Equipment for detecting resistivity of alloy sample

Abstract

The utility model belongs to the technical field of monocrystalline silicon production and manufacturing, and relates to equipment for detecting the resistivity of an alloy sample wafer, which comprises a probe in contact with a test point, a support frame for bearing the probe, a pressing block for providing pressure for the support frame, and an adjusting piece in sliding connection with the support frame, the adjusting part is driven to enable the supporting frame to move from the lower limit of the adjusting part to the upper limit of the adjusting part. The beneficial effects of the utility model are that through the mutual movement cooperation of the slide block and the connection block, after the probe contacts with the test point, the slide block is continuously driven to move towards the opposite direction of the test sample, so that the pressure applied to the probe is only the gravity of the pressing block, the stability of the probe in the test process can be improved, and the test efficiency is improved. Meanwhile, the influence of other external forces on a test result can be avoided, the device has the characteristics of rapidness, accuracy and no jitter, and the batch test requirement of a production line is met; and an adjusting rod and a spring are arranged, so that a stable operation condition is provided for the movement of the probe.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal silicon resistivity detection and relates to a device for detecting the resistivity of an alloy sample. Background Art

[0002] The resistivity of silicon wafers is one of its important quality parameters, which will affect its photoelectric conversion efficiency. At present, the resistivity of silicon wafers is mainly tested by a four-probe tester. During the test, the operators use the instrument in different ways, the stability is poor, and the measurement accuracy cannot be guaranteed. Secondly, frequent manual operation and measurement are required, which cannot avoid human errors and increases the labor intensity of repeated operations. In addition, due to the different silicon wafer cutting processes, the thickness of the test samples will be inconsistent. During the measurement process, the detection position of the probe will tilt, resulting in poor contact, which will still cause the test results to deviate seriously from the actual situation and cannot truly reflect the resistivity of the silicon wafer. Therefore, a device for detecting the resistivity of alloy samples is needed to solve the above technical problems. Utility Model Content

[0003] In order to solve the above-mentioned technical problems, the utility model provides a device for detecting the resistivity of alloy samples, which can reduce the labor intensity of personnel's repetitive work, has a fixed test position, high test data accuracy, stable results, and reduces the influence of personnel on the results.

[0004] The technical solution adopted by the utility model is: a device for detecting the resistivity of an alloy sample, which is used to test the resistivity of a test point on the sample, and is characterized in that it includes a probe contacting the test point, a support frame for carrying the probe, a pressure block providing pressure to the support frame, and an adjusting member slidably connected to the support frame, and driving the adjusting member can move the support frame from the lower limit position of the adjusting member to the upper limit position.

[0005] Furthermore, the adjusting member includes a slider connected to the supporting frame, a movable frame slidably connected to the slider, and a limit block arranged on the movable frame and abutting against the slider to limit the movement of the slider, the contact surface between the slider and the limit block is the lower limit, and the upper limit extends along the lower limit in a direction away from the test point.

[0006] Furthermore, the contact surface between the sliding block and the limiting block is arranged perpendicular to the moving direction of the probe.

[0007] Furthermore, the distance between the upper limit position and the lower limit position is at least the length of the probe.

[0008] Furthermore, a slideway parallel to the moving direction of the probe is formed in the movable frame, and the sliding block is inserted into the slideway and slidably connected with the slideway.

[0009] Furthermore, the movable frame is connected to the lead screw via a connecting block, and driving the lead screw to rotate can drive the movable frame and the connecting block to synchronously perform a linear motion parallel to the direction of the probe.

[0010] Furthermore, the lead screw is connected to a drive motor to provide power for its rotation, and the lead screw and the drive motor are both arranged on a base.

[0011] Furthermore, the end of the sliding block away from the moving frame is connected to the supporting frame via an adjusting rod, and the pressing block can abut against the sliding block or the supporting frame.

[0012] Furthermore, the support frame is connected to the end of the adjustment rod away from the slider through a fixing frame.

[0013] Furthermore, a portion of the adjusting rod between the sliding block and the fixing frame is sleeved with a spring.

