Vibration device and electronic apparatus

Abstract

The utility model provides a vibration device and electronic equipment. The vibration device includes: a support member; an actuator; and a sensor that detects the force applied to the vibrated member and the displacement of the vibrated member in the left-right direction. The support member includes: a fixed portion; a vibration part; and an elastic deformation part which connects the fixed part and the vibration part and elastically deforms. The actuator is attached to the fixed portion and the vibrating portion. The sensor is attached to the elastic deformation portion. The elastic deformation portion has a first elastic coefficient in the left-right direction, a second elastic coefficient in the front-back direction, and a third elastic coefficient in the up-down direction. The first elastic coefficient is smaller than the second elastic coefficient. The third elastic coefficient is smaller than the second elastic coefficient.

Description

Technical Field

[0001] The utility model relates to a vibration device and an electronic device equipped with the vibration device. Background Art

[0002] As a patent related to a conventional vibration device, for example, there is known a vibration device described in Patent Document 1. The vibration device described in Patent Document 1 is used in an electronic device including an electronic device body and an operation object with which a part of a user's body contacts in order to operate the electronic device.

[0003] Patent Document 1: International Publication No. 2021 / 261470

[0004] However, in the vibration device described in Patent Document 1, it is desired to detect the force applied to the operation object without attaching a sensor to the operation object and to detect the displacement of the operation object in a direction orthogonal to the direction of the force applied to the operation object. Utility Model Content

[0005] Therefore, an object of the present invention is to provide a vibration device and an electronic device that can detect a force applied to an operation object without installing a sensor on the operation object and can detect a displacement of the operation object in a direction orthogonal to the direction of the force applied to the operation object.

[0006] A vibration device according to one embodiment of the present invention is installed on a device, which includes a fixed component and a vibrated component that vibrates in the left-right direction relative to the fixed component. In the vibration device, the vibration device includes: a supporting component; an actuator that causes the vibrated component to vibrate in the left-right direction; and a sensor that detects the force applied to the vibrated component and the displacement of the vibrated component in the left-right direction. The supporting component includes: a fixed portion that is fixed to the fixed component; a vibrating portion that supports the vibrated component; and an elastic deformation portion that connects the fixed portion to the vibrating portion and elastically deforms. The actuator is installed on the fixed portion or the fixed component and the vibrating portion or the vibrated component. The sensor is installed on the elastic deformation portion. The elastic deformation portion has a first elastic coefficient in the left-right direction, a second elastic coefficient in the front-back direction, and a third elastic coefficient in the up-down direction. The first elastic coefficient is smaller than the second elastic coefficient, and the third elastic coefficient is smaller than the second elastic coefficient.

[0007] In this specification, directions are defined as follows. The direction in which the upper main surface US3 and the lower main surface LS3 of the supporting member 3 are arranged is defined as the up-down direction. In addition, the direction in which the long side of the upper main surface US3 of the supporting member 3 extends when viewed in the up-down direction is defined as the left-right direction. The direction in which the short side of the upper main surface US3 of the supporting member 3 extends when viewed in the up-down direction is defined as the front-back direction. The up-down direction, the left-right direction, and the front-back direction are orthogonal to each other. In addition, the definition of directions in this specification is an example. Therefore, the direction in which the vibration device 10 is actually used does not need to be consistent with the direction in this specification. In addition, Figure 1 to Figure 14 The up-down direction can also be reversed. Figure 1 to Figure 14 The left and right directions can also be reversed. Figure 1 to Figure 14 The front-to-back direction can also be reversed.

[0008] Hereinafter, X and Y are components or members of the electronic device 100. In this specification, unless otherwise specified, the various parts of X are defined as follows. The upper part of X refers to the upper half of X. The upper end of X refers to the end of X in the upward direction. The upper end of X refers to the upper end of X and its vicinity. This definition also applies to directions other than the upward direction.

[0009] In addition, "X is located above Y." means that X is located directly above Y. Therefore, when viewed in the vertical direction, X overlaps with Y. "X is located above Y" means that X is located directly above Y and X is located obliquely above Y. Therefore, when viewed in the vertical direction, X may overlap with Y or may not overlap with Y. This definition also applies to directions other than the upward direction.

[0010] In this specification, "X and Y are electrically connected" means that there is electrical conduction between X and Y. Therefore, X and Y may be in contact or not in contact. When X and Y are not in contact, Z having conductivity is arranged between X and Y.

[0011] According to the vibration device of the present invention, it is possible to detect a force applied to an operation object without attaching a sensor to the operation object and to detect a displacement of the operation object in a direction orthogonal to the direction of the force applied to the operation object. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a cross-sectional view of the electronic device 100 according to the first embodiment as viewed from the front.

[0013] Figure 2 This is a plan view of the electronic device 100 according to the first embodiment as viewed from below.

[0014] Figure 3This is a plan view of the support member 3 according to the first embodiment as seen from below.

[0015] Figure 4 This is a plan view of the support member 3 according to the first embodiment as seen from below.

[0016] Figure 5 This is a plan view of the vibrated member 2 , the supporting member 3 , the actuator 4 , and the sensor 5 according to the first embodiment as viewed from below.

[0017] Figure 6 This is a plan view of the actuator 4 according to the first embodiment as viewed from below.

[0018] Figure 7 It is a plan view of the first sensor unit 51 according to the first embodiment.

[0019] Figure 8 It is a cross-sectional view of the first sensor unit 51 according to the first embodiment.

[0020] Fig. 9 It is a plan view of the second sensor unit 52 according to the first embodiment.

[0021] Fig.10 It is a cross-sectional view of the second sensor unit 52 according to the first embodiment.

[0022] Fig.11 This is a plan view of the substrate 301 according to the second embodiment as viewed from below.

[0023] Fig.12 This is a plan view of a vibrated member 2 , a supporting member 3 , an actuator 4 , and a sensor 5 according to the second embodiment, as seen from below.

[0024] Fig.13 This is a cross-sectional view of the electronic device 100b according to the third embodiment as viewed from the front.

[0025] Fig.14 This is a plan view of a vibrated member 2 , a supporting member 3 , a stopper 7 , and a conductive buffer member 8 according to the third embodiment, as seen from below. DETAILED DESCRIPTION

[0026] [First embodiment]

[0027] Hereinafter, the structure of the vibration device 10 which concerns on 1st Embodiment of this invention is demonstrated with reference to drawings. Figure 1 This is a cross-sectional view of the electronic device 100 according to the first embodiment as viewed from the front. Figure 2This is a plan view of the electronic device 100 according to the first embodiment as viewed from below. Figure 3 This is a plan view of the support member 3 according to the first embodiment as viewed from below. Figure 3 In the figure, only representative conductor patterns 302 among the plurality of conductor patterns 302 are denoted by reference numerals. Figure 4 This is a plan view of the support member 3 according to the first embodiment as viewed from below. Figure 4 , the plurality of conductor patterns 302 are omitted. Figure 5 This is a plan view of the vibrated member 2, the supporting member 3, the actuator 4, and the sensor 5 according to the first embodiment as viewed from below. Figure 5 , the plurality of conductor patterns 302 are omitted. Figure 6 This is a plan view of the actuator 4 according to the first embodiment as viewed from below. Figure 7 It is a plan view of the first sensor unit 51 according to the first embodiment. Figure 8 It is a cross-sectional view of the first sensor unit 51 according to the first embodiment. Fig. 9 It is a plan view of the second sensor unit 52 according to the first embodiment. Fig.10 It is a cross-sectional view of the second sensor unit 52 according to the first embodiment.

