Fast and detachable infrared temperature measuring device for high-temperature purification equipment

Abstract

The utility model relates to a quick detachable infrared temperature measuring device of high-temperature purification equipment, and belongs to the field of carbon-based material production equipment. The problems that after the infrared temperature measuring device of the high-temperature purification equipment is used for a long time, temperature measurement is inaccurate, and the infrared temperature measuring device is inconvenient to maintain and replace are solved. According to the technical scheme, the temperature measuring device comprises a furnace body sleeve, a temperature measuring device penetrates through the furnace body sleeve, an end cover pressing plate is arranged on the first end face of the furnace body sleeve, a dustproof ring is tightly attached to the second end face of the furnace body sleeve, the outer surface of the temperature measuring device is sleeved with the dustproof ring, the dustproof ring is attached to the matching face of the temperature measuring device, and a protrusion is arranged on the temperature measuring device. A limiting shoulder is arranged in the furnace body sleeve, the protrusion is matched with the limiting shoulder, the temperature measuring device is clamped in the furnace body sleeve through the protrusion and the limiting shoulder, and a first matching face and a second matching face which are matched with the furnace body sleeve are arranged on the temperature measuring device. The device is applied to high-temperature purification temperature measurement.

Description

Technical Field

[0001] The utility model provides an infrared temperature measuring device for a quick detachable high-temperature purification equipment, belonging to the technical field of carbon-based material production equipment. Background Technique

[0002] The high-temperature purification equipment is an essential equipment for preparing the third-generation semiconductor SiC substrate. The temperature during the operation of the high-temperature purification equipment can reach 2400°C, which has certain requirements for the accuracy and stability of the infrared temperature measuring device. Currently, the used infrared temperature measuring device (the material is isostatic graphite) is connected to the stainless steel sleeve (the material is SUS304) of the high-temperature purification equipment furnace body through threads. As Figure 1 shown, due to the different expansion coefficients of the two materials, the infrared temperature measuring device and the furnace body stainless steel sleeve cannot be disassembled after heating. When the infrared temperature measuring device is used for a period of time, the graphite on the inner surface of the infrared temperature measuring device will peel off due to long-term high-temperature roasting. These peeled-off parts remain inside the infrared temperature measuring device, affecting the accuracy and stability of the temperature measurement of the infrared temperature measuring device.

[0003] Since the infrared temperature measuring device cannot be disassembled and the internal peeling cannot be cleaned after the deformation of this threaded connection, in order to ensure the safe operation of the high-temperature purification equipment, it is necessary to damage and disassemble the graphite temperature measuring device and then replace it with a new temperature measuring device. The operation is inconvenient and causes material waste. Content of the Utility Model

[0004] The utility model aims to solve the technical problems that the temperature measurement of the infrared temperature measuring device of the high-temperature purification equipment is inaccurate after long-term use and it is inconvenient to maintain and replace the infrared temperature measuring device. A quick detachable infrared temperature measuring device for high-temperature purification equipment is proposed. The purpose is to improve the connection method between the infrared temperature measuring device and the furnace body, so as to take out the infrared temperature measuring device and clean the internal impurities without damaging the infrared temperature measuring device, and solve the problem of inaccurate temperature measurement of the infrared temperature measuring device.

[0005] To solve the above technical problems, the technical solution adopted by the utility model is: a quick detachable infrared temperature measuring device for high-temperature purification equipment, including a furnace body sleeve, and a temperature measuring device penetrates through the furnace body sleeve;

[0006] An end cover pressing plate is arranged on the first end surface of the furnace body sleeve, a dust-proof ring is closely attached to the second end surface of the furnace body sleeve, the dust-proof ring is sleeved on the outer surface of the temperature measuring device, and the mating surfaces of the dust-proof ring and the temperature measuring device are mutually attached;

[0007] A protrusion is arranged on the temperature measuring device, a limiting shoulder is arranged inside the furnace body sleeve, and the protrusion and the limiting shoulder are mutually matched;

[0008] The temperature measuring device is clamped in the furnace body sleeve through a protrusion and a limiting shoulder;

[0009] The temperature measuring device is provided with a first mating surface and a second mating surface that cooperate with the furnace body sleeve;

[0010] The first mating surface has a clearance fit with the inner surface of the furnace body sleeve, and the second mating surface is in close contact with the inner surface of the furnace body sleeve.

[0011] Furthermore, the furnace body sleeve and the temperature measuring device are coaxially arranged; there is a clearance between the mating surface of the furnace body sleeve parallel to the axis of the furnace body sleeve and the mating surface of the temperature measuring device; the mating surface of the furnace body sleeve parallel to the radial line of the furnace body sleeve and the mating surface of the temperature measuring device are in contact with each other.

[0012] Furthermore, a plurality of sealing grooves are provided on the first end face of the furnace body sleeve, and a sealing device is arranged in each sealing groove.

[0013] Furthermore, a temperature measuring area is provided at one end of the temperature measuring device away from the end cover pressing plate.

[0014] Furthermore, the outer surface of the temperature measuring device is stepped; the mating surface of the limiting shoulder and the temperature measuring device is stepped.

