Silicon charging barrel

Abstract

The utility model relates to a silicon feeding cylinder which comprises a cylinder body, a metal pull rod and a silicon protective sleeve, wherein the top and the bottom of the cylinder body are open; the silicon protective sleeve is sleeved on the metal pull rod; the silicon charging barrel further comprises a silicon protection lining which is connected into the barrel body and covers the inner wall face of the barrel body, a silicon bottom cone which is connected to the lower end of the metal pull rod and can close or open the bottom of the barrel body, and a heat insulation cover which is connected to the barrel body and / or the protection lining and covers the lower portion of the bottom cone. Wherein a silicon material loading area is formed among the protective lining, the protective sleeve and the base cone, and a discharging opening for silicon materials to pass through is formed in the heat insulation cover. On one hand, the silicon protective sleeve, the protective lining and the bottom cone are adopted, so that the contact parts of silicon materials in the feeding process are all silicon materials, the probability of silicon material pollution is effectively reduced, and the quality of a silicon single crystal rod is improved; and on the other hand, the heat insulation cover covers the bottom cone, the high-temperature influence is reduced, the risk that the bottom cone is melted is avoided, and therefore the service life of the bottom cone is effectively prolonged.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal preparation, and particularly relates to a silicon feeding cylinder. Background Art

[0002] In the process of pulling single crystals by the Czochralski method, in order to improve the utilization rate of the quartz crucible, a secondary feeding device is used to add silicon materials into the quartz crucible multiple times to realize pulling multiple silicon rods from one crucible. Currently, in the industry, a quartz feeding cylinder is used for secondary feeding. The feeding cylinder is a cylindrical barrel with openings at both ends. There is a metal connecting rod in the axial direction of the quartz barrel. The lower end of the metal connecting rod is connected to a quartz bottom cone as the bottom cover, and the upper end extends out of the quartz barrel port and can be connected to the transmission device of the single crystal furnace. To avoid the contamination of the single crystal by metal impurities during the collision between the metal connecting rod and the silicon materials, a quartz protective inner lining tube is added outside the metal connecting rod. During the feeding process, the flange on the feeding cylinder is fixed, and the connecting rod descends to make the quartz bottom cone leave the quartz barrel body, providing a gap for the silicon materials in the quartz barrel to fall into the quartz crucible.

[0003] However, at present, the feeding cylinder and the protective inner lining tube of the metal connecting rod are made of quartz. During the feeding process, the silicon materials will collide with the protective inner lining tube, resulting in gaps in the protective inner lining tube. The quartz slag generated by the gaps enters the quartz crucible together with the silicon materials, contaminating the silicon materials and thus affecting the quality of the single crystal.

[0004] Therefore, in order to overcome the above defects, a Chinese patent with the publication number CN115747946A discloses a protective inner lining tube with low impurity content and a feeding cylinder having the same. The protective inner lining tube is arranged on the feeding cylinder. The feeding cylinder includes a barrel body, a connecting rod is arranged in the barrel body, the bottom end of the connecting rod is connected to a quartz cone, and the protective inner lining tube is sleeved on the connecting rod; the protective inner lining tube includes a silicon tube, the total content of metal impurities in the silicon tube is not higher than 100 ppmw, and the content of oxygen element in the silicon tube is not higher than 100 ppma.

[0005] However, in actual production, the prior art still has the following technical defects:

[0006] 1. During the feeding process, the temperature of the silicon liquid inside the quartz crucible is relatively high. The quartz bottom cone is closest to the silicon liquid and is most affected by the high temperature. Therefore, there is a risk of melting the quartz bottom cone. The melting of the quartz bottom cone into the silicon materials will not only affect the pulling efficiency and the quality of the single crystal but also damage the bottom cone and reduce the service life of the bottom cone;

[0007] 2. The quartz barrel body and the quartz bottom cone are in frequent contact with the silicon materials during the feeding process, and there is also a possibility of contaminating the silicon materials. Summary of the Utility Model

[0008] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a silicon feeding cylinder.

