Probe card automatic remodeling device

Abstract

The utility model discloses an automatic probe card remodeling device, which comprises a plurality of probe card modules, a base body and a rotary control tower, probe cards are correspondingly placed on the probe card modules, the rotary control tower is arranged on the base body and can rotate around the central position on the base body, the number of the probe card modules is multiple, and the probe card modules are arranged on the base body. The probe card modules are arranged on the circumference of the rotating control tower in an array distribution mode, the probe card modules are switched through rotation of the rotating control tower, and the probe cards work on wafers on the wafer carrying table when rotating to a target station. According to the utility model, a plurality of groups of probe cards of different models are combined together at the same time, and through the rotary positioning of the high-precision rotary control tower and the mobile positioning mode of the bidirectional linkage high-precision positioning detector, the rapid switching mode of probe card modules of different models is realized, and the matching positioning function corresponding to different products rapidly is achieved. And the overall working efficiency and production stability of products are improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to an automatic probe card changing device. Background Art

[0002] In the field of semiconductor equipment, during the chip production process, testing methods are required to ensure that the various functions of the chip meet the design requirements. The probe card is a test interface instrument for testing chips. In the prior art, the probe card replacement method is basically a simple "straight line transfer-placement-docking" form, which has great disadvantages and difficulties in grasping and controlling the position accuracy. It is difficult to achieve a direct docking method, and multiple position confirmations and mobile debugging are required. This process wastes a lot of time and information transfer. At present, there is no good direct replacement device with high precision. There are very few probe card replacement technologies in actual application, and they are currently in a very narrow development space, and there is no good docking processing method. Utility Model Content

[0003] In view of the shortcomings of the above-mentioned prior art such as the lack of efficient and high-precision probe card changing devices, the applicant provides a rationally structured probe card automatic changing device that can realize the rapid switching of probe card modules of different models, achieve the matching positioning function of different products, and greatly improve the overall work efficiency and production stability of the product.

[0004] The technical solution adopted by the utility model is as follows:

[0005] A probe card automatic changing device comprises a probe card module, a base body and a rotating tower. The probe card is placed on the probe card module accordingly. The rotating tower is arranged on the base body and can rotate around a center position on the base body. There are multiple probe card modules, which are arranged in an array distribution on the circumference of the rotating tower. The probe card module realizes switching between different probe card modules by rotating the rotating tower. When the probe card rotates to the target station, it works on the wafer on the wafer carrier.

[0006] As a further improvement of the above technical solution:

[0007] The probe card module includes a horizontal positioning module, a lifting module, and a placement plate. The horizontal positioning module is installed on a rotating tower, the lifting module is installed on the horizontal positioning module, and the placement plate is set on the lifting module. The horizontal positioning module realizes two-dimensional angle adjustment in the horizontal direction, and the placement plate is driven by the lifting module to perform lifting and adjustment in the vertical direction.

[0008] A probe identification strip is provided on the body of the probe card. The probe identification strip is the carrier of the probe card model number and positioning information. A positioning detection module is provided on one side of the base body. The positioning detection module detects and identifies the probe card model number contained in the probe identification strip to obtain the model information of the probe card. The positioning detection module detects and identifies the positioning information contained in the probe identification strip to obtain the accurate position of the probe card.

[0009] A positioning detection module is arranged on one side of the base body. The positioning detection module includes a driving device and a positioning detector. The positioning detector is installed on the driving device. The positioning detector moves under the drive of the driving device and is aligned with the probe card module and the probe card directly above.

[0010] The positioning detector uses light, image, sound wave or electromagnetic wave detectors to detect and identify the probe card on the probe card module directly above.

[0011] The positioning detector adopts a visual positioning camera, and the probe identification strip contains the information of the probe card model number and the position marking point, wherein the position marking point is the identification object of the positioning information.

[0012] The probe card module is provided with a notch corresponding to the positioning detector. When the probe card is placed on the probe card module, the probe identification strip is located in the notch of the probe card module, and the positioning detector is aligned with the probe card at the notch for detection.

[0013] The probe card module has a placement plate, and the outer side of the placement plate is provided with the notch.

[0014] A control system is also provided, the control system is connected to the driving device of the rotating tower and the positioning detection module by electrical signals, and the control system is connected to the positioning detector of the positioning detection module by electrical signals.

