Microscopic imaging device and electronic equipment

Abstract

The utility model discloses a microscopic imaging device and electronic equipment, and the device comprises an objective lens adjusting part which comprises an objective lens which is used for passing through an out-of-focus detection light beam and an image collection light beam on the surface of a sample to be detected, a microscopic image sensor which collects an image on the surface of the sample to be detected, and a second driving part which controls the objective lens to move along the direction of a main shaft, the focus of an objective lens shared by the microscopic image sensor and the automatic focusing sensor is positioned on the surface of the sample to be detected; the emergent light detection part comprises a light modulation part for emitting semi-elliptical light beams, and a focus detection lens and an automatic focusing sensor which are used for calculating the focus of an objective lens and the surface of the sample to be detected; according to the automatic focusing device, the rotating mechanism is added on the basis of the existing automatic focusing device, so that the direction of the line laser can be dynamically adjusted according to the actual situation, and the phenomenon that when scratches, textures or pits similar to detection light beams in shape exist on the surface of an object, the focusing laser line segment can completely coincide with the detection light beams is avoided; therefore, the anti-interference capability and the application range of the focusing sensor are improved.

Description

Technical Field

[0001] The utility model belongs to the field of autofocus, and particularly relates to a microscopic imaging device and an electronic device. Background Art

[0002] An optical microscope magnifies the surface image of an object by means of lens imaging. In order to obtain a meaningful image, the microscopic objective lens must be accurately focused on the sample surface. Generally, the depth of field of a high-power microscopic objective lens is only a few micrometers. Microscope operators often need to spend a lot of time manually adjusting the distance between the objective lens and the sample to achieve focusing.

[0003] Autofocus technology calculates the current defocus amount of the objective lens through a feedback signal and converts it into a motion signal of the motor. The motor drives the objective lens to move to automate the focusing process. According to the type of feedback signal, autofocus technology can be divided into two types: image autofocus technology and laser autofocus technology. Among them, image autofocus technology designs an image sharpness evaluation function, calculates the sharpness of the current image in the way of digital image processing, and judges the current defocus amount based on the quantified sharpness value. Laser autofocus technology projects a laser directly onto the sample surface and judges the defocus amount of the objective lens according to the state of the laser reflected from the sample surface. Image autofocus technology completely depends on the state of the acquired image, is easily affected by the illumination environment, and needs to scan back and forth near the focus to determine the optimal focusing position, with a slow focusing speed and a small focusing range. In contrast, laser focusing technology adds a laser signal on the basis of an ordinary microscope, has a larger focusing range and a faster focusing speed, and is widely used in the industrial inspection field.

[0004] Laser autofocus technology is divided into point laser and line laser according to the shape of the light spot on the focal plane of the objective lens. Since the detection beam of the point laser covers a small area, when there are irregular features such as holes and pits on the object surface, the laser beam cannot return to the sensor normally, resulting in focusing failure. The line laser has stronger anti-interference ability, but when features such as scratches, textures, and depressions on the object surface completely coincide with the line laser, the focusing sensor will collect abnormal focusing signals, resulting in focusing failure.

[0005] A Chinese patent discloses a microscope autofocus system for micro-nano stepped samples and its focusing method (application number: CN202210642022.2). In this autofocus system, the optical path first passes through one side of the microscope objective lens and is focused and projected onto the micro-nano stepped sample, then is reflected by the surface of the micro-nano stepped sample and passes through the other side of the microscope objective lens, and finally forms a spot image on the CMOS camera. By determining whether the spot image on the CMOS camera is composed of columnar protrusions and line intersections, the focal position of the microscope objective lens is determined, and the distance between the microscope objective lens and the micro-nano stepped sample is adjusted according to the focusing requirements to achieve focusing the microscope objective lens on the top surface of the step or the bottom surface of the groove. However, in this patent, after the focusing sensor is installed, the shape of the detection light beam projected on the object surface is fixed. When there are textures similar to the shape of the detection light beam on the object surface, the focusing signal will be strongly interfered, and there is even a probability that the focusing signal cannot be collected, resulting in focusing failure.