[0009] To solve the above technical problems, the following technical solutions are adopted in the present utility model:

[0010] A silicon feeding cylinder, which includes a cylinder body with both the top and bottom open, a metal pull rod inserted into the cylinder body from top to bottom, and a silicon protection sleeve sleeved on the metal pull rod. The silicon feeding cylinder further includes a silicon protection lining connected inside the cylinder body and covering the inner wall surface of the cylinder body, a silicon bottom cone connected to the lower end of the metal pull rod and capable of closing or opening the bottom of the cylinder body, and a heat insulation cover connected to the cylinder body and / or the protection lining and covering the lower part of the bottom cone. A silicon material loading area is formed between the protection lining, the protection sleeve, and the bottom cone, and a material discharge opening for the silicon material to pass through is formed on the heat insulation cover.

[0011] According to a specific implementation and preferred aspect of the present utility model, the top edge of the protection lining is bent outward and erected on the top of the cylinder body. The protection lining is simple to disassemble and assemble, convenient to replace, and reduces the maintenance cost.

[0012] Preferably, the top edge of the cylinder body is bent outward and is arranged in an up-and-down fitting manner with the top edge of the protection lining. Here, the fitting degree between the protection lining and the cylinder body is improved, and the assembly stability is enhanced.

[0013] According to another specific implementation and preferred aspect of the present utility model, the bottom of the cylinder body is flush with the bottom of the protection lining. Here, the bottom of the cylinder body and the protection lining are flat, so that the bottom cone can form a closure for the bottom of the cylinder body.

[0014] According to another specific implementation and preferred aspect of the present utility model, the diameter of the heat insulation cover gradually decreases from top to bottom, and a material discharge opening is formed at the bottom of the heat insulation cover.

[0015] Preferably, the center lines of the heat insulation cover, the material discharge opening, the bottom cone, and the cylinder body coincide.

[0016] Preferably, when the metal pull rod drives the bottom cone to open the bottom of the cylinder body downward, an annular discharge opening is formed between the bottom cone and the bottom of the cylinder body, and in the orthographic projection on the horizontal plane, the material discharge opening is located inside the annular discharge opening. Here, during material discharge, the silicon material falls along the inclined surface of the bottom cone, passes through the heat insulation cover, and then drops into the quartz crucible, ensuring a smooth material discharge process.

[0017] According to another specific implementation and preferred aspect of the present utility model, a silicon material layer covering the inner wall surface of the heat insulation cover is further provided on the inner side of the heat insulation cover. Here, the pollution to the silicon material is reduced.

[0018] According to another specific implementation and preferred aspect of the present utility model, a convex portion protruding outward is formed on the outer wall of the cylinder body, and the heat insulation cover is hung on the convex portion from the top. Here, the disassembly and assembly of the heat insulation cover are convenient, the replacement is convenient, and the maintenance cost is reduced.

[0019] In addition, when the metal pull rod drives the bottom cone upward to close the bottom of the cylinder, the bottom cone contacts the bottom edge of the protective liner from the cone surface.

[0020] Due to the implementation of the above technical solution, the utility model has the following advantages compared with the prior art:

[0021] The silicon feeding barrel of the prior art has the risk of melting the quartz bottom cone due to high temperature when feeding. The quartz bottom cone melted into the silicon material will not only affect the crystal pulling efficiency and the quality of the single crystal, but also damage the bottom cone and reduce the life of the bottom cone; in addition, the quartz cylinder and the quartz bottom cone frequently contact with the silicon material during the material discharge process, which may also contaminate the silicon material. The present application designs the structure of the silicon feeding barrel as a whole, and cleverly solves the shortcomings and defects of the prior art. After adopting the silicon barrel, the silicon material is loaded into the space between the silicon protective lining and the silicon protective sleeve to avoid direct contact between the silicon material and the barrel and the metal pull rod; a silicon bottom cone is used, and the bottom of the barrel is opened or closed under the drive of the metal pull rod. When the bottom of the barrel is opened, the silicon material flows downward and falls into the quartz crucible through the discharge port of the heat insulation cover. At the same time, the heat insulation cover is set under the bottom cone to form heat insulation to prevent the bottom cone from melting. Therefore, compared with the existing design, the utility model, on the one hand, adopts a silicon protective sleeve, a protective liner and a bottom cone, so that the parts that the silicon material contacts during the charging process are all silicon materials, which effectively reduces the probability of silicon material contamination and improves the quality of the single crystal silicon rod; on the other hand, a heat insulation cover is arranged under the bottom cone to reduce the impact of high temperature and avoid the risk of melting of the bottom cone, thereby effectively extending the service life of the bottom cone. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a half-section schematic diagram of the silicon feeding cylinder of this embodiment;

