Static elimination assembly and testing device

Abstract

The utility model relates to a static elimination assembly and a testing device. The static elimination assembly comprises a flow equalizing cover and an ion wind bar. A closed flow equalizing cavity is formed in the flow equalizing cover, a long-strip-shaped air outlet area is formed in the side wall of the flow equalizing cover, and the air outlet area communicates with the flow equalizing cavity. The ion wind bar is contained and fixed in the flow equalizing cavity, and the ion wind bar comprises a plurality of blowing holes capable of blowing ion wind into the flow equalizing cavity. The ion wind blown from the blowing holes of the ion wind bar is not directly blown to the carrier, but is firstly mixed in the flow equalizing cavity, and the ion wind is blown to the carrier from the air outlet area after the flow path is changed. Therefore, the ion wind blown out from each blowing hole can be uniformly mixed in the flow equalizing cavity and then blown out from the air outlet area, so that the internal and external pressure differences of each part of the flow equalizing cavity are basically consistent, and the air outlet volumes of each part in the extending direction of the air outlet area are also basically consistent. Therefore, the static elimination assembly and the testing device can significantly improve the air outlet uniformity of the ionic wind.

Description

Technical Field

[0001] The utility model relates to the technical field, and particularly relates to an electrostatic elimination component and a testing device. Background Art

[0002] During the chip testing and sorting process, it is necessary to perform surface electrostatic elimination operations to prevent affecting the test results. Currently, the common electrostatic elimination method is to set an ion air bar at the top of the cavity and blow air downward. The ion air bar introduces dry air from one or both sides and is provided with a plurality of air blowing holes at equal intervals along the length direction. After being specially treated inside the ion air bar, the dry air becomes charged and is blown through the air blowing holes towards carriers such as the preheating plate and the material shuttle for placing the chips, thereby neutralizing the charges on the chip surface.

[0003] However, due to the different internal and external pressure differences and flow velocities at each air blowing hole, the air output of each air blowing hole is different, and the greater the air volume, the greater the difference in air output between each air blowing hole. For carriers such as the preheating plate, due to their large size, they generally correspond to a plurality of air blowing holes. Therefore, when the ion air bar blows air for electrostatic elimination, it will cause the uniformity of the surface temperature of the preheating plate to deteriorate, thereby having an adverse impact on the testing and sorting. Summary of the Utility Model

[0004] Based on this, it is necessary to provide an electrostatic elimination component and a testing device that can improve the air output uniformity in view of the above problems.

[0005] An electrostatic elimination component includes a flow equalizing cover and an ion air bar; a closed flow equalizing cavity is formed inside the flow equalizing cover, a long strip-shaped air outlet area is formed on the side wall of the flow equalizing cover, and the air outlet area is communicated with the flow equalizing cavity; the ion air bar is received and fixed in the flow equalizing cavity, and the ion air bar includes a plurality of air blowing holes capable of blowing ion air into the flow equalizing cavity.

[0006] In one embodiment, a plurality of equally spaced air outlet holes are formed on the side wall of the flow equalizing cover, and the plurality of air outlet holes constitute the air outlet area.

[0007] In one embodiment, the distance between adjacent two air outlet holes is less than the distance between adjacent two air blowing holes.

[0008] In one embodiment, a long strip-shaped air outlet slit is formed on the side wall of the flow equalizing cover, and the air outlet slit constitutes the air outlet area.

[0009] In one embodiment, the cross-section of the flow equalizing cover gradually narrows from the top to the bottom of the flow equalizing cover, and the air outlet area is located at the bottom of the flow equalizing cover.

[0010] In one of the embodiments, the flow balancing cover is in the shape of a triangular prism, and the air outlet area is distributed along one of the side edges of the flow balancing cover.

[0011] In one of the embodiments, the flow balancing cover is formed with a flow balancing groove on a side of the air outlet area facing away from the flow balancing cavity, and the flow balancing groove extends along an extension direction of the air outlet area.

[0012] In one embodiment, the flow equalizing hood includes a hood body and a partition. The hood body is a hollow structure, and a slit extending along the length direction of the hood body is formed on the side. The partition is installed in the hood body and blocks the slit. The air outlet area is located on the partition. The inner side of the partition and the hood body form the flow equalizing cavity, and the outer side and the hood body form the flow equalizing groove.

[0013] In one of the embodiments, the plurality of blowing holes are arranged toward the inner wall of the flow equalizing cavity, and the directions of the blowing holes are staggered with the area of ​​the air outlet area.

[0014] A testing device includes a machine, a carrier, and an electrostatic elimination component as described in any one of the preferred embodiments above, wherein the carrier and the electrostatic elimination component are installed on the machine, the electrostatic elimination component is located above the carrier, and the air outlet area faces the carrier.