[0028] like Figure 1 As shown, as an example, the vibration device 10 is used in an electronic device 100, which provides tactile feedback to the user 200 by vibrating the vibrated member 2 in the left-right direction when the user 200 presses the vibrated member 2. When the user 200 presses the vibrated member 2, the vibrated member 2 vibrates, so the user 200 can feel that the vibrated member 2 is pressed. In this way, the vibration device 10 is installed in a device having a housing 1 and a vibrated member 2 that vibrates in the left-right direction relative to the housing 1. The housing 1 corresponds to the "fixed member" of the utility model. In addition, the user 200 applies force to the vibrated member 2 in the downward direction.

[0029] The housing 1 is a rectangular box. Figure 1 As shown in FIG. 1 , a first opening OP1 is provided in the housing 1. In more detail, as shown in FIG. Figure 2 As shown in FIG. 1 , when viewed in the vertical direction, the first opening OP1 has a rectangular shape. Figure 1 As shown, the first opening OP1 passes through the upper surface of the housing 1 in the up-down direction.

[0030] like Figure 1As shown, the vibrated member 2 has a plate shape. Therefore, the vibrated member 2 has an upper main surface US2 and a lower main surface LS2 arranged in the vertical direction. The upper main surface US2 is located above the lower main surface LS2. The upper main surface US2 and the lower main surface LS2 are parallel to each other. Figure 2 As shown, the upper main surface US2 and the lower main surface LS2 each have a rectangular shape having long sides extending in the left-right direction and short sides extending in the front-back direction.

[0031] like Figure 1 As shown, the position of the vibrated member 2 in the vertical direction is equal to the position of the upper surface of the housing 1 in the vertical direction. In addition, when viewed in the vertical direction, the vibrated member 2 is located in the first opening OP1. Thus, the user 200 can press the upper main surface US2 of the vibrated member 2. In addition, the vibrated member 2 does not contact the housing 1.

[0032] like Figure 1 As shown in FIG. 1 , the vibration device 10 includes a support member 3, an actuator 4, and a sensor 5. Figure 3 As shown, the support member 3 includes a base material 301 and a plurality of conductor patterns 302. The base material 301 is made of, for example, glass epoxy. Glass epoxy is formed by impregnating glass fiber with epoxy resin and performing a heat curing process.

[0033] like Figure 3 As shown, the substrate 301 has a plate shape. Therefore, the substrate 301 has an upper main surface US301 and a lower main surface LS301 arranged in the up-down direction. The upper main surface US301 is located above the lower main surface LS301. The upper main surface US301 and the lower main surface LS301 are parallel to each other. The upper main surface US301 and the lower main surface LS301 each become a rectangular shape having a long side extending in the left-right direction and a short side extending in the front-back direction.

[0034] like Figure 3 As shown, a plurality of conductor patterns 302 are provided on a substrate 301. The plurality of conductor patterns 302 are formed by patterning a copper foil attached to the substrate 301 by, for example, photolithography.

[0035] like Figure 4 As shown, the support member 3 includes a fixed portion 31 , a vibrating portion 32 , and a plurality of elastic deformation portions 33 . More specifically, the base material 301 includes the fixed portion 31 , the vibrating portion 32 , and a plurality of elastic deformation portions 33 .

[0036] like Figure 1 As shown in FIG. 1 , the fixing portion 31 is fixed to the housing 1. In more detail, as shown in FIG. Figure 4As shown, the fixing portion 31 includes a first fixing portion 31a, a second fixing portion 31b, and a third fixing portion 31c. The first fixing portion 31a, the second fixing portion 31b, and the third fixing portion 31c each have a screw hole 303. The first fixing portion 31a, the second fixing portion 31b, and the third fixing portion 31c are fixed to the housing 1 by inserting a bolt 6 into the screw hole 303 and a screw hole (not shown) of the housing 1 from below the screw hole 303, respectively.

[0037] like Figure 4 As shown, when viewed in the up-down direction, the first fixing portion 31a is located on the right side of the vibration portion 32. When viewed in the up-down direction, the second fixing portion 31b is located on the left side of the left front corner of the vibration portion 32. When viewed in the up-down direction, the third fixing portion 31c is located on the left side of the left rear corner of the vibration portion 32.

[0038] like Figure 4 As shown in FIG. 1 , the first fixing portion 31 a is provided with a second opening OP2. More specifically, the second opening OP2 has a rectangular shape when viewed in the up-down direction. The second opening OP2 passes through the first fixing portion 31 a in the up-down direction.

[0039] like Figure 4 As shown in FIG. 1 , the third opening OP3 is provided in the vibration part 32. More specifically, the third opening OP3 has a rectangular shape when viewed in the up-down direction. The third opening OP3 penetrates the vibration part 32 in the up-down direction.

[0040] like Figure 5 As shown, the vibrated member 2 is provided on the upper surface of the vibrating portion 32. Therefore, the vibrating portion 32 supports the vibrated member 2.

[0041] The elastic deformation part 33 is elastically deformed. That is, the elastic deformation part 33 has a first elastic coefficient in the left-right direction. In addition, the elastic deformation part 33 has a second elastic coefficient in the front-back direction. In addition, the elastic deformation part 33 has a third elastic coefficient in the up-down direction. In the present embodiment, the elastic deformation part 33 includes a first elastic deformation part 331, a second elastic deformation part 332, a third elastic deformation part 333, and a fourth elastic deformation part 334. The first elastic deformation part 331, the second elastic deformation part 332, the third elastic deformation part 333, and the fourth elastic deformation part 334 each undergo elastic deformation. That is, the first elastic deformation part 331, the second elastic deformation part 332, the third elastic deformation part 333, and the fourth elastic deformation part 334 each have a first elastic coefficient in the left-right direction. In addition, the first elastic deformation part 331, the second elastic deformation part 332, the third elastic deformation part 333, and the fourth elastic deformation part 334 each have a second elastic coefficient in the front-back direction. Furthermore, each of the first elastic deformation portion 331 , the second elastic deformation portion 332 , the third elastic deformation portion 333 , and the fourth elastic deformation portion 334 has a third elastic coefficient in the up-down direction.

[0042] like Figure 4 As shown in the figure, the elastic deformation part 33 connects the fixed part 31 of the support member 3 and the vibration part 32 of the support member 3. More specifically, the first elastic deformation part 331 is located on the left side of the vibration part 32. In addition, when viewed in the left-right direction, the first elastic deformation part 331 viewed in the up-down direction overlaps with the front part of the vibration part 32 of the support member 3 viewed in the up-down direction. The first elastic deformation part 331 connects the second fixed part 31b and the vibration part 32.

[0043] like Figure 4 As shown in the figure, the second elastic deformation part 332 is located on the right side of the vibration part 32. In addition, when viewed in the left-right direction, the second elastic deformation part 332 viewed in the up-down direction overlaps with the front part of the vibration part 32 of the support member 3 viewed in the up-down direction. The second elastic deformation part 332 connects the first fixed part 31a and the vibration part 32.

[0044] like Figure 4 As shown in the figure, the third elastic deformation part 333 is located on the left side of the vibration part 32. In addition, when viewed in the left-right direction, the third elastic deformation part 333 viewed in the up-down direction overlaps with the rear part of the vibration part 32 of the support member 3 viewed in the up-down direction. The third elastic deformation part 333 connects the third fixed part 31c and the vibration part 32.