[0006] Based on this problem, the present utility model proposes a microscopic imaging device, enabling the direction of the line laser to be dynamically adjusted according to the actual situation, thereby enhancing the anti-interference ability and application range of the focusing sensor. Summary of the Utility Model

[0007] The purpose of the present utility model is to overcome the above problems existing in the prior art, and first provide a microscopic imaging device and an electronic device.

[0008] To achieve the above technical purposes and reach the above technical effects, the present utility model is realized through the following technical solutions:

[0009] A microscopic imaging device, comprising:

[0010] An objective lens adjustment unit, including an objective lens for passing through the defocus detection light beam and the image acquisition light beam on the surface of the sample to be measured, a microscopic image sensor for acquiring the image on the surface of the sample to be measured, and a second driving member for controlling the movement of the objective lens along the main axis direction, so that the objective lens focus shared by the microscopic image sensor and the autofocus sensor is located on the surface of the sample to be measured;

[0011] A light output detection unit, including a light modulation unit for emitting a semi-elliptical light beam, and a focus detection lens and an autofocus sensor for calculating the distance between the objective lens focus and the surface of the sample to be measured;

[0012] A rotation mechanism, on which the light output detection unit is installed, and its rotation axis is coaxial with the main axis of the objective lens. By rotating the semi-elliptical light beam along the main axis of the objective lens to the other side, the focusing laser line segments that were originally all located in the height defect area on the surface of the sample to be measured are rotated out of the height defect area along the main axis of the objective lens, and the part of the focusing laser line segments that are rotated out of the height defect area are used to judge and calculate the defocus amount.

[0013] Furthermore, the rotation mechanism includes:

[0014] A support member, connected to the light output detection unit, for supporting the light output detection unit;

[0015] A rotating shaft, connected to the support member, the axis of the rotating shaft coincides with the main axis of the objective lens, for restricting the position where the rotation center of the support member is located;

[0016] A first driving member, connected to the support member, for driving the support member to rotate.

[0017] Further, the first driving member includes:

[0018] A first driving cylinder, a slider is fixedly connected to the output shaft of the first driving cylinder, so that the slider moves along a specified path;

[0019] A connecting component, one end is connected to the slider, and the other end is connected to the rotating shaft.

[0020] Further, the first driving member further includes:

[0021] A reset member, connected to the slider, for driving the slider to reset.

[0022] Further, the first driving member further includes:

[0023] A limiting member, cooperating with the slider, for restricting the slider from sliding along the specified path.

[0024] Further, the connecting component includes:

[0025] A first connecting shaft, hinged to the rotating shaft;

[0026] A second connecting shaft, one end is hinged to the first connecting shaft, and the other end is hinged to the slider.

[0027] Further, the light modulation unit includes:

[0028] A laser, connected to the support member, for providing a light beam;

[0029] A cylindrical lens, connected to the support member, for modulating the light beam emitted by the laser into an elliptical light beam;

[0030] A baffle, connected to the support member, for blocking half of the elliptical light beam so that the light beam propagates on one side of the main axis.

[0031] Further, the light output detection unit further includes:

[0032] A reflecting mirror, connected to the support member, for reflecting the half of the light beam not blocked by the baffle;

[0033] A first beam splitter, connected to the support member, for transmitting the light beam reflected by the reflecting mirror and reflecting the reflected light beam returned from the sample surface to the focusing lens;

[0034] The second beam-splitting sheet, which is connected to the support member, is configured to reflect the light beam transmitted from the first beam-splitting sheet to the objective lens and reflect the reflected light beam returned from the sample surface to the first beam-splitting sheet.

[0035] Furthermore, the second driving member includes:

[0036] The second driving cylinder, whose output end is fixedly connected to the objective lens, is used to drive the objective lens to move along the main axis direction.

