Monocrystalline silicon alloy sheet automatic detection device

Abstract

The utility model discloses a monocrystalline silicon alloy sheet automatic detection device which comprises a placing table, a translation mechanism, a probe and a lifting mechanism, and the placing table is used for positioning a detection sheet; the moving end of the translation mechanism is connected with the placing table; the translation mechanism is used for driving the placing table to transversely move; the probe is positioned above the placing table and is used for measuring the resistivity of a specified point position of the detection sheet; the lifting mechanism is arranged on one side of the placing table, the lifting end of the lifting mechanism is connected with the probe, and the lifting mechanism is used for driving the probe to move up and down. According to the device, the translation mechanism transversely moves according to a preset coordinate position, measurement of each point position can be automatically completed, convenience and rapidness are achieved, the consistency of measured coordinates is high, the detection efficiency can be improved, and the actual benefit is remarkable; the pressure of the probe on the detection sheet can be kept constant in the measurement process, and the accuracy of a test result is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material detection, in particular to an automatic detection device for single crystal silicon alloy sheets. Background Art

[0002] The resistivity of semiconductor materials is a very important electrical performance parameter. To pull a single crystal silicon of a certain model and resistivity, it is necessary to select an appropriate alloy dopant. To pull a silicon single crystal with a higher resistivity, an alloy is used as a dopant. The alloy is used as a dopant to make the doping amount easier to control and more accurate.

[0003] Alloy is an alloy of impurity elements and silicon. The commonly used master alloys are silicon phosphorus and silicon boron. The purpose of alloy doping is mainly to change the impurity concentration of donor impurities (such as phosphorus) or acceptor impurities (such as boron) in the silicon melt so that the resistivity of the grown single crystal meets the specified requirements. Silicon single crystal N-type dopant: Group V elements, mainly phosphorus, arsenic, and antimony; silicon single crystal P-type dopant: Group III elements, mainly boron, aluminum, and gallium; pure elements are generally used as dopants for pulling silicon single crystals with low resistivity; alloys are used as dopants for pulling silicon single crystals with high resistivity. The resistivity of silicon wafers has an important influence on photovoltaic conversion efficiency. Improving the purity and doping concentration of silicon wafers can effectively reduce the resistivity of silicon wafers, thereby improving photovoltaic conversion efficiency. Accurately testing the resistivity value and distribution law of alloy wafers has a direct impact on the production of silicon single crystals with qualified resistivity.

[0004] The shortcomings of the current equipment for measuring the alloy resistivity of silicon wafers are: most of the current alloy resistivity detection devices use manual measurement devices. During manual measurement, the alloy silicon wafer is manually moved to locate the measurement position, resulting in large positioning errors; in addition, during measurement, the pressure of the probe on the alloy silicon wafer is generated by the downward pressure of the hand, so there is an influence of human factors on the pressure, which in turn affects the stability of the measurement results and is not conducive to measuring the accurate value of the resistivity. Utility Model Content

[0005] The utility model aims to overcome the above technical problems and provide a single crystal silicon alloy sheet automatic detection device, which can automatically complete the measurement of different points on the same straight line while keeping the probe pressure constant.

[0006] To achieve the above objectives, this application provides the following technical solutions:

[0007] A single crystal silicon alloy sheet automatic detection device, comprising:

[0008] A placement table, the placement table is used to position the detection piece;

[0009] A translation mechanism, wherein a moving end of the translation mechanism is connected to the placement table, and the translation mechanism is used to drive the placement table to move horizontally;

[0010] A probe, the probe is located above the placement table, and the probe is used to measure the resistivity of a specified point on the test piece;

[0011] A lifting mechanism is provided at one side of the placement platform, a lifting end of the lifting mechanism is connected to the probe, and the lifting mechanism is used to drive the probe to move up and down.

[0012] Optionally, a plurality of positioning grooves are provided on the upper surface of the placement table, and the shape of the positioning grooves is adapted to the shape of the detection sheet.

[0013] Optionally, the positioning grooves are a plurality of coaxial positioning grooves of different sizes, and among adjacent positioning grooves, the height of the upper surface of the inner positioning groove is lower than the height of the upper surface of the outer positioning groove.

[0014] Optionally, the detection piece is circular, and the positioning groove is a circular groove.

[0015] Optionally, the positioning groove is provided with a pick-up and release groove near the groove wall, and the pick-up and release groove is suitable for connecting the space below the corresponding detection piece with the outside world.

[0016] Optionally, a notch is provided on one side of the placement platform corresponding to all or part of the positioning grooves, and the notch runs through the upper and lower surfaces of the placement platform.

[0017] Optionally, a counterweight is provided on the outside of the probe.

[0018] Optionally, the counterweight includes a counterweight box, a counterweight block and a guide rail, wherein the guide rail is arranged above the counterweight box, and a plurality of the counterweight blocks enter the counterweight box through the guide rail.

