Packing structure of polycrystalline silicon compressor and polycrystalline silicon compressor

Abstract

The utility model provides a filling structure of a polycrystalline silicon compressor and the polycrystalline silicon compressor, belongs to the technical field of polycrystalline silicon production, and aims to solve the problems that a polycrystalline silicon reaction medium leaks and the filling structure pollutes the polycrystalline silicon reaction medium. The polycrystalline silicon compressor packing structure comprises a packing cover, a plurality of low-pressure packing boxes, a middle packing box and a plurality of high-pressure packing boxes which are sequentially arranged from the low-pressure side to the high-pressure side in the axial direction of a piston rod. And the reaction medium gas of the polycrystalline silicon is sealed by charging hydrogen, so that the pollution to the reaction medium is avoided. The hydrogen filling connector is communicated with the middle packing box, and the communication position is located between the first middle sealing ring and the second middle sealing ring, so that not only can the filled hydrogen be prevented from leaking into the environment too much, but also the reaction medium can be prevented from leaking into the environment too much. And the filler structure adopts an oil-free lubrication and water-free cooling structure, so that the polycrystalline silicon reaction medium is prevented from being polluted by lubricating oil or cooling water.

Description

Technical Field

[0001] The utility model belongs to the technical field of polysilicon production, and in particular relates to a polysilicon compressor filler structure and a polysilicon compressor. Background Art

[0002] Polysilicon is an important raw material for producing solar cells. The principle of producing polysilicon is to reduce high-purity trichlorosilane with high-purity hydrogen on a high-purity silicon core under a high-temperature environment to generate polysilicon deposited on the silicon core. In the production process of polysilicon, a compressor is required to compress and transport the medium involved in the reaction. The medium involved in the reaction includes hydrogen, chlorosilane, silicon chloride, hydrogen chloride, chlorosilane, etc. Once the compressed medium in the cylinder leaks into the compressor body along the continuously moving piston rod, the lubricating oil in various parts of the body will react with the compressed medium to generate a viscous colloidal substance and clog the oil filter. In order to avoid the above problems, a packing structure is generally set between the cylinder and the piston rod to perform step-by-step packing and sealing of the compressed medium leaking into the body along the piston rod. Conventional packing structures usually use nitrogen sealing. Since nitrogen can leak directly into the air, it is a good sealing medium. However, when nitrogen sealing is used, nitrogen may leak into the cylinder, contaminating the medium involved in the polysilicon reaction and affecting the purity of polysilicon. In addition, if there is lubricating oil or cooling water in the packing structure, it may also contaminate the medium in the cylinder. Utility Model Content

[0003] Therefore, the technical problem to be solved by the utility model is to provide a polysilicon compressor packing structure and a polysilicon compressor, which can prevent the reaction medium from leaking along the piston rod and prevent the reaction medium from being contaminated.

[0004] In order to solve the above problems, the utility model provides a polysilicon compressor packing structure, comprising: a packing cover, a plurality of low-pressure packing boxes, an intermediate packing box and a plurality of high-pressure packing boxes arranged in sequence from the low-pressure side to the high-pressure side along the axial direction of the piston rod. A hydrogen charging interface and a gas leakage recovery interface are provided on the packing cover. The low-pressure packing box includes a low-pressure sealing ring. The intermediate packing box includes a first intermediate sealing ring and a second intermediate sealing ring. The first intermediate sealing ring is close to the side where the low-pressure packing box is located. The second intermediate sealing ring is close to the side where the high-pressure packing box is located. The high-pressure packing box includes a high-pressure sealing ring. The hydrogen charging interface is connected to the intermediate packing box, and the connection point is located between the first intermediate sealing ring and the second intermediate sealing ring. The gas leakage recovery interface is used to collect leaked gas.

[0005] Optionally, the polysilicon compressor packing structure further includes a high-pressure air leakage chamber. The high-pressure air leakage chamber is arranged between two adjacent high-pressure packing boxes. The air leakage recovery interface includes a high-pressure recovery interface. The high-pressure recovery interface is connected to the high-pressure air leakage chamber.

[0006] Optionally, the high-pressure recovery interface is connected to the high-pressure gas leakage chamber through a recovery pipeline. The recovery pipeline runs through the packing cover, a plurality of low-pressure packing boxes, an intermediate packing box and at least one high-pressure packing box.

[0007] Optionally, a nitrogen charging interface is provided on the packing cover. A receiving cavity is provided in the packing cover. A packing cover sealing ring is provided in the receiving cavity. The nitrogen charging interface is connected to the receiving cavity.

