-angled triangle structure, the connecting plate is the long right-angled side of the right-angled triangle structure, and the shielding plate is the short right-angled side of the right-angled triangle structure.
7. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 1, characterized in that: The connecting plate and the shielding plate are an integrated structure.
8. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 1, characterized in that: One end of the shaft is connected to a driving mechanism via a coupling, and the driving mechanism is used to drive the shaft to rotate.
9. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 8, characterized in that: The driving mechanism is a rotary cylinder.
10. The automatic shielding structure for preventing gas from volatilizing downward in a vacuum chamber according to claim 8, characterized in that: The other end of the shaft is sleeved with a shaft sleeve.