[0045] like Figure 4As shown in the figure, the fourth elastic deformation part 334 is located on the right side of the vibration part 32. In addition, when viewed in the left-right direction, the fourth elastic deformation part 334 viewed in the up-down direction overlaps with the rear part of the vibration part 32 of the support member 3 viewed in the up-down direction. The fourth elastic deformation part 334 connects the first fixed part 31a and the vibration part 32.

[0046] like Figure 4 As shown in the figure, the length of the elastic deformation part 33 in the left-right direction is shorter than the length of the elastic deformation part 33 in the front-back direction. In more detail, the length of the first elastic deformation part 331 in the left-right direction is shorter than the length of the elastic deformation part 33 in the front-back direction. The same is true for the second elastic deformation part 332, the third elastic deformation part 333 and the fourth elastic deformation part 334. As a result, the first elastic coefficient of the elastic deformation part 33 is smaller than the second elastic coefficient of the elastic deformation part 33. In more detail, the first elastic coefficient of each of the first elastic deformation part 331, the second elastic deformation part 332, the third elastic deformation part 333 and the fourth elastic deformation part 334 is smaller than the second elastic coefficient of each of the first elastic deformation part 331, the second elastic deformation part 332, the third elastic deformation part 333 and the fourth elastic deformation part 334. That is, the elastic deformation part 33 is more easily elastically deformed in the left-right direction than in the front-back direction. More specifically, each of the first elastic deformation portion 331 , the second elastic deformation portion 332 , the third elastic deformation portion 333 , and the fourth elastic deformation portion 334 is more easily elastically deformed in the left-right direction than in the front-rear direction.

[0047] The length of the elastic deformation part 33 in the up-down direction is shorter than the length of the elastic deformation part 33 in the front-back direction. In more detail, the length of the first elastic deformation part 331 in the up-down direction is shorter than the length of the elastic deformation part 33 in the front-back direction. The same is true for the second elastic deformation part 332, the third elastic deformation part 333 and the fourth elastic deformation part 334. Thus, the third elastic coefficient of the elastic deformation part 33 is smaller than the second elastic coefficient of the elastic deformation part 33. In more detail, the third elastic coefficient of each of the first elastic deformation part 331, the second elastic deformation part 332, the third elastic deformation part 333 and the fourth elastic deformation part 334 is smaller than the second elastic coefficient of each of the first elastic deformation part 331, the second elastic deformation part 332, the third elastic deformation part 333 and the fourth elastic deformation part 334. That is, the elastic deformation part 33 is more easily elastically deformed in the up-down direction than in the front-back direction. More specifically, each of the first elastic deformation portion 331 , the second elastic deformation portion 332 , the third elastic deformation portion 333 , and the fourth elastic deformation portion 334 is more easily elastically deformed in the up-down direction than in the front-rear direction.

[0048] like Figure 6As shown, the actuator 4 includes a first piezoelectric film 41, a first electrode (not shown), and a second electrode (not shown). The actuator 4 has a film shape.

[0049] like Figure 6 As shown, the actuator 4 has a first main surface US4 and a second main surface LS4. Figure 1 As shown, the first main surface US4 is located above the second main surface LS4. The first main surface US4 and the second main surface LS4 are parallel to each other. The first main surface US4 is the upper surface of the first electrode. The second main surface LS4 is the lower surface of the second electrode. Figure 6 As shown, when viewed in the up-down direction, the first main surface US4 and the second main surface LS4 each have a rectangular shape having short sides extending in the left-right direction and long sides extending in the front-back direction.

[0050] The first piezoelectric film 41 is a piezoelectric body. That is, the actuator 4 includes a piezoelectric body. Figure 6 As shown, the first piezoelectric film 41 has an upper main surface and a lower main surface. When viewed in the up-down direction, the main surface of the first piezoelectric film 41 has a rectangular shape. More specifically, when viewed in the up-down direction, the upper main surface of the first piezoelectric film 41 and the lower main surface of the first piezoelectric film 41 each have a rectangular shape having a long side extending in the left-right direction and a short side extending in the front-back direction.

[0051] The first electrode is provided on the upper surface (not shown) of the first piezoelectric film 41. The second electrode is provided on the lower surface (not shown) of the first piezoelectric film 41. The first electrode and the second electrode are each a metal film formed by vapor deposition.

[0052] like Figure 5 As shown, the actuator 4 is mounted on the fixed portion 31 of the support member 3 and the vibrating portion 32 of the support member 3. More specifically, the left end portion LE4 of the actuator 4 is mounted on the vibrating portion 32 via an adhesive material (not shown) in a state where the actuator 4 is slightly extended in the left-right direction, and the right end portion RE4 of the actuator 4 is mounted on the first fixed portion 31a via an adhesive material (not shown) in a state where the actuator 4 is slightly extended in the left-right direction.

[0053] By applying an AC voltage to the actuator 4, the actuator 4 is expanded and contracted in the left-right direction. In more detail, by applying an AC voltage between the first electrode and the second electrode, the first piezoelectric film 41 is expanded and contracted in the left-right direction. For example, on the one hand, by applying a positive voltage to the actuator 4, the actuator 4 is extended in the left-right direction. On the other hand, by applying a negative voltage to the actuator 4, the actuator 4 is contracted in the left-right direction. Therefore, by applying an AC voltage to the actuator 4, the actuator 4 is vibrated in the left-right direction. As a result, the actuator 4 causes the vibrated member 2 and the vibrating portion 32 of the supporting member 3 to vibrate in the left-right direction. In addition, the AC voltage is a voltage whose positive and negative voltages change periodically.

[0054] The sensor 5 detects the force applied to the vibrated member 2 and the displacement of the vibrated member 2 in the left-right direction. More specifically, the sensor 5 includes a plurality of sensor parts. Figure 5 As shown, the sensor 5 includes four sensor parts. The four sensor parts are respectively a first sensor part 51, a second sensor part 52, a third sensor part 53 and a fourth sensor part 54. The sensor 5 is mounted on the elastic deformation part 33. In this embodiment, the plurality of sensor parts are mounted on any one of the first elastic deformation part 331, the second elastic deformation part 332, the third elastic deformation part 333 and the fourth elastic deformation part 334 of the elastic deformation part 33. For example, Figure 5 As shown, the first sensor portion 51 is attached to the first elastic deformation portion 331 . The second sensor portion 52 is attached to the second elastic deformation portion 332 . The third sensor portion 53 is attached to the third elastic deformation portion 333 . The fourth sensor portion 54 is attached to the fourth elastic deformation portion 334 .

[0055] In the present embodiment, the first sensor unit 51 and the fourth sensor unit 54 each detect a force applied to the vibrated member 2. Hereinafter, the first sensor unit 51 and the fourth sensor unit 54 will be described separately. In addition, the fourth sensor unit 54 has the same structure as the first sensor unit 51. Therefore, the following description focuses on the first sensor unit 51, and the description of the fourth sensor unit 54 is omitted.

[0056] like Figure 7 and Figure 8 As shown, the first sensor portion 51 includes a second piezoelectric film 511, a third electrode U51, a fourth electrode D51, a first charge amplifier 512, and a first integrating circuit 513. That is, the sensor 5 includes a piezoelectric film. In addition, the first sensor portion 51 has a film shape.

[0057] like Figure 8As shown, the first sensor portion 51 has an upper main surface US51 and a lower main surface LS51. The upper main surface US51 is located above the lower main surface LS51. The upper main surface US51 and the lower main surface LS51 are parallel to each other. When viewed in the up and down direction, the upper main surface US51 and the lower main surface LS51 each have a rectangular shape. The upper main surface US51 and the lower main surface LS51 each have a short side extending in the left-right direction and a long side extending in the front-back direction.

