Corrugated pipe structure, gas conveying device and gas reduction system

Abstract

The embodiment of the utility model provides a corrugated pipe structure, a gas conveying device and a gas reduction system, the corrugated pipe structure is used for the gas reduction system, and the corrugated pipe structure comprises a corrugated pipe body and a first connecting piece and a second connecting piece which are arranged at the two ends of the corrugated pipe body respectively; the corrugated pipe body is connected with a preceding-stage pipeline through the first connecting piece; the corrugated pipe body is connected with the inlet pipeline through the second connecting piece; the first connecting piece comprises a fixing disc and a connecting through hole; the fixed disc has a preset shape, and the preset shape is matched with the shape of a cabinet body mounting hole in the gas reduction system, so that the corrugated pipe structure can enter and exit from the cabinet body mounting hole. The corrugated pipe structure is provided with the first connecting piece in a preset shape, the installation space is saved, the corrugated pipe structure can enter and exit from the cabinet body installation hole, the corrugated pipe structure and the inlet pipeline can be disassembled through the cabinet body installation hole, and the corrugated pipe structure is taken out from the cabinet body installation hole to be maintained; the first connecting piece of the corrugated pipe structure and the preceding-stage pipeline can be disassembled through the outside of the cabinet body, and operation is convenient and fast.

Description

Technical Field

[0001] The embodiments of the present disclosure belong to the technical field of semiconductor equipment, and particularly relate to a bellows structure, a gas delivery device, and a gas reduction system. Background Art

[0002] During the semiconductor manufacturing process, gas reduction equipment is involved in specific processes. The gas reduction equipment is mainly used to reduce the gas flowing into the vacuum pump, removing one or several gases. Since the vacuum pump compresses air to do work during the vacuum pumping process, the temperature in the vacuum pump rises. The gas flowing through the vacuum pump will undergo chemical reactions under high temperature and high pressure, generating harmful gases, liquids, or solids. The gas reduction equipment is to treat one or more of the gases before they flow into the vacuum pump.

[0003] The installation space at the client site is relatively limited. The vacuum pump or the vacuum pump assembly A with gas reduction equipment is basically installed side by side, as Figure 1 shown. The left side 1 and the right side 2 of the equipment are next to other equipment, without any maintainable space, and maintenance operations cannot be carried out. The equipment can only be maintained at the front 4 or the rear 3. The gas reduction equipment is a device with certain consumption, and relevant components need to be regularly inspected and maintained.

[0004] In the prior art, the design process did not consider the maintenance of the front-stage pipeline. During each maintenance process, the entire gas reduction equipment needs to be moved forward or backward until the left and right sides of the equipment are completely exposed for maintenance operations. Since the front-stage pipeline requires disassembly from the outside of the cabinet, the two ends of the traditional bellows are either in the form of ISO-K or ISO-F flanges, and are fixed and connected using single-sided or double-sided calipers or bolts. Disassembly has to be carried out on the bellows side, and the bellows is sealed inside the sheet metal cabinet, which is not convenient for disassembly. If door maintenance is carried out, the equipment needs to be re-debugged, the operation is cumbersome and complex, the maintenance time is long, and other components may be accidentally touched during the maintenance process, resulting in damage to other components. Due to the relatively compact structural space of each adapted product in the cabinet of the gas reduction system, the traditional bellows structure cannot be installed by entering or exiting the cabinet.

[0005] In view of the above problems, it is necessary to propose a bellows structure, a gas delivery device, and a gas reduction system with reasonable design and capable of effectively improving the above problems. Summary of the Utility Model

[0006] The embodiments of the present disclosure aim to at least solve one of the technical problems existing in the prior art, and provide a bellows structure, a gas delivery device, and a gas reduction system.

[0007] One aspect of an embodiment of the present disclosure provides a bellows structure for a gas abatement system, the bellows structure comprising a bellows body and a first connecting member and a second connecting member respectively disposed at two ends of the bellows body;

[0008] The first connecting member is used to connect the bellows body and the front-stage pipeline;

[0009] The second connecting piece is used to connect the bellows body to the inlet pipeline;

[0010] The first connecting member includes a fixing plate and a connecting through hole located in the central area of ​​the fixing plate; wherein,

[0011] The fixing plate has a preset shape, and the preset shape is used to match the shape of a cabinet installation hole in the gas abatement system so that the bellows structure can enter and exit the cabinet installation hole.

