Carrier, objective table and coating equipment

Abstract

The utility model discloses a carrying rack, a carrying table and coating equipment, the coating equipment comprises the carrying table, the carrying table comprises a second rotating disc and at least two carrying racks, each carrying rack comprises a knife rest assembly, an elastic shifting piece and a rotatable first main shaft, the knife rest assembly comprises a first rotating disc and at least two material rods, the lower ends of the material rods are arranged on the first rotating disc, and the elastic shifting piece is arranged on the first rotating disc; the material rods are distributed on the first turntable at intervals along the circumference around the central axis of the first turntable; the first rotary disc is fixedly arranged on the first main shaft, and the first main shaft can rotate with the central axis in the length direction of the first main shaft as the rotation axis to drive the first rotary disc to rotate. The first rotating disc is provided with a containing cavity, and the elastic shifting piece is arranged in the containing cavity. And in the rotating process of the first main shaft, the elastic shifting piece shifts the material rod, so that the material rod rotates on the first rotating disc and rotates by taking the central axis in the length direction of the material rod as the rotating axis.

Description

Technical Field

[0001] The present application relates to the technical field of tool preparation, and in particular to a carrier, a stage and a coating device. Background Technology

[0002] In order to improve the mechanical properties and service life of the blades, there is a coating process in the production process of the blades. The blades are loaded in batches on the carrier, and the carrier is assembled on the carrier of the coating equipment, and then the coating is deposited on the surface of the blades. After the blades are coated, they can effectively improve the wear resistance, oxidation resistance and metal fatigue resistance, as well as the surface hardness, roughness and other mechanical properties.

[0003] Conventional coating equipment also has elastic paddles designed to move the material rod where the blade is located, so that the blade can rotate in the carrier to promote the uniformity of coating deposition on the blade surface. However, due to the high temperature environment in the coating chamber and the different target sputtering components in the chamber environment at different stages, after the carrier is used for a long time, the elastic paddle is affected by the chamber environment, and the structure and stability of the elastic paddle change, which affects the use of the elastic paddle and thus affects the uniformity of the coating on the blade surface. Contents of utility model

[0004] In order to solve at least one of the above technical problems, the present application provides a carrier, a stage and a coating device, and the technical solution adopted is as follows.

[0005] The coating device provided in the present application comprises a stage, and a carrier of the stage is located in a coating chamber of the coating device.

[0006] The loading platform provided in the present application includes a second turntable and at least two loading racks, wherein the second turntable can rotate with its own central axis as the rotation axis; the loading racks are arranged on the second turntable, and each of the loading racks is distributed along the circumference around the central axis of the second turntable; wherein, during the rotation of the second turntable, the first main axis of the loading rack can rotate with its own central axis in the length direction as the rotation axis, so that the loading rack rotates with its own central axis as the rotation axis.

[0007] The object carrier provided by the present application includes a tool holder assembly, an elastic paddle and a rotatable first spindle, the tool holder assembly includes a first turntable and at least two material rods, the lower ends of the material rods are arranged on the first turntable, and the material rods are distributed on the first turntable along the circumference around the central axis of the first turntable at intervals; the first turntable is fixedly arranged on the first spindle, and the first spindle can rotate with the central axis of its own length direction as the rotation axis to drive the first turntable to rotate; the first turntable is arranged with a accommodating chamber, and the elastic paddle is arranged in the accommodating chamber; wherein, during the rotation of the first spindle, the elastic paddle paddles the material rod, thereby causing the material rod to rotate on the first turntable and the material rod to rotate with the central axis of its own length direction as the rotation axis.

[0008] In some embodiments of the present application, the accommodating chamber is located on the lower surface of the first rotating disk.

[0009] In some embodiments of the present application, a gear shifting seat is provided at the lower end of the material rod, and a plurality of tooth-shaped structures are arranged at intervals along the circumference of the outer wall of the gear shifting seat. During the rotation of the first main shaft, the elastic shifting piece shifts the gear shifting seat, thereby causing the material rod to rotate on the first rotating disk.

