Diaphragm pump protection device of waste liquid collection system

Abstract

The utility model belongs to the field of chemical waste liquid recovery, and particularly relates to a diaphragm pump protection device of a waste liquid collection system. Comprising a protective shell with observation windows, the observation windows are formed in the front face and the top face of the protective shell and connected to the protective shell through hinges, a diaphragm pump base used for containing a diaphragm pump is arranged at the bottom of the protective shell, and the diaphragm pump base comprises a bottom plate and a plurality of heightening blocks; block-up blocks are welded to the lower portion of the bottom plate at certain intervals and used for increasing the height of the diaphragm pump base, the periphery of the diaphragm pump base of the protection shell is surrounded by a liquid leakage detection belt, the liquid leakage detection belt is connected with an inductor control box through a signal cable, and the inductor control box is connected to a monitoring host. When a liquid leakage phenomenon occurs, an alarm signal is sent out and transmitted to a monitoring host of a chemical electrical control room, so that a remote monitoring function on the liquid leakage condition is realized.

Description

Technical Field

[0001] The utility model belongs to the field of chemical waste liquid recovery, in particular to a diaphragm pump protection device for a waste liquid collection system. Background Art

[0002] The liquid chemical recovery pneumatic diaphragm pump used in semiconductor integrated circuit factories is a pump specially designed for treating chemical waste liquids. It uses the principle of pneumatics to extract liquid chemicals from the waste liquid collection pit and transport them to the treatment or collection point through the movement of the diaphragm driven by air. Generally, the liquid chemical recovery pneumatic diaphragm pump is directly installed above the chemical waste liquid collection pit to extract the waste liquid and transport it to the chemical waste liquid treatment point or classified collection point through the waste acid pipeline.

[0003] The existing diaphragm pumps for chemical waste liquid treatment in semiconductor integrated circuit factories do not have external protective devices. If a chemical leak occurs during the operation of the pneumatic diaphragm pump, in addition to personal injury caused by accidental contact, there are also chemicals that react with water, such as H2SO4 (sulfuric acid), which will pose potential safety risks. When a chemical waste liquid leaks, it cannot be cut off in time for maintenance through remote monitoring. Therefore, there is an urgent need for a diaphragm pump protection device for a waste liquid collection system that can be remotely monitored. Utility Model Content

[0004] This solution provides a diaphragm pump protection device for the waste liquid collection system, which can effectively prevent the leakage of chemical waste liquid. The leakage is monitored in real time through the principle of liquid conductivity. When leakage occurs, an alarm signal is sent to the monitoring host in the chemical electrical control room, realizing the remote monitoring function of the leakage.

[0005] This solution specifically adopts the following technical means:

[0006] A diaphragm pump protection device for a waste liquid collection system includes a protective shell with an observation window, a diaphragm pump base for placing the diaphragm pump is provided at the bottom of the protective shell, a leakage detection belt surrounds the diaphragm pump base of the protective shell, the leakage detection belt is connected to a sensor control box through a signal cable, and the sensor control box is connected to a monitoring host.

[0007] Furthermore, angle bars are welded at the four corners of the protective shell, and screw holes are provided in the angle bars for fixing.

[0008] Furthermore, observation windows are provided on the front and top surfaces of the protective shell, and the observation windows are connected to the protective shell via hinges.

[0009] Furthermore, the diaphragm pump base includes a bottom plate and a plurality of heightening blocks, and the heightening blocks at a certain interval are welded under the bottom plate to increase the height of the diaphragm pump base.

[0010] Furthermore, the leakage detection tape is attached to the bottom of the protective shell by a sticker.

[0011] Preferably, the protective shell has an outer shape of 600 mm in length*600 mm in width*600 mm in height, and the observation window has an outer shape of 500 mm in length*500 mm in height.

[0012] Preferably, the bottom plate is in the shape of a plate with a length of 400 mm and a width of 400 mm, the heightening blocks are in the shape of 400 mm and a width of 80 mm, and the distance between the heightening blocks is 360 mm.

[0013] The utility model has the following beneficial effects:

[0014] The equipment adopts a protective shell design, with a diaphragm pump base at the bottom and a leak detection belt around it. This design effectively protects the diaphragm pump from external environmental influences and collisions, and prevents chemical splashes or leaks caused by damage to the pump or pipeline. The transparent window design allows operators to observe the operating status of the diaphragm pump in a safe environment, facilitating timely recording and maintenance.

[0015] This device can detect the leakage of waste liquid pump in time through the leakage sensing detection belt and sensor control box. The sensing belt works based on the principle of liquid conductivity. Once it comes into contact with the leakage, it will cause the sensing line to short-circuit and trigger the alarm signal. This real-time leakage monitoring and alarm function can effectively prevent the leakage of chemicals and ensure the safety of operators and the environment.

[0016] The system is equipped with a sensor control box, which is connected to the monitoring host through a communication line to achieve remote monitoring of leakage. Once the system detects an abnormal situation, such as leakage, it can quickly sound an alarm and cut off the waste pump, and start the backup pump to maintain the stable operation of the system. This remote monitoring and automatic response capability greatly improves the safety and reliability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a specific implementation of the utility model;

[0018] Figure 2 It is a schematic diagram of the connection between the utility model and the waste liquid collection system.