[0012] Optionally, both ends of the fixing plate along its length direction are in the shape of curved surfaces protruding outward, and the two ends are symmetrical; both ends of the fixing plate along its width direction are in the shape of flat surfaces, and the two ends are symmetrical.

[0013] Optionally, the fixing plate is provided with a plurality of threaded holes.

[0014] Optionally, a sealing member is provided on a side of the first connecting member facing the front-stage pipeline.

[0015] Optionally, the first connecting member and the second connecting member are flanges.

[0016] Another aspect of the disclosed embodiment provides a gas delivery device for a gas abatement system, the gas delivery device comprising a front-stage pipeline, a connection structure, a bellows structure and an inlet pipeline, wherein the bellows structure adopts the bellows structure described above;

[0017] The first end of the front-stage pipeline is connected to the first connecting piece of the bellows structure through the connecting structure, and the second end of the front-stage pipeline is used to communicate with a preset gas source;

[0018] The second connecting piece of the bellows structure is connected to the first end of the inlet pipeline, and the second end of the inlet pipeline is used to connect to the reaction chamber; wherein,

[0019] The connection structure is fixed to the outer side wall of the cabinet in the gas abatement system so that the front-stage pipeline is located outside the cabinet.

[0020] Optionally, the connection structure includes a disc body and a communication hole located in a central area of ​​the disc body, and the disc body includes a connection portion close to the communication hole and a fixing portion away from the communication hole;

[0021] The connecting part connects the pre-stage pipeline with the first connecting part of the corrugated pipe structure, and the fixing part fixes the disc body to the outer side wall of the cabinet.

[0022] Optionally, the connecting part is provided with a plurality of first threaded holes and a plurality of second threaded holes that are circumferentially spaced and staggered along the communication hole;

[0023] The fixing part is provided with a plurality of third threaded holes.

[0024] Optionally, it further includes a first bolt, a second bolt and a third bolt;

[0025] The first bolt sequentially passes through the corresponding first threaded hole and the threaded hole of the corrugated pipe structure from the pre-stage pipeline end;

[0026] The second bolt sequentially passes through the threaded hole of the corresponding pre-stage pipeline and the second threaded hole from the pre-stage pipeline end;

[0027] The third bolt sequentially passes through the corresponding third threaded hole and the threaded hole of the cabinet from the pre-stage pipeline end.

[0028] Another aspect of the embodiments of the present disclosure provides a gas reduction system, including a cabinet, a gate valve, a gas delivery device, a reaction chamber and a vacuum pump. Among them, the gas delivery device adopts the gas delivery device described above; among them,

[0029] The first end of the gate valve is used to communicate with a preset gas source, and the second end of the gate valve is connected to the second end of the pre-stage pipeline;

[0030] The second end of the inlet pipeline is connected to the gas inlet of the reaction chamber, and the gas outlet of the reaction chamber is connected to the vacuum pump; among them,

[0031] The top wall of the cabinet is provided with the cabinet installation hole, and the corrugated pipe structure can enter and exit the cabinet installation hole.

[0032] The bellows structure, gas delivery device and gas abatement system of the disclosed embodiment, the bellows structure includes a bellows body and a first connector and a second connector respectively arranged at both ends of the bellows body; the first connector includes a fixed disk and a connecting through hole located in the central area of ​​the fixed disk; wherein the fixed disk has a preset shape, and the preset shape is used to match the shape of the cabinet mounting hole in the gas abatement system, so that the bellows structure can enter and exit the cabinet mounting hole. The bellows structure of the disclosed embodiment has a first connector of a preset shape, which saves installation space, and the bellows structure can enter and exit the cabinet mounting hole. The bellows structure and the inlet pipeline can be disassembled through the cabinet mounting hole, and the bellows structure can be taken out from the cabinet mounting hole for maintenance. In addition, the first connector of the bellows structure can be disassembled from the front-stage pipeline through the outside of the cabinet, solving the problem that the cabinet cannot be disassembled from the outside; the bellows structure is used for the gas abatement system, and can realize the rapid disassembly of the gas abatement system, which serves the purpose of facilitating maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic diagram of the position relationship of the gas abatement system in the prior art;

