Preheating water tank device and system

Abstract

The utility model provides a preheating water tank device and system, and relates to the technical field of semiconductors. Wherein the preheating water tank device comprises a heating module and a monitoring module, and the monitoring module comprises a monitoring unit and an alarm unit; the monitoring unit is connected with the heating module and the alarm unit. And the heating module, the alarm unit and the monitoring unit are respectively connected with the power supply device. The monitoring unit is used for monitoring and determining whether the heating module is in a normal working state according to the working current of the heating module; when the heating module is in an abnormal working state, the monitoring unit sends a first control signal to the alarm unit to drive the alarm unit to start working; and when the heating module is in a normal working state, the monitoring unit sends a second control signal to the alarm unit to drive the alarm unit to stop working. On the basis that an existing preheating water tank structure is not changed, whether the corresponding heating pipe breaks down or not can be monitored in real time, and the fault is fed back to a user in time after monitoring.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a preheating water tank device and system. Background Art

[0002] With the development of semiconductor technology, the requirements for the preparation of semiconductor devices are getting higher and higher. Taking wet stripping equipment as an example, the equipment can soak the wafer with photoresist in an appropriate organic solvent to dissolve or decompose the photoresist to remove the photoresist on the surface of the wafer. In order to better remove the photoresist on the surface of the wafer, a preheated water tank can be set in the wet stripping equipment to increase the speed of dissolution or decomposition.

[0003] In the prior art, a preheating water tank is usually provided with a plurality of high-power halogen double-hole single-end heating tubes to increase the temperature corresponding to the organic solvent in the water tank. The heating tubes are usually arranged at the bottom of the preheating water tank, and it is difficult to directly detect whether the heating tubes are faulty through instruments or equipment.

[0004] In summary, there is an urgent need for a preheating water tank that can monitor in real time whether the corresponding heating pipe has a fault and provide timely feedback to the user after monitoring. Utility Model Content

[0005] The utility model aims to provide a preheating water tank device and system, which can monitor in real time whether a corresponding heating pipe fails and provide timely feedback to the user after monitoring.

[0006] The utility model provides a technical solution:

[0007] In a first aspect, the utility model provides a preheating water tank device, the preheating water tank device comprises a heating module and a monitoring module, the monitoring module comprises a monitoring unit and an alarm unit; the monitoring unit is connected to the heating module and the alarm unit respectively; the heating module, the alarm unit and the monitoring unit are also connected to a power supply device respectively;

[0008] The monitoring unit is used to monitor and determine whether the heating module is in a normal working state according to the working current of the heating module;

[0009] When the heating module is in an abnormal working state, the monitoring unit sends a first control signal to the alarm unit to drive the alarm unit to start working;

[0010] When the heating module is in a normal working state, the monitoring unit sends a second control signal to the alarm unit to drive the alarm unit to stop working.

[0011] Preferably, the monitoring module further comprises a control unit; the control unit is connected to the monitoring unit and the alarm unit respectively; the control unit is also connected to a power supply device;

[0012] The monitoring unit is used to monitor the working current of the heating module;

[0013] The control unit is used to send a control signal to the alarm unit according to the working current to switch the working state of the alarm unit;

[0014] When the heating module does not work normally, the control unit sends a first control signal to the alarm unit to drive the alarm unit to start working;

[0015] When the heating module works normally, the control unit sends a second control signal to the alarm unit to drive the alarm unit to stop working.

[0016] Preferably, the preheating water tank device further comprises a first switch unit, and the first switch unit is connected to the control unit and the alarm unit respectively;

[0017] The control unit sends a control signal to the first switch unit to switch the working state of the alarm unit;

[0018] When the heating module is in an abnormal working state, the control unit sends a first control signal to the first switch unit, the switch unit is closed, and the alarm unit works;

[0019] When the heating module is in a normal working state, the control unit sends a second control signal to the second switch unit, the switch unit is disconnected, and the alarm unit does not work.

