Three-axis detection device for flow resistance of spray plate

Abstract

The utility model discloses a three-axis detection device for flow resistance of a spray plate, which comprises a transverse movement module, a longitudinal movement module, a vertical movement module and a flow resistance detection air nozzle assembly connected to a moving end of the vertical movement module. The transverse movement module controls the longitudinal movement module to move in the first direction, the longitudinal movement module controls the vertical movement module to move in the second direction, and the vertical movement module controls the flow resistance detection air nozzle assembly to move in the third direction. According to the three-axis detection device for the flow resistance of the spraying plate, the flow resistance detection air nozzle assembly is controlled to accurately and automatically move to the position of an air hole to be detected through the transverse movement module, the longitudinal movement module and the vertical movement module which are perpendicular to one another, and the air hole is quickly, accurately and efficiently found and detected and automatic flow resistance detection is completed in combination with a positioning piece; and compared with a manual mode, the efficiency is higher, and the detection result is more accurate.

Description

Technical Field

[0001] The utility model relates to the technical field of spray equipment detection, in particular to a three-axis detection device for the flow resistance of a spray plate. Background Art

[0002] Physical vapor deposition technology is a new technology that uses physical and chemical changes occurring in the gas phase to change the surface composition of a workpiece and form a metal or compound coating with specific optical and electrical properties on the surface of the workpiece. It is widely used in technical fields such as chip manufacturing.

[0003] A spray plate or a spray disk is a key component in semiconductor process equipment, which is used to evenly spray process gas onto the surface of a workpiece. The size and uniformity of its pores will affect the coating thickness. Due to the processing process error of the pores of the spray plate or the spray disk, there is a deviation between the flow resistance of the pores and the theoretical value, and generally, the flow resistance of all pores needs to be detected. In the prior art, the flow resistance detection of pores is generally carried out manually. The flow resistance value is reflected by detecting the pressure value and flow rate of the gas flowing through a certain pore with a flow resistance detection device. During the detection, the detection nozzle is manually pressed on the pore, and the detection value is read after the gas flow is stable.

[0004] However, the manual detection method has the following disadvantages: it is very difficult to find a specific pore among numerous pores on the spray plate for detection. Manually pressing the nozzle onto the pore is likely to cause inaccurate detection data due to deviation or angular inclination during pressing. And generally, one person needs to press the nozzle and another person needs to record the detection data, resulting in low detection efficiency and low accuracy. Summary of the Utility Model

[0005] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a three-axis detection device for the flow resistance of a spray plate to solve the technical problems of low detection efficiency and poor accuracy in the existing manual detection of the flow resistance of the pores of the spray plate.

[0006] To achieve the above purpose, the utility model adopts the following technical solutions:

[0007] An embodiment of the utility model provides a three-axis detection device for the flow resistance of a spray plate, which includes:

[0008] A transverse motion module, the mobile end of the transverse motion module can reciprocate along a first direction;

[0009] A longitudinal motion module, the longitudinal motion module is connected to the mobile end of the transverse motion module, and the mobile end of the longitudinal motion module can reciprocate along a second direction;

[0010] A vertical motion module, the vertical motion module is connected to the mobile end of the longitudinal motion module, and the mobile end of the vertical motion module can reciprocate along a third direction;

[0011] A flow resistance detection nozzle assembly, the flow resistance detection nozzle assembly being connected to the mobile end of the vertical motion module, wherein any two of the first direction, the second direction, and the third direction are perpendicular to each other.

[0012] Wherein, the transverse motion module, the longitudinal motion module, and the vertical motion module have the same structure, and each includes: a driving unit, a speed reduction unit connected to the output end of the driving unit, a lead screw assembly connected to the output end of the speed reduction unit, and a sliding member connected to the lead screw assembly.

[0013] Wherein, the driving unit is a servo motor.

[0014] Wherein, the lead screw assembly is a ball screw module.

