Automatic focusing device and electronic equipment

Abstract

The utility model discloses an automatic focusing device and electronic equipment, and the device comprises an objective lens adjusting part which comprises an objective lens which is used for passing through a defocus detection light beam and a to-be-detected sample surface image collection light beam, a microscopic image sensor which collects a to-be-detected sample surface image, and a driving part which controls the objective lens to move along a main axis direction, the focus of an objective lens shared by the microscopic image sensor and the automatic focusing sensor is positioned on the surface of the sample to be detected; according to the automatic focusing device, the rotating mechanism is added on the basis of the existing automatic focusing device, so that the direction of the line laser can be dynamically adjusted according to the actual situation, and the phenomenon that when scratches, textures or pits similar to detection light beams in shape exist on the surface of an object, the focusing laser line segment can completely coincide with the detection light beams is avoided; therefore, the anti-interference capability and the application range of the focusing sensor are improved, and the rotating mechanism is detachably mounted, so that the rotating mechanism and the lens cone are convenient to disassemble and assemble, and parts are convenient to replace and maintain.

Description

Technical Field

[0001] The utility model belongs to the field of autofocus, and particularly relates to an autofocus device and an electronic device. Background Art

[0002] An optical microscope magnifies the surface image of an object by means of lens imaging. In order to obtain a meaningful image, the microscope objective must be precisely focused on the sample surface. Generally, the depth of field of a high-power microscope objective is only a few micrometers. Microscope operators often need to spend a lot of time manually adjusting the distance between the objective and the sample to achieve focusing.

[0003] The autofocus technology calculates the current defocus amount of the objective lens through a feedback signal and converts it into a motion signal of the motor. The motor drives the objective lens to move to automate the focusing process. According to the types of feedback signals, the autofocus technology can be divided into two types: image autofocus technology and laser autofocus technology. Among them, the image autofocus technology designs an image sharpness evaluation function and calculates the sharpness of the current image in the way of digital image processing, and judges the current defocus amount based on the quantified sharpness value. The laser autofocus technology projects a laser directly onto the sample surface and judges the defocus amount of the objective lens through the state of the laser reflected from the sample surface. The image autofocus technology completely depends on the state of the collected image, is easily affected by the illumination environment, and needs to scan back and forth near the focus to determine the best focusing position, with a slow focusing speed and a small focusing range. In contrast, the laser focusing technology adds a laser signal on the basis of an ordinary microscope, has a larger focusing range and a faster focusing speed, and is widely used in the industrial inspection field.

[0004] The laser autofocus technology is divided into point laser and line laser according to the shape of the light spot on the focal plane of the objective lens. Since the detection beam coverage area of the point laser is small, when there are irregular features such as holes and pits on the object surface, the laser beam cannot return to the sensor normally, resulting in focusing failure. The line laser has stronger anti-interference ability, but when features such as scratches, textures, and depressions on the object surface completely coincide with the line laser, the focusing sensor will collect abnormal focusing signals, resulting in focusing failure.

[0005] A Chinese patent discloses a microscope autofocus system for micro-nano step samples and its focusing method (application number: CN202210642022.2). In this autofocus system, the optical path first passes through one side of the microscope objective lens for focusing and projection onto the micro-nano step sample, then is reflected by the surface of the micro-nano step sample and passes through the other side of the microscope objective lens, and finally forms a spot image on the CMOS camera. By determining whether the spot image on the CMOS camera is composed of columnar protrusions and staggered lines, the focal position of the microscope objective lens is determined, and the distance between the microscope objective lens and the micro-nano step sample is adjusted according to the focusing requirements to achieve focusing the microscope objective lens on the top surface of the step or the bottom surface of the groove. However, in this patent, after the focusing sensor is installed, the shape of the detection light beam projected onto the object surface is fixed. When there are textures similar to the shape of the detection light beam on the object surface, the focusing signal will be strongly interfered, and there is even a probability that the focusing signal cannot be collected, resulting in focusing failure.

[0006] Based on this problem, the present utility model proposes an autofocus device, enabling the direction of the line laser to be dynamically adjusted according to the actual situation, thereby enhancing the anti-interference ability and application range of the focusing sensor. Summary of the Utility Model

[0007] The purpose of the present utility model is to overcome the above problems existing in the prior art, and first provide an autofocus device and an electronic device.

