Spraying equipment

Abstract

The utility model provides spraying equipment which is used for preparing a coating on the inner surface of a quartz tube, the spraying equipment comprises a mask plate, a rotating table and a spraying gun, the mask plate is designed to be matched with the quartz tube, a plurality of through holes distributed in an array are formed in the mask plate, and each through hole penetrates through the mask plate; the rotating table is used for placing a quartz tube and driving the quartz tube to rotate. According to the utility model, the mask plate is used for covering partial area of the inner surface of the quartz tube, and spraying is only carried out on the inner surface of the quartz tube corresponding to each through hole, so that a plurality of coating blocks which are arranged at intervals are formed on the inner surface of the quartz tube, and the purpose is to separate a deposition layer; the coating blocks are deposited on the surfaces of the coating blocks and the inner surface of the quartz tube in the non-spraying area respectively, a complete whole cannot be formed, and the stress in the deposition layer is dispersed to the boundary of the coating blocks, so that the stress borne by the quartz tube is reduced, the probability that the quartz tube is cracked and broken due to overlarge stress is reduced, and the service life of the quartz tube is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz tube manufacturing, in particular to a preparation system and a preparation method for an inner surface coating of a quartz tube. Background Art

[0002] LPCVD (Low Pressure Chemical Vapor Deposition) is a thin film deposition technology widely used in semiconductor and photovoltaic manufacturing. The LPCVD process usually uses quartz tubes as reaction furnace tubes. The LPCVD process requires a relatively high temperature and is mainly used for depositing thin films such as oxides, nitrides, and polysilicon.

[0003] Since the deposition of the LPCVD process is non-directional, a large amount of silicon or other non-quartz materials will be deposited on the inner surface of the furnace tube during the deposition process. When the deposition layer reaches a certain thickness, due to the difference in the expansion coefficients of silicon or other non-quartz materials and quartz, the quartz tube will crack due to excessive stress, seriously affecting the service life of the tube and increasing the process cost.

[0004] To solve this problem, in the prior art, a coating material is sprayed on the inner wall of the quartz tube as a protective layer to extend the service life of the quartz tube. Currently, the main idea for improving the coating process is to use a coating material with a lower expansion coefficient to reduce the stress difference caused by the difference in expansion coefficients. However, most of the existing coating schemes adopt a global spraying method, covering the entire inner wall of the quartz tube. After the LPCVD process, a uniformly distributed deposition layer will still be formed on the inner wall of the quartz tube. These deposition layers form a whole and adhere to the surface of the quartz tube completely. Therefore, the stress inside the deposition layer will act on the quartz tube. When the deposition thickness increases, the stress will also increase. When the deposition thickness reaches a certain level, the quartz tube will crack or even break due to excessive stress. Therefore, the existing coating schemes have limited effect on reducing the stress borne by the quartz tube and need to be improved. Summary of the Utility Model

[0005] The purpose of the utility model is to solve the deficiencies existing in the prior art and propose a spraying device that adopts a zoning spraying strategy. By using a mask plate to cover part of the inner surface area of the quartz tube and only spraying on the inner surface of the quartz tube corresponding to each through hole, the deposition layer is separated, greatly reducing the stress on the quartz tube after the LPCVD process and extending the service life of the quartz tube.

[0006] To achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A spraying device for preparing an inner surface coating of a quartz tube, the spraying device comprising a mask plate, a rotating table and a spray gun, wherein the structure of the mask plate matches the structure of the quartz tube, the mask plate is adapted to be inserted into the interior of the quartz tube, and the outer surface of the mask plate is adapted to fit against the inner surface of the quartz tube; the mask plate is in the shape of a hollow cylinder, and a plurality of through holes arranged in an array are provided on the mask plate, and each through hole penetrates through the mask plate; the rotating table is used for placing the quartz tube and driving the quartz tube to rotate; the spray gun is movably arranged at the side or above the rotating table, and the spray gun is used for spraying a coating onto the inner surface of the quartz tube corresponding to the through holes.

[0008] Preferably, the rotating table includes a base and two roller shafts arranged in parallel on the base, the roller shafts are rotatably arranged on the base through bearing seats, and a plurality of rollers are arranged at intervals on each roller shaft.

