Impedance matcher and plasma generating device

Abstract

The utility model discloses an impedance matcher and a plasma generating device, and relates to the technical field of electrical control. Wherein the impedance matcher is provided with a signal access end and a load access end, and the impedance matcher comprises a main control circuit, a sampling circuit and an adjustable impedance matching device; wherein the input end of the sampling circuit is electrically connected with the signal access end and the load access end, the output end of the sampling circuit is electrically connected with the main control circuit, and the sampling circuit is used for collecting an electric signal and feeding back the electric signal to the main control circuit; the input end of the adjustable impedance matching device is electrically connected with the signal access end, the output end of the adjustable impedance matching device is electrically connected with the load access end, and the adjustable impedance matching device is used for adjusting the impedance matching relation between the signal source and the load according to the control signal output by the main control circuit. The utility model aims to improve the stability and accuracy of the impedance matcher.

Description

Technical Field

[0001] The utility model relates to the technical field of electrical control, in particular to an impedance matcher and a plasma generating device. Background Art

[0002] The architecture of the overall RF plasma system includes an RF power supply, a matcher, and a load. The RF power supply outputs a power signal to the matcher, and the RF power supply outputs the power signal to the load after impedance matching through an impedance matcher. The existing matcher mainly includes a controller, a motor, and a variable reactance. The controller calculates the position of the variable reactance to be adjusted based on the information received from the outside, and controls the motor to adjust the position of the variable reactance. However, the existing matcher has a poor ability to dynamically adapt to system changes and external interference, and cannot effectively form a closed-loop control, and is difficult to adapt to control scenarios that require high stability and precision. Utility Model Content

[0003] The main purpose of the utility model is to provide an impedance matcher, aiming to improve the stability and accuracy of the impedance matcher.

[0004] To achieve the above-mentioned purpose, the utility model provides an impedance matcher, which is provided with a signal access terminal and a load access terminal, and comprises a main control circuit, a sampling circuit, and an adjustable impedance matching device;

[0005] The input end of the sampling circuit is electrically connected to the signal access end and the load access end, the output end of the sampling circuit is electrically connected to the main control circuit, and the sampling circuit is used to collect electrical signals and feed them back to the main control circuit;

[0006] The input end of the adjustable impedance matching device is electrically connected to the signal access end, the output end of the adjustable impedance matching device is electrically connected to the load access end, and the adjustable impedance matching device is used to adjust the impedance matching relationship between the signal source and the load according to the control signal output by the main control circuit.

[0007] In one embodiment, the sampling circuit includes:

[0008] a first current sampling circuit, wherein an input end of the first current sampling circuit is electrically connected to the signal access end, and an output end of the first current sampling circuit is electrically connected to the main control circuit; the first current sampling circuit is used to collect a current signal at the signal access end;

[0009] a first voltage sampling circuit, wherein an input end of the first voltage sampling circuit is electrically connected to the signal access end, and an output end of the first voltage sampling circuit is electrically connected to the main control circuit; the first voltage sampling circuit is used to collect a voltage signal at the signal access end;

[0010] a second current sampling circuit, wherein the input end of the second current sampling circuit is electrically connected to the load access end, and the output end of the second current sampling circuit is electrically connected to the main control circuit; the second current sampling circuit is used to collect the current signal of the load access end;

[0011] A second voltage sampling circuit, wherein the input end of the second voltage sampling circuit is electrically connected to the load access end, and the output end of the second voltage sampling circuit is electrically connected to the main control circuit; the second voltage sampling circuit is used to collect the voltage signal of the load access end.

[0012] In one embodiment, the first current sampling circuit includes a first resistor, a second resistor, a third resistor, a fourth resistor, a fifth resistor, and a first operational amplifier; the second current sampling circuit includes a sixth resistor, a seventh resistor, an eighth resistor, a ninth resistor, a tenth resistor, and a second operational amplifier;