[0014] The utility model is designed to detect the resistivity of alloy samples. Through the mutual movement and coordination of the slider and the connecting block, after the probe contacts the test point, the slider continues to move in the opposite direction of the test sample, so that the pressure applied to the probe is only the gravity of the pressure block. This can not only improve the stability of the probe during the test, but also avoid the influence of other external forces on the test results. It has the characteristics of fast, accurate and no jitter, and meets the batch testing requirements of the production line; the adjustment rod and the spring are set to achieve the mutual fixation between the support frame and the slider, and the support frame and the fixed frame, provide stable working conditions for the movement of the probe, and avoid the probe from tilting when encountering a test point with inconsistent thickness, resulting in inaccurate measurement results. In addition, such an automated measurement method reduces the error of manual testing, has high detection accuracy, short time consumption, can be automatically controlled, reduces manual participation, and improves test efficiency. It is suitable for fully automatic detection in single crystal silicon rod assembly line processing workshops. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of an embodiment provided by the utility model.

[0016] In the figure:

[0017] 1. Test sample; 2. Probe; 31. Slider; 32. Moving frame; 33. Limit block; 34. Slideway;

[0018] 35. Connecting block; 36. Lead screw; 37. Driving motor; 38. Base; 4. Press block; 5. Support frame;

[0019] 6. Adjusting rod; 61. Spring; 7. Fixing bracket; a. Lower limit; b. Upper limit. DETAILED DESCRIPTION

[0020] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments.

[0021] It should be noted that, in the present embodiment, the probe 2 is slidably and telescopically arranged at the bottom of the support frame 5 , and applying appropriate pressure to the probe 2 can cause the probe 2 to retract into the support frame 5 .

[0022] Reference Figure 1 As shown, a device for detecting the resistivity of an alloy sample is used to test the resistivity of a test point on a sample 1, including a probe 2 in contact with the test point, a support frame 5 for carrying the probe 2, a pressure block 4 for providing pressure to the support frame 5, and an adjustment member slidably connected to the support frame 5, and the driving of the adjustment member can move the support frame 5 from the lower limit a of the adjustment member to the upper limit b. When in use, when the probe 2 contacts the test point, the adjustment member continues to move part of the adjustment member toward the direction of the test sample 1, and the probe 2 begins to retract until the probe 2 retracts into the support frame 5. At this time, the support frame 5 moves from the lower limit a of the adjustment member to the upper limit b. In this process, the pressure block 4 gives a constant pressure to the support frame 5, so that the probe 2 can stably press the test point after retraction. The pressure given to the probe 2 is only the gravity of the pressure block 4, which can not only improve the stability of the probe 2 during the test process, but also avoid the influence of other external forces on the test results. It has the characteristics of fast, accurate and jitter-free, and meets the batch testing requirements of the production line.

[0023] Preferably, the adjusting member includes a slider 31 connected to the supporting frame 5, a movable frame 32 slidably connected to the slider 31, and a limit block 33 arranged on the movable frame 32 and abutting against the slider 31 to limit the movement of the slider 31, the contact surface between the slider 31 and the limit block 33 is the lower limit a, and the upper limit b extends along the lower limit a in a direction away from the test point.

[0024] Preferably, a plurality of probes 2 are arranged in parallel on the support frame 5, so that a plurality of test points can be tested simultaneously, thereby improving the test efficiency.

[0025] Preferably, the contact surface between the slider 31 and the limit block 33 is arranged perpendicular to the moving direction of the probe 2 .

[0026] Preferably, the distance between the upper limit b and the lower limit a is at least the length of the probe 2, so as to reserve sufficient expansion and contraction space for the probe 2, so that after one set of tests is completed, the probe 2 is away from the test sample to continue the next set of tests.

[0027] Preferably, a slideway 34 parallel to the moving direction of the probe 2 is formed in the movable frame 32, and the slider 31 is slidably connected to the slideway 34. In this embodiment, a longitudinal slideway 34 parallel to the moving direction of the probe 2 is provided on the right side of the movable frame 32, and the bottom of the slider 31 abuts against the limit block 33 to limit the movement of the slider 31.

