Automatic sample anti-oxidation device
By designing an automatic sample anti-oxidation device in a fully automated device for ion thinning, argon gas inflow is automatically controlled by argon gas pipeline and humidity sensor, combined with the automatic opening and closing function of the top cover plate, the problem of oxidation during storage is solved, and the sample quality stability and argon gas saving is achieved.
Patent Information
- Application Number
- CN202421854969.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-02
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-08-02
AI Technical Summary
In a fully automated device for ion thinning, the sample is oxidized due to differences in environmental humidity during storage, resulting in poor quality of the sample thin area, and existing devices lack means to inhibit oxidation.
An automatic sample anti-oxidation device is designed, using argon gas pipeline and humidity sensor to automatically control the inflow of argon gas according to the ambient humidity, and combined with the automatic opening and closing function of the top cover plate to prevent sample oxidation.
It effectively prevents oxidation of the sample during storage, ensures the stability of the thin area of the sample, and automatically adjusts the argon channel when humidity changes, saving argon.
Smart Images
Figure CN222906416U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of ion thinning, in particular to an automatic sample anti-oxidation device. Background Art
[0002] In a fully automated device for ion thinning, the sample storage area can generally store multiple fixtures for loading samples, so that the robotic arm can take turns to grab and thin them. However, in actual use, due to differences in humidity in the use environment, sometimes the sample oxidizes during storage, resulting in poor quality of the sample thin area. Currently, there is no means to inhibit oxidation in the sample storage area of the fully automated device for ion thinning, so it is necessary to design an automatic sample anti-oxidation device to solve this problem. Utility Model Content
[0003] The purpose of the utility model is to provide an automatic sample anti-oxidation device to solve the problem mentioned in the background technology that due to the difference in humidity in the use environment, sometimes the sample is oxidized during storage, resulting in poor quality of the sample thin area. At present, there is no means to inhibit oxidation in the sample storage area of the fully automated ion thinning device.
[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0005] An automatic sample anti-oxidation device comprises a shell, which is fixedly connected to the top of a base plate through a limiting groove, the top of the shell is fixedly connected to a top cover plate, the top cover plate is fixedly connected to a push rod through an L-shaped connecting piece, the surface of the base plate is fixedly connected to a push rod body fixing piece, a push rod body is slidably connected in the push rod body fixing piece, the push rod is installed in the push rod body, a closing position sensor and an opening position sensor are respectively fixedly connected to the surface of the base plate, a fixture table is slidably connected in the shell, a fixture hole is opened in the fixture table, an adjusting fixing block is fixedly connected to the top of the base plate, a knob is slidably connected in the adjusting fixing block, and the side end of the knob is fixedly connected to the fixture table.
[0006] As a preferred solution of the utility model, a humidity sensor is installed in the shell, the humidity sensor is arranged on the side of the fixture table, and an argon gas interface is fixedly connected to the side of the shell.
[0007] As a preferred solution of the utility model, two knobs are provided, the two knobs are located opposite to each other, and the sizes of the two knobs are the same.
[0008] As a preferred solution of the utility model, a plurality of the clamp holes are provided, the plurality of the clamp holes are evenly distributed in the clamp table, and the sizes of the plurality of the clamp holes are the same.
[0009] As a preferred solution of the present utility model, the shapes of the closing position sensor and the opening position sensor are both convex, and the positions of the closing position sensor and the opening position sensor are opposite to each other.
[0010] As a preferred solution of the utility model, the top cover plate is in a rectangular shape, the top cover plate is arranged on the side of the L-shaped connecting piece, and the top cover plate is arranged on the top of the bottom plate.
[0011] As a preferred solution of the present invention, the push rod body is in the shape of a cuboid, and the push rod member is made of stainless steel.
[0012] As a preferred solution of the present invention, the shape of the argon gas interface is cylindrical, and the argon gas interface is connected to the shell.
[0013] Compared with the prior art, the beneficial effects of the utility model are:
[0014] 1. In the utility model, a sample fixture storage device with a cover is designed, an argon gas pipeline and a humidity sensor are set, the argon gas flow can be automatically controlled according to the humidity of the environment to protect the sample, and the cover can be automatically closed when the robotic arm is not sampling, effectively preventing the oxidation of the sample during storage.