[0010] In some embodiments of the present application, the outer wall of the first main shaft is sleeved with an annular structure, the elastic paddle is fixedly arranged on the annular structure, and the first main shaft rotates relative to the annular structure so that the elastic paddle moves the material rod.

[0011] In some embodiments of the present application, at least two elastic paddles are provided, and each of the elastic paddles is distributed on the annular structure along a circumference around the central axis of the first main shaft at intervals.

[0012] In some embodiments of the present application, a rolling bearing is sleeved on the outer wall of the first main shaft, the inner ring of the rolling bearing is fixedly connected to the first main shaft, the outer ring of the rolling bearing is fixedly connected to the annular structure or the outer ring of the rolling bearing serves as the annular structure.

[0013] In some embodiments of the present application, the carrier includes a first stop structure, which is fixedly disposed on the annular structure, and the carrier includes a second stop structure, which is disposed on the upper surface of the second turntable, and the second stop structure applies resistance to the first stop structure to prevent the annular structure from rotating, so that when the first spindle drives the first turntable to rotate, the first spindle rotates relative to the annular structure, thereby causing the elastic paddle to poke the material rod.

[0014] In some embodiments of the present application, the second stopping structure is arranged as a column, the first stopping structure extends along the radial direction of the first turntable and extends out of the first turntable, and the side wall of the second stopping structure abuts against the outer side wall of the first stopping structure to stop the annular structure from rotating.

[0015] The embodiments of the present application have at least the following beneficial effects: In the carrier, the elastic flap is arranged in the accommodating chamber of the first turntable, and the side wall of the accommodating chamber can reduce the influence of the environment of the coating chamber on the elastic flap, reduce the structural and performance changes of the elastic flap, so that the elastic flap can well push the material rod, ensuring that the surface of the blade can be evenly coated. The present application can be widely applied to the technical field of tool preparation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The aspects and advantages described and / or appended in the embodiments of the present application will become apparent and easy to understand in conjunction with the following drawings. It should be noted that the embodiments shown in the following drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application.

[0017] Figure 1 It is a structural diagram of the carrier table.

[0018] Figure 2 It is a structural diagram of the carrier table arranged on the driving assembly.

[0019] Figure 3 It is a structural diagram of the carrier.

[0020] Figure 4 It is a structural diagram of the carrier.

[0021] Figure 5 It is a bottom view of the carrier.

[0022] Figure 6 It is a structural diagram of the elastic flap and the tooth-pushing seat in the first turntable.

[0023] Reference numerals: 1000, carrier table; 1100, second turntable; 1101, support seat; 1200, second stopping structure; 1300, second top plate; 1401, sun gear; 1402, planet gear; 2000, carrier; 2100, first main shaft; 2201, first turntable; 2202, material rod; 2203, tooth-pushing seat; 2301, elastic flap; 2302, first stopping structure; 2400, accommodating chamber; 2500, first top plate; 3100, driving assembly; 3200, base; 3201, support column. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] The following is combined with the attached Figure 1 to the attached Figure 6Embodiments of the present application will be described in detail. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and should not be construed as a limitation of the present application.

[0025] In the description of the present application, it should be understood that if terms such as "center", "middle", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. are used to indicate the orientation or positional relationship, it is based on the orientation or positional relationship shown in the accompanying drawings. This is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present application. Features defined as "first" and "second" are used to distinguish feature names and do not have special meanings. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise specified, the meaning of "a plurality" is two or more.

[0026] In the description of the present application, it should be noted that unless otherwise clearly defined and limited, the terms "mount", "connect", and "couple" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0027] The present application relates to a coating device, and the coating device includes a stage 1000.

[0028] It should be noted that the other components and operations of the coating device have been recorded in the related art for those of ordinary skill in the art, and will not be described in detail here.

[0029] The present application relates to a stage 1000. The stage 1000 includes a second turntable 1100 and a carrier 2000. The carrier 2000 is disposed on the second turntable 1100. Blades are arranged on the carrier 2000, and the carrier 2000 is located in the coating chamber of the coating device.