[0013] Wherein, the first end of the first resistor is electrically connected to the signal access end, and the second end of the first resistor is grounded; the first end of the second resistor is electrically connected to the first end of the first resistor, and the second end of the second resistor is electrically connected to the first end of the third resistor and the positive phase input end of the first operational amplifier; the second end of the third resistor is grounded; the first end of the fourth resistor is electrically connected to the second end of the first resistor, and the second end of the fourth resistor is electrically connected to the first end of the fifth resistor and the inverting input end of the first operational amplifier; the second end of the fifth resistor is electrically connected to the output end of the first operational amplifier and the main control circuit; the first end of the sixth resistor is electrically connected to the load access end, and the second end of the sixth resistor is grounded; the first end of the seventh resistor is electrically connected to the first end of the sixth resistor, and the second end of the seventh resistor is electrically connected to the first end of the eighth resistor and the positive phase input end of the second operational amplifier; the second end of the eighth resistor is grounded; the first end of the ninth resistor is electrically connected to the second end of the sixth resistor, and the second end of the ninth resistor is electrically connected to the first end of the tenth resistor and the inverting input end of the second operational amplifier; the second end of the tenth resistor is electrically connected to the output end of the second operational amplifier and the main control circuit.

[0014] In one embodiment, the first voltage sampling circuit includes an eleventh resistor, a twelfth resistor, a thirteenth resistor, a fourteenth resistor, a third operational amplifier, a first capacitor, and a second capacitor; the second voltage sampling circuit includes a fifteenth resistor, a sixteenth resistor, a seventeenth resistor, an eighteenth resistor, a fourth operational amplifier, a third capacitor, and a fourth capacitor;

[0015] Wherein, the first end of the eleventh resistor is electrically connected to the signal access end, the second end of the eleventh resistor is electrically connected to the first end of the twelfth resistor and the first end of the thirteenth resistor; the second end of the twelfth resistor is grounded; the second end of the thirteenth resistor is electrically connected to the first end of the first capacitor and the non-inverting input end of the third operational amplifier; the second end of the first capacitor is grounded; the inverting input end of the third operational amplifier is electrically connected to the output end of the third operational amplifier and the first end of the fourteenth resistor; the second end of the fourteenth resistor is electrically connected to the first end of the second capacitor and the main control circuit; the second end of the second capacitor is connected to the ground; the first end of the fifteenth resistor is electrically connected to the load access end, the second end of the fifteenth resistor is electrically connected to the first end of the sixteenth resistor and the first end of the seventeenth resistor; the second end of the sixteenth resistor is grounded; the second end of the seventeenth resistor is electrically connected to the first end of the third capacitor and the non-inverting input end of the fourth operational amplifier; the second end of the third capacitor is grounded; the inverting input end of the fourth operational amplifier is electrically connected to the output end of the fourth operational amplifier and the first end of the eighteenth resistor; the second end of the eighteenth resistor is electrically connected to the first end of the fourth capacitor and the main control circuit; the second end of the fourth capacitor is grounded.

[0016] In one embodiment, the adjustable impedance matching device includes a first adjustable capacitor, a second adjustable capacitor, an inductor, a first driving member, a second driving member and a driving module; the first adjustable capacitor is drivingly connected to the first driving member, and the second adjustable capacitor is drivingly connected to the second driving member; the driving module is electrically connected to the first driving member and the second driving member respectively, and the driving module is electrically connected to the main control circuit;

[0017] The main control circuit is used to control the driving module to drive the first driving element and / or the second driving element to operate according to the electrical signal fed back by the sampling circuit, so as to adjust the capacitance of the first adjustable capacitor and / or the capacitance of the second adjustable capacitor;

[0018] Among them, the first end of the first adjustable capacitor is electrically connected to the signal access end and the inductor, the second end of the first adjustable capacitor is grounded, and the first adjustable capacitor is drivingly connected to the first driving member; the second end of the inductor is electrically connected to the first end of the second adjustable capacitor; the second end of the second adjustable capacitor is electrically connected to the load access end, and the second adjustable capacitor is drivingly connected to the second driving member.

[0019] In one embodiment, the driving module includes:

[0020] a first drive circuit, wherein an input end of the first drive circuit is electrically connected to an output end of the main control circuit, the first drive circuit is electrically connected to the first drive element, and the first drive circuit is used to control the action of the first drive element according to a first drive signal output by the main control circuit;

[0021] A second drive circuit, wherein the input end of the second drive circuit is electrically connected to the output end of the main control circuit, the second drive circuit is electrically connected to the second drive element, and the second drive circuit is used to control the action of the second drive element according to a second drive signal output by the main control circuit.