[0034] Figure 2 This is a schematic structural diagram of a bellows structure according to an embodiment of the present disclosure;

[0035] Figure 3 It is a structural schematic diagram of a first connecting member of another embodiment of the disclosed embodiment;

[0036] Figure 4 This is a schematic structural diagram of a bellows structure according to an embodiment of the present disclosure;

[0037] Figure 5 It is a structural schematic diagram of a gas delivery device according to another embodiment of the present disclosure;

[0038] Figure 6 It is a structural schematic diagram of a gas abatement system according to another embodiment of the present disclosure;

[0039] Figure 7 It is a structural schematic diagram of a connection structure of another embodiment of the present disclosure;

[0040] Figure 8 It is a structural schematic diagram of a cabinet of another embodiment of the present disclosure. DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the technical solutions of the embodiments of the present disclosure, the embodiments of the present disclosure are further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0042] likeFigures 2 to 4 As shown in Figures 2 to 4 , on the one hand, an embodiment of the present disclosure provides a bellows structure 100 for a gas reduction system. The bellows structure 100 includes a bellows body 110 and a first connector 120 and a second connector 130 respectively disposed at both ends of the bellows body. As Figure 6 shown in Figure 6 , the first connector 120 is used to connect the bellows body 110 and the pre-stage pipeline 210. Among them, the pre-stage pipeline 210 is located outside the cabinet 230, and the bellows structure 100 is located inside the cabinet 230. The second connector 130 is used to connect the bellows body 110 with the inlet pipeline 240.

[0043] The first connector 120 includes a fixing plate 121 and a connection through-hole 122 located in the central area of the fixing plate 121. Among them, the fixing plate 121 has a preset shape. As Figure 8 shown in Figure 8 , the preset shape is used to match the shape of the cabinet mounting hole 231 in the gas reduction system, so that the bellows structure 100 can enter and exit the cabinet mounting hole 231.

[0044] Specifically, the size of the fixing plate 121 is smaller than the size of the cabinet mounting hole 231, and the preset pattern of the fixing plate 121 corresponds to the shape of the cabinet mounting hole 231, so that the bellows structure 100 can enter and exit the cabinet 230 through the cabinet mounting hole 231, realizing the disassembly of the bellows structure 100 and the inlet pipeline 240. In addition, it is convenient to take out the bellows structure 100 from the cabinet mounting hole 231 for corresponding maintenance.

[0045] It should be noted that the first connector 120 and the second connector 130 can adopt flanges. Among them, the first connector 120 is a flange with a preset shape, and the second connector 130 can be a flange commonly used in the prior art, such as an ISO-F flange or an ISO-K flange, etc. For the specific types of the first connector 120 and the second connector 130, this embodiment does not make specific limitations and can be selected according to actual needs.

[0046] It should be further noted that the bellows body 110 can adopt a braided bellows or other types of bellows, which can be selected according to actual needs. There is no specific limitation on the length of the bellows body 110, which can be selected according to actual needs.

[0047] It should still be noted that the sizes of the first connector 120 and the second connector 130 are both smaller than the size of the cabinet mounting hole 231, which is convenient for installing or disassembling the bellows structure 100 in the cabinet 230, or taking out the bellows structure 100 from the cabinet 230 for maintenance.

[0048] The bellows structure of the embodiments of the present disclosure has a first connecting member with a preset shape, which saves installation space. The bellows structure can pass in and out of the cabinet mounting hole, and through the cabinet mounting hole, the bellows structure and the inlet pipeline can be disassembled, and the bellows structure can be taken out from the cabinet mounting hole for maintenance. In addition, the first connecting member of the bellows structure can be disassembled from the previous-stage pipeline outside the cabinet, solving the problem that it cannot be disassembled outside the cabinet; the bellows structure is for the use of the gas reduction system, and can realize the quick disassembly of the gas reduction system, achieving the purpose of facilitating maintenance.

