APCVD back sealing furnace cavity cleaning device
By designing an APCVD back seal furnace cavity cleaning device including an environmental purification unit, a clamping mechanism and a cleaning unit, the problems of incomplete cavity cleaning and dust diffusion in the prior art are solved, and a more efficient and safer cavity cleaning effect is achieved.
Patent Information
- Application Number
- CN202420395956.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-01
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-03-01
AI Technical Summary
The existing APCVD back seal furnace cavity cleaning method cannot thoroughly clean the cavity of complex structures, and SiO2 dust is prone to spread during the cleaning process, contaminating the clean room environment.
An APCVD back seal furnace cavity cleaning device including a main body part, an environmental purification unit, a clamping mechanism and a cleaning unit is designed. The environmental purification unit ensures the cleanliness of the environment during cleaning through the FFU ventilation system and exhaust mechanism. The clamping mechanism uses a steel cable system that combines the motor and the rope-receiving plate for precise clamping. The cleaning unit consists of a purge gun, a deformable brush and a vacuum cleaner, and works together for thorough cleaning.
This device not only improves the removal rate of SiO2 dust in the cavity, prevents the diffusion of dust, maintains the clean environment of the clean room, and makes the fixing and movement of the cavity more convenient through the design of the clamping mechanism, and improves the safety and efficiency of the cleaning process.
Smart Images
Figure CN222902101U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of APCVD back-sealing furnaces, and specifically, to a cleaning device for an APCVD back-sealing furnace cavity. Background Art
[0002] Silicon-based semiconductor materials are the core for manufacturing semiconductor components and also the basis for the chip and electronic device manufacturing industries. With the rapid development of high surface quality of semiconductors, higher requirements are also put forward for the operation and maintenance of equipment. Therefore, more effective cleaning and maintenance of equipment is an important way to improve production efficiency and the surface quality of silicon wafers.
[0003] The backside treatment of semiconductor silicon wafers usually requires the method of Chemical Vapor Deposition (CVD) to grow a low-temperature oxide film (LTO) at its preparation points to achieve the functions of gettering and suppressing autodoping. This process needs to be realized through an APCVD back-sealing furnace. During the deposition process, the silicon wafer is first conveyed to the reaction chamber by a track. The reaction gas (silane and oxygen) in the reaction chamber is sprayed on the backside of the silicon wafer and reacts to generate a SiO2 thin film. The remaining reaction gas will inevitably form SiO2 dust on the track and inside the cavity. Under high-temperature operating conditions, the SiO2 dust will adhere to the inner wall of the cavity and accumulate. As the thickness of the SiO2 dust increases, it will affect the discharge of SiO2 dust in the reaction chamber. During continuous processing, the SiO2 dust in the cavity may fall on the silicon wafer to form back-sealing particles, resulting in the production of defective products. Therefore, effective cleaning of the cavity is crucial.
[0004] The current cleaning method is usually to directly place the cavity on a fixed bracket in the back chamber for cleaning after removing it from the equipment, use a bar-shaped tool to scrape off the SiO2 dust, and at the same time use a vacuum cleaner for dust suction. This method has great drawbacks. First, due to the complex pipeline structure inside the cavity, thorough cleaning cannot be carried out. Second, during the cleaning process, the SiO2 powder will scatter to the ground or adhere to the surface of the operator's cleanroom clothing, resulting in the deterioration of the cleanroom environment. To solve the above problems, the utility model provides a cleaning device for an APCVD back-sealing furnace cavity. This device is not only easy to operate, but also can prevent the diffusion of SiO2 dust during cavity cleaning while improving the removal rate of SiO2 dust in the cavity. Summary of the Utility Model
[0005] The purpose of the present utility model is to provide a cleaning device for the APCVD back-sealed furnace cavity, so as to solve the problems in the above-mentioned background technology. The current cleaning method usually involves removing the cavity and directly placing it on a fixed bracket in the back chamber for cleaning. A bar-shaped tool is used to scrape off the SiO2 dust, and at the same time, a vacuum cleaner is used for dust suction. This method has significant drawbacks. Firstly, due to the complex internal pipeline structure of the cavity, thorough cleaning cannot be achieved. Secondly, during the cleaning process, SiO2 powder will scatter onto the ground or adhere to the surface of the operator's cleanroom clothing, resulting in the deterioration of the cleanroom environment.
