Laminar flow assembly, flow meter and flow controller

Abstract

The utility model belongs to the technical field of fluid flow measurement, and particularly provides a laminar flow assembly, a flow meter and a flow controller, the laminar flow assembly comprises a laminar flow element, the laminar flow element comprises an inlet end and an outlet end which are oppositely arranged, the laminar flow element is provided with at least two channel sets, and the inlet end is communicated with the outlet end; each channel group comprises at least one channel extending in the first direction, and the channel penetrates through the inlet end and the outlet end; the connecting piece is connected to the inlet end, a first flow channel and at least one second flow channel are arranged in the connecting piece, and the first flow channel and the second flow channel are communicated with the different channel sets respectively; and the at least one adjusting piece is connected with the first flow channel and the second flow channel, so that the first flow channel and the second flow channel are communicated or separated. The technical problems that in the prior art, the flow capacity of a laminar flow element is fixed, and the measuring ranges of a flow meter and a flow controller are fixed can be solved.

Description

Technical Field

[0001] This application belongs to the technical field of fluid flow measurement, and particularly relates to a laminar flow component, a flowmeter, and a flow controller. Background Art

[0002] The measurement unit in a thermal flowmeter and a flow controller usually consists of a flow sensor and a laminar flow element. The measurement pipeline in the flow sensor is in parallel with the laminar flow element, and both are connected to the main pipeline. When the fluid enters the flowmeter or the mass flow controller, it will flow through the measurement pipeline and the laminar flow element respectively with a certain flow splitting ratio. Among them, the flow sensor measures the mass flow rate of the fluid in the measurement pipeline, and then the flow rate of the fluid in the main pipeline can be calculated according to the flow splitting ratio between the measurement pipeline and the laminar flow element. The flow-through capacity of the laminar flow element and the measurement pipeline in the existing mass flowmeter or mass flow controller is fixed, so the flow splitting ratio between the laminar flow element and the measurement pipeline is fixed, and the measurement range of the flowmeter and the flow controller is fixed. Some flow controllers support configuring the measurement range, but the configured measurement range is achieved under the condition of losing flow accuracy, without changing the physical structure and flow splitting ratio of the flowmeter or the flow controller. Therefore, the scaling range of each measurement range is greatly limited. Therefore, in the actual measurement process, to ensure the measurement accuracy, multiple flowmeters or flow controllers with different measurement ranges need to be prepared for fluids with different flow rates, resulting in a high cost. Summary of the Utility Model

[0003] The purpose of the embodiments of this application is to provide a laminar flow component, a flowmeter, and a flow controller to solve the technical problems of the fixed flow-through capacity of the laminar flow element and the fixed measurement range of the flowmeter and the flow controller existing in the prior art.

[0004] To achieve the above purpose, in the first aspect, the embodiments of this application provide a laminar flow component, including: a laminar flow element, the laminar flow element includes an inlet end and an outlet end arranged opposite to each other, at least two channel groups are provided on the laminar flow element, each channel group includes at least one channel extending in a first direction, and the channel penetrates through the inlet end and the outlet end; a connecting member, connected to the inlet end, a first flow channel and at least one second flow channel are provided in the connecting member, and the first flow channel and the second flow channel are respectively communicated with different channel groups; at least one adjusting member, the adjusting member is connected to the first flow channel and the second flow channel to communicate or cut off the first flow channel and the second flow channel.

[0005] The beneficial effects of this embodiment are as follows: By controlling the adjusting member to separate the first flow channel and the second flow channel, the fluid can flow into a channel group through the first flow channel, enabling the flow capacity of the laminar flow element to be equal to that of this channel group; by controlling the adjusting member to connect the first flow channel and the second flow channel, the fluid can flow into multiple channel groups through the first flow channel and the second flow channel, enabling the flow capacity of the laminar flow element to be equal to that of multiple channel groups. Therefore, by controlling the number of open and closed adjusting members, the flow capacity of the laminar flow element can be adjusted, and the technical problem of the fixed flow capacity of the laminar flow element can be solved.

[0006] In some embodiments, the orthographic projections of each of the channel groups along the first direction at one end of the connecting member are respectively located in the first flow channel and the second flow channel. The connecting member is hermetically connected to the laminar flow element to guide the fluid from the first flow channel or the second flow channel to the channel.