[0020] Preferably, when the heating module includes a plurality of heating resistors connected in parallel, the monitoring module includes a plurality of monitoring units and a plurality of alarm units, and the heating resistors, the monitoring units and the alarm units all correspond one to one.

[0021] Preferably, the monitoring unit comprises a current sensing switch, and the current sensing switch comprises an induction coil and an induction switch;

[0022] The induction coil is sleeved on the heating resistor, and the induction switch is connected to the alarm unit; wherein,

[0023] When the heating module is in a normal working state, the induction coil generates an induced current; the induction switch is disconnected, and the alarm unit does not work;

[0024] When the heating module does not work normally, the induction coil does not generate an induced current; the induction switch is closed, and the alarm unit works.

[0025] Preferably, the current sensing switch is a normally closed current sensing switch;

[0026] When the heating module does not work normally, the induction coil does not generate an induced current; the induction switch remains closed, and the alarm unit works.

[0027] Preferably, the alarm unit comprises an audible and visual alarm.

[0028] Preferably, the monitoring module further comprises a temperature detection unit, a temperature control unit and an adjustment unit, wherein the temperature control unit is connected to the temperature detection unit and the adjustment unit; the temperature detection unit is arranged on the heating module to monitor the real-time temperature of the heating module; the adjustment unit is also connected to the temperature detection unit; wherein the adjustment unit comprises a plurality of working states;

[0029] The temperature control unit is used to switch the working state of the regulating unit according to the real-time temperature to adjust the power of the heating module.

[0030] Preferably, the preheating water tank device further comprises a display module, and the display module is connected to the temperature control unit;

[0031] The display module is used to display the power and real-time temperature of the heating module.

[0032] In a second aspect, the utility model further provides a preheating water tank system, comprising a power supply device and the preheating water tank device described in any one of the first aspects above, wherein the power supply device is connected to the preheating water tank device to supply power to the preheating water tank device.

[0033] The beneficial effects of the preheating water tank device and system provided by the utility model are:

[0034] A preheating water tank device and system are provided, which relate to the field of semiconductor technology. The preheating water tank device includes a heating module and a monitoring module, and the monitoring module includes a monitoring unit and an alarm unit; the monitoring unit is respectively connected to the heating module and the alarm unit; the heating module, the alarm unit and the monitoring unit are also respectively connected to a power supply device. The monitoring unit is used to monitor and determine whether the heating module is in a normal working state based on the working current of the heating module; when the heating module is in an abnormal working state, the monitoring unit sends a first control signal to the alarm unit to drive the alarm unit to start working; when the heating module is in a normal working state, the monitoring unit sends a second control signal to the alarm unit to drive the alarm unit to stop working. The utility model can provide a preheating water tank without changing the existing preheating water tank structure, which can monitor in real time whether the corresponding heating pipe has a fault, and provide timely feedback to the user after monitoring. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 One of the structural schematic diagrams of the preheating water tank device provided in the embodiment of the utility model;

[0037] Figure 2 The second structural schematic diagram of the preheating water tank device provided by the embodiment of the utility model;

[0038] Figure 3 This is a schematic diagram of the structure of the monitoring unit in the embodiment of the utility model;

[0039] Figure 4 It is a cross-sectional view of a monitoring unit in an embodiment of the utility model;

[0040] Figure 5 This is the third structural schematic diagram of the preheating water tank device in the embodiment of the utility model;

[0041] Figure 6 This is the fourth structural diagram of the preheating water tank device in the embodiment of the utility model;

[0042] Figure 7 This is one of the structural diagrams of the monitoring module in the embodiment of the utility model;

[0043] Figure 8 This is the fifth structural diagram of the preheating water tank device in the embodiment of the utility model;

[0044] Fig. 9 This is the second structural diagram of the monitoring module in the embodiment of the utility model;

[0045] Fig.10 A circuit diagram of a preheating water tank device provided in an embodiment of the utility model.

