Vacuum etching device and vacuum developing, etching and film removing production line

Abstract

The utility model provides a vacuum etching device and a vacuum developing, etching and film removing production line, and the vacuum etching device comprises a rack, a conveying roller assembly for conveying workpieces along the longitudinal direction, a liquid storage tank, a liquid conveying assembly, a spraying assembly, a circulating pump, a circulating pipe, a vacuum generator and a plurality of vacuum suction knife assemblies, a water curtain sealing assembly for spraying a water curtain to a workpiece is arranged at an inlet and / or an outlet of a sealing cavity of the rack, the spraying assembly comprises a plurality of spraying pipes and a plurality of nozzles, the extending direction of the spraying pipes intersects with the longitudinal direction, and nozzle sets extending in the transverse direction are formed on the spraying pipes. The two ends of the circulating pipe are communicated with the liquid storage tank, the circulating pump and the vacuum generator are both arranged on the circulating pipe, the vacuum suction end of the vacuum generator is communicated with the vacuum suction knife assemblies, each row of nozzle sets correspond to one vacuum suction knife assembly, and the vacuum suction knife assemblies are arranged on the upstream of the corresponding nozzle sets in the longitudinal direction. According to the utility model, the spraying uniformity is good, and the etching liquid can be ensured to be fully contacted with the printed circuit board, so that the etching quality is improved.

Description

Technical Field

[0001] The utility model relates to the field of printed circuit board production equipment, in particular to a vacuum etching device and a vacuum developing etching and film removal production line. Background Art

[0002] Printed circuit boards are providers of electrical connections for electronic components. Their design is mainly layout design. The main advantage of using printed circuit boards is that they greatly reduce wiring and assembly errors, and improve the level of automation and production labor rate.

[0003] During the processing of printed circuit boards, etching of the printed circuit boards by etching liquid is indispensable. However, the existing etching devices also have the problem of uneven etching liquid spraying, resulting in poor etching effect. Moreover, during the etching process, the etching liquid is easily retained on the surface of the printed circuit board, and the retained etching liquid has a reduced efficacy and will hinder the etching effect of the subsequent etching liquid, thereby affecting the circuit structure of the printed circuit board. Therefore, it is necessary to remove the etching liquid retained on the printed circuit board in a timely manner.

[0004] The existing suction mechanism is generally arranged in front of the nozzle. During the conveying process, the printed circuit board first passes through the spray of the first nozzle, then passes through the first suction mechanism to suck away the retained etching liquid, and then passes through the second nozzle, the second suction mechanism... the Nth nozzle and the Nth suction mechanism in sequence. If there is liquid retained on the surface of the printed circuit board before passing through the first nozzle, the liquid will hinder the etching reaction of the etching liquid sprayed by the first nozzle, thereby affecting its etching effect. Utility Model Content

[0005] The first purpose of the utility model is to provide a vacuum etching device which has good spraying uniformity and can ensure that the etching liquid is in full contact with the printed circuit board.

[0006] The second purpose of the utility model is to provide a vacuum developing and etching film removal production line including the above vacuum etching device.