[0037] An electronic device includes the above-mentioned microscopic imaging device.

[0038] The beneficial effects of the present utility model are as follows:

[0039] 1. In the present utility model, based on the existing autofocus device, a rotating mechanism is added to control the light-emitting detection part to rotate so that the focused laser line segment rotates, and there is a part of the focused laser line segment that does not fall within the height defect area, thereby changing the angle of the focused laser line segment formed by the light beam passing through the objective lens and focusing, so as to adjust the relative angle between the focused laser line segment and the sample to be measured, realizing that the direction of the line laser can be dynamically adjusted according to the actual situation, avoiding that when there are scratches, textures or depressions on the object surface that are similar to the shape of the detection light beam, the focused laser line segment will completely coincide with them, resulting in strong interference to the focus signal and thus the problem that the objective lens adjustment part cannot perform autofocus, thereby improving the anti-interference ability and application range of the focus sensor.

[0040] 2. In the present utility model, through the setting of the first driving member, when the height defects such as scratches, textures, and depressions on the surface of the sample to be measured completely coincide with the line laser, the first driving cylinder is electrified, and the first driving cylinder controls the output shaft to extend, thereby driving the slider to move along the slide rail in a specified path, driving one end of the second connecting shaft to move with the slider, and then using the other end of the second connecting shaft to drive one end of the first connecting shaft to move accordingly, and further driving the rotating shaft to rotate through the other end of the first connecting shaft to control the rotation of the objective lens adjustment part on the rotating mechanism. When the autofocus work is completed, the first driving cylinder is powered off, and under the action of the return spring, the slider moves reversely in the slide rail to reset, thereby cooperating with the connecting component again to drive the rotating shaft to rotate reversely to control the rotation mechanism to reset, facilitating the subsequent autofocus work and improving work efficiency. Description of the Drawings

[0041] The drawings described herein are used to provide a further understanding of the present utility model and constitute a part of this application. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0042] Figure 1It is a schematic diagram of the internal structure of the support member of the present utility model;

[0043] Figure 2 It is a front view of a partial structure of the present utility model;

[0044] Figure 3 It is a top view of the structure of the second driving member in the present utility model;

[0045] Figure 4 It is a schematic diagram before the focus adjustment of the focus laser line segment in the present utility model;

[0046] Figure 5 It is a schematic diagram after the focus adjustment of the focus laser line segment in the present utility model.

[0047] In the figure: 1. Laser; 2. Cylindrical lens; 3. Baffle; 4. Reflecting mirror; 5. First beam splitter; 6. Second beam splitter; 7. Objective lens; 8. Second driving member; 9. Focus detection lens; 10. Auto-focus sensor; 11. Rotating mechanism; 111. Support member; 112. Rotating shaft; 113. First driving member; 1131. First driving cylinder; 1132. Slide block; 1133. Reset member; 1134. Limiting member; 1135. First connecting shaft; 1136. Second connecting shaft. Specific embodiments

[0048] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0049] As Figure 1 and Figure 2 shown, this embodiment first provides a microscopic imaging device, including:

[0050] Objective lens adjustment unit, including an objective lens 7 for passing through the defocus detection beam and the image acquisition beam on the surface of the sample to be measured, a microscopic image sensor for acquiring the image of the surface of the sample to be measured, and a second driving member 8 for controlling the movement of the objective lens 7 along the main axis direction, so that the focus of the objective lens 7 shared by the microscopic image sensor and the auto-focus sensor 10 is located on the surface of the sample to be measured;

[0051] Light output detection unit, including a light modulation unit for emitting a semi-elliptical beam, and a focus detection lens 9 and an auto-focus sensor 10 for calculating the focus of the objective lens 7 and the surface of the sample to be measured;

[0052] The rotation mechanism 11 is installed with a light-emitting detection unit, and its rotation axis is coaxial with the main axis of the objective lens 7. By rotating the semi-elliptical light beam along the main axis of the objective lens 7 to the other side, the original focus laser line segments that are all located on the height defects of the surface of the sample to be measured are rotated out of the height defect area along the main axis of the objective lens 7. The part of the focus laser line segments that are rotated out of the height defect area is used to judge and calculate the defocus amount.

