Coating equipment

Abstract

The utility model relates to coating equipment. The coating equipment comprises a cavity, a corrugated pipe, a heater, a supporting column, a first air inlet pipeline and an exhaust pipeline, the cavity is communicated with the corrugated pipe, the heater is located in the cavity, the supporting column is fixedly connected with the heater, the supporting column is fixed to the bottom face of the corrugated pipe, the side wall of the corrugated pipe surrounds the supporting column, a first air inlet is formed in the side wall of the corrugated pipe, and the first air inlet pipeline is in butt joint with the first air inlet. The included angle between the side wall of the first air inlet pipeline and the lower side wall of the corrugated pipe is an acute angle, and the lower side wall of the corrugated pipe is the side wall between the first air inlet and the bottom face of the corrugated pipe. A first air outlet is formed in the side wall of the cavity, and the exhaust pipeline is in butt joint with the first air outlet; the first air inlet pipeline is used for providing floating air into the corrugated pipe and the cavity so that particles can be carried to the middle or the upper portion of the cavity, and the exhaust pipeline is used for discharging the particles out of the cavity. According to the technical scheme, the maintenance period of the coating equipment can be prolonged, and excessive maintenance is avoided.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and particularly to a coating device. Background Art

[0002] In related technologies, the common methods for monitoring particles are machine particle monitoring and dep film particle monitoring. During the semiconductor manufacturing process, when there is a rework or a defect case, the coating device is first subjected to "machine clarification" to determine whether the defect is caused by a device problem. One of them is heater up / down. However, if the lower end of the heater is not clean, there will be a ring map on the wafer edge, as Figure 1 shown. Figure 1 In, the particles 12 are mainly concentrated on the edge of the wafer 11.

[0003] When the coating device is opened for inspection, a large number of particles are found at the bottom of the cavity. This phenomenon is particularly serious at the end of the wafer count. Ideally, the by-products generated during the process are discharged by the pump through the exhaust pipeline. However, in reality, the by-products or products fall on the bottom of the device cavity. Usually, the heater does not move, and the problem cannot be detected. Only when the heater moves up and down, it will drive the air flow to lift the particles to the upper and middle parts of the cavity.

[0004] The CVD (Chemical Vapor Deposition) process usually maintains the machine through wafer count settings. Different wafer counts will be set according to the processes run in different cavities. Currently, only by shortening the wafer count can the particles in the cavity be controlled. In addition, there are monthly, quarterly, and annual maintenance. Checking the particles at the bellow of the lower end of the heater is a routine inspection item. Generally speaking, the equipment maintenance cycle is too short, and there is a problem of over-maintenance.

[0005] Therefore, how to extend the maintenance cycle of the coating device is a technical problem to be solved. Summary of the Invention

[0006] The purpose of the present application is to provide a coating device, which can extend the maintenance cycle of the coating device and avoid over-maintenance.

[0007] According to the first aspect of the embodiments of the present application, a coating device is provided, including: a cavity, a bellows, a heater, a support column, a first intake pipe, and an exhaust pipe;

[0008] The bottom of the cavity is communicated with the bellows. The heater is located in the cavity. The top end of the support column is fixedly connected to the bottom surface of the heater. The bottom end of the support column is fixed on the bottom surface of the bellows. The side wall of the bellows surrounds the side of the support column away from the heater, and there is a gap between the side wall of the bellows and the support column;

[0009] The side wall of the bellows includes a first air inlet. The first intake pipe is docked with the first air inlet. The included angle between the side wall of the first intake pipe and the lower side wall of the bellows is an acute angle. The lower side wall of the bellows is the side wall between the first air inlet and the bottom surface of the bellows;

[0010] The side wall of the cavity includes a first air outlet. The exhaust pipe is docked with the first air outlet;

[0011] The first intake pipe is used to provide a lifting gas into the bellows and the cavity to carry particles to the middle or upper part of the cavity, and the exhaust pipe is used to discharge the particles out of the cavity.