[0007] The beneficial effects of this embodiment are as follows: The orthographic projections of each of the channel groups along the first direction at one end of the connecting member are respectively located in the first flow channel and the second flow channel. During assembly, the first flow channel and the second flow channel can be stably connected to the corresponding channel groups, reducing the influence of installation errors on the flow capacity of the laminar flow element.

[0008] In some embodiments, the regions surrounded by each of the channel groups are spaced apart; or, the regions surrounded by each of the channel groups are nested.

[0009] The beneficial effects of this embodiment are as follows: If the regions surrounded by each of the channel groups are spaced apart, it is easy to set the channel groups at a relatively large distance from each other. When each of the channel groups is assembled and connected to the first flow channel and the second flow channel, the mutual influence is small and the assembly is more stable; if the regions surrounded by each of the channel groups are nested, the structure of the laminar flow element can be more compact and the space utilization rate is high.

[0010] In some embodiments, the connecting member is provided with a shunt hole, the shunt hole is communicated with the first flow channel, and the shunt hole is used to communicate with the measuring pipeline.

[0011] The beneficial effects of this embodiment are as follows: Setting the shunt hole facilitates the connection with the measuring pipeline. The first flow channel is always conducting, and connecting the shunt hole with the first flow channel can enable the fluid to stably flow into the measuring pipeline.

[0012] In some embodiments, the connecting member is provided with a first groove, a first through hole, and at least one second through hole. The two ends of the first through hole are respectively communicated with the first flow channel and the first groove, and the two ends of the second through hole are respectively communicated with the second flow channel and the first groove; the adjusting member includes a valve core, and the valve core is arranged in the first groove to connect or separate the first through hole and the second through hole.

[0013] The beneficial effects of this embodiment are as follows: By providing a first groove, a first through hole, and a second through hole on the connecting piece and connecting them to the valve core, the structure of the adjusting piece is made simpler, and the adjusting piece is integrated on the connecting piece, making the structure of the laminar flow assembly more compact.

[0014] In some embodiments, the first flow channel includes a third through hole and a second groove provided along its length direction. The cross-sectional area of the second groove is larger than that of the third through hole, and the second groove is sealingly connected to the channel group; the second flow channel includes a blind hole and a third groove provided along its length direction. The cross-sectional area of the third groove is larger than that of the blind hole; the third groove is sealingly connected to the channel group; the adjusting piece is connected to the third through hole and the blind hole.

[0015] The beneficial effects of this embodiment are as follows: Providing the third through hole facilitates the assembly connection with the pipeline through which the fluid flows. Providing the second groove with a large cross-sectional area facilitates the assembly connection with the channel group; providing the second groove with a large cross-sectional area facilitates the assembly connection with the channel group.

[0016] In some embodiments, both the second groove and the third groove are blind hole structures; alternatively, the second groove is a blind hole structure, and the third groove is an annular groove surrounding the second groove.

[0017] The beneficial effects of this embodiment are as follows: Setting the second groove and the third groove as blind hole structures allows them to be machined at a relatively far distance, minimizing the mutual influence between the second groove and the third groove; setting the third groove to surround the second groove enables the second groove and the third groove to be more concentrated.

[0018] In some embodiments, the laminar flow assembly further includes a support member; a third flow channel is provided on the support member; the laminar flow element is disposed in the third flow channel, and the laminar flow element is sealingly connected to the inner wall of the third flow channel.

[0019] The beneficial effects of this embodiment are as follows: Providing the support member and the third flow channel facilitates fixing the laminar flow element, enabling the fluid flowing through the laminar flow element to converge in the third flow channel, and facilitating the connection of the outlet end of the laminar flow element to other pipelines through the support member and the third flow channel.

[0020] In a second aspect, an embodiment of the present application provides a flow meter, including a measurement pipeline and the laminar flow assembly according to any one of the first aspect embodiments. The inlet of the measurement pipeline is communicated with the first flow channel, and the outlet of the measurement pipeline is communicated with the outlet end.

[0021] The beneficial effects of this embodiment are as follows: By adjusting the flow capacity of the laminar flow element, the flow division ratio between the measurement pipeline and the laminar flow element can be adjusted, thereby adjusting the range of the flow meter, reducing the number of flow meters that need to be prepared, and reducing costs.

[0022] In a third aspect, an embodiment of the present application provides a flow controller, including the flowmeter described in the embodiment of the second aspect.