[0028] Preferably, the mobile frame 32 is connected to the lead screw 36 through the connecting block 35, and the lead screw 36 is driven to rotate to drive the mobile frame 32 and the connecting block 35 to synchronously perform a linear motion parallel to the moving direction of the probe 2. In this embodiment, the connecting block 35 is sleeved on the outside of the lead screw 36, and the rotation of the lead screw 36 drives the connecting block 35 to move up and down, thereby driving the mobile frame 32 on the right side of the connecting block 35 to move up and down.

[0029] Preferably, the lead screw 36 is connected to the drive motor 37 to provide power for its rotation, and the lead screw 36 and the drive motor 37 are both arranged on the base 38. In this embodiment, by moving the slider 31 in the slideway 34 and cooperating with the gravity of the pressing block 4, the influence of the jitter and vibration of the drive motor on the test results can be effectively avoided, and the measurement efficiency and accuracy of the measurement can be effectively improved.

[0030] Preferably, the end of the sliding block 31 away from the moving frame 32 is connected to the supporting frame 5 through the adjusting rod 6 , and the pressing block 4 can abut against the sliding block 31 or the supporting frame 5 .

[0031] Preferably, the support frame 5 is connected to the end of the adjustment rod 6 away from the slider 31 through the fixing frame 7 .

[0032] Preferably, the portion of the adjusting rod 6 between the slider 31 and the fixing frame 7 is sleeved with a spring 61. In this embodiment, four groups of adjusting rods 6 are arranged circumferentially on the slider 31, and the adjusting rods 6 are threaded rods threadedly connected with the pad, the slider 31 and the fixing frame 7. A pad is arranged on the top of the slider 31, and the adjusting rods 6 (threaded rods) are inserted into the fixing frame 7 after passing through the pad and the slider 31 in sequence. The circumferentially arranged adjusting rods 6 can ensure the level of the slider 31, and the fixing frame 7 is provided with a fastener 71, which is inserted into the fixing frame 7 transversely and abuts against the outer wall of the support frame 5 to achieve the mutual fixation of the support frame 5 and the fixing frame 7.

[0033] When the probe 2 encounters a test point with inconsistent thickness, the circumferentially arranged spring 61 plays a shock-absorbing role, which can still maintain the stability of the probe and make it press the test point tightly, thereby improving the accuracy of the measurement result.

[0034] Preferably, the weight of the pressing block 4 is 300g to 800g. In this embodiment, the pressing block 4 is placed on the top of the slider 31, giving a certain pressure to the probe 2 to fix its measurement position, and the measurement result is highly accurate, reducing the impact of motor jitter and other factors on the measurement result. In another embodiment, the pressing block 4 is placed on the top of the support frame 5, and there is no specific limitation on the position of the pressing block 4, and the user can flexibly set it according to actual needs.

[0035] Preferably, the test sample 1 is placed on the operating table, and the moving direction of the test sample 1 is perpendicular to the moving direction of the probe 2. In the present embodiment, the test sample 1 moves to the right, and when the test point on the test sample 1 moves to the point directly below the probe 2, the probe 2 is moved downward to retract it and then press the test point to perform the test. By coordinating the moving speed of the test sample 1 and the speed at which the probe 2 moves downward, the detection can be completed quickly, thereby improving the detection efficiency. When the last test point is completed, the connecting block 35 is driven to move upward, and as the upward moving distance of the connecting block 35 increases, the probe 2 extends and begins to move away from the test sample, as long as the upward moving distance of the connecting block 35 is greater than the length of the probe 2 plus the upward moving distance of the slider 31, the probe 2 leaves the test sample at this time and can wait for the next test point to be tested.