[0012] In an embodiment, the bottom of the cavity includes an opening. The bellows is docked with the opening. The extension line of the side wall of the first intake pipe passes through the area outside the support column in the opening.

[0013] In an embodiment, on the same side of the support column, the extension line of the side wall of the first intake pipe passes through the area outside the support column in the opening.

[0014] The extension line of the central axis of the first intake pipe passes through the center of the area outside the support column in the opening.

[0015] The first intake pipe includes a nozzle. The nozzle is docked with the first air inlet. The cross-section of the nozzle gradually decreases along the central axis of the nozzle in the direction pointing to the first air inlet.

[0016] In an embodiment, the distance between the first air inlet and the bottom of the cavity is less than or equal to 0.5 times the length of the bellows.

[0017] In one embodiment, the first intake pipe includes a main pipe and N branch pipes, and the N branch pipes are respectively communicated with the main pipe; N is an integer greater than 1; the side wall of the corrugated pipe includes N first air inlets, the centers of the N first air inlets are on the same horizontal plane, and the N first air inlets are evenly distributed around the support column, wherein the horizontal plane is perpendicular to the support column; the N branch pipes are respectively docked with the N first air inlets one by one.

[0018] In one embodiment, the coating device further includes a gas source and a vacuum pump; the gas source is communicated with the first intake pipe, and the vacuum pump is communicated with the exhaust pipe.

[0019] In one embodiment, the coating device further includes a gas regulating device, which is connected in series between the gas source and the first air inlet.

[0020] In one embodiment, the gas regulating device includes a manual valve, a gas filter, a first isolation valve, a gas flow controller, a second isolation valve and a final valve connected in series in sequence. The manual valve is connected between the gas source and the gas filter, and the final valve is connected between the second isolation valve and the first air inlet.

[0021] In one embodiment, the coating device further includes a gas distributor. The top of the cavity includes a second air inlet, and the gas distributor is docked with the second air inlet.

[0022] In one embodiment, the coating device further includes a second intake pipe for transporting reaction gas, and the second intake pipe is communicated with the gas distributor.

[0023] In one embodiment, the gas distributor includes a gas box, a baffle and a shower head; the gas box, the baffle and the shower head are sequentially embedded in the second air inlet in the direction from the top end to the bottom end of the support column; the gas box includes a third air inlet and a second air outlet, the second intake pipe is docked with the third air inlet, and the second air outlet faces the baffle; one side of the gas box including the second air outlet is in contact with the baffle; the baffle includes a plurality of first through holes for making the gas coming out of the first through holes evenly distributed; there is a gap between the shower head and the baffle, and the shower head includes a plurality of second through holes for making the gas coming out of the second through holes evenly distributed.

[0024] In one embodiment, the density of the second through holes is greater than that of the first through holes, and the area of the second through holes is smaller than that of the first through holes.

[0025] Compared with the prior art, the beneficial effects of the present application are as follows: By adding a first intake pipe, the first intake pipe is communicated with the corrugated pipe through a first air inlet on the side wall of the corrugated pipe, and the included angle between the side wall of the first intake pipe and the lower side wall of the corrugated pipe is an acute angle. When supplying lifting gas to the corrugated pipe and the cavity through the first intake pipe, particles can be carried to the middle or upper part of the cavity, and then the particles are discharged from the cavity through the exhaust pipe. In this way, it is possible to prevent the particles in the cavity of the coating equipment from falling to the bottom of the cavity and into the corrugated pipe or reduce the number of particles falling to the bottom of the cavity and into the corrugated pipe, thereby extending the maintenance cycle of the coating equipment and avoiding excessive maintenance. Description of the Drawings

[0026] Figure 1 is a schematic diagram of the particle distribution on a wafer shown according to the related art.

[0027] Figure 2 is a schematic structural diagram of a coating equipment shown according to an exemplary embodiment.