[0015] Furthermore, the sealing device is an O-ring.

[0016] Furthermore, the material of the furnace body sleeve is SUS304.

[0017] Furthermore, the temperature measuring device is a graphite temperature measuring cylinder.

[0018] The beneficial effects of the present utility model compared with the prior art are as follows:

[0019] 1. The protrusion structure on the temperature measuring device of the present utility model cooperates with the limiting shoulder in the furnace body sleeve, and there is a clearance at the mating part. Compared with the bolt connection structure between the traditional infrared temperature measuring device and the furnace body sleeve, the temperature measuring device of the present utility model can be disassembled from the furnace body sleeve for maintenance and replacement, can be reused, saves resources, and reduces costs;

[0020] 2. The setting of the sealing device and the carbon felt dust-proof ring in the present utility model has a good sealing effect, and avoids graphite powder from entering the gap between the temperature measuring device and the furnace body sleeve. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The following further describes the present utility model with reference to the drawings:

[0022] Figure 1 It is a schematic structural diagram of a traditional infrared temperature measuring device connected to a furnace body sleeve;

[0023] Figure 2 This is a cross-sectional view of the present utility model;

[0024] Figure 3 is Figure 2 an enlarged view of part A in;

[0025] In the figure: 1 is the furnace body sleeve, 2 is the temperature measuring device, 3 is the end cover pressing plate, 4 is the dust-proof ring, 5 is the protrusion, 6 is the mating surface one, 7 is the mating surface two, 8 is the sealing groove, 9 is the first end face, 10 is the second end face, 11 is the temperature measuring area, and 12 is the sealing device. Specific embodiments

[0026] In the present utility model, unless otherwise stated, the orientation terms such as "upper, lower, top, bottom" are usually in reference to the direction shown in the drawings, or in reference to the vertical, perpendicular or gravitational direction of the component itself; similarly, for the convenience of understanding and description, "inner, outer" refer to the inner and outer of the contour of each component itself, but the above orientation terms are not used to limit the present utility model.

[0027] As Figures 1 to 3 shown, the present utility model provides an infrared temperature measuring device for a fast detachable high-temperature purification equipment, including a furnace body sleeve 1 made of SUS304, and a temperature measuring device 2 passes through the furnace body sleeve 1. The temperature measuring device 2 is a high-temperature resistant graphite temperature measuring cylinder.

[0028] The first end face 9 of the furnace body sleeve 1 is fixedly connected with an end cover pressing plate 3, and a dust-proof ring 4 made of carbon felt is closely attached to the second end face 10 of the furnace body sleeve 1. At the same time, the dust-proof ring 4 is sleeved on the outer surface of the temperature measuring device 2, and the mating surfaces of the dust-proof ring 4 and the temperature measuring device 2 are mutually attached, playing a role in heat preservation and preventing graphite powder from entering the gap between the temperature measuring device 2 and the furnace body sleeve 1. In this embodiment, the left end face of the furnace body sleeve 1 and the left end face of the temperature measuring device 2 are in the same plane, and the end cover pressing plate 3 presses on the left end face of the furnace body sleeve 1 and the left end face of the temperature measuring device 2.

[0029] The temperature measuring device 2 is provided with a protrusion 5, and a limiting shoulder is arranged in the furnace body sleeve 1. The protrusion 5 and the limiting shoulder cooperate with each other, and the temperature measuring device 2 is clamped in the furnace body sleeve 1 through the protrusion 5 and the limiting shoulder. The temperature measuring device 2 is an integral structure, and the furnace body sleeve 1 is an integral structure. In this embodiment, the protrusion 5 structure on the temperature measuring device 2 is located at the left end of the temperature measuring device 2, and the outer surface of the whole temperature measuring device 2 is stepped; the mating surface of the limiting shoulder and the temperature measuring device 2 is stepped. The mating structure between the furnace body sleeve 1 and the temperature measuring device 2 can also be set to other structures as long as the temperature measuring device 2 can be clamped in the furnace body sleeve 1.

[0030] The temperature measuring device 2 is provided with a first mating surface 6 and a second mating surface 7 that cooperate with the furnace body sleeve 1. The first mating surface 6 is in clearance fit with the inner surface of the furnace body sleeve 1, and the second mating surface 7 is in close contact with the inner surface of the furnace body sleeve 1. In this embodiment, the furnace body sleeve 1 and the temperature measuring device 2 are coaxially arranged, and there is a gap between the mating surface of the furnace body sleeve 1 parallel to the axis of the furnace body sleeve 1 and the mating surface of the temperature measuring device 2; the mating surface of the furnace body sleeve 1 parallel to the radial line of the furnace body sleeve 1 and the mating surface of the temperature measuring device 2 are in mutual contact.

[0031] A plurality of sealing grooves 8 are also formed on the first end face 9 of the furnace body sleeve 1, and a sealing device 12 is arranged in each sealing groove 8. The sealing device 12 in this embodiment is an O-ring. During use, the O-ring is placed in the sealing groove 8, and a good sealing effect can be achieved after being pressed by the end cover pressing plate 3.