[0049] Exemplarily, as Figure 3 shown, in this embodiment, both ends of the fixing plate 121 along its length direction are in a curved shape protruding outward, and the two ends are symmetrical. Both ends of the fixing plate 121 along its width direction are in a planar shape, and the two ends are symmetrical. That is to say, the fixing plate 121 has a notch structure on the relative two sides of the common circular flange in the prior art, thereby adapting to the shape and size of the cabinet mounting hole 231 and saving installation space.

[0050] It should be noted that the preset shape and size of the fixing plate 121 are not specifically limited and can be selected according to actual needs, as long as they match the shape and size of the cabinet mounting hole 231.

[0051] Exemplarily, as Figure 3 shown, the fixing plate 121 is provided with a plurality of threaded holes 121a. Specifically, the plurality of threaded holes 121a are circumferentially spaced along the connection through hole 122. The previous-stage pipeline 210 can be connected to the bellows structure 100 through the matching of the plurality of threaded holes 121a and bolts, facilitating the disassembly of the previous-stage pipeline 210 and the bellows structure 100 from outside the cabinet 230.

[0052] Exemplarily, a sealing member 140 is provided on one side of the first connecting member 120 facing the previous-stage pipeline 210. The sealing member 140 plays a sealing role in the connection between the bellows structure 100 and the previous-stage pipeline 210.

[0053] Exemplarily, the structure of the second connecting member 130 can be the same as that of the first connecting member 120. The second connecting member 130 can also be provided with a plurality of threaded holes, and the threaded holes cooperate with the corresponding bolts to connect the bellows body 110 and the inlet pipeline 240. The specific structure of the second connecting member 130 in this embodiment is not limited, as long as it can have a connecting function to realize the connection between the bellows structure 100 and the inlet pipeline 240. For example, the second connecting member 130 can be a flange or a clamp, etc.

[0054] As Figure 5As shown, another aspect of the embodiments of the present disclosure provides a gas delivery device for a gas reduction system. The gas delivery device includes a pre-stage pipeline 210, a connection structure 220, a bellows structure 100, and an inlet pipeline 240. Among them, the bellows structure 100 adopts the bellows structure 100 described above. The specific structure of the bellows structure 100 has been described in detail above and will not be elaborated here.

[0055] The first end of the pre-stage pipeline 210 is connected to the first connecting member 210 of the bellows structure 100 through the connection structure 220, and the second end of the pre-stage pipeline 210 is used to communicate with a preset gas source.

[0056] The second connecting member 120 of the bellows structure 100 is connected to the first end of the inlet pipeline 240, and the second end of the inlet pipeline 240 is used to connect to the reaction chamber 250.

[0057] Among them, the connection structure is fixed to the outer side wall of the cabinet in the gas reduction system, so that the pre-stage pipeline is located outside the cabinet.

[0058] Specifically, the preset gas source flowing into the vacuum pump 260 sequentially passes through the pre-stage pipeline 210, the bellows structure 100, and the inlet pipeline 240 and enters the reaction chamber 250. The preset gas undergoes relevant chemical reactions in the reaction chamber 250 to remove a certain specific gas and obtain a target gas, and the target gas flows into the vacuum pump 260.

[0059] In the gas delivery device of the embodiments of the present disclosure, while the connection structure realizes the connection between the pre-stage pipeline and the bellows, it also fixes the pre-stage pipeline to the outside of the cabinet. In this way, when maintenance is required, without opening the side door and the front and rear doors, the operator can disassemble the pre-stage pipeline and the bellows from the outside of the cabinet of the gas reduction equipment, and complete the maintenance of the bellows and its seals; the gas reduction equipment does not need to be opened for maintenance, the operation is simple, the risk of damage to gas components is reduced, the efficiency of maintenance and repair is improved, and the maintenance time is saved. Due to the first connecting member of the bellows structure having a preset shape, the installation space is saved, the bellows structure can enter and exit the cabinet installation hole, and the bellows structure and the inlet pipeline can be disassembled through the cabinet installation hole, and the bellows structure can be taken out from the cabinet installation hole for maintenance. In addition, the first connecting member of the bellows structure can be disassembled from the pre-stage pipeline outside the cabinet, solving the problem that it cannot be disassembled outside the cabinet.