[0046] Icons: 100-preheating water tank device; 101-heating module; 102-monitoring module; 103-monitoring unit; 104-alarm unit; 105-power supply device; 106-control unit; 107-first switch unit; 108-second switch unit; 109-display module; 301-current sensing switch; 302-induction coil; 303-induction switch; 201-temperature detection unit; 202-temperature control unit; 203-adjustment unit. 400-preheating water tank system. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0048] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0050] In the description of the present utility model, it should be understood that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present utility model.

[0051] Furthermore, the terms “first”, “second”, “third”, etc. are merely used for distinguishing descriptions and are not to be understood as indicating or implying relative importance.

[0052] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] As described in the background technology, in order to better remove the photoresist on the surface of the wafer, a preheating water tank is provided in the wet degumming equipment to increase the speed of dissolution or decomposition. However, the heating device is usually arranged at the bottom of the preheating water tank. For example, a plurality of high-power halogen double-hole single-ended heating tubes are arranged at the bottom of the preheating water tank. However, it is difficult to directly detect whether the heating tubes are faulty through instruments or equipment. The conventional detection method is to suspend the operation of the wet degumming equipment, remove the water tank to reveal the heating device, and then check one by one according to the detection equipment. This method will greatly increase the detection cost and cannot achieve monitoring in the first time.

[0054] Based on the above considerations, this embodiment provides a preheating water tank solution to monitor in real time whether the corresponding heating tube has a fault, and if a fault occurs, promptly feed back the monitoring results to the user.

[0055] The technical solution will be described in detail below.

[0056] Example

[0057] See also Figure 1 In the first aspect, the utility model provides a preheating water tank device 100, which includes a heating module 101 and a monitoring module 102, wherein the monitoring module 102 includes a monitoring unit 103 and an alarm unit 104; the monitoring unit 103 is respectively connected to the heating module 101 and the alarm unit 104; the heating module 101, the alarm unit 104 and the monitoring unit 103 are also respectively connected to a power supply device 105.

[0058] In this embodiment, the monitoring unit 103 is used to monitor and determine whether the heating module 101 is in a normal working state according to the working current of the heating module 101. When the heating module 101 is in an abnormal working state, the monitoring unit 103 sends a first control signal to the alarm unit 104 to drive the alarm unit 104 to start working. When the heating module 101 is in a normal working state, the monitoring unit 103 sends a second control signal to the alarm unit 104 to drive the alarm unit 104 to stop working.

[0059] In a possible implementation, when the heating module 101 is not working properly, the heating module 101 may be in an open circuit state, that is, the heating module 101 is damaged and cannot play a heating role. In this state, the monitoring unit 103 can be used to monitor the working current of the heating module 101, that is, to monitor whether the heating module 101 has current passing through it.

[0060] In this embodiment, in order to increase the applicability of the monitoring unit, a monitoring unit and an alarm unit can be set for each heating device in the heating module, so that when the corresponding heating device is damaged, the user can be notified of the specific location of the damaged device in time, and the device can be replaced and adjusted in time to improve the accuracy of monitoring.

[0061] Please refer to Figure 2 , when the heating module 101 includes a plurality of heating resistors R connected in parallel i＝N (N is the number of heating modules 101, and N is a positive integer), the monitoring module 102 includes multiple monitoring units 103 and multiple alarm units 104, and the heating resistors, monitoring units 103 and alarm units 104 all correspond to each other one by one.

[0062] To reduce the structure and cost of the device, please refer to Figure 3 In this embodiment, the monitoring unit 103 may be provided with a current sensing switch 301, which includes an induction coil 302 and an induction switch 303. The current sensing switch 301 controls the state of the switch by changing the induction current, that is, based on the electromagnetic induction phenomenon, the induction coil 302 is used to convert the induction current into an electrical signal to control the circuit switch state.

[0063] Please refer to Figure 4 In this embodiment, a heating resistor is taken as an example, the induction coil 302 in the corresponding current sensing switch 301 is sleeved on the heating resistor, and the corresponding induction switch 303 is connected to the alarm unit 104 to form a circuit loop with the power supply device 105. When the heating resistor works normally, the induction coil 302 converts the induced current into an electrical signal, and at this time, the induction switch 303 can be controlled to be disconnected to cut off the circuit loop.