[0008] To achieve the above technical purposes and reach the above technical effects, the present utility model is realized through the following technical solutions:

[0009] An autofocus device, comprising:

[0010] An objective lens adjustment unit, including an objective lens for passing through the defocus detection light beam and the image acquisition light beam on the surface of the sample to be measured, a microscopic image sensor for acquiring the image on the surface of the sample to be measured, and a driving member for controlling the movement of the objective lens along the main axis direction, so that the objective lens focus shared by the microscopic image sensor and the autofocus sensor is located on the surface of the sample to be measured;

[0011] A light output detection unit, including a light modulation unit for emitting a semi-elliptical light beam, and a focusing lens and an autofocus sensor for calculating the distance between the objective lens focus and the surface of the sample to be measured;

[0012] A second beam splitter, located in front of the objective lens and installed in the lens barrel, for reflecting the semi-elliptical light beam emitted by the light modulation unit to the objective lens;

[0013] The rotating mechanism is equipped with a light output detection part, and its rotation axis is coaxial with the optical axis of the light beam incident on the second beam splitter. By rotating the semi-elliptical light beam along the optical axis of the light beam incident on the second beam splitter to the other side, the angle of the light beam reflected by the second beam splitter entering the objective lens is adjusted, so that the original focus laser line segments all located on the height defect of the surface of the sample to be measured rotate out of the height defect area along the optical axis of the light beam incident on the second beam splitter. The part of the focus laser line segment that rotates out of the height defect area is used to judge and calculate the defocus amount.

[0014] Further, the rotating mechanism includes:

[0015] A support member, connected to the light output detection part, for supporting the light output detection part;

[0016] An installation component, used for detachably installing the support member and the lens barrel to limit the position of the rotation axis of the rotating mechanism;

[0017] A driving component, used for driving the rotating mechanism to rotate around the rotation axis, so that the semi-elliptical light beam rotates to the other side along the optical axis of the light beam incident on the second beam splitter.

[0018] Further, the installation component includes:

[0019] An installation piece, arranged on the support member and the lens barrel, for connecting the support member and the lens barrel to install the rotating mechanism and the lens barrel;

[0020] An installation groove, opened on one side of the lens barrel close to the support member, for clamping and installing the installation piece to limit the position of the rotation axis of the rotating mechanism.

[0021] Further, the installation piece includes:

[0022] At least one set of telescopic members, arranged on the outer surface of the installation piece, for adjusting the telescopic length so that the telescopic members are installed into the installation groove;

[0023] A clamping groove, opened on the inner surface of the installation groove and adapted to the telescopic member, for limiting the rotation track of the telescopic member so that the installation piece rotates in the installation groove;

[0024] At least one set of positioning grooves, opened on one side of the clamping groove close to the installation piece and extending to the outside of the lens barrel, for providing space for the telescopic member to enter the clamping groove.

[0025] Further, the telescopic member includes:

[0026] A telescopic seat, fixedly arranged on the installation piece and corresponding to the positioning groove one by one;

[0027] A telescopic plate, telescopically arranged on the side of the telescopic seat away from the installation piece, for adjusting the extending length of the telescopic plate through an adjusting component so that the telescopic member is installed in the clamping groove.

[0028] Furthermore, the adjustment assembly includes:

[0029] A lead screw, rotatably arranged in the telescopic seat and threadedly connected to the telescopic plate, for enabling the telescopic plate to expand and contract under the limitation of the telescopic seat by rotating the lead screw, so as to adjust the length of the telescopic member;

[0030] An adjustment column, rotatably arranged on the telescopic seat, with one end extending outside the telescopic seat and the other end fixedly provided with a first bevel gear, for driving the lead screw to rotate by cooperating with the second bevel gear at the end of the lead screw, so as to move the telescopic plate.

[0031] Furthermore, the driving assembly includes:

[0032] A driving motor, whose output shaft is connected to the support member, and the axial symmetry axis of the output shaft is coaxial with the rotation axis of the rotation mechanism.

[0033] Furthermore, the light modulation part includes:

[0034] A laser, connected to the support member, for providing a light beam;

[0035] A cylindrical lens, connected to the support member, for modulating the light beam emitted by the laser into an elliptical light beam;

[0036] A baffle, connected to the support member, for blocking half of the elliptical light beam so that the light beam propagates on one side of the main axis.

[0037] Furthermore, the light output detection part further includes:

[0038] A reflecting mirror, connected to the support member, for reflecting the half of the light beam not blocked by the baffle;

[0039] A first beam splitter, connected to the support member, for transmitting the light beam reflected by the reflecting mirror and reflecting the reflected light beam returned from the sample surface to the focusing lens;

[0040] A second beam splitter, connected to the support member, for reflecting the light beam transmitted from the first beam splitter to the objective lens and reflecting the reflected light beam returned from the sample surface to the first beam splitter.