[0015] Wherein, the flow resistance detection nozzle assembly includes: an air pipe, a gasket provided at the detection end pipe orifice of the air pipe, and a flow resistance detector connected to the air pipe.

[0016] Wherein, the flow resistance detection nozzle assembly further includes a connection block connected to the outer wall of the air pipe, and at least one buffer unit connected to the top of the connection block, and the buffer unit can provide an elastic buffer force in the same direction as the third direction.

[0017] Wherein, the buffer unit includes: a guide rod with the lower end connected to the connection block, a linear bearing and an elastic member passing through the guide rod, one end of the elastic member abuts against the connection block, the other end abuts against the linear bearing, and the linear bearing is also connected to the mobile end of the vertical motion module.

[0018] Wherein, the three-axis detection device for the flow resistance of the spray plate further includes a positioning member, and the positioning member is arranged below the vertical motion module along the third direction.

[0019] Wherein, at least one positioning groove is provided on the positioning member, and the bottom of the positioning groove is an open structure.

[0020] Wherein, the positioning groove is a plurality of annular platforms opened along the same axis, and the diameters and heights of the plurality of annular platforms decrease sequentially from the side edge of the positioning member towards the axis direction.

[0021] The three-axis detection device for the flow resistance of the spray plate of the present utility model controls the flow resistance detection nozzle assembly to accurately and automatically move to the position of the air hole to be detected through three mutually perpendicular transverse motion modules, longitudinal motion modules, and vertical motion modules, and combines with the positioning member to quickly, accurately, and efficiently find the detection air hole. Compared with the manual method, its efficiency is higher and the detection result is more accurate.

[0022] The above description is only an overview of the technical solution of the present utility model. In order to understand the technical means of the present utility model more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present utility model more obvious and understandable, the following preferred embodiments are specifically illustrated as follows. Brief Description of the Drawings

[0023] Figure 1 and Figure 2 are overall structural schematic diagrams of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model from different perspectives;

[0024] Figure 3 are partial structural schematic diagrams of the three-axis motion mechanism of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model;

[0025] Figure 4 is Figure 3 the enlarged structural schematic diagram of the partial A in ;

[0026] Figure 5 are partial structural schematic diagrams of the lateral motion module of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model;

[0027] Figure 6 are partial structural schematic diagrams of the longitudinal motion module of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model;

[0028] Figure 7 are partial structural schematic diagrams of the vertical motion module of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model;

[0029] Figure 8 are partial structural schematic diagrams of the flow resistance detection nozzle assembly of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model;

[0030] Figure 9 are partial structural schematic diagrams of the positioning mechanism of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model;

[0031] Figure 10 are partial structural schematic diagrams of the positioning member of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model;

[0032] Figure 11 are schematic diagrams of three spray plate structures adapted to the positioning member of the three-axis detection device for the flow resistance of the spray plate according to the embodiment of the present utility model;

[0033] Description of the Reference Numerals:

[0034] Spray Plate Flow Resistance Three-Axis Detection Device 100, Transverse Movement Module 1, Longitudinal Movement Module 2, Vertical Movement Module 3, Flow Resistance Detection Nozzle Assembly 4, Positioning Member 5, Mounting Plate 6, Spray Plate 10 (20, 30), Transverse Drive Unit 11, Reduction Unit 12, Lead Screw Assembly 13, Sliding Member 14, Longitudinal Drive Unit 21, Reduction Unit 22, Lead Screw Assembly 23, Sliding Member 24, Vertical Drive Unit 31, Reduction Unit 32, Lead Screw Assembly 33, Sliding Member 34, Connection Plate 35, First Position Detection Sensor 36, Second Position Detection Sensor 37, Flap 38, Air Pipe 41, Sealing Gasket 42, Connector 43, Connection Block 44, Buffer Unit 45, Buffer Unit 46, Linear Bearing 451, Guide Rod 452, Elastic Member 453, Body 51, Bottom 52, Positioning Groove 53, Middle Positioning Groove 54, Inner Side Positioning Groove 55. Detailed Implementation Manner

[0035] In order to make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with the accompanying drawings and specific implementation manners.