[0006] To achieve the above purpose, the present utility model provides a cleaning device for the APCVD back-sealed furnace cavity, which includes a main body part, an environmental purification unit, a clamping mechanism, and a cleaning unit. The main body part includes a box body and a box body frame. A stainless-steel perforated plate is installed in the middle of the interior of the box body. The clamping mechanism is installed at the top inside the box body. The environmental purification unit includes an air shower mechanism at the top and an exhaust mechanism at the bottom. The cleaning unit includes a blow gun, a deformable brush, and a vacuum suction pipe.
[0007] Preferably, the box body is a glove box structure. A glove port is provided on the front of the box body above the stainless-steel perforated plate, and the periphery of the box body is made of transparent PVC plates.
[0008] Preferably, the air shower mechanism is an FFU ventilation system with an air volume of 500 - 1000m 3 / h. The exhaust mechanism includes an exhaust fan and a dust collection bin. An air outlet is provided on the outer wall of the dust collection bin, and a dust filter net is installed at the air outlet. The air volume of the exhaust mechanism is 1500 - 2500m3 / h.
[0009] Preferably, the clamping mechanism includes clamping jaws. A steel cable is connected to the top of the clamping jaws. The top end of the steel cable is installed with a lifting bin. A motor is installed inside the lifting bin. A rope winding disc is installed on the output shaft of the motor. The steel cable is wound around the rope winding disc. A linear slide is installed at the top of the lifting bin. The output end of the linear slide drives the lifting bin to move horizontally. A pneumatic rod is installed at the clamping end of the clamping jaws, and the pneumatic rod performs a piston movement driven by a cylinder.
[0010] Preferably, operation buttons and pipe orifices are provided on the outer wall of the box body. The ends of the blow gun, the deformable brush, and the vacuum suction pipe extend into the interior of the box body from the pipe orifices.
[0011] Preferably, the deformable brush includes a bendable iron wire, and a number of brush hair structures are installed on the outer wall of the iron wire. The outer end of the vacuum suction pipe is connected to a vacuum cleaner.
[0012] Preferably, a number of fan-shaped dust baffle plates are provided inside the pipe orifices, and the dust baffle plates are made of silicone materials.
[0013] Preferably, a lighting device is installed on the upper part of the box body.
[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0015] In this APCVD back-sealed furnace cavity cleaning device, by setting an environmental purification unit, including an air shower mechanism and an exhaust mechanism, the environmental cleanliness during the cleaning process is ensured. The air shower mechanism adopts an FFU ventilation system, and the large-air-volume design can quickly take away the dust generated during the cleaning process, preventing it from staying inside the cleaning device or spreading to the external environment. The exhaust mechanism, through the combination of a suction fan and a dust collection bin, centrally processes the air containing dust, further ensuring the cleanliness of the air inside the cleaning device.
[0016] Secondly, the design of the clamping mechanism makes the fixing and moving of the cavity more convenient. Through the cooperation of the motor and the rope winding disc, the steel cable can be wound and unwound, thereby controlling the lifting of the clamping jaw. The linear slide table is responsible for driving the lifting bin to move horizontally, enabling the clamping jaw to accurately reach various positions of the cavity. The design of the pneumatic rod ensures the stable clamping of the cavity by the clamping jaw, improving the safety during the cleaning process.
[0017] In addition, the combined use of the cleaning units makes the cleaning of the cavity more thorough. The blowing gun can blow away the dust attached to the inner wall of the cavity, the deformable brush can brush into various corners of the cavity, and the vacuum suction pipe is responsible for timely collecting the cleaned dust. The three work together, greatly improving the cleanliness of the cavity. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 is a schematic diagram of the overall structure of the present utility model;
[0019] Figure 2 is a schematic diagram of the structure of the clamping mechanism in the present utility model;
[0020] Figure 3 is a schematic diagram of the structure of the stainless steel perforated plate in the present utility model;
[0021] Figure 4 is a schematic diagram of the structure of the cleaning unit in the present utility model.
[0022] The meanings of each label in the figure are as follows:
[0023] 1. Lighting device; 2. Box body frame; 3. Box body; 31. Stainless steel perforated plate; 4. Transparent PVC plate; 5. Air shower mechanism; 6. Clamping mechanism; 61. Clamping jaw; 62. Steel cable; 63. Lifting bin; 64. Linear slide table; 65. Pneumatic rod; 7. Operation button; 8. Pipe orifice; 9. Exhaust mechanism; 10. Blowing gun; 11. Deformable brush; 12. Vacuum suction pipe. Detailed implementation mode
[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0025] The present invention provides an APCVD back-sealing furnace cavity cleaning device, as Figures 1-4 shown, including a main body part, an environmental purification unit, a clamping mechanism 6 and a cleaning unit. The main body part includes a box body 3 and a box body frame 2. A stainless steel perforated plate 31 is installed in the middle of the interior of the box body 3. The clamping mechanism 6 is installed at the top inside the box body 3 for clamping operations. The environmental purification unit includes an air shower mechanism 5 at the top and an exhaust air mechanism 9 at the bottom. The cleaning unit includes a blow gun 10, a deformable brush 11 and a vacuum suction pipe 12 to ensure comprehensive cleaning operations.