[0064] Similarly, when the heating resistor is not working properly, the induction switch 303 is closed to conduct the circuit loop. Since the heating resistor is not working properly, the corresponding induction coil 302 will not induce current. At this time, in order to ensure the conduction of the circuit loop, in one possible implementation, a normally closed current induction switch 301 can be selected. That is, when the heating module 101 is not working properly, the induction coil 302 does not generate an induced current. At this time, the induction switch 303 remains closed and the alarm unit 104 works; and when the heating module 101 is working properly, the induction coil 302 generates an induced current. At this time, the induction switch 303 is disconnected and the alarm unit 104 does not work.

[0065] In this embodiment, the alarm unit 104 can select an alarm that integrates a sound module and a lighting module, for example, an audible and visual alarm, so that when the heating resistor is not working properly, it can promptly remind the user through sound and lighting (flashing) that there is a fault in the heating resistor and the troubleshooting is required.

[0066] Based on this, this embodiment can provide a low-cost and simple-structured preheating water tank device without changing the existing preheating water tank structure, so as to monitor in real time whether the corresponding heating pipe has a fault, and provide timely feedback to the user after monitoring.

[0067] When the heating module is in an abnormal state, in addition to the situation where the circuit is broken and there is no current due to component damage, there may also be insufficient heating power corresponding to the heating module. To overcome this problem, this embodiment also provides an implementation method, please refer to Figure 5 In this embodiment, the monitoring module 102 includes a control unit 106; the control unit 106 is connected to the monitoring unit 103 and the alarm unit 104 respectively; the control unit 106 is also connected to the power supply device 105. The monitoring unit 103 is used to monitor the working current of the heating module 101; the control unit 106 sends a control signal to the alarm unit 104 according to the working current to switch the working state of the alarm unit 104.

[0068] In a possible embodiment, the monitoring unit 103 may be a current monitoring module 102, which monitors the working current of the heating module 101 in real time, and converts the monitored current value into a digital signal and feeds it back to the control unit 106. The control unit 106 determines whether the above-mentioned feedback digital signal is less than the pre-set value. If it is less, it means that the corresponding working power of the corresponding heating module 101 is insufficient. A first control signal may be sent to the alarm unit 104 to drive the alarm unit 104 to start working and notify the user that the heating module 101 has a fault.

[0069] Similarly, if the above-mentioned feedback digital signal is equal to the preset value, it means that the working power corresponding to the corresponding heating module 101 is working normally, and the control unit 106 sends a second control signal to the alarm unit 104, and the alarm unit 104 does not work at this time.

[0070] Similarly, if the above-mentioned feedback digital signal is greater than the pre-set value, it means that the working power corresponding to the corresponding heating module 101 is overloaded. A first control signal can also be sent to the alarm unit 104 to drive the alarm unit 104 to start working and notify the user that the heating module 101 has a fault.

[0071] In this embodiment, the first control signal and the second control signal may be opposite signals, for example, a high level signal and a low level signal, that is, when the working power corresponding to the heating module 101 is normal, the control unit 106 sends a low level to the alarm unit 104, and the alarm unit 104 does not work at this time. Similarly, when the working power corresponding to the heating module 101 is abnormal, the control unit 106 sends a high level to the alarm unit 104, and the alarm unit 104 works at this time.

[0072] In one possible implementation, please refer to Figure 6 The preheating water tank device 100 may further include a first switch unit 107, which is connected to the control unit 106 and the alarm unit 104. The control unit 106 is used to send a control signal to the first switch unit 107 to switch the working state of the alarm unit 104.

[0073] In this embodiment, the monitoring unit 103 monitors the working current of the heating module 101 in real time, and converts the monitored current value into a digital signal and feeds it back to the control unit 106. The control unit 106 determines whether the above-mentioned feedback digital signal is less than the pre-set value. If it is less, it means that the corresponding working power of the corresponding heating module 101 is insufficient, and sends a first control signal to the first switch unit 107 to drive the alarm unit 104 to start working, notifying the user that the heating module 101 has a fault.