[0036] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present utility model.

[0037] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "resin", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. are the orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present utility model.

[0038] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality" means two or more unless otherwise specifically defined.

[0039] In the present utility model, unless otherwise clearly defined or limited, terms such as "installation", "connection", "linkage", "fixation" shall be understood in a broad sense. For example, it may be a connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly defined or limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under" and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0041] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0042] Please refer to Figures 1 to 11 , this embodiment provides a three-axis detection device 100 for the flow resistance of a spray plate, which includes a three-axis motion mechanism and a positioning mechanism. The three-axis motion mechanism is used to control the movement of the flow resistance detection nozzle assembly in a three-dimensional space, and the positioning mechanism is used to fixedly position the spray plate or spray disc to be detected. The three-axis motion mechanism includes:

[0043] A transverse motion module 1, the mobile end of the transverse motion module 1 can reciprocate along a first direction;

[0044] A longitudinal motion module 2, the longitudinal motion module 2 is connected to the mobile end of the transverse motion module 1, and the mobile end of the longitudinal motion module 2 can reciprocate along a second direction;

[0045] The vertical motion module 3 is connected to the mobile end of the longitudinal motion module 2, and the mobile end of the vertical motion module 3 can reciprocate along the third direction;

[0046] The flow resistance detection nozzle assembly 4 is connected to the mobile end of the vertical motion module 3; wherein, any two of the first direction, the second direction, and the third direction are perpendicular to each other.

[0047] The spray plate flow resistance three-axis detection device 100 of this embodiment omits the controller part, and the controller is a CPU, GPU, NPU, or PLC, etc. Its storage unit stores program instructions. When the controller executes its control instructions, it controls the above-mentioned transverse motion module 1, longitudinal motion module 2, vertical motion module 3, and flow resistance detection nozzle assembly 4 to perform movement and flow resistance detection actions according to a preset logic, so as to automatically and quickly detect the flow resistance of the spray plate 10.

[0048] After the spray plate 10 to be detected is placed at the set position, the controller controls the above-mentioned transverse motion module 1, longitudinal motion module 2, vertical motion module 3, and flow resistance detection nozzle assembly 4 to complete the flow resistance detection of all air holes, and stores the detection data in the memory and displays it to the user in a visual form. Compared with the existing manual detection method, its detection efficiency is higher and the detection result is more accurate.

[0049] It should be noted that the first direction, the second direction, and the third direction in this embodiment are all relative directions, aiming to illustrate the relative motion relationship among the above-mentioned transverse motion module 1, longitudinal motion module 2, and vertical motion module 3, and do not limit the directions in the actual application environment. In other words, the above-mentioned transverse motion module 1, longitudinal motion module 2, and vertical motion module 3 can be adjusted to the actual orientation according to the position and direction of the spray plate 10 to be detected. In this embodiment, only one orientation is used for the structural description. For the sake of simplicity of description, the first direction is set as the X-axis direction of the three-dimensional coordinate system, the second direction is set as the Y-axis direction of the three-dimensional coordinate system, and the third direction is set as the Z-axis direction of the three-dimensional coordinate system.

[0050] Please refer to again Figure 5, the lateral movement module 1 includes: a lateral drive unit 11, a reduction unit 12 connected to the output end of the lateral drive unit 11, a lead screw assembly 13 connected to the output end of the reduction unit 12, and a slider 14 connected to the screw block of the lead screw assembly 13. After the lateral drive unit 11 is started, it drives the reduction unit 12 to rotate, and synchronously drives the lead screw assembly 13 to rotate, so that the slider 14 follows and performs a linear reciprocating movement. In this embodiment, the lateral drive unit 11 is a servo motor, the reduction unit 12 is a speed reducer, and the lead screw assembly 13 is a ball screw module. The servo motor can accurately run to the set stroke position according to the program instructions output by the frequency converter and the control card executing the controller, and its control is simple and efficient. The speed reducer is used to reduce the rotation speed of the servo motor to match that of the lead screw assembly 13.