[0022] In one embodiment, the impedance matcher also includes a detection circuit, the input end of the detection circuit is electrically connected to the adjustable impedance matching device, the output end of the detection circuit is electrically connected to the main control circuit, and the detection circuit is used to detect the working state of the adjustable impedance matching device and output a detection signal to the main control circuit.

[0023] In one embodiment, the detection circuit includes an absolute value encoder, the input end of the absolute value encoder is electrically connected to the adjustable impedance matching device, the output end of the absolute value encoder is electrically connected to the main control circuit, and the absolute value encoder is used to obtain the working state of the adjustable impedance matching device and output a detection signal to the main control circuit.

[0024] The utility model also provides a plasma generating device, wherein the plasma generating device comprises the impedance matching device as described in any one of the above items.

[0025] The technical solution of the utility model is to set a signal access terminal and a load access terminal in the impedance matcher, sample the signal access terminal and the load access terminal through a sampling circuit, and feed back the collected electrical signal to the main control circuit, and output a control signal to the adjustable impedance matching device through the main control circuit. Among them, the adjustable impedance matching device is adjusted under the control of the main control circuit, thereby changing the impedance matching relationship between the signal source and the load, and continuously samples the signal access terminal and the load access terminal through the sampling circuit to obtain the impedance matching relationship between the signal source and the load, forming a closed-loop feedback and control, thereby effectively improving the stability and accuracy of the impedance matcher. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0027] Figure 1 This is a module schematic diagram of the impedance matching device of the utility model;

[0028] Figure 2 This is a module schematic diagram of an embodiment of the impedance matching device of the utility model;

[0029] Figure 3 This is a circuit diagram of an embodiment of an impedance matcher of the utility model;

[0030] Figure 4 This is a circuit diagram of another embodiment of the impedance matcher of the utility model.

[0031] 10. Main control circuit; 20. Sampling circuit; 21. First voltage sampling circuit; 22. First current sampling circuit; 23. Second voltage sampling circuit; 24. Second current sampling circuit; 30. Adjustable impedance matching device; 31. First drive circuit; 32. Second drive circuit; R1-R18, first resistor to eighteenth resistor; C1-C4, first capacitor to fourth capacitor.

[0032] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0035] In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0036] refer to Figures 1 to 4 The utility model proposes an impedance matching circuit, which is applied to a plasma generating device. The impedance matching device is provided with a signal access terminal and a load access terminal. The impedance matching device includes a main control circuit 10, a sampling circuit 20, and an adjustable impedance matching device 30;

[0037] The input end of the sampling circuit 20 is electrically connected to the signal access end and the load access end, and the output end of the sampling circuit 20 is electrically connected to the main control circuit 10. The sampling circuit 20 is used to collect electrical signals and feed them back to the main control circuit 10.

[0038] The input end of the adjustable impedance matching device 30 is electrically connected to the signal access end, and the output end of the adjustable impedance matching device 30 is electrically connected to the load access end. The adjustable impedance matching device 30 is used to adjust the impedance matching relationship between the signal source and the load according to the control signal output by the main control circuit 10.

[0039] In this embodiment, the main control circuit 10 can be implemented by PLC (Programmable Logic Controller), MCU (Microcontroller Unit), DSP (Digital Signal Process), FPGA (Field Programmable Gate Array), SOC (System On Chip), etc. Among them, the main control circuit 10 outputs a corresponding control signal to the adjustable impedance matching device 30 by acquiring the electrical signal input by the sampling circuit 20, so that the adjustable impedance matching device 30 performs a corresponding action. Specifically, the main control circuit 10 acquires the electrical signal input by the sampling circuit 20, and determines the state of the current signal access terminal and the load access terminal through digital-to-analog conversion, and outputs a corresponding control signal to the adjustable impedance matching device 30, thereby adjusting the adjustable capacitor or adjustable inductor in the adjustable impedance matching device 30, so that the impedance matching relationship between the signal source and the load is changed.