[0023] The beneficial effect of this embodiment is that by adjusting the range of the flowmeter, the range of the flow controller can be adjusted, reducing the number of flow controllers that need to be prepared and lowering the cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0025] Figure 1 A three-dimensional schematic diagram of a laminar flow component provided for some embodiments of the present application;

[0026] Figure 2 is Figure 1 a three-dimensional exploded schematic diagram of the laminar flow component shown;

[0027] Figure 3 is Figure 1 a schematic diagram of a laminar flow element in the laminar flow component shown;

[0028] Figure 4 is Figure 1 a three-dimensional schematic diagram of a connecting member in the laminar flow component shown;

[0029] Figure 5 is Figure 1 a schematic diagram of the internal structure of the connecting member in the laminar flow component shown Figure 1 ;

[0030] Figure 6 is Figure 1 a schematic diagram of the internal structure of the connecting part in the laminar flow component shown Figure 2 ;

[0031] Figure 7 a three-dimensional exploded schematic diagram of a laminar flow component provided for other embodiments of the present application;

[0032] Figure 8 is Figure 7 a schematic diagram of a laminar flow element in the laminar flow component shown;

[0033] Figure 9 is Figure 7 a three-dimensional schematic diagram of a connecting member in the laminar flow component shown;

[0034] Figure 10 is Figure 7Schematic diagram of the internal structure of the connecting piece in the laminar flow component shown Figure 1 ;

[0035] Figure 11 is Figure 7 Schematic diagram of the internal structure of the connecting piece in the laminar flow component shown Figure 2 .

[0036] Among them, the reference numerals in the figure are as follows:

[0037] 100, laminar flow component;

[0038] 10, laminar flow element; 11, inlet end; 12, outlet end; 13, channel group; 131, channel;

[0039] 20, connecting piece; 21, first flow channel; 211, third through hole; 212, second groove; 22, second flow channel; 221, blind hole; 222, third groove; 23, shunt hole; 24, first groove; 25, first through hole; 26, second through hole;

[0040] 30, adjusting piece; 31, valve core;

[0041] 40, support piece; 41, third flow channel; 42, confluence hole. Specific embodiments

[0042] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application clearer, the following further details this application in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not used to limit this application.

[0043] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0044] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to this application.

[0045] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of this application, "a plurality of" means two or more unless otherwise specifically defined.

[0046] An embodiment of the first aspect of this application provides a laminar flow component 100. This application takes the laminar flow component 100 as a flowmeter laminar flow component 100 for illustration. It can be understood that the laminar flow component 100 can also be used in other devices.

[0047] In the first aspect, an embodiment of this application provides a laminar flow component 100. Please refer to Figures 1 to 4 , the laminar flow component 100 includes a laminar flow element 10, a connecting member 20, and at least one adjusting member 30; the laminar flow element 10 includes an inlet end 11 and an outlet end 12 arranged opposite to each other. There are at least two channel groups 13 on the laminar flow element 10. Each channel group 13 includes at least one channel 131 extending along the first direction X. The channel 131 penetrates through the inlet end 11 and the outlet end 12; the connecting member 20 is connected to the inlet end 11. There is a first flow channel 21 and at least one second flow channel 22 in the connecting member 20. The first flow channel 21 and the second flow channel 22 are respectively communicated with different channel groups 13; the adjusting member 30 is connected to the first flow channel 21 and the second flow channel 22 to connect or disconnect the first flow channel 21 and the second flow channel 22.

[0048] The laminar flow element 10 is used to provide a specific flow resistance to the fluid flowing through it; it can be understood that when the fluid flows through the laminar flow element 10, it flows into the channel 131 from the inlet end 11 and flows out of the channel 131 from the outlet end 12. Optionally, the laminar flow element 10 is a cylindrical structure extending along the first direction X.

[0049] It can be understood that the number of channels 131 in each channel group 13 can be the same or different. The channel group 13 can include only one annular slit-shaped channel 131, or the channel group 13 can also include a plurality of hole-shaped channels 131.

[0050] It can be understood that the channel 131 can be set as a hole with an inner diameter equal to that of a capillary; or, a capillary can also be arranged inside the channel 131 and sealedly connected to its inner wall so that the fluid can flow through the capillary; the channels 131 are parallel to each other or the capillaries are parallel to each other.

[0051] It can be understood that the connecting member 20 can be an integral structure, such as a connecting block; or, the connecting member 20 can also be set as a split structure, such as a plurality of connecting pipes, and the first flow channel 21 and the second flow channel 22 are inside each connecting pipe.