[0026] In this embodiment, the box body 3 is a glove box structure. A glove port is provided on the front of the box body 3 above the stainless steel perforated plate 31. The periphery of the box body 3 is a transparent PVC plate 4, which is convenient for external observation. The transparent PVC plate 4 is fixedly connected by bolts and can be disassembled and installed at any time.
[0027] Specifically, the air shower mechanism 5 is an FFU ventilation system with an air volume of 500 - 1000m 3 / h. The exhaust air mechanism 9 includes an exhaust fan and a dust collection bin. An air outlet is provided on the outer wall of the dust collection bin, and a dust filter net is installed at the air outlet. The air volume of the exhaust air mechanism 9 is 1500 - 2500m3 / h.
[0028] Furthermore, the clamping mechanism 6 includes a clamping jaw 61. A steel cable 62 is connected to the top of the clamping jaw 61. The top end of the steel cable 62 is installed with a lifting bin 63. A motor is installed in the lifting bin 63. A rope winding disc is installed on the output shaft of the motor. The steel cable 62 is wound around the rope winding disc. A linear slide 64 is installed at the top of the lifting bin 63. The output end of the linear slide 64 drives the lifting bin 63 to move horizontally. A pneumatic rod 65 is installed at the clamping end of the clamping jaw 61. The pneumatic rod 65 performs piston movement through a cylinder drive, which is convenient for the overall flexible clamping and movement operations of the clamping mechanism 6.
[0029] Furthermore, operation buttons 7 and pipe orifices 8 are provided on the outer wall of the box body 3. The ends of the blow gun 10, the deformable brush 11 and the vacuum suction pipe 12 extend into the interior of the box body 3 from the pipe orifices 8, which is convenient for internal cleaning.
[0030] Further, the deformable brush 11 includes a bendable iron wire, and a plurality of brush structures are installed on the outer wall of the iron wire for scrubbing the inner wall. The outer end of the vacuum suction pipe 12 is connected to a vacuum cleaner for performing a suction operation.
[0031] Further, a plurality of fan-shaped dust shields are arranged inside the pipe orifice 8. The dust shields are made of silica gel material for dust blocking.
[0032] Further, a lighting device 1 is installed on the upper part of the box body 3. The lighting device 1 is an LED lighting strip for providing lighting for equipment cleaning.
[0033] When the APCVD back-sealing furnace cavity cleaning device of the present utility model is in use, first, the cavity to be cleaned is placed inside the box body 3. The lifting bin 63 is driven by the linear slide 64 to move horizontally so that the clamping jaws 61 are aligned with the appropriate position of the cavity. Then, the motor drives the cable reel to rotate to release or tighten the steel cable 62, thereby controlling the lifting of the clamping jaws 61. When the clamping jaws 61 reach the appropriate height, the pneumatic rod 65 performs a piston movement under the drive of the cylinder to achieve stable clamping of the cavity. The operator puts his hand into the box body 3 from the glove opening and uses the deformable brush 11 and the purging gun 10 to clean the back-sealing furnace cavity. During the cleaning process, the air shower mechanism 5, that is, the FFU ventilation system, is started. This system blows clean air into the box body 3 at a wind volume of 500 - 1000 m3 / h. The SiO2 dust generated during the left-right and up-down movement of the clamping mechanism 6 is blown down by the wind generated by the top air shower mechanism 5, falls into the lower area through the holes of the stainless steel perforated plate 31, and is sucked out by the bottom exhaust system 9. The air containing dust is sucked into the dust collection bin by the exhaust fan, filtered by the filter screen, and then discharged to maintain a negative pressure state inside the box body 3 to prevent dust leakage. The SiO2 dust remaining on the perforated plate and the back-sealing furnace cavity is sucked out by the vacuum suction pipe 12. The vacuum suction pipe 12 and the purging gun 10 extend through the reserved hole 8. The purging gun 10 first blows away the loose dust attached to the inner wall of the cavity. The deformable brush 11 penetrates into every corner of the cavity through its bendable iron wire and brush structure to thoroughly clean the attached dust. At the same time, the vacuum suction pipe 12, driven by the vacuum cleaner, extends into the box body 3 through the pipe orifice 8 to suck away the dust scrubbed off in real time, ensuring the efficiency and thoroughness of the cleaning process. During the entire cleaning process, the operator can observe the cleaning situation through the transparent PVC board 4 around the box body 3 and adjust the working states of the clamping mechanism 6, the air shower mechanism 5, and the cleaning unit as needed to achieve the best cleaning effect. When the inside of the cavity is thoroughly cleaned, the clamping mechanism 6 releases the cavity, the air shower mechanism 5 and the exhaust mechanism 9 stop working, and the cleaning unit withdraws from the inside of the box body 3. At this time, the door of the box body 3 can be opened to take out the cleaned cavity for inspection and subsequent use.