[0028] Figure 3 is a schematic structural diagram of a coating equipment shown according to another exemplary embodiment.

[0029] Figure 4 is a schematic structural diagram of a coating equipment shown according to another exemplary embodiment. Detailed Embodiments

[0030] Unless otherwise defined, the technical terms or scientific terms used in this specification and the claims should have the ordinary meanings understood by those of ordinary skill in the technical field to which the present invention belongs. The following will describe the specific embodiments of the present invention with reference to the drawings. It should be noted that in the process of the specific description of these embodiments, in order to make a concise description, this specification may not describe all the features of the actual embodiments in detail. Without departing from the spirit and scope of the present invention, those skilled in the art can modify and replace the embodiments of the present invention, and the obtained embodiments are also within the protection scope of the present invention.

[0031] In the related art, as the most expensive component in the coating equipment, the accumulation of particles will also cause certain losses to the heater, and it is necessary to regularly open the cavity of the coating equipment for inspection. The wasted production capacity and manpower are incalculable, and the cost is high.

[0032] Moreover, different process nodes have different requirements for defect count, but they will all cause a certain loss in yield. In severe cases, it will be scrapped. Especially in the HARP process, the defect ratio is very high.

[0033] To solve the above technical problems, the present application proposes a coating device, which can extend the maintenance cycle of the coating device, avoid over-maintenance, and thus can reduce costs and improve the product yield.

[0034] An embodiment of the present application provides a coating device. The coating device may be a PCVD (Plasma-Enhanced Chemical Vapor Deposition) coating device, but is not limited thereto. Please refer to Figure 2 , the coating device may include: a cavity 21, a bellows 22, a heater 23, a support column 24, a first intake pipe 25, an exhaust pipe 26, a gas source 27, a gas regulating device 28, a vacuum pump 29, a gas distributor 31, and a second intake pipe 32.

[0035] As Figure 2 shown, the bottom D1 of the cavity 21 is communicated with the bellows 22, the heater 23 is located in the cavity 21, the top T1 of the support column 24 is fixedly connected to the bottom surface D2 of the heater 23, the bottom end D3 of the support column 24 is fixed on the bottom surface D4 of the bellows 22, the side wall S1 of the bellows 22 surrounds the side of the support column 24 away from the heater 23, and there is a gap between the side wall S1 of the bellows 22 and the support column 24. The heater 23 may be a heating plate, but is not limited thereto.

[0036] As Figure 2 shown, the side wall S1 of the bellows 22 includes a first intake port in1, the first intake pipe 25 is docked with the first intake port in1, and the angle A between the side wall S2 of the first intake pipe 25 and the lower side wall S11 of the bellows 22 is an acute angle. The lower side wall S11 of the bellows 22 is the side wall between the first intake port in1 and the bottom surface D4 of the bellows 22.

[0037] Since the angle A between the side wall S2 of the first intake pipe 25 and the lower side wall S11 of the bellows 22 is an acute angle, in this way, it can be ensured that the gas entering the cavity 21 through the first intake pipe 25 moves upward to carry the particles 33 in the cavity 21 upward. For example, the above angle A may be 30°, 45°, 60° or other acute angles.

[0038] Preferably, the above angle A may be greater than 15°. In this way, the difficulty of manufacturing the coating device can be reduced, because the smaller the above angle A, the greater the manufacturing difficulty.

[0039] As Figure 2 shown, the side wall S3 of the cavity 21 includes a first outlet port out1, one end of the exhaust pipe 26 is docked with the first outlet port out1, and the other end is communicated with the vacuum pump 29.

[0040] As Figure 2As shown, the first intake pipe 25 is also connected to the gas source 27 through the gas regulating device 28. Among them, the gas source 27 is used to provide lifting gas. The lifting gas can be an inert gas or a gas with stable chemical properties, and the density of the lifting gas is less than the density of air. For example, the lifting gas can be helium or nitrogen. The gas regulating device 28 can achieve functions such as switching, filtering impurities, and controlling gas flow.