[0019] The numbers in the figure are: 1. Protective shell; 2. Sensor control box; 3. Signal cable; 4. Leakage detection belt; 5. Diaphragm pump base. DETAILED DESCRIPTION

[0020] The following describes the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0021] The utility model can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the utility model. It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the utility model, and the following embodiments and features in the embodiments can be combined with each other without conflict.

[0022] See also Figure 1 The present invention relates to a diaphragm pump protection device for a waste liquid collection system, which is mainly composed of a protective shell 1, a diaphragm pump base 5, a leakage detection belt 4 and a matching sensor control box 2 and other components. First of all, the protective shell 1 serves as the main protective structure of the device, and its dimensions are 600mm long * 600mm wide * 600mm high. The protective shell 1 is welded from PVDF material used for acid and alkali chemicals or stainless steel 304 material used for solvent chemicals to ensure its corrosion resistance and structural stability. An observation window is provided on the front and top, with dimensions of 500mm long * 500mm high, made of transparent corrosion-resistant material, and connected by hinges for easy operation and maintenance. In the specific implementation process, angle bars are welded at the four corners of the box and are provided with screw holes for fixing the device to enhance the overall structural stability.

[0023] Inside the box, the diaphragm pump base 5 is used to place the diaphragm pump. The diaphragm pump base is made of a plate with a size of 400mm long and 400mm wide. Two 400mm long and 80mm wide pads are welded at the bottom with a spacing of 360mm to ensure the stable installation and appropriate working height of the diaphragm pump.

[0024] In order to detect and handle leakage in time, a leakage detection tape 4 is arranged at the bottom of the device. The leakage detection tape 4 allows free cutting, equipped with corresponding induction tape stickers, and fixed under the diaphragm pump that is prone to leakage. The tape is usually a product commonly used in the semiconductor industry, such as the Omron series leakage induction detection tape. Please refer to Figure 2 ,These detection belts are based on the principle of liquid conductivity. Once they come into contact with leaked materials, the induction line will short-circuit, triggering the sensor control box 2 to send out an alarm signal. The sensor control box 2 is connected to the monitoring host to achieve remote monitoring and management of the leakage situation.

[0025] In this embodiment, according to the characteristics of different chemicals, the acid and alkali chemical waste liquid pump protection device uses white polypropylene (PP) plate to make the box body and diaphragm pump bottom plate with a thickness of 8mm, and the observation window uses a transparent acrylic plate (polymethyl methacrylate) with a thickness of 5mm. The solvent chemical waste liquid pump protection device uses SUS304 stainless steel plate to make the box body and bottom plate with a thickness of 2mm, and the observation window uses explosion-proof glass with a thickness of 5mm to ensure safety and durability.

[0026] It is understandable that the diaphragm pumps of the chemical waste liquid collection system are usually installed in a one-for-one installation mode, so this product, i.e. the corresponding chemical waste liquid collection system diaphragm pump protection device, also needs one for use and one for backup. When one of the diaphragm pumps leaks, the running diaphragm pump will be stopped and the backup diaphragm pump will be started to ensure the system continues to operate stably, safely and continuously.

[0027] The protection device has a reasonable design structure, appropriate material selection, and complete functions. It can effectively protect the chemical waste liquid diaphragm pump and detect leakage in time, thereby ensuring the safe operation of the system. This design is not only suitable for acid and alkali chemicals, but also for solvent chemicals, and has broad application prospects and market potential.

Claims

1. A diaphragm pump protection device for a waste liquid collection system, characterized in that: The invention comprises a protective shell (1) with an observation window, wherein a diaphragm pump base (5) for placing a diaphragm pump is provided at the bottom of the protective shell (1), a liquid leakage detection belt (4) surrounds the diaphragm pump base (5) of the protective shell (1), and the liquid leakage detection belt (4) is connected to a sensor control box (2) via a signal cable (3), and the sensor control box (2) is connected to a monitoring host.

2. The diaphragm pump protection device for a waste liquid collection system according to claim 1, characterized in that: The four corners of the protective shell (1) are welded with angle bars, and screw holes are provided in the angle bars for fixing.

3. The diaphragm pump protection device for a waste liquid collection system according to claim 1, characterized in that: The front and top surfaces of the protective shell (1) are provided with observation windows, and the observation windows are connected to the protective shell (1) via hinges.

4. The diaphragm pump protection device for a waste liquid collection system according to claim 1, characterized in that: The diaphragm pump base (5) comprises a bottom plate and a plurality of heightening blocks, and the heightening blocks are welded at a certain interval below the bottom plate to increase the height of the diaphragm pump base (5).

5. The diaphragm pump protection device for a waste liquid collection system according to claim 1, characterized in that: The liquid leakage detection tape (4) is attached to the bottom of the protective shell (1) via a sticker.

6. The diaphragm pump protection device for a waste liquid collection system according to claim 1, characterized in that: The protective shell (1) has an outer shape of 600 mm in length*600 mm in width*600 mm in height, and the observation window has an outer shape of 500 mm in length*500 mm in height.

7. The diaphragm pump protection device for a waste liquid collection system according to claim 4, characterized in that: The bottom plate is in the shape of a plate with a length of 400mm and a width of 400mm, the heightening blocks are in the shape of 400mm and a width of 80mm, and the spacing between the heightening blocks is 360mm.

Images