[0036] When in use, as the test sample 1 moves on the operating table, when the test point moves to the bottom of the probe 2, the driving screw 36 rotates, driving the connecting block 35 and the mobile frame 32 to move downward together. At this time, the slider 31 is blocked by the limit block 33 and moves downward with the mobile frame 32. When the probe 2 contacts the test point, the connecting block 35 and the mobile frame 32 continue to move downward, and the slider 31 moves upward along the slide slot 34 to the upper limit position b. At this time, the probe 2 begins to retract and press the test point. When the probe 2 retracts, the test is performed and the test results are recorded. The driving screw 36 rotates in the opposite direction, driving the connecting block 35 and the mobile frame 32 to move upward together. When the limit block 33 contacts the slider 31, it drives the slider 31 to move upward together, and then drives the probe 2 to extend away from the test point, and the next set of tests are performed. The cycle is repeated until all test points are tested.

[0037] When encountering a test point with inconsistent thickness, the spring 61 plays a shock-absorbing role to keep the probe 2 balanced, achieve stable testing capabilities, and improve the accuracy of the test results.

[0038] The utility model is designed to detect the resistivity of alloy samples. Through the mutual movement and coordination of the slider and the connecting block, after the probe contacts the test point, the slider continues to move in the opposite direction of the test sample, so that the pressure applied to the probe is only the gravity of the pressure block. This can not only improve the stability of the probe during the test, but also avoid the influence of other external forces on the test results. It has the characteristics of fast, accurate and no jitter, and meets the batch testing requirements of the production line; the adjustment rod and the spring are set to achieve the mutual fixation between the support frame and the slider, and the support frame and the fixed frame, provide stable working conditions for the movement of the probe, and avoid the probe from tilting when encountering a test point with inconsistent thickness, resulting in inaccurate measurement results. In addition, such an automated measurement method reduces the error of manual testing, has high detection accuracy, short time consumption, can be automatically controlled, reduces manual participation, and improves test efficiency. It is suitable for fully automatic detection in single crystal silicon rod assembly line processing workshops.

[0039] The above is a detailed description of the embodiments of the utility model, but the contents are only preferred embodiments of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. A device for detecting the resistivity of an alloy sample, used to test the resistivity of a test point on the sample, characterized in that: It includes a probe that contacts the test point, a support frame for carrying the probe, a pressure block that provides pressure for the support frame, and an adjusting member that is slidably connected to the support frame. Driving the adjusting member can move the support frame from the lower limit position of the adjusting member to the upper limit position.

2. The device for detecting the resistivity of an alloy sample according to claim 1, characterized in that: The adjusting member includes a slider connected to the supporting frame, a movable frame slidably connected to the slider, and a limit block arranged on the movable frame and abutting against the slider to limit the movement of the slider, wherein the contact surface between the slider and the limit block is the lower limit, and the upper limit extends along the lower limit in a direction away from the test point.

3. The device for detecting the resistivity of an alloy sample according to claim 2, characterized in that: The contact surface between the sliding block and the limiting block is arranged perpendicular to the moving direction of the probe.

4. The device for detecting the resistivity of an alloy sample according to any one of claims 1 to 3, characterized in that: The distance between the upper limit position and the lower limit position is at least the length of the probe.

5. The device for detecting resistivity of alloy samples according to claim 2 or 3, characterized in that: A slideway parallel to the moving direction of the probe is formed in the moving frame, and the sliding block is inserted into the slideway and slidably connected with the slideway.

6. The device for detecting resistivity of alloy samples according to claim 2 or 3, characterized in that: The movable frame is connected to the lead screw via a connecting block, and driving the lead screw to rotate can drive the movable frame and the connecting block to synchronously perform a linear motion parallel to the moving direction of the probe.

7. The device for detecting resistivity of alloy samples according to claim 6, characterized in that: The lead screw is connected to the drive motor to provide power for its rotation, and the lead screw and the drive motor are both arranged on a base.

8. The device for detecting the resistivity of an alloy sample according to any one of claims 2, 3 and 7, characterized in that: The end of the sliding block away from the moving frame is connected to the supporting frame through an adjusting rod, and the pressing block can abut against the sliding block or the supporting frame.

9. The device for detecting resistivity of alloy samples according to claim 8, characterized in that: The support frame is connected to the end of the adjusting rod away from the sliding block through a fixing frame.

10. The device for detecting resistivity of alloy samples according to claim 9, characterized in that: A spring is sleeved on a portion of the adjusting rod located between the sliding block and the fixing frame.

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