[0015] The driving device includes a horizontal linear mechanism and a vertical linear mechanism, both of which are composed of a linear guide rail and a movable module located on the linear guide rail; the linear guide rail of the horizontal linear mechanism is installed on the side wall of the base body, the linear guide rail of the vertical linear mechanism is installed on the movable module of the horizontal linear mechanism, and the positioning detector is installed on the movable module of the vertical linear mechanism.

[0016] The beneficial effects of the utility model are as follows:

[0017] The utility model designs six probe cards of different models into independent probe modules with the same communication connection method, and then realizes the rapid switching of probe card modules of different models through the rotation positioning of the high-precision rotating tower and the mobile positioning method of the high-precision positioning detector with two-way linkage, so as to achieve the matching positioning function of quickly corresponding to different products, greatly improving the overall work efficiency and production stability of the product.

[0018] The utility model has the effect of high-precision control and positioning. Six probe card modules are installed on the same rotating tower. The number of axes of the rotating positioning mechanism is small, which can reduce the problem of precision error between switching models and automatically switch models of probe card modules quickly and stably. At the same time, the matching optical positioning ensures the accuracy of switching. Through the ingenious combination of the camera and the rotation of the probe card position, the corresponding probe card model and precise position information can be quickly obtained.

[0019] The utility model is provided with six different types of probe card modules, which can meet the corresponding needs of six products in different forms and realize the fast matching and efficient performance of replacing probe cards required for the six products, thereby meeting the customer's production needs for multiple product docking. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional diagram of the utility model.

[0021] Figure 2 It is a three-dimensional diagram of the utility model.

[0022] Figure 3 It is a top view of the utility model.

[0023] Figure 4 It is a partial enlarged view of the utility model.

[0024] In the figure: 1. probe card module; 2. base body; 3. rotating tower; 4. probe card; 5. horizontal adjustment module; 6. lifting module; 7. placement plate; 8. positioning detection module; 9. driving device; 10. positioning detector; 11. probe identification strip. DETAILED DESCRIPTION

[0025] The specific implementation of the utility model is described below in conjunction with the accompanying drawings.

[0026] like Figures 1 to 4 As shown, the probe card automatic changing device described in the utility model includes a probe card module 1, a base body 2, and a rotating tower 3. The probe card 4 is placed on the probe card module 1 accordingly. The rotating tower 3 is arranged on the base body 2, and the rotating tower 3 can rotate around the center position on the base body 2. The number of probe card modules 1 is multiple, and they are arranged in an array distribution on the circumference of the rotating tower 3. The probe card module 1 realizes the switching between different probe card modules 1 through the rotation of the rotating tower 3, wherein when the probe card 4 rotates to the target station, the probe card 4 works on the wafer on the wafer carrier. The rotating tower 3 preferably adopts a turntable controlled by a high-precision rotary motor, which can achieve a rotation accuracy of ±0.005 angle control. The probe card modules 1 distributed on the rotating tower 3 are preferably six, distributed in a hexagonal array.

[0027] The probe card module 1 includes a horizontal adjustment module 5, a lifting module 6, and a placement plate 7. The horizontal adjustment module 5 is installed on the rotating tower 3, the lifting module 6 is installed on the horizontal adjustment module 5, and the placement plate 7 is arranged on the lifting module 6. The horizontal adjustment module 5 preferably adopts a manual angle table or an electric angle table, which can realize two-dimensional angle adjustment in the horizontal direction and realize horizontal adjustment. The lifting module 6 adopts a Z-axis linear lifting device, preferably a linear motor or a lifting cylinder. The placement plate 7 is driven by the lifting module 6 to lift and adjust in the vertical direction.

[0028] A positioning detection module 8 is arranged on one side of the base body 2. The positioning detection module 8 includes a driving device 9 and a positioning detector 10. The positioning detector 10 is installed on the driving device 9. The positioning detector 10 realizes lateral and vertical linear movement under the drive of the driving device 9. The driving device 9 includes a horizontal linear mechanism and a vertical linear mechanism, both of which are composed of a linear guide and a moving module located on the linear guide. The linear guide of the horizontal linear mechanism is installed on the side wall of the base body 2, the linear guide of the vertical linear mechanism is installed on the moving module of the horizontal linear mechanism, and the positioning detector 10 is installed on the moving module of the vertical linear mechanism, realizing lateral and vertical bidirectional linkage, so that the positioning detector 10 can accurately control the movement. The positioning detector 10 is aligned with the probe card module 1 and the probe card 4 directly above. This position is the target station. The probe card 4 that reaches the target station can work on the wafer on the wafer carrier.