[0041] Preferably, the lifting gas is helium. Helium molecules are light and can easily be pumped away by the vacuum pump 29 while floating upward and carrying away the particles 33.

[0042] In this embodiment, the first intake pipe 25 is used to supply the lifting gas into the bellows 22 and the cavity 21 to carry the particles 33 in the cavity 21 to the middle or upper part of the cavity 21, and the exhaust pipe 26 is used to discharge the particles 33 from the cavity 21 through the vacuum pump 29.

[0043] In this embodiment, by adding the first intake pipe 25, and the first intake pipe 25 is connected to the bellows 22 through the first intake port in1 on the side wall of the bellows 22, and the included angle between the side wall of the first intake pipe 25 and the lower side wall of the bellows 22 is an acute angle. In this way, when the lifting gas is supplied into the bellows 22 and the cavity 21 through the first intake pipe 25, the particles 33 can be carried to the middle or upper part of the cavity 21, and then the particles 33 are discharged from the cavity 21 through the exhaust pipe 26. In this way, it is possible to prevent the particles 33 in the cavity 21 of the coating equipment from falling to the bottom of the cavity 21 and into the bellows 22 or reduce the number of particles 33 falling to the bottom of the cavity 21 and into the bellows 22, thereby extending the maintenance cycle of the coating equipment and avoiding over-maintenance.

[0044] It should be noted that the side wall of the bellows 22 is uneven. Once the particles 33 enter the bellows 22, it is very difficult to clean. Moreover, since the bellows 22 will perform telescopic actions during the up and down movement of the heater 23, the particles 33 will not adhere firmly to the side wall of the bellows 22 and will break away from the side wall of the bellows 22 during the telescopic movement of the bellows 22 and be lifted to the middle and upper part of the cavity 21 by the airflow driven by the heater 23 during the up and down movement, polluting the heater 23.

[0045] Therefore, preventing the particles 33 from falling into the bellows 22 can extend the maintenance cycle of the coating equipment.

[0046] In one embodiment, as Figure 2As shown, the bottom D1 of the cavity 21 includes an opening O, the bellows 22 is butted against the opening O, and the extension line L of the side wall S2 of the first air inlet pipe 25 passes through the area outside the support column 24 in the opening O. That is, the first air inlet in1 is aligned with the area outside the support column 24 in the opening O of the bottom D1 of the cavity 21, so that when the first air inlet pipe 25 provides floating gas to the bellows 22 and the cavity 21, the airflow is aligned with the area outside the support column 24 in the opening O, which can prevent the particles 33 from falling into the bellows 22.

[0047] In one embodiment, Figure 2 As shown, on the same side of the support column 24, the extension line L of the side wall S2 of the first air inlet duct 25 passes through the area outside the support column 24 in the opening O. In this way, the support column 24 can avoid blocking the airflow transported by the first air inlet duct 25, and the floating effect of the airflow on the particles 33 can be fully utilized, so as to better prevent the particles 33 from falling into the bellows 22.

[0048] In one embodiment, the extension line of the central axis of the first air intake duct 25 passes through the center of the area outside the support column 24 in the opening O of the bottom D1 of the cavity 21. In this way, the airflow delivered by the first air intake duct 25 can cover more areas outside the support column 24 in the opening O, and the number of particles 33 falling into the bellows 22 can be reduced.

[0049] In one embodiment, the distance between the first air inlet in1 and the bottom D1 of the cavity 21 may be less than 0.5 times the length of the bellows 22. In this way, the movement distance of the airflow delivered by the first air inlet duct 25 to the opening O can be shortened, the lack of power of the airflow can be avoided, and the number of particles 33 falling into the bellows 22 can be reduced.

[0050] In other embodiments, the distance between the first air inlet in1 and the bottom D1 of the cavity 21 may also be equal to 0.5 times the length of the bellows 22 .

