Double-layer target material preparation auxiliary tool

Abstract

The utility model relates to the technical field of auxiliary tools, in particular to a double-layer target material preparation auxiliary tool which comprises a supporting plate in a semi-arc plate shape, the supporting plate is vertically arranged, and a supporting block used for limiting inclination of the supporting plate is arranged on the side, away from an arc-shaped groove, of the supporting plate. The device has the effects of reducing the error of the swing block and improving the operation efficiency at the same time, is convenient for a worker to carry out follow-up pressing and sheathing, and prevents the situation of sheathing clamping.

Description

Technical Field

[0001] The present application relates to the technical field of auxiliary tools, and in particular to an auxiliary tooling for preparing a double-layer target material. Background Art

[0002] In recent years, coating diversification has gradually become one of the main directions of hard coating development, so there is an urgent need for target diversification. Multi-target materials are usually added with at least one of the main group metals or non-metal elements of ⅢA~ⅣA and the transition metal elements of ⅢB~Ⅷ subgroups to conventional Cr targets, TiAl targets, and CrAl targets.

[0003] As the content of added elements increases, the intrinsic brittleness of the corresponding alloy target material will increase, making the target material prone to fracture and failure at the clamping part when sputtering at higher power or high power density. For this reason, a double-layer target material is specially designed. By equipping the back of the target with a backing plate material with good comprehensive mechanical properties, the target layer and the backing plate are tightly metallurgically bonded through the hot isostatic pressing diffusion sintering process.

[0004] In the preparation process of double-layer target materials, the target layer A and the back plate B need to be stacked and placed, such as ABABAB..., and then put into the package for degassing. There is only a small gap between the diameter of the package and the A and B blocks (usually 1-2mm). At present, the target layer and the back plate blocks are manually operated by personnel to ensure that the AB blocks are aligned and there is no misalignment. Otherwise, when the number of blocks exceeds 20, the cumulative error will increase the misalignment and it may be impossible to put them into the package; at the same time, the current manual block placement method is slow and inefficient. Utility Model Content

[0005] In order to improve operating efficiency while reducing the error of the swing block, the present application provides an auxiliary tooling for preparing a double-layer target material.

[0006] The present application provides a double-layer target material preparation auxiliary tooling adopts the following technical solution:

[0007] A double-layer target material preparation auxiliary tool comprises a semicircular arc-shaped support plate, the support plate is arranged vertically, and a support block for limiting the tilting of the support plate is arranged on the side of the support plate away from the arc groove.

[0008] By adopting the above technical solution, the staff places the tooling at the position where the targets need to be stacked, and then stacks the targets in the arc groove of the support plate, paying attention to ensuring that the targets are in full contact with the surface of the support plate and placing them in the order of ABAB... This not only ensures the alignment and coaxiality between blocks A and B when the double-layer raking blocks are used, but also significantly improves the efficiency of the block swinging, especially when the total number of blocks is ≥20. This makes it easier for the staff to subsequently press the blanks and pack them in sleeves to prevent the sleeves from getting stuck.

[0009] Optionally, a measuring plate is vertically arranged on the side of the support plate, and a plurality of scale lines are arranged on the side of the measuring plate facing away from the support block.

[0010] By adopting the above technical solution, the height of the swing block can be directly read by the measuring plate on the side during the swing block process, which is convenient for the staff to determine the number of swing blocks.

[0011] Optionally, the measuring plate is fixedly connected to the support plate.

[0012] By adopting the above technical solution, the fixed connection between the measuring plate and the support plate is convenient for the stable measurement of the measuring plate.

[0013] Optionally, a side plate is fixedly connected to the side of the support plate, the measuring plate is located on the side of the side plate facing away from the support block, and the measuring plate is detachably connected to the side plate.

[0014] By adopting the above technical solution, it is convenient to replace the measuring plate due to wear or other reasons.

[0015] Optionally, a screw is fixedly connected to the measuring plate, and the screw is detachably passed through the side plate and fixed by a nut.

[0016] By adopting the above technical solution, the screw and the nut are used to fix the measuring plate, and the operation is simple and convenient.

[0017] Optionally, an installation groove is arranged on the side of the side plate facing away from the support block, and the measuring plate is detachably embedded in the installation groove.

[0018] By adopting the above technical solution, it is convenient for the installation and disassembly of the measuring plate.

[0019] Optionally, an anti-slip pad is arranged on the bottom surface of the support block.

[0020] By adopting the above technical solution, the anti-slip effect of the support block is further improved.

[0021] In summary, the present application includes at least one of the following beneficial technical effects:

[0022] 1. The staff places the tooling at the position where the target materials need to be stacked, and then stacks the target materials in the arc-shaped groove of the support plate. Note that the target materials are in full contact with the surface of the support plate and are arranged in the order of ABAB...... This not only ensures the alignment and coaxiality between the A and B blocks during the double-layer swing block, but also significantly improves the swing block efficiency. Especially when the total number of swing blocks ≥ 20, it is convenient for the staff to subsequently press the green body and install the sleeve, preventing the situation of sleeve jamming;

[0023] 2. The height of the swing block can be directly read by the measuring plate on the side during the swing block process, which is convenient for the staff to determine the number of swing blocks;

[0024] 3. The measuring plate is fixedly connected to the supporting plate, which facilitates stable measurement of the measuring plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of the auxiliary tooling of Example 1 of the present application.