[0008] Optionally, the polysilicon compressor packing structure further includes a low-pressure air leakage chamber. The low-pressure air leakage chamber is arranged between the packing cover and the low-pressure packing box. The air leakage recovery interface includes a low-pressure recovery interface. The low-pressure recovery interface is connected to the low-pressure air leakage chamber.

[0009] Optionally, the polysilicon compressor packing structure further includes: a sheath, which is arranged outside the cylinder and sleeved on the outer circumference of the low-pressure packing box. Both ends of the sheath are connected between the cylinder and the end surface of the packing cover.

[0010] Optionally, a first sealing member is provided between the sleeve and the end surface of the stuffing cover.

[0011] Optionally, the hydrogen filling interface is connected to the middle stuffing box through a hydrogen pipeline. The hydrogen pipeline runs through the stuffing cover and a plurality of low-pressure stuffing boxes.

[0012] Optionally, contact surfaces among the stuffing cover, the plurality of low-pressure stuffing boxes, the intermediate stuffing box and the plurality of high-pressure stuffing boxes are tightly fitted, and a second sealing member is provided between two adjacent contact surfaces.

[0013] The utility model also provides a polysilicon compressor, which includes a cylinder, a piston rod and the polysilicon compressor packing structure. The cylinder includes a piston. The piston rod is telescopically arranged in the cylinder and connected to the piston. The polysilicon compressor packing structure is arranged between the cylinder and the piston rod.

[0014] Beneficial Effects

[0015] 1. The polysilicon compressor packing structure provided by the utility model includes a packing cover, a plurality of low-pressure packing boxes, an intermediate packing box and a plurality of high-pressure packing boxes which are sequentially arranged along the axial direction of the piston rod from the low-pressure side to the high-pressure side. A hydrogen filling interface and a gas leakage recovery interface are provided on the packing cover. The intermediate packing box includes a first intermediate sealing ring and a second intermediate sealing ring. The hydrogen filling interface is connected to the intermediate packing box, and the connection point is located between the first intermediate sealing ring and the second intermediate sealing ring. The gas leakage recovery interface is used to collect leaked gas. Hydrogen is filled between the first intermediate sealing ring and the second intermediate sealing ring through the hydrogen filling interface, and the hydrogen can move toward the high-pressure side along the sealing gap of the piston rod, and collide and merge with the reaction medium leaking along the piston rod in the cylinder, and a part of it returns to the cylinder, and a part of it is recovered through the gas leakage recovery interface. Since the reaction medium already includes hydrogen, the reaction medium gas of the polysilicon sealed by hydrogen filling will not cause pollution to the reaction medium. In addition, the intermediate packing box includes a first intermediate sealing ring and a second intermediate sealing ring. The hydrogen filling interface is connected to the middle stuffing box, and the connection point is located between the first middle sealing ring and the second middle sealing ring, which can prevent the filled hydrogen from leaking too much into the environment and prevent too much reaction medium from leaking into the middle stuffing box. In addition, the stuffing structure of the utility model adopts an oil-free lubrication and water-free cooling structure, which prevents lubricating oil or cooling water from contaminating the polysilicon reaction medium.

[0016] 2. The polysilicon compressor provided by the utility model is provided with the above-mentioned polysilicon compressor packing structure, so it has good sealing ability, which can not only prevent the reaction medium of polysilicon from leaking into the environment, but also prevent the sealing packing from polluting the reaction medium, which is beneficial to improving the purity of polysilicon. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic structural diagram of a polysilicon compressor packing structure according to an embodiment of the present invention;

[0018] Figure 2 A schematic structural diagram of a polysilicon compressor packing structure according to another embodiment of the present invention;

[0019] Figure 3 This is a schematic structural diagram of a polysilicon compressor packing structure according to yet another embodiment of the present invention.

[0020] The reference numerals are as follows:

[0021] 1. Stuffing cover; 2. Low-pressure stuffing box; 3. Intermediate stuffing box; 4. High-pressure stuffing box; 5. Low-pressure sealing ring; 6. First intermediate sealing ring; 7. Second intermediate sealing ring; 8. High-pressure sealing ring; 9. Hydrogen charging interface; 10. High-pressure recovery interface; 11. Hydrogen pipeline; 12. Recovery pipeline; 13. Sheath; 14. First sealing element; 15. Second sealing element; 16. High-pressure leakage chamber; 17. Piston rod; 18. Cylinder; 19. Nitrogen charging interface; 20. Accommodating chamber; 21. Stuffing cover sealing ring; 22. Low-pressure recovery interface; 23. Low-pressure leakage chamber; 24. Isolation box. DETAILED DESCRIPTION

[0022] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0023] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0024] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0026] In a first aspect, this embodiment provides a polysilicon compressor packing structure. Figure 1 A schematic structural diagram of a polysilicon compressor packing structure provided in this embodiment. Figure 2 A schematic structural diagram of another polysilicon compressor packing structure provided in this embodiment. Figure 3 A schematic structural diagram of another polysilicon compressor packing structure provided in this embodiment.

