Adjusting device and PECVD (plasma enhanced chemical vapor deposition) equipment

Abstract

The utility model relates to the field of photovoltaic technology, and provides an adjusting device. The adjusting device comprises a lower polar plate heating assembly, a plurality of adjusting assemblies and a plurality of transmission assemblies, a cavity is formed in the lower polar plate heating assembly, and the cavity is used for containing the carrier plate; the multiple transmission assemblies are arranged on the side wall of the cavity at intervals and used for conveying the carrier plate; the multiple adjusting assemblies are arranged on the side wall of the cavity at intervals and staggered with the conveying assemblies, and the adjusting assemblies are used for adjusting the height of the carrier plate. According to the utility model, the defect of higher cost caused by the use of a corrugated pipe with higher reliability requirement when a jacking system of PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment is used for adjusting the process spacing in the prior art is overcome, and an adjusting device capable of avoiding the use of the corrugated pipe is realized, so that the process cost of the equipment is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to a regulating device and PECVD equipment. Background Art

[0002] With the continuous consumption of non-renewable energy around the world and new requirements for carbon emissions at home and abroad, the demand for and utilization rate of renewable energy such as solar energy and wind energy has risen sharply. Photovoltaic power generation, as the main renewable energy, has developed rapidly in recent years. PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment technology has become one of the mainstream methods for coating photovoltaic solar cells due to its low temperature, high efficiency and low cost.

[0003] At present, PECVD equipment mainly controls and adjusts the process spacing between the upper and lower electrode plates to achieve battery coating through the lifting system. The lifting system needs to make reciprocating up and down movements, and a bellows is needed as a sealing connection between the lifting system and the cavity, which requires high reliability of the bellows, resulting in a high process cost for the equipment. Utility Model Content

[0004] The utility model provides an adjusting device for solving the problem that the lifting system of the PECVD equipment in the prior art needs to use a bellows with high reliability requirements when adjusting the process spacing, thereby causing a large process cost of the equipment. An adjusting device is realized that can avoid the use of bellows, thereby reducing the process cost of the equipment.

[0005] The utility model provides an adjusting device, comprising a lower plate heating component, a plurality of adjusting components and a plurality of transmission components, wherein the lower plate heating component has a cavity inside, and the cavity is used to accommodate a carrier; a plurality of transmission components are arranged at intervals on the side wall of the cavity, and the transmission components are used to transport the carrier; a plurality of adjusting components are arranged at intervals on the side wall of the cavity, and are arranged in a staggered manner with the transmission components, and the adjusting components are used to adjust the height of the carrier.

[0006] According to an adjustment device provided by the utility model, the adjustment component includes a first rotating shaft, a rotating arm, a first transmission wheel and a first power component, the first rotating shaft passes through the side wall of the cavity; the rotating arm is arranged inside the cavity, and one end is connected to the first rotating shaft; the first transmission wheel is arranged at the other end of the rotating arm; the first power component is connected to the first rotating shaft to drive the first rotating shaft to rotate.

[0007] According to an adjustment device provided by the utility model, the plurality of adjustment components are divided into two groups and are respectively arranged on both sides of the cavity; the first power component is arranged in a one-to-one correspondence with the two groups of adjustment components.

[0008] According to an adjusting device provided by the present utility model, the first power assembly includes a first driven wheel and a second driven wheel. The first driven wheels are respectively arranged on the first rotating shafts in a one-to-one correspondence; the second driven wheels are respectively arranged on the first rotating shafts, and are spaced apart from the first driven wheels located on the same first rotating shaft; adjacent two of the first rotating shafts are in transmission connection with the corresponding first driven wheels through a conveyor belt, or, adjacent two of the first rotating shafts are in transmission connection with the corresponding second driven wheels through a conveyor belt, so that the first rotating shafts rotate synchronously.

[0009] According to an adjusting device provided by the present utility model, the first power assembly further includes a motor and a driving wheel. The motor is arranged on the lower plate heating assembly; the driving wheel is arranged on the output shaft of the motor, and the driving wheel is in transmission connection with one of the first driven wheels or the second driven wheels through the conveyor belt.

[0010] According to an adjusting device provided by the present utility model, the transmission assembly includes a second rotating shaft, a second transmission wheel and a second power assembly. The second rotating shaft penetrates through the side wall of the cavity; the second transmission wheel is arranged at one end of the second rotating shaft located inside the cavity; the second power assembly is connected to the end of the second rotating shaft located outside the cavity for driving the second rotating shaft to rotate.