[0051] In one embodiment, Figure 2 and Figure 3 As shown, the first air inlet duct 25 may include a main pipe 251 and four branch pipes 252, and the four branch pipes 252 are respectively connected to the main pipe 251. The side wall of the corrugated pipe 22 includes four first air inlets in1, the centers of the four first air inlets in1 are located on the same horizontal plane, and the four first air inlets in1 are evenly distributed around the support column 24, wherein the horizontal plane is perpendicular to the support column 24. The four branch pipes 252 are respectively connected to the four first air inlets in1 one by one. The angle A between the side wall S2 of each branch pipe 252 and the lower side wall S11 of the corrugated pipe 22 is 45°. The airflow provided by the four branch pipes 252 can almost cover 360°, so that the number of particles 33 falling into the corrugated pipe 22 can be reduced.

[0052] In other embodiments, the first intake pipe 25 may include 2, 3, 5, or 6 branch pipes 252. The number of branch pipes 252 can be determined according to requirements. That is, the first intake pipe 25 may include a main pipe 251 and N branch pipes 252. The airflow provided by the N branch pipes 252 can cover almost 360°, and N is an integer greater than 1.

[0053] In one embodiment, as Figure 2 shown, the gas regulating device 28 may include a manual valve 281, a gas filter 282, a first isolation valve 283, a gas flow controller 284, a second isolation valve 285, and a final valve 286 connected in series in sequence. The manual valve 281 is connected between the gas source 27 and the gas filter 282, and the final valve 286 is connected between the second isolation valve 285 and the first intake port in1.

[0054] Among them, the manual valve 281 serves as the first valve for the lifting gas to enter the pipeline and is mostly used for pipeline leak detection and isolation before and after opening the gas supply switch. The gas filter 282 can filter impurities in the lifting gas that exceed 0.04 nm (nanometers) to ensure the purity of the lifting gas. The first isolation valve 283 is a pneumatic valve controlled by an EV (electric valve) module and is used for quickly opening and closing the lifting gas. The gas flow controller 284 is used to control the flow rate of the lifting gas. The second isolation valve 285 is a pneumatic valve controlled by an EV (electric valve) module and is used for quickly opening and closing the lifting gas. The final valve 286 is a pneumatic valve controlled by an EV module and serves as the last valve for the lifting gas to enter the cavity 21.

[0055] In one embodiment, as Figure 2 shown, the second intake pipe 32 communicates with the cavity 21 through a gas distributor 31. The second intake pipe 32 is used to transport reaction gas, and the gas distributor 31 is used to homogenize the reaction gas provided by the second intake pipe 32 so that the reaction gas evenly enters the cavity 21. The reaction gas refers to the gas used to undergo a chemical reaction with other substances. The lifting gas and the reaction gas do not undergo a chemical reaction.

[0056] In one embodiment, as Figure 2 shown, the second intake pipe 32 communicates with the gas distributor 31. The top T2 of the cavity 21 includes a second intake port in2, and the gas distributor 31 is docked with the second intake port in2.

[0057] In one embodiment, as Figure 2 shown, the gas distributor 31 includes a gas tank 311, a baffle 312, and a shower head 313. The gas tank 311, the baffle 312, and the shower head 313 are sequentially embedded in the second intake port in2 in the direction from the top T1 of the support column 24 to the bottom D3 of the support column 24.

[0058] In one embodiment, the gas box 311 includes a third air inlet (not shown) and a second air outlet (not shown). The second intake pipe 32 is docked with the third air inlet, and the second air outlet faces the baffle 312. One side of the gas box 311 including the second air outlet is in contact with the baffle 312.

[0059] In one embodiment, the baffle 312 is provided with a plurality of first through holes for making the gas coming out from the first through holes evenly distributed.

[0060] In one embodiment, as Figure 2 shown, there is a gap between the shower head 313 and the baffle 312. The shower head 313 is provided with a plurality of second through holes for making the gas coming out from the second through holes evenly distributed.

