Femtosecond laser processing device capable of adjusting light beams

Abstract

The utility model discloses a femtosecond laser processing device capable of adjusting light beams, which comprises a lower protective shell, an upper protective shell, an optical fiber cable and a light beam adjusting tube, end connectors are symmetrically and fixedly mounted at the top end and the bottom end of the light beam adjusting tube, and fixing plates are uniformly and fixedly connected to one ends, close to the light beam adjusting tube, of the end connectors. Two first electric push rods are symmetrically and fixedly installed on the inner side of the end, close to the fixing plate, of the end connector located at the bottom end of the light beam adjusting pipe. The lower protection sleeve and the upper protection sleeve are movably inserted in the outer side of the light beam adjusting tube, the structural strength and the protection capacity of light beam adjusting are enhanced, the control terminal controls the first electric push rod and the second electric push rod to stretch out and draw back respectively, the position of the focus lens can be accurately adjusted, and therefore the flexible control over the light beam focus position is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of femtosecond lasers, and specifically relates to an adjustable beam femtosecond laser processing device. Background Technique

[0002] In the field of microfabrication, femtosecond lasers are widely used in multiple aspects such as the lithography process of integrated circuits, biomedicine, medical equipment, and optoelectronic information industry. Their unique non-linear processing process can achieve high-quality and high-precision micro-nano processing and three-dimensional micro-nano structure manufacturing of various materials. The traditional femtosecond laser processing device is relatively cumbersome in beam adjustment and has a complex structure. Therefore, there is an urgent need for an adjustable beam femtosecond laser processing device to solve the above problems. Content of the Utility Model

[0003] The purpose of the utility model is to provide an adjustable beam femtosecond laser processing device to solve the problems raised in the above background technique.

[0004] To achieve the above purpose, the utility model provides the following technical solution: An adjustable beam femtosecond laser processing device, including a lower protective housing, an upper protective housing, an optical fiber line, and a beam adjustment tube. The top and bottom of the beam adjustment tube are symmetrically and fixedly installed with end connectors. One end of the end connector close to the beam adjustment tube is evenly and fixedly connected with a fixing plate. Inside the end connector at the bottom of the beam adjustment tube, two first electric push rods are symmetrically and fixedly installed close to one end of the fixing plate. The telescopic end of the first electric push rod is fixedly installed with a first sliding ring, and a focusing lens is fixedly installed inside the first sliding ring.

[0005] Preferably, two second electric push rods are symmetrically and fixedly installed inside the end connector at the top of the beam adjustment tube close to one end of the fixing plate. The telescopic end of the second electric push rod is fixedly installed with a second sliding ring, and a collimating lens is fixedly installed inside the second sliding ring.

[0006] Preferably, the upper protective housing is fixedly installed at the top of the lower protective housing. The middle of the bottom of the lower protective housing is fixedly connected with a nozzle. A lower protective sleeve is movably inserted inside the lower protective housing. A first bayonet is evenly opened at one end of the lower protective sleeve close to the nozzle. One end of the lower protective sleeve far from the first bayonet is fixedly connected with an insertion tube.

[0007] Preferably, the middle of the top of the upper protective housing is fixedly connected with an access tube. An upper protective sleeve is movably inserted inside the upper protective housing. A second bayonet is evenly opened at one end of the upper protective sleeve close to the access tube. A plug-in groove is opened at one end of the upper protective sleeve far from the second bayonet.

[0008] Preferably, the output end of the optical fiber line is fixedly installed inside the access tube, and the insertion tube is movably inserted inside the insertion slot.

[0009] Preferably, the lower protective sleeve and the upper protective sleeve are movably inserted outside the beam adjustment tube.

[0010] Preferably, the fixing plate at the bottom end of the beam adjustment tube is movably inserted inside the first bayonet, and the fixing plate at the top end of the beam adjustment tube is movably inserted inside the second bayonet.

[0011] Preferably, the first sliding ring and the second sliding ring are both slidably connected inside the beam adjustment tube, and the first electric push rod and the second electric push rod are respectively and electrically connected to the control terminal by wire.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] In the present utility model, the lower protective sleeve and the upper protective sleeve are movably inserted outside the beam adjustment tube, enhancing the structural strength and protective ability of the beam adjustment. By respectively controlling the telescoping of the first electric push rod and the second electric push rod through the control terminal, the position of the focusing lens can be precisely adjusted, thereby realizing flexible control of the beam focus position. This design enables the beam size to be quickly adjusted according to different processing requirements during the beam processing, improving the processing accuracy and efficiency. The second electric push rod can adjust the degree of diffusion of the beam inside the beam adjustment tube by controlling the up and down movement of the collimating lens, thereby realizing the adjustment of the beam transmission uniformity, which helps to improve the uniformity and quality of the processing surface, and the structure is simple and easy to adjust. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a three-dimensional structure schematic diagram of the main body of the present utility model;

[0015] Figure 2 is a schematic diagram of the split structure of the main body in the present utility model;

[0016] Figure 3 is a schematic diagram of a partial structure of the protective housing in the present utility model;

[0017] Figure 4 is a schematic diagram of a partial structure of the beam adjustment tube in the present utility model.