[0007] In order to achieve the above-mentioned first purpose, the utility model provides a vacuum etching device, including a frame, a conveying roller assembly, a liquid storage tank, an infusion assembly and a spray assembly, wherein the conveying roller assembly is arranged on the frame, the conveying roller assembly can convey the workpiece in the longitudinal direction, the spray assembly is arranged on the upper side and / or the lower side of the conveying roller assembly, the liquid storage tank is arranged at the lower part or the rear side of the frame, the infusion assembly is connected between the liquid storage tank and the spray assembly, and is used to convey the etching liquid in the liquid storage tank to the spray assembly, a sealed cavity is arranged in the frame, and the sealed cavity is respectively provided with an inlet and an outlet on opposite sides thereof, the conveying roller assembly and the spray assembly are both arranged in the sealed cavity, the two ends of the conveying roller assembly extend toward the inlet and the outlet respectively, the frame is provided with a water curtain sealing assembly at the inlet and / or the outlet, and the water curtain sealing assembly sprays a water curtain toward the workpiece; The spray assembly includes multiple spray pipes and multiple nozzles. The multiple spray pipes are arranged at intervals in the transverse direction. The transverse direction is perpendicular to the longitudinal direction, and the extension direction of the spray pipe intersects with the longitudinal direction at an acute angle. The multiple nozzles are arranged at intervals in the extension direction of the spray pipe, and multiple rows of nozzle groups extending in the transverse direction are formed on the multiple spray pipes; the vacuum etching device also includes a circulation pump, a circulation pipe, a vacuum generator and multiple vacuum suction knife assemblies. Both ends of the circulation pipe are connected to the liquid storage tank, the circulation pump and the vacuum generator are connected between the two ends of the circulation pipe, the vacuum generator has a vacuum suction end connected to the vacuum suction knife assembly, and the multiple vacuum suction knife assemblies are arranged at intervals in the longitudinal direction on the conveying roller assembly, each row of nozzle groups corresponds to at least one vacuum suction knife assembly, and in the longitudinal direction, the vacuum suction knife assembly is arranged upstream of the corresponding nozzle group.

[0008] It can be seen from the above scheme that by setting up a water curtain sealing assembly, it is beneficial to play a gas sealing role and avoid the leakage of gases such as chlorine, which affects production safety; by setting the extension direction of the spray pipe to intersect the longitudinal direction at an acute angle, so that in the conveying direction of the conveyor roller assembly, the spray ranges of the nozzles on the two adjacent spray pipes can partially overlap, ensuring that the printed circuit board can be covered by the full range of spraying, avoiding leakage, which is beneficial to improving the etching quality; by setting each row of nozzle groups to correspond to at least one vacuum suction knife assembly, and in the longitudinal direction, the vacuum suction knife assembly is arranged upstream of the corresponding nozzle group, the vacuum suction knife assembly is used to first suck away the liquid retained on the printed circuit board before each group of nozzle groups sprays, providing a good environment for the subsequent spraying of etching liquid, ensuring that the etching liquid can fully contact with the printed circuit board, avoiding the pool effect, and helping to further improve the etching quality.

[0009] A further solution is that the vacuum suction knife assembly includes a roller shaft, a suction knife, an outer sleeve and an outer suction tube. The suction knife is arranged on the roller shaft. The suction knife is provided with multiple suction holes on the side facing the conveying roller assembly. The outer sleeve is arranged on the side of the suction knife facing away from the conveying roller assembly, and the outer sleeve is connected with the inside of the suction knife. The two ends of the outer suction tube are respectively connected with the vacuum suction end and the outer sleeve. Support members are provided at both ends of the outer sleeve, and the support members are fixedly connected to the roller shaft.

[0010] It can be seen from the above scheme that by providing a liquid suction hole to absorb the liquid retained on the printed circuit board, and by providing a support member to support the outer sleeve from both ends, it is beneficial to ensure the balance and structural stability of the outer sleeve.

[0011] A further solution is that the vacuum suction knife assembly also includes a support sleeve and a support shaft, the support sleeve is connected between the outer sleeve and the outer suction tube, the outer suction tube is connected to the outer sleeve through the support sleeve, one support member is connected between the support sleeve and the roller shaft, the support shaft is connected to one end of the outer sleeve away from the support sleeve, and the other support member is connected between the support shaft and the roller shaft.

[0012] It can be seen from the above scheme that by providing a supporting sleeve for connecting with the outer suction tube and the outer sleeve, it is beneficial to shorten the length of the outer sleeve and facilitate installation and transportation.