[0023] Among them: 1. Cylinder; 2. Protective lining; 3. Protective sleeve; 4. Metal pull rod; 5. Bottom cone; 6. Heat insulation cover. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0025] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the present application.

[0026] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0027] In the present application, unless otherwise clearly defined and limited, the terms "mounted", "connected", "coupled", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0028] In the present application, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature. It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation.

[0029] As Figure 1 shown, a silicon feeding cylinder of this embodiment includes a cylinder body 1, a protective lining 2, a protective sleeve 3, a metal pull rod 4, a bottom cone 5, and a heat insulation cover 6.

[0030] Specifically, both the top and bottom of the cylinder body 1 are open, and silicon material is fed from top to bottom.

[0031] In this example, the protective lining 2 is a silicon-based protective lining made of silicon material with low impurities and high strength, and is detachably connected inside the cylinder body 1 and can cover the inner wall surface of the cylinder body 1.

[0032] In some specific embodiments, the top edge of the protective lining 2 is bent outward and is erected on the top of the cylinder body 1, and the top edge of the cylinder body 1 is bent outward and is vertically attached to the top edge of the protective lining 2, and the bottom of the cylinder body 1 and the protective lining 2 are flush.

[0033] In this example, the metal pull rod 4 is inserted into the cylinder body 1 from top to bottom, the protective sleeve 3 is a silicon-based protective sleeve made of silicon material with low impurities and high strength, and the protective sleeve 3 is sleeved on the metal pull rod 4.

[0034] In this example, the bottom cone 5 is a silicon-based bottom cone made of silicon material with low impurities and high strength, and is detachably connected to the lower end of the metal pull rod 4, and closes or opens the bottom of the cylinder body 1 as the metal pull rod 4 moves up and down.

[0035] In some specific embodiments, a silicon material loading area is formed between the protective lining 2, the protective sleeve 3, and the bottom cone 5; when the metal pull rod 4 drives the bottom cone 5 to close the bottom of the cylinder body 1 upward, the bottom cone 5 abuts against the bottom edge of the protective lining 2 from the conical surface; when the metal pull rod 4 drives the bottom cone 5 to open the bottom of the cylinder body 1 downward, an annular discharge port is formed between the bottom cone 5 and the bottom of the cylinder body 1.

[0036] In this example, the heat insulation cover 6 is connected to the cylinder body 1 and / or the protective lining 2 and covers the lower part of the bottom cone 5, and a material discharging port for silicon material to pass through is formed on the heat insulation cover 6. During feeding, the silicon material passes downward through the annular discharge port and passes through the material discharging port and falls into the quartz crucible.

[0037] In some specific embodiments, the inner diameter of the heat insulation cover 6 gradually decreases from top to bottom, and a material discharging port is formed at the bottom of the heat insulation cover 6, wherein the center lines of the heat insulation cover 6, the material discharging port, the bottom cone 5, and the cylinder body 1 coincide, and in the orthographic projection on the horizontal plane, the material discharging port on the heat insulation cover 6 is located inside the annular discharge port formed between the bottom cone 5 and the bottom of the cylinder body 1.

[0038] At the same time, a convex portion protruding outward is formed on the outer wall of the cylinder body 1, and the heat insulation cover 6 is hung on the convex portion from the top.

[0039] In addition, a silicon material layer covering the inner wall surface of the heat shield 6 is provided on the inner side of the heat shield 6, wherein the silicon material layer uses low-impurity, high-temperature-resistant silicon material; the heat shield 6 uses high-temperature-resistant material.

