Vacuum cavity and solar cell processing equipment
By adopting a vacuum cavity designed with a multi-layer structure, the problems of high cost, high weight and insufficient heat dissipation in the prior art are solved, and higher mechanical strength and corrosion resistance are achieved, which extends the equipment life and reduces costs.
Patent Information
- Application Number
- CN202421608435.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-09
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-07-09
AI Technical Summary
The existing vacuum chambers have problems such as high cost, excessive equipment weight, and insufficient heat dissipation in solar cell production, resulting in increased power consumption.
A vacuum cavity is designed, and a multi-layer structure is used to form the cavity body and cavity cover, including the inner and outer layers, and mechanical strength is enhanced through welding, explosion composite and other connections.
It improves the mechanical strength and corrosion resistance of the vacuum cavity, extends the service life of the equipment, and reduces production costs.
Smart Images
Figure CN222908066U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum chamber and a solar cell processing device. Background Art
[0002] When processing products using vacuum coating technology, the corresponding film deposition process is usually completed in a vacuum chamber. The chamber itself needs to have a certain mechanical strength to prevent the vacuum chamber from deforming. At the same time, it also needs to have a certain corrosion resistance to avoid contamination during normal processes and cleaning and maintenance, and to ensure the service life of the equipment. In the prior art, for example, in PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment commonly used in solar cell production for depositing silicon-based films, multiple vacuum chambers are usually used for production. The process chamber usually adopts a chamber structure with aluminum as the main body, and the non-process chamber adopts a chamber structure made of stainless steel. However, these technologies all have problems such as high cost, excessive equipment weight, and increased power consumption caused by more heat dissipation in the chamber.
[0003] Therefore, it is urgent to design a vacuum chamber and a solar cell processing device to meet the needs of corrosion resistance or mechanical strength while solving the above technical problems. Summary of the Utility Model
[0004] The first object of the utility model is to propose a vacuum chamber, which has high mechanical strength, extends the service life, and saves costs.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] The utility model provides a vacuum chamber, which includes a chamber body, a chamber cover, and a heating component. The chamber body has an opening, and the chamber cover is hermetically covered at the opening. The chamber cover and the chamber body enclose a accommodating space for accommodating a coating substrate. The heating component is arranged in the accommodating space and is configured to heat the coating substrate and the substrate on the coating substrate.
[0007] Wherein, at least one of the chamber body and the chamber cover is composed of a multi-layer structure, and the multi-layer structure at least includes an inner layer and an outer layer.
[0008] As an optional technical solution of the vacuum chamber, at least one adjacent two layers in the multi-layer structure are formed by connecting with any one of welding, explosion cladding, rolling, hot press diffusion, and casting.
[0009] As an optional technical solution of the vacuum chamber, at least one layer structure of the multi-layer structure is formed by additive manufacturing.
[0010] As an alternative technical solution for a vacuum chamber, at least one layer structure of the multi-layer structure is formed by one of physical vapor deposition, chemical vapor deposition, and spraying.
[0011] As an alternative technical solution for a vacuum chamber, the thickness of the outer layer is greater than that of the inner layer.
[0012] As an alternative technical solution for a vacuum chamber, the thickness of the inner layer is set between 1 mm and 100 mm, and the thickness of the outer layer is set between 10 mm and 200 mm.
[0013] As an alternative technical solution for a vacuum chamber, the inner layer is made of one of aluminum, stainless steel, invar alloy, or monel alloy.
[0014] As an alternative technical solution for a vacuum chamber, the outer layer is made of one of carbon steel, stainless steel, or aluminum.
[0015] As an alternative technical solution for a vacuum chamber, at least one intermediate layer is further provided between the inner layer and the outer layer.
[0016] As an alternative technical solution for a vacuum chamber, the thickness of the intermediate layer is set between 10 mm and 200 mm.
[0017] As an alternative technical solution for a vacuum chamber, both sides of the intermediate layer are welded to the inner layer and the outer layer respectively.