[0009] Preferably, the spraying device further includes a heater, and the heater is arranged above and / or at the side of the rotating table.

[0010] Preferably, the heater includes an infrared lamp and a lamp cover, the infrared lamp is arranged inside the lamp cover, and the lamp cover is arranged above the rotating table in a liftable manner.

[0011] Preferably, the through holes are circular, polygonal, strip-shaped, ring-shaped or irregular in shape.

[0012] Preferably, the sum of the pore areas of the plurality of through holes accounts for 1% to 80% of the inner surface area of the quartz tube.

[0013] Preferably, the inner surface of the mask plate is coated with a peelable coating, and the peelable coating covers the area outside the plurality of through holes.

[0014] Preferably, the thickness of the mask plate is 0.5 mm to 5.0 mm.

[0015] Preferably, the mask plate is made of plastic, resin or metal.

[0016] Preferably, the spray gun is a pneumatic spray gun.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows: In the spraying device of the present utility model, a rotating table is used to support the quartz tube and drive the quartz tube to rotate. A mask plate is used to cover a part of the inner surface of the quartz tube, and spraying is only performed on the inner surface of the quartz tube corresponding to each through hole, so as to form a plurality of coating blocks arranged at intervals on the inner surface of the quartz tube, aiming to separate the deposition layer. When silicon or other non-quartz materials are deposited, they will be deposited on the surfaces of the coating blocks and the inner surface of the quartz tube in the unsprayed area respectively, and no complete whole will be formed again. At this time, the stress inside the deposition layer will be dispersed to the boundaries of the coating blocks, thereby reducing the stress borne by the quartz tube and reducing the probability of the quartz tube cracking and breaking due to excessive stress, and prolonging the service life of the quartz tube. Description of the Drawings

[0018] Figure 1 Schematic structural diagram of the spraying device according to some embodiments of the present utility model;

[0019] Figure 2 Schematic diagram of the spraying device according to some embodiments of the present utility model when applied to the spraying of a quartz tube;

[0020] Figure 3 Schematic structural diagram of the mask plate according to some embodiments of the present utility model;

[0021] Figure 4 Schematic unfolded structural diagram of the mask plate according to some embodiments of the present utility model;

[0022] Figure 5 Cross-sectional view of the through hole of the mask plate according to some embodiments of the present utility model;

[0023] Figure 6 Cross-sectional view of the through hole of the mask plate according to some other embodiments of the present utility model;

[0024] Figure 7 Cross-sectional view of the mask plate installed on the quartz tube according to some other embodiments of the present utility model;

[0025] Figure 8 Schematic structural diagram of the spraying device according to some other embodiments of the present utility model;

[0026] Figure 9 Schematic diagram of the spraying device according to some other embodiments of the present utility model when applied to the spraying of a quartz tube;

[0027] Figure 10 Schematic structural diagram of the quartz tube after spraying;

[0028] Figure 11 Cross-sectional view of the quartz tube after the LPCVD process.

[0029] In the figure, 10 - mask, 11 - through hole, 12 - tearable coating, 13 - inner surface, 14 - outer surface, 15 - limiting ring, 16 - bolt, 20 - rotating table, 21 - base, 22 - roller shaft, 23 - bearing seat, 24 - roller, 30 - spray gun, 40 - heater, 41 - infrared lamp, 42 - lamp cover, 50 - deposition layer, 60 - quartz tube, 61 - coating block. Detailed implementation manners

[0030] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art without creative efforts based on the described embodiments of the present utility model fall within the scope of protection of the present utility model. It can be understood that, without conflict, some technical means described in the various embodiments herein may be replaced or combined with each other.

[0031] In the description of the present utility model, if there are terms such as "first", "second", etc., they are only used to distinguish the described objects and do not have any sequential or technical meanings. Thus, the objects defined with "first", "second", etc. may explicitly or implicitly include one or more of such objects. Also, similar terms such as "one" or "a" do not indicate a quantity limitation, but rather indicate the existence of at least one, and "multiple" means not less than two.