[0051] Please refer to again Figure 6 , the longitudinal movement module 2 includes: a longitudinal drive unit 21, a reduction unit 22 connected to the output end of the longitudinal drive unit 21, a lead screw assembly 23 connected to the output end of the reduction unit 22, and a slider 24 connected to the screw block of the lead screw assembly 23. After the longitudinal drive unit 21 is started, it drives the reduction unit 22 to rotate, and synchronously drives the lead screw assembly 23 to rotate, so that the slider 24 follows and performs a linear reciprocating movement. In this embodiment, the longitudinal drive unit 21 is a servo motor, the reduction unit 22 is a speed reducer, and the lead screw assembly 23 is a ball screw module. The servo motor can accurately run to the set stroke position according to the program instructions output by the frequency converter and the control card executing the controller, and its control is simple and efficient. The speed reducer is used to reduce the rotation speed of the servo motor to match that of the lead screw assembly 23.

[0052] Please refer to again Figure 7 , the vertical movement module 3 includes: a vertical drive unit 31, a reduction unit 32 connected to the output end of the vertical drive unit 31, a lead screw assembly 33 connected to the output end of the reduction unit 32, and a slider 34 connected to the screw block of the lead screw assembly 33. After the vertical drive unit 31 is started, it drives the reduction unit 32 to rotate, and synchronously drives the lead screw assembly 33 to rotate, so that the slider 34 follows and performs a linear reciprocating movement. In this embodiment, the vertical drive unit 31 is a servo motor, the reduction unit 32 is a speed reducer, and the lead screw assembly 33 is a ball screw module. The servo motor can accurately run to the set stroke position according to the program instructions output by the frequency converter and the control card executing the controller, and its control is simple and efficient. The speed reducer is used to reduce the rotation speed of the servo motor to match that of the lead screw assembly 33.

[0053] Please refer to again Figure 3 and Figure 4, in order to prevent the lateral movement module 1, the longitudinal movement module 2 and the vertical movement module 3 from moving beyond the set stroke range, position detection sensor units are respectively provided on the lateral movement module 1, the longitudinal movement module 2 and the vertical movement module 3. Taking the position detection sensor unit on the vertical movement unit 3 as an example, it includes: a baffle 38 connected to the sliding member 34, a first position detection sensor 36 and a second position detection sensor 37 connected to the outer casing of the lead screw assembly 33. The first position detection sensor 36 and the second position detection sensor 37 are respectively arranged at positions close to both ends in the length direction of the lead screw assembly 33, and are used to detect the maximum moving stroke of the vertical movement module 3 and transmit the detection signal to the controller to execute set control actions, such as controlling the servo motor to stop. The first position detection sensor 36 and the second position detection sensor 37 can be opposed sensors such as optoelectronic sensors.

[0054] Please refer to again Figure 8 , the flow resistance detection nozzle assembly 4 includes: an air pipe 41, a gasket 42 arranged at the detection end nozzle of the air pipe 41, and a flow resistance detector (not shown in the figure) connected to the air pipe 41. The flow resistance detector is connected to a connector 43 at the input end of the air pipe 41 and is used to detect the flow rate and air pressure value of the gas output from the air pipe 41. The gasket 42 is an annular rubber pad corresponding to the nozzle of the air pipe 41, and is used to improve the airtightness between the detection end of the air pipe 41 and the edge of the air hole of the spray plate 10 to prevent air leakage from affecting the detection accuracy. It can be understood that the shape of the nozzle at the detection end of the air pipe 41 is adapted to the contour of the air hole to be detected. In this embodiment, the nozzle is circular.