[0034] Finally, it should be noted that for the exhaust mechanism 9, the purging gun 10, etc. in this embodiment, the electronic components in the above components are all general standard components or components known to those skilled in the art. Their structures and principles can be learned by those skilled in the art through technical manuals or through conventional experimental methods. At the idle place of this device, all the above electrical components are respectively connected by wires. The specific connection means should refer to the sequence of operations of each electrical component in the above working principle to complete the electrical connection, which are all well-known technologies in the art.
[0035] The foregoing has shown and described the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.
Claims
1. An APCVD back-sealed furnace chamber cleaning device, characterized in that: The invention comprises a main body, an environment purification unit, a clamping mechanism (6) and a cleaning unit. The main body comprises a box (3) and a box frame (2). A stainless steel orifice plate (31) is installed in the middle of the box (3). The clamping mechanism (6) is installed at the top of the box (3). The environment purification unit comprises an air shower mechanism (5) arranged at the top and an exhaust mechanism (9) at the bottom. The cleaning unit comprises a purge gun (10), a deformable brush (11) and a vacuum suction pipe (12).
2. The APCVD back-sealed furnace chamber cleaning device according to claim 1 is characterized in that: The box body (3) is a glove box structure, and a glove opening is provided on the front of the box body (3) located on the upper part of the stainless steel perforated plate (31), and the box body (3) is surrounded by transparent PVC plates (4).
3. The APCVD back-sealed furnace chamber cleaning device according to claim 1 is characterized in that: The air shower mechanism (5) is an FFU ventilation system with an air volume of 500-1000m 3 / h, the exhaust mechanism (9) comprises an exhaust fan and a dust collecting bin, the outer wall of the dust collecting bin is provided with an air outlet, a dust filter is installed at the air outlet, and the air volume of the exhaust mechanism (9) is 1500-2500m3 / h.
4. The APCVD back-sealed furnace chamber cleaning device according to claim 1, characterized in that: The clamping mechanism (6) comprises a clamping jaw (61), the top of which is connected to a steel cable (62), a lifting warehouse (63) is installed at the top of the steel cable (62), a motor is installed in the lifting warehouse (63), a rope collecting drum is installed on the output shaft of the motor, the steel cable (62) is wound on the rope collecting drum, a linear slide (64) is installed on the top of the lifting warehouse (63), the output end of the linear slide (64) drives the lifting warehouse (63) to move horizontally, and a pneumatic rod (65) is installed at the clamping end of the clamping jaw (61), and the pneumatic rod (65) is driven by a cylinder to perform piston movement.
5. The APCVD back-sealing furnace chamber cleaning device according to claim 1 is characterized in that: The outer wall of the box body (3) is provided with an operating button (7) and a pipe opening (8), and the ends of the blowing gun (10), the deformable brush (11) and the vacuum suction pipe (12) extend into the interior of the box body (3) through the pipe opening (8).
6. The APCVD back-sealing furnace chamber cleaning device according to claim 5, characterized in that: The deformable brush (11) comprises a bendable iron wire, a plurality of bristle structures are installed on the outer wall of the iron wire, and the outer end of the vacuum suction tube (12) is connected to a vacuum cleaner.
7. The APCVD back-sealing furnace chamber cleaning device according to claim 5, characterized in that: A plurality of fan-shaped dust shields are arranged inside the pipe opening (8), and the dust shields are made of silica gel material.
8. The APCVD back-sealing furnace chamber cleaning device according to claim 1 is characterized in that: A lighting device (1) is installed on the upper part of the box (3).