[0030] The carrier 2000 is disposed at an off - center position on the second turntable 1100. The second turntable 1100 can rotate about its own central axis, so that the carrier 2000 moves in a circular motion about the central axis of the second turntable 1100, realizing the revolution of the carrier 2000 in the coating chamber. It can be understood that the revolution of the carrier 2000 refers to the circular motion of the carrier 2000 about the central axis of the second turntable 1100.

[0031] Furthermore, at least two carriers 2000 are provided to increase the blade loading capacity of the carrier table 1000, improve the coating efficiency of the blades, and reduce costs. Specifically, the carriers 2000 are circumferentially spaced apart around the central axis of the second turntable 1100, and the carriers 2000 are equally spaced.

[0032] It should be noted that the coating equipment includes a driving component 3100. The second turntable 1100 is located above the driving component 3100, and the driving component 3100 is connected to the second turntable 1100. The driving component 3100 drives the second turntable 1100 to rotate, thereby realizing the revolution of the carrier 2000.

[0033] This application relates to a carrier 2000. The carrier 2000 includes a tool holder assembly and a first main shaft 2100. Blades are arranged on the tool holder assembly, and the tool holder assembly is connected to the first main shaft 2100. Further, the first main shaft 2100 is rotatable, and the first main shaft 2100 is rotatably arranged on the second turntable 1100.

[0034] During the rotation of the second turntable 1100 of the carrier table 1000, the first main shaft 2100 can rotate about the central axis in its own length direction, and the first main shaft 2100 drives the tool holder assembly to rotate, thereby realizing the self - rotation of the tool holder assembly, that is, realizing the self - rotation of the carrier 2000.

[0035] It should be noted that the self - rotation of the carrier 2000 refers to the rotational motion of the carrier 2000 about its own central axis. And the central axis of the carrier 2000, the central axis of the tool holder assembly, and the central axis in the length direction of the first main shaft 2100 are collinear.

[0036] The tool rest assembly includes a first turntable 2201 and a rod 2202. The lower end of the rod 2202 is arranged on the first turntable 2201. The blade is a perforated blade, and the blade is sleeved on the outer side wall of the rod 2202. The first turntable 2201 is fixedly arranged on the first main shaft 2100, and the central position of the first turntable 2201 is fixedly connected to the first main shaft 2100. The lower end of the first main shaft 2100 extends out below the first turntable 2201. In the carrier 1000, the first main shaft 2100 rotates and drives the first turntable 2201 to rotate, thereby realizing the self-rotation of the carrier 2000.

[0037] The rod 2202 is arranged to be at least two to increase the blade loading capacity of the carrier 2000, improve the coating efficiency of the blade, and reduce costs. Specifically, the rods 2202 are circumferentially spaced around the central axis of the first turntable 2201 on the first turntable 2201, each rod 2202 extends parallel to the central axis of the carrier 2000, and the rods 2202 are equally spaced.

[0038] The carrier 2000 includes a first top plate 2500. The first top plate 2500 is located at the top of the carrier 2000, and the upper ends of the rods 2202 are all connected to the first top rod. It can be understood that the first top rod and the rod 2202 are detachable, so that the user can sleeve the blade on the outer side wall of the rod 2202. Further, to reduce the weight of the carrier 2000, the first top plate 2500 is provided with a hollow area.

[0039] Further, on the first turntable 2201, the rod 2202 can rotate around the central axis in its own length direction, thereby realizing the self-rotation of the rod 2202, and further the blade arranged on the rod 2202 realizes self-rotation. It can be understood that the self-rotation of the blade refers to the rotation of the rod 2202 around the central axis of the rod 2202, so that the blade rotates with the rod 2202.

[0040] It should be noted that in the carrier 2000, when the carrier 2000 rotates, the rod 2202 moves around the central axis of the carrier 2000 and rotates around its own central axis, so as to realize two motion states of the blade moving around the central axis of the carrier 2000 and the blade rotating itself, improving the uniformity of the coating on the blade surface. On the other hand, the revolution of the carrier 2000 in the carrier table 1000 can also realize the third motion state of the blade in the coating chamber, further making the surface of the blade evenly coated.