[0041] An electronic device, including the above-mentioned microscopic imaging device.

[0042] The beneficial effects of the present utility model are:

[0043] 1. In the present utility model, based on the existing laser autofocus device, by means of the arrangement of the rotating mechanism, the light-emitting detection part as a whole is connected and supported through the support member, and the driving component provides power for the rotation of the rotating mechanism. The support member and the lens barrel are detachably installed through the installation component. On the one hand, it is convenient to quickly disassemble and install the support member and the lens barrel, thus facilitating the repair or replacement of structural components to improve practicality. On the other hand, the rotation of the support member on the lens barrel can be restricted, so that the rotation axis of the rotating mechanism is coaxial with the optical axis of the light beam incident on the second beam splitter, so that the light-emitting detection part as a whole can rotate synchronously with the rotation of the support member, so as to adjust the angle of the light beam emitted from the light-emitting detection part, change the angle of the light beam incident on the second beam splitter, and finally change the angle of the light beam reflected by the second beam splitter entering the objective lens, and ultimately adjust the angle of the focusing laser line segment to improve the anti-interference ability of the system.

[0044] 2. In the present utility model, through the arrangement of the rotating mechanism, the telescopic plate is controlled to telescope in the telescopic seat by the adjusting component to adjust the telescopic length of the telescopic member and control the telescopic state of the telescopic member, so as to facilitate the detachable installation of the installation member and the installation groove, thus facilitating disassembly and assembly for repair or replacement. When the telescopic member is telescoped and engaged with the clamping groove, the telescopic member can be stably and rotatably arranged in the clamping groove, so that the position of the rotation axis of the rotating mechanism is restricted, ensuring that the rotation of the rotating mechanism can meet the angle adjustment requirements of the final focusing laser line segment to improve the anti-interference ability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] The drawings described herein are used to provide a further understanding of the present utility model and constitute a part of this application. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0046] Figure 1 is the overall structural schematic diagram of the present utility model;

[0047] Figure 2 is the optical path schematic diagram in a part of the structure of the present utility model;

[0048] Figure 3 is the schematic diagram before the focusing laser line segment of the present utility model is adjusted;

[0049] Figure 4 is the schematic diagram after the focusing laser line segment of the present utility model is adjusted;

[0050] Figure 5 is the side view of the structure of the installation member of the present utility model;

[0051] Figure 6 is the partial three-dimensional view of the structure of the lens barrel of the present utility model;

[0052] Figure 7 is a side sectional view of the installation groove of the present utility model;

[0053] Figure 8 is a front sectional view of the installation groove of the present utility model;

[0054] Figure 9 is a schematic internal structure diagram of the telescopic member of the present utility model.

[0055] In the figure: 1, laser; 2, cylindrical lens; 3, baffle; 4, mirror; 5, first beam splitter; 6, second beam splitter; 7, objective lens; 8, driving member; 9, focusing lens; 10, autofocus sensor; 11, rotating mechanism; 111, support member; 112, mounting assembly; 1121, mounting member; 1122, mounting groove; 1123, telescopic member; 1124, clamping groove; 1125, positioning groove; 1126, telescopic base; 1127, telescopic plate; 1128, adjusting assembly; 1129, lead screw; 11210, adjusting column; 11211, first bevel gear; 11212, second bevel gear; 113, driving assembly; 12, lens barrel. Detailed implementation manners

[0056] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0057] As Figures 1-9 shown, this embodiment first provides an autofocus device, including:

[0058] An objective lens 7 adjustment unit, including an objective lens 7 for passing through the defocus detection beam and the imaging beam on the surface of the sample to be measured, a microscopic image sensor for collecting the image of the surface of the sample to be measured, and a driving member 8 for controlling the movement of the objective lens 7 along the main axis direction, so that the focal point of the objective lens 7 shared by the microscopic image sensor and the autofocus sensor 10 is located on the surface of the sample to be measured;

[0059] A light output detection unit, including a light modulation unit for emitting a semi-elliptical beam, and a focusing lens 9 and an autofocus sensor 10 for calculating the focal point of the objective lens 7 and the surface of the sample to be measured;

[0060] A second beam splitter 6, located in front of the objective lens 7 and installed in the lens barrel 12, for reflecting the semi-elliptical beam emitted by the light modulation unit to the objective lens 7;

[0061] The rotation mechanism 11 is installed with a light output detection part, and its rotation axis is coaxial with the optical axis of the light beam incident on the second beam splitter 6. By rotating the semi-elliptical light beam along the optical axis of the light beam incident on the second beam splitter 6 to the other side, the angle of the light beam reflected by the second beam splitter 6 entering the objective lens 7 is adjusted, so that the original focus laser line segments all located on the height defect of the surface of the sample to be measured are rotated out of the height defect area along the optical axis of the light beam incident on the second beam splitter 6. The part of the focus laser line segment rotated out of the height defect area is used to judge and calculate the defocus amount.