[0013] A further solution is that the vacuum suction knife assembly also includes a rotary drive device, a driven wheel and an auxiliary wheel. A driving wheel is provided on the driving end of the rotary drive device. The driven wheel is sleeved on one end of the roller shaft. The driving wheel is meshed and connected with the driven wheel to drive the roller shaft to rotate around its own axis. The auxiliary wheel is sleeved on the roller shaft and can rotate with the roller shaft, and the outer wall of the roller shaft protrudes downwardly from the liquid suction part of the suction knife.

[0014] It can be seen from the above scheme that by arranging the auxiliary wheel to rotate with the roller shaft, it can not only assist in driving the printed circuit board forward, but also prevent the printed circuit board from being accidentally sucked up during the liquid suction process.

[0015] A further solution is that the outer sleeve is provided with a plurality of first perforations arranged along its extension direction, and the first perforations are connected to the inside of the suction knife; an inner suction tube is provided inside the outer sleeve, and a preset chamber is provided between the outer wall of the inner suction tube and the inner wall of the outer sleeve, one end of the inner suction tube is connected to and connected with the supporting sleeve, and the inner suction tube is provided with a plurality of second perforations arranged along its extension direction, and the second perforations are connected to the first perforations through the preset chamber.

[0016] It can be seen from the above scheme that by arranging an inner suction tube in the outer sleeve, the retained liquid passes through the first perforation and the preset chamber and enters the inner suction tube. Compared with the scheme without arranging the inner suction tube, this embodiment utilizes the Venturi effect to increase the flow rate of the retained liquid through the preset chamber and increase the suction force, thereby ensuring that all the retained liquid on the printed circuit board can be sucked away.

[0017] A further solution is that the spray assembly includes a swing drive device, a rotating shaft and two swing frames, the two swing frames are respectively arranged on the upper and lower sides of the conveying roller assembly, and the swing frames are provided with swing plates, spray pipes and nozzles; two cams are sleeved on the rotating shaft, the cams are eccentrically arranged with the rotating shaft, and the cams are matched and connected with the swing plates; guide supporting members are arranged on both sides of the frame, the guide supporting members are provided with grooves extending in the transverse direction, guide rods are arranged on both sides of the swing frames, and the guide rods are matched and connected with the grooves; the driving end of the swing drive device is connected to the rotating shaft to drive the cam to rotate eccentrically, and then drive the swing frame to swing back and forth along the extension direction of the groove through the swing plate.

[0018] It can be seen from the above scheme that by arranging the swing frame to swing back and forth along the extension direction of the groove, the spray pipe and the nozzle are driven to swing together, which is beneficial to increasing the spray range and spray uniformity of the nozzle.

[0019] A further solution is that the infusion assembly includes a spray pump, a filter, a hard tube and a soft tube. The hard tube is connected between the spray pump and the soft tube. The end of the soft tube away from the hard tube is connected to the spray tube. The soft tube is deformed as the swing frame swings. The filter is connected to the hard tube. The etching liquid enters the spray tube after being filtered by the filter.

[0020] It can be seen from the above scheme that by providing a hose, the swing frame can be easily swung, and the pipeline breakage during the swinging process can be avoided, thereby ensuring the smooth delivery of the etching liquid.

[0021] In order to achieve the above second purpose, the utility model provides a vacuum developing and etching film removal production line, including the above vacuum etching device.

[0022] A further solution is that the vacuum developing, etching and film removing production line also includes a loading device, a developing device, a compensating etching device, a film removing device, an air drying device and a unloading device arranged in sequence along the processing order, and the vacuum etching device is arranged at the front side or the rear side of the compensating etching device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a front view of an embodiment of the vacuum etching device of the utility model.

[0024] Figure 2 yes Figure 1 Enlarged view of point A in the middle.

[0025] Figure 3 It is a side view of an embodiment of the vacuum etching device of the utility model.

[0026] Figure 4 It is a top view of an embodiment of the vacuum etching device of the utility model.

[0027] Figure 5It is a structural diagram of a swing frame and a spray pipe in an embodiment of the vacuum etching device of the utility model.