[0032] In the description of the specification of the present utility model, referring to "one embodiment" or "some embodiments" etc. means that a specific feature, structure or characteristic described in one or more embodiments of the present utility model is included. Thus, the statements "in one embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments" etc. that appear in different places in this specification are not necessarily all referring to the same embodiment, but mean "one or more but not all of the embodiments", unless otherwise specifically emphasized in other ways.

[0033] The present utility model provides a spraying device for preparing an inner surface coating of a quartz tube. Refer to Figures 1 to 3As shown, in some embodiments, the spraying device includes a mask 10, a rotating table 20, and a spray gun 30. The structure of the mask 10 matches the structure of the quartz tube 60. The mask 10 is used to be inserted into the interior of the quartz tube 60, and the outer surface of the mask 10 is adapted to fit with the inner surface of the quartz tube 60. Specifically, the mask 10 is in the shape of a hollow cylinder, and a plurality of through holes 11 arranged in an array are provided on the mask 10. Each through hole 11 extends from the inner surface of the mask 10 to the outer surface of the mask 10, that is, each through hole 11 penetrates the mask 10. The rotating table 20 is used to place the quartz tube 60 and drive the quartz tube 60 to rotate; the spray gun 30 is movably arranged on the side or above the rotating table 20, and the spray gun 30 is used to spray the coating onto the inner surface of the quartz tube 60 corresponding to the through holes 11.

[0034] During spraying, first insert the mask 10 into the quartz tube 60 so that the outer surface of the mask 10 fits with the inner surface of the quartz tube 60; then place the quartz tube 60 on the rotating table 20, insert the spray gun 30 into the interior of the quartz tube 60. While the rotating table 20 drives the quartz tube 60 and the mask 10 to rotate, the spray gun 30 can move along the axial direction (X direction) of the quartz tube 60 and evenly spray the coating onto the inner surface of the quartz tube 60 corresponding to the through holes 11, thereby forming a plurality of coating areas arranged in an array on the inner surface of the quartz tube 60. After the plurality of coating areas are dried and cured, a plurality of coating blocks arranged at intervals can be formed.

[0035] Referring to Figure 10 and Figure 11 , after adopting the above spraying device and the zone spraying strategy, a plurality of coating blocks 61 arranged at intervals are formed on the inner surface of the quartz tube 60. There is a height difference between the plurality of coating blocks 61 and the unsprayed area on the inner surface of the quartz tube. The plurality of coating blocks 61 can separate the deposition layer 50: when silicon or other non - quartz materials are deposited, they will be deposited on the surfaces of the coating blocks 61 and the inner surface of the quartz tube in the unsprayed area respectively. Due to the height difference and different expansion coefficients between the coating blocks 61 and the unsprayed area, the deposition layer 50 will no longer form a complete whole. At this time, the stress inside the deposition layer 50 will be dispersed to the boundaries of the coating blocks, thereby reducing the stress borne by the quartz tube 60 and reducing the probability of the quartz tube 60 cracking and breaking due to excessive stress, and prolonging the service life of the quartz tube 60.

[0036] In some embodiments, the thickness of the coating block 61 is 0.1 mm to 1.5 mm. Of course, the present invention is not limited thereto. In other embodiments, the thickness of the coating block 61 can be reasonably set according to actual needs and can be adaptively adjusted by adopting different spraying times.

[0037] It should be noted that the rotating table 20 can adopt a horizontal or vertical structure. When the rotating table 20 adopts a horizontal structure, the rotation axis of the quartz tube 60 is along the horizontal direction, and the moving direction of the spray gun 30 is also along the horizontal direction; when the rotating table 20 adopts a vertical structure, the rotation axis of the quartz tube 60 is along the vertical direction, and the moving direction of the spray gun 30 is also along the vertical direction. The rotational movement of the rotating table 20 can be driven by products such as motors, and the movement of the spray gun 30 along the axial direction (X direction) of the quartz tube can be achieved by products such as electric cylinders, air cylinders or guide rails.