[0041] The carrier 2000 includes an elastic flap 2301. During the rotation of the carrier 2000, the elastic flap 2301 toggles the material rod 2202, causing the material rod 2202 to rotate on the first turntable 2201. The material rod 2202 rotates about the central axis in its own length direction as the rotation axis, so that the material rod 2202 realizes self-rotation.

[0042] The first turntable 2201 is provided with a receiving chamber 2400. The elastic flap 2301 is arranged in the receiving chamber 2400. The receiving chamber 2400 has a top wall, a bottom wall and enclosing side walls. The elastic flap 2301 is hidden in the receiving chamber 2400 to prevent the elastic flap 2301 from being exposed in the coating chamber, avoid the structure of the elastic flap 2301 being affected by the high-temperature environment in the coating chamber during blade coating, and extend the service life of the elastic flap 2301.

[0043] It should be noted that the receiving chamber 2400 is set as a cylindrical chamber, and the first main shaft 2100 is fixedly arranged at the center position of the top wall of the receiving chamber 2400.

[0044] As an implementation manner, the receiving chamber 2400 is located on the lower surface of the first turntable 2201. Specifically, a cylindrical chamber is formed by the downward depression of the lower surface of the first turntable 2201 as the receiving chamber 2400.

[0045] After the carrier 2000 is assembled on the second turntable 1100, the receiving chamber 2400 uses the upper surface of the second turntable 1100 as the bottom wall. Alternatively, a support seat 1101 for arranging the carrier 2000 is provided on the second turntable 1100. The carrier 2000 is located on the support seat 1101, and the upper surface of the support seat 1101 serves as the bottom wall of the receiving chamber 2400.

[0046] As an implementation manner, an annular structure is sleeved on the outer side wall of the first main shaft 2100. The annular structure is located in the receiving chamber 2400. The elastic flap 2301 is fixedly arranged on the annular structure. The elastic flap 2301 extends along the tangential direction of the annular structure. One end of the elastic flap 2301 is fixed to the annular structure and the other end is used to toggle the material rod 2202.

[0047] When the carrier 2000 rotates, the first main shaft 2100 rotates relative to the annular structure. The position of the annular structure is fixed relative to the second turntable 1100 of the carrier table 1000. Correspondingly, the position of the elastic flap 2301 is unchanged relative to the second turntable 1100. Driven by the first main shaft 2100, the first turntable 2201 rotates, and the material rod 2202 moves around with the central axis of the carrier 2000 as the rotation axis. Then the elastic flap 2301 can toggle the material rod 2202, thereby causing the material rod 2202 to rotate.

[0048] As an implementation, at least two elastic paddles 2301 are provided, and the elastic paddles 2301 are circumferentially and spaced apart around the central axis of the first main shaft 2100 on the annular structure.

[0049] It can be understood that during the rotation of the carrier 2000, the multiple elastic paddles 2301 sequentially push the material rod 2202, increasing the rotation frequency of the material rod 2202.

[0050] As an implementation, a tooth seat 2203 is provided at the lower end of the material rod 2202. The tooth seat 2203 is rotatably arranged on the first turntable 2201, and a plurality of tooth-shaped structures are arranged at intervals along the circumferential direction on the outer side wall of the tooth seat 2203. Specifically, the tooth seat 2203 is arranged as a gear or a ratchet wheel.

[0051] The end of the elastic paddle 2301 contacts the tooth-shaped structure of the tooth seat 2203. Specifically, the end of the elastic paddle 2301 abuts in the tooth-shaped groove formed by the tooth-shaped structure. During the rotation of the first turntable 2201, the elastic paddle 2301 pushes the tooth seat 2203, and further causes the material rod 2202 to rotate on the first turntable 2201, so that the material rod 2202 realizes self-rotation.

[0052] During the rotation of the carrier 2000, the elastic paddles 2301 push the tooth seats 2203 of the respective material rods 2202 one by one, so that each material rod 2202 can rotate. It can be understood that every time the elastic paddle 2301 pushes the tooth seat 2203, the material rod 2202 connected to the tooth seat 2203 rotates by a set angle.