[0029] The probe card 4 is provided with a probe identification strip 11 on its body, and the probe identification strip 11 is a carrier of the probe card model number and positioning information. The positioning detector 10 preferably uses light, image, sound wave, electromagnetic wave and other detectors to detect and identify the probe card 4 on the probe card module 1 directly above. Specifically, the positioning detector 10 detects and identifies the probe card model number contained in the probe identification strip 11 to obtain the model information of the probe card 4. The positioning detector 10 detects and identifies the positioning information contained in the probe identification strip 11 to obtain the accurate position of the probe card 4. Preferably, the positioning detector 10 uses a visual positioning camera, and the probe identification strip 11 contains the information of the probe card model number and the position mark point (mark point), wherein the position mark point is the identification object of the positioning information, such as a "++" pattern.

[0030] The probe card module 1 is provided with a notch corresponding to the positioning detector 10. When the probe card 4 is placed on the probe card module 1, the probe identification strip 11 is located in the notch of the probe card module 1, and the positioning detector 10 can directly align the probe card 4 at the notch for detection. Preferably, the notch is provided on the outer side of the placement plate 7 of the probe card module 1.

[0031] The utility model is also provided with a control system, which is electrically connected to the driving device 9 of the rotating tower 3, the lifting module 6 and the positioning detection module 8 to realize signal transmission and control output. The control system is electrically connected to the positioning detector 10 of the positioning detection module 8 to realize information collection and signal transmission.

[0032] When the utility model is implemented, first, in the preparation stage, six probe card modules 1 are set on the rotating tower 3, and the positioning detector 10 uses a visual positioning camera. The probe identification strip 11 is fixed at the lower position of the probe card 4, and the probe card 4 with the probe identification strip 11 is placed on the placement plate 7 corresponding to the probe card module 1, and the probe identification strip 11 of the probe card 4 is correspondingly located in the notch of the placement plate 7, so that the probe identification strip 11 of the probe card 4 can be exposed to the field of view of the visual positioning camera. The position of the probe card module 1 is debugged, and the two-dimensional angle adjustment of the horizontal X-axis, i.e. the front and rear pitch angle and the Y-axis, i.e. the left and right yaw angle, is achieved through the lifting module 6, so that the lifting module 6 is in a horizontal state to ensure that the probe card 4 is on a precise horizontal plane.

[0033] After aiming the visual positioning camera at the probe card 4 on the probe card module 1 above and photographing it, the probe identification strip 11 on the probe card 4 is obtained and then transmitted to the control system for analysis, reading, identification and saving of the detailed information of the probe identification strip 11. Then, the positions of the probe card module 1 and the probe card 4 at the six positions and the model information carried by the probe card 4 are entered into the control system in advance to prepare for starting the work.

[0034] At the beginning of work, when the probe card module 1 is automatically switched to the probe card 4, the required target probe card module 1 is first rotated to the position directly above the target station where the visual positioning camera is located by rotating the rotating tower 3, and then the position of the visual positioning camera is adjusted by the driving device 9, and the probe identification bar 11 is quickly photographed from the exposed position at the bottom of the probe card 4, so as to obtain the model information of the probe identification bar 11 carried by the probe card 4 at the target station and the precise position of the marking point on the probe identification bar 11.

[0035] If the angle position of the probe card 4 at the target station on the rotating tower 3 deviates, the rotating tower 3 is used to make real-time micro-rotation adjustments to ensure that the probe card 4 is in the best and most accurate position in real time. Then, the lifting module 6 of the probe card module 1 is used to lift the probe card 4 on the placement plate 7 to a corresponding height for operation. When the next model of the probe card 4 needs to be replaced, the rotating tower 3 is used to perform corresponding operations to achieve fast and accurate switching of different models of probe cards 4.

[0036] The utility model uses six groups of probe cards 4 of different models to be combined together at the same time, which can quickly realize the type change measurement, greatly shorten the measurement time and improve the measurement efficiency, and greatly improve the uniformity of accuracy, which is conducive to the standard consistency of interval values ​​and more in line with the actual needs of modern measurement mechanisms. The six probe card modules 1 are installed on the same rotating tower 3, and a high-precision rotary motor is used to provide a high-precision angle control of the horizontal adjustment module 5 to achieve ±0.00 for rotation alignment. The probe card 4 is changed by switching the lifting module of the rotating tower 3 by 60 degrees of circular rotation, realizing the rapid switching of different probe cards 4, greatly improving the efficiency of probe switching.