[0062] In the present utility model, the objective lens 7 adjustment part is used to adjust the position of the objective lens 7 so that the focus of the objective lens 7 falls on the surface of the sample to be measured. Among them, the defocus detection light beam is a semi-elliptical light beam in the light beam system that is incident on the sample to be measured and reflected back to the autofocus sensor 10 in the light output detection part for defocus detection. This light beam is used to judge and calculate the distance and direction between the sample to be measured and the focus of the objective lens 7, that is, the defocus amount and the defocus direction.

[0063] When the focus of the objective lens 7 falls below the surface of the sample to be measured, it is judged as up defocus. At this time, the shape of the light spot falling on the surface of the sample to be measured is an upper semi-ellipse. When the focus of the objective lens 7 falls above the surface of the sample to be measured, it is judged as down defocus. At this time, the shape of the light spot falling on the surface of the sample to be measured is a lower semi-ellipse. When the focus of the objective lens 7 exactly falls on the surface of the sample to be measured, it is judged that the focusing is successful. At this time, the shape of the light spot falling on the surface of the sample to be measured is a focus laser line segment.

[0064] The objective lens 7 is driven by the driving member 8 to move in the main axis direction so that the focus of the objective lens 7 falls on the surface of the sample to be measured to achieve autofocus. When it is determined and calculated that there is up defocus, according to the magnitude of the defocus amount, and the defocus amount is converted into an electrical signal, so that the driving member 8 drives the objective lens 7 to move away from the sample to be measured. When it is determined and calculated that there is down defocus, according to the magnitude of the defocus amount, and the defocus amount is converted into an electrical signal, so that the driving member 8 drives the objective lens 7 to move closer to the sample to be measured. When it is determined that the focusing is successful, there is no need to move the objective lens 7.

[0065] In the present utility model, the driving member 8 includes:

[0066] A second driving cylinder, whose output end is fixedly connected to the objective lens 7, and is used to drive the objective lens 7 to move along the main axis direction.

[0067] In the present utility model, the objective lens 7 is driven by the second driving cylinder to move along the main axis direction so that the focus of the objective lens 7 finally falls on the surface of the sample to be measured to achieve autofocus.

[0068] Among them, the form of the driving member 8 can also be other components such as a motor cooperating with a lead screw 1129 assembly that can realize the movement of the objective lens 7.

[0069] Among them, the image acquisition beam is used to acquire and display the surface image of the sample to be measured through the microscopic image sensor. The microscopic image sensor and the autofocus sensor 10 share an objective lens 7, and the microscopic image sensor is located above the objective lens 7.

[0070] In the present utility model, the light-emitting detection unit is used to emit a beam to the surface of the sample to be measured and reflect the beam to be collected by the autofocus sensor 10 to form a laser image. The defocus direction of the sample to be measured can be judged by monitoring the spot shape on the autofocus sensor 10, and the defocus amount of the sample to be measured can be calculated through the laser image to achieve autofocus.

[0071] Among them, the emitted elliptical beam is used to form a focusing laser line segment in the focusing state of the objective lens 7. Blocking half of the elliptical beam is used to distinguish between upper defocus and lower defocus.

[0072] The focusing lens 9 is used to converge the beam reflected from the surface of the sample to be measured and passing through the objective lens 7, and clearly image it on the autofocus sensor 10, so as to obtain corresponding gray information and centroid calculation information through the clear laser image, calculate the defocus amount through the centroid calculation information for autofocus, and use the gray information to calculate and judge whether the focusing is successful.

[0073] The second beam splitter 6 is installed inside the lens barrel 12, and is used to reflect the beam coming from the light modulation unit to the objective lens 7, and reflect the reflected beam returning from the sample surface back to the light modulation unit. It can also transmit the reflected beam to make the beam enter the microscopic image sensor above the objective lens 7 and the lens barrel 12 for acquiring the surface image of the sample to be measured.

[0074] In the present utility model, the functions of the reflecting mirror 4, the first beam splitter 5 and the second beam splitter 6 are all used to adjust the beam direction and angle. Among them, the setting of the second beam splitter 6 can also transmit the reflected beam to make the beam enter the microscopic image sensor above the objective lens 7 and the lens barrel 12 for acquiring the surface image of the sample to be measured.