[0053] In the present utility model, the objective lens adjustment unit is used to adjust the position of the objective lens 7 so that the focus of the objective lens 7 falls on the surface of the sample to be measured. Among them, the defocus detection light beam is a semi-elliptical light beam that is incident on the sample to be measured in the light beam system and reflected back to the autofocus sensor 10 in the light-emitting detection unit for defocus detection. This light beam is used to judge and calculate the distance and direction between the sample to be measured and the focus of the objective lens 7, that is, the defocus amount and the defocus direction.

[0054] When the focus of the objective lens 7 falls below the surface of the sample to be measured, it is judged as up defocus. At this time, the shape of the light spot falling on the surface of the sample to be measured is an upper semi-ellipse. When the focus of the objective lens 7 falls above the surface of the sample to be measured, it is judged as down defocus. At this time, the shape of the light spot falling on the surface of the sample to be measured is a lower semi-ellipse. When the focus of the objective lens 7 just falls on the surface of the sample to be measured, it is judged that the focusing is successful. At this time, the shape of the light spot falling on the surface of the sample to be measured is a focus laser line segment.

[0055] The objective lens 7 is driven by the second driving member 8 to move in the main axis direction so that the focus of the objective lens 7 falls on the surface of the sample to be measured to achieve autofocus. When it is judged and calculated that there is up defocus, according to the magnitude of the defocus amount, and the defocus amount is converted into an electrical signal, the second driving member 8 drives the objective lens 7 to move away from the sample to be measured. When it is judged and calculated that there is down defocus, according to the magnitude of the defocus amount, and the defocus amount is converted into an electrical signal, the second driving member 8 drives the objective lens 7 to move closer to the sample to be measured. When it is judged that the focusing is successful, there is no need to move the objective lens 7.

[0056] Among them, the image acquisition light beam is used to collect and display the image of the surface of the sample to be measured through the microscopic image sensor, and the microscopic image sensor and the autofocus sensor 10 share an objective lens 7. The microscopic image sensor is located above the objective lens 7.

[0057] In the present utility model, the light-emitting detection unit is used to emit a light beam to the surface of the sample to be measured and the reflected light beam is collected by the autofocus sensor 10 to form a laser image. The defocus direction of the sample to be measured can be judged by monitoring the shape of the light spot on the autofocus sensor 10, and the defocus amount of the sample to be measured can be calculated through the laser image to achieve autofocus.

[0058] Among them, the emitted elliptical light beam is used to form a focus laser line segment in the focused state of the objective lens 7. Blocking half of the elliptical light beam is used to distinguish up defocus and down defocus.

[0059] The focusing lens 9 is used to converge the light beam reflected from the surface of the sample to be measured and passing through the objective lens 7, and clearly image it on the autofocus sensor 10, so as to obtain the corresponding gray-scale information and centroid calculation information through the clear laser image, calculate the defocus amount through the centroid calculation information for autofocus, and calculate and judge whether the focusing is successful by using the gray-scale information.

[0060] In the present utility model, the light output detection part is installed on the rotating mechanism 11 and can rotate along with the rotating mechanism 11, so that the semi-elliptical light beam rotates along the main axis of the objective lens 7 to the other side. Then, the angle of the focusing laser line segment falling on the surface of the sample to be measured can be adjusted, and the focusing laser line segment completely falling within the height defect area can be rotated to have a part that does not fall within the height defect area, so as to calculate the defocus amount according to this part for autofocus.

[0061] Among them, the height defect refers to a defect with a certain depth or height on the surface of the sample to be measured, and the defect is a scratch, texture or depression similar to the shape of the focusing laser line segment. The focusing laser line segment will completely coincide with it, causing strong interference to the focusing signal.