[0015] 2. In the utility model, by setting a humidity sensor, a closing position sensor, a top cover plate, an opening position sensor, a push rod body, a push rod body fixing part, a fixture table, a fixture hole, a knob, an adjustment fixing block, an argon gas interface, a push rod, and an L-shaped connecting part, when the humidity is greater than the humidity value set by the user, the fully automated ion thinning device opens the argon gas channel to allow argon gas to flow in through the argon gas interface to protect the sample from oxidation; when the humidity is less than the humidity value set by the user, the fully automated ion thinning device closes the argon gas channel to save argon gas. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0017] Figure 2 It is a schematic diagram of the top view structure of the utility model;
[0018] Figure 3 It is a schematic diagram of the structure of the push rod body and the push rod body fixing member of the utility model;
[0019] Figure 4 It is a structural schematic diagram of the fixture table and the adjustment and fixing block of the utility model.
[0020] In the figure: 1. Shell; 2. Humidity sensor; 3. Closed position sensor; 4. Top cover plate; 5. Open position sensor; 6. Push rod body; 7. Push rod body fixing piece; 8. Clamp table; 9. Clamp hole; 10. Knob; 11. Adjustment fixing block; 12. Argon gas interface; 13. Push rod; 14. L-shaped connector; 15. Limiting groove; 16. Bottom plate. DETAILED DESCRIPTION
[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.
[0022] For examples, see Figure 1-4 , the utility model provides a technical solution:
[0023] An automatic sample anti-oxidation device comprises a shell 1, which is fixedly connected to the top of a bottom plate 16 through a limiting groove 15, a top cover plate 4 is fixedly connected to the top of the shell 1, and a push rod 13 is fixedly connected to the top cover plate 4 through an L-shaped connector 14. The push rod 13 can be telescopically slid under the drive of a motor to push the top cover plate 4, a push rod body fixing member 7 is fixedly connected to the surface of the bottom plate 16, one end of the L-shaped connector 14 can be detected by a closing position sensor 3 or an opening position sensor 5, so as to detect the position state of the top cover plate 4, a push rod body 6 is slidably connected in the push rod body fixing member 7, the push rod 13 is installed in the push rod body 6, the surface of the bottom plate 16 is respectively fixedly connected with the closing position sensor 3 and the opening position sensor 5, a fixture table 8 is slidably connected in the shell 1, a fixture hole 9 is opened in the fixture table 8, an adjustment fixing block 11 is fixedly connected to the top of the bottom plate 16, a knob 10 is slidably connected in the adjustment fixing block 11, and the side end of the knob 10 is fixedly connected to the fixture table 8.
[0024] In this embodiment, Figure 1 and Figure 2As shown, a humidity sensor 2 is installed in the shell 1, and the humidity sensor 2 is arranged on the side of the fixture table 8. The humidity sensor 2 can detect the humidity inside the automatic sample anti-oxidation device and send the data to the fully automated device for ion thinning. An argon gas interface 12 is fixedly connected to the side of the shell 1. Two knobs 10 are provided, and the two knobs 10 are relatively positioned. The knobs 10 can adjust the position of the fixture table 8 so that the robot arm of the fully automated device for ion thinning can accurately grab the sample. The two knobs 10 have the same size. A plurality of fixture holes 9 are provided, and the plurality of fixture holes 9 are evenly distributed in the fixture table 8. The function of the fixture holes 9 is to store the fixture containing the sample for automatic storage or use by the robot arm of the fully automated device for ion thinning. The plurality of fixture holes 9 have the same size.
[0025] Among them, an argon gas pipeline and a humidity sensor 2 are set up, which can automatically control the argon gas flow to protect the sample according to the humidity of the environment, and automatically close the cover when the robotic arm is not sampling, effectively preventing the oxidation of the sample during storage.
[0026] In this embodiment, Figure 3 and Figure 4 As shown, the shapes of the closed position sensor 3 and the open position sensor 5 are both convex, and the positions of the closed position sensor 3 and the open position sensor 5 are relative. The shape of the top cover plate 4 is rectangular, and the top cover plate 4 is arranged on the side of the L-shaped connecting piece 14. The top cover plate 4 is arranged on the top of the bottom plate 16. The shape of the push rod body 6 is a rectangular parallelepiped, and the material of the push rod body 6 is stainless steel. The shape of the argon interface 12 is cylindrical. The argon interface 12 can be connected to an external argon source, and argon gas is introduced to protect the sample and inhibit oxidation. The argon interface 12 is connected to the shell 1.