[0018] In the figure: 1 - lower protective housing, 2 - upper protective housing, 3 - optical fiber cable, 4 - nozzle, 5 - access pipe, 6 - lower protective sleeve, 7 - first bayonet, 8 - insertion pipe, 9 - upper protective sleeve, 10 - insertion slot, 11 - second bayonet, 12 - beam adjustment tube, 13 - end connector, 14 - fixing plate, 15 - first electric push rod, 16 - focusing lens, 17 - first sliding ring, 18 - second electric push rod, 19 - collimating lens, 20 - second sliding ring. Detailed implementation manner

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] Please refer to Figures 1-4 , an embodiment provided by the present invention: an adjustable beam femtosecond laser processing device, including a lower protective housing 1, an upper protective housing 2, an optical fiber cable 3 and a beam adjustment tube 12. End connectors 13 are symmetrically and fixedly installed at the top and bottom ends of the beam adjustment tube 12. Fixing plates 14 are evenly and fixedly connected to the ends of the end connectors 13 close to the beam adjustment tube 12. Two first electric push rods 15 are symmetrically and fixedly installed inside the end of the end connector 13 at the bottom end of the beam adjustment tube 12 close to the fixing plate 14. A first sliding ring 17 is fixedly installed at the telescopic end of the first electric push rod 15. A focusing lens 16 is fixedly installed inside the first sliding ring 17. Two second electric push rods 18 are symmetrically and fixedly installed inside the end of the end connector 13 at the top end of the beam adjustment tube 12 close to the fixing plate 14. A second sliding ring 20 is fixedly installed at the telescopic end of the second electric push rod 18. A collimating lens 19 is fixedly installed inside the second sliding ring 20.

[0021] The upper protective housing 2 is fixedly installed at the top end of the lower protective housing 1. A nozzle 4 is fixedly connected to the middle of the bottom end of the lower protective housing 1. The beam is emitted through the output end of the nozzle 4 to process the workpiece to be processed. A lower protective sleeve 6 is movably inserted inside the lower protective housing 1. First bayonets 7 are evenly opened at one end of the lower protective sleeve 6 close to the nozzle 4. An insertion pipe 8 is fixedly connected to the end of the lower protective sleeve 6 far from the first bayonet 7. An access pipe 5 is fixedly connected to the middle of the top end of the upper protective housing 2. An upper protective sleeve 9 is movably inserted inside the upper protective housing 2. Second bayonets 11 are evenly opened at one end of the upper protective sleeve 9 close to the access pipe 5. An insertion slot 10 is opened at the end of the upper protective sleeve 9 far from the second bayonet 11. The output end of the optical fiber cable 3 is fixedly installed inside the access pipe 5. The insertion pipe 8 is movably inserted inside the insertion slot 10.

[0022] The lower protective sleeve 6 and the upper protective sleeve 9 are movably inserted outside the beam adjustment tube 12, and the beam adjustment tube 12 is reinforced and protected by the lower protective sleeve 6 and the upper protective sleeve 9. The fixing plate 14 located at the bottom end of the beam adjustment tube 12 is movably inserted inside the first bayonet 7, and the fixing plate 14 located at the top end of the beam adjustment tube 12 is movably inserted inside the second bayonet 11. The first sliding ring 17 and the second sliding ring 20 are both slidably connected inside the beam adjustment tube 12. The first electric push rod 15 and the second electric push rod 18 are respectively connected to the control terminal in a wired electrical manner. The first electric push rod 15 and the second electric push rod 18 are respectively controlled by the control terminal to extend and retract, so that the focusing mirror 16 moves away from or close to the nozzle 4, thereby adjusting the position of the beam focus, controlling the size of the beam, and thus adjusting the focusing position and size of the beam.