[0074] In this embodiment, the control unit 106 can also be used to timely change or switch the conduction of the heating module 101 according to the heating power of the heating module 101. Figure 7 In this embodiment, the monitoring module 102 further includes a temperature detection unit 201, a temperature control unit 202 and an adjustment unit 203. The temperature control unit 202 is connected to the temperature detection unit 201 and the adjustment unit 203. The temperature detection unit 201 is arranged on the heating module 101 to monitor the real-time temperature of the heating module 101; the adjustment unit 203 is also connected to the temperature detection unit 201. The adjustment unit 203 includes multiple working states,

[0075] In one possible implementation, please refer to Figure 8 When the heating module 101 includes multiple heating resistors, the preheating water tank device 100 may further include multiple second switch units 108; each heating resistor corresponds to the second switch unit 108 one by one, and is connected to the power supply device 105 through the second switch unit 108. Among them, the adjustment unit 203 is also connected to the second switch unit 108. The adjustment unit 203 is used to change the access state of each heating resistor by adjusting the on or off state of the second switch unit 108 to adjust the power of the heating module 101.

[0076] This embodiment can also form a heating power within a threshold range by setting a rated power heating module 101. For example, the heating module 101 includes 4 heating resistors, and the rated power corresponding to each heating resistor is 5KW. Then, the preheating water tank device 100 can achieve heating within the range of 0-20KW. When the user needs 5KW, a corresponding heating resistor can be connected. At this time, the adjustment unit 203 adjusts the second switch unit 108 to adjust the power of the heating module 101.

[0077] In another possible implementation, please refer to Fig. 9 The preheating water tank device 100 further includes a display module 109 , which is connected to the temperature control unit 202 ; the display module 109 is used to display the power and real-time temperature of the heating module 101 .

[0078] Please refer to Fig.10 , this embodiment also provides a circuit diagram of a preheating water tank device. In addition to the heating resistor for generating heat, the heating module also includes a power adjustment unit, a heating control contactor, a leakage circuit breaker, a temperature display, a safety relay, an over-temperature protection safety relay, and an over-temperature protector. When the preheating water tank device is required to perform a heating function, a heating start signal can be provided to the preheating water tank device to close the switch S1. At this time, the heating controller contactor coil generates current, the heating controller contactor switch is powered on, and the power adjustment unit starts to work. When the power adjustment unit is in the first working state, the corresponding switches K1 to K4 can be powered on to control the corresponding heating resistors to be turned on.

[0079] In this embodiment, different working states of the power adjustment unit correspond to different conduction conditions of the switches K1 to K4, and in different working states, the power adjustment unit can send high-level signals or low-level signals to the corresponding switches to achieve conduction or cutoff of the switches K1 to K4. Specifically, the power adjustment unit adjusts the power of the heating module 101 according to the corresponding temperature value, and the specific adjustment method can refer to the control logic of the adjustment unit 203 and the temperature detection unit 201 in the previous embodiment.

[0080] Among them, the leakage circuit breaker, the safety relay, the over-temperature protection safety relay, and the over-temperature protector are all used to prevent the preheating water tank device 100 from being in a leakage state or an over-temperature state when the above-mentioned power adjustment unit and the heating module 101 are working.

[0081] In summary, the utility model provides a preheating water tank device, which relates to the field of semiconductor technology. Among them, the preheating water tank device includes a heating module and a monitoring module, and the monitoring module includes a monitoring unit and an alarm unit; the monitoring unit is respectively connected to the heating module and the alarm unit; the heating module, the alarm unit and the monitoring unit are also respectively connected to the power supply device. The monitoring unit is used to monitor and determine whether the heating module is in a normal working state based on the working current of the heating module; when the heating module is in an abnormal working state, the monitoring unit sends a first control signal to the alarm unit to drive the alarm unit to start working; when the heating module is in a normal working state, the monitoring unit sends a second control signal to the alarm unit to drive the alarm unit to stop working. The utility model can provide a preheating water tank without changing the existing preheating water tank structure, which can monitor in real time whether the corresponding heating pipe has a fault, and provide timely feedback to the user after monitoring.