[0027] like Figure 1 As shown, the polysilicon compressor packing structure provided in this embodiment includes: a packing cover 1, a plurality of low-pressure packing boxes 2, an intermediate packing box 3 and a plurality of high-pressure packing boxes 4, which are arranged in sequence from the low-pressure side to the high-pressure side along the axial direction of the piston rod 17. A hydrogen charging interface 9 and a gas leakage recovery interface are provided on the packing cover 1. The low-pressure packing box 2 includes a low-pressure sealing ring 5. The intermediate packing box 3 includes a first intermediate sealing ring 6 and a second intermediate sealing ring 7. The first intermediate sealing ring 6 is close to the side where the low-pressure packing box 2 is located. The second intermediate sealing ring 7 is close to the side where the high-pressure packing box 4 is located. The high-pressure packing box 4 includes a high-pressure sealing ring 8. The hydrogen charging interface 9 is connected to the intermediate packing box 3, and the connection point is located between the first intermediate sealing ring 6 and the second intermediate sealing ring 7. The gas leakage recovery interface is used to collect leaked gas.

[0028] It should be noted that when the polysilicon compressor packing structure of this embodiment is in use, in order to reduce hydrogen leakage in the environment, the cylinder side compartment of the compressor can be filled with nitrogen and sealed.

[0029] In addition, it can be understood that the low-pressure side is a side located outside the cylinder 18 , and the high-pressure side is a side located inside the cylinder 18 .

[0030] The polysilicon compressor packing structure of this embodiment includes a packing cover 1, a plurality of low-pressure packing boxes 2, an intermediate packing box 3 and a plurality of high-pressure packing boxes 4 arranged in sequence from the low-pressure side to the high-pressure side along the axial direction of the piston rod 17. A hydrogen filling interface 9 and a leakage recovery interface are provided on the packing cover 1. The intermediate packing box 3 includes a first intermediate sealing ring 6 and a second intermediate sealing ring 7. The hydrogen filling interface 9 is connected to the intermediate packing box 3, and the connection point is located between the first intermediate sealing ring 6 and the second intermediate sealing ring 7. The leakage recovery interface is used to collect leaked gas. Hydrogen is filled between the first intermediate sealing ring 6 and the second intermediate sealing ring 7 through the hydrogen filling interface 9, and the hydrogen can move toward the high-pressure side along the sealing gap of the piston rod 17, and collide and merge with the reaction medium leaking along the piston rod 17 in the cylinder 18, and a part of it returns to the cylinder 18, and a part of it is recovered through the leakage recovery interface. Since the reaction medium already includes hydrogen, the reaction medium gas of the polysilicon sealed by hydrogen filling will not cause pollution to the reaction medium. In addition, the intermediate packing box 3 includes a first intermediate sealing ring 6 and a second intermediate sealing ring 7. The hydrogen filling interface 9 is connected to the intermediate filling box 3, and the connection point is located between the first intermediate sealing ring 6 and the second intermediate sealing ring 7, which can prevent the excessive leakage of the filled hydrogen into the environment and prevent excessive reaction medium from leaking into the intermediate filling box 3. In addition, the filling structure of the utility model adopts an oil-free lubrication and water-free cooling structure, which prevents lubricating oil or cooling water from contaminating the polysilicon reaction medium.

[0031] In some embodiments, Figure 1 As shown, the polysilicon compressor packing structure further includes a high-pressure air leakage chamber 16. The high-pressure air leakage chamber 16 is arranged between two adjacent high-pressure packing boxes 4. The air leakage recovery interface includes a high-pressure recovery interface 10. The high-pressure recovery interface 10 is connected to the high-pressure air leakage chamber 16.