[0053] In some examples, an avoidance notch is provided on the side wall of the accommodation chamber 2400. The tooth seat 2203 is at least partially located in the avoidance notch, and the tooth-shaped structure of the tooth seat 2203 is exposed at the avoidance notch, so that a part of the tooth-shaped structure on the side of the tooth seat 2203 is located in the accommodation chamber 2400, and further the elastic paddle 2301 can contact the tooth-shaped structure of the tooth seat 2203.

[0054] It can be understood that the tooth seats 2203 at the lower ends of the respective material rods 2202 are arranged at intervals along the circumference. Correspondingly, the side wall of the accommodation chamber 2400 has the same number of avoidance notches as the tooth seats 2203, so that each tooth seat 2203 can contact the elastic paddle 2301.

[0055] Regarding the accommodation chamber 2400 and the tooth seat 2203, there is at least the following alternative: at least a part of the tooth-shaped structure on the side of the tooth seat 2203 is located in the accommodation chamber 2400. In some examples, the material rod 2202 penetrates the top wall of the accommodation chamber 2400 and the tooth seat 2203 extends into the accommodation chamber 2400, so that the tooth seat 2203 is located in the accommodation chamber 2400.

[0056] As an implementation manner, the carrier 2000 includes a first stopping structure 2302, and the first stopping structure 2302 is fixedly arranged on the annular structure. When the carrier 2000 rotates, the second turntable 1100 applies a resistance to the first stopping structure 2302 to apply a resistance to the annular structure, thereby preventing the annular structure from rotating, so that when the first main shaft 2100 drives the first turntable 2201 to rotate, the first main shaft 2100 rotates relative to the annular structure, and the annular structure is fixed relative to the second turntable 1100, and then the elastic flap 2301 toggles the material rod 2202.

[0057] Furthermore, the carrier table 1000 includes a second stopping structure 1200, and the second stopping structure 1200 is arranged on the upper side surface of the second turntable 1100. When the carrier 2000 rotates self - rotatably, the second stopping structure 1200 applies a resistance to the first stopping structure 2302, and then the annular structure is fixed relative to the second turntable 1100.

[0058] It can be understood that the corresponding carriers 2000 are set to at least two, the number of the second stopping structures 1200 is the same as that of the carriers 2000, and the carrier table 1000 is configured with a second stopping structure 1200 for each carrier 2000.

[0059] As an implementation manner, the first stopping structure 2302 is set as a rod - shaped structure. One end of the first stopping structure 2302 is fixedly arranged on the annular structure, and the first stopping structure 2302 extends along the radial direction of the first turntable 2201. The second turntable 1100 stops the rotation of the annular structure by abutting against the outer side wall of the first stopping structure 2302. Specifically, the side wall of the second stopping structure 1200 abuts against the outer side wall of the first stopping structure 2302 to stop the rotation of the annular structure.

[0060] Furthermore, the first stopping structure 2302 extends along the radial direction of the first turntable 2201 to the outside of the first turntable 2201. On the upper side surface of the second turntable 1100, the second stopping structure 1200 is set as a column, and the first stopping structure 2302 and the second stopping structure 1200 are in an interlaced state. During the self - rotation process of the carrier 2000, the annular structure and the first stopping structure 2302 rotate with the first main shaft 2100. When the outer side wall of the first stopping structure 2302 contacts the outer side wall of the second stopping structure 1200, the first stopping structure 2302 and the annular structure stop moving.

[0061] It should be noted that the side wall of the accommodation chamber 2400 has an annular avoidance area, so that the first stop structure 2302 extends from the accommodation chamber 2400 to the outside, and the rotation of the first turntable 2201 is prevented from being interfered by the first stop structure 2302. Further, along the central axis of the carrier 2000, the position of the first stop structure 2302 on the annular structure is lower than the position of the elastic flap 2301 on the annular structure, so that the annular avoidance area is lower than the elastic flap 2301, preventing the elastic flap 2301 from being exposed in the annular avoidance area, and preventing the first stop structure 2302 from interfering with the movement of the respective material rods 2202 on the first turntable 2201 around the central axis of the first turntable 2201.