[0015] In the above-mentioned static elimination component and test device, the ion wind blown out from the blowing holes of the ion wind rod does not blow directly to the carrier, but is first mixed in the flow-equalizing chamber, and then blown to the carrier from the air outlet area after changing the flow path. It can be seen that the ion wind blown out from each blowing hole can be evenly mixed in the flow-equalizing chamber before being blown out from the air outlet area, so that the internal and external pressure difference of each part of the flow-equalizing chamber is basically the same, so that the air volume at each part in the extension direction of the air outlet area is also basically the same. Therefore, the above-mentioned static elimination component and test device can significantly improve the air outlet uniformity of the ion wind. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 This is a schematic diagram of the partial structure of the testing device in a preferred embodiment of the utility model;

[0018] Figure 2 for Figure 1 A schematic diagram of the structure of the static elimination component in the test device shown;

[0019] Figure 3 is Figure 2 a cross-sectional view of the electrostatic eliminator assembly shown in the horizontal direction;

[0020] Figure 4 is Figure 2 an exploded view of the electrostatic eliminator assembly shown;

[0021] Figure 5 is Figure 4 a schematic structural view of the cover in the electrostatic eliminator assembly shown. Detailed implementation manners

[0022] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following will describe the detailed implementation manners of the present utility model in conjunction with the accompanying drawings. Many specific details are set forth in the following description to fully understand the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0023] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present utility model.

[0024] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present utility model, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0025] In the present utility model, unless otherwise clearly defined or limited, terms such as "installation", "connection", "linkage", "fixation", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral one; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the internal communication between two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0026] In the present utility model, unless otherwise clearly defined or limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature is at a higher horizontal level than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature is at a lower horizontal level than the second feature.

[0027] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation.

[0028] Please refer to Figure 1 , the present utility model provides a test device 10 and an electrostatic elimination component 100. Among them, the test device 10 includes an electrostatic elimination component 100, a machine platform 200 and a carrier 300.

[0029] The machine platform 200 plays a supporting role, and both the carrier 300 and the electrostatic elimination component 100 are installed on the machine platform 200. The carrier 300 can be a preheating plate or a shuttle, and is used for placing the chips to be tested. The electrostatic elimination component 100 is located above the carrier 300 and can blow ion wind to the surface of the carrier 300, thereby neutralizing the charges carried by the chips in the carrier 300 to achieve the purpose of eliminating static electricity.

[0030] The static elimination component 100 is usually arranged in one-to-one correspondence with the carrier 300 on the machine 200. The static elimination component 100 is in a long strip shape, generally aligned with the center line of the corresponding carrier 300 and extending along the center line. Moreover, the length of the static elimination component 100 is generally slightly greater than the length of the carrier 300 to ensure that the ion wind blown out by the static elimination component 100 can completely cover the surface of the carrier 300.

[0031] Please refer to Figure 2 , Figure 3 and Figure 4 , in the preferred embodiment of the present utility model, the static elimination component 100 includes a flow equalizing cover 110 and an ion wind bar 120.

[0032] The flow equalizing cover 110 is in a long strip shape, which can be an integrally formed structure or assembled by a plurality of sheet metal parts. A closed flow equalizing cavity 101 is formed inside the flow equalizing cover 110, and a long strip-shaped air outlet area 102 is formed on its side wall. The air outlet area 102 is communicated with the flow equalizing cavity 101. Therefore, the gas in the flow equalizing cavity 101 can be blown out through the air outlet area 102. Further, in the test device 10, the air outlet area 102 faces the carrier 300.

[0033] Specifically, in this embodiment, a plurality of air outlet holes 102a are arranged at equal intervals on the side wall of the flow equalizing cover 110, and the plurality of air outlet holes 102a constitute the air outlet area 102. The air outlet holes 102a can be circular holes, square holes, etc. Obviously, in other embodiments, the air outlet area 102 can also be in other forms. For example, a long strip-shaped air outlet slit (not shown in the figure) can also be provided on the side wall of the flow equalizing cover 110, and the air outlet slit constitutes the air outlet area 102.

[0034] The ion wind bar 120 can process air to make the air charged to generate ion wind. The ion wind bar 120 is received and fixed in the flow equalizing cavity 101. Specifically, the ion wind bar 120 can be fixedly connected to the flow equalizing cover 110 through screws (not shown in the figure) passing through the side wall of the flow equalizing cover 110. The ion wind bar 120 is generally in a long strip shape and is consistent with the extending direction of the flow equalizing cover 110. The ion wind bar 120 has an air inlet hole (not shown in the figure), and air can enter the inside of the ion wind bar 120 through the air inlet hole. An air inlet channel communicated with the air inlet hole can be provided on the side wall of the flow equalizing cover 110 to facilitate the entry of air.