[0058] like Figure 8 As shown, the second piezoelectric film 511 has an upper main surface and a lower main surface. The upper main surface of the second piezoelectric film 511 is located above the lower main surface of the second piezoelectric film 511. The upper main surface of the second piezoelectric film 511 and the lower main surface of the second piezoelectric film 511 are parallel to each other. When viewed in the up-down direction, the upper main surface of the second piezoelectric film 511 and the lower main surface of the second piezoelectric film 511 each have a rectangular shape. The upper main surface of the second piezoelectric film 511 and the lower main surface of the second piezoelectric film 511 each have a short side extending in the left-right direction and a long side extending in the front-back direction.

[0059] The second piezoelectric film 511 generates electric charge corresponding to the differential value of the displacement of the second piezoelectric film 511 .

[0060] Specifically, the second piezoelectric film 511 is a film formed of polyvinylidene fluoride (PVDF). PVDF has piezoelectricity in which molecules are oriented by uniaxial stretching. The second piezoelectric film 511 has a piezoelectric constant of d31.

[0061] like Figure 7 As shown, the uniaxial stretching axis OD1 of the second piezoelectric film 511 forms an angle of 0 degrees or 180 degrees relative to the front-to-back direction. That is, the second piezoelectric film 511 is at least uniaxially stretched. The 0 degrees or 180 degrees include, for example, angles including about 0 degrees ± 10 degrees or about 180 degrees ± 10 degrees. Thus, the second piezoelectric film 511 generates electric charge by deforming in a manner of stretching in the front-to-back direction or deforming in a manner of compressing in the front-to-back direction. For example, if the second piezoelectric film 511 is deformed in a manner of stretching or compressing in the front-to-back direction, a positive charge is generated. The size of the generated charge depends on the differential value of the displacement of the second piezoelectric film 511 caused by the stretching or compression.

[0062] The third electrode U51 is a ground electrode. The third electrode U51 is connected to the ground potential. Figure 8 As shown, the third electrode U51 is provided on the upper principal surface of the second piezoelectric film 511. The third electrode U51 covers the upper principal surface of the second piezoelectric film 511. That is, the upper principal surface US51 of the first sensor portion 51 is the upper surface of the third electrode U51. The third electrode U51 is, for example, a metal film formed by vapor deposition.

[0063] The fourth electrode D51 is a signal electrode. Figure 8 As shown, the fourth electrode D51 is provided on the lower main surface of the second piezoelectric film 511. The fourth electrode D51 covers the lower main surface of the second piezoelectric film 511. That is, the lower main surface LS51 of the first sensor portion 51 is the lower surface of the fourth electrode D51. The fourth electrode D51 is, for example, a metal film formed by vapor deposition.

[0064] The first charge amplifier 512 converts the charge generated by the second piezoelectric film 511 into a voltage signal. After the conversion, the first charge amplifier 512 outputs the voltage signal to the first integrating circuit 513.

[0065] The first integrating circuit 513 integrates the voltage signal with respect to time. As a result, the first sensor unit 51 outputs a first detection signal indicating the relationship between the deformation amount of the second piezoelectric film 511 and time.

[0066] In the present embodiment, the second sensor portion 52 and the third sensor portion 53 each detect the displacement of the vibrated member 2 in the left-right direction. The second sensor portion 52 and the third sensor portion 53 are described below. In addition, the third sensor portion 53 has the same structure as the second sensor portion 52. Therefore, the following description focuses on the second sensor portion 52, and the description of the third sensor portion 53 is omitted. In addition, for the second sensor portion 52, only the portion that is different from the first sensor portion 51 is described, and it is omitted later.

[0067] like Fig. 9 and Fig.10 As shown, the second sensor portion 52 includes a third piezoelectric film 521 , a fifth electrode 1152 , a sixth electrode 1152 , a second charge amplifier 522 , and a second integrating circuit 523 .

[0068] The third piezoelectric film 521 is a film formed of a chiral polymer. The chiral polymer is, for example, polylactic acid (PLA), particularly L-type polylactic acid (PLLA). The main chain of PLLA composed of a chiral polymer has a helical structure. PLLA has piezoelectricity when the molecules are oriented by uniaxial stretching. The third piezoelectric film 521 has a piezoelectric constant of d14.

[0069] The third piezoelectric film 521 has a characteristic that the polarity of the charge generated when the third piezoelectric film 521 is extended in the left-right direction is opposite to the polarity of the charge generated when the second piezoelectric film 511 is extended in the front-back direction.

[0070] like Fig. 9As shown, the uniaxial stretching axis OD2 of the third piezoelectric film 521 is deflected at an angle of 45 degrees in the counterclockwise direction relative to the left-right direction, and is deflected at an angle of 45 degrees in the clockwise direction relative to the front-back direction. That is, the third piezoelectric film 521 is a film of polylactic acid having at least uniaxial stretching. The 45 degrees include, for example, angles of about 45 degrees ± 10 degrees. Thus, the third piezoelectric film 521 generates electric charge by deforming in a manner of stretching in the left-right direction or deforming in a manner of compressing in the left-right direction. For example, if the third piezoelectric film 521 is deformed in a manner of stretching in the left-right direction, a positive charge is generated. For example, if the third piezoelectric film 521 is deformed in a manner of compressing in the left-right direction, a negative charge is generated. The magnitude of the generated charge depends on the differential value of the displacement of the third piezoelectric film 521 caused by the stretching or compression.

[0071] [Effect]

[0072] According to the vibration device 10, the force applied to the operation object can be detected without installing a sensor on the operation object, and the displacement of the operation object in a direction orthogonal to the direction of the force applied to the operation object can be detected. In more detail, the supporting member 3 includes an elastic deformation portion 33, which connects the fixing portion 31 and the vibration portion 32 and elastically deforms. The vibration portion 32 supports the vibrated member 2. Therefore, by applying a force to the vibrated member 2 in the up and down directions, the elastic deformation portion 33 is elastically deformed in the up and down directions. The sensor 5 that detects the force applied to the vibrated member 2 is installed on the elastic deformation portion 33. In addition, the third elastic coefficient of the elastic deformation portion 33 in the up and down directions is smaller than the second elastic coefficient of the elastic deformation portion 33 in the front and back directions. Therefore, the elastic deformation portion 33 is easily elastically deformed in the up and down directions. Thus, the sensor 5 can detect the deformation of the elastic deformation portion 33 in the up and down directions. As a result, according to the vibration device 10, the force applied to the vibrated member 2 can be detected without installing the sensor 5 on the vibrated member 2.

[0073] In addition, the vibrated component 2 vibrates in the left-right direction. Along with the vibration of the vibrated component 2 in the left-right direction, the vibration part 32 vibrates in the left-right direction. Along with the vibration of the vibration part 32 in the left-right direction, the elastic deformation part 33 elastically deforms in the left-right direction. In addition, the first elastic coefficient of the elastic deformation part 33 in the left-right direction is smaller than the second elastic coefficient of the elastic deformation part 33 in the front-back direction. Therefore, the elastic deformation part 33 is easily elastically deformed in the left-right direction. Thus, the sensor 5 can detect the deformation of the elastic deformation part 33 in the left-right direction. As a result, according to the vibration device 10, the displacement of the vibrated component 2 in the left-right direction can be detected without installing the sensor 5 on the vibrated component 2.

