Preparation device and preparation system of rare earth aluminum target material
By designing a rare earth aluminum target preparation device including a mold and a hopper, the problem of uneven density of rare earth aluminum targets and difficulty in preparing large-sized targets in traditional methods is solved, and the uniform density and production efficiency are improved.
Patent Information
- Application Number
- CN202520665823.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-10
- Publication Date
- 2025-05-20
- Estimated Expiration
- 2035-04-10
AI Technical Summary
The traditional method of preparing rare earth aluminum targets has internal defects that lead to too low relative density, and it is difficult to prepare large-sized targets, and the density is uneven.
A rare earth aluminum target preparation device is designed, including a mold and a loading hopper. The mold is in a hollow circular shape. The loading hopper is arranged in the hollow part of the mold to ensure that the material remains in a horizontal state during the loading and hot pressing process through the limiting parts.
The preparation of rare earth aluminum targets with uniform density distribution is achieved, which improves the production and manufacturing level of large-size targets, and is safe and practical, with low cost, saving process time.
Smart Images
Figure CN222885816U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of processing equipment for rare earth alloys, and particularly relates to a preparation device and a preparation system for rare earth aluminum targets. Background Art
[0002] With the rapid iteration of the 5G communication industry, the piezoelectric thin film technology has also achieved rapid development in piezoelectric resonators. Among them, the AlN material has been widely studied due to its high Curie temperature and excellent stability. At the same time, in recent years, it has been found that Sc-doped ScAlN thin films can significantly improve the electromechanical coupling coefficient of the material; when the Sc doping reaches 43 at.% and the Al doping reaches 57 at.%, the piezoelectric coefficient d 33 of the ScAlN thin film is 5 times that of the AlN thin film, which makes ScAlN an ideal material for microelectromechanical systems (MENS) and nanoelectromechanical systems (NEMS). The ScAlN thin film is prepared by sputtering an AlSc target in a mixed atmosphere of nitrogen and argon. Therefore, the preparation effect of the aluminum scandium alloy target directly affects the product quality of the ScAlN thin film.
[0003] The traditional method for preparing rare earth aluminum targets is to melt pure scandium and pure aluminum in a vacuum melting furnace and then cast them into aluminum scandium ingots. However, the inevitable internal defects lead to too low relative density, and if large-sized targets are prepared, the difficulty of transporting the mold to the base cannot be ignored, and filling the powder in the mold cannot ensure its complete levelness, resulting in very uneven relative density of the target.
[0004] Therefore, in order to prepare large-sized rare earth aluminum targets with uniform density, a preparation device and a preparation system for rare earth aluminum targets are urgently needed. Summary of the Utility Model
[0005] In view of the defects that for existing large-sized targets, the difficulty of transporting the mold to the base and filling the powder in the mold cannot ensure its complete levelness, resulting in very uneven relative density of the prepared target, the utility model provides a preparation device and a preparation system for rare earth aluminum targets; the preparation device can ensure that the components and materials are in a horizontal state during the loading and hot pressing processes, so as to prepare rare earth aluminum targets with uniform relative density distribution, and is safe, practical and low-cost; moreover, the preparation device can save process time and greatly improve the production and manufacturing level of large-sized targets.
[0006] The utility model provides a preparation device for rare earth aluminum targets, which includes a mold and a loading hopper. The mold is in a hollow circular ring shape, and the loading hopper is arranged in the hollow part of the mold.
[0007] The charging hopper includes an integrally formed circular bottom surface and an annular wall surface. The annular wall surface is vertically arranged along the outer edge of the circular bottom surface. Above the annular wall surface, a plurality of vertically arranged limiting members are provided. The limiting members are used to limit the distance between the circular bottom surface of the charging hopper and the inner wall surface of the mold. The distance between the outer edge of the circular bottom surface and the inner wall surface of the mold is less than or equal to 1 mm.
[0008] In the present utility model, the material of the mold is graphite.
[0009] In some embodiments, in the charging hopper, the thickness of the circular bottom surface is 5 - 20 mm, such as 5 mm.
[0010] In some embodiments, in the charging hopper, the diameter of the circular bottom surface is 150 - 340 mm, such as 340 mm.
[0011] In some embodiments, in the charging hopper, the height of the annular wall surface is 25 - 50 mm, such as 25 mm.