[0040] In summary, after adopting this silicon barrel, the silicon material is loaded into the space between the silicon protection lining and the silicon protection sleeve to prevent the silicon material from directly contacting the barrel body and the metal pull rod; a silicon bottom cone is adopted, and driven by the metal pull rod, the bottom of the barrel body is opened or closed. When the bottom of the barrel body is opened, the silicon material flows downward and falls into the quartz crucible through the feeding port of the heat shield. At the same time, the heat shield is arranged below the bottom cone to form heat insulation and prevent the bottom cone from melting. Therefore, compared with the existing design, on the one hand, by adopting a silicon protection sleeve, a protection lining and a bottom cone made of silicon, the parts contacted by the silicon material during feeding are all silicon materials, effectively reducing the probability of silicon material pollution and improving the quality of the single crystal silicon rod; on the other hand, a heat shield is arranged below the bottom cone to reduce the influence of high temperature and avoid the risk of melting of the bottom cone, thereby effectively extending the service life of the bottom cone; on the third hand, a split design is adopted, and each component can be disassembled, and the disassembly and assembly are simple, which is convenient for replacement and reduces the maintenance cost; on the fourth hand, the fit degree between the protection lining and the barrel body can be improved, and the assembly stability can be enhanced; on the fifth hand, the barrel body is flush with the bottom of the protection lining, and the bottom ends of the barrel body and the protection lining are flat, so that the bottom cone can form a closure for the bottom of the barrel body; on the sixth hand, during feeding, the silicon material falls along the inclined surface of the bottom cone, passes through the heat shield and then drops into the quartz crucible to ensure a smooth feeding process; on the seventh hand, a silicon material layer covering the inner wall surface of the heat shield is also provided on the inner side of the heat shield, further reducing the pollution of the silicon material.

[0041] The above has made a detailed description of the present invention, aiming to enable those skilled in this field to understand the content of the present invention and implement it. However, the protection scope of the present invention cannot be limited thereby. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A silicon feeding cylinder, comprising a cylinder with both the top and the bottom open, a metal rod inserted into the cylinder from top to bottom, and a silicon protective sleeve sleeved on the metal rod, characterized in that: The silicon feeding barrel also includes a silicon protective liner connected to the barrel and covering the inner wall of the barrel, a silicon bottom cone connected to the lower end of the metal pull rod and capable of closing or opening the bottom of the barrel, and a heat insulation cover connected to the barrel and / or the protective liner and covered under the bottom cone, wherein a silicon material loading area is formed between the protective liner, the protective sleeve and the bottom cone, and a discharge port for silicon material to pass through is formed on the heat insulation cover.

2. The silicon feeding cylinder according to claim 1, characterized in that: The top edge of the protective liner is bent outward and mounted on the top of the cylinder.

3. The silicon feeding cylinder according to claim 2, characterized in that: The top edge of the cylinder is bent outward and is arranged to fit in with the top edge of the protective liner.

4. The silicon feeding cartridge according to claim 1, characterized in that: The cylinder is arranged flush with the bottom of the protective liner.

5. The silicon feeding cartridge according to claim 1, characterized in that: The diameter of the heat insulation cover is gradually reduced from top to bottom, and the bottom of the heat insulation cover forms the feed opening.

6. The silicon feeding cartridge according to claim 1, characterized in that: The center lines of the heat insulation cover, the feed opening, the bottom cone and the cylinder are arranged to coincide with each other.

7. The silicon feeding cartridge according to claim 1, characterized in that: When the metal pull rod drives the bottom cone downward to open the bottom of the cylinder, an annular discharge port is formed between the bottom cone and the bottom of the cylinder, and in the orthographic projection on the horizontal plane, the discharge port is located on the inner side of the annular discharge port.

8. The silicon feeding cartridge according to claim 1, characterized in that: The inner side of the heat insulation cover is also provided with a silicon material layer covering the inner wall surface of the heat insulation cover.

9. The silicon feeding cartridge according to claim 1, characterized in that: The outer wall of the cylinder is formed with a convex portion protruding outward, and the heat insulation cover is hung on the convex portion from the top.

10. The silicon feeding cartridge according to claim 1, characterized in that: When the metal pull rod drives the bottom cone upward to close the bottom of the cylinder, the bottom cone contacts the bottom edge of the protective liner from its cone surface.

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