[0018] As an alternative technical solution for a vacuum chamber, the intermediate layer is a carbon steel part.
[0019] As an alternative technical solution for a vacuum chamber, the vacuum chamber further includes a gas diffusion module, the gas diffusion module is disposed in the accommodation space, and the gas diffusion module is located above the coating substrate, and process gas is transported into the accommodation space through the gas diffusion module to react, and thin film deposition is performed on the coating substrate.
[0020] The second object of the present invention is to provide a solar cell processing device, which has high mechanical strength, prolongs its service life, and saves costs.
[0021] To achieve this purpose, the present invention adopts the following technical solutions:
[0022] The present invention provides a solar cell processing device, and the solar cell processing device includes the above-mentioned vacuum chamber.
[0023] The beneficial effects of the present invention at least include:
[0024] The present utility model provides a vacuum chamber, which includes a chamber body, a chamber cover and a heating component. The chamber body has an opening, and the chamber cover is hermetically sealed at the opening. The chamber cover and the chamber body enclose a receiving space for accommodating a coating substrate. The heating component is arranged in the receiving space and is configured to heat the coating substrate and the substrate on the coating substrate. Wherein, at least one of the chamber body and the chamber cover is composed of a multi-layer structure, and the multi-layer structure at least includes an inner layer and an outer layer. By setting at least one of the chamber body and the chamber cover as a multi-layer structure, and the multi-layer structure at least includes an inner layer and an outer layer, the mechanical strength of the vacuum chamber can be improved, the service life can be prolonged, and the cost can be saved.
[0025] The present utility model also provides a solar cell processing device, which includes the above-mentioned vacuum chamber. The solar cell processing device has high mechanical strength, prolongs its service life, and saves costs. Description of the Drawings
[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments of the present utility model. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present utility model and these drawings.
[0027] Figure 1 Structural schematic diagram of the vacuum chamber (process chamber) provided by Embodiment 1 of the present utility model Figure One ;
[0028] Figure 2 Structural schematic diagram of the vacuum chamber (non-process chamber) provided by Embodiment 1 of the present utility model Figure Two ;
[0029] Figure 3 Structural schematic diagram of the inner layer and the outer layer provided by Embodiment 1 of the present utility model;
[0030] Figure 4 Structural schematic diagram of the inner layer, the middle layer and the outer layer provided by Embodiment 2 of the present utility model.
[0031] Reference Signs
[0032] 10. Coating substrate;
[0033] 100. Chamber body; 110. Inner layer; 120. Outer layer; 200. Chamber cover; 300. Receiving space; 400. Middle layer; 500. Heating component; 600. Vacuum pump group; 700. Gas diffusion module; 800. Gas supply component. Detailed implementation mode
[0034] To make the technical problems solved by the present utility model, the technical solutions adopted, and the achieved technical effects clearer, the technical solutions of the present utility model will be further described below with reference to the accompanying drawings and through specific implementation modes.
[0035] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0036] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "above", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature has a higher horizontal height than the second feature. The first feature being "below", "below", and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the first feature has a lower horizontal height than the second feature.
[0037] In the description of this embodiment, the orientation or positional relationship terms such as "above", "below", "left", and "right" are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0038] In the description of this embodiment, if not otherwise specified, the term "a plurality" refers to two or more in number.
[0039] Embodiment 1
[0040] This embodiment provides a vacuum chamber, which has high mechanical strength, extends the service life, and saves costs.
[0041] As Figures 1 - 3As shown, the vacuum chamber mainly includes a chamber body 100 and a chamber cover 200. The chamber body 100 has an opening, and the chamber cover 200 is hermetically sealed at the opening. The chamber cover 200 and the chamber body 100 enclose a receiving space 300 for accommodating a coating substrate 10. At least one of the chamber body 100 and the chamber cover 200 is composed of a multi-layer structure, and the multi-layer structure at least includes an inner layer 110 and an outer layer 120. The inner layer 110 and the outer layer 120 are welded together, and the thickness of the outer layer 120 is greater than that of the inner layer 110.