[0062] Through the setting of the rotating mechanism 11, the purpose is to change the angle of the focusing laser line segment formed by the semi-elliptical light beam passing through the objective lens 7 and focusing, so as to adjust the relative angle between the focusing laser line segment and the sample to be measured, realize that the direction of the focusing laser line segment can be dynamically adjusted according to the actual situation, solve the problem that the focusing laser line segment completely coincides with the height defect and causes strong interference to the focusing signal, thereby improving the anti-interference ability and application range of the microscopic imaging device.

[0063] As Figure 4 shown, it is a schematic diagram of the focusing laser line segment completely falling within the height defect before adjustment. As Figure 5 shown, it is a schematic diagram of the focusing laser line segment with a part not falling within the height defect after the angle is adjusted under the action of the rotating mechanism 11. It can be seen that through the setting of the rotating mechanism 11, the focusing laser line segment partially does not fall inside the height defect, thus avoiding affecting the autofocus process.

[0064] In summary, in the present utility model, on the basis of the existing autofocus device, a rotation mechanism 11 is added, which is used to control the light-emitting detection part to rotate so as to rotate the focusing laser line segment, so that there is a part of the focusing laser line segment that does not fall within the height defect area, thereby changing the angle of the focusing laser line segment formed by the light beam passing through the objective lens 7 and focusing, so as to adjust the relative angle between the focusing laser line segment and the sample to be measured, and realize that the direction of the line laser can be dynamically adjusted according to the actual situation, avoiding that when there are scratches, textures or depressions similar to the shape of the detection light beam on the object surface, the focusing laser line segment will completely coincide with it, resulting in strong interference to the focusing signal, and then the problem that the objective lens adjustment part cannot perform autofocus, thereby improving the anti-interference ability and application range of the focusing sensor.

[0065] As Figure 2 and Figure 3 shown, the rotation mechanism 11 includes:

[0066] A support member 111, which is connected to the light-emitting detection part and is used to support the light-emitting detection part;

[0067] A rotating shaft 112, which is connected to the support member 111, and the axis of the rotating shaft 112 coincides with the main axis of the objective lens 7, and is used to limit the position where the rotation center of the support member 111 is located;

[0068] A first driving member 113, which is connected to the support member 111 and is used to drive the support member 111 to rotate.

[0069] In the present utility model, the support member 111 can be a support plate or a box body or other components that can support the light-emitting detection part. Moreover, the installation method of the support member 111 and each component in the light-emitting detection part is also diverse. The installation method can be all fixed connections, or partial fixed connections and partial sliding connections, as long as it is ensured that the laser beam finally entering the objective lens 7 is a parallel incident beam. Preferably, in order to improve the stability of the autofocus mechanism, in the present utility model, the installation method between the support member 111 and each component in the light-emitting detection part is a fixed connection.

[0070] In the present utility model, the installation method between the rotating shaft 112 and the support member 111 can also be a rotating connection or a fixed connection. When the rotating shaft 112 and the support member 111 are rotationally connected, the relative position between the rotating shaft 112 and the objective lens 7 remains fixed, and the relative rotation between the support member 111 and the objective lens 7 is realized by driving the support member 111 to rotate around the rotating shaft 112; when the rotating shaft 112 and the support member 111 are fixedly connected, the relative position between the rotating shaft 112 and the objective lens 7 rotates synchronously with the movement when the support member 111 is driven, that is, the rotating shaft 112 rotates synchronously with the support member 111 around the axis of the rotating shaft 112 to realize the relative rotation between the support member 111 and the objective lens 7, thereby realizing the angle adjustment of the focusing laser line segment.

[0071] Preferably, the installation method between the rotating shaft 112 and the support member 111 in the present utility model is a fixed connection. The rotating shaft 112 is rotatably installed in a specific component to provide rotational support for the driving mechanism.