[0011] According to an adjusting device provided by the present utility model, a plurality of the transmission assemblies are divided into two groups and are respectively arranged on both sides of the cavity; the second power assembly is arranged in one-to-one correspondence with the two groups of the transmission assemblies.

[0012] According to an adjusting device provided by the present utility model, the second power assembly includes a first driven wheel and a second driven wheel. The first driven wheels are respectively arranged on the second rotating shafts in a one-to-one correspondence; the second driven wheels are respectively arranged on the second rotating shafts, and are spaced apart from the first driven wheels located on the same second rotating shaft; adjacent two of the second rotating shafts are in transmission connection with the corresponding first driven wheels through a conveyor belt, or, adjacent two of the second rotating shafts are in transmission connection with the corresponding second driven wheels through a conveyor belt, so that the second rotating shafts rotate synchronously.

[0013] According to an adjusting device provided by the present utility model, the second power assembly further includes a motor and a driving wheel. The motor is arranged on the lower plate heating assembly; the driving wheel is arranged on the output shaft of the motor, and the driving wheel is in transmission connection with the first driven wheel or the second driven wheel through the conveyor belt.

[0014] The present utility model further provides a PECVD device, including the adjusting device as described in any one of the above embodiments and an upper plate spraying assembly covering above the lower plate heating assembly.

[0015] The adjusting device provided by the present utility model integrates the adjusting component directly on the lower plate heating component, and adjusts the height of the carrier plate through the adjusting component, avoiding the use of bellows, thus not involving a complex sealing structure, reducing potential failure points, improving the overall reliability of the equipment, and significantly reducing the equipment cost and maintenance cost.

[0016] A PECVD device provided by the present utility model includes the above-mentioned adjusting device, and thus also has the beneficial effects of the above-mentioned adjusting device. Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a schematic structural diagram of the adjusting device provided by the present utility model.

[0019] Figure 2 is Figure 1 The enlarged view of part A in

[0020] Figure 3 is Figure 1 The enlarged view of part B in

[0021] Reference numerals: 100: lower plate heating component; 200: adjusting component; 210: first rotating shaft; 220: rotating arm; 230: first transmission wheel; 240: first power component; 241: base; 242: motor; 243: driving wheel; 244: conveyor belt; 245: first driven wheel; 246: second driven wheel; 300: transmission component; 310: second rotating shaft; 320: second transmission wheel; 330: second power component. Detailed Embodiments

[0022] The following will further describe in detail the embodiments of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0023] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0024] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0025] In the embodiments of the present utility model, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over", and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath", and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0026] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0027] When adjusting the process gap of the existing device, it is necessary to use a traditional jacking system to lift and lower the entire lower plate heating assembly 100. This method relies on bellows as a sealing connection component. The bellows are prone to wear and leakage during long-term reciprocating motion, affecting the sealing performance and stability of the equipment. To solve this technical problem, the present utility model is proposed. The following combines Figures 1 - 3 Describe the adjusting device and PECVD equipment of the embodiments of the present utility model.

[0028] Figure 1 Illustrates the structural schematic diagram of the adjusting device provided by the embodiments of the present utility model. Refer to Figure 1 An adjusting device provided by an embodiment of the present utility model includes a lower plate heating assembly 100, a plurality of adjusting assemblies 200, and a plurality of transmission assemblies 300. The lower plate heating assembly 100 has a cavity inside, and the cavity is used to accommodate the carrier plate; the plurality of transmission assemblies 300 are arranged at intervals on the side wall of the cavity, and the transmission assemblies 300 are used to convey the carrier plate; the plurality of adjusting assemblies 200 are arranged at intervals on the side wall of the cavity and are arranged in an interleaved manner with the transmission assemblies 300, and the adjusting assemblies 200 are used to adjust the height of the carrier plate.

[0029] By directly integrating the adjusting assembly 200 on the lower plate heating assembly 100, the present utility model adjusts the height of the carrier plate through the adjusting assembly 200, avoiding the use of bellows, and thus not involving a complex sealing structure, reducing potential failure points, improving the overall reliability of the equipment, and significantly reducing the equipment cost and maintenance cost. Secondly, by precisely controlling the distance between the carrier plate and the upper electrode plate through the adjusting assembly 200, key parameters such as gas distribution, temperature gradient, and reaction rate during the coating process can be optimized, thereby improving the quality and consistency of the coating. Furthermore, by precisely adjusting the height of the carrier plate through the adjusting assembly 200, it can adapt to carrier plates of different sizes, shapes, and thicknesses, meeting the requirements of different production lines.