[0055] Furthermore, the flow resistance detection nozzle assembly 4 further includes a connection block 44 connected to the outer wall of the air pipe 41, and at least one buffer unit 45 connected to the top of the connection block 44. In this embodiment, two buffer units 45 and 46 are taken as examples for structural description. The buffer units 45 and 46 can provide an elastic buffer force for the air pipe 41 in the same direction as the third direction. Since the vertical movement module 3 is controlled by the servo motor to act, when it drives the flow resistance detection nozzle assembly 4 to approach the spray plate 10, inertial movement will occur. In order to prevent damage to the spray plate 10 caused by inertia, a buffer unit 45 is arranged between the air pipe 41 and the vertical movement module 3 for buffering treatment to reduce the impact of inertia on the spray plate 10.

[0056] Specifically, the buffer unit 45 includes a guide rod 452 with its lower end connected to the connection block 44, a linear bearing 451 and an elastic member 453 passing through the guide rod 452. One end of the elastic member 453 abuts against the connection block 44, and the other end abuts against the linear bearing 451. The linear bearing 451 is also connected to the moving end (i.e., the sliding member 34) of the vertical motion unit 3. In this embodiment, a connecting plate 35 is further provided between the sliding member 34 and the buffer unit 45. The connecting plate 35 is an L-shaped plate, and the linear bearing 451 is connected to the sliding member 34 through this connecting plate 35. The elastic member 453 is a spring. The top end of the guide rod 452 is fixedly connected to the linear bearing 451, and the outer wall of the linear bearing 451 is connected to the sliding member 34 through the connecting plate 35. When the detection end of the air pipe 41 approaches the surface of the spray plate 10, due to its inertia, the air pipe 41 continues to descend. At this time, the elastic member 453 is compressed, thereby absorbing the kinetic energy of the sliding member 34 driven by the servo motor to continue moving forward, so as to reduce the impact damage to the spray plate 10.

[0057] In this embodiment, the buffer unit 45 and the buffer unit 46 are symmetrically arranged left and right along the length direction of the air pipe 41. In another embodiment, the linear bearing 451 can also be replaced by a sleeve member. At this time, there is a certain frictional force between the sleeve member and the guide rod 452, and it can also achieve the buffering function for the air pipe 41.

[0058] As Figure 1 and Figure 2 shown, the spray plate flow resistance triaxial detection device 100 further includes a positioning member 5, and the positioning member 5 is arranged below (or in front of) the vertical motion module 3 along the third direction.

[0059] Specifically, as Figures 9 to 11 shown, at least one positioning groove 53 is provided on the positioning member 5, and the bottom 52 of the positioning groove 53 is an open structure. The positioning member 5 is supported on the mounting plate 6, and the outside of the mounting plate 6 is also connected to the transverse motion module 1.

[0060] The positioning member 5 includes: a body 51, a positioning groove 53 opened in the middle of the body 51, and the bottom 52 of the positioning groove 53 is an open structure. In order to be compatible with more different structures or models of spray plates, a middle positioning groove 54 is further opened inside the positioning groove 53, and an inner positioning groove 55 is opened in the middle positioning groove 54. The centers of the positioning groove 53, the middle positioning groove 54 and the inner positioning groove 55 coincide, so as to correspond to the starting position of the triaxial motion mechanism. The groove shapes of the positioning groove 53, the middle positioning groove 54 and the inner positioning groove 55 correspond to the outer shape structure of the spray plate 10 to be detected, such as a circular groove or a rectangular groove, etc.

[0061] In this embodiment, the positioning groove 53, the middle positioning groove 54 and the inner positioning groove 55 are all circular grooves. The positioning groove 53, the middle positioning groove 54 and the inner positioning groove 55 are a plurality of annular platforms opened along the same axis. The diameters and heights of the plurality of annular platforms decrease in sequence from the side edge of the positioning member towards the axis direction. Positioning pins or positioning keys can also be added to the positioning surfaces of the positioning groove 53, the middle positioning groove 54 and the inner positioning groove 55 for placing the corresponding spray plates in alignment. Among them, the annular structure of the positioning groove 53 can be composed of a plurality of limiting portions protruding from the top surface of the body 51. As Figure 11 For the three types of spray plates described above, the first type of spray plate 10 is placed on the positioning groove 54, the second type of spray plate 20 is placed on the inner positioning groove 55, and the third type of spray plate 30 is placed on the middle positioning groove 54.