[0012] In some embodiments, in the charging hopper, the number of the limiting members is 4. Each of the limiting members is symmetrically arranged and forms an inscribed square on the circular bottom surface. In addition to the above-mentioned limiting function, the limiting members can also facilitate demolding after the hot pressing process is completed.
[0013] In some embodiments, in the charging hopper, the width of each of the limiting members is 20 - 50 mm, such as 20 mm.
[0014] In some embodiments, in the charging hopper, the height of each of the limiting members is 50 - 280 mm, such as 155 mm.
[0015] In some embodiments, in the charging hopper, the height of each of the limiting members is less than or equal to the height of the mold.
[0016] In the present utility model, by designing the charging hopper, the problem of unevenness of aluminum scandium powder can be avoided during the conveying process and the process of entering the mold.
[0017] In some embodiments, the inner diameter of the mold is 150 - 340 mm, such as 340 mm.
[0018] In some embodiments, the outer diameter of the mold is 341 - 650 mm, such as 650 mm.
[0019] In the present utility model, those skilled in the art should know that the outer diameter of the mold is greater than the inner diameter of the mold.
[0020] In some embodiments, the height of the mold is 150 - 280 mm, such as 180 mm.
[0021] In a specific embodiment, the mold includes a plurality of orifices, each orifice is provided at the same height on the outer wall surface of the mold, and is used to provide space for the insertion of the transport piece during transportation; the depth of the orifice is less than half of the difference between the outer diameter and the inner diameter of the mold.
[0022] Among them, the transport piece can be a steel rod with a lifting rope.
[0023] In the present utility model, due to the large size of the mold, the transportation difficulty thereof is also large. By providing the above-mentioned orifices and equipping with steel rods and lifting ropes, the lifting difficulty of the mold can be greatly solved.
[0024] In a preferred embodiment, the number of the orifices is 4; each of the orifices is symmetrically arranged in pairs along the central axis of the mold.
[0025] In a certain embodiment, the distance between each orifice and a horizontal plane of the mold is 60 mm; the diameter of each orifice is 30 mm; the depth of each orifice is 109.65 mm.
[0026] In the present utility model, during the hot pressing process, when the rare earth aluminum target is under a large pressure, it may crack and damage the furnace cavity and the graphite heating element of the hot pressing furnace. By providing a cover outside the mold, additional protection measures can be added.
[0027] In some embodiments, the preparation device of the rare earth aluminum target further includes a cover; the cover includes a top surface and a side wall surface that are integrally formed, and a circular opening is provided on the top surface; the diameter of the circular opening is larger than the inner diameter of the mold; the height of the side wall surface is greater than or equal to the height of the mold.
[0028] In a specific embodiment, the material of the cover is steel.
[0029] In a certain embodiment, in the cover, the diameter of the top surface is 658 mm, the thickness of the side wall surface is 6 mm; the height of the side wall surface is 180 mm; the diameter of the circular opening is 360 mm.
[0030] In some embodiments, the preparation device of the rare earth aluminum target is a preparation device of an aluminum scandium target.
[0031] In some embodiments, the preparation device of the rare earth aluminum target is a device for preparing a rare earth aluminum target. The rare earth aluminum target is circular, the diameter of the rare earth aluminum target is 200 - 340 mm, and the thickness of the rare earth aluminum target is 5 - 50 mm.
[0032] The present utility model also provides a preparation system for a rare earth aluminum target, which includes a hot press furnace; a pressure head and the preparation device for the rare earth aluminum target as described above are provided inside the hot press furnace; the pressure head is arranged above the hollow part of the mold.
[0033] In some embodiments, a base is provided inside the hot press furnace, and the base is arranged below the mold; the base is detachably connected to the mold.
[0034] In the present utility model, by using the preparation system for the rare earth aluminum target, problems such as uneven powder laying due to direct loading inside the mold, powder leakage caused by powder remaining in the gaps due to the graphite lining on the side wall of the mold, skew of the cushion blocks placed above the powder, and difficulty in removing the target from the mold can be solved. The process of preparing the rare earth aluminum target is generally as follows: First, level the powder on the upper edge of the annular wall surface of the loading hopper, then horizontally lift the four limiting members arranged on the periphery and place them in the hollow part of the mold arranged inside the hot press furnace, and place the gasket and the cushion block on the powder in the loading hopper to ensure that the gasket and the cushion block are smoothly pressed on the powder surface; after the rare earth aluminum target is pressed into shape, take out the loading hopper containing the rare earth aluminum target together with the mold from the hot press furnace, separate the two, and then smoothly take out the rare earth aluminum target from the loading hopper along the limiting members.