[0019] Optionally, the translation mechanism includes a translation motor and a first linear module, the translation motor drives the moving end of the first linear module to move laterally, and the moving end of the first linear module is connected to the placement table.

[0020] Optionally, the lifting mechanism includes a lifting motor and a second linear module, the lifting motor drives the moving end of the second linear module to move up and down, and the moving end of the second linear module is connected to the probe.

[0021] In summary, the utility model has at least the following technical effects and advantages:

[0022] Compared with manual measurement, which involves manually moving the test piece to locate the measurement position, this device can automatically complete the measurement of each point by moving the translation mechanism horizontally according to the preset coordinate position. It is convenient and fast, with high consistency in the measured coordinates, which can improve the detection efficiency and has significant practical benefits. Compared with manual measurement devices, there is no human factor affecting the probe pressure during measurement, and the pressure of the probe on the test piece can be kept constant during the measurement process to ensure the accuracy of the test results. Accurate measurement results have an important impact on the calculation of the weight of alloy silicon input during silicon single crystal production, and play an important role in producing single crystal silicon products with qualified resistivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 It is a schematic structural diagram of a device for automatically detecting single crystal silicon alloy sheets in one embodiment of the utility model.

[0025] In the figure:

[0026] 1. Placement table; 11. Positioning groove; 12. Pick-up and placement groove; 13. Notch; 2. Probe; 3. Counterweight box; 4. Guide rail; 5. Translation motor; 6. First linear module; 7. Lifting motor; 8. Second linear module. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0031] This embodiment provides a single crystal silicon alloy sheet automatic detection device, such as Figure 1 As shown, it includes a placement table 1, a translation mechanism, a probe 2 and a lifting mechanism. The placement table 1 is used to position the test piece; the moving end of the translation mechanism is connected to the placement table 1, and the translation mechanism is used to drive the placement table 1 to move horizontally. The test piece on the placement table 1 can realize automatic linear movement, thereby replacing the manual movement of the test piece. The straightness of the movement of the test piece is high, so that the probe 2 can measure different points on the same straight line of the test piece. The PLC setting pre-sets the position coordinates to be measured, controls the translation mechanism to move horizontally to the predetermined position, and controls the movement of the translation mechanism. It belongs to the prior art and will not be repeated here. The probe 2 is located above the placement table 1. The probe 2 is used to measure the resistivity of the specified point of the test piece. The probe 2 belongs to the prior art. The lifting mechanism is arranged on one side of the placement table 1, and the lifting end of the lifting mechanism is connected to the probe 2. The lifting mechanism is used to drive the probe 2 to move up and down.

[0032] Optionally, the upper surface of the placement table 1 is provided with a plurality of positioning grooves 11, the shape of the positioning grooves 11 is adapted to the shape of the detection piece, the detection piece is placed in the positioning grooves 11, and the groove walls of the positioning grooves 11 fit with the outer walls of the detection piece, thereby realizing the positioning of the detection piece.

[0033] Optionally, the positioning groove 11 is a plurality of coaxial positioning grooves 11 of different sizes, and among adjacent positioning grooves 11, the height of the upper surface of the inner positioning groove 11 is lower than the height of the upper surface of the outer positioning groove 11. Positioning grooves 11 of different sizes are arranged at different heights, so that detection sheets of different sizes can be placed in positioning grooves 11 of corresponding sizes.

[0034] Optionally, the detection sheet is an alloy sheet, the detection sheet is circular, and the positioning groove 11 is a corresponding circular groove. If the detection sheet is of other shapes, the positioning groove 11 is a shape adapted thereto. The alloy sheet has different diameters, and the positioning groove 11 is a plurality of concentric circular grooves corresponding to different diameters.

[0035] Optionally, the detection sheet is in sheet form. To facilitate the placement of the detection sheet, the positioning groove 11 is provided with a placement groove 12 near the groove wall. The placement groove 12 is suitable for the space below the corresponding detection sheet to be connected to the outside world. The placement groove 12 can form a channel to enter the bottom of the detection sheet at the edge of the positioning groove 11. The placement groove 12 can reach the bottom of the detection sheet, so as to facilitate the placement of the detection sheet. For example, in this embodiment, a plurality of placement grooves are provided at the innermost positioning groove.

[0036] Optionally, a notch 13 is provided on one side of the placement platform 1 corresponding to all or part of the positioning groove 11, and the notch 13 runs through the upper and lower surfaces of the placement platform 1. The notch 13 facilitates placing the detection sheet into the positioning groove 11, or removing the detection sheet in the positioning groove 11 from below the notch 13.

[0037] Optionally, a counterweight is provided on the outside of the probe 2. The counterweight can enable the probe 2 to exert a constant pressure on the detection sheet.