[0061] In one embodiment, the density of the second through holes is greater than that of the first through holes, and the area of the second through holes is smaller than that of the first through holes.

[0062] In one embodiment, both the first through holes and the second through holes are circular through holes, but this is not limited thereto.

[0063] When the coating equipment performs coating, the wafer can be placed on the heater 23 and fixed. Then, the gas distributor 31 is assembled with the cavity 21 and connected. Then, the second intake pipe 32 is assembled and connected with the gas distributor 31. Then, reaction gas can be transported into the cavity 21 through the second intake pipe 32.

[0064] During the process of coating by the coating equipment, when performing a cleaning operation or maintenance, lift gas can be transported through the first intake pipe 25 to carry the particles 33 to the middle or upper part of the cavity 21. Then, the particles 33 are discharged from the cavity 21 through the exhaust pipe 26. In this way, it is possible to avoid the particles 33 in the cavity 21 of the coating equipment from falling into the bottom of the cavity 21 and the bellows 22 or reduce the number of particles 33 falling into the bottom of the cavity 21 and the bellows 22, thereby prolonging the maintenance cycle of the coating equipment and avoiding over-maintenance.

[0065] During the process of coating by the coating equipment, the flow rate of the lift gas transported by the first intake pipe 25 can be smaller than the flow rate of the lift gas transported by the first intake pipe 25 when performing a cleaning operation or maintenance.

[0066] The coating equipment provided by the embodiments of the present application can transport the levitation gas through the first air inlet pipe 25, carry the particles 33 to the middle or upper part of the cavity 21, and then discharge the particles 33 from the cavity 21 through the exhaust pipe 26. In this way, it is possible to prevent the particles 33 in the cavity 21 of the coating equipment from falling to the bottom of the cavity 21 and into the bellows 22, or reduce the number of particles 33 falling to the bottom of the cavity 21 and into the bellows 22. Furthermore, the maintenance cycle of the coating equipment can be extended, over-maintenance can be avoided, the production capacity can be increased, the labor cost can be saved, and the cost can be reduced. Moreover, product defects can be reduced and the product yield can be improved.

[0067] Another embodiment of the present application also provides a coating equipment. Different from the above embodiment, in this embodiment, as Figure 4 shown, the first air inlet pipe 25 includes a nozzle 253. The nozzle 253 is docked with the first air inlet in1, and the cross-section of the nozzle 253 gradually decreases along the central axis of the nozzle 253 in the direction pointing to the first air inlet in1. In this way, the flow velocity and coverage area of the air flow output by the first air inlet pipe 25 can be increased, which is more conducive to carrying the particles 33 to the middle or upper part of the cavity 21 and discharging the particles 33 from the cavity 21 through the exhaust pipe 26. In this way, it is more conducive to preventing the particles 33 in the cavity 21 of the coating equipment from falling to the bottom of the cavity 21 and into the bellows 22, or reducing the number of particles 33 falling to the bottom of the cavity 21 and into the bellows 22. Furthermore, the maintenance cycle of the coating equipment can be extended and over-maintenance can be avoided.

[0068] In the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. The term "plurality" means two or more, unless otherwise clearly defined.

[0069] The above description of the embodiments is for the convenience of those of ordinary skill in the art to understand and apply the present application. It is obvious that those skilled in the art can easily make various modifications to these embodiments and apply the general principles described herein to other embodiments without creative efforts. Therefore, the present application is not limited to the embodiments herein. Modifications and improvements made by those skilled in the art within the scope and spirit of the present application based on the content disclosed in the present application are all within the scope of the present application.

