Crucible for sintering large-size silicon nitride substrate
By designing a silicon nitride substrate sintered crucible with independent components, the problem of dust adhesion during the existing crucible needs to be replaced as a whole and cooling process is solved, and the effect of reducing equipment costs and improving production efficiency is achieved.
Patent Information
- Application Number
- CN202421697661.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-17
- Publication Date
- 2025-05-23
- Estimated Expiration
- 2034-07-17
AI Technical Summary
Most of the existing crucibles used for sintering silicon nitride substrates are integrated structures, and they need to be replaced as a whole after damage, which increases the cost of equipment. At the same time, external dust is easy to adhere during cooling, affecting product quality, and covering the lid will affect heat dissipation and low cooling efficiency.
A large-size silicon nitride substrate sintering crucible is designed, which includes a separate base plate, a shell, a crucible body and a cover plate. The crucible body is independent of the shell, bottom plate and other components, which facilitates targeted replacement after damage; when cooling, slide the cover plate from the right side to prevent dust from adhering to promote heat dissipation through the ventilation hole.
It enables easy replacement of damaged parts separately and reduces equipment costs; at the same time, it prevents dust and promotes heat dissipation, ensuring product quality and improving production efficiency.
Smart Images
Figure CN222895504U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of silicon nitride sintering equipment, and particularly relates to a crucible for sintering large-size silicon nitride substrates. Background Technique
[0002] Silicon nitride substrates are usually prepared by sintering process, and its sintering process generally includes raw material preparation, processing and forming, sintering, etc. During the sintering process, a crucible is usually used to play a role of bearing and protect the green body from being polluted by the external environment. The crucible material used in the sintering process of silicon nitride substrates is boron nitride. Boron nitride crucibles have the characteristics of being resistant to repeated high and low temperature impacts, carbon corrosion resistance, non-reaction with metal and ceramic materials, non-bonding, and long service life.
[0003] Most of the existing crucibles for sintering silicon nitride substrates are of an integral structure and need to be replaced as a whole after being damaged, thus increasing the equipment cost; moreover, when the silicon nitride substrate is cooled after sintering, external dust is easily attached, affecting the product quality, and covering the crucible with a lid affects heat dissipation, resulting in low cooling efficiency. Content of the Utility Model
[0004] The main purpose of the utility model is to provide a crucible for sintering large-size silicon nitride substrates to solve the problems mentioned in the background technique.
[0005] To achieve the above purpose, the technical solution adopted by the utility model is as follows:
[0006] A crucible for sintering large-size silicon nitride substrates includes a bottom plate, and legs are symmetrically arranged at the lower end of the bottom plate. A U-shaped shell is arranged at the upper end of the bottom plate, and the upper side and the right side of the shell are in an open state. Support bars are arranged inside the shell, and a crucible body is movably installed on the support bars. An inverted L-shaped cover plate is movably installed above the shell, and the cover plate and the shell are buckled into a hollow cube. The cover plate is composed of a horizontal plate and a vertical plate, and a plurality of ventilation holes are opened in the vertical plates of the shell and the cover plate.
[0007] Further, a third chute for sliding cooperation with the support bar is opened at the bottom of the crucible body.
[0008] Further, a second chute is opened at the top of the shell, and a second slider for sliding cooperation with the second chute is arranged on the lower side of the horizontal plate of the cover plate.
[0009] Further, a first chute is opened on the right side of the bottom plate, and a first slider for sliding cooperation with the first chute is arranged on the lower side of the vertical plate of the cover plate.
[0010] The utility model also includes other components that enable the large-size crucible for sintering silicon nitride substrates to be used normally, and these devices or components all adopt conventional technical means in the field. In addition, the devices and components not limited in the utility model all adopt conventional technical means in the field. In the specific implementation process, the appropriate device or component model can be selected according to the specific working scenario.
[0011] The working principle of the utility model is that the crucible body is independent of the shell, the bottom plate and other components, which is convenient for targeted replacement after damage, thereby reducing equipment costs; when the silicon nitride substrate is sintered and cooled, the cover plate is slid from the right side to prevent external dust from adhering, and the vent holes around the crucible body are also conducive to heat dissipation, thereby ensuring product quality and improving production efficiency.