[0027] Among them, when the humidity is greater than the humidity value set by the user, the fully automated ion thinning device opens the argon channel to allow argon to flow in through the argon interface 12 to protect the sample from oxidation; when the humidity is less than the humidity value set by the user, the fully automated ion thinning device closes the argon channel to save argon.
[0028] Workflow of the utility model: When the automatic sample anti-oxidation device designed in this scheme is used, before use, ensure that the automatic sample anti-oxidation device is correctly installed on the required fully automated ion thinning device. Ensure that the signal lines of the humidity sensor 2, the closing position sensor 3 and the opening position sensor 5 are correctly connected to the required fully automated ion thinning device, ensure that the push rod 13 is connected to the motor of the fully automated ion thinning device, and ensure that the argon interface 12 is connected to the argon pipeline of the fully automated ion thinning device, so that they are all controlled by the fully automated ion thinning device. When in use, first put the fixture loaded with the sample to be thinned into all the fixture holes 9, and then start the fully automated ion thinning device. During the thinning process, when the robot arm needs to grab the fixture, the motor connected to the push rod 13 receives a signal and drives the push rod 13 to retract until the opening position sensor 5 detects a signal. At this time, the top cover plate 4 is opened, and the robot arm can take out the sample. After taking the sample, the motor connected to the push rod 13 receives a signal and drives the push rod 13 to extend forward until the closing position sensor 3 detects a signal. At this time, the top cover plate 4 is closed to reduce the flow of outside air to oxidize the sample inside. In addition, the humidity sensor 2 detects the humidity data in real time and sends it to the fully automated ion thinning device. When the humidity is greater than the humidity value set by the user, the fully automated ion thinning device opens the argon channel to allow argon to flow in through the argon interface 12 to protect the sample from oxidation; when the humidity is less than the humidity value set by the user, the fully automated ion thinning device closes the argon channel to save argon.
[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. An automatic sample anti-oxidation device, comprising a housing (1), characterized in that: The shell (1) is fixedly connected to the top of the bottom plate (16) through a limiting groove (15); the top of the shell (1) is fixedly connected to a top cover plate (4); the top cover plate (4) is fixedly connected to a push rod (13) through an L-shaped connecting piece (14); the surface of the bottom plate (16) is fixedly connected to a push rod body fixing piece (7); the push rod body (6) is slidably connected inside the push rod body fixing piece (7); the push rod (13) is installed inside the push rod body (6); the surface of the bottom plate (16) is respectively fixedly connected to a closing position sensor (3) and an opening position sensor (5); the inside of the shell (1) is slidably connected to a fixture table (8); a fixture hole (9) is provided inside the fixture table (8); the top of the bottom plate (16) is fixedly connected to an adjustment fixing block (11); the inside of the adjustment fixing block (11) is slidably connected to a knob (10); the side end of the knob (10) is fixedly connected to the fixture table (8).
2. The automatic sample anti-oxidation device according to claim 1, characterized in that: A humidity sensor (2) is installed in the shell (1), and the humidity sensor (2) is arranged on the side of the fixture table (8). An argon gas interface (12) is fixedly connected to the side of the shell (1).
3. The automatic sample anti-oxidation device according to claim 1, characterized in that: Two knobs (10) are provided, the two knobs (10) are located opposite to each other, and the two knobs (10) have the same size.
4. The automatic sample anti-oxidation device according to claim 1, characterized in that: A plurality of the clamp holes (9) are provided, and the plurality of the clamp holes (9) are evenly distributed in the clamp table (8), and the sizes of the plurality of the clamp holes (9) are the same.
5. The automatic sample anti-oxidation device according to claim 1, characterized in that: The closed position sensor (3) and the open position sensor (5) are both convex in shape, and the closed position sensor (3) and the open position sensor (5) are positioned relative to each other.
6. The automatic sample anti-oxidation device according to claim 1, characterized in that: The top cover plate (4) is in the shape of a rectangle, the top cover plate (4) is arranged on the side of the L-shaped connecting piece (14), and the top cover plate (4) is arranged on the top of the bottom plate (16).
7. The automatic sample anti-oxidation device according to claim 1, characterized in that: The push rod body (6) is in the shape of a rectangular parallelepiped and is made of stainless steel.
8. The automatic sample anti-oxidation device according to claim 2, characterized in that: The argon gas interface (12) is cylindrical in shape, and the argon gas interface (12) is in communication with the housing (1).