Claims

1. A coating device, characterized in that: include: A cavity, a bellows, a heater, a support column, a first air intake duct and an exhaust duct; The bottom of the cavity is communicated with the bellows, the heater is located in the cavity, the top of the support column is fixedly connected to the bottom surface of the heater, the bottom end of the support column is fixed to the bottom surface of the bellows, the side wall of the bellows surrounds the side of the support column away from the heater, and there is a gap between the side wall of the bellows and the support column; The side wall of the bellows includes a first air inlet, the first air inlet pipe is connected to the first air inlet, the angle between the side wall of the first air inlet pipe and the lower side wall of the bellows is an acute angle, and the lower side wall of the bellows is the side wall between the first air inlet and the bottom surface of the bellows; The side wall of the cavity includes a first air outlet, and the exhaust pipe is connected to the first air outlet; The first air inlet pipe is used to provide buoyancy gas to the bellows and the cavity to carry particles to the middle or upper part of the cavity, and the exhaust pipe is used to discharge the particles out of the cavity.

2. The coating device according to claim 1, characterized in that: The bottom of the cavity includes an opening, the bellows is butted against the opening, and an extension line of the side wall of the first air intake duct passes through a region of the opening outside the support column.

3. The coating device according to claim 2, characterized in that: On the same side of the support column, an extension line of the side wall of the first air intake duct passes through a region of the opening outside the support column.

4. The coating device according to claim 3, characterized in that: An extension line of the central axis of the first air intake duct passes through the center of a region of the opening outside the support column.

5. The coating device according to claim 3, characterized in that: The first air intake duct comprises a nozzle, the nozzle is connected to the first air intake port, and the cross section of the nozzle gradually decreases along the center axis of the nozzle in a direction pointing to the first air intake port.

6. The coating device according to claim 1, characterized in that: The distance between the first air inlet and the bottom of the cavity is less than or equal to 0.5 times the length of the bellows.

7. The coating device according to claim 1, characterized in that: The first air intake pipeline includes a main pipe and N branch pipes, and the N branch pipes are respectively connected to the main pipe; N is an integer greater than 1; The side wall of the bellows includes N first air inlets, the centers of the N first air inlets are located on the same horizontal plane, and the N first air inlets are evenly distributed around the support column, wherein the horizontal plane is perpendicular to the support column; The N branch pipes are connected one by one with the N first air inlets respectively.

8. The coating device according to claim 1, characterized in that: Also includes a gas source and a vacuum pump; The gas source is communicated with the first air inlet pipeline, and the vacuum pump is communicated with the exhaust pipeline.

9. The coating device according to claim 8, characterized in that: It also includes a gas regulating device connected in series between the gas source and the first gas inlet.

10. The coating device according to claim 9, characterized in that: The gas regulating device includes an artificial valve, a gas filter, a first isolation valve, a gas flow controller, a second isolation valve and a final valve connected in series in sequence, the artificial valve is connected between the gas source and the gas filter, and the final valve is connected between the second isolation valve and the first air inlet.

11. The coating device according to claim 1, characterized in that: It also includes a gas distributor, the top of the cavity includes a second gas inlet, and the gas distributor is docked with the second gas inlet.

12. The coating device according to claim 11, characterized in that: It also includes a second air inlet pipeline, which is used to transport reaction gas and is connected to the gas distributor.

13. The coating device according to claim 12, characterized in that: The gas distributor comprises a gas box, a baffle and a shower head; The gas box, the baffle and the shower head are sequentially embedded in the second air inlet in a direction from the top end of the support column to the bottom end of the support column; The gas box comprises a third air inlet and a second air outlet, the second air inlet pipe is connected to the third air inlet, and the second air outlet faces the baffle; the side of the gas box including the second air outlet is in contact with the baffle; The baffle plate includes a plurality of first through holes for evenly distributing the gas coming out of the first through holes; There is a gap between the shower head and the baffle, and the shower head includes a plurality of second through holes for evenly distributing the gas coming out of the second through holes.

14. The coating device according to claim 13, characterized in that: The density of the second through holes is greater than that of the first through holes, and the area of ​​the second through holes is smaller than that of the first through holes.

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