[0035] In a certain embodiment of the present utility model, the process of preparing the rare earth aluminum target by using the preparation system for the rare earth aluminum target as described above is as follows:
[0036] S1. Insert 4 steel bars with hoisting ropes into the orifices on the outer wall surface of the mold. Insert the steel bars into a 12-inch mold with an outer diameter of 650 mm and an inner diameter of 340 mm, adjust the insertion length and ensure consistency, and ensure that the steel bars are clamped in the above orifices, and place the hoisting ropes in the middle of the crane hook;
[0037] S2. Lift the mold by the crane, drive the mold by rising the hook, and then slowly approach the edge of the base in the above-mentioned preparation system for the rare earth aluminum target;
[0038] S3. Slowly push the mold into the hot press furnace. When the groove at the bottom of the mold engages with the convex surface of the base, the mold assembly is completed, and then slowly remove the steel bars and the hoisting ropes;
[0039] S4. Place the loading hopper of the rare earth aluminum target preparation device on the operation table, weigh the aluminum scandium alloy powder and slowly pour it into the loading hopper. At the same time, continuously level it with a shovel and continuously level it with a ruler and record the scale; when the height of the aluminum scandium alloy powder reaches the edge of the loading hopper, check whether the powder is level;
[0040] S5. Place the loading hopper together with the scandium-aluminum alloy powder into the mold, keep it in a horizontal state during this process, and slowly place the graphite gasket and the hot-pressed graphite cushion block along the 4 limit pieces. Then, through the pressure head in the hot-pressing furnace, carry out the hot-pressing sintering of the large-sized rare-earth aluminum target.
[0041] S6. After the hot-pressing is completed, clamp the steel rod in the orifice again, place the lifting rope in the middle of the crane hook, and use the crane to lift the mold and the loading hopper from the hot-pressing furnace to the ground respectively; take out the rare-earth aluminum target from the loading hopper to obtain the rare-earth aluminum target.
[0042] In the present utility model, the rare-earth aluminum target obtained by the preparation device or the preparation system of the rare-earth aluminum target as described above can be cut by turning on a lathe or grinding on a grinding machine.
[0043] The positive and progressive effects of the present utility model are as follows:
[0044] (1) The preparation device of the present utility model ensures that the components and materials are in a horizontal state during the loading and hot-pressing processes, can obtain a rare-earth aluminum target with a uniform relative density distribution, and is safe, practical and low-cost.
[0045] (2) The preparation device of the present utility model can save process time and greatly improve the production and manufacturing level of large-sized targets. Description of the Drawings
[0046] Figure 1 It is a three-dimensional structural schematic diagram of the mold in the rare-earth aluminum target preparation device of Embodiment 1.
[0047] Figure 2 It is the front view of the mold in the rare-earth aluminum target preparation device of Embodiment 1.
[0048] Figure 3 It is a structural schematic diagram of the mold in the longitudinal section of the rare-earth aluminum target preparation device of Embodiment 1.
[0049] Figure 4 It is a structural schematic diagram of the mold in the transverse section of the rare-earth aluminum target preparation device of Embodiment 1.
[0050] Figure 5 It is a three-dimensional structural schematic diagram of the loading hopper in the rare-earth aluminum target preparation device of Embodiment 1.
[0051] Figure 6 It is the side view of the loading hopper in the rare-earth aluminum target preparation device of Embodiment 1.
[0052] Figure 7 It is a three-dimensional structural schematic diagram of the cover body in the rare-earth aluminum target preparation device of Embodiment 1.
[0053] Figure 8 Top view of the cover in the rare earth aluminum target preparation device of Example 1.
[0054] Figure 9 Schematic structural diagram of the rare earth aluminum target preparation device of Comparative Example 1.
[0055] Figure 10 Schematic diagram of the thickness distribution of the rare earth aluminum target of Example 2.
[0056] Figure 11 Schematic diagram of the density distribution of the rare earth aluminum target of Example 2.
[0057] Figure 12 Schematic diagram of the thickness distribution of the rare earth aluminum target of Comparative Example 1.
[0058] Figure 13 Schematic diagram of the density distribution of the rare earth aluminum target of Comparative Example 1.
