Basket pressing prevention protection manipulator of silicon wafer degumming machine

Abstract

The utility model discloses a basket pressing prevention protection manipulator of a silicon wafer degumming machine, which belongs to the technical field of silicon wafer degumming, and comprises a first limiting plate for basket pressing prevention protection of the silicon wafer degumming machine and a mechanical gripper used as the basket pressing prevention protection manipulator of the silicon wafer degumming machine, according to the device, a second telescopic rod is started to drive a second limiting plate to move, when a material basket is fixed, a movable plate is pressed, a reset spring is driven to be pressed, the material basket is fixed, the material basket is fixed, and therefore the material basket is fixed. And an inductor is driven to move, the periphery of the material basket is fixed, a fifth telescopic rod is started to drive a third limiting plate to move, then a fourth telescopic rod is started to drive a first moving block to move, and the inner side of the material basket is fixed and protected through the third limiting plate.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer degumming, in particular to an anti-pressure basket protection manipulator for a silicon wafer degumming machine. Background Art

[0002] Silicon wafers are the base material for the manufacture of crystalline silicon solar cells, and the cleaning of silicon wafers is an extremely important link in the entire silicon wafer manufacturing process. If the base is not cleaned properly, it will be difficult to control the subsequent process steps to obtain high-quality crystalline silicon solar cell wafers.

[0003] The current anti-pressure basket protection robot of the sheet degumming machine may have baskets of different specifications when working, and it needs to be manually adjusted according to the size, which consumes too much time and manpower.

[0004] For example, in the prior art Chinese patent document (application announcement number CN202555574U), a silicon wafer degumming machine and its anti-pressure basket protection manipulator are provided with a silicon wafer degumming machine anti-pressure basket protection manipulator having the above structure, which ensures the working stability of the basket and the manipulator. The prior art has the following problem: when working, there may be baskets of different specifications, which need to be manually adjusted according to the size, which consumes too much time and manpower.

[0005] Therefore, in view of this situation, it is urgent to design and produce a silicon wafer degumming machine anti-pressure basket protection manipulator to meet the needs of actual use. Utility Model Content

[0006] The utility model aims to provide a pressure-proof basket protection manipulator for a silicon wafer degumming machine to solve the problems raised in the background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a silicon wafer degumming machine anti-pressure basket protection robot, comprising a first limit plate for protecting the silicon wafer degumming machine anti-pressure basket and a mechanical gripper used as the silicon wafer degumming machine anti-pressure basket protection robot, the first limit plate is slidably connected to a movable plate inside, a side of the movable plate close to the first limit plate is fixedly connected to a reset spring, a sensor is installed inside the first limit plate, a side edge of the first limit plate is fixedly connected to a fourth telescopic rod, an extended end of the fourth telescopic rod is fixedly connected to a first movable block slidably connected to the first limit plate, and a fifth telescopic rod is embedded in the side edge of the first movable block.

[0008] Preferably, the extended end of the fifth telescopic rod is fixedly connected to a third limit plate slidably connected to the first moving block, and the upper side of the first limit plate is fixedly connected to a first fixed plate.

[0009] Preferably, a second limiting plate is slidably connected to a side edge of the first fixing plate, and a first telescopic rod is installed on an upper side of the first fixing plate.

[0010] Preferably, a second telescopic rod fixed to the second limiting plate is fixedly connected to the side of the first limiting plate, and a first sliding plate is fixedly connected to the side of the first limiting plate.

[0011] Preferably, a third telescopic rod is fixedly connected to the side of the first limiting plate, and an extended end of the third telescopic rod is fixedly connected to a moving frame slidably connected to the first sliding plate.

[0012] Preferably, a sixth telescopic rod is fixedly connected to the lower side of the moving frame, and the extended end of the sixth telescopic rod is fixedly connected to the second moving block.

[0013] Preferably, a first motor is installed on the upper side of the second moving block, and a rotating rod is fixedly connected to the output end of the first motor.

[0014] Compared with the prior art, the technical effects and advantages of the utility model are as follows:

[0015] The anti-pressure basket protection robot of the silicon wafer degumming machine drives the second limit plate to move by starting the second telescopic rod. When the material basket is fixed, the moving plate is compressed, driving the reset spring to be compressed, driving the sensor to move, and fixing the four sides of the material basket. The fifth telescopic rod is started to drive the third limit plate to move, and then the fourth telescopic rod is started to drive the first moving block to move. The inner side of the material basket is fixed and protected by the third limit plate, and no manual adjustment is required, thereby speeding up work efficiency and reducing manpower consumption.