[0028] Figure 6 It is a structural diagram of the vacuum suction knife assembly in the embodiment of the vacuum etching device of the utility model.

[0029] Figure 7 yes Figure 6 Enlarged view of point B in the middle.

[0030] Figure 8 It is a structural diagram of a spray assembly in an embodiment of the vacuum etching device of the utility model.

[0031] Fig. 9 It is a schematic diagram of an embodiment of the vacuum developing, etching and film removing production line of the utility model.

[0032] The present invention will be further described below with reference to the accompanying drawings and embodiments. DETAILED DESCRIPTION

[0033] Vacuum etching device embodiment:

[0034] See also Figures 1 to 5 The vacuum etching device provided in this embodiment includes a frame 1, a conveying roller assembly 2, a liquid storage tank 3, an infusion assembly 4 and a spray assembly 5.

[0035] The conveying roller assembly 2 is arranged on the frame 1, and the conveying roller assembly 2 can convey the workpiece in the longitudinal direction. Figure 1 and Figure 5 In the figure, the direction indicated by the arrow is the conveying direction of the conveying roller assembly 2.

[0036] The spray assembly 5 of this embodiment includes an upper spray assembly and a lower spray assembly, and the upper spray assembly and the lower spray assembly are respectively arranged on the upper and lower sides of the conveying roller assembly 2. The liquid storage tank 3 is arranged at the lower part or the rear side of the frame 1, and the infusion assembly 4 is connected between the liquid storage tank 3 and the spray assembly 5, and is used to transport the etching liquid in the liquid storage tank 2 to the upper spray assembly and the lower spray assembly.

[0037] The structures of the upper spray assembly and the lower spray assembly are similar, and this embodiment is described in detail by taking the upper spray assembly as an example. The upper spray assembly includes a plurality of spray pipes 51 and a plurality of nozzles 52. The plurality of spray pipes 51 are arranged in a transverse direction, the transverse direction is perpendicular to the longitudinal direction, and the extension direction of the spray pipes 51 intersects the longitudinal direction at an acute angle. The plurality of nozzles 52 are arranged evenly spaced along the extension direction of the spray pipes 51. A plurality of rows of nozzle groups extending in the transverse direction are formed on the plurality of spray pipes 51, and each nozzle 52 in the same nozzle group comes from a different spray pipe 51.

[0038] In the same nozzle group, the spraying ranges of two adjacent nozzles 52 partially overlap or do not overlap. In this embodiment, partial overlap is preferred to ensure that there will be no leakage in the horizontal direction. In addition, since the extension direction of the spray pipe 51 intersects the longitudinal direction at an acute angle, the two adjacent nozzles 52 on the same spray pipe 51 have a certain misalignment in the longitudinal direction. Even if a part of the printed circuit board is not sprayed by the first nozzle, it will be sprayed by the second or Nth nozzle to ensure that there will be no leakage in the longitudinal direction and avoid the leakage area between the two adjacent spray pipes 51.

[0039] Of course, in the same nozzle group, the spraying ranges of two adjacent nozzles 52 partially overlap, and it is the best solution that two adjacent nozzles 52 on the same spray pipe 51 have a certain offset in the longitudinal direction.

[0040] Combination Figure 4 , Figure 6 and Figure 7 The vacuum etching device further includes a circulation pump 6, a circulation pipe 7, a vacuum generator 9 and a plurality of vacuum suction knife assemblies 8. Both ends of the circulation pipe 7 are connected to the liquid storage tank 3, and the circulation pump 6 and the vacuum generator 9 are connected between the two ends of the circulation pipe 7. The vacuum generator 9 has a vacuum suction end 91, and the vacuum suction end 91 is connected to the vacuum suction knife assembly 8.

[0041] When the circulation pump 6 is started, the etching liquid in the liquid storage tank 3 flows from one end of the circulation pipe 7 to the other end, and finally returns to the liquid storage tank 3. In this process, the vacuum suction end 91 of the vacuum generator 9 forms a negative pressure, and the water or etching liquid and other liquids retained on the printed circuit board are sucked away by the vacuum suction knife assembly 8 and discharged into the liquid storage tank 3. The vacuum generator 9 is a prior art, and its detailed structure is not repeated here.