[0052] The first flow channel 21 is used to connect with the main pipeline through which the fluid flows; optionally, both ends of the first flow channel 21 are provided with openings to facilitate connection with the main pipeline.

[0053] It can be understood that each second flow channel 22 communicates with different channel groups 13 respectively. Optionally, one end of the second flow channel 22 is set as an opening, and the other end is communicated with the first flow channel 21 through an adjusting member 30.

[0054] The adjusting member 30 can be set as a valve. The adjusting member 30 can be communicated with the first flow channel 21 and the second flow channel 22 through a hole structure; the adjusting member 30 can also be communicated with the first flow channel 21 and the second flow channel 22 through multiple pipelines.

[0055] The beneficial effects of this embodiment are as follows: by controlling the adjusting member 30 to cut off the first flow channel 21 and the second flow channel 22, enabling the fluid to flow into a channel group 13 through the first flow channel 21, the flow capacity of the laminar flow element 10 can be made equal to the flow capacity of this channel group 13; by controlling the adjusting member 30 to connect the first flow channel 21 and the second flow channel 22, enabling the fluid to flow into multiple channel groups 13 through the first flow channel 21 and the second flow channel 22, the flow capacity of the laminar flow element 10 can be made equal to the flow capacity of multiple channel groups 13, increasing the flow capacity. Therefore, by controlling the opening and closing of the adjusting member 30, the flow capacity of the laminar flow element 10 can be adjusted, and the technical problem of the fixed flow capacity of the laminar flow element 10 can be solved.

[0056] In some embodiments, please refer to Figure 1 and Figure 2 , the orthographic projections of each channel group 13 along the first direction X at one end of the connecting member 20 are respectively located in the first flow channel 21 and the second flow channel 22. The connecting member 20 is hermetically connected to the laminar flow element 10 to guide the fluid from the first flow channel 21 or the second flow channel 22 to the channel 131.

[0057] It can be understood that the cross-sectional area of one end of the first flow channel 21 and the second flow channel 22 connected to the channel group 13 is larger than the cross-sectional area of the corresponding channel group 13, and the cross-sectional areas of other positions of the first flow channel 21 and the second flow channel 22 can be larger than, equal to, or smaller than the cross-sectional area of the corresponding channel group 13.

[0058] The connecting member 20 is hermetically connected to the laminar flow element 10, that is, the area between the first flow channel 21 and the second flow channel 22 is hermetically connected to the area between each through-group, so that the first flow channel 21 and the second flow channel 22 are only communicated with their corresponding channel groups 13.

[0059] The beneficial effects of this embodiment are as follows: The orthographic projections of each channel group 13 at one end of the connecting member 20 along the first direction X are respectively located in the first flow channel 21 and the second flow channel 22. During assembly, the first flow channel 21 and the second flow channel 22 can be stably connected to the corresponding channel groups 13, reducing the influence of installation errors on the flow capacity of the laminar flow element 10.

[0060] In some embodiments, please refer to Figure 2 and Figure 3 , the regions surrounded by each channel group 13 are distributed at intervals.

[0061] Optionally, the channels 131 in the channel group 13 can be distributed around the first direction X or can be arranged in an array along a direction perpendicular to the first direction X.

[0062] The beneficial effects of this embodiment are as follows: The channels 131 in the channel group 13 are more evenly distributed around the first direction X, enabling the fluid to flow through the channel group 13 evenly; the regions surrounded by each channel group 13 are distributed at intervals, making it easy to set the distance between each channel group 13 relatively far. When each channel group 13 is assembled and connected to the first flow channel 21 and the second flow channel 22, the mutual influence is small and the assembly is more stable;

[0063] In some embodiments, please refer to Figure 7 and Figure 8 , the regions surrounded by each channel group 13 are nested.

[0064] Optionally, each channel group 13 is a mutually nested annular structure, and each channel group 13 is distributed at intervals along the radial direction of the first direction X. The inner channel group 13 is located within the region surrounded by the outer channel group 13.

[0065] The beneficial effects of this embodiment are as follows: The regions surrounded by each channel group 13 are nested, so that the structure of the laminar flow element 10 can be more compact and the space utilization rate is high.

[0066] In some embodiments, please refer to Figure 4 and Figure 5 , the connecting member 20 is provided with a shunt hole 23, the shunt hole 23 is communicated with the first flow channel 21, and the shunt hole 23 is used to communicate with the measurement pipeline.