[0038] Referring to Figure 1 , in some embodiments, the rotating table 20 adopts a horizontal structure. The rotating table 20 includes a base 21 and two roller shafts 22 arranged in parallel on the base 21. The roller shafts 22 are rotatably arranged on the base 21 through bearing seats 23, and a plurality of rollers 24 are arranged at intervals on each roller shaft 22. Among them, the roller shafts 22 can be driven by products such as motors. The rollers 24 on the two roller shafts 22 are used to support the quartz tube 60, and when the roller shafts 22 rotate, the plurality of rollers 24 can rotate synchronously, thereby driving the quartz tube 60 to rotate.

[0039] Furthermore, in one embodiment, the roller shafts 22 are horizontally arranged, and the quartz tube 60 is also horizontally placed on the roller shafts 22, that is, the central axis of the quartz tube 60 is arranged along the horizontal direction; during spraying, the spray gun 30 can move horizontally inside the quartz tube 60, so as to perform full - range spraying on the inner surface of the quartz tube 60 while the quartz tube 60 rotates. Of course, the present utility model is not limited thereto. In other embodiments, the rotating table 20 can also adopt other reasonable structures.

[0040] In some embodiments, the spray gun 30 can adopt a commercially available pneumatic spray gun, and the spraying pressure of the spray gun 30 can be set to 2 kg - 6 kg. However, the present utility model is not limited thereto. In other embodiments, the spray gun 30 can also adopt other suitable spray gun products. Referring to Figure 2 , during spraying, the mask plate 10 is inserted into the quartz tube 60, and the outer surface of the mask plate 10 fits with the inner surface of the quartz tube 60; the rotating table 20 drives the quartz tube 60 and the mask plate 10 to rotate, and the spray gun 30 evenly sprays the coating onto the inner surface of the quartz tube 60 corresponding to the through - holes 11. The spray gun 30 can also move along the axial direction (X direction) of the quartz tube 60 (driven by products such as electric cylinders, air cylinders or guide rails), so as to spray the inner surfaces at different axial positions of the quartz tube 60 and ensure the spraying effect.

[0041] In the application, the material, thickness of the mask 10, the shape, aperture diameter, quantity, and arrangement pattern of the through-holes 11, etc. can be reasonably set according to the actual situation. For example, in some embodiments, the mask 10 can be made of plastic, resin, or metal, and the thickness of the mask 10 is 0.5 mm to 5.0 mm. The through-holes 11 can be circular, polygonal, strip-shaped, annular, irregularly shaped, or other reasonable shapes; the through-holes 11 can be arranged in an array along the axial and circumferential directions of the mask 10, or can be arranged in other reasonable patterns.

[0042] In some embodiments, the sum of the aperture areas of the multiple through-holes 11 accounts for 1% to 80% of the inner surface area of the quartz tube 60. After preparing the coating on the inner surface of the quartz tube 60 using the above spraying device, the sum of the areas of the multiple coating blocks 61 formed accounts for 1% to 80% of the inner surface area of the quartz tube 60.

[0043] In other embodiments, the sum of the aperture areas of the multiple through-holes 11 accounts for 10% to 70% of the inner surface area of the quartz tube 60. After preparing the coating on the inner surface of the quartz tube 60 using the above spraying device, the sum of the areas of the multiple coating blocks 61 formed accounts for 10% to 70% of the inner surface area of the quartz tube 60.

[0044] In still other embodiments, the sum of the aperture areas of the multiple through-holes 11 accounts for 20% to 60% of the inner surface area of the quartz tube 60. After preparing the coating on the inner surface of the quartz tube 60 using the above spraying device, the sum of the areas of the multiple coating blocks 61 formed accounts for 20% to 60% of the inner surface area of the quartz tube 60. In this way, the stress borne by the quartz tube after the LPCVD process can be significantly reduced, the probability of the quartz tube cracking and breaking due to excessive stress can be decreased, and the service life of the quartz tube can be extended.

[0045] Refer to Figure 4 , in some embodiments, the mask 10 is unfolded into a square plate, and the through-holes 11 are also square holes. In the unfolded square mask 10, the through-holes 11 are evenly arranged in the horizontal and vertical directions. Of course, in other embodiments, the shape, arrangement pattern, etc. of the through-holes can be reasonably set according to actual requirements.