[0072] Moreover, the axis of the rotating shaft 112 coincides with the main axis of the objective lens 7, which can limit the rotation of the support member 111 around the main axis of the objective lens 7.

[0073] The rotation axis of the rotation mechanism 11 is the main axis of the objective lens 7, that is, the axis of the rotating shaft 112. Without changing the focusing process of the objective lens 7, the semi-elliptical light beam can be rotated along the main axis of the objective lens 7 to the other side, so that the focusing laser line segment can be adjusted in angle around the main axis of the objective lens 7.

[0074] Since the installation method between the rotating shaft 112 and the support member 111 is a fixed connection, the first driving member 113 drives the rotating shaft 112 to rotate, thereby driving the support member 111 to rotate, and then some components in the rotation autofocus mechanism can be realized to adjust the angle of the focusing laser line segment.

[0075] The first driving member 113 includes:

[0076] A first driving cylinder 1131, the output shaft of the first driving cylinder is fixedly connected with a slider 1132, and the slider 1132 moves along a specified path;

[0077] A connecting component, one end is connected to the slider 1132, and the other end is connected to the rotating shaft 112.

[0078] During operation, the output shaft is controlled to extend by the first driving cylinder 1131, thereby controlling the slider 1132 to move along the specified path. Among them, the specified path can be calibrated in advance to cooperate with the connecting component to drive the rotating shaft 112 to rotate, realizing the rotation of some components of the autofocus mechanism on the support member 111 to control the angle adjustment of the focusing laser line segment.

[0079] The first driving member 113 further includes:

[0080] A reset member 1133, connected to the slider 1132, for driving the slider 1132 to reset.

[0081] In the present utility model, the provided reset member 1133 includes but is not limited to the form of a reset spring, and can also be elastic components such as elastic plastics and rubbers, which are used to control the slider 1132 driven by the first driving cylinder 1131 to reset and wait for the next drive.

[0082] The first driving member 113 further includes:

[0083] The limiting member 1134, which cooperates with the slider 1132, is used to limit the slider 1132 from sliding along a specified path.

[0084] In the present utility model, the limiting member 1134 includes, but is not limited to, the form of a slide rail, and may also be a limiting groove or other components that can limit the movement path of the slider 1132, so as to improve the stability of the movement of the slider 1132.

[0085] The connection assembly includes:

[0086] A first connection shaft 1135 and a second connection shaft 1136;

[0087] Wherein, one end of the first connection shaft 1135 is hinged to the rotating shaft 112, and the other end is hinged to one end of the second connection shaft 1136;

[0088] The end of the second connection shaft 1136 away from the first connection shaft 1135 is hinged to the slider 1132.

[0089] In the present utility model, the connection assembly adopts the form of a connecting rod assembly. During operation, the slider 1132 moves along a specified path, driving one end of the second connection shaft 1136 to move along with the slider 1132. Thus, the other end of the second connection shaft 1136 drives one end of the first connection shaft 1135 to move along, and further drives the rotating shaft 112 to rotate through the other end of the first connection shaft 1135, so as to control the rotation of the corresponding component on the driving mechanism.

[0090] As above, in the present utility model, through the setting of the first driving member 113, when the height defects such as scratches, textures, and depressions on the surface of the sample to be measured completely coincide with the line laser, the first driving cylinder 1131 is electrified, and the first driving cylinder 1131 controls the output shaft to extend, thereby driving the slider 1132 to move along the slide rail in a specified path, driving one end of the second connection shaft 1136 to move along with the slider 1132. Thus, the other end of the second connection shaft 1136 drives one end of the first connection shaft 1135 to move along, and further drives the rotating shaft 112 to rotate through the other end of the first connection shaft 1135, so as to control the rotation of the objective lens adjustment part on the rotation mechanism 11. When the automatic focusing work is completed, the first driving cylinder 1131 is powered off, and under the action of the return spring, the slider 1132 moves reversely in the slide rail to reset, thereby driving the rotating shaft 112 to rotate reversely again in cooperation with the connection assembly, so as to control the rotation mechanism 11 to reset, which is convenient for subsequent automatic focusing work and improves work efficiency.