[0016] The anti-pressure basket protection manipulator of the silicon wafer degumming machine drives the moving frame to move through the third telescopic rod, and simultaneously starts the first motor to drive the rotating rod to rotate, so as to realize all-round grasping of the materials in the basket. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a structural schematic diagram of the utility model;

[0019] Figure 2 This is a structural schematic diagram of the first moving block of the utility model;

[0020] Figure 3 This is a schematic diagram of the structure of the first limiting plate of the utility model;

[0021] Figure 4 It is a structural schematic diagram of the mobile frame of the utility model.

[0022] Description of reference numerals:

[0023] In the figure: 1. first telescopic rod; 2. first fixed plate; 3. first limit plate; 4. second limit plate; 5. moving plate; 6. reset spring; 7. sensor; 8. second telescopic rod; 9. third telescopic rod; 10. moving frame; 11. first sliding plate; 12. fourth telescopic rod; 13. first moving block; 14. fifth telescopic rod; 15. third limit plate; 16. sixth telescopic rod; 17. first motor; 18. second moving block; 19. rotating rod; 20. mechanical gripper. DETAILED DESCRIPTION

[0024] In the following description, a large number of specific details are given to provide a more thorough understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without one or more of these details. In other examples, in order to avoid confusion with the utility model, some technical features known in the art are not described.

[0025] Unless otherwise defined, the directions of up, down, left, right, front, back, inside and outside involved in this document are based on the directions of up, down, left, right, front, back, inside and outside in the figures shown in the present utility model, and are explained here together.

[0026] The connection method can be bonding, welding, bolt connection, etc., depending on actual needs.

[0027] In order to solve the problem that there may be different specifications of baskets during work, which need to be adjusted manually according to the size, consuming too much time and manpower, such as Figures 1 to 4The silicon wafer degumming machine anti-pressure basket protection manipulator shown in the figure includes a first limit plate 3 for protecting the silicon wafer degumming machine anti-pressure basket and a mechanical gripper 20 used as a silicon wafer degumming machine anti-pressure basket protection manipulator. The mechanical gripper 20 can be controlled by remote control. The first limit plate 3 is provided with a groove to facilitate sliding connection with the first moving block 13. The second limit plate 4 is provided with a slider. The first fixed plate 2 is provided with a cross-shaped slide groove. Two first limit plates 3 and second limit plates 4 are provided on the lower side of the first fixed plate 2 to facilitate sliding connection with the first fixed plate 2. A rubber sheet is provided at the sliding position of the first limit plate 3 and the moving plate 5 to provide friction for the sliding of the moving plate 5. The internal sliding connection of the first limit plate 3 There is a movable plate 5, a side of the movable plate 5 close to the first limit plate 3 is fixedly connected with a return spring 6, a sensor 7 is installed inside the first limit plate 3, a side of the first limit plate 3 is fixedly connected with a fourth telescopic rod 12, an extended end of the fourth telescopic rod 12 is fixedly connected with a first movable block 13 slidably connected to the first limit plate 3, a side of the first movable block 13 is embedded with a fifth telescopic rod 14, an extended end of the fifth telescopic rod 14 is fixedly connected with a third limit plate 15 slidably connected to the first movable block 13, a side of the third limit plate 15 is provided with a slider, the third limit plate 15 is provided with a movable plate 5, a return spring 6 and a sensor 7 of the same specifications, and the upper side of the first limit plate 3 is fixedly connected with the first fixed plate 2.

[0028] The side of the first fixed plate 2 is slidably connected with the second limiting plate 4, and the first limiting plate 3 and the second limiting plate 4 are provided with a fourth telescopic rod 12, a first moving block 13, a fifth telescopic rod 14 and a third limiting plate 15. The first telescopic rod 1 is installed on the upper side of the first fixed plate 2, and the side of the first limiting plate 3 is fixedly connected with the second telescopic rod 8 fixed to the second limiting plate 4, and the side of the first limiting plate 3 is fixedly connected with the first sliding plate 11, and the first sliding plate 11 is slidably connected to the second limiting plate 4, and the side of the first limiting plate 3 is fixedly connected with the third telescopic rod 9, and the extended end of the third telescopic rod 9 is fixedly connected with a moving frame 10 slidably connected with the first sliding plate 11, and the lower side of the moving frame 10 is fixedly connected with the sixth telescopic rod 16, and the extended end of the sixth telescopic rod 16 is fixedly connected with the second moving block 18, and the upper side of the second moving block 18 is installed with a first motor 17, and the output end of the first motor 17 is fixedly connected with a rotating rod 19.