[0012] Compared with the prior art, the utility model has the following beneficial effects: 1. It is convenient to replace damaged parts separately, thus reducing equipment costs; 2. It is dustproof and also convenient for heat dissipation, thus ensuring product quality and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 The utility model is a schematic diagram of the overall structure of a crucible for sintering a large-sized silicon nitride substrate.
[0014] Figure 2 It is a structural schematic diagram of the shell of the utility model.
[0015] Figure 3 It is a schematic structural diagram of the crucible body of the utility model.
[0016] Figure 4 It is a structural schematic diagram of the cover plate of the utility model.
[0017] In the figure: 1, bottom plate; 11, support leg; 12, first slide groove; 2, shell; 21, support bar; 22, second slide groove; 3, crucible body; 31, third slide groove; 4, cover plate; 41, second slide block; 42, first slide block; 5, vent hole. DETAILED DESCRIPTION
[0018] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.
[0019] Example:
[0020] like Figures 1 to 4As shown in the figure, a crucible for sintering large-size silicon nitride substrates includes a bottom plate 1, and support legs 11 are symmetrically provided at the lower end of the bottom plate 1. A U-shaped housing 2 is provided at the upper end of the bottom plate 1, and the upper side and the right side of the housing 2 are in an open state. A support bar 21 is arranged inside the housing 2, and a crucible body 3 is movably installed on the support bar 21. An inverted L-shaped cover plate 4 is movably installed above the housing 2, and the cover plate 4 and the housing 2 are buckled to form a hollow cube. The cover plate 4 is composed of a horizontal plate and a vertical plate, and a plurality of ventilation holes 5 are provided on the vertical plates of the housing 2 and the cover plate 4.
[0021] In addition, a first chute 12 is provided on the right side of the bottom plate 1, and a first slider 42 that is slidably matched with the first chute 12 is provided on the lower side of the vertical plate of the cover plate 4. A second chute 22 is provided at the top of the housing 2, and a second slider 41 that is slidably matched with the second chute 22 is provided on the lower side of the horizontal plate of the cover plate 4. A third chute 31 that is slidably matched with the support bar 21 is provided at the bottom of the crucible body 3. The bottom plate 1, the housing 2, the crucible body 3, and the cover plate 4 are all made of boron nitride.
[0022] The working principle of the crucible for sintering large-size silicon nitride substrates of the present utility model is as follows: The crucible body 3 is independent of components such as the housing 2 and the bottom plate 1, which is convenient for targeted replacement after damage and reduces the equipment cost; when the silicon nitride substrate is sintered and cooled, the cover plate 4 is slid on from the right side to prevent external dust from adhering, and at the same time, the ventilation holes 5 around the crucible body 3 are also beneficial to heat dissipation, thereby ensuring product quality and improving production efficiency.
[0023] The above embodiments only describe the preferred embodiments of the present utility model, and do not limit the scope of the present utility model. Without departing from the design spirit of the present utility model, various deformations and improvements made by those of ordinary skill in the art to the technical solutions of the present utility model shall all fall within the protection scope of the present utility model.
Claims
1. A crucible for sintering a large-sized silicon nitride substrate, comprising a bottom plate (1), wherein legs (11) are symmetrically arranged at the lower end of the bottom plate (1), characterized in that: At the upper end of the bottom plate (1), there is a U-shaped housing (2), and the upper side and the right side of the housing (2) are in an open state; inside the housing (2), there is a support bar (21), and a crucible body (3) is movably installed on the support bar (21); above the housing (2), an inverted L-shaped cover plate (4) is movably installed, and the cover plate (4) and the housing (2) are buckled into a hollow cube; the cover plate (4) is composed of a horizontal plate and a vertical plate, and a plurality of ventilation holes (5) are opened in the vertical plates of the housing (2) and the cover plate (4).
2. The crucible for sintering a large-size silicon nitride substrate according to claim 1, characterized in that: At the bottom of the crucible body (3), a third chute (31) is opened, which is slidably matched with the support bar (21).
3. The crucible for sintering a large-size silicon nitride substrate according to claim 1, characterized in that: At the top of the housing (2), a second chute (22) is opened, and a second slider (41) slidably matched with the second chute (22) is arranged on the lower side of the horizontal plate of the cover plate (4).
4. The crucible for sintering a large-size silicon nitride substrate according to claim 1, characterized in that: On the right side of the bottom plate (1), a first chute (12) is opened, and a first slider (42) slidably matched with the first chute (12) is arranged on the lower side of the vertical plate of the cover plate (4).