[0032] In some examples, such as Figure 1As shown, the low-pressure sealing ring 5 in the low-pressure stuffing box 2 is located on the low-pressure side of the low-pressure stuffing box 2; in the high-pressure stuffing box 4 between the intermediate stuffing box 3 and the high-pressure leakage chamber 16, the high-pressure sealing ring 8 is located on the high-pressure side of the high-pressure stuffing box 4; in the high-pressure stuffing box 4 on the high-pressure side of the high-pressure leakage chamber 16, the high-pressure sealing ring 8 is located on the low-pressure side of the high-pressure stuffing box 4. In this arrangement, there is a low-pressure sealing ring 5 between the contact surface of the stuffing cover 1 and the low-pressure stuffing box 2, there is a low-pressure sealing ring 5 between the contact surfaces of two adjacent low-pressure stuffing boxes 2, there is a first intermediate sealing ring 6 between the contact surface of the low-pressure stuffing box 2 and the intermediate stuffing box 3, there is a second intermediate sealing ring 7 between the contact surface of the intermediate stuffing box 3 and the high-pressure stuffing box 4, and there is a high-pressure sealing ring 8 between the contact surfaces of two adjacent high-pressure stuffing boxes 4 and between the contact surface of the high-pressure stuffing box 4 and the high-pressure leakage chamber 16. Therefore, the low-pressure sealing ring 5, the first intermediate sealing ring 6, the second intermediate sealing ring 7 and the high-pressure sealing ring 8 can not only seal the gap between the piston rod 17 and the stuffing box, but also seal the contact surfaces between the stuffing cover 1, multiple low-pressure stuffing boxes 2, the intermediate stuffing box 3 and multiple high-pressure stuffing boxes 4 arranged in sequence, which is beneficial to improving the overall airtightness of the polysilicon compressor stuffing structure.

[0033] It is understandable that the low-pressure sealing ring 5, the first intermediate sealing ring 6, the second intermediate sealing ring 7 and the high-pressure sealing ring 8 can be a double-layer sealing structure or a single-layer sealing structure. This embodiment does not impose too many restrictions on this, and the number of layers and thickness can be set according to actual use requirements and the size of the installation space.

[0034] The high-pressure leakage chamber 16 of this embodiment is arranged between two adjacent high-pressure stuffing boxes 4, and the high-pressure recovery interface 10 is connected to the high-pressure leakage chamber 16. Hydrogen is charged between the first intermediate sealing ring 6 and the second intermediate sealing ring 7 through the hydrogen charging interface 9, and the hydrogen can move toward the high-pressure side along the sealing gap of the piston rod 17, and collide with the reaction medium leaking along the piston rod 17 in the cylinder 18 and mix in the high-pressure leakage chamber 16, and then be led out and recovered through the high-pressure recovery interface 10. The recovered mixed gas is the reaction medium and hydrogen, so it can be introduced into the cylinder 18 as a reaction medium for recycling, which is conducive to improving the reaction efficiency, reducing costs, and thus improving the production efficiency of polysilicon.

[0035] In some embodiments, Figure 1 and Figure 3As shown, the high-pressure recovery interface 10 is connected to the high-pressure air leakage chamber 16 through the recovery pipeline 12. The recovery pipeline 16 runs through the packing cover 1, multiple low-pressure packing boxes 2, the intermediate packing box 3 and at least one high-pressure packing box 4. The recovery pipeline 12 of this embodiment runs through the packing cover 1, multiple low-pressure packing boxes 2, the intermediate packing box 3 and at least one high-pressure packing box 4 to be connected to the high-pressure air leakage chamber 16, which can not only limit the packing cover 1, multiple low-pressure packing boxes 2, the intermediate packing box 3 and at least one high-pressure packing box 4, but also help to reduce the difficulty of installing the packing structure of the polysilicon compressor.

[0036] In some embodiments, Figure 2 and Figure 3 As shown, a nitrogen filling interface 19 is provided on the packing cover 1. A receiving chamber 20 is provided in the packing cover 1. A packing cover sealing ring 21 is provided in the receiving chamber 20. The nitrogen filling interface 19 is connected to the receiving chamber 20. The packing structure of the crystalline silicon compressor of this embodiment also includes a nitrogen filling interface 19, which is provided on the packing cover 1 and is connected to the receiving chamber 20 in the packing cover 1. This packing structure adopts hydrogen filling to seal the polycrystalline silicon reaction medium. Since the main component of the reaction medium is hydrogen, the hydrogen filling seal will not cause pollution to the reaction medium. At the same time, nitrogen is used to seal hydrogen to prevent hydrogen from leaking into the environment.