[0030] In the above structure, the lower plate heating assembly 100 includes a cavity for accommodating the carrier plate. This cavity provides the necessary temperature and environmental conditions for the carrier plate during the coating process. The adjustment assembly 200 and the transfer assembly 300 are arranged alternately, which means they do not interfere with each other. Multiple adjustment assemblies 200 can independently adjust the height of the carrier plate. When the transfer assembly 300 conveys the carrier plate, the adjustment assembly 200 can be in a position where it does not contact the carrier plate or in a position where it contacts the carrier plate, but does not interfere with the movement of the carrier plate. The adjustment assembly 200 may adopt mechanisms such as screw jacks, pneumatic or hydraulic cylinders, and precisely control to change the distance between the carrier plate and the upper electrode plate to meet the requirements of different coating processes. It should be noted that multiple adjustment assemblies 200 need to work synchronously to ensure the adjustment accuracy of the carrier plate. Multiple transfer assemblies 300 are arranged at intervals on the lower plate heating assembly 100, and their main function is to convey the carrier plate into and out of the coating area. The transfer assembly 300 can be a conveyor belt or other suitable automated transfer equipment to ensure that the carrier plate can be accurately and efficiently moved to the specified position. It should be noted that the carrier plate needs to enter the cavity inside the lower plate heating assembly 100 from one end and exit from the other end after being processed inside the cavity. Therefore, in order to ensure that the carrier plate passes through the lower plate heating assembly 100 smoothly, openings can be provided on both side walls of the lower plate heating assembly 100.

[0031] In some possible embodiments, the lower plate heating assembly 100 can be a rectangular structure with an opening on its top surface. The lower plate heating assembly 100 can adopt materials with high strength and corrosion resistance, such as stainless steel, aluminum alloy, etc., to improve the bearing capacity and service life of the adjustment device. In order to prevent deformation or damage caused by long-term operation, necessary reinforcing ribs can be added to the lower plate heating assembly 100.

[0032] Referring to Figure 1 , in some embodiments of the present utility model, the adjustment assembly 200 includes a first rotating shaft 210, a rotating arm 220, a first transmission wheel 230, and a first power assembly 240. The first rotating shaft 210 passes through the side wall of the cavity; the rotating arm 220 is arranged inside the cavity and one end is connected to the first rotating shaft 210; the first transmission wheel 230 is rotatably arranged at the other end of the rotating arm 220; the first power assembly 240 is in transmission connection with the first rotating shaft 210 to drive the first rotating shaft 210 to rotate.

[0033] In the above structure, the first power assembly 240 is connected to the first rotating shaft 210 through a transmission mechanism (such as gears, belts, etc.). When the first power assembly 240 is started, it generates a driving force and transmits it to the first rotating shaft 210. After receiving the driving force of the first power assembly 240, the first rotating shaft 210 starts to rotate. Since the first rotating shaft 210 passes through the side wall of the cavity and is connected to one end of the rotating arm 220, the rotating arm 220 rotates as the first rotating shaft 210 rotates. When the rotating arm 220 rotates, the first transmission wheel 230 also rotates accordingly. The height of the carrier plate is adjusted by the rotation of the first transmission wheel 230. It should be noted that in the initial state, the first transmission wheel 230 and the transmission assembly 300 are at the same height. When the transmission assembly 300 transports the carrier plate, the bottom of the carrier plate contacts the first transmission wheel 230. During this process, the first transmission wheel 230 rotates on its own to play an auxiliary conveying role. When the height of the carrier plate is increased, the plurality of first transmission wheels 230 always contact the carrier plate, while the transmission assembly 300 disengages from the carrier plate.

[0034] Referring to Figure 1 , in some embodiments of the present invention, the plurality of adjusting assemblies 200 are divided into two groups and are respectively arranged on both sides of the cavity; the first power assembly 240 is arranged in one-to-one correspondence with the two groups of adjusting assemblies 200. By respectively arranging the two groups of adjusting assemblies 200 on both sides of the cavity, the two sides of the carrier plate can be supported and transported simultaneously, greatly improving the stability of the carrier plate transportation. It should be noted that the plurality of adjusting assemblies 200 and the plurality of transmission assemblies 300 are both arranged at intervals along the length direction of the lower plate heating assembly 100.