[0040] In this embodiment, the sampling circuit 20 can be implemented by a voltage sampling circuit 20, a current sampling circuit 20, etc. Specifically, the sampling circuit 20 includes:

[0041] A first current sampling circuit 22, wherein the input end of the first current sampling circuit 22 is electrically connected to the signal access end, and the output end of the first current sampling circuit 22 is electrically connected to the main control circuit 10; the first current sampling circuit 22 is used to collect the current signal of the signal access end; a first voltage sampling circuit 21, wherein the input end of the first voltage sampling circuit 21 is electrically connected to the signal access end, and the output end of the first voltage sampling circuit 21 is electrically connected to the main control circuit 10; the first voltage sampling circuit 21 is used to collect the voltage signal of the signal access end;

[0042] A second current sampling circuit 24, the input end of the second current sampling circuit 24 is electrically connected to the load access end, and the output end of the second current sampling circuit 24 is electrically connected to the main control circuit 10; the second current sampling circuit 24 is used to collect the current signal of the load access end; a second voltage sampling circuit 23, the input end of the second voltage sampling circuit 23 is electrically connected to the load access end, and the output end of the second voltage sampling circuit 23 is electrically connected to the main control circuit 10; the second voltage sampling circuit 23 is used to collect the voltage signal of the load access end.

[0043] Further, the first current sampling circuit 22 includes a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, and a first operational amplifier; the second current sampling circuit 24 includes a sixth resistor R6, a seventh resistor R7, an eighth resistor R8, a ninth resistor R9, a tenth resistor R10, and a second operational amplifier;

[0044] Among them, the first end of the first resistor R1 is electrically connected to the signal access end, and the second end of the first resistor R1 is grounded; the first end of the second resistor R2 is electrically connected to the first end of the first resistor R1, and the second end of the second resistor R2 is electrically connected to the first end of the third resistor R3 and the non-inverting input end of the first operational amplifier; the second end of the third resistor R3 is grounded; the first end of the fourth resistor R4 is electrically connected to the second end of the first resistor R1, and the second end of the fourth resistor R4 is electrically connected to the first end of the fifth resistor R5 and the inverting input end of the first operational amplifier; the second end of the fifth resistor R5 is electrically connected to the output end of the first operational amplifier and the main control circuit 10;

[0045] The first end of the sixth resistor R6 is electrically connected to the load access end, and the second end of the sixth resistor R6 is grounded; the first end of the seventh resistor R7 is electrically connected to the first end of the sixth resistor R6, and the second end of the seventh resistor R7 is electrically connected to the first end of the eighth resistor R8 and the non-inverting input end of the second operational amplifier; the second end of the eighth resistor R8 is grounded; the first end of the ninth resistor R9 is electrically connected to the second end of the sixth resistor R6, and the second end of the ninth resistor R9 is electrically connected to the first end of the tenth resistor R10 and the inverting input end of the second operational amplifier; the second end of the tenth resistor R10 is electrically connected to the output end of the second operational amplifier and the main control circuit 10.

[0046] The first voltage sampling circuit 21 includes an eleventh resistor R11, a twelfth resistor R12, a thirteenth resistor R13, a fourteenth resistor R14, a third operational amplifier, a first capacitor C1, and a second capacitor C2; the second voltage sampling circuit 23 includes a fifteenth resistor R15, a sixteenth resistor R16, a seventeenth resistor R17, an eighteenth resistor R18, a fourth operational amplifier, a third capacitor C3, and a fourth capacitor C4;

[0047] Among them, the first end of the eleventh resistor R11 is electrically connected to the signal access end, the second end of the eleventh resistor R11 is electrically connected to the first end of the twelfth resistor R12 and the first end of the thirteenth resistor R13; the second end of the twelfth resistor R12 is grounded; the second end of the thirteenth resistor R13 is electrically connected to the first end of the first capacitor C1 and the non-inverting input end of the third operational amplifier; the second end of the first capacitor C1 is grounded; the inverting input end of the third operational amplifier is electrically connected to the output end of the third operational amplifier and the first end of the fourteenth resistor R14; the second end of the fourteenth resistor R14 is electrically connected to the first end of the second capacitor C2 and the main control circuit 10; the second end of the second capacitor C2 is grounded;

[0048] The first end of the fifteenth resistor R15 is electrically connected to the load access end, and the second end of the fifteenth resistor R15 is electrically connected to the first end of the sixteenth resistor R16 and the first end of the seventeenth resistor R17; the second end of the sixteenth resistor R16 is grounded; the second end of the seventeenth resistor R17 is electrically connected to the first end of the third capacitor C3 and the non-inverting input end of the fourth operational amplifier; the second end of the third capacitor C3 is grounded; the inverting input end of the fourth operational amplifier is electrically connected to the output end of the fourth operational amplifier and the first end of the eighteenth resistor R18; the second end of the eighteenth resistor R18 is electrically connected to the first end of the fourth capacitor C4 and the main control circuit 10; the second end of the fourth capacitor C4 is grounded.