[0037] In some embodiments, Figure 2 and Figure 3 As shown, the polysilicon compressor packing structure further includes a low-pressure air leakage chamber 23. The low-pressure air leakage chamber 23 is arranged between the packing cover 1 and the low-pressure packing box 2. The air leakage recovery interface includes a low-pressure recovery interface 22. The low-pressure recovery interface 22 is connected to the low-pressure air leakage chamber 23.

[0038] The polysilicon compressor packing structure of the present embodiment also includes a low-pressure leakage chamber 23, and the low-pressure recovery interface 22 is connected to the low-pressure leakage chamber 23. When in use, hydrogen is filled between the first intermediate sealing ring 6 and the second intermediate sealing ring 7 through the hydrogen filling interface 9, and the hydrogen can move toward the high-pressure side along the sealing gap of the piston rod 17, and counteract the reaction medium leaking along the piston rod 17 in the cylinder 18 and mix in the high-pressure leakage chamber 16, and then be extracted and recovered through the high-pressure recovery interface 10. The recovered mixed gas is the reaction medium and hydrogen, so it can be introduced into the cylinder 18 as a reaction medium for recycling. At the same time, nitrogen is filled into the accommodating chamber 20 through the nitrogen filling interface 19, and the nitrogen can move toward the high-pressure side along the sealing gap of the piston rod 17, and counteract the hydrogen moving toward the low-pressure side and mix in the low-pressure leakage chamber 23, and then be extracted by the low-pressure recovery interface 22 to prevent hydrogen from leaking into the environment.

[0039] In addition, it should be noted that, in some embodiments, Figure 2As shown, if the hydrogen filling pressure is higher than the cylinder exhaust pressure, the high-pressure leakage chamber 16 and the high-pressure recovery interface 10 can be cancelled. However, if the high-pressure leakage chamber 16 is cancelled, it is necessary to install an isolation box 24 at the original position of the high-pressure leakage chamber 16 to avoid direct contact between the high-pressure sealing rings 8 in the two adjacent high-pressure stuffing boxes 4 and affect the overall air tightness.

[0040] In some embodiments, Figures 1 to 3 As shown, the polysilicon compressor packing structure further includes: a sheath 13, which is arranged outside the cylinder 18 and sleeved on the outer periphery of the low-pressure packing box 2. Both ends of the sheath 13 are connected between the cylinder 18 and the end surface of the packing cover 1.

[0041] The polysilicon compressor packing structure of this embodiment further includes a sleeve 13. When the packing structure cannot be completely installed in the cylinder seat of the cylinder 18, the exposed part is positioned by the sleeve 13 instead of the positioning rod. Since the polysilicon compressor packing structure requires more sealing ring groups and the packing is longer, the packing often leaks out of the cylinder seat or cylinder body. At this time, the sleeve 13 is used for positioning to avoid the misalignment of the leaked packing box after long-term operation.

[0042] In some embodiments, Figures 1 to 3 As shown, a first sealing member 14 is provided between the sheath 13 and the end surface of the packing cover 1. In this embodiment, the first sealing member 14 is provided between the sheath 13 and the end surface of the packing cover 1 to improve the airtightness between the sheath 13 and the end surface of the packing cover 1.

[0043] In some embodiments, Figures 1 to 3 As shown, the hydrogen charging interface 9 is connected to the intermediate stuffing box 3 through the hydrogen pipeline 11. The hydrogen pipeline 11 penetrates the stuffing cover 1 and the multiple low-pressure stuffing boxes 2. The hydrogen pipeline 11 of this embodiment penetrates the stuffing cover 1 and the multiple low-pressure stuffing boxes 2 to be connected to the intermediate stuffing box 3, which can not only limit the stuffing cover 1 and the multiple low-pressure stuffing boxes 2, but also help to reduce the difficulty of installing the stuffing structure of the polysilicon compressor.

[0044] In some embodiments, Figures 1 to 3 As shown, the contact surfaces between the stuffing cover 1, the multiple low-pressure stuffing boxes 2, the intermediate stuffing boxes 3 and the multiple high-pressure stuffing boxes 4 are tightly fitted, and a second seal 15 is provided between two adjacent contact surfaces. In this embodiment, the contact surfaces between the stuffing cover 1, the multiple low-pressure stuffing boxes 2, the intermediate stuffing boxes 3 and the multiple high-pressure stuffing boxes 4 are sealed by a grinding surface, and an additional second seal 15 is added, which is double-layer sealed to ensure that the polysilicon reaction medium will not leak.