[0038] Optionally, the counterweight includes a counterweight box 3, a counterweight and a guide rail 4, wherein the guide rail 4 is arranged above the counterweight box 3, and a plurality of counterweights enter the counterweight box 3 through the guide rail 4. Specifically, the upper end of the guide rail 4 can be opened, and the counterweight can enter the counterweight box 3 through the guide rail 4. In the present embodiment, the counterweight adopts a weight. In other embodiments, the counterweight can also be other objects with a suitable weight. Counterweights of a suitable number and weight can enter the counterweight box 3 through the guide rail 4, so that the weight of the counterweight in the counterweight box 3 is adjustable.

[0039] Optionally, the translation mechanism includes a translation motor 5 and a first linear module 6, the translation motor 5 drives the moving end of the first linear module 6 to move horizontally, and the moving end of the first linear module 6 is connected to the placement table 1. Optionally, the lifting mechanism includes a lifting motor 7 and a second linear module 8, the lifting motor 7 drives the moving end of the second linear module 8 to move up and down, and the moving end of the second linear module 8 is connected to the probe 2. In other embodiments, the translation mechanism and the lifting mechanism can also be other structures that can achieve linear movement, such as a screw nut mechanism, a gear rack mechanism, or a belt transmission mechanism, etc. This application does not specifically limit the structure of the translation mechanism and the lifting mechanism.

[0040] When the device is used, the alloy sheet is placed on the placement table 1, which has circular grooves of different sizes for positioning alloy sheets of different diameters. The position coordinates to be measured are pre-set by PLC, which can automatically control the movement of the translation mechanism, the lifting mechanism and the probe 2, and can complete the continuous measurement of different points on the same straight line on the alloy sheet. During measurement, the pressure of the probe 2 on the alloy sheet includes the gravity of the weight, which can keep the pressure constant.

[0041] In summary, compared with manual measurement in which the detection piece is manually moved to locate the measurement position, this embodiment uses a translation mechanism to move laterally according to a preset coordinate position, and can automatically complete the measurement of each point. It is convenient and fast, with high consistency in the measured coordinates, which can improve the detection efficiency and have significant practical benefits. Compared with the manual measurement device, there is no human factor affecting the probe pressure during measurement, and the pressure of the probe on the detection piece can be kept constant during the measurement process to ensure the accuracy of the test results. Accurate measurement results have an important impact on the calculation of the weight of alloy silicon input during silicon single crystal production, and play an important role in producing single crystal silicon products with qualified resistivity.

[0042] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An automatic detection device for single crystal silicon alloy sheets, characterized in that: include: A placement table, the placement table is used to position the detection piece; A translation mechanism, wherein a moving end of the translation mechanism is connected to the placement table, and the translation mechanism is used to drive the placement table to move horizontally; A probe, the probe is located above the placement table, and the probe is used to measure the resistivity of a specified point on the test piece; A lifting mechanism is provided at one side of the placement platform, a lifting end of the lifting mechanism is connected to the probe, and the lifting mechanism is used to drive the probe to move up and down.

2. The single crystal silicon alloy sheet automatic detection device according to claim 1, characterized in that: The upper surface of the placement table is provided with a plurality of positioning grooves, and the shape of the positioning grooves is adapted to the shape of the detection sheet.

3. The automatic detection device for single crystal silicon alloy sheets according to claim 2, characterized in that: The positioning grooves are a plurality of coaxial positioning grooves of different sizes. Among the adjacent positioning grooves, the height of the upper surface of the inner positioning groove is lower than the height of the upper surface of the outer positioning groove.

4. The automatic detection device for single crystal silicon alloy sheets according to claim 2, characterized in that: The detection piece is circular, and the positioning groove is a circular groove.

5. The single crystal silicon alloy sheet automatic detection device according to claim 2, characterized in that: The positioning groove is provided with a pick-up and placement groove near the groove wall, and the pick-up and placement groove is suitable for the space below the corresponding detection piece to be connected with the outside world.

6. The single crystal silicon alloy sheet automatic detection device according to claim 2, characterized in that: A notch is provided on one side of the placement platform corresponding to all or part of the positioning grooves, and the notch runs through the upper and lower surfaces of the placement platform.

7. The single crystal silicon alloy sheet automatic detection device according to claim 1, characterized in that: A counterweight is arranged on the outer side of the probe.

8. The automatic detection device for single crystal silicon alloy sheets according to claim 7, characterized in that: The counterweight comprises a counterweight box, a counterweight block and a guide rail, wherein the guide rail is arranged above the counterweight box, and a plurality of the counterweight blocks enter the counterweight box through the guide rail.

9. The single crystal silicon alloy sheet automatic detection device according to claim 1, characterized in that: The translation mechanism includes a translation motor and a first linear module. The translation motor drives the moving end of the first linear module to move horizontally. The moving end of the first linear module is connected to the placement table.

10. The single crystal silicon alloy sheet automatic detection device according to claim 1, characterized in that: The lifting mechanism includes a lifting motor and a second linear module. The lifting motor drives the moving end of the second linear module to move up and down. The moving end of the second linear module is connected to the probe.

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