[0023] Working principle: During use, first, the first electric push rod 15 and the second electric push rod 18 are connected through the control terminal. The lower protective sleeve 6 and the upper protective sleeve 9 are nested at the bottom end and the top end outside the beam adjustment tube 12, and then the two end connectors 13 are respectively installed at the top end and the bottom end of the beam adjustment tube 12 through bolts. When the beam processing is enabled, the beam is transmitted to the inside of the end connector 13 through the output end of the optical fiber line 3. The beam irradiates on the collimating mirror 19 and diffuses, and is transmitted to the bottom end of the beam adjustment tube 12. When the dispersed beam irradiates on the focusing mirror 16, the dispersed beam is transmitted to the focusing mirror 16 and the beam is converged by the focusing mirror 16 and conveyed to the inside of the nozzle 4. Then, the converged beam processes the workpiece to be processed through the output end of the nozzle 4. Then, the control terminal is used to control the first electric push rod 15 and the second electric push rod 18 to extend and retract to adjust the beam. When the first electric push rod 15 extends, the telescopic end pushes the first sliding ring 17 to move upward. The movement of the first sliding ring 17 drives the focusing mirror 16 to move upward. The focusing mirror 16 moves upward away from the nozzle 4, thereby adjusting the position of the beam focus and controlling the size of the beam. When the second electric push rod 18 contracts, it drives the collimating mirror 19 to move upward, so as to disperse the beam more, and further adjust the uniformity of the beam transmission inside the beam adjustment tube 12.

[0024] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An adjustable beam femtosecond laser processing device, comprising a lower protective housing (1), an upper protective housing (2), an optical fiber (3) and a beam adjustment tube (12), characterized in that: The top and bottom ends of the beam adjustment tube (12) are symmetrically fixedly mounted with end connectors (13); one end of the end connector (13) close to the beam adjustment tube (12) is evenly fixedly connected with a fixing plate (14); two first electric push rods (15) are symmetrically fixedly mounted on the inner side of one end of the end connector (13) located at the bottom end of the beam adjustment tube (12) close to the fixing plate (14); a first sliding ring (17) is fixedly mounted on the telescopic end of the first electric push rod (15); and a focusing lens (16) is fixedly mounted on the inner side of the first sliding ring (17).

2. The adjustable beam femtosecond laser processing device according to claim 1, characterized in that: Two second electric push rods (18) are symmetrically fixedly installed on the inner side of one end of the end connector (13) located at the top end of the beam adjustment tube (12) close to the fixed plate (14), and a second sliding ring (20) is fixedly installed on the telescopic end of the second electric push rod (18), and a collimator (19) is fixedly installed on the inner side of the second sliding ring (20).

3. The adjustable beam femtosecond laser processing device according to claim 1, characterized in that: The upper protective shell (2) is fixedly mounted on the top of the lower protective shell (1); a nozzle (4) is fixedly connected to the middle of the bottom end of the lower protective shell (1); a lower protective sleeve (6) is movably plugged into the inner side of the lower protective shell (1); a first bayonet (7) is evenly formed at one end of the lower protective sleeve (6) close to the nozzle (4); and a plug-in tube (8) is fixedly connected to one end of the lower protective sleeve (6) away from the first bayonet (7).

4. The adjustable beam femtosecond laser processing device according to claim 3, characterized in that: An access tube (5) is fixedly connected to the middle of the top end of the upper protective shell (2), an upper protective sleeve (9) is movably inserted into the inner side of the upper protective shell (2), a second bayonet (11) is evenly provided at one end of the upper protective sleeve (9) close to the access tube (5), and an insertion groove (10) is provided at one end of the upper protective sleeve (9) away from the second bayonet (11).

5. The adjustable beam femtosecond laser processing device according to claim 4, characterized in that: The output end of the optical fiber line (3) is fixedly mounted on the inner side of the access tube (5), and the plug-in tube (8) is movably plugged into the inner side of the plug-in slot (10).

6. The adjustable beam femtosecond laser processing device according to claim 4, characterized in that: The lower protective sleeve (6) and the upper protective sleeve (9) are movably plugged into the outer side of the light beam adjustment tube (12).

7. The adjustable beam femtosecond laser processing device according to claim 4, characterized in that: The fixing plate (14) located at the bottom end of the beam adjustment tube (12) is movably plugged into the inner side of the first bayonet (7), and the fixing plate (14) located at the top end of the beam adjustment tube (12) is movably plugged into the inner side of the second bayonet (11).

8. The adjustable beam femtosecond laser processing device according to claim 2, characterized in that: The first sliding ring (17) and the second sliding ring (20) are both slidably connected to the inner side of the beam adjustment tube (12), and the first electric push rod (15) and the second electric push rod (18) are respectively electrically connected to the control terminal via wires.

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