[0059] Description of reference numerals:
[0060] Mold 1
[0061] Orifice 11
[0062] Feeding hopper 2
[0063] Circular bottom surface 21
[0064] Annular wall surface 22
[0065] Limiting member 23
[0066] Cover 3
[0067] Top surface 31
[0068] Circular opening 32
[0069] Side wall surface 33
[0070] Pressing cap 41
[0071] Pressing head 42
[0072] Graphite cathode mold 43
[0073] Graphite lining 44
[0074] Spacer 45
[0075] Graphite base 46. Detailed implementation manners
[0076] The present utility model will be further described below by way of examples, but the present utility model is not limited to the scope of the described examples. For the experimental methods without specific conditions in the following examples, they are carried out according to conventional methods and conditions, or selected according to the product specifications.
[0077] Example 1
[0078] This example discloses a preparation device for a rare earth aluminum target; it is used for preparing a scandium aluminum target, and includes a mold 1 and a loading hopper 2. The mold 1 is in a hollow circular ring shape, and the loading hopper 2 is arranged in the hollow part of the mold 1.
[0079] The loading hopper 2 includes an integrally formed circular bottom surface 21 and an annular wall surface 22. The annular wall surface 22 is arranged vertically upward along the outer edge of the circular bottom surface 21; several vertically arranged limiting members 23 are provided above the annular wall surface 22, and the limiting members 23 are used to limit the distance between the circular bottom surface 21 of the loading hopper 2 and the inner wall surface of the mold 1.
[0080] Figure 1 It is a three-dimensional structure diagram of the mold in the preparation device for the rare earth aluminum target; Figure 2 It is the front view of the mold in the preparation device for the rare earth aluminum target; Figure 3 It is a structure diagram of the mold in the longitudinal section of the preparation device for the rare earth aluminum target; Figure 4 It is a structure diagram of the mold in the transverse section of the preparation device for the rare earth aluminum target. The material of the mold 1 is graphite; the inner diameter and outer diameter of the mold 1 are 340 mm and 650 mm respectively; the height of the mold 1 is 180 mm; the mold 1 includes 4 orifices 11, and each orifice 11 is arranged at the same height on the outer wall surface of the mold 1 and is symmetrically arranged in pairs along the central axis of the mold 1, and is used to provide space for the insertion of the transport piece during transportation; the distance between each orifice 11 and the upper surface of the mold 1 is 60 mm; the diameter of each orifice 11 is 30 mm; the depth of each orifice 11 is 109.65 mm.
[0081] Figure 5 It is a three-dimensional structure diagram of the loading hopper in the preparation device for the rare earth aluminum target; Figure 6 It is the side view of the loading hopper in the preparation device for the rare earth aluminum target; the thickness and diameter of the circular bottom surface 21 are 5 mm and 340 mm respectively; the height of the annular wall surface 22 is 25 mm; the number of the limiting members 23 is 4; each limiting member 23 is symmetrically arranged and forms an inscribed square on the circular bottom surface 21; the width of each limiting member 23 is 20 mm; the height of each limiting member 23 is 155 mm.
[0082] Figure 7 It is a three-dimensional structure diagram of the cover body in the preparation device for the rare earth aluminum target; Figure 8It is the top view of the cover in the preparation device of the rare earth aluminum target; the preparation device of the rare earth aluminum target further includes a cover; the cover 3 includes a top surface 31 and a side wall surface 33 which are integrally formed, and a circular opening 32 is provided on the top surface 31; the material of the cover 3 is steel; the diameter of the top surface 31 is 658 mm (i.e., the inner diameter of the cover 3), and the thickness of the side wall surface 33 is 6 mm (the outer diameter of the cover is 670 mm); the height of the side wall surface 33 is 180 mm; the diameter of the circular opening 32 is 360 mm; wherein, the diameter of the top surface 31 is the outer diameter of the cover 3 minus twice the thickness of the side wall surface 33.
[0083] This embodiment also discloses a preparation system for a rare earth aluminum target, which includes a hot pressing furnace; a pressing head and the preparation device for the rare earth aluminum target as described above are provided inside the hot pressing furnace; the pressing head is arranged above the hollow part of the mold. A base is provided inside the hot pressing furnace, and the base is arranged below the mold; the base is detachably connected to the mold.
[0084] Embodiment 2
[0085] This embodiment discloses a preparation method for a rare earth aluminum target, which uses the preparation system for a rare earth aluminum target in Embodiment 1 to prepare a large-sized and circular aluminum scandium target, and it includes the following steps:
[0086] The first step: Alloy high-purity aluminum grains and high-purity metallic scandium into a molten alloy in a vacuum induction melting furnace under an argon atmosphere, and then quickly cast it into an aluminum scandium alloy, with the scandium content maintained at 10 at.%, where at.% refers to the ratio of the atomic weight of scandium to the atomic weight in the aluminum scandium alloy.