[0042] exist Figure 1 and Figure 6 In the embodiment, a plurality of vacuum suction knife assemblies 8 are arranged on the conveying roller assembly 2 at intervals along the longitudinal direction, each row of nozzle groups corresponds to at least one vacuum suction knife assembly 8, and in the longitudinal direction, the vacuum suction knife assembly 8 is arranged upstream of the corresponding nozzle group. In this embodiment, the vacuum suction knife assembly 8 is arranged above the printed circuit board and close to the upper surface of the printed circuit board, and the vacuum suction knife assembly 8 is arranged upstream of the nozzle group of the upper spray assembly. During the conveying process, the printed circuit board first passes through a vacuum suction knife assembly 8, then passes through a nozzle group, then passes through another vacuum suction knife assembly 8, and then passes through another nozzle group, and this one suction and one spray cycle continues. The one suction and one spray method is adopted, so that before spraying, the vacuum suction knife assembly 8 can first suck away the liquid retained on the printed circuit board. The liquid can be the sealing water sprayed by the water curtain sealing assembly 100, or the water washing liquid in the previous process, or the etching liquid sprayed by the previous nozzle, so that the etching liquid sprayed by the next nozzle 52 can be fully in contact with the printed circuit board, which is conducive to improving the etching quality.

[0043] See also Figure 6 and Figure 7 The vacuum suction blade assembly 8 includes a roller shaft 81, a suction blade 82, an outer sleeve 83, a supporting sleeve 84, a supporting shaft 85, an outer suction pipe 86 and two supporting members 87.

[0044] There are several suction knives 82, and three are used as an example in this embodiment. The three suction knives 82 are arranged on the roller shaft 81 along the axial direction of the roller shaft 81. A liquid suction cavity 821 is arranged inside the suction knife 82, and a plurality of liquid suction holes 822 are arranged on the side of the suction knife 82 facing the conveying roller assembly 2, and the liquid suction holes 822 are connected to the liquid suction cavity 821.

[0045] The outer sleeve 83 is arranged on the side of the suction blade 82 facing away from the conveying roller assembly 2, and the outer sleeve 83 is simultaneously connected to the inside of the three suction blades 82. The first end of the outer sleeve 83 is connected to the outer suction pipe 86 through the support sleeve 84, and the outer suction pipe 86 is connected to the vacuum suction end 91 of the vacuum generator 9. The support shaft 85 is connected to one end of the outer sleeve 83 away from the support sleeve 84. The outer sleeve 83 is preferably a sleeve structure with two ends connected, and the support shaft 85 can block one end of the outer sleeve 83.

[0046] One of the support members 87 is connected between the support sleeve 84 and the roller shaft 81 , and the other support member 87 is connected between the support shaft 85 and the roller shaft 81 , playing a supporting role.

[0047] Furthermore, the outer sleeve 83 is provided with a plurality of first through holes 831 arranged along its extension direction. The first through holes 831 penetrate both inner and outer sides of the outer sleeve 83 , and the liquid suction cavity 821 of each suction blade 82 is in communication with at least one first through hole 831 .

[0048] An inner suction pipe 88 is disposed in the outer sleeve 83, a first end of the inner suction pipe 88 extends into the support sleeve 84 and communicates with the support sleeve 84, and a second end of the inner suction pipe 88 extends into the support shaft 85 and is connected to the support shaft 85. The outer diameter of the inner suction pipe 88 is smaller than the inner diameter of the outer sleeve 83, so that an annular preset chamber 89 is provided between the outer wall of the inner suction pipe 88 and the inner wall of the outer sleeve 83. The inner suction pipe 88 is provided with a plurality of second through holes 881 arranged along its extension direction, the second through holes 881 penetrate the inner and outer sides of the inner suction pipe 88, and the second through holes 881 communicate with the first through holes 831 through the preset chamber 89.