[0042] Exemplarily, both the chamber body 100 and the chamber cover 200 in this embodiment adopt a multi-layer structure, thereby improving the mechanical strength and corrosion resistance of the vacuum chamber. It can be understood that the inner layer 110 in this embodiment refers to the vacuum side close to the receiving space 300, and the outer layer 120 in this embodiment refers to the atmosphere side far from the receiving space 300. In the actual process, the main stress surface of the vacuum chamber is the outer layer 120. That is to say, the outer layer 120 of the vacuum chamber is mainly subjected to the pressure of the external atmospheric pressure, while the inner layer 110 is in contact with the process gas. The main function of the inner layer 110 is to meet the corrosion resistance of the process gas. In other words, the external atmospheric pressure borne by the inner layer 110 is limited. Therefore, the thickness of the outer layer 120 in this embodiment is greater than that of the inner layer 110, so that the outer layer 120 can have higher mechanical strength to resist the external atmospheric pressure, thereby improving the mechanical strength of the vacuum chamber, extending the service life, and saving costs.
[0043] Optionally, the inner layer 110 and the outer layer 120 in this embodiment can be welded together by friction welding or explosion welding. Of course, other welding methods can also be used for welding, such as ultrasonic welding, etc.
[0044] Specifically, at least one adjacent two layers in the multi-layer structure in this embodiment are connected by any one of welding, explosion cladding, rolling, hot pressing diffusion, and casting. For example, when both the inner layer 110 and the outer layer 120 are arranged in multiple layers, any adjacent two layers can be processed and connected by any one of the above welding, explosion cladding, rolling, hot pressing diffusion, and casting.
[0045] It can be understood that any one of the above welding, explosion cladding, rolling, hot pressing diffusion, and casting process technologies is a conventional process technology, and will not be elaborated here.
[0046] In some embodiments, at least one layer structure in the multi-layer structure is formed by an additive manufacturing process. Specifically, additive manufacturing is a well-known technical process, also known as solid freeform manufacturing or 3D printing process, which means a process of building a three-dimensional object from raw materials (generally powders, liquids, suspensions, or molten solids) in a series of two-dimensional layers or cross-sections. For example, the inner layer 110 can be formed by additive manufacturing on the outer layer 120, or the outer layer 120 can be formed by additive manufacturing on the inner layer 110, which will not be further described here.
[0047] In some embodiments, at least one layer structure of the multi-layer structure is formed by one of physical vapor deposition, chemical vapor deposition, and spraying. For example, the inner layer 110 can be formed by any one of physical vapor deposition, chemical vapor deposition, and spraying; the outer layer 120 can be formed by any one of physical vapor deposition, chemical vapor deposition, and spraying.
[0048] It can be understood that the above process technologies of physical vapor deposition, chemical vapor deposition, and spraying are all conventional process technologies in this field and will not be elaborated here one by one.
[0049] Optionally, the inner layer 110 in this embodiment is one of an aluminum part, a stainless steel part, an invar alloy part, or a Monel alloy part. In other words, the inner layer 110 can be processed and made of one of the materials of metallic aluminum, stainless steel, invar alloy, or Monel alloy.
[0050] Optionally, the outer layer 120 in this embodiment is one of a carbon steel part, a stainless steel part, or an aluminum part, that is, the outer layer 120 can be processed and made of one of carbon steel material, stainless steel material, or aluminum material. Exemplarily, the types of carbon steel are not limited to Q235, Q345, etc.
[0051] Optionally, the thickness of the inner layer 110 in this embodiment is set between 1 mm and 100 mm, the thickness of the outer layer 120 is set between 10 mm and 200 mm, and the thickness of the outer layer 120 is greater than the thickness of the inner layer 110. Exemplarily, the thickness of the inner layer 110 can be set to values such as 1 mm, 10 mm, 50 mm, 80 mm, 100 mm, etc. The thickness of the outer layer 120 can be set to values such as 10 mm, 50 mm, 80 mm, 150 mm, 200 mm, etc.