[0067] Optionally, the shunt hole 23 is perpendicular to the first flow channel 21, and the shunt channel is used to connect to the inlet of the measurement pipeline.

[0068] The measurement pipeline is communicated with each channel group 13 through the shunt hole 23, the first flow channel 21, and the second flow channel 22, so that a certain shunt ratio is formed between the measurement pipeline and the laminar flow element 10.

[0069] The beneficial effects of this embodiment are as follows: The diversion hole 23 is provided to facilitate connection with the measurement pipeline. The first flow channel 21 is always conducting, and the diversion hole 23 is connected to the first flow channel 21, enabling the fluid to flow into the measurement pipeline stably.

[0070] In some embodiments, please refer to Figure 1 , Figures 4 to 6 , on the connecting member 20, there are a first groove 24, a first through hole 25, and at least one second through hole 26. The two ends of the first through hole 25 are respectively connected to the first flow channel 21 and the first groove 24, and the two ends of the second through hole 26 are respectively connected to the second flow channel 22 and the first groove 24; the adjusting member 30 includes a valve core 31, and the valve core 31 is arranged in the first groove 24 to connect or cut off the first through hole 25 and the second through hole 26.

[0071] It can be understood that the first through hole 25, the first groove 24, and the second through hole 26 connect the first flow channel 21 and the second flow channel 22; optionally, the connecting member 20 is an integral structure, and the valve core 31 is integrated on the connecting member 20. By connecting or cutting off the first through hole 25 and the second through hole 26, the valve core 31 connects or cuts off the first flow channel 21 and the second flow channel 22.

[0072] The beneficial effects of this embodiment are as follows: By providing the first groove 24, the first through hole 25, and the second through hole 26 on the connecting member 20 and connecting them with the valve core 31, the structure of the adjusting member 30 is made simpler, and by integrating the adjusting member 30 on the connecting member 20, the structure of the laminar flow assembly 100 is made more compact.

[0073] In some embodiments, please refer to Figures 4 to 6 , Figures 9 to 11 , the first flow channel 21 includes a third through hole 211 and a second groove 212 arranged along its length direction. The cross-sectional area of the second groove 212 is larger than that of the third through hole 211, and the second groove 212 is hermetically connected to the channel group 13; the second flow channel 22 includes a blind hole 221 and a third groove 222 arranged along its length direction. The cross-sectional area of the third groove 222 is larger than that of the blind hole 221; the third groove 222 is hermetically connected to the channel group 13; the adjusting member 30 is connected to the third through hole 211 and the blind hole 221.

[0074] It can be understood that one end of the second groove 212 where the opening is located is arranged facing the channel group 13 corresponding to the first flow channel 21; the third through hole 211 is communicated with the second groove 212 and the third through hole 211 is arranged at one end of the second groove 212 away from the channel group 13.

[0075] It can be understood that one end of the third groove 222 where the opening is located is arranged facing the channel group 13 corresponding to the second flow channel 22; the blind hole 221 is communicated with the third groove 222, and the blind hole 221 is arranged at one end of the third groove 222 away from the channel group 13.

[0076] It can be understood that the adjusting member 30 is used to connect or disconnect the third through hole 211 and the blind hole 221.

[0077] The beneficial effects of this embodiment are as follows: The setting of the third through hole 211 facilitates the assembly connection with the pipeline through which the fluid flows, and the setting of the second groove 212 with a large cross-sectional area facilitates the assembly connection with the channel group 13; the setting of the second groove 212 with a large cross-sectional area facilitates the assembly connection with the channel group 13.

[0078] In some embodiments, please refer to Figures 5 to 6 , both the second groove 212 and the third groove 222 are of blind hole structure.

[0079] Optionally, the cross-section of the second groove 212 and the third groove 222 can be circular or polygonal.

[0080] The beneficial effects of this embodiment are as follows: The second groove 212 and the third groove 222 being set as blind hole structures can be machined at a relatively far distance, so that the second groove 212 and the third groove 222 have less influence on each other.

[0081] In some embodiments, please refer to Figures 9 to 11 , the second groove 212 is of blind hole structure, and the third groove 222 is an annular groove surrounding the second groove 212.

[0082] It can be understood that the second is located within the area surrounded by the third groove 222. The cross-section of the third groove 222 can be a circular ring or a polygonal ring.