[0074] [Second embodiment]

[0075] Hereinafter, a vibration device 10a according to a second embodiment of the present invention will be described with reference to the drawings. Fig.11 This is a plan view of the substrate 301 according to the second embodiment as viewed from below. Fig.12 It is a top view of the vibrated member 2, supporting member 3, actuator 4 and sensor 5 according to the second embodiment as viewed from below. In addition, only the parts of the vibration device 10a according to the second embodiment that are different from the vibration device 10 according to the first embodiment will be described and will be omitted below.

[0076] The vibration device 10a is different from the vibration device 10 in that the fixing part 31 includes the 4th fixing part 31d, the 5th fixing part 31e, the 6th fixing part 31f and the 7th fixing part 31g, the position of the elastic deformation part 33 is different, and the right end part RE4 of the actuator 4 is installed on the shell 1 via an adhesive material (not shown) when the actuator 4 is slightly extended in the left-right direction.

[0077] like Fig.12 As shown in the figure, the fourth fixing portion 31d, the fifth fixing portion 31e, the sixth fixing portion 31f and the seventh fixing portion 31g each have a screw hole 303. The fourth fixing portion 31d, the fifth fixing portion 31e, the sixth fixing portion 31f and the seventh fixing portion 31g are fixed to the housing 1 by inserting a bolt 6 from below the screw hole 303 into each of the screw hole 303 and a screw hole (not shown) of the housing 1. Thus, the fixing portion 31 is fixed to the housing 1.

[0078] like Fig.12 As shown in the figure, when viewed in the up-down direction, the fourth fixing portion 31d is located above the vibration portion 32. When viewed in the up-down direction, the fifth fixing portion 31e is located in front of the vibration portion 32. When viewed in the up-down direction, the fifth fixing portion 31e is located on the right side of the fourth fixing portion 31d. When viewed in the up-down direction, the sixth fixing portion 31f is located behind the vibration portion 32. When viewed in the up-down direction, the seventh fixing portion 31g is located behind the vibration portion 32. When viewed in the up-down direction, the seventh fixing portion 31g is located on the right side of the sixth fixing portion 31f.

[0079] like Fig.11 As shown in FIG. 1 , the first elastic deformation portion 331 is located above the vibration portion 32 of the support member 3. When viewed in the front-rear direction, the first elastic deformation portion 331 viewed in the up-down direction overlaps with the left portion of the vibration portion 32 viewed in the up-down direction. The first elastic deformation portion 331 connects the fourth fixing portion 31d and the vibration portion 32.

[0080] like Fig.11As shown in FIG. 1 , the second elastic deformation portion 332 is located above the vibration portion 32 of the support member 3. In addition, when viewed in the front-back direction, the second elastic deformation portion 332 viewed in the up-down direction overlaps with the right portion of the vibration portion 32 viewed in the up-down direction. The second elastic deformation portion 332 connects the fifth fixing portion 31e and the vibration portion 32.

[0081] like Fig.11 As shown in FIG. 1 , the third elastic deformation portion 333 is located below the vibration portion 32 of the support member 3. When viewed in the front-rear direction, the third elastic deformation portion 333 viewed in the up-down direction overlaps the left portion of the vibration portion 32 viewed in the up-down direction. The third elastic deformation portion 333 connects the sixth fixing portion 31f and the vibration portion 32.

[0082] like Fig.11 As shown in FIG. 1 , the fourth elastic deformation portion 334 is located below the vibration portion 32 of the support member 3. When viewed in the front-rear direction, the fourth elastic deformation portion 334 viewed in the up-down direction overlaps with the right portion of the vibration portion 32 viewed in the up-down direction. The fourth elastic deformation portion 334 connects the seventh fixing portion 31g and the vibration portion 32.

[0083] The actuator 4 is attached to the housing 1 and the vibration portion 32 of the support member 3 .

[0084] The vibration device 10 a as described above also has the same effects as those of the vibration device 10 .

[0085] [Third Embodiment]

[0086] Hereinafter, a vibration device 10 b according to a third embodiment of the present invention will be described with reference to the drawings. Fig.13 This is a cross-sectional view of the electronic device 100b according to the third embodiment as viewed from the front. Fig.14 This is a plan view of the vibrated member 2, the supporting member 3, the stopper 7, and the conductive buffer member 8 according to the third embodiment as viewed from below. Fig.14 , the plurality of conductor patterns 302 are omitted. In addition, with respect to the vibration device 10 b according to the third embodiment, only the parts different from the vibration device 10 according to the first embodiment will be described, and the description will be omitted below.

[0087] like Fig.13 As shown, the vibration device 10 b is different from the vibration device 10 in that it further includes a vibrated member 2 , a stopper 7 , a conductive buffer member 8 , and a spacer 9 .

[0088] like Fig.13As shown, the stopper 7 is fixed to the housing 1. More specifically, the stopper 7 has a screw hole (not shown). The stopper 7 is fixed to the housing 1 from below the screw hole by a bolt 6. Therefore, the position of the stopper 7 in the up-down direction is fixed.

[0089] In addition, in this embodiment, in order to fix the fixing portion 31 to the housing 1, a spacer 9 is provided between the fixing portion 31 of the support member 3 and the stopper 7. Fig.14 As shown, the stopper 7 overlaps with the vibrated member 2 when viewed in the up-down direction.

[0090] The conductive buffer member 8 has conductivity. In addition, the conductive buffer member 8 is in the shape of a rectangular parallelepiped. Fig.13 As shown, the conductive buffer member 8 has an upper main surface US8 and a lower main surface LS8 arranged in the vertical direction. The upper main surface US8 is located above the lower main surface LS8. The upper main surface US8 and the lower main surface LS8 are parallel to each other.

[0091] The resistance value of the conductive buffer member 8 changes by expansion and contraction. More specifically, the resistance value of the conductive buffer member 8 increases by compression. Also, the resistance value of the conductive buffer member 8 decreases by extension.

[0092] like Fig.14 As shown, when viewed in the up-down direction, the vibrating portion 32 of the supporting member 3 has a first portion P1 that overlaps with the vibrated member 2. A first conductor pattern C1 and a second conductor pattern C2 are provided in a part of the first portion P1.

[0093] The first conductor pattern C1 and the second conductor pattern C2, as well as the conductive buffer member 8 and the stopper 7 are arranged in order from top to bottom without any interval. That is, the upper main surface US8 of the conductive buffer member 8 is in contact with the first conductor pattern C1 and the second conductor pattern C2, respectively. In addition, the lower main surface LS8 of the conductive buffer member 8 is in contact with the stopper 7.

[0094] The first conductor pattern C1 is electrically connected to the second conductor pattern C2 via the conductive buffer member 8 .

[0095] In the vibration device 10b as described above, the same effect as that of the vibration device 10 is also achieved. In addition, according to the vibration device 10b, the force applied to the operation object can be detected with high accuracy without installing a sensor on the operation object. In more detail, when viewed in the up and down direction, the vibration portion 32 has a first portion P1 overlapping the vibrated member 2. The first conductor pattern C1 and the second conductor pattern C2 are provided in a part of the first portion P1. The first conductor pattern C1 is electrically connected to the second conductor pattern C2 via the conductive buffer member 8. Here, for the conductive buffer member 8, the upper main surface US8 is in contact with the first conductor pattern C1 and the second conductor pattern C2, and the lower main surface LS8 is in contact with the stopper 7 whose position in the up and down direction is fixed. If a force is applied downward to the vibrated member 2, the conductive buffer member 8 is compressed. As a result, the resistance of the conductive buffer member 8 becomes smaller. Therefore, by detecting the change in resistance between the first conductor pattern C1 and the second conductor pattern C2, the force applied to the vibrated member 2 can be detected. As a result, according to the vibration device 10 b , it is possible to detect the force applied to the operation object with high accuracy without attaching a sensor to the operation object.