[0052] Optionally, the elastic modulus of the outer layer 120 in this embodiment is not less than 2.0e+11, and the yield strength is not less than 2.0e+8.
[0053] In this embodiment, the outer layer 120 and the inner layer 110 are compounded and superposed and connected by welding. Among them, the inner layer 110 is made of a material with corrosion resistance and acid resistance to meet the requirements of process gases; the outer layer 120 is made of a material with higher rigidity to increase the mechanical strength of the vacuum chamber.
[0054] As Figures 1 - 2 shown, in this embodiment, the vacuum chamber further includes a heating component 500 and a vacuum pump group 600. The heating component 500 is arranged in the accommodation space 300, and the heating component 500 is located below the coating substrate 10. The heating component 500 is configured to heat the coating substrate 10 and the substrate on the coating substrate 10. The substrate can be a silicon wafer, a glass wafer or other substrates to be coated; the vacuum pump group 600 is communicated with the accommodation space 300. The vacuum chamber further includes a gas diffusion module 700 and a gas supply component 800. The gas diffusion module 700 is arranged in the accommodation space 300, and the gas diffusion module 700 is located above the coating substrate 10. The gas diffusion module 700 is configured to perform chemical vapor deposition on the substrate on the coating substrate 10; the gas supply component 800 is communicated with the accommodation space 300, and the gas supply component 800 is configured to transport process gases into the accommodation space 300. That is to say, the process gases are transported into the accommodation space 300 through the gas diffusion module 700 to react, and film deposition is performed on the coating substrate 10.
[0055] Please continue to refer to Figures 1 - 2 It should be noted that the vacuum chamber in this embodiment can be a process chamber or a non-process chamber. When the vacuum chamber is a process chamber, at this time, the process chamber has a heating component 500, a vacuum pump group 600, a gas supply component 800 and a gas diffusion module 700. The heating component 500 is used to preheat the coating substrate 10 and the substrate, the gas diffusion module 700 is used for chemical vapor deposition of the substrate, the gas supply component 800 is used to transport process gases into the accommodation space 300, and the vacuum pump group 600 is used to evacuate the accommodation space 300 to maintain a high-vacuum environment. When the vacuum chamber is a non-process chamber, at this time, the non-process chamber has a heating component 500 and a vacuum pump group 600. The heating component 500 is used to heat the coating substrate 10 and the substrate, and the vacuum pump group 600 is used to evacuate the accommodation space 300 to create a negative pressure environment to meet the opening and closing of the valve of the adjacent vacuum chamber.
[0056] It can be understood that the coating substrate 10 in this embodiment is conveyed by a conveying component, and the conveying component can be set as a plurality of conveying steel chains.
[0057] This embodiment also provides a solar cell processing device, which includes the above-mentioned vacuum chamber. The solar cell processing device has high mechanical strength, prolongs its service life and saves costs.
[0058] Example 2
[0059] As Figure 4 shown, this embodiment provides a vacuum chamber. The main difference between this vacuum chamber and that of Example 1 is that: at least one intermediate layer 400 is further provided between the inner layer 110 and the outer layer 120, and both sides of the intermediate layer 400 are welded to the inner layer 110 and the outer layer 120 respectively.
[0060] Exemplarily, the intermediate layer 400 can be provided in a number such as one layer, two layers, three layers, etc.
[0061] Optionally, the intermediate layer 400 can be welded to the inner layer 110 and the outer layer 120 by friction welding or explosion welding.
[0062] Furthermore, both the intermediate layer 400 and the outer layer 120 can be made of materials with relatively high mechanical strength. Exemplarily, they are both made of carbon steel, and the types of carbon steel are not limited to Q235, Q345, etc.