[0046] Refer to Figure 5, in some embodiments, the inner surface 13 of the mask 10 is coated with a peelable coating 12, and the peelable coating 12 covers the area outside the plurality of through holes 11. Among them, the peelable coating 12 can be formed by spraying commercially available peelable coatings or paints, and the thickness of the peelable coating 12 can be reasonably set according to actual needs. When the mask 10 is applied to the quartz tube spraying, the inner surface 13 thereof will inevitably be attached with the coating used for the quartz tube. When the amount of the attached coating is large, it may affect the spraying effect and quality of the inner surface coating of the quartz tube. Therefore, the present utility model provides a peelable coating on the inner surface 13 of the mask 10. When the amount of the coating used for the quartz tube attached is large, the peelable coating 12 can be torn off, so as to remove the attached coating together; before the quartz tube spraying process is required, a peelable coating 12 with a required thickness can be sprayed on the inner surface 13 of the mask 10 by using a peelable coating or paint. In this way, the service life of the mask 10 can be extended and the replacement cost can be reduced.

[0047] It should be understood that the aperture of the through hole 11 at the inner surface 13 of the mask 10 should not be less than the aperture of the through hole 11 at the outer surface 14 of the mask 10 to ensure the spraying effect of the inner surface coating of the quartz tube. Refer to Figure 5 , in some embodiments, the through hole 11 has the same aperture in its extending direction. Refer to Figure 6 , in some other embodiments, the aperture of the through hole 11 at the inner surface 13 of the mask 10 is larger than its aperture at the outer surface 14 of the mask 10. In the extending direction from the inside to the outside, the aperture of the through hole 11 gradually decreases, and the through hole 11 is generally in a horn-shaped structure. In this way, during spraying, the inner surface 13 of the mask 10 and the corner of the hole wall of the through hole 11 can be avoided from blocking the coating, thereby improving the spraying effect.

[0048] Refer to Figure 7 , in still some embodiments, limiting rings 15 are respectively arranged at both axial ends of the mask 10, and the outer diameter of the limiting ring 15 is larger than the outer diameter of the mask 10. Further, the limiting ring 15 is sleeved on the end of the mask 10, and the limiting rings 15 at both ends respectively abut against both ends of the quartz tube 60 to prevent the mask 10 from axially moving in the quartz tube 60. In some embodiments, the limiting ring 15 and the mask 10 can be detachably connected by bolts 16, and the central axis of the bolt 16 is perpendicular to the central axis of the mask 10. During assembly, first, the mask 10 is installed in the quartz tube 60, then the limiting rings 15 are sleeved on both ends of the mask 10, and the limiting ring 15 and the mask 10 are connected by bolts 16.

[0049] Combined with reference to Figure 8 and Figure 9In other embodiments, the spraying equipment further includes a heater 40, which is disposed above and / or on the side of the rotating table 20. The spraying step includes multiple spraying and multiple drying operations, for example, 2-5 times respectively. After each spraying operation, the heater 40 can be used to heat the quartz tube 60 to dry the coating area. Among them, the heater 40 can be an infrared lamp or other product. For example, in one embodiment, the heater 40 includes an infrared lamp 41 and a lampshade 42, the infrared lamp 41 is disposed in the lampshade 42, and the lampshade 42 can be lifted and lowered above the rotating table 21. The lifting and lowering movement of the lampshade 42 can be driven by products such as electric cylinders and cylinders. After each spraying operation, the lampshade 42 descends and covers the quartz tube 60. While the rotating table 20 drives the quartz tube 60 to rotate, the infrared lamp 41 can heat the quartz tube 60 in all directions, so that the coating area is evenly and quickly dried, thereby improving the process efficiency. Through multiple spraying and multiple drying operations, a coating area of ​​a desired thickness can be formed. Of course, the present invention is not limited thereto, and in other embodiments, the heater 40 may also be other reasonable products.