[0096] [Other embodiments]

[0097] The vibration device involved in the utility model is not limited to the vibration devices 10, 10a, 10b, and can be changed within the scope of its main purpose. In addition, the structures of the vibration devices 10, 10a, 10b can also be arbitrarily combined. In addition, the electronic device involved in the utility model is not limited to the electronic device 100, 100a, 100b, and can be changed within the scope of its main purpose. In addition, the structures of the electronic devices 100, 100a, 100b can also be arbitrarily combined.

[0098] In addition, the use of the electronic device 100 is not limited to providing tactile feedback to the user 200 .

[0099] In addition, if Figure 1 As shown, the vibration device 10 and the vibrated member 2 may be modularized to form the vibration device 20 .

[0100] In addition, if Figure 1 As shown, the vibration device 10 and the housing 1 may be modularized to form the electronic device 30 .

[0101] Alternatively, the actuator 4 may be attached to the fixing portion 31 of the supporting member 3 or the housing 1 and the vibrated member 2 .

[0102] In addition, the vibration device 10 is not limited to be used in the electronic device 100 .

[0103] In addition, the "fixing member" of the present invention is not limited to the housing 1. The "fixing member" of the present invention may be, for example, an electronic component fixed to the housing 1.

[0104] In addition, the vibrated member 2 is not limited to being pressed by the user 200 , and may be pressed by an operation member.

[0105] In addition, the housing 1 is not limited to a rectangular parallelepiped box.

[0106] In addition, the first opening OP1 may not have a rectangular shape when viewed in the up-down direction.

[0107] In addition, the vibrated member 2 may not have a plate shape. In addition, the vibrated member 2 may not have an upper main surface US2 and a lower main surface LS2 arranged in the vertical direction. In addition, the upper main surface US2 and the lower main surface LS2 may not be parallel to each other.

[0108] In addition, each of the upper main surface US2 and the lower main surface LS2 may not be a rectangular shape having long sides extending in the left-right direction and short sides extending in the front-back direction.

[0109] In addition, the position of the vibrated member 2 in the vertical direction may not be equal to the position of the upper surface of the housing 1 in the vertical direction.

[0110] In addition, the vibrated member 2 may not be located in the first opening OP1 when viewed in the up-down direction.

[0111] Alternatively, the vibrated member 2 may be in contact with the housing 1 .

[0112] In addition, the material of the substrate 301 is not limited to epoxy glass, and may be a metal such as SUS (Stainless Used Steel).

[0113] In addition, the substrate 301 may not have a plate shape. In addition, the substrate 301 may not have an upper main surface US301 and a lower main surface LS301 arranged in the vertical direction. In addition, the upper main surface US301 and the lower main surface LS301 may not be parallel to each other.

[0114] In addition, each of the upper main surface US301 and the lower main surface LS301 of the base material 301 may not be a rectangular shape having long sides extending in the left-right direction and short sides extending in the front-back direction.

[0115] The plurality of conductor patterns 302 are not limited to those formed by patterning the copper foil attached to the base material 301 by photolithography or the like. In addition, the plurality of conductor patterns 302 are not essential components of the vibration devices 10 and 10a.

[0116] In addition, the first fixing portion 31a, the second fixing portion 31b, and the third fixing portion 31c may be fixed to the housing 1 by an adhesive material. Therefore, the first fixing portion 31a, the second fixing portion 31b, and the third fixing portion 31c may not have the screw hole 303. In addition, the housing 1 may not have the screw hole. In addition, the bolt 6 is not an essential structural element.

[0117] In addition, the second opening OP2 may not be provided in the first fixing portion 31 a .

[0118] In addition, the third opening OP3 may not be provided in the vibration portion 32 .

[0119] In addition, the vibrated member 2 is not limited to being provided on the upper surface of the vibration part 32 .

[0120] In addition, the length of the elastic deformation portion 33 in the left-right direction may not be shorter than the length of the elastic deformation portion 33 in the front-rear direction. It is sufficient that the first elastic coefficient of the elastic deformation portion 33 is smaller than the second elastic coefficient of the elastic deformation portion 33 .

[0121] In addition, the length of the elastic deformation portion 33 in the left-right direction may not be shorter than the length of the elastic deformation portion 33 in the front-rear direction. The third elastic coefficient of the elastic deformation portion 33 only needs to be smaller than the second elastic coefficient of the elastic deformation portion 33 .

[0122] In addition, the elastic deformation portion 33 may not include the first elastic deformation portion 331 , the second elastic deformation portion 332 , the third elastic deformation portion 333 , and the fourth elastic deformation portion 334 .

[0123] In addition, the actuator 4 may not include a piezoelectric body. The actuator 4 may be, for example, an LRA (Linear Resonant Actuator).

[0124] In addition, the actuator 4 may not have a membrane shape. In addition, the actuator 4 may not have the first main surface US4 and the second main surface LS4 arranged in the up-down direction. In addition, the first main surface US4 and the second main surface LS4 may not be parallel to each other.

[0125] In addition, each of the first main surface US4 and the second main surface LS4 may not be a rectangular shape having long sides extending in the left-right direction and short sides extending in the front-back direction.

[0126] In addition, it is also possible that, when viewed in the up-down direction, the principal surface of the first piezoelectric film 41 does not have a rectangular shape. In addition, it is also possible that, when viewed in the up-down direction, the upper principal surface of the first piezoelectric film 41 and the lower principal surface of the first piezoelectric film 41 are not each rectangular with long sides extending in the left-right direction and short sides extending in the front-back direction.

[0127] In addition, at least any one of the first sensor portion 51, the second sensor portion 52, the third sensor portion 53, and the fourth sensor portion 54 may detect the force applied to the vibrated member 2. In addition, at least any one of the first sensor portion 51, the second sensor portion 52, the third sensor portion 53, and the fourth sensor portion 54 may detect the displacement of the vibrated member 2 in the left-right direction.

[0128] In addition, the sensor 5 may not include four sensor parts. Therefore, the number of sensor parts that detect the force applied to the vibrated member 2 and the number of sensor parts that detect the displacement of the vibrated member 2 in the left-right direction may be different.

[0129] In addition, when viewed in the up-down direction, the upper main surface US51 and the lower main surface LS51 of the first sensor unit 51 may not have a rectangular shape. In addition, the upper main surface US51 and the lower main surface LS51 may not have a short side extending in the left-right direction and a long side extending in the front-back direction. In addition, the upper main surface US51 and the lower main surface LS51 may not be parallel to each other.

[0130] In addition, when viewed in the up-down direction, the upper main surface US52 and the lower main surface LS52 of the second sensor portion 52 may not each have a rectangular shape. In addition, the upper main surface US52 and the lower main surface LS52 may not each have a short side extending in the left-right direction and a long side extending in the front-back direction. In addition, the upper main surface US52 and the lower main surface LS52 may not be parallel to each other.

[0131] In addition, when viewed in the up-down direction, the upper main surface and the lower main surface of the third sensor portion 53 may not have a rectangular shape. In addition, the upper main surface and the lower main surface of the third sensor portion 53 may not have a short side extending in the left-right direction and a long side extending in the front-back direction. In addition, the upper main surface and the lower main surface of the third sensor portion 53 may not be parallel to each other.