[0063] Optionally, the thickness of the intermediate layer 400 in this embodiment is set between 10 mm and 200 mm. Exemplarily, the thickness of the intermediate layer 400 can be set to values such as 10 mm, 50 mm, 80 mm, 150 mm, 200 mm, etc.
[0064] Optionally, the elastic modulus of the intermediate layer 400 in this embodiment is not less than 2.0e+11, and the yield strength is not less than 2.0e+8.
[0065] Through the setting of the intermediate layer 400, the mechanical strength of the vacuum chamber can be further improved, the service life can be extended, and the purpose of cost saving can be achieved.
[0066] The remaining structures of the vacuum chamber in this embodiment are the same as those of Example 1, and will not be elaborated here one by one.
[0067] Obviously, the above are only the preferred embodiments of the present invention and the technical principles applied. Those skilled in the art will understand that the present invention is not limited to the specific embodiments here, and various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments only. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.
[0068] Note that in the description of this specification, the descriptions referring to the reference terms "some embodiments", "other embodiments", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.
Claims
1. A vacuum chamber, characterized in that: The invention comprises a chamber body (100), a chamber cover (200) and a heating component (500); the chamber body (100) has an opening; the chamber cover (200) is sealed and covers the opening; the chamber cover (200) and the chamber body (100) are arranged to form a receiving space (300) for receiving a film-coated substrate (10); the heating component (500) is arranged in the receiving space (300); and the heating component (500) is configured to heat the film-coated substrate (10) and a substrate on the film-coated substrate (10); Wherein, at least one of the cavity body (100) and the cavity cover (200) is composed of a multi-layer structure, and the multi-layer structure at least includes an inner layer (110) and an outer layer (120).
2. The vacuum chamber according to claim 1, characterized in that: At least two adjacent layers in the multilayer structure are connected by welding, explosive bonding, rolling, hot pressing diffusion, and casting.
3. The vacuum chamber according to claim 1, characterized in that: At least one layer structure in the multi-layer structure is formed by additive manufacturing.
4. The vacuum chamber according to claim 1, characterized in that: At least one layer structure in the multi-layer structure is formed by one of physical vapor deposition, chemical vapor deposition and spray coating.
5. The vacuum chamber according to claim 1, characterized in that: The thickness of the outer layer (120) is greater than the thickness of the inner layer (110).
6. The vacuum chamber according to claim 5, characterized in that: The thickness of the inner layer (110) is set to between 1 mm and 100 mm, and the thickness of the outer layer (120) is set to between 10 mm and 200 mm.
7. The vacuum chamber according to claim 1, characterized in that: The inner layer (110) is made of one of aluminum, stainless steel, Invar alloy or Monel alloy.
8. The vacuum chamber according to claim 1, characterized in that: The outer layer (120) is made of one of carbon steel, stainless steel or aluminum.
9. The vacuum chamber according to claim 1, characterized in that: At least one intermediate layer (400) is disposed between the inner layer (110) and the outer layer (120).
10. The vacuum chamber according to claim 9, characterized in that: The thickness of the intermediate layer (400) is set between 10 mm and 200 mm.
11. The vacuum chamber according to claim 9, characterized in that: Both sides of the middle layer (400) are respectively connected to the inner layer (110) and the outer layer (120) by welding.
12. The vacuum chamber according to claim 9, characterized in that: The middle layer (400) is a carbon steel part.
13. The vacuum chamber according to claim 1, characterized in that: The vacuum chamber further comprises a gas diffusion module (700), wherein the gas diffusion module (700) is arranged in the accommodating space (300), and the gas diffusion module (700) is located above the coating substrate (10), and the process gas is transported into the accommodating space (300) through the gas diffusion module (700) to react, and thin film deposition is performed on the coating substrate (10).
14. Solar cell processing equipment, characterized in that: The solar cell processing equipment comprises the vacuum chamber according to any one of claims 1-13.