[0050] It should be noted that the coating can adopt an existing ceramic coating with a low expansion coefficient to minimize the stress difference caused by the difference in expansion coefficient. Before spraying, a sandblasting machine can also be used to sandblast the inner surface of the quartz tube 60 so that the inner surface of the quartz tube 60 is frosted to facilitate the adhesion of the coating, enhance the adhesion of the coating, ensure the adhesion strength of the coating, and extend the durability of the coating. After multiple spraying and drying operations, the mask is taken out and the quartz tube is sent to a heat treatment furnace to solidify the coating area to form a coating block 61. The temperature of the heat treatment can be set accordingly according to the characteristics of the selected coating. The number of spraying operations and drying operations can be reasonably set according to actual needs. For example, in one embodiment, the number of spraying operations is 5 times, and a drying operation is performed after each spraying operation. The thickness of the coating block 61 finally solidified is 0.2 mm.

[0051] It has been verified through actual production that the partition spraying method of the utility model can significantly reduce the stress borne by the quartz tube after the LPCVD process, reduce the probability of the quartz tube cracking and breaking due to excessive stress, and extend the service life of the quartz tube.

[0052] In the spraying device of the present utility model, a rotating table is used to support the quartz tube and drive the quartz tube to rotate. A mask plate is used to cover a part of the inner surface of the quartz tube, and spraying is only carried out on the inner surface of the quartz tube corresponding to each through hole, so as to form a plurality of coating blocks arranged at intervals on the inner surface of the quartz tube, aiming to separate the deposition layer: when silicon or other non-quartz materials are deposited, they will be respectively deposited on the surface of the coating blocks and the inner surface of the quartz tube in the unsprayed area, and no complete whole will be formed again. At this time, the stress inside the deposition layer will be dispersed to the boundary of the coating blocks, thereby reducing the stress borne by the quartz tube and reducing the probability of the quartz tube cracking and breaking due to excessive stress, and prolonging the service life of the quartz tube.

[0053] The present utility model has been described by the above related embodiments. However, the above embodiments are only examples for implementing the present utility model. It must be pointed out that the disclosed embodiments do not limit the scope of the present utility model. On the contrary, modifications and refinements made without departing from the spirit and scope of the present utility model fall within the scope of patent protection of the present utility model.

Claims

1. A spraying device for preparing the inner surface coating of a quartz tube, characterized in that: The spraying equipment includes a mask plate, a rotating table and a spray gun. The structure of the mask plate matches the structure of the quartz tube. The mask plate is used to be installed in the interior of the quartz tube, and the outer surface of the mask plate is suitable for fitting with the inner surface of the quartz tube. The mask plate is a hollow cylindrical shape, and is provided with a plurality of through holes arranged in an array, each through hole passing through the mask plate; the rotating table is used to place the quartz tube and drive the quartz tube to rotate; the spray gun is movably arranged on the side or above the rotating table, and the spray gun is used to spray paint to the inner surface of the quartz tube corresponding to the through hole.

2. The spraying device according to claim 1, characterized in that: The rotating platform comprises a base and two roller shafts arranged on the base in parallel with each other. The roller shafts are rotatably arranged on the base through bearing seats, and a plurality of rollers are arranged at intervals on each roller shaft.

3. The spraying equipment according to claim 1, characterized in that: The spraying equipment further comprises a heater, and the heater is arranged above and / or on the side of the rotating table.

4. The spraying device according to claim 3, characterized in that: The heater comprises an infrared lamp and a lampshade, wherein the infrared lamp is arranged in the lampshade, and the lampshade is arranged above the rotating platform in a liftable manner.

5. The spraying equipment according to claim 1, characterized in that: The through hole is circular, polygonal, strip-shaped or ring-shaped.

6. The spraying device according to claim 1, characterized in that: The sum of the aperture areas of the plurality of through holes accounts for 1% to 80% of the inner surface area of ​​the quartz tube.

7. The spraying equipment according to claim 1, characterized in that: The inner surface of the mask is covered with a tearable coating, and the tearable coating covers areas outside the plurality of through holes.

8. The spraying equipment according to claim 1, characterized in that: The thickness of the mask plate is 0.5 mm to 5.0 mm.

9. The spraying device according to claim 1, characterized in that: The mask is made of plastic, resin or metal.

10. The spraying equipment according to claim 1, characterized in that: The spray gun is a pneumatic spray gun.

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