[0060] Exemplarily, as Figure 7 shown, the connection structure 220 includes a disk body 221 and a communication hole 222 located in the central area of the disk body 221. The disk body 221 includes a connecting portion 221a close to the communication hole 222 and a fixing portion 221b far from the communication hole.

[0061] The connecting part 221a connects the pre-stage pipeline 210 with the first connecting member 120 of the corrugated pipe structure 100, and the fixing part 221b fixes the disk body 221 to the outer side wall of the cabinet body 230, thereby fixing the pre-stage pipeline 210 to the outside of the cabinet body 230.

[0062] Specifically, as Figure 7 shown, in the embodiment, the shape of the disk body 221 is rectangular, and the shape of the communication hole 222 is circular and located in the central area of the disk body 221. Among them, the fixing part 221b is located on both sides of the disk body 221 along its length direction. The connecting part 221a protrudes from the fixing part 221b, that is to say. The thickness of the connecting part 221a is greater than the thickness of the fixing part 221b. Further specifically, the connecting structure 220 can be a flange.

[0063] It should be noted that the shape of the disk body 221 is not specifically limited in this embodiment, and it can also be circular or square, etc., and can be selected according to the installation dimension space of the cabinet body 230.

[0064] Exemplarily, as Figure 7 shown, the connecting part 221a is provided with a plurality of first threaded holes 223 and a plurality of second threaded holes 224 that are circumferentially spaced and staggered along the circumference of the communication hole 222. The fixing part 221b is provided with a plurality of third threaded holes 225, which can facilitate the disassembly of the pre-stage pipeline 210 and the corrugated pipe structure 100.

[0065] Among them, the first threaded hole 223 is a counterbore, which can provide space for the fixed connection between the pre-stage pipeline 210 and the disk body 221, so that the pre-stage pipeline 210 is fixed more firmly on the disk body 221.

[0066] Exemplarily, the gas delivery device further includes a first bolt 226, a second bolt 227 and a third bolt 228.

[0067] The first bolt 226 sequentially passes through the corresponding first threaded hole 223 and the threaded hole 121a of the corrugated pipe structure 100 from the end of the pre-stage pipeline 210, and fixes the first connecting member 120 of the corrugated pipe structure 100 on the disk body 221 of the connecting structure 220.

[0068] The second bolt 227 sequentially passes through the threaded hole of the corresponding pre-stage pipeline 210 and the second threaded hole 224 from the end of the pre-stage pipeline 210, and fixes the pre-stage pipeline 210 on the disk body 221 of the connecting structure 220. Specifically, in this embodiment, the pre-stage pipeline 210 is fixed to the connecting structure 220 by a flat-bottom caliper.

[0069] The third bolt 228 sequentially passes through the corresponding third threaded hole 225 and the threaded hole of the cabinet body 230 from the end of the pre-stage pipeline 210, and fixes the connecting structure 220 to the outside of the cabinet body 230.

[0070] Exemplarily, in this embodiment, the corrugated pipe structure 100 can be fixedly connected to the inlet pipeline 240 through a flange or a clamp, and the connection method can be selected according to actual needs.

[0071] As Figure 6 shown, another aspect of the embodiments of the present disclosure provides a gas reduction system, including a cabinet 230, a gate valve 280, a gas delivery device, a reaction chamber 250, and a vacuum pump 260. Among them, the gas delivery device is the gas delivery device described above. The specific structural features of the gas delivery device have been described in detail above and will not be elaborated here.

[0072] The first end of the gate valve 280 is used to communicate with a preset gas source, and the second end of the gate valve 280 is connected to the second end of the pre-stage pipeline 210.