[0035] Among them, the ion wind rod 120 includes a plurality of air blowing holes 121, and the air blowing holes 121 can blow ion wind into the uniform flow cavity 101. It can be seen that the ion wind blown out from the air blowing holes 121 does not directly blow towards the vehicle 300, but first mixes in the uniform flow cavity 101, and after changing the flow path, it blows towards the vehicle 300 from the air outlet area 102. Since the ion wind blown out from each air blowing hole 121 can be mixed evenly in the uniform flow cavity 101 and then blown out from the air outlet area 102, the internal and external pressure differences at various parts of the uniform flow cavity 101 are basically the same, so that the air output at various parts in the extending direction of the air outlet area 102 is also basically the same, and the uniformity of the air output is better.

[0036] Moreover, when the intake air volume of the ion wind rod 120 fluctuates, the resulting fluctuation of the ion wind can be buffered in the uniform flow cavity 101, so that the uniformity of the air output in the air outlet area 102 is not affected by the size of the intake air volume of the ion wind rod 120.

[0037] The plurality of air blowing holes 121 on the ion wind rod 120 are generally arranged at equal intervals. Specifically, in this embodiment, the distance between two adjacent air outlet holes 102a is smaller than the distance between two adjacent air blowing holes 121. In this way, the ion wind blown out from the air outlet area 102 can be distributed more evenly.

[0038] In this embodiment, the plurality of air blowing holes 121 are arranged towards the inner wall of the uniform flow cavity 101, and the orientation of the air blowing holes 121 is staggered from the area of the air outlet area 102. For example, if the air outlet area 102 is arranged at the bottom of the uniform flow cover 110, the air blowing holes 121 will be arranged towards the side of the uniform flow cavity 101, so the air blowing holes 121 can blow ion wind towards the side. It can be seen that the ion wind blown out from the plurality of air blowing holes 121 will not directly blow out of the air outlet area 102, thus effectively avoiding that some ion wind directly blows out of the air outlet area 102 without passing through the uniform flow cavity 101 for transition, which helps to further improve the uniformity of the air output in the air outlet area 102.

[0039] Please refer to again Figure 3 , in this embodiment, the cross-section of the uniform flow cover 110 gradually narrows from the top to the bottom of the uniform flow cover 110, and the air outlet area 102 is located at the bottom of the uniform flow cover 110.

[0040] The above-mentioned cross-section refers to the cross-section perpendicular to the length direction of the uniform flow cover 110. In this way, during the process of the ion wind in the uniform flow cavity 101 flowing towards the bottom of the uniform flow cover 110, the uniform flow cavity 101 can play a role in converging the ion wind, so that the flow rate of the ion wind is accelerated. In this way, the mixing process of the ion wind at various parts in the uniform flow cavity 101 can be accelerated, so that the internal and external pressure differences at various parts of the uniform flow cavity 101 are more consistent. Moreover, it can also increase the speed of the ion wind blown out from the air outlet area 102, so as to ensure that the ion wind can reach the surface of the vehicle 300 smoothly.

[0041] Further, in this embodiment, the flow equalizing cover 110 is in the shape of a triangular prism, and the air outlet area 102 is distributed along one of the side edges of the flow equalizing cover 110.

[0042] At this time, the cross-section of the flow equalizing cover 110 is an inverted triangle, the air outlet area 102 is distributed on one of the lowest side edges of the flow equalizing cover 110, and the air blowing holes 121 are arranged towards one of the side surfaces of the flow equalizing cover 110. Moreover, since the triangular prism-shaped flow equalizing cover 110 has three flat side surfaces, it is convenient to install the ion wind rod 120 and also convenient to install the flow equalizing cover 110 on the machine table 200.

[0043] In addition, in this embodiment, a flow equalizing groove 103 is formed on the side of the flow equalizing cover 110 facing away from the flow equalizing cavity 101 in the air outlet area 102, and the flow equalizing groove 103 extends along the extending direction of the air outlet area 102.

[0044] The flow equalizing groove 103 is an open structure, and an opening is formed on the side facing away from the air outlet area 102. The ion wind blown out from the air outlet area 102 first enters the flow equalizing groove 103 and is mixed again, and then is blown towards the carrier 300 through the opening of the flow equalizing groove 103. In this way, the uniformity of the air outlet can be further improved, thereby further enhancing the consistency of the surface temperature of the carrier 300.