[0045] In a second aspect, this embodiment further provides a polysilicon compressor. Figures 1 to 3The polysilicon compressor of this embodiment includes a cylinder 18, a piston rod 17 and the polysilicon compressor packing structure described above. The cylinder 18 includes a piston. The piston rod 17 is telescopically arranged in the cylinder 18 and connected to the piston. The polysilicon compressor packing structure is arranged between the cylinder 18 and the piston rod 17.

[0046] The polysilicon compressor of this embodiment is provided with the polysilicon compressor packing structure of the above-mentioned embodiment, and therefore has good sealing ability, which can not only prevent the reaction medium of polysilicon from leaking into the environment, but also prevent the sealing packing from contaminating the reaction medium, which is beneficial to improving the purity of polysilicon.

[0047] It is easy for those skilled in the art to understand that, under the premise of no conflict, the above-mentioned advantageous methods can be freely combined and superimposed.

[0048] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the present invention. The above are only preferred implementations of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and variations can be made without departing from the technical principles of the present invention, and these improvements and variations should also be regarded as the protection scope of the present invention.

Claims

1. A polysilicon compressor packing structure, characterized in that: include: A stuffing cover, a plurality of low-pressure stuffing boxes, an intermediate stuffing box and a plurality of high-pressure stuffing boxes are sequentially arranged along the axial direction of the piston rod from the low-pressure side to the high-pressure side; The packing cover is provided with a hydrogen charging interface and a gas leakage recovery interface; The low-pressure stuffing box includes a low-pressure sealing ring; The intermediate stuffing box includes a first intermediate sealing ring and a second intermediate sealing ring; the first intermediate sealing ring is close to the side where the low-pressure stuffing box is located; the second intermediate sealing ring is close to the side where the high-pressure stuffing box is located; The high-pressure stuffing box includes a high-pressure sealing ring; The hydrogen charging interface is connected to the intermediate stuffing box, and the connecting point is located between the first intermediate sealing ring and the second intermediate sealing ring; The leaked gas recovery interface is used to collect leaked gas.

2. The polysilicon compressor packing structure according to claim 1, characterized in that: It also includes a high-pressure air leakage chamber; the high-pressure air leakage chamber is arranged between two adjacent high-pressure stuffing boxes; The gas leakage recovery interface includes a high-pressure recovery interface; the high-pressure recovery interface is connected to the high-pressure gas leakage chamber.

3. The polysilicon compressor packing structure according to claim 2, characterized in that: The high-pressure recovery interface is connected to the high-pressure air leakage chamber through a recovery pipeline; the recovery pipeline runs through the stuffing cover, the multiple low-pressure stuffing boxes, the intermediate stuffing box and at least one high-pressure stuffing box.

4. The polysilicon compressor packing structure according to claim 1, characterized in that: The packing cover is provided with a nitrogen filling interface; The packing cover is provided with a containing cavity; the packing cover sealing ring is provided in the containing cavity; the nitrogen filling interface is connected with the containing cavity.

5. The polysilicon compressor packing structure according to claim 4, characterized in that: It also includes a low-pressure air leakage chamber; the low-pressure air leakage chamber is arranged between the stuffing cover and the low-pressure stuffing box; The gas leakage recovery interface includes a low-pressure recovery interface; the low-pressure recovery interface is connected to the low-pressure gas leakage chamber.

6. The polysilicon compressor packing structure according to claim 1, characterized in that: Also includes: A sheath is arranged outside the cylinder and sleeved on the outer circumference of the low-pressure stuffing box; two ends of the sheath are connected between the end faces of the cylinder and the stuffing cover.

7. The polysilicon compressor packing structure according to claim 6, characterized in that: A first sealing member is provided between the sleeve and the end surface of the packing cover.

8. The polysilicon compressor packing structure according to claim 1, characterized in that: The hydrogen filling interface is connected to the middle stuffing box through a hydrogen pipeline; the hydrogen pipeline runs through the stuffing cover and the multiple low-pressure stuffing boxes.

9. The polysilicon compressor packing structure according to claim 1, characterized in that: The contact surfaces among the stuffing cover, the plurality of low-pressure stuffing boxes, the intermediate stuffing box and the plurality of high-pressure stuffing boxes are tightly fitted, and a second sealing member is provided between two adjacent contact surfaces.

10. A polysilicon compressor, characterized in that: The polysilicon compressor comprises a cylinder and a piston rod and a polysilicon compressor packing structure as claimed in any one of claims 1 to 9; The cylinder includes a piston; The piston rod is telescopically disposed in the cylinder and connected to the piston; The crystalline silicon compressor packing structure is arranged between the cylinder and the piston rod.

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