[0062] The spray plate flow resistance three-axis detection device 100 of this embodiment controls the flow resistance detection nozzle assembly 4 to accurately and automatically move to the position of the air hole to be detected through three mutually perpendicular transverse movement modules 1, longitudinal movement modules 2 and vertical movement modules 3, and combines with the positioning member to quickly, accurately and efficiently find the detection air hole and detect the flow resistance. Compared with the manual method, its efficiency is higher and the detection result is more accurate.

[0063] The above only uses embodiments to further illustrate the technical content of the present invention to make it easier for readers to understand, but it does not mean that the implementation mode of the present invention is limited to this. Any technical extension or re-creation made according to the present invention is protected by the present invention. The protection scope of the present invention is subject to the claims.

Claims

1. A three-axis detection device for flow resistance of a shower plate, characterized in that: include: A lateral motion module, wherein a moving end of the lateral motion module can reciprocate along a first direction; A longitudinal motion module, the longitudinal motion module is connected to the moving end of the transverse motion module, and the moving end of the longitudinal motion module can reciprocate along the second direction; A vertical motion module, the vertical motion module is connected to the moving end of the longitudinal motion module, and the moving end of the vertical motion module can reciprocate along the third direction; A flow resistance detection air nozzle assembly is connected to the moving end of the vertical motion module, wherein any two of the first direction, the second direction and the third direction are perpendicular to each other.

2. The three-axis detection device for flow resistance of a shower plate according to claim 1, characterized in that: The lateral motion module, the longitudinal motion module and the vertical motion module have the same structure, and all include: a driving unit, a reduction unit connected to the output end of the driving unit, and a screw assembly connected to the output end of the reduction unit.

3. The three-axis detection device for flow resistance of a shower plate according to claim 2, characterized in that: The driving unit is a servo motor.

4. The three-axis detection device for flow resistance of a shower plate according to claim 2, characterized in that: The screw rod assembly is a ball screw module.

5. The three-axis detection device for flow resistance of a shower plate according to claim 1, characterized in that: The flow resistance detection air nozzle assembly comprises: an air pipe, a sealing pad arranged at the detection end pipe opening of the air pipe, and a flow resistance detector connected to the air pipe.

6. The three-axis detection device for flow resistance of a shower plate according to claim 5, characterized in that: The flow resistance detection air nozzle assembly also includes a connection block connected to the outer wall of the air pipe, and at least one buffer unit connected to the top of the connection block, and the buffer unit can provide the air pipe with an elastic buffer force in the same direction as the third direction.

7. The three-axis detection device for flow resistance of a shower plate according to claim 6, characterized in that: The buffer unit includes: a guide rod whose lower end is connected to the connecting block, a linear bearing and an elastic member passing through the guide rod, one end of the elastic member abuts against the connecting block, and the other end abuts against the linear bearing, and the linear bearing is also connected to the moving end of the vertical motion module.

8. The three-axis detection device for flow resistance of a shower plate according to any one of claims 1 to 7, characterized in that: The three-axis detection device for flow resistance of the spray plate further comprises a positioning member, and the positioning member is arranged below the vertical motion module along the third direction.

9. The three-axis detection device for flow resistance of a shower plate according to claim 8, characterized in that: The positioning member is provided with at least one positioning groove, and the bottom of the positioning groove is an open structure.

10. The three-axis detection device for flow resistance of a shower plate according to claim 9, characterized in that: The positioning grooves are a plurality of annular platforms opened along the same axis, and the diameters and heights of the plurality of annular platforms decrease in sequence from the side edge of the positioning member toward the axis.

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