[0045] Please refer to again Figure 3 and Figure 4 and refer to together Figure 5 In this embodiment, the flow equalizing cover 110 includes a cover body 111 and a partition plate 112. The cover body 111 is a hollow structure, and a slit 1111 extending along the length direction of the cover body 111 is formed on the side surface. The partition plate 112 is installed inside the cover body 111 and blocks the slit 1111. The air outlet area 102 is located on the partition plate 112. The side of the partition plate 112 facing inwards and the cover body 111 enclose a flow equalizing cavity 101, and the side facing outwards and the cover body 111 enclose a flow equalizing groove 103.

[0046] Specifically, the partition plate 112 is in a long strip shape and is consistent with the extending direction of the slit 1111. The cover body 111 and the partition plate 112 can be cooperated by welding or screwing. The edge of the partition plate 112 is not flush with the edge of the slit 1111, but retracts a certain distance towards the inside of the cover body 110 relative to the edge of the slit 1111. In this way, when the partition plate 112 is installed in the cover body 111, it can cooperate with the cover body 111 and enclose the flow equalizing cavity 101 and the flow equalizing groove 103 at the same time, which is more convenient for forming and has a simpler structure.

[0047] In addition, both ends of the cover body 111 in the length direction are open, so the flow equalizing cover 110 further includes two end covers 113, and the two end covers 113 respectively cover the openings at both ends of the cover body 111 in the length direction. Of course, in other embodiments, both ends of the cover body 111 in the length direction can also be closed, so as to omit the end covers 113.

[0048] In the above-described static eliminator assembly 100 and test device 10, the ion wind blown out from the air blowing holes 121 of the ion wind bar 120 does not directly blow towards the vehicle 300, but will first be mixed in the flow equalizing cavity 101 and then blown towards the vehicle 300 from the air outlet area 102 after changing the flow path. It can be seen that the ion wind blown out from each air blowing hole 121 can be first mixed evenly in the flow equalizing cavity 101 and then blown out from the air outlet area 102, so that the internal and external pressure differences at various parts of the flow equalizing cavity 101 are basically the same, and thus the air output at various parts in the extending direction of the air outlet area 102 is also basically the same. Therefore, the above-described static eliminator assembly 100 and test device 10 can significantly improve the air output uniformity of the ion wind.

[0049] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0050] The above-described embodiments only represent several implementation manners of the present utility model. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the utility model patent shall be subject to the appended claims.

Claims

1. A static elimination component, characterized in that: It includes a flow balancing cover and an ion wind rod; a closed flow balancing cavity is formed inside the flow balancing cover, and a long strip-shaped air outlet area is formed on the side wall of the flow balancing cover, and the air outlet area is connected to the flow balancing cavity; the ion wind rod is accommodated and fixed in the flow balancing cavity, and the ion wind rod includes a plurality of blowing holes that can blow ion wind into the flow balancing cavity.

2. The static elimination assembly according to claim 1, characterized in that: The side wall of the flow balancing cover is provided with a plurality of air outlet holes arranged at equal intervals, and the plurality of air outlet holes constitute the air outlet area.

3. The static elimination assembly according to claim 2, characterized in that: The distance between two adjacent air outlet holes is smaller than the distance between two adjacent air blowing holes.

4. The static elimination assembly according to claim 1, characterized in that: The side wall of the flow balancing cover is provided with a long strip of air outlet slots, and the air outlet slots constitute the air outlet area.

5. The static elimination assembly according to claim 1, characterized in that: The cross section of the flow balancing cover gradually narrows from the top to the bottom of the flow balancing cover, and the air outlet area is located at the bottom of the flow balancing cover.

6. The static elimination assembly according to claim 5, characterized in that: The flow balancing cover is in the shape of a triangular prism, and the air outlet area is distributed along one of the side edges of the flow balancing cover.

7. The static elimination assembly according to claim 1, characterized in that: The flow balancing cover is formed with a flow balancing groove on a side of the air outlet area facing away from the flow balancing cavity, and the flow balancing groove extends along an extension direction of the air outlet area.

8. The static elimination assembly according to claim 7, characterized in that: The flow equalizing hood includes a hood body and a partition. The hood body is a hollow structure, and a slit extending along the length direction of the hood body is formed on the side. The partition is installed in the hood body and blocks the slit. The air outlet area is located on the partition. The inward side of the partition and the hood body are arranged to form the flow equalizing cavity, and the outward side and the hood body are arranged to form the flow equalizing groove.

9. The static elimination assembly according to any one of claims 1 to 8, characterized in that: The plurality of air blowing holes are arranged toward the inner wall of the flow equalizing cavity, and the directions of the air blowing holes are staggered with the air outlet area.

10. A testing device, characterized in that: It comprises a machine, a carrier and the static elimination component as described in any one of claims 1 to 9, wherein the carrier and the static elimination component are installed on the machine, the static elimination component is located above the carrier, and the air outlet area faces the carrier.

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