[0026] Figure 2 It is a structural schematic diagram of the auxiliary tooling of Example 2 of the present application.

[0027] Figure 3 yes Figure 2 Enlarged schematic diagram of part A.

[0028] Figure 4 It is a structural schematic diagram of the auxiliary tooling of Example 3 of the present application.

[0029] Explanation of the reference numerals: 1. support plate; 2. support block; 20. anti-slip pad; 3. measuring plate; 30. scale line; 31. screw rod; 32. nut; 4. side plate; 40. mounting groove. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1 -Attached Figure 4 This application is described in further detail.

[0031] The embodiment of the present application discloses an auxiliary tool for preparing a double-layer target material.

[0032] Example 1

[0033] Reference Figure 1 , a double-layer target material preparation auxiliary tooling, including a support plate 1 in the shape of a semicircular arc plate, which can be made of stainless steel, and its semicircular diameter is 210mm, which is used to adapt to the corresponding type of target material. The support plate 1 is arranged vertically, and its arc groove is used to support and align multiple targets. A support block 2 is fixed to the bottom of the support plate 1 on the side away from the arc groove. The support block 2 is used to fix the support plate 1 and also plays a counterweight effect to prevent the support plate 1 from tipping over or shifting.

[0034] Reference Figure 1 A measuring plate 3 is vertically fixed to two vertically arranged sides of the support plate 1 respectively. The two measuring plates 3 are located in the same vertical plane. A plurality of scale lines 30 are vertically and evenly arranged on one side of the measuring plate 3 away from the support block 2 .

[0035] The implementation principle of Example 1 is as follows: the worker places the tooling at the position where the target materials need to be stacked, and then stacks the target materials in the arc groove of the support plate 1, paying attention to making the target materials fully contact with the surface of the support plate 1 and placing them in the order of ABAB... At the same time, after the swing block is completed, the height of the swing block can be directly read from the measuring plates 3 on the left and right sides.

[0036] This auxiliary tooling not only ensures the alignment and coaxiality between blocks A and B during double-layer rake swinging, but also significantly improves the swinging efficiency, especially when the total number of swinging blocks is ≥ 20. This makes it easier for the staff to pack the blanks and prevent the packing from getting stuck.

[0037] Example 2

[0038] Reference Figure 2 and Figure 3 The difference between this embodiment and the first embodiment is that the vertical side of the support plate 1 in this embodiment is vertically fixed with a side plate 4, and the two side plates 4 are located in the same vertical plane. The measuring plate 3 is located on the side of the side plate 4 away from the supporting block 2, and a plurality of screws 31 are fixed on the measuring plate 3. The screws 31 are removable and pass through the side plate 4 and are fixed by a nut 32. The anti-skid pad 20 is fixed to the bottom of the supporting block 2 and the side plate 4.

[0039] The implementation principle of Example 2 is: if the measuring plate 3 is bumped or the scale is unclear after long-term use, the measuring plate 3 can be replaced in time, and the convenience of installation or disassembly is effectively improved by the coordinated use of the screw 31 and the nut 32; the setting of the anti-slip pad 20 significantly improves the anti-slip performance of the tooling.

[0040] Example 3

[0041] Reference Figure 4 The difference between this embodiment and embodiment 2 is that in this embodiment, a mounting groove 40 is provided on the side of the side plate 4 facing away from the support block 2 , and the measuring plate 3 is detachably embedded in the mounting groove 40 .

[0042] The implementation principle of Example 3 is: when the measuring board 3 needs to be replaced, the measuring board 3 is removed from the installation slot 40, and then a new measuring board 3 is installed in the installation slot 40. The operation process is simple and convenient.

[0043] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A double-layer target material preparation auxiliary tooling, characterized in that: It comprises a support plate (1) in the shape of a semicircular arc plate, the support plate (1) being arranged vertically, and a support block (2) for limiting the tilting of the support plate (1) being arranged on a side of the support plate (1) away from the arc groove.

2. The double-layer target material preparation auxiliary tooling according to claim 1, characterized in that: A measuring plate (3) is vertically arranged on the side of the support plate (1), and a plurality of scale lines (30) are arranged on the side of the measuring plate (3) facing away from the support block (2).

3. The auxiliary tooling for preparing a double-layer target material according to claim 2, characterized in that: The measuring plate (3) is fixedly connected to the supporting plate (1).

4. The auxiliary tooling for preparing a double-layer target material according to claim 2, characterized in that: The side edge of the support plate (1) is fixedly connected to a side plate (4), the measuring plate (3) is located on the side of the side plate (4) away from the support block (2), and the measuring plate (3) and the side plate (4) are detachably connected.

5. The auxiliary tooling for preparing double-layer target material according to claim 4, characterized in that: A screw rod (31) is fixedly connected to the measuring plate (3), and the screw rod (31) is detachably inserted into the side plate (4) and fixed by a nut (32).

6. The auxiliary tooling for preparing a double-layer target material according to claim 4, characterized in that: A mounting groove (40) is provided on the side of the side plate (4) facing away from the support block (2), and the measuring plate (3) is detachably embedded in the mounting groove (40).

7. A double-layer target material preparation auxiliary tooling according to any one of claims 1 to 6, characterized in that: The bottom surface of the support block (2) is provided with an anti-slip pad (20).

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