[0091] In addition to the implementation manner of the first driving member 113 described above, the first driving member 113 may also be a motor or a combination of a cylinder and other components that can realize the rotation of the rotating shaft 112, and all fall within the protection scope of the present utility model.

[0092] The optical modulation part includes:

[0093] A laser 1, connected to a support member 111, for providing a light beam;

[0094] A cylindrical lens 2, connected to the support member 111, for modulating the light beam emitted by the laser 1 into an elliptical light beam;

[0095] A baffle 3, connected to the support member 111, for blocking half of the elliptical light beam so that the light beam propagates on one side of the main axis.

[0096] In the present utility model, the light beam emitted by the laser 1 is a parallel light beam. Specifically, it can be a circular parallel light beam or an elliptical parallel light beam. Preferably, a circular parallel light beam is adopted in the present utility model, and the light beam type is a single-wavelength laser.

[0097] The cylindrical lens 2 can compress the circular parallel light beam emitted by the laser 1 in one direction, making it an elliptical light beam that diverges in the curvature direction of the cylindrical lens 2 and is collimated in the non-curvature direction.

[0098] Through the setting of the baffle 3, when the elliptical light beam is converged by the objective lens 7 on the surface of the sample to be measured, it may be a focused laser line segment or a semi-elliptical light spot that is blocked by half. Therefore, it is possible to distinguish whether the sample to be measured is above or below the focus of the objective lens 7 according to the blocked part to determine the defocus direction, and thus determine the movement direction of the objective lens 7.

[0099] The light output detection part further includes:

[0100] A reflecting mirror 4, connected to the support member 111, for reflecting the half of the light beam not blocked by the baffle 3;

[0101] A first beam splitter 5, connected to the support member 111, for transmitting the light beam reflected by the reflecting mirror 4 and reflecting the reflected light beam returned from the sample surface to the focus detection lens 9;

[0102] A second beam splitter 6, connected to the support member 111, for reflecting the light beam transmitted from the first beam splitter 5 to the objective lens 7 and reflecting the reflected light beam returned from the sample surface to the first beam splitter 5.

[0103] In the present utility model, the functions of the reflecting mirror 4, the first beam splitter 5 and the second beam splitter 6 are all used to adjust the light beam direction and angle. Among them, the setting of the second beam splitter 6 can also transmit the reflected light beam so that the light beam enters the microscopic image sensor above the objective lens 7 for collecting the surface image of the sample to be measured.

[0104] In the present utility model, the focusing optical path of the light output detection part is as follows:

[0105] The circular parallel laser beam emitted by the laser 1 becomes an elliptical beam that diverges in the curvature direction of the cylindrical lens 2 and is collimated in the non-curvature direction after being modulated by the cylindrical lens 2. After passing through the baffle 3 and propagating on one side of the main axis, the elliptical beam passes through the first beam splitter 5 after being reflected by the surface of the mirror 4 and reaches the second beam splitter 6. It enters the objective lens 7 after being reflected by the second beam splitter 6 and falls on the surface of the sample to be measured under the converging action of the objective lens 7. Due to the reflection of the surface of the sample to be measured, the beam returns to the objective lens 7 again and exits from the objective lens 7. Under the action of the focusing lens 9, it converges on the photosensitive surface of the image sensor and is received to form a laser image. The gray information and centroid calculation information of the laser image are obtained to calculate the defocus amount for automatic focusing and determine whether the focusing is successful.

[0106] The second driving member 8 includes:

[0107] A second driving cylinder, whose output end is fixedly connected to the objective lens 7, is used to drive the objective lens 7 to move along the main axis direction.

[0108] In the present utility model, the objective lens 7 is driven by the second driving cylinder to move along the main axis direction, so that the focus of the objective lens 7 finally falls on the surface of the sample to be measured, realizing automatic focusing.