[0083] The beneficial effects of this embodiment are as follows: The third groove 222 is arranged to surround the second groove 212, so that the second groove 212 and the third groove 222 can be more concentrated.

[0084] In some embodiments, please refer to Figure 2 and Figure 7 , the laminar flow component 100 further includes a support member 40; a third flow channel 41 is provided on the support member 40; the laminar flow element 10 is arranged in the third flow channel 41, and the laminar flow element 10 is hermetically connected to the inner wall of the third flow channel 41.

[0085] Optionally, both ends of the third flow channel 41 are open and extend along the first direction X. Optionally, a confluence hole 42 perpendicular to the third flow channel 41 is provided on the support member 40, the confluence hole 42 is arranged on the side of the laminar flow element 10 away from the connecting member 20, and the confluence hole 42 is used to connect to the outlet of the measurement pipeline.

[0086] The beneficial effects of this embodiment are as follows: The support member 40 and the third flow channel 41 are provided to facilitate the fixation of the laminar flow element 10, enabling the fluid flowing through the laminar flow element 10 to converge in the third flow channel 41. The outlet end 12 of the laminar flow element 10 is conveniently connected to other pipelines through the support member 40 and the third flow channel 41; the laminar flow element 10 is hermetically connected to the inner wall of the third flow channel 41, preventing the fluid from flowing between the inner wall of the laminar flow element 10 and the third flow channel 41, and enabling the laminar flow element 10 to provide a stable flow resistance.

[0087] In some embodiments, please refer to Figures 1 to 11 , the laminar flow assembly 100 includes a laminar flow element 10, a connecting member 20, an adjusting member 30, and a support member 40; the laminar flow element 10 includes an inlet end 11 and an outlet end 12 arranged opposite to each other. At least two channel groups 13 are provided on the laminar flow element 10, and the regions surrounded by the respective channel groups 13 are spaced apart. Each channel group 13 includes a plurality of channels 131 extending in the first direction X. The channels 131 are hole-like structures and penetrate through the inlet end 11 and the outlet end 12.

[0088] The connecting member 20 is connected to the inlet end 11, and the connecting member 20 is an integral block structure; a first flow channel 21, a second flow channel 22, a first groove 24, a first through hole 25, a second through hole 26, and a shunt hole 23 are provided in the connecting member 20. The first flow channel 21 and the second flow channel 22 are respectively communicated with different channel groups 13. The orthographic projections of the respective channel groups 13 along the first direction X at one end of the connecting member 20 are respectively located in the first flow channel 21 and the second flow channel 22. The connecting member 20 is hermetically connected to the laminar flow element 10 to direct the fluid from the first flow channel 21 or the second flow channel 22 to the channels 131. Both ends of the first through hole 25 are communicated with the first flow channel 21 and the first groove 24 respectively. Both ends of the second through hole 26 are communicated with the second flow channel 22 and the first groove 24 respectively. The shunt hole 23 is communicated with the first flow channel 21, and the shunt hole 23 is used to communicate with the inlet of the measurement pipeline. The adjusting member 30 includes a valve core 31, and the valve core 31 is arranged in the first groove 24 to communicate or cut off the first through hole 25 and the second through hole 26. Both ends of the first flow channel 21 are open; one end of the second flow channel 22 is open, and the other end is communicated with the second through hole 26.

[0089] The support member 40 is provided with a third flow channel 41 and a confluence hole 42; the laminar flow element 10 is arranged in the third flow channel 41, and the laminar flow element 10 is hermetically connected to the inner wall of the third flow channel 41; the confluence hole 42 is arranged on the side of the laminar flow element 10 facing away from the connecting member 20, and the confluence hole 42 is used to connect to the outlet of the measurement pipeline.

[0090] In use, the main pipeline through which the fluid flows is connected to the first flow channel 21. When the control valve core 31 cuts off the first through hole 25 and the second through hole 26, the fluid flows from the first flow channel 21 into the measurement pipeline and the channel group 13 communicated with the first flow channel 21 respectively, and the fluids in the channel group 13 and the measurement pipeline converge in the third flow channel 41; when the control valve core 31 connects the first through hole 25 and the second through hole 26, the fluid flows from the first flow channel 21 into the measurement pipeline, the channel group 13 communicated with the first flow channel 21, and the channel group 13 communicated with the second flow channel 22 respectively, and the fluids in the channel group 13 and the measurement pipeline converge in the third flow channel 41. At this time, the flow capacity of the laminar flow element 10 is enhanced. In actual use, the flow capacity of the laminar flow element 10 can be scaled slightly, and the loss of flow accuracy is small. For example, the laminar flow element 10 with a flow capacity of 14985 sccm is used in the case where the flow capacity requirement is 15000 sccm.