[0049] It can be understood that the structures of the first current sampling circuit 22 and the first voltage sampling circuit 21 in the first sampling circuit 20 are consistent with the second current sampling circuit 24 and the second voltage sampling circuit 23 in the second sampling circuit 20, thereby effectively avoiding the accuracy deviation of the sampling result caused by the inconsistent circuit structure. Take the first current sampling circuit 22 as an example. When the signal access end is turned on, when the current starts to flow through the first resistor R1, a voltage drop V1 will be generated between the first end of the first resistor R1 and the first end of the second resistor. Among them, the positive input end of the first operational amplifier is connected to the second end of the second resistor R2, so it will detect the voltage of V1. After the current starts to flow through the first resistor R1, a voltage drop V2 will be generated between the second end of the first resistor R1 and the first end of the fourth resistor R4. Among them, the inverting input end of the second operational amplifier is connected to the second end of the fourth resistor R4, so it will detect the voltage of V2. The operational amplifier is a high-gain device, and its output voltage VOUT is set to minimize the voltage difference between the positive input end and the negative input end. In this way, the operational amplifier can adjust its output to keep the voltage difference between the positive input end and the negative input end to a minimum. Among them, VOUT=R3 / R2(V1-V2), and V1-V2=I*R1, and the current in the circuit can be sampled by conversion.

[0050] Take the first voltage sampling circuit 21 as an example. After the input signal is divided by the eleventh resistor R11, it is connected in parallel with the thirteenth resistor R13 to adjust the size of the input signal so as to adapt to the input range of the operational amplifier. The adjusted input signal enters the non-inverting input terminal of the third operational amplifier through the thirteenth resistor R13. Among them, the third operational amplifier is a non-inverting operational amplifier, and its output voltage is in phase and equal to the input voltage. Therefore, the output voltage of the operational amplifier is in phase and equal to the input voltage. After the output voltage passes through the second filtering, it is output to the main control circuit 10. The function of the second capacitor C2 is to filter out high-frequency noise and ensure the accuracy of the sampling of the main control circuit 10. The fourteenth resistor R14 and the second capacitor C2 constitute an RC low-pass filter, which can further filter out high-frequency noise and improve signal quality. The fourteenth resistor R14 and the second capacitor C2 also constitute an RC time constant, which determines the cut-off frequency of the filter. The lower the cut-off frequency, the better the filtering effect, but the response speed will also be slower. The value of the fourteenth resistor R14 and the second capacitor C2 can be adjusted according to actual needs to achieve the best filtering effect and response speed. The twelfth resistor R12 and the first capacitor C1 form an RC filter for suppressing power supply noise. Power supply noise may affect the performance of the operational amplifier, so it needs to be suppressed. The values ​​of the twelfth resistor R12 and the first capacitor C1 can also be adjusted according to actual needs to achieve the best filtering effect and response speed.

[0051] In this embodiment, the adjustable impedance matching device 30 can be implemented by an adjustable L-type impedance matching network or an adjustable π-type impedance matching network. The adjustable impedance matching device 30 includes a first adjustable capacitor, a second adjustable capacitor, an inductor, a first driving member, a second driving member, and a driving module; the first adjustable capacitor is drivingly connected to the first driving member, and the second adjustable capacitor is drivingly connected to the second driving member; the driving module is electrically connected to the first driving member and the second driving member respectively, and the driving module is electrically connected to the main control circuit 10;

[0052] The main control circuit 10 is used to control the driving module to drive the first driving element and / or the second driving element to operate according to the electrical signal fed back by the sampling circuit, so as to adjust the capacitance of the first adjustable capacitor and / or the capacitance of the second adjustable capacitor;

[0053] Among them, the first end of the first adjustable capacitor is electrically connected to the signal access end and the inductor, the second end of the first adjustable capacitor is grounded, and the first adjustable capacitor is drivingly connected to the first driving component; the second end of the inductor is electrically connected to the first end of the second adjustable capacitor; the second end of the second adjustable capacitor is electrically connected to the load access end, and the second adjustable capacitor is drivingly connected to the second driving component.