[0049] Furthermore, the vacuum blade assembly 8 also includes a rotation driving device (not shown in the figure), a driven wheel 80 and a plurality of auxiliary wheels 90 .

[0050] A driving wheel is provided on the driving end of the rotary drive device, and a driven wheel 80 is sleeved on one end of the roller shaft 81, and the driving wheel is meshed and connected with the driven wheel 80. The rotary drive device is preferably a motor, and the rotary drive device can drive the roller shaft 81 to rotate around its own axis. At this time, the suction knife 82 does not rotate with the roller shaft 81. A plurality of auxiliary wheels 90 are sleeved on the roller shaft 81 and can rotate with the roller shaft 81. The auxiliary wheels 90 and the suction knife 82 are arranged at intervals, and the outer wall of the roller shaft 81 protrudes downwardly from the liquid suction portion of the suction knife 82, and this liquid suction portion is one end of the liquid suction hole 822 for sucking liquid.

[0051] Combination Figure 1 , Figure 2 and Figure 8 The spray assembly 5 includes a swing drive device 53, a rotating shaft 54 ​​and two swing frames 55.

[0052] Two swing racks 55 are respectively arranged at the upper and lower sides of the conveying roller assembly 2. Each swing rack 55 is provided with a swing plate 551, a plurality of spray pipes 51 and a plurality of nozzles 52, and a receiving cavity is provided in the swing plate 551. Two cams 541 are sleeved on the rotating shaft 54, and the cams 541 are eccentrically arranged with the rotating shaft 54, and the cams 541 are arranged in the receiving cavity and are matched and connected with the swing plate 551.

[0053] The left and right sides of the frame 1 are provided with guide support members 14, and the guide support members 14 are provided with grooves 141 extending in the transverse direction. The left and right sides of the swing frame 55 are provided with guide rods 552, and the guide rods 552 are matched and connected with the grooves 141.

[0054] The swing drive device 53 is preferably a motor, which can drive the rotating shaft 54 ​​to rotate around its own axis to drive the cam 541 to rotate eccentrically, and then drive the swing frame 55 to swing back and forth along the extension direction of the groove 141 through the swing plate 551.

[0055] exist Figure 3 In the embodiment, the infusion assembly 4 includes a spray pump 41, a filter 42, a hard tube 43 and a hose 44. The suction end of the spray pump 41 is arranged in the liquid storage tank 3, the hard tube 43 is connected between the output end of the spray pump 41 and the hose 44, and the end of the hose 44 away from the hard tube 43 is connected to the spray pipe 51. When the swing frame 55 swings, the hose 44 is deformed with the swing of the swing frame 55. The filter 42 is connected to the hard tube 43, and the etching liquid enters the spray pipe 51 after being filtered by the filter 42.

[0056] Combination Figure 1 and Figure 3A sealed chamber 11 is provided in the frame 1, and an inlet 12 and an outlet 13 are provided on opposite sides of the sealed chamber 11, respectively. The conveying roller assembly 2 and the spray assembly 5 are both provided in the sealed chamber 11, and the two ends of the conveying roller assembly 2 extend toward the inlet 12 and the outlet 13, respectively. The frame 1 is provided with a water curtain sealing assembly 100 at the inlet 12 and / or the outlet 13. The water curtain sealing assembly 100 includes a spray head 1001 and a spray pipe (not shown in the figure). The spray head 1001 is provided above and / or below the conveying roller assembly 2, and the spray head 1001 can spray a water curtain toward the conveying roller assembly 2. The spray pipe is connected to the sealing water, and is used to supply the sealing water to the spray head 1001, and the sealing water can be pure water or tap water.