[0062] In some examples, when the accommodation chamber 2400 is located below the first turntable 2201, there is a gap between the lower surface of the first turntable 2201 and the upper surface of the second turntable 1100, so as to form an annular avoidance area between the lower surface of the first turntable 2201 and the upper surface of the second turntable 1100.

[0063] In other examples, when the accommodation chamber 2400 is located below the first turntable 2201, there is a gap between the lower surface of the first turntable 2201 and the upper surface of the support base 1101, so as to form an annular avoidance area between the lower surface of the first turntable 2201 and the upper surface of the support base 1101.

[0064] Regarding the first stop structure 2302 and the second stop structure 1200, there are at least the following alternative examples.

[0065] In some alternative examples, the first stop structure 2302 is set as a protrusion or a groove on the surface of the annular structure, and the second stop structure 1200 is set as a groove or a protrusion. When the carrier 2000 is assembled to the second turntable 1100, the first stop structure 2302 and the second stop structure 1200 are in concave-convex fit, thereby realizing the resistance exerted by the carrier table 1000 on the first stop structure 2302.

[0066] In other alternative examples, the annular structure has a polygonal contour, and the second turntable 1100 is provided with a recessed installation area corresponding to the polygonal contour. When the carrier 2000 is assembled to the second turntable 1100, the polygonal contour of the annular structure is located in the installation area. It can be understood that the annular structure uses the polygonal contour as the first stop structure 2302, and the carrier table 1000 uses the inner side wall of the installation area as the second stop structure 1200, so as to realize the resistance exerted by the carrier table 1000 on the annular structure.

[0067] As an implementation manner, a rolling bearing is sleeved on the outer side wall of the first main shaft 2100. Specifically, the inner ring of the rolling bearing is sleeved on the outer side wall of the first main shaft 2100, and the inner side wall of the inner ring is in interference fit with the outer side wall of the first main shaft 2100, so as to fix the inner ring of the rolling bearing on the outer side wall of the first main shaft 2100.

[0068] Further, the outer ring of the rolling bearing is an annular structure, and both the elastic flap 2301 and the first stop structure 2302 are located on the outer ring of the rolling bearing.

[0069] Regarding the first main shaft 2100, the rolling bearing, and the annular structure, there are at least the following alternative examples.

[0070] In some alternative examples, the outer ring of the rolling bearing is fixedly connected to the annular structure, and the annular structure is sleeved on the outer side wall of the outer ring.

[0071] Further, the inner side wall of the annular structure is in interference fit with the outer side wall of the outer ring, or the annular structure is fixed to the outer ring of the rolling bearing by at least one locking screw, and the locking screw penetrates the side wall of the annular structure along the radial direction of the annular structure and abuts against the outer ring of the rolling bearing.

[0072] In some other alternative examples, the annular structure is provided as a sleeve, the inner side wall of the annular structure is in sliding contact with the outer side wall of the first main shaft 2100, and the first main shaft 2100 and the annular structure can rotate relative to each other.

[0073] As an implementation manner, the first main shaft 2100 is provided as a short shaft, the first turntable 2201 is located at the top end of the first main shaft 2100, and the first turntable 2201 is fixedly installed at the top end of the first main shaft 2100.

[0074] Further, a connecting rod is provided on the upper side surface of the first turntable 2201, the lower end of the connecting rod is fixedly arranged at the central position of the first turntable 2201, and the upper end of the connecting rod is fixedly arranged at the central position of the first top plate 2500.

[0075] Regarding the first main shaft 2100, it can be at least alternatively designed as: the first main shaft 2100 is provided as a long shaft, the first turntable 2201 is sleeved on the outer side wall of the first main shaft 2100 and the first turntable 2201 is fixedly connected to the first main shaft 2100, and the first top plate 2500 is sleeved on the outer side wall of the first main shaft 2100 and the first top plate 2500 is fixedly connected to the first main shaft 2100.

[0076] Based on the above descriptions of the carrier 2000 and the carrier table 1000, the structure of the carrier table 1000 will be further introduced below.