[0054] In this embodiment, the first driver and the second driver can be implemented by a motor or a manipulator. Wherein, the drive module includes: a first drive circuit 31, the input end of the first drive circuit 31 is electrically connected to the output end of the main control circuit 10, the first drive circuit 31 is electrically connected to the first driver, and the first drive circuit 31 is used to control the first driver action according to the first drive signal output by the main control circuit 10; a second drive circuit 32, the input end of the second drive circuit 32 is electrically connected to the output end of the main control circuit 10, the second drive circuit 32 is electrically connected to the second driver, and the second drive circuit 32 is used to control the second driver action according to the second drive signal output by the main control circuit 10. Take the first driver and the second driver as an example of a motor. The role of the motor here is similar to a precise mechanical driver, which changes the parameters of the adjustable capacitor or inductor connected thereto through its rotational motion. For example, for an adjustable capacitor, the motor can change the distance between two capacitor plates by rotating a mechanical structure, thereby changing the capacitance value. For inductance, the motor can adjust the geometry of the coil (such as the coil spacing) or move the position of the core in the variable core inductor or the length of the coil connected to the circuit to change the inductance. In order to enable the motor to dynamically adjust the capacitance or inductance as needed, a sampling circuit 20 is provided in the impedance matcher. The sampling circuit 20 measures the impedance matching state of the circuit (usually by sampling parameters such as voltage, current or power factor), and outputs these signals to the main control circuit 10, so that the main control circuit 10 outputs a control signal to control the motor. This means that the speed or direction of rotation of the motor will be determined by the real-time impedance matching requirements, thereby achieving dynamic adjustment of the capacitance or inductance.

[0055] By setting a signal access terminal and a load access terminal in the impedance matcher, sampling the signal access terminal and the load access terminal through the sampling circuit 20, and feeding back the collected electrical signal to the main control circuit 10, the control signal is output to the driving module through the main control circuit 10. Among them, the driving module is electrically connected to the first driving component and the second driving component, and the first adjustable capacitor and the second adjustable capacitor are adjusted under the control of the main control circuit 10, thereby changing the impedance matching relationship between the signal source and the load, and the signal access terminal and the load access terminal are continuously sampled through the sampling circuit 20 to obtain the impedance matching relationship between the signal source and the load, forming a closed-loop feedback and control, thereby effectively improving the stability and accuracy of the impedance matcher.

[0056] In one embodiment of the utility model, the impedance matcher also includes a detection circuit, the input end of the detection circuit is electrically connected to the adjustable impedance matching device, and the output end of the detection circuit is electrically connected to the main control circuit 10. The detection circuit is used to detect the working state of the adjustable impedance matching device and output a detection signal to the main control circuit 10.

[0057] In this embodiment, the detection circuit can be implemented by a Hall switch detection circuit and an encoder. Among them, an absolute value encoder is taken as an example. The absolute value encoder obtains the angular displacement information of the motor through a sensor. The sensor can be implemented by an optical sensor, a magnetic sensor, etc. Specifically, an optical sensor is taken as an example. By setting a light source, the light passes through a code disk with a grid, and an electrical signal is generated by receiving it through a photoelectric sensitive element. Among them, the setting of the grid in the code disk represents its accuracy, so that the electrical signal generated by the photoelectric sensitive element when the light passes through each position of the code disk is different, thereby realizing the absolute distinction of the rotation position. The photoelectric single-turn absolute value encoder converts the optical signal through a light source, a code disk and a photoelectric sensitive element and outputs an electrical signal to determine the angular displacement of the motor; the magnetoelectric single-turn absolute value encoder converts the magnetic signal through a disk, a sensor and an adjustment circuit and outputs an electrical signal to determine the angular displacement of the motor. Further, the absolute value encoder can also be provided with a backup battery. When the motor rotates due to human or external factors, the adjustable capacitor changes. The backup battery can power the absolute encoder, thereby obtaining the angular displacement information of the motor and the change in the adjustable capacitor, effectively improving the stability and accuracy of the impedance matcher. It should be understood that the incremental encoder records the change in position, that is, starting from an unknown starting point, it outputs a series of pulse signals, and determines the displacement relative to the initial position by counting these pulses. If the system is powered off, the incremental encoder cannot remember the current position and needs to be re-zeroed after restarting. The absolute encoder directly outputs the absolute code of the current position, and each position has a unique code. Even if the power is interrupted, the exact position can still be known immediately after powering on again, without the need for zeroing. Therefore, the use of an absolute encoder can effectively determine the current position of the adjustable capacitor, and then derive the state of the adjustable impedance matching device 40 at this time.