[0029] All structures and instruments are heat-resistant and waterproof.

[0030] The first telescopic rod 1, the second telescopic rod 8, the third telescopic rod 9, the fourth telescopic rod 12, the fifth telescopic rod 14, the sixth telescopic rod 16, the first motor 17 and the mechanical gripper 20 are all conventional instruments. The working principle, size and model are irrelevant to the function of the present application, so they are not described in detail. They are all controlled by a remote control switch. The control circuit of the controller can be realized by simple programming by technicians in this field. The provision of power is also common knowledge in this field. The present utility model is mainly used to protect mechanical devices, so the present utility model will no longer explain the control method and circuit connection in detail.

[0031] How it works

[0032] The silicon wafer degumming machine anti-pressure basket protection manipulator, during use, starts the second telescopic rod 8 to drive the second limit plate 4 to move, fix the material basket, and at the same time the moving plate 5 is pressed, and the pressure of the moving plate 5 drives the reset spring 6 to be compressed. At the same time, it drives the sensor 7 to move, and at the same time starts the fourth telescopic rod 12 to drive the first moving block 13 to move, and at the same time starts the fifth telescopic rod 14 to drive the third limit plate 15 to move, fix the material basket, and can protect the material basket during work, start the third telescopic rod 9 to drive the moving frame 10 to move, start the sixth telescopic rod 16 to drive the second moving block 2 to move, and then start the first motor 17 to drive the rotating rod 19 and the mechanical gripper 20 to rotate to grab the material.

[0033] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0034] Secondly: In the drawings of the embodiments disclosed in the present utility model, only the structures related to the embodiments disclosed in the present utility model are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present utility model can be combined with each other;

[0035] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A silicon wafer degumming machine anti-pressure basket protection manipulator, comprising a first limit plate (3) for protecting the silicon wafer degumming machine anti-pressure basket and a mechanical gripper (20) used as the silicon wafer degumming machine anti-pressure basket protection manipulator, characterized in that: The first limit plate (3) is internally slidably connected to a movable plate (5), a side of the movable plate (5) close to the first limit plate (3) is fixedly connected to a return spring (6), a sensor (7) is installed inside the first limit plate (3), a side edge of the first limit plate (3) is fixedly connected to a fourth telescopic rod (12), an extended end of the fourth telescopic rod (12) is fixedly connected to a first movable block (13) slidably connected to the first limit plate (3), and a fifth telescopic rod (14) is embedded in the side edge of the first movable block (13).

2. The anti-pressure basket protection manipulator of a silicon wafer degumming machine according to claim 1, characterized in that: The extended end of the fifth telescopic rod (14) is fixedly connected to a third limit plate (15) slidably connected to the first moving block (13), and the upper side of the first limit plate (3) is fixedly connected to a first fixed plate (2).

3. The anti-pressure basket protection manipulator of a silicon wafer degumming machine according to claim 2 is characterized in that: The side edge of the first fixing plate (2) is slidably connected to a second limiting plate (4), and the upper side of the first fixing plate (2) is mounted with a first telescopic rod (1).

4. The anti-pressure basket protection manipulator of a silicon wafer degumming machine according to claim 3 is characterized in that: The side edge of the first limiting plate (3) is fixedly connected to a second telescopic rod (8) fixed to the second limiting plate (4), and the side edge of the first limiting plate (3) is fixedly connected to a first sliding plate (11).

5. The anti-pressure basket protection manipulator of a silicon wafer degumming machine according to claim 4, characterized in that: A third telescopic rod (9) is fixedly connected to the side of the first limiting plate (3), and an extended end of the third telescopic rod (9) is fixedly connected to a moving frame (10) slidably connected to the first sliding plate (11).

6. The anti-pressure basket protection manipulator of the silicon wafer degumming machine according to claim 5 is characterized in that: A sixth telescopic rod (16) is fixedly connected to the lower side of the moving frame (10), and a second moving block (18) is fixedly connected to the extended end of the sixth telescopic rod (16).

7. The anti-pressure basket protection manipulator of the silicon wafer degumming machine according to claim 6 is characterized by: A first motor (17) is installed on the upper side of the second moving block (18), and a rotating rod (19) is fixedly connected to the output end of the first motor (17).

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