[0077] As an implementation, the second turntable 1100 is provided with a second main shaft, and the second main shaft is located at an eccentric position on the second turntable 1100. The first main shaft 2100 is provided as a sleeve or a hollow tube, and the first main shaft 2100 is sleeved on the outer sidewall of the second main shaft, so that the carrier 2000 is arranged on the second turntable 1100, and then the second turntable 1100 can drive the carrier 2000 to move around to achieve revolution.

[0078] Furthermore, corresponding to the number of carriers 2000, the second main shaft is provided with at least two, and each second main shaft is circumferentially and spaced apart along the central axis of the second turntable 1100. Each second main shaft is equally spaced, so that each carrier 2000 is equally spaced on the second turntable 1100.

[0079] It can be understood that the second main shaft can rotate with the central axis in the length direction of itself as the rotation axis, and the second main shaft drives the first main shaft 2100 to rotate, thereby realizing the rotation of the carrier 2000 on the second turntable 1100.

[0080] To realize the rotation of the second main shaft driving the first main shaft 2100, the first main shaft 2100 is connected to the second main shaft through a pin. Specifically, the pin penetrates the sidewall of the first main shaft 2100 and the second main shaft along the radial direction of the first main shaft 2100, so as to realize the transmission of torque between the second main shaft and the first main shaft 2100. Or, the first main shaft 2100 is fixedly connected to the second main shaft through a locking screw, and the locking screw penetrates the sidewall of the first main shaft 2100 along the radial direction of the first main shaft 2100 and abuts against the sidewall of the second main shaft.

[0081] As an implementation, the carrier table 1000 includes a second top plate 1300, and the second top plate 1300 is located at the top of the carrier table 1000. To reduce the weight of the carrier table 1000, the second top plate 1300 is provided with a hollow area, or the second top plate 1300 is equivalently replaced by a bracket.

[0082] Furthermore, the second main shaft is provided as a long shaft, the lower end of the second main shaft is rotatably arranged on the second turntable 1100, the upper end of the second main shaft is fixedly connected to the second top plate 1300, and the first main shaft 2100 is sleeved on the outer sidewall of the second main shaft.

[0083] Regarding the second main shaft and the first main shaft 2100, there are at least the following alternative examples.

[0084] In some alternative examples, the second main shaft is set as the short shaft, the first main shaft 2100 is sleeved on the outer side wall of the second main shaft, and the second main shaft realizes torque transmission with the first main shaft 2100 through a pin or a locking screw. Further, the top of the carrier 2000 is rotatably connected to the second top plate 1300. Specifically, the center position of the upper side surface of the first top plate 2500 is rotatably connected to the second top plate 1300, or the top end of the first main shaft 2100 is rotatably connected to the second top plate 1300.

[0085] In some other alternative examples, the second main shaft is set as the short shaft, the second main shaft is set as a sleeve, and the second main shaft is sleeved on the outer side wall of the first main shaft 2100. The second main shaft realizes torque transmission with the first main shaft 2100 through a pin or a locking screw. Further, the top of the carrier 2000 is rotatably connected to the second top plate 1300.

[0086] It should be noted that on the carrier 1000, when the second stopping structure 1200 is set as a column, the top of the second stopping structure 1200 is arranged on the second top plate 1300.

[0087] As an implementation manner, the carrier 1000 includes a sun gear 1401, the sun gear 1401 is arranged on the lower side of the second turntable 1100, and the sun gear 1401 and the second turntable 1100 are arranged with the same central axis. Further, a planet gear 1402 is arranged at the lower end of the second main shaft, and the sun gear 1401 meshes with the planet gear 1402 for transmission.

[0088] It can be understood that during the rotation of the second turntable 1100, the planet gear 1402 moves around the central axis of the sun gear 1401, and the sun gear 1401 drives the planet gear 1402 in a gear transmission manner, so that the second main shaft rotates, and further the second main shaft drives the first main shaft 2100 to rotate, realizing the self-rotation of the carrier 2000.

[0089] In some examples, the carrier 1000 is provided with a base 3200 or the coating equipment is provided with a base 3200, and the sun gear 1401 is fixedly arranged on the base 3200, so that the sun gear 1401 is fixed, and each planet gear 1402 moves around the central axis of the sun gear 1401, thereby realizing the meshing transmission between the sun gear 1401 and the planet gear 1402. Specifically, the sun gear 1401 is connected to the base 3200 through a support column 3201.