[0087] The second step: Crush the cast aluminum scandium alloy into small pieces with a size of 3 - 5 cm, and use the method of vacuum gas atomization to crush it into powder with a particle size of 25 - 75 μm, and then vacuum package it.
[0088] The third step: Pour the aluminum scandium alloy powder into a graphite loading hopper, and slowly place it at the bottom of the mold, and then perform hot pressing treatment; Heat the hot pressing furnace step by step to 630 °C, keep it warm and under pressure for six hours, during which the vacuum degree in the system reaches 10 - 3 Pa, and set the hot pressing pressure within the range of 277.6 ± 1 T (30 Mpa). During the hot pressing process, it is necessary to continuously adjust the pressure to maintain it within this range.
[0089] The fourth step: After the heat preservation and pressure holding are completed, the aluminum scandium alloy is cooled with the furnace to below 50 °C and taken out after demolding. Finally, the 10 at.% aluminum scandium alloy is ground into a dense aluminum scandium target by a numerical control lathe and a grinding machine.
[0090] Comparative Example 1
[0091] This comparative example is an existing device for preparing aluminum scandium alloy targets. Figure 9 It is a schematic structural diagram of the rare earth aluminum target preparation device of this comparative example. The preparation device for the aluminum scandium alloy target includes an upper combined compression cap 41, a pressure head 42, a graphite female die mold 43 (equipped with a graphite inner lining 44), a spacer block 45, and four layers of graphite bases 46 that are mutually clamped. The process of preparing the aluminum scandium target using this preparation device is as follows:
[0092] Step 1: Aluminum scandium ingots with a scandium content of 10 at.% are made into powders with a particle size of 25 - 75 μm by the method of vacuum gas atomization and then vacuum packaged.
[0093] Step 2: The alloy powder is directly poured into the above-mentioned 12-inch graphite hot pressing mold and placed in a vacuum hot pressing furnace (the vacuum degree reaches 10 -3 Pa), and the temperature is increased step by step to 630 °C and held for six hours under pressure. The pressure is set at 277 ± 1 T (30 Mpa), and the pressure needs to be continuously adjusted to maintain within this range during the process.
[0094] Step 3: After the heat preservation and pressure holding are completed, the aluminum scandium alloy is cooled in the furnace to below 50 °C and taken out after demolding. Finally, the 10 at.% aluminum scandium alloy is ground into a dense aluminum scandium target by a numerical control lathe and a grinding machine.
[0095] Effect Example 1
[0096] After the hot pressing in Example 2 and Comparative Example 1, two kinds of aluminum scandium targets are obtained respectively; the above two kinds of aluminum scandium targets are respectively cut into 45 pieces by turning and grinding in a way that is equidistant in longitude and latitude;
[0097] After cutting, measure the thickness of different regions of the aluminum scandium target in Example 2; Figure 10 It is a schematic diagram of the thickness distribution of the rare earth aluminum target in Example 2; it can be seen from this figure that the thickness distribution of the aluminum scandium target in Example 2 is relatively uniform in each region.
[0098] After cutting, measure the thickness of different regions of the aluminum scandium target in Comparative Example 1, and optimize and calculate the mutually adjacent aluminum scandium blocks to obtain Figure 12 the thickness distribution structure; Figure 12 It is a schematic diagram of the thickness distribution of the rare earth aluminum target in Comparative Example 1; it can be seen from this figure that the thickness difference of the aluminum scandium target in Comparative Example 1 is relatively large in each region, and the thickness is uneven.
[0099] After completing the thickness test, respectively use the Archimedes drainage method to test the density distribution of each region of the aluminum scandium blocks in Example 2 and Comparative Example 1.
[0100] Figure 11 It is a schematic diagram of the density distribution of the rare earth aluminum target in Example 2; it can be seen from this figure that the density distribution of the aluminum scandium target in Example 2 is relatively uniform in each region.
[0101] After testing the density distribution of the aluminum scandium blocks in each region of Comparative Example 1, the mutually adjacent aluminum scandium blocks were optimized and calculated to obtain Figure 13 the relative density distribution structure; Figure 13 It is a schematic diagram of the density distribution of the rare earth aluminum target of Comparative Example 1; it can be seen from this figure that the density of the aluminum scandium target in Comparative Example 1 varies greatly in each region and the thickness is uneven.