[0132] In addition, when viewed in the up-down direction, the upper main surface and the lower main surface of the fourth sensor portion 54 may not have a rectangular shape. In addition, the upper main surface and the lower main surface of the fourth sensor portion 54 may not have a short side extending in the left-right direction and a long side extending in the front-back direction. In addition, the upper main surface and the lower main surface of the fourth sensor portion 54 may not be parallel to each other.

[0133] In addition, the upper principal surface of the second piezoelectric film 511 and the lower principal surface of the second piezoelectric film 511 may not be parallel to each other. In addition, the upper principal surface of the second piezoelectric film 511 and the lower principal surface of the second piezoelectric film 511 may not have short sides extending in the left-right direction and long sides extending in the front-back direction.

[0134] In addition, the upper principal surface of the third piezoelectric film 521 and the lower principal surface of the third piezoelectric film 521 may not be parallel to each other. In addition, the upper principal surface of the third piezoelectric film 521 and the lower principal surface of the third piezoelectric film 521 may not have short sides extending in the left-right direction and long sides extending in the front-back direction.

[0135] The uniaxial stretching axis OD1 of the second piezoelectric film 511 is not limited to forming an angle of 0 or 180 degrees with respect to the front-rear direction. For example, the uniaxial stretching axis OD1 of the second piezoelectric film 511 may form an angle of 0 or 180 degrees with respect to the left-right direction.

[0136] In addition, the conductive buffer member 8 may not be in the shape of a rectangular parallelepiped.

[0137] In addition, the stopper 7 may be fixed to the housing 1 by an adhesive material. Therefore, the stopper 7 may not have a screw hole.

[0138] In addition, the partition 9 is not an essential structural element.

[0139] The resistance value of the conductive buffer member 8 may be reduced by compression. The resistance value of the conductive buffer member 8 may be increased by extension. The resistance value of the conductive buffer member 8 may be changed by extension or contraction.

[0140] The first conductor pattern C1, the second conductor pattern C2, the conductive buffer member 8, and the stopper 7 may be arranged in this order from top to bottom with a gap therebetween.

[0141] The utility model has the following structure.

[0142] (1) A vibration device installed in a device, the device comprising a fixed member and a vibrated member that vibrates in the left-right direction relative to the fixed member, in the vibration device, the vibration device comprising: a supporting member; an actuator that causes the vibrated member to vibrate in the left-right direction; and a sensor that detects a force applied to the vibrated member and a displacement of the vibrated member in the left-right direction, the supporting member comprising: a fixed portion that is fixed to the fixed member; a vibrating portion that supports the vibrated member; and an elastic deformation portion that connects the fixed portion to the vibrating portion and elastically deforms, the actuator being installed on the fixed portion or the fixed member and the vibrating portion or the vibrated member, the sensor being installed on the elastic deformation portion, the elastic deformation portion having a first elastic coefficient in the left-right direction, a second elastic coefficient in the front-back direction, and a third elastic coefficient in the up-down direction, the first elastic coefficient being smaller than the second elastic coefficient, and the third elastic coefficient being smaller than the second elastic coefficient.

[0143] (2) In the vibration device described in (1), the length of the elastic deformation part in the left-right direction is shorter than the length of the elastic deformation part in the front-back direction, and the length of the elastic deformation part in the up-down direction is shorter than the length of the elastic deformation part in the front-back direction.

[0144] (3) In the vibration device described in (1) or (2), the elastic deformation part includes a first elastic deformation part, a second elastic deformation part, a third elastic deformation part and a fourth elastic deformation part, each of which is elastically deformed, and the sensor includes a plurality of sensor parts installed on any one of the first elastic deformation part, the second elastic deformation part, the third elastic deformation part and the fourth elastic deformation part, each of which detects a force applied to the vibrated component or a displacement of the vibrated component in the left-right direction, and the first elastic deformation part is located on the left side of the vibration part, the second elastic deformation part is located on the right side of the vibration part, and the third elastic deformation part is located on the right side of the vibration part. The fourth elastic deformation portion is located on the left side of the above-mentioned vibration portion, and the fourth elastic deformation portion is located on the right side of the above-mentioned vibration portion. When observed in the above-mentioned left-right direction, the first elastic deformation portion observed in the above-mentioned up-down direction overlaps with the front portion of the above-mentioned vibration portion observed in the above-mentioned up-down direction, when observed in the above-mentioned left-right direction, the second elastic deformation portion observed in the above-mentioned up-down direction overlaps with the front portion of the above-mentioned vibration portion observed in the above-mentioned up-down direction, when observed in the above-mentioned left-right direction, the third elastic deformation portion observed in the above-mentioned up-down direction overlaps with the rear portion of the above-mentioned vibration portion observed in the above-mentioned up-down direction, and when observed in the above-mentioned left-right direction, the fourth elastic deformation portion observed in the above-mentioned up-down direction overlaps with the rear portion of the above-mentioned vibration portion observed in the above-mentioned up-down direction.

[0145] (4) In the vibration device described in (1) or (2), the elastic deformation part includes a first elastic deformation part, a second elastic deformation part, a third elastic deformation part and a fourth elastic deformation part, each of which is elastically deformed, and the sensor includes a plurality of sensor parts installed on any one of the first elastic deformation part, the second elastic deformation part, the third elastic deformation part and the fourth elastic deformation part, each of which detects a force applied to the vibrated component or a displacement of the vibrated component in the left and right directions, and the first elastic deformation part is located above the vibration part, the second elastic deformation part is located above the vibration part, and the third elastic deformation part is located above the vibration part. The elastic deformation portion is located below the above-mentioned vibration portion, the above-mentioned fourth elastic deformation portion is located below the above-mentioned vibration portion, when observed in the above-mentioned front-to-back direction, the above-mentioned first elastic deformation portion observed in the above-mentioned up-down direction overlaps with the left portion of the above-mentioned vibration portion observed in the above-mentioned up-down direction, when observed in the above-mentioned front-to-back direction, the above-mentioned second elastic deformation portion observed in the above-mentioned up-down direction overlaps with the right portion of the above-mentioned vibration portion observed in the above-mentioned up-down direction, when observed in the above-mentioned front-to-back direction, the above-mentioned third elastic deformation portion observed in the above-mentioned up-down direction overlaps with the left portion of the above-mentioned vibration portion observed in the above-mentioned up-down direction, and when observed in the above-mentioned front-to-back direction, the above-mentioned fourth elastic deformation portion observed in the above-mentioned up-down direction overlaps with the right portion of the above-mentioned vibration portion observed in the above-mentioned up-down direction.

[0146] (5) In the vibration device according to any one of (1) to (4), the sensor includes a piezoelectric film.

[0147] (6) In the vibration device described in (5), a main surface of the piezoelectric film has a rectangular shape when viewed in the up-down direction.

[0148] (7) In the vibration device described in (5) or (6), the piezoelectric film is a film of polylactic acid stretched at least uniaxially.

[0149] (8) In the vibration device described in any one of (5) to (7), the piezoelectric film has a piezoelectric constant of d14.

[0150] (9) The vibration device according to any one of (1) to (8), further comprising the vibrated member.