[0057] Since the frame is provided with a water curtain sealing assembly 100 at the inlet 12, the water curtain sprayed by the nozzle 1001 will fall on the printed circuit board, so that some water is retained on the upper surface of the printed circuit board. At this time, the retained water can be sucked away by the vacuum suction knife assembly, and then the etching liquid is sprayed, which is beneficial to improve the etching effect.

[0058] Vacuum development and etching film removal production line example:

[0059] See also Fig. 9 This embodiment provides a vacuum developing and etching film removal production line, including the vacuum etching device of the above-mentioned embodiment.

[0060] The vacuum developing and etching film stripping production line further includes a loading device 10, a developing device 20, a compensating etching device 70, a film stripping device 40, an air drying device 50 and a unloading device 60 arranged in sequence along the processing sequence, and the vacuum etching device 30 is arranged at the front side or the rear side of the compensating etching device 70, and is preferably arranged at the rear side in this embodiment. A water washing device 80 can be arranged at the rear ends of the developing device 20, the vacuum etching device 30 and the film stripping device 40.

[0061] In summary, it can be seen that the utility model is conducive to gas sealing by arranging a water curtain sealing assembly, thereby avoiding leakage of gases such as chlorine and affecting production safety; by arranging the extension direction of the spray pipe to intersect the longitudinal direction at an acute angle, so that in the conveying direction of the conveying roller assembly, the spray ranges of the nozzles on the two adjacent spray pipes can partially overlap, ensuring that the printed circuit board can be covered by the full range of spraying, avoiding leakage, which is conducive to improving the etching quality; by arranging each row of nozzle groups to correspond to at least one vacuum suction knife assembly, and in the longitudinal direction, the vacuum suction knife assembly is arranged upstream of the corresponding nozzle group, and before each group of nozzle groups sprays, the vacuum suction knife assembly first sucks away the liquid retained on the printed circuit board, providing a good environment for the subsequent spraying of etching liquid, ensuring that the etching liquid can fully contact with the printed circuit board, avoiding the pool effect, and helping to further improve the etching quality.

[0062] Finally, it should be emphasized that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A vacuum etching device, comprising a frame, a conveyor roller assembly, a liquid storage tank, an infusion assembly and a spray assembly, wherein the conveyor roller assembly is arranged on the frame, the conveyor roller assembly can convey a workpiece in the longitudinal direction, the spray assembly is arranged on the upper side and / or the lower side of the conveyor roller assembly, the liquid storage tank is arranged at the lower part or the rear side of the frame, the infusion assembly is connected between the liquid storage tank and the spray assembly, and is used to convey the etching liquid in the liquid storage tank to the spray assembly, characterized in that: A sealed cavity is provided in the frame, and an inlet and an outlet are respectively provided on opposite sides of the sealed cavity. The conveying roller assembly and the spray assembly are both provided in the sealed cavity, and two ends of the conveying roller assembly extend toward the inlet and the outlet respectively. The frame is provided with a water curtain sealing assembly at the inlet and / or the outlet, and the water curtain sealing assembly sprays a water curtain toward the workpiece; The spray assembly comprises a plurality of spray pipes and a plurality of nozzles, wherein the plurality of spray pipes are arranged in a lateral direction at intervals, the lateral direction is perpendicular to the longitudinal direction, and the extending direction of the spray pipes intersects the longitudinal direction at an acute angle, and the plurality of nozzles are arranged in a lateral direction at intervals, and the plurality of spray pipes are formed with a plurality of rows of nozzle groups extending in the lateral direction; The vacuum etching device also includes a circulation pump, a circulation pipe, a vacuum generator and a plurality of vacuum suction knife assemblies, both ends of the circulation pipe are connected to the liquid storage tank, the circulation pump and the vacuum generator are connected between the two ends of the circulation pipe, the vacuum generator has a vacuum suction end connected to the vacuum suction knife assembly, and a plurality of vacuum suction knife assemblies are arranged on the conveying roller assembly at intervals along the longitudinal direction, each row of the nozzle groups corresponds to at least one vacuum suction knife assembly, and in the longitudinal direction, the vacuum suction knife assembly is arranged upstream of the corresponding nozzle group.