[0102] It can be seen from the above Effect Examples that, compared with the targets prepared by traditional manual filling, the thickness and relative density distribution of the aluminum scandium targets prepared in this application are more uniform, and the relative density is generally about 2.82 g / cm 3 or so, and the uniformity of the target is good.
[0103] In addition, in the existing technology, when a large-size graphite mold is vertically hoisted by a traveling crane and approaches the upper edge of the mold base, it is easy to bump the edge and cause the base to break. At the same time, it is very difficult to operate during the process of adjusting the angle and clamping with the base, the risk of the mold falling is extremely high, and it is not easy to take out the pressed product. When filling the powder into the mold, it is extremely difficult for the powder to reach the standard level. Secondly, during the process of using auxiliary tools to level, it is very easy to bring in tooling impurities such as graphite, which affects the product quality. In contrast, the preparation device of this application can ensure that the components and materials are in a horizontal state during the loading and hot pressing processes, so as to obtain a rare earth aluminum target with a uniform relative density distribution, which is safe, practical and low-cost; moreover, this preparation device can save process time and greatly improve the production and manufacturing level of large-size targets.
Claims
1. A device for preparing a rare earth aluminum target, characterized in that: It includes a mold and a charging hopper, the mold is in a hollow ring shape, and the charging hopper is arranged in the hollow part of the mold; The charging hopper includes an integrally formed circular bottom surface and an annular wall surface, wherein the annular wall surface is vertically arranged at the outer edge of the circular bottom surface; a plurality of vertically arranged limit members are arranged above the annular wall surface, and the limit members are used to limit the distance between the circular bottom surface of the charging hopper and the inner wall surface of the mold; the distance between the outer edge of the circular bottom surface and the inner wall surface of the mold is less than or equal to 1 mm.
2. The device for preparing a rare earth aluminum target according to claim 1, characterized in that: In the charging hopper, the circular bottom surface or the annular wall surface satisfies one or both of the following conditions: ① The thickness of the circular bottom surface is 5~20mm; ② The diameter of the circular bottom surface is 150~340mm; ③The height of the annular wall is 25~50mm.
3. The preparation device of rare earth aluminum target material according to claim 1, characterized in that: In the charging hopper, the limiter meets one or more of the following conditions: ① The number of the limiting members is 4; the limiting members are symmetrically arranged and form an inscribed square on the circular bottom surface; ② The width of each of the limiters is 20~50mm; ③ The height of each of the limiters is 50~280mm; ④ The height of each of the limit members is less than or equal to the height of the mold.
4. The preparation device of rare earth aluminum target material according to claim 1, characterized in that: The mold meets one or more of the following conditions: ① The inner diameter of the mold is 150~340mm; ② The outer diameter of the mold is 341~650mm; ③The height of the mold is 150~280mm.
5. The preparation device of rare earth aluminum target material according to claim 4, characterized in that: The mold includes a plurality of openings, each of which is arranged at the same height of the outer wall surface of the mold, and is used to provide an insertion space for the transported part during transportation; The depth of the orifice is less than half the difference between the outer diameter and the inner diameter of the die.
6. The device for preparing a rare earth aluminum target according to claim 5, characterized in that: The number of the orifices is 4; The orifices are symmetrically arranged in pairs along the central axis of the mold.
7. The device for preparing a rare earth aluminum target according to claim 1, characterized in that: The rare earth aluminum target material preparation device further includes a cover body; The cover body includes an integrally formed top surface and side wall surface, the top surface is provided with a circular opening; the diameter of the circular opening is greater than the inner diameter of the mold; the height of the side wall surface is greater than or equal to the height of the mold.
8. The device for preparing a rare earth aluminum target according to any one of claims 1 to 7, characterized in that: The device for preparing the rare earth aluminum target material is a device for preparing the aluminum-scandium target material.
9. A system for preparing a rare earth aluminum target, characterized in that: It comprises a hot pressing furnace; a pressing head and a preparation device for a rare earth aluminum target material as described in any one of claims 1 to 8 are arranged inside the hot pressing furnace; the pressing head is arranged above the hollow part of the mold.
10. The system for preparing a rare earth aluminum target according to claim 9, characterized in that: A base is provided inside the hot pressing furnace, and the base is arranged below the mold; the base is clamped with the mold.