[0073] The second end of the inlet pipeline 240 is connected to the gas inlet of the reaction chamber 250, and the gas outlet of the reaction chamber 250 is connected to the vacuum pump 260. Specifically, the gas outlet of the reaction chamber 250 is connected to the vacuum pump through a connecting corrugated pipe 290.

[0074] Among them, a cabinet mounting hole 231 is provided on the top wall of the cabinet 230, and the corrugated pipe structure 100 can enter and exit the cabinet mounting hole 231. The gate valve 280, the pre-stage pipeline 210, and the connecting structure 220 are located outside the cabinet 230, and the corrugated pipe structure 100, the inlet pipeline 240, the reaction chamber 250, and the vacuum pump 260 are located inside the cabinet 230.

[0075] Specifically, as Figures 2 to 8 shown, the reaction chamber 250 includes a reaction cavity 251, a gas inlet 252, an ion injection port 253, and a monitoring port 254. The reaction chamber 250 provides a cavity. The gas coming from the direction of the gate valve 280 is the gas of the client. After passing through the pre-stage pipeline 210, the connecting structure 220, the corrugated pipe structure 100, and the inlet pipeline 240, it enters the gas inlet 252 of the reaction chamber 250 and reaches the reaction cavity 251. The ion injection port 253 injects a certain kind of ion, which also reaches the reaction cavity 251, and mixes with the gas coming from the direction of the gate valve 280 described above to carry out relevant chemical reactions. As the vacuum pump 260 operates, the gas will be sucked into the vacuum pump 260 and discharged after being compressed by the vacuum pump 260.

[0076] The connecting corrugated pipe 290 is installed between the vacuum pump 260 and the reaction chamber 250. The vacuum pump 260 will vibrate during operation, and the connecting corrugated pipe 290 mainly plays a role in connection and vibration absorption.

[0077] The inlet pipeline 240 is connected to the reaction chamber 250 and the bellows structure 100. There is an air injection hole 241 on the inlet pipeline 240, and high-purity nitrogen is injected through the air injection hole 241, which serves to purge the inlet pipeline 240, the reaction chamber 250, the connecting bellows 290, and the vacuum pump 260.

[0078] The bellows structure 100 is connected to the inlet pipeline 240 and the connecting structure 220, playing the role of connection and vibration absorption.

[0079] When the bellows structure 100 needs to be disassembled, it is necessary to remove the gate valve 280 → the pre-stage pipeline 210 → the connecting structure 220 → the bellows structure 100 from the outside of the cabinet 230. When disassembling the pre-stage pipeline 210 and the connecting structure 220, remove the second bolt to disassemble the flat caliper on the pre-stage pipeline 210, so that the pre-stage pipeline 210 and the connecting structure 220 are separated; remove the first bolt to separate the first connecting member 120 of the connecting structure 220 and the bellows structure 100. However, at this time, the connecting structure 220 and the bellows structure 100 still cannot be removed. It is necessary to remove the third bolt to separate the connecting structure 220 and the cabinet 230. Through the cabinet mounting hole 231 on the cabinet 230, remove the second connecting member 130 at the bottom of the bellows structure 100, so that the bellows structure 100 and the inlet pipeline 240 are separated, and the replacement and maintenance operations of the bellows structure 100 can be carried out.

[0080] In the gas reduction system of the embodiments of the present disclosure, when maintenance is required, without the need for the operator to open the side door and the front and rear doors, the pre-stage pipeline and the bellows can be disassembled from the outside of the cabinet of the gas reduction system, and the maintenance of the bellows and its seals can be completed; the gas reduction equipment does not require door opening for maintenance, the operation is simple, the risk of damage to gas components is reduced, the efficiency of maintenance and repair is improved, and the maintenance time is saved. The first connecting member of the bellows structure has a preset shape, saving installation space. The bellows structure can enter and exit the cabinet mounting hole, and through the cabinet mounting hole, the bellows structure and the inlet pipeline can be disassembled, and the bellows structure can be taken out from the cabinet mounting hole for maintenance. In addition, the first connecting member of the bellows structure can be disassembled from the pre-stage pipeline through the outside of the cabinet, solving the problem that it cannot be disassembled outside the cabinet; the bellows structure is for the use of the gas reduction system, and can realize the rapid disassembly of the gas reduction system, achieving the purpose of facilitating maintenance.