2. The vacuum etching device according to claim 1, characterized in that: The vacuum suction knife assembly includes a roller shaft, a suction knife, an outer sleeve and an outer suction tube. The suction knife is arranged on the roller shaft. The suction knife is provided with a plurality of suction holes on the side facing the conveying roller assembly. The outer sleeve is arranged on the side of the suction knife facing away from the conveying roller assembly, and the outer sleeve is connected with the inside of the suction knife. The two ends of the outer suction tube are respectively connected with the vacuum suction end and the outer sleeve. Both ends of the outer sleeve are provided with support members, and the support members are fixedly connected to the roller shaft.

3. The vacuum etching device according to claim 2, characterized in that: The vacuum suction knife assembly also includes a support sleeve and a support shaft, the support sleeve is connected between the outer sleeve and the outer suction tube, the outer suction tube is connected to the outer sleeve through the support sleeve, one of the support members is connected between the support sleeve and the roller shaft, the support shaft is connected to one end of the outer sleeve away from the support sleeve, and the other support member is connected between the support shaft and the roller shaft.

4. The vacuum etching device according to claim 3, characterized in that: The vacuum suction knife assembly also includes a rotation driving device, a driven wheel and an auxiliary wheel. A driving wheel is arranged on the driving end of the rotation driving device. The driven wheel is sleeved on one end of the roller shaft. The driving wheel is meshed and connected with the driven wheel to drive the roller shaft to rotate around its own axis. The auxiliary wheel is sleeved on the roller shaft and can rotate with the roller shaft, and the outer wall of the roller shaft protrudes downward from the liquid suction part of the suction knife.

5. The vacuum etching device according to claim 3, characterized in that: The outer sleeve is provided with a plurality of first through holes arranged along its extension direction, and the first through holes are connected to the inside of the suction knife; An inner suction tube is arranged inside the outer sleeve, and a preset chamber is provided between the outer wall of the inner suction tube and the inner wall of the outer sleeve. One end of the inner suction tube is connected and communicated with the supporting sleeve. The inner suction tube is arranged with a plurality of second perforations arranged along its extension direction, and the second perforations are communicated with the first perforations through the preset chamber.

6. The vacuum etching device according to claim 1, characterized in that: The spray assembly includes a swing drive device, a rotating shaft and two swing frames, the two swing frames are respectively arranged on the upper and lower sides of the conveying roller assembly, and the swing frames are provided with a swing plate, the spray pipe and the nozzle; Two cams are sleeved on the rotating shaft, the cams are eccentrically arranged with respect to the rotating shaft, and the cams are cooperatively connected with the wobble plate; Both sides of the frame are provided with guide support members, and the guide support members are provided with grooves extending in the transverse direction. Both sides of the swing frame are provided with guide rods, and the guide rods are matched and connected with the grooves. The driving end of the swing driving device is connected to the rotating shaft to drive the cam to rotate eccentrically, and then drive the swing frame to swing back and forth along the extending direction of the groove through the swing plate.

7. The vacuum etching device according to claim 6, characterized in that: The infusion assembly includes a spray pump, a filter, a hard tube and a soft tube. The hard tube is connected between the spray pump and the soft tube. One end of the soft tube away from the hard tube is connected to the spray tube. The soft tube is deformed as the swing frame swings. The filter is connected to the hard tube. The etching liquid enters the spray tube after being filtered by the filter.

8. Vacuum development and etching film removal production line, characterized by: A vacuum etching device comprising any one of claims 1 to 7.

9. The vacuum developing and etching film removal production line according to claim 8, characterized in that: The vacuum developing, etching and film removing production line also includes a loading device, a developing device, a compensating etching device, a film removing device, an air drying device and a unloading device arranged in sequence along the processing order, and the vacuum etching device is arranged at the front side or the rear side of the compensating etching device.

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