[0091] In the embodiment of the present application, the flow of the laminar flow element 10 follows Poiseuille's law, and the relationship between the mass flow rate and the pressures before and after the channel 131 is:

[0092]

[0093] where m is the mass flow rate, P in is the inlet pressure of the channel 131, P out is the outlet pressure of the channel 131, △P is the pressure drop of the channel 131, d is the diameter of the channel 131, η is the viscosity coefficient of the gas, L is the length of the channel 131, R is the gas constant, and T is the gas temperature. Through formula (1), for a specific gas at a specified inlet and outlet pressure, the flow rate through the channel 131 can reach the design value by designing the diameter and length of the channel 131. Similarly, the flow rates of multiple channels 131 under the same inlet and outlet conditions satisfy the superposition relationship.

[0094] In a second aspect, the embodiment of the present application provides a flowmeter, including a measurement pipeline and the laminar flow assembly 100 according to any one of the first aspect embodiments. The inlet of the measurement pipeline is communicated with the first flow channel 21, and the outlet of the measurement pipeline is communicated with the outlet end 12.

[0095] The measurement pipeline is connected in parallel with the laminar flow element 10, and the inlet and outlet of the measurement pipeline are respectively arranged at both ends of the laminar flow element 10 along the first direction X.

[0096] The flowmeter can measure the flow rate of the fluid in the measurement pipeline and can calculate the flow rate of the fluid in the main pipeline according to the flow division ratio between the measurement pipeline and the laminar flow element 10.

[0097] During the factory stage, it is necessary to calibrate the flowmeter. When the fluid flows through different channel groups 13, the range of the flowmeter is calibrated. The calibration method uses the ROR system (Rate of Rise, rising edge calibration system) for calibration, and the calibration data is stored in different calculation parts of the flowmeter. During actual use, the mass flow control part of the flowmeter selects and retrieves the calibration data stored in different calculation parts of the flowmeter according to the opening and closing of the adjusting part 30, and converts the electrical signal collected by the flowmeter into a flow signal.

[0098] The beneficial effects of this embodiment are as follows: By controlling the connection of each second flow channel 22 with the first flow channel 21 through the adjusting part 30, the measurement pipeline can be connected to different channel groups 13, thereby adjusting the flow division ratio between the measurement pipeline and the laminar flow element 10, adjusting the range of the flowmeter, reducing the number of flowmeters to be prepared, and reducing costs; when the flow capacity of the laminar flow element 10 increases, the range of the flowmeter increases.

[0099] In a third aspect, an embodiment of the present application provides a flow controller, including the flowmeter in the embodiment of the second aspect.

[0100] The flow controller compares the flow rate of the fluid in the main pipeline measured by the flowmeter with the target value, and can control the opening degree of the valve on the main pipeline, thereby controlling the flow rate of the fluid in the main pipeline.

[0101] In the prior art, mass flow controllers usually can only cover a specific range and are difficult to flexibly adapt to the requirements of different working conditions; when configuring a range other than the factory settings for existing mass flow controllers, there is no change in the physical structure, and a large-range flowmeter is used to measure small-flow fluids, which will lead to a decrease in measurement accuracy.

[0102] The beneficial effects of this embodiment are as follows: By adjusting the range of the flowmeter, the range of the flow controller can be adjusted, and high accuracy can be maintained within each range, which can reduce the number of flow controllers to be prepared and reduce costs.

[0103] Based on the above effects, the mass flow controller of the embodiment of the present application has broad application prospects in achieving high-precision and high-stability flow control; the known and potential technical and product application fields of the mass flow controller of the embodiment of the present application and specific examples of its application methods are as follows:

[0104] Semiconductor manufacturing: Key steps such as chemical vapor deposition (CVD) and physical vapor deposition (PVD) in the semiconductor manufacturing process require extremely high gas flow control accuracy; the embodiment of the present application can provide more accurate flow data to ensure the consistency of the semiconductor manufacturing process and the quality of products.

[0105] Pharmaceutical industry production: In the field of biopharmaceuticals, especially during the process of culturing cells and producing drugs, precise gas control is crucial; the embodiments of this application can improve the accuracy of gas flow control, ensuring the precision and safety of drug synthesis.