[0090] In the description of this specification, if descriptions of reference terms such as "one embodiment", "some examples", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" appear, it means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0091] The embodiments of the present application have been described in detail above with reference to the accompanying drawings. However, the present application is not limited to the above embodiments, and various changes can be made without departing from the gist of the present application within the scope of knowledge possessed by those of ordinary skill in the art.

[0092] In the description of this application, if a comma "," appears in the patent name, it indicates a "and" relationship, rather than an "or" relationship. For example, if the patent name is "a kind of A, B", it means that the content claimed by this application is: the technical solution with the theme name of A and the technical solution with the theme name of B.

Claims

1. A carrier, characterized in that: include A tool holder assembly, the tool holder assembly comprising a first rotating disk and at least two material rods, the lower ends of the material rods being arranged on the first rotating disk, and the material rods being distributed on the first rotating disk along a circumference around a central axis of the first rotating disk at intervals; A rotatable first main shaft, the first turntable is fixedly arranged on the first main shaft, and the first main shaft can rotate with its own length direction central axis as the rotation axis to drive the first turntable to rotate; An elastic paddle, wherein the first rotating disk is provided with a receiving chamber, and the elastic paddle is disposed in the receiving chamber; Wherein, during the rotation of the first spindle, the elastic paddle paddles the material rod, thereby causing the material rod to rotate on the first turntable and the material rod rotates with the central axis in the length direction of the material rod as the rotation axis.

2. The object carrier according to claim 1, characterized in that: The accommodating chamber is located on the lower surface of the first rotating disk.

3. The object carrier according to claim 1, characterized in that: A gear shift seat is provided at the lower end of the material rod, and a plurality of tooth-shaped structures are arranged at intervals along the circumference of the outer wall of the gear shift seat. During the rotation of the first main shaft, the elastic shift piece shifts the gear shift seat, thereby causing the material rod to rotate on the first turntable.

4. The object carrier according to any one of claims 1 to 3, characterized in that: An annular structure is sleeved on the outer wall of the first main shaft, and the elastic paddle is fixedly arranged on the annular structure. The first main shaft rotates relative to the annular structure so that the elastic paddle moves the material rod.

5. The object carrier according to claim 4, characterized in that: At least two elastic paddles are provided, and the elastic paddles are distributed on the annular structure along a circumference around the central axis of the first main shaft at intervals.

6. The object carrier according to claim 4, characterized in that: The outer wall of the first main shaft is sleeved with a rolling bearing, the inner ring of the rolling bearing is fixedly connected to the first main shaft, the outer ring of the rolling bearing is fixedly connected to the annular structure or the outer ring of the rolling bearing serves as the annular structure.

7. A stage, characterized in that: include A second turntable, the second turntable can rotate with its own central axis as a rotation axis; At least two carriers according to any one of claims 4 to 6, wherein the carriers are arranged on the second turntable, and the carriers are spaced apart along a circumference around the central axis of the second turntable; When the second turntable is rotating, the first spindle can rotate with its own central axis in the length direction as the rotation axis, so that the carrier can rotate with its own central axis as the rotation axis.

8. The stage according to claim 7, characterized in that: The loading rack includes a first stopping structure, which is fixedly arranged on the annular structure. The loading platform includes a second stopping structure, which is arranged on the upper surface of the second turntable. The second stopping structure applies resistance to the first stopping structure to prevent the annular structure from rotating, so that when the first main shaft drives the first turntable to rotate, the first main shaft rotates relative to the annular structure, thereby causing the elastic paddle to pry the material rod.

9. The stage according to claim 8, characterized in that: The second stopping structure is configured as a column, the first stopping structure extends radially along the first rotating disk and extends out of the first rotating disk, and the side wall of the second stopping structure abuts against the outer side wall of the first stopping structure to stop the annular structure from rotating.

10. A coating device, characterized in that: It comprises a loading platform as described in any one of claims 7 to 9, wherein the loading platform is located in a coating chamber of the coating equipment.

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