[0035] Figure 2 is Figure 1 the enlarged view of part A in

[0036] Referring to Figure 2 , in some embodiments of the present invention, the first power assembly 240 includes a first driven wheel 245 and a second driven wheel 246. The first driven wheels 245 are respectively arranged on the first rotating shafts 210 in one-to-one correspondence; the second driven wheels 246 are respectively arranged on the first rotating shafts 210 in one-to-one correspondence and are spaced from the first driven wheels 245 located on the same first rotating shaft 210; adjacent two first rotating shafts 210 are in transmission connection with the corresponding first driven wheels 245 through a conveyor belt 244, or adjacent two first rotating shafts 210 are in transmission connection with the corresponding second driven wheels 246 through a conveyor belt 244, so that the first rotating shafts 210 rotate synchronously.

[0037] Specifically, both the first driven wheel 245 and the second driven wheel 246 are coaxially arranged with the first rotating shaft 210, and the first driven wheel 245 and the second driven wheel 246 are arranged at intervals along the length direction of the first rotating shaft 210, that is, the first rotating shaft 210, the first driven wheel 245, and the second driven wheel 246 rotate synchronously. Assume that in the figure, from left to right are the first first rotating shaft 210, the second first rotating shaft 210, the third first rotating shaft 210, the fourth first rotating shaft 210, and so on. Among them, the first first rotating shaft 210 and the second first rotating shaft 210 are connected by a conveyor belt 244 to the first driven wheel 245 located above them by a belt; while the second first rotating shaft 210 and the third first rotating shaft 210 are connected by a conveyor belt 244 to the second driven wheel 246 located above them by a belt; the third first rotating shaft 210 and the fourth first rotating shaft 210 are connected by a conveyor belt 244 to the first driven wheel 245 located above them by a belt, and so on. By such connection, the connected first rotating shafts 210 can be made to rotate synchronously, and then the corresponding first transmission wheels 230 can be controlled to rotate synchronously, realizing the unified adjustment of the carrier.

[0038] Figure 3 is Figure 1 The enlarged view of part B in

[0039] Refer to Figure 2 and Figure 3 In some embodiments of the present invention, the first power assembly 240 further includes a motor 242 and a driving wheel 243. The motor 242 is arranged on the lower plate heating assembly 100; the driving wheel 243 is arranged on the output shaft of the motor 242, and the driving wheel 243 is in transmission connection with one of the first driven wheels 245 or the second driven wheels 246 through a conveyor belt 244.

[0040] Specifically, the motor 242 is fixedly installed on the lower plate heating assembly 100 through a base 241. The driving wheel 243 can be in transmission connection with the first driven wheel 245 or in transmission connection with the second driven wheel 246. Since on the basis of the previous embodiment, the first rotating shafts 210 in the same group can rotate synchronously, only by connecting the driving wheel 243 to the first driven wheel 245 or the second driven wheel 246 on any one of the first rotating shafts 210 through a conveyor belt 244 can all the first rotating shafts 210 be driven to rotate synchronously. In some possible embodiments, the driving wheel 243 is in belt transmission connection with the first driven wheel 245 or the second driven wheel 246 on the outermost first rotating shaft 210.

[0041] Refer to Figure 1, in some embodiments of the present utility model, the transmission assembly 300 includes a second rotating shaft 310, a second driving wheel 320, and a second power assembly 330. The second rotating shaft 310 rotatably penetrates through the side wall of the cavity; the second driving wheel 320 is disposed at one end of the second rotating shaft 310 inside the cavity; the second power assembly 330 is connected to the end of the second rotating shaft 310 outside the cavity for driving the second rotating shaft 310 to rotate. In this embodiment, the second power assembly 330 drives the second rotating shaft 310 to rotate, thereby driving the second driving wheel 320 to rotate, and the carrier plate is transmitted between the second driving wheels 320 by the rotation of the second driving wheel 320. In order to improve the transmission efficiency, the second driving wheel 320 can be made of some materials with relatively large friction, such as rubber and the like.