[0058] The utility model also provides a plasma generating device, which includes an impedance matching device as described above. It is worth noting that since the plasma generating device of the utility model is based on the impedance matching device described above, the embodiments of the plasma generating device of the utility model include all technical solutions of all embodiments of the impedance matching device described above, and the technical effects achieved are also exactly the same, which will not be repeated here.

[0059] The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. An impedance matcher, applied to a plasma generating device, characterized in that: The impedance matcher is provided with a signal access terminal and a load access terminal, and the impedance matcher comprises a main control circuit, a sampling circuit, and an adjustable impedance matching device; The input end of the sampling circuit is electrically connected to the signal access end and the load access end, the output end of the sampling circuit is electrically connected to the main control circuit, and the sampling circuit is used to collect electrical signals and feed them back to the main control circuit; The input end of the adjustable impedance matching device is electrically connected to the signal access end, the output end of the adjustable impedance matching device is electrically connected to the load access end, and the adjustable impedance matching device is used to adjust the impedance matching relationship between the signal source and the load according to the control signal output by the main control circuit.

2. The impedance matching device according to claim 1, wherein: The sampling circuit comprises: a first current sampling circuit, wherein an input end of the first current sampling circuit is electrically connected to the signal access end, and an output end of the first current sampling circuit is electrically connected to the main control circuit; the first current sampling circuit is used to collect a current signal at the signal access end; a first voltage sampling circuit, wherein an input end of the first voltage sampling circuit is electrically connected to the signal access end, and an output end of the first voltage sampling circuit is electrically connected to the main control circuit; the first voltage sampling circuit is used to collect a voltage signal at the signal access end; a second current sampling circuit, wherein the input end of the second current sampling circuit is electrically connected to the load access end, and the output end of the second current sampling circuit is electrically connected to the main control circuit; the second current sampling circuit is used to collect the current signal of the load access end; A second voltage sampling circuit, wherein the input end of the second voltage sampling circuit is electrically connected to the load access end, and the output end of the second voltage sampling circuit is electrically connected to the main control circuit; the second voltage sampling circuit is used to collect the voltage signal of the load access end.

3. The impedance matching device according to claim 2, wherein: The first current sampling circuit includes a first resistor, a second resistor, a third resistor, a fourth resistor, a fifth resistor, and a first operational amplifier; the second current sampling circuit includes a sixth resistor, a seventh resistor, an eighth resistor, a ninth resistor, a tenth resistor, and a second operational amplifier; Wherein, the first end of the first resistor is electrically connected to the signal access end, and the second end of the first resistor is grounded; the first end of the second resistor is electrically connected to the first end of the first resistor, and the second end of the second resistor is electrically connected to the first end of the third resistor and the positive phase input end of the first operational amplifier; the second end of the third resistor is grounded; the first end of the fourth resistor is electrically connected to the second end of the first resistor, and the second end of the fourth resistor is electrically connected to the first end of the fifth resistor and the inverting input end of the first operational amplifier; the second end of the fifth resistor is electrically connected to the output end of the first operational amplifier and the main control circuit; the first end of the sixth resistor is electrically connected to the load access end, and the second end of the sixth resistor is grounded; the first end of the seventh resistor is electrically connected to the first end of the sixth resistor, and the second end of the seventh resistor is electrically connected to the first end of the eighth resistor and the positive phase input end of the second operational amplifier; the second end of the eighth resistor is grounded; the first end of the ninth resistor is electrically connected to the second end of the sixth resistor, and the second end of the ninth resistor is electrically connected to the first end of the tenth resistor and the inverting input end of the second operational amplifier; the second end of the tenth resistor is electrically connected to the output end of the second operational amplifier and the main control circuit.