[0032] When using the infrared temperature measuring device 2 of the high-temperature purification equipment of the present utility model, the temperature measuring device 2 is inserted into the furnace body sleeve 1 from the left side. Through the cooperation between the boss on the temperature measuring device 2 and the limiting shoulder structure of the furnace body sleeve 1, the temperature measuring device 2 is clamped in the furnace body sleeve 1. The left end face of the temperature measuring device 2 and the left end face of the furnace body sleeve 1 are in the same plane and are fixedly connected to the end cover pressing plate 3 together for sealing. The right end face of the temperature measuring device 2 protrudes from the right end face of the furnace body sleeve 1. The dust-proof ring 4 is sleeved on the protruding part at the right end of the temperature measuring device 2 and is closely attached to the outer surface of the temperature measuring device 2 and the right end face of the furnace body sleeve 1 to play a role in heat preservation and prevent graphite powder from entering the gap between the temperature measuring device 2 and the furnace body sleeve 1. When it is necessary to clean the peeling impurities inside the temperature measuring device 2 or replace the temperature measuring device 2, it is only necessary to open the end cover pressing plate 3 and then take out the temperature measuring device 2 from the furnace body sleeve 1, and it can be reused. Compared with the infrared temperature measuring device 2 of the traditional high-temperature purification furnace, when cleaning the peeling impurities inside the temperature measuring device 2 or replacing the temperature measuring device 2 in the present utility model, it is not necessary to damage the temperature measuring device 2.

[0033] Regarding the specific structure of the present utility model, it should be noted that the connection relationships between the various component modules adopted by the present utility model are definite and achievable. Except for the special descriptions in the embodiments, the specific connection relationships can bring corresponding technical effects and, on the premise of not relying on the execution of corresponding software programs, solve the technical problems proposed by the present utility model. The models of the components, modules, and specific components, the connection methods between each other, and the conventional usage methods and predictable technical effects brought by the above technical features, except for the specific descriptions, all belong to the publicly disclosed content in patents, journal papers, technical manuals, technical dictionaries, and textbooks that those skilled in the art can obtain before the filing date, or belong to the prior art such as conventional technologies and common general knowledge in the art, and do not need to be elaborated. This enables the technical solution provided in this case to be clear, complete, and achievable, and an entity product can be reproduced or obtained according to this technical means.

[0034] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model, and are not intended to limit it; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A quick and detachable infrared temperature measuring device for high temperature purification equipment, characterized in that: It comprises a furnace casing (1), wherein a temperature measuring device (2) runs through the furnace casing (1); An end cover pressure plate (3) is provided on the first end surface (9) of the furnace body sleeve (1), a dustproof ring (4) is tightly fitted on the second end surface (10) of the furnace body sleeve (1), the dustproof ring (4) is sleeved on the outer surface of the temperature measuring device (2), and the mating surfaces of the dustproof ring (4) and the temperature measuring device (2) are in contact with each other; The temperature measuring device (2) is provided with a protrusion, and a limiting shoulder is provided in the furnace casing (1), and the protrusion and the limiting shoulder cooperate with each other; The temperature measuring device (2) is clamped in the furnace casing (1) via a protrusion and a limit shoulder; The temperature measuring device (2) is provided with a first matching surface (6) and a second matching surface (7) matching with the furnace casing (1); The first matching surface (6) is loosely matched with the inner surface of the furnace body sleeve (1), and the second matching surface (7) is tightly fitted with the inner surface of the furnace body sleeve (1).

2. According to claim 1, a quick and detachable infrared temperature measuring device for high-temperature purification equipment is characterized in that: The furnace casing (1) and the temperature measuring device (2) are coaxially arranged; a gap is provided between a matching surface of the furnace casing (1) parallel to the axis of the furnace casing (1) and a matching surface of the temperature measuring device (2); and a matching surface of the furnace casing (1) parallel to a radial line of the furnace casing (1) and a matching surface of the temperature measuring device (2) fit each other.

3. The quick and detachable infrared temperature measuring device for high temperature purification equipment according to claim 1, characterized in that: A plurality of sealing grooves (8) are also provided on the first end surface (9) of the furnace casing (1), and a sealing device (12) is provided in each sealing groove (8).

4. The quick and detachable infrared temperature measuring device for high temperature purification equipment according to claim 1, characterized in that: A temperature measuring area (11) is provided on one end of the temperature measuring device (2) away from the end cover pressing plate (3).

5. The quick and detachable infrared temperature measuring device for high temperature purification equipment according to claim 1, characterized in that: The outer surface of the temperature measuring device (2) is in a stepped shape; and the matching surface between the limit shoulder and the temperature measuring device (2) is in a stepped shape.

6. The quick and detachable infrared temperature measuring device for high temperature purification equipment according to claim 3, characterized in that: The sealing device (12) is a sealing ring.

7. The quick and detachable infrared temperature measuring device for high temperature purification equipment according to claim 1, characterized in that: The furnace casing (1) is made of SUS304.

8. The quick and detachable infrared temperature measuring device for high temperature purification equipment according to claim 1, characterized in that: The temperature measuring device (2) is a graphite temperature measuring tube.

Images