[0082] Second, please refer to Fig.10 The utility model also provides a preheating water tank system 400, which includes a power supply device 105 and the preheating water tank device 100 of any one of the first aspects mentioned above, and the power supply device 105 is connected to the preheating water tank device 100 to supply power to the preheating water tank device 100.

[0083] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A preheating water tank device, characterized in that: The preheating water tank device comprises a heating module and a monitoring module, wherein the monitoring module comprises a monitoring unit and an alarm unit; the monitoring unit is connected to the heating module and the alarm unit respectively; the heating module, the alarm unit and the monitoring unit are also connected to a power supply device respectively; The monitoring unit is used to monitor and determine whether the heating module is in a normal working state according to the working current of the heating module; When the heating module is in an abnormal working state, the monitoring unit sends a first control signal to the alarm unit to drive the alarm unit to start working; When the heating module is in a normal working state, the monitoring unit sends a second control signal to the alarm unit to drive the alarm unit to stop working; When the heating module includes a plurality of heating resistors connected in parallel, the monitoring module includes a plurality of monitoring units and a plurality of alarm units, and the heating resistors, the monitoring units and the alarm units all correspond to each other one by one; The monitoring unit includes a current sensing switch, and the current sensing switch includes an induction coil and an induction switch; the induction coil is sleeved on the heating resistor, and the induction switch is connected to the alarm unit; Wherein, when the heating module is in a normal working state, the induction coil generates an induced current; the induction switch is disconnected, and the alarm unit does not work; when the heating module is not working properly, the induction coil does not generate an induced current; the induction switch is closed, and the alarm unit works; The current sensing switch is a normally closed current sensing switch.

2. The preheating water tank device according to claim 1, characterized in that: The monitoring module also includes a control unit; the control unit is connected to the monitoring unit and the alarm unit respectively; the control unit is also connected to a power supply device; The monitoring unit is used to monitor the working current of the heating module; The control unit is used to send a control signal to the alarm unit according to the working current to switch the working state of the alarm unit; When the heating module does not work normally, the control unit sends a first control signal to the alarm unit to drive the alarm unit to start working; When the heating module works normally, the control unit sends a second control signal to the alarm unit to drive the alarm unit to stop working.

3. The preheating water tank device according to claim 2, characterized in that: The preheating water tank device further comprises a first switch unit, which is connected to the control unit and the alarm unit respectively; The control unit is used to send a control signal to the first switch unit according to the working current to switch the working state of the alarm unit; When the heating module is in an abnormal working state, the control unit sends a first control signal to the first switch unit, the first switch unit is closed, and the alarm unit works; When the heating module is in a normal working state, the control unit sends a second control signal to the first switch unit, the first switch unit is disconnected, and the alarm unit does not work.

4. The preheating water tank device according to claim 1, characterized in that: The alarm unit includes an audible and visual alarm.

5. The preheating water tank device according to claim 1, characterized in that: The monitoring module further includes a temperature detection unit, a temperature control unit and an adjustment unit, wherein the temperature control unit is connected to the temperature detection unit and the adjustment unit; the temperature detection unit is arranged on the heating module to monitor the real-time temperature of the heating module; the adjustment unit is also connected to the temperature detection unit; wherein the adjustment unit includes multiple working states; The temperature control unit is used to switch the working state of the regulating unit according to the real-time temperature to adjust the power of the heating module.

6. The preheating water tank device according to claim 5, characterized in that: The preheating water tank device further comprises a display module, and the display module is connected to the temperature control unit; The display module is used to display the power and real-time temperature of the heating module.

7. A preheating water tank system, characterized in that: The preheating water tank system comprises a power supply device and the preheating water tank device according to any one of claims 1 to 6, wherein the power supply device is connected to the preheating water tank device to supply power to the preheating water tank device.

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