4. The impedance matching device according to claim 3, characterized in that: The first voltage sampling circuit includes an eleventh resistor, a twelfth resistor, a thirteenth resistor, a fourteenth resistor, a third operational amplifier, a first capacitor, and a second capacitor; the second voltage sampling circuit includes a fifteenth resistor, a sixteenth resistor, a seventeenth resistor, an eighteenth resistor, a fourth operational amplifier, a third capacitor, and a fourth capacitor; Wherein, the first end of the eleventh resistor is electrically connected to the signal access end, the second end of the eleventh resistor is electrically connected to the first end of the twelfth resistor and the first end of the thirteenth resistor; the second end of the twelfth resistor is grounded; the second end of the thirteenth resistor is electrically connected to the first end of the first capacitor and the non-inverting input end of the third operational amplifier; the second end of the first capacitor is grounded; the inverting input end of the third operational amplifier is electrically connected to the output end of the third operational amplifier and the first end of the fourteenth resistor; the second end of the fourteenth resistor is electrically connected to the first end of the second capacitor and the main control circuit; the second end of the second capacitor is connected to the ground; the first end of the fifteenth resistor is electrically connected to the load access end, the second end of the fifteenth resistor is electrically connected to the first end of the sixteenth resistor and the first end of the seventeenth resistor; the second end of the sixteenth resistor is grounded; the second end of the seventeenth resistor is electrically connected to the first end of the third capacitor and the non-inverting input end of the fourth operational amplifier; the second end of the third capacitor is grounded; the inverting input end of the fourth operational amplifier is electrically connected to the output end of the fourth operational amplifier and the first end of the eighteenth resistor; the second end of the eighteenth resistor is electrically connected to the first end of the fourth capacitor and the main control circuit; the second end of the fourth capacitor is grounded.

5. The impedance matching device according to claim 1, wherein: The adjustable impedance matching device comprises a first adjustable capacitor, a second adjustable capacitor, an inductor, a first driving member, a second driving member and a driving module; the first adjustable capacitor is drivingly connected to the first driving member, and the second adjustable capacitor is drivingly connected to the second driving member; the driving module is electrically connected to the first driving member and the second driving member respectively, and the driving module is electrically connected to the main control circuit; The main control circuit is used to control the driving module to drive the first driving element and / or the second driving element to operate according to the electrical signal fed back by the sampling circuit, so as to adjust the capacitance of the first adjustable capacitor and / or the capacitance of the second adjustable capacitor; Among them, the first end of the first adjustable capacitor is electrically connected to the signal access end and the inductor, the second end of the first adjustable capacitor is grounded, and the first adjustable capacitor is drivingly connected to the first driving member; the second end of the inductor is electrically connected to the first end of the second adjustable capacitor; the second end of the second adjustable capacitor is electrically connected to the load access end, and the second adjustable capacitor is drivingly connected to the second driving member.

6. The impedance matching device according to claim 5, characterized in that: The driving module comprises: a first drive circuit, wherein an input end of the first drive circuit is electrically connected to an output end of the main control circuit, the first drive circuit is electrically connected to the first drive element, and the first drive circuit is used to control the action of the first drive element according to a first drive signal output by the main control circuit; A second drive circuit, wherein the input end of the second drive circuit is electrically connected to the output end of the main control circuit, the second drive circuit is electrically connected to the second drive element, and the second drive circuit is used to control the action of the second drive element according to a second drive signal output by the main control circuit.

7. The impedance matching device according to claim 1, wherein: The impedance matcher also includes a detection circuit, an input end of the detection circuit is electrically connected to the adjustable impedance matching device, an output end of the detection circuit is electrically connected to the main control circuit, and the detection circuit is used to detect the working state of the adjustable impedance matching device and output a detection signal to the main control circuit.

8. The impedance matching device according to claim 7, characterized in that: The detection circuit includes an absolute value encoder, the input end of the absolute value encoder is electrically connected to the adjustable impedance matching device, the output end of the absolute value encoder is electrically connected to the main control circuit, and the absolute value encoder is used to obtain the working state of the adjustable impedance matching device and output a detection signal to the main control circuit.

9. A plasma generating device, characterized in that: The plasma generating device comprises the impedance matching device according to any one of claims 1 to 8.

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