[0037] The utility model can provide six different probe card module 1 combination modules according to different customer needs, so as to meet the customer's production needs for multiple products. The utility model can independently control the high-precision working position of each probe card module 1, so as to ensure the different requirements of different wafer products for the probe head pressing depth and the high-precision positioning requirements of different positions, and the probe card 4 body can be quickly switched.

[0038] The above description is an explanation of the utility model, not a limitation of the utility model. The utility model can be modified in any form without violating the spirit of the utility model.

Claims

1. A probe card automatic changing device, characterized in that: The invention comprises a probe card module (1), a base body (2), and a rotating tower (3); a probe card (4) is placed on the probe card module (1); the rotating tower (3) is arranged on the base body (2), and the rotating tower (3) can rotate around a central position on the base body (2); there are a plurality of probe card modules (1), which are arranged in an array distribution on the circumference of the rotating tower (3); the probe card module (1) realizes switching between different probe card modules (1) by rotating the rotating tower (3); and the probe card (4) works on a wafer on a wafer carrier when it rotates to a target workstation.

2. The probe card automatic changing device according to claim 1, characterized in that: The probe card module (1) comprises a horizontal positioning module (5), a lifting module (6), and a placement plate (7); the horizontal positioning module (5) is mounted on a rotating tower (3); the lifting module (6) is mounted on the horizontal positioning module (5); the placement plate (7) is arranged on the lifting module (6); the horizontal positioning module (5) realizes two-dimensional angle adjustment in the horizontal direction; and the placement plate (7) is driven by the lifting module (6) to perform lifting and lowering adjustment in the vertical direction.

3. The probe card automatic changing device according to claim 1, characterized in that: The probe card (4) is provided with a probe identification strip (11) on its body. The probe identification strip (11) is a carrier of the probe card model number and positioning information. A positioning detection module (8) is provided on a side surface of the base body (2). The positioning detection module (8) detects and identifies the probe card model number contained in the probe identification strip (11) to obtain the model information of the probe card (4). The positioning detection module (8) detects and identifies the positioning information contained in the probe identification strip (11) to obtain the accurate position of the probe card (4).

4. The probe card automatic changing device according to claim 1, characterized in that: A positioning detection module (8) is arranged on one side of the base body (2); the positioning detection module (8) comprises a driving device (9) and a positioning detector (10); the positioning detector (10) is mounted on the driving device (9); the positioning detector (10) moves under the drive of the driving device (9); and the positioning detector (10) is aligned with the probe card module (1) and the probe card (4) directly above.

5. The probe card automatic changing device according to claim 4, characterized in that: The positioning detector (10) uses a light, image, sound wave or electromagnetic wave detector to detect and identify the probe card (4) on the probe card module (1) directly above.

6. The probe card automatic changing device according to claim 4, characterized in that: The positioning detector (10) adopts a visual positioning camera, and the probe identification strip (11) contains information on the probe card model number and position marking points, wherein the position marking points are identification objects of the positioning information.

7. The probe card automatic changing device according to claim 4, characterized in that: A notch corresponding to the positioning detector (10) is provided on the probe card module (1); when the probe card (4) is placed on the probe card module (1), the probe identification strip (11) is located in the notch of the probe card module (1), and the positioning detector (10) is aligned with the probe card (4) at the notch for detection.

8. The probe card automatic changing device according to claim 7, characterized in that: The probe card module (1) comprises a placement plate (7), and the outer side of the placement plate (7) is provided with the notch.

9. The probe card automatic changing device according to claim 4, characterized in that: A control system is also provided, the control system is connected to the rotating tower (3) and the driving device (9) of the positioning detection module (8) via electrical signals, and the control system is connected to the positioning detector (10) of the positioning detection module (8) via electrical signals.

10. The probe card automatic changing device according to claim 4, characterized in that: The driving device (9) includes a horizontal linear mechanism and a vertical linear mechanism, both of which are composed of a linear guide rail and a movable module located on the linear guide rail; the linear guide rail of the horizontal linear mechanism is installed on the side wall of the base body (2), the linear guide rail of the vertical linear mechanism is installed on the movable module of the horizontal linear mechanism, and the positioning detector (10) is installed on the movable module of the vertical linear mechanism.

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