[0106] Environmental monitoring equipment: In environmental protection fields such as air quality monitoring and water quality detection, continuous and precise monitoring and control of sampling flow are required; the embodiments of this application can provide rapid response and high-precision flow monitoring, improving the reliability of environmental monitoring.

[0107] Laboratory and scientific research equipment: Scientific research experiments often require precise control and measurement of extremely small gas or liquid flows; the technical solutions of the embodiments of this application can provide fine flow control for various laboratories, ensuring the precision and efficiency of scientific research work.

[0108] Chemical process control: In the fields of chemical production and fine chemicals, precise control of the fluid ratio directly affects product quality; the technical solutions of the embodiments of this application provide stable and precise flow measurement, providing key control parameters for fine chemical processes.

[0109] Aerospace and military equipment: In aerospace and military equipment, the accuracy and response time of flow control are crucial for the performance of the entire system; the embodiments of this application can provide the required high-precision flow control in these high-demand applications.

[0110] Food and beverage industry: During the production process of food and beverages, precise gas and liquid addition amounts are very important for product taste and quality; the embodiments of this application can provide high-precision and high-stability flow control in these applications, making gas and liquid addition more precise.

[0111] The above are only the preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent replacements, and improvements made within the spirit and principles of this application shall be included within the protection scope of this application.

Claims

1. A laminar flow component, characterized in that include: A laminar flow element, the laminar flow element comprising an inlet end and an outlet end arranged opposite to each other, the laminar flow element being provided with at least two channel groups, each channel group comprising at least one channel extending along a first direction, the channel running through the inlet end and the outlet end; A connecting member connected to the inlet end, wherein a first flow channel and at least one second flow channel are provided in the connecting member, wherein the first flow channel and the second flow channel are respectively connected to different channel groups; At least one adjusting member is connected to the first flow channel and the second flow channel to connect or disconnect the first flow channel and the second flow channel.

2. The laminar flow assembly according to claim 1, characterized in that The orthographic projections of each channel group along the first direction at one end of the connector are located in the first flow channel and the second flow channel respectively. The connector is sealed and connected to the laminar flow element to guide the fluid from the first flow channel or the second flow channel to the channel.

3. The laminar flow assembly according to claim 1, characterized in that The areas surrounded by the channel groups are distributed at intervals; Alternatively, the areas enclosed by the channel groups are nested.

4. The laminar flow assembly according to claim 1, characterized in that The connecting piece is provided with a diversion hole, the diversion hole is communicated with the first flow channel, and the diversion hole is used to connect with the measuring pipeline.

5. The laminar flow assembly according to claim 1, characterized in that The connecting member is provided with a first groove, a first through hole and at least one second through hole, the two ends of the first through hole are respectively connected to the first flow channel and the first groove, and the two ends of the second through hole are respectively connected to the second flow channel and the first groove; the adjusting member includes a valve core, and the valve core is arranged in the first groove to connect or isolate the first through hole and the second through hole.

6. The laminar flow assembly according to claim 1, characterized in that The first flow channel comprises a third through hole and a second groove arranged along the length direction thereof, the cross-sectional area of ​​the second groove is larger than the cross-sectional area of ​​the third through hole, and the second groove is sealedly connected to the channel group; The second flow channel comprises a blind hole and a third groove arranged along the length direction thereof, the cross-sectional area of ​​the third groove is larger than the cross-sectional area of ​​the blind hole; the third groove is sealedly connected to the channel group; The adjusting member is connected to the third through hole and the blind hole.

7. The laminar flow assembly according to claim 6, characterized in that The second groove and the third groove are both blind hole structures; Alternatively, the second groove is a blind hole structure, and the third groove is an annular groove surrounding the second groove.

8. The laminar flow assembly according to any one of claims 1 to 7, characterized in that: The laminar flow component also includes a support member; a third flow channel is arranged on the support member; the laminar flow element is arranged in the third flow channel, and the laminar flow element is sealed and connected to the inner wall of the third flow channel.

9. A flow meter, characterized in that: The invention comprises a measuring pipe and the laminar flow component according to any one of claims 1 to 8, wherein the inlet of the measuring pipe is communicated with the first flow channel, and the outlet of the measuring pipe is communicated with the outlet end.

10. A flow controller, characterized in that: Includes the flow meter as described in claim 9.

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