[0042] Referring to Figures 1 to 3 , in some embodiments of the present utility model, the plurality of transmission assemblies 300 are divided into two groups and are respectively disposed on both sides of the cavity; the second power assemblies 330 are arranged in one-to-one correspondence with the two groups of transmission assemblies 300. The second power assembly 330 includes a first driven wheel 245 and a second driven wheel 246. The first driven wheels 245 are respectively disposed on the second rotating shafts 310 in one-to-one correspondence; the second driven wheels 246 are respectively disposed on the second rotating shafts 310 and are spaced from the first driven wheels 245 on the same second rotating shaft 310; two adjacent second rotating shafts 310 are in transmission connection with the corresponding first driven wheels 245 through a conveyor belt 244, or two adjacent second rotating shafts 310 are in transmission connection with the corresponding second driven wheels 246 through a conveyor belt 244, so that the second rotating shafts 310 rotate synchronously. The second power assembly 330 further includes a motor 242 and a driving wheel 243. The motor 242 is disposed on the lower plate heating assembly 100; the driving wheel 243 is disposed on the output shaft of the motor 242, and the driving wheel 243 is in transmission connection with the first driven wheel 245 or the second driven wheel 246 through a conveyor belt 244. Its specific setting can refer to the first power assembly 240 and will not be elaborated here.

[0043] The present utility model further provides a PECVD device, including an adjusting device as described in any one of the above embodiments and an upper plate spraying assembly covering above the lower plate heating assembly 100.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model and are not intended to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A regulating device, characterized in that: include: A lower plate heating assembly has a cavity inside, and the cavity is used to accommodate the carrier plate; A plurality of transmission components are arranged at intervals on the side wall of the cavity, and the transmission components are used to transport the carrier; A plurality of adjusting components are arranged at intervals on the side wall of the cavity and are arranged alternately with the transmission components. The adjusting components are used to adjust the height of the carrier plate.

2. The adjusting device according to claim 1, characterized in that: The adjustment component comprises: A first rotating shaft is disposed through the side wall of the cavity; A rotating arm, disposed inside the cavity, and one end of which is connected to the first rotating shaft; A first transmission wheel, disposed at the other end of the rotating arm; The first power assembly is transmission-connected to the first rotating shaft to drive the first rotating shaft to rotate.

3. The adjusting device according to claim 2, characterized in that: The plurality of adjusting components are divided into two groups and are respectively arranged on both sides of the cavity; the first power component is arranged in a one-to-one correspondence with the two groups of adjusting components.

4. The adjusting device according to claim 2 or 3, characterized in that: The first power assembly comprises: A first driven wheel is disposed on the first rotating shaft in a one-to-one correspondence; The second driven wheel is arranged on the first rotating shaft in a one-to-one correspondence and is spaced apart from the first driven wheel located on the same first rotating shaft; Two adjacent first rotating shafts are connected to the corresponding first driven wheels through a conveyor belt, or two adjacent first rotating shafts are connected to the corresponding second driven wheels through a conveyor belt, so that the first rotating shafts rotate synchronously.

5. The adjusting device according to claim 4, characterized in that: The first power assembly also includes: A motor, arranged on the lower plate heating assembly; A driving wheel is arranged on the output shaft of the motor, and the driving wheel is drivingly connected to one of the first driven wheel or the second driven wheel through the conveyor belt.

6. The adjusting device according to claim 1, characterized in that: The transmission component comprises: A second rotating shaft is disposed through the side wall of the cavity; A second transmission wheel, provided at one end of the second rotating shaft located inside the cavity; The second power assembly is connected to one end of the second rotating shaft located outside the cavity and is used to drive the second rotating shaft to rotate.

7. The adjusting device according to claim 6, characterized in that: The plurality of transmission components are divided into two groups and are respectively arranged on both sides of the cavity; the second power component is arranged in a one-to-one correspondence with the two groups of transmission components.

8. The adjusting device according to claim 6 or 7, characterized in that: The second power assembly comprises: A first driven wheel is disposed on the second rotating shaft in a one-to-one correspondence; The second driven wheel is disposed on the second rotating shaft in a one-to-one correspondence and is spaced apart from the first driven wheel located on the same second rotating shaft; Two adjacent second rotating shafts are connected to the corresponding first driven wheels through a conveyor belt, or two adjacent second rotating shafts are connected to the corresponding second driven wheels through a conveyor belt, so that the second rotating shafts rotate synchronously.

9. The adjusting device according to claim 8, characterized in that The second power assembly also includes: A motor, arranged on the lower plate heating assembly; The driving wheel is arranged on the output shaft of the motor, and the driving wheel is drivingly connected with the first driven wheel or the second driven wheel through the conveyor belt.

10. A PECVD device, characterized in that: include: A regulating device as described in any one of claims 1-9 and an upper plate spray assembly covering the lower plate heating assembly.

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