[0151] (10) The vibration device described in (9) is provided with: a stopper whose position in the up-down direction is fixed; and a conductive buffer member, which is a conductive buffer member having conductivity and having an upper main surface and a lower main surface, the resistance value of the conductive buffer member changes due to expansion and contraction, and when viewed in the up-down direction, the vibration portion has a first portion overlapping the vibrated member, a first conductor pattern and a second conductor pattern are partially provided in the first portion, the upper main surface is in contact with the first conductor pattern and the second conductor pattern respectively, the lower main surface is in contact with the stopper, and the first conductor pattern is electrically connected to the second conductor pattern via the conductive buffer member.

[0152] (11) An electronic device comprising: the vibration device according to any one of (1) to (10); and the fixing member.

[0153] Description of Reference Numerals

[0154] 1... housing; 2... vibrated member; 3... supporting member; 4... actuator; 5... sensor; 6... bolt; 7... stopper; 8... conductive buffer member; 9... separator; 10, 10a, 10b... vibrating device; 31... fixing portion; 31a... first fixing portion; 31b... second fixing portion; 31c... third fixing portion; 31d... fourth fixing portion; 31e... fifth fixing portion; 31f... sixth fixing portion; 31g... seventh fixing portion; 32... vibrating portion; 33... elastic deformation portion; 41... first piezoelectric film; 51... first sensor portion; 52... second sensor portion; 53... third sensor portion; 54... fourth sensor portion; 100, 100a, 100b... electronic device; 200... user; 301... substrate; 302... conductor pattern; 303... screw hole; 331... first elastic deformation portion ; 332...the second elastic deformation portion; 333...the third elastic deformation portion; 334...the fourth elastic deformation portion; 511...the second piezoelectric film; 512...the first charge amplifier; 513...the first integrating circuit; 521...the third piezoelectric film; 522...the second charge amplifier; 523...the second integrating circuit; C1...the first conductor pattern; C2...the second conductor pattern; D51...the fourth electrode; D52...the sixth electrode; LE4...the left end portion; LS2, LS301, LS51, LS8...the lower main surface; LS4...the second main surface; OD1, OD2...the uniaxial stretching axis; OP1...the first opening; OP2...the second opening; OP3...the third opening; P1...the first part; RE4...the right end portion; U51...the third electrode; U52...the fifth electrode; US2, US301, US51, US8...the upper main surface; US4...the first main surface.

Claims

1. A vibration device mounted on a device, the device comprising a fixing member and a vibrated member that vibrates in a left-right direction relative to the fixing member, The vibration device is characterized in that The vibration device comprises: Supporting member; an actuator that causes the vibrated member to vibrate in the left-right direction; and a sensor for detecting a force applied to the vibrated member and a displacement of the vibrated member in the left-right direction, The supporting member comprises: a fixing portion fixed to the fixing member; a vibrating portion that supports the vibrated member; as well as an elastic deformation portion that connects the fixing portion and the vibration portion and is elastically deformed, The actuator is mounted on the fixing portion or the fixing member and the vibrating portion or the vibrated member. The sensor is mounted on the elastic deformation portion. The elastic deformation portion has a first elastic coefficient in the left-right direction, a second elastic coefficient in the front-back direction, and a third elastic coefficient in the up-down direction. The first elastic coefficient is smaller than the second elastic coefficient, The third elastic coefficient is smaller than the second elastic coefficient.

2. The vibration device according to claim 1, characterized in that The length of the elastic deformation portion in the left-right direction is shorter than the length of the elastic deformation portion in the front-back direction. The length of the elastic deformation portion in the up-down direction is shorter than the length of the elastic deformation portion in the front-rear direction.

3. The vibration device according to claim 1 or 2, characterized in that: The elastic deformation part includes a first elastic deformation part, a second elastic deformation part, a third elastic deformation part and a fourth elastic deformation part, The first elastic deformation portion, the second elastic deformation portion, the third elastic deformation portion, and the fourth elastic deformation portion are elastically deformed. The sensor includes a plurality of sensor parts mounted on any one of the first elastic deformation part, the second elastic deformation part, the third elastic deformation part, and the fourth elastic deformation part. Each of the plurality of sensor parts detects a force applied to the vibrated member or a displacement of the vibrated member in the left-right direction. The first elastic deformation portion is located on the left side of the vibration portion, The second elastic deformation portion is located on the right side of the vibration portion, The third elastic deformation portion is located on the left side of the vibration portion, The fourth elastic deformation portion is located on the right side of the vibration portion, When viewed in the left-right direction, the first elastic deformation portion viewed in the up-down direction overlaps with a front portion of the vibration portion viewed in the up-down direction, When viewed in the left-right direction, the second elastic deformation portion viewed in the up-down direction overlaps with a front portion of the vibration portion viewed in the up-down direction, When viewed in the left-right direction, the third elastic deformation portion viewed in the up-down direction overlaps with a rear portion of the vibration portion viewed in the up-down direction, When viewed in the left-right direction, the fourth elastic deformation portion viewed in the up-down direction overlaps with a rear portion of the vibration portion viewed in the up-down direction.

4. The vibration device according to claim 1 or 2, characterized in that: The elastic deformation part includes a first elastic deformation part, a second elastic deformation part, a third elastic deformation part and a fourth elastic deformation part, The first elastic deformation portion, the second elastic deformation portion, the third elastic deformation portion, and the fourth elastic deformation portion are elastically deformed. The sensor includes a plurality of sensor parts mounted on any one of the first elastic deformation part, the second elastic deformation part, the third elastic deformation part, and the fourth elastic deformation part. Each of the plurality of sensor parts detects a force applied to the vibrated member or a displacement of the vibrated member in the left-right direction. The first elastic deformation portion is located above the vibration portion, The second elastic deformation portion is located above the vibration portion, The third elastic deformation portion is located below the vibration portion. The fourth elastic deformation portion is located below the vibration portion, When viewed in the front-rear direction, the first elastic deformation portion viewed in the up-down direction overlaps with a left portion of the vibration portion viewed in the up-down direction, When viewed in the front-rear direction, the second elastic deformation portion viewed in the up-down direction overlaps with a right portion of the vibration portion viewed in the up-down direction, When viewed in the front-rear direction, the third elastic deformation portion viewed in the up-down direction overlaps with a left portion of the vibration portion viewed in the up-down direction, When viewed in the front-rear direction, the fourth elastic deformation portion viewed in the up-down direction overlaps with the right portion of the vibration portion when viewed in the up-down direction.

5. The vibration device according to claim 1 or 2, characterized in that: The sensor includes a piezoelectric film.

6. The vibration device according to claim 5, characterized in that The main surface of the piezoelectric film has a rectangular shape when viewed in the up-down direction.

7. The vibration device according to claim 5, characterized in that The piezoelectric film is a film of polylactic acid stretched at least uniaxially.

8. The vibration device according to claim 5, characterized in that The piezoelectric film has a piezoelectric constant of d14.

9. The vibration device according to claim 1 or 2, characterized in that: The vibrated member is further provided.

10. The vibration device according to claim 9, characterized in that have: a stopper whose position in the up-down direction is fixed; and A conductive buffer member having conductivity and having an upper main surface and a lower main surface, The resistance value of the conductive buffer member changes due to expansion and contraction. The vibrating portion has a first portion overlapping the vibrated member when viewed in the up-down direction, A first conductor pattern and a second conductor pattern are provided in a part of the first portion. The upper main surface is in contact with each of the first conductor pattern and the second conductor pattern. The lower main surface is in contact with the stopper, The first conductor pattern is electrically connected to the second conductor pattern via the conductive buffer member.

11. An electronic device, characterized in that: have: The vibration device according to any one of claims 1 to 10; and The fixing member.

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