[0109] Among them, the form of the second driving member 8 can also be other components such as a motor cooperating with a lead screw assembly that can realize the movement of the objective lens 7.

[0110] On the other hand, the present utility model provides an electronic device, including the microscopic imaging device as described above.

[0111] In the description of this specification, the description with reference to terms such as "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0112] The above shows and describes the basic principles, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. The above embodiments and the descriptions in the specification only illustrate the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed.

Claims

1. A microscopic imaging device, characterized in that: include: The objective lens adjustment part includes an objective lens for passing through the defocus detection light beam and the image acquisition light beam of the surface of the sample to be tested, a microscopic image sensor for acquiring the image of the surface of the sample to be tested, and a second driving member for controlling the objective lens to move along the main axis direction, so that the focus of the objective lens shared by the microscopic image sensor and the autofocus sensor is located on the surface of the sample to be tested; The light-emitting detection unit includes a light modulation unit that emits a semi-elliptical light beam, a focus detection lens that calculates the focus of the objective lens and the surface of the sample to be measured, and an autofocus sensor; The rotating mechanism is equipped with a light output detection part, and its rotation axis is coaxial with the main axis of the objective lens. By rotating the semi-elliptical light beam to the other side along the main axis of the objective lens, all the focusing laser line segments originally located at the height defects on the surface of the sample to be measured are rotated along the main axis of the objective lens to rotate out of the height defect area. The part of the focusing laser line segments rotated out of the height defect area is used to judge and calculate the defocus amount.

2. A microscopic imaging device according to claim 1, characterized in that: The rotating mechanism comprises: A support member connected to the light detection unit and used to support the light detection unit; A rotating shaft connected to the support, the axis of the rotating shaft coincides with the main axis of the objective lens, and is used to limit the position of the rotation center of the support; The first driving member is connected to the supporting member and is used for driving the supporting member to rotate.

3. A microscopic imaging device according to claim 2, characterized in that: The first driving member comprises: A first driving cylinder, the output shaft of which is fixedly connected to a slider so that the slider moves along a specified path; A connecting component has one end connected to the slider and the other end connected to the rotating shaft.

4. A microscopic imaging device according to claim 2, characterized in that: The first driving member further comprises: The reset member is connected to the slider and is used to drive the slider to reset.

5. A microscopic imaging device according to claim 2, characterized in that: The first driving member further comprises: The limiter cooperates with the slider to limit the slider from sliding along a specified path.

6. A microscopic imaging device according to claim 3, characterized in that: The connection component comprises: A first connecting shaft, hinged to the rotating shaft; One end of the second connecting shaft is hinged to the first connecting shaft, and the other end is hinged to the sliding block.

7. A microscopic imaging device according to claim 2, characterized in that: The light modulation unit comprises: A laser, connected to the support, for providing a light beam; A cylindrical lens is connected to the support member and is used to modulate the light beam emitted by the laser into an elliptical light beam; The baffle is connected to the support and is used for blocking half of the elliptical light beam so that the light beam propagates on one side of the main axis.

8. A microscopic imaging device according to claim 2, characterized in that: The light output detection unit further includes: A reflector, connected to the support, for reflecting the half of the light beam not blocked by the baffle; A first beam splitter, connected to the support, for transmitting the light beam reflected by the reflector and reflecting the reflected light beam returned from the sample surface to the focusing lens; The second beam splitter is connected to the support member and is used for reflecting the light beam transmitted from the first beam splitter to the objective lens and reflecting the reflected light beam returned from the sample surface to the first beam splitter.

9. A microscopic imaging device according to claim 1, characterized in that: The second driving member comprises: The second driving cylinder has an output end fixedly connected to the objective lens and is used to drive the objective lens to move along the main axis direction.

10. An electronic device, characterized in that: Comprising the microscopic imaging device as described in any one of claims 1-9.

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