[0081] It can be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principles of the embodiments of the present disclosure. However, the embodiments of the present disclosure are not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the embodiments of the present disclosure, and these modifications and improvements are also regarded as the protection scope of the embodiments of the present disclosure.

Claims

1. A bellows structure for a gas abatement system, characterized in that: The bellows structure comprises a bellows body and a first connecting member and a second connecting member respectively arranged at two ends of the bellows body; The first connecting member is used to connect the bellows body and the front-stage pipeline; The second connecting member is used to connect the bellows body to the inlet pipeline; The first connecting member includes a fixing plate and a connecting through hole located in the central area of ​​the fixing plate; wherein, The fixing plate has a preset shape, and the preset shape is used to match the shape of a cabinet installation hole in the gas abatement system so that the bellows structure can enter and exit the cabinet installation hole.

2. The bellows structure according to claim 1, characterized in that: The two ends of the fixed disk along its length direction are in the shape of curved surfaces protruding outwards, and the two ends are symmetrical; the two ends of the fixed disk along its width direction are in the shape of planes, and the two ends are symmetrical.

3. The bellows structure according to claim 1, characterized in that: The fixing plate is provided with a plurality of threaded holes.

4. The bellows structure according to any one of claims 1 to 3, characterized in that: A sealing member is provided on a side of the first connecting member facing the front-stage pipeline.

5. The bellows structure according to any one of claims 1 to 3, characterized in that: The first connecting member and the second connecting member are flanges.

6. A gas delivery device for a gas abatement system, characterized in that: The gas delivery device comprises a front-stage pipeline, a connecting structure, a bellows structure and an inlet pipeline, wherein the bellows structure adopts the bellows structure according to any one of claims 1 to 5; The first end of the front-stage pipeline is connected to the first connecting piece of the bellows structure through the connecting structure, and the second end of the front-stage pipeline is used to communicate with a preset gas source; The second connecting piece of the bellows structure is connected to the first end of the inlet pipeline, and the second end of the inlet pipeline is used to connect to the reaction chamber; wherein, The connection structure is fixed to the outer side wall of the cabinet in the gas abatement system so that the front-stage pipeline is located outside the cabinet.

7. The gas delivery device according to claim 6, characterized in that: The connection structure includes a disc body and a communication hole located in the central area of ​​the disc body, and the disc body includes a connection portion close to the communication hole and a fixing portion far away from the communication hole; The connecting portion connects the front-stage pipeline with the first connecting piece of the bellows structure, and the fixing portion fixes the disk body to the outer side wall of the cabinet body.

8. The gas delivery device according to claim 7, characterized in that: The connecting portion is provided with a plurality of first threaded holes and a plurality of second threaded holes which are distributed in an interlaced manner along the circumference of the connecting hole; The fixing portion is provided with a plurality of third threaded holes.

9. The gas delivery device according to claim 8, characterized in that: Also includes a first bolt, a second bolt and a third bolt; The first bolt passes through the first threaded hole corresponding to the first bolt and the threaded hole of the bellows structure in sequence from the front-stage pipeline end; The second bolt passes through the threaded hole of the front-stage pipeline and the second threaded hole corresponding to the front-stage pipeline in sequence from the front-stage pipeline end; The third bolt passes through the corresponding third threaded hole and the threaded hole of the cabinet in sequence from the front-stage pipeline end.

10. A gas abatement system, characterized in that: It comprises a cabinet, a gate valve, a gas delivery device, a reaction chamber and a vacuum pump, wherein the gas delivery device is a gas delivery device according to any one of claims 6 to 9; wherein, The first end of the gate valve is used to communicate with a preset gas source, and the second end of the gate valve is connected to the second end of the front-stage pipeline; The second end of the inlet pipeline is connected to the gas inlet of the reaction chamber, and the gas outlet of the reaction chamber is connected to the vacuum pump; wherein, The cabinet installation hole is provided on the top wall of the cabinet, and the bellows structure can enter and exit the cabinet installation hole.

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