[0075] In the present utility model, the light-emitting detection unit is installed on the rotating mechanism 11 and can rotate with the rotating mechanism 11, and its rotation axis is coaxial with the optical axis of the beam incident on the second beam splitter 6. By rotating the semi-elliptical beam along the optical axis of the beam incident on the second beam splitter 6 to the other side, the angle of the beam reflected by the second beam splitter 6 entering the objective lens 7 is adjusted, so that the semi-elliptical beam rotates along the main axis of the objective lens 7 to the other side, then the focusing laser line segment falling on the surface of the sample to be measured can be angle-adjusted, and all the focusing laser line segments falling within the height defect area can be rotated so that there is a part that does not fall within the height defect area, and the defocus amount can be calculated based on this part for autofocus.

[0076] Among them, a height flaw refers to a flaw with a certain depth or height on the surface of the sample to be measured, and the flaw is a scratch, texture or depression similar to the shape of the focusing laser line segment. The focusing laser line segment will completely coincide with it, strongly interfering with the focusing signal.

[0077] By setting the rotation mechanism 11, the purpose is to change the angle of the focusing laser line segment formed by the semi-elliptical light beam passing through the objective lens 7 and focusing, so as to adjust the relative angle between the focusing laser line segment and the sample to be measured, and realize that the direction of the focusing laser line segment can be dynamically adjusted according to the actual situation, solving the problem that the focusing laser line segment completely coincides with the height flaw and strongly interfering with the focusing signal, thereby improving the anti-interference ability and application range of the microscopic imaging device.

[0078] As Figure 3 shown, this figure is a schematic diagram of the focusing laser line segment completely falling within the height flaw before adjustment. As Figure 4 shown, this figure is a schematic diagram of the focusing laser line segment partially not falling within the height flaw after the angle is adjusted under the action of the rotation mechanism 11. It can be seen that by setting the rotation mechanism 11, the focusing laser line segment is partially not falling inside the height flaw, thus avoiding affecting the autofocus process.

[0079] In summary, in the present utility model, on the basis of the existing autofocus device, a rotation mechanism 11 is added, which is used to control the light-emitting detection part to rotate with the optical axis of the light beam incident on the second beam splitter 6 as the rotation axis. By rotating the semi-elliptical light beam to the other side along the optical axis of the light beam incident on the second beam splitter 6, the angle of the light beam reflected by the second beam splitter 6 entering the objective lens 7 is adjusted, so that the semi-elliptical light beam rotates to the other side along the main axis of the objective lens 7, then the angle of the focusing laser line segment falling on the surface of the sample to be measured can be adjusted, and the focusing laser line segment completely falling within the height flaw area can be rotated, so that there is a part of the focusing laser line segment not falling within the height flaw area, and the defocus amount can be calculated according to this part for autofocus. By changing the angle of the focusing laser line segment formed by the light beam passing through the objective lens 7 and focusing, the relative angle between the focusing laser line segment and the sample to be measured is adjusted, and the direction of the line laser can be dynamically adjusted according to the actual situation, avoiding that when there are scratches, textures or depressions similar to the shape of the detection light beam on the object surface, the focusing laser line segment will completely coincide with it, strongly interfering with the focusing signal, and then the problem that the objective lens 7 adjustment part cannot perform autofocus, thereby improving the anti-interference ability and application range of the focusing sensor.

[0080] As Figure 2 、 Figure 5 and Figure 6 shown, the rotation mechanism 11 includes:

[0081] A support member 111, which is connected to the light-emitting detection part and is used to support the light-emitting detection part;

[0082] An installation component 112 is used for detachably installing the support member 111 and the lens barrel 12 to limit the position of the rotation axis of the rotation mechanism 11;

[0083] A driving component 113 is used for driving the rotation mechanism 11 to rotate around the rotation axis, so that the semi-elliptical light beam rotates to the other side along the optical axis of the light beam incident on the second beam splitter 6.

[0084] In the present utility model, the support member 111 can be a support plate, a box body or other components that can support the light output detection part. Moreover, the installation methods of the support member 111 and the components in the light output detection part are also diverse. The installation methods can be all fixedly connected, or partially fixedly connected and partially slidably connected, as long as it is ensured that the laser light beam finally entering the objective lens 7 is a parallel incident light beam. Preferably, in order to improve the stability of the autofocus mechanism, in the present utility model, the installation method between the support member 111 and the components in the light output detection part is fixedly connected.

[0085] In the present utility model, the installation component 112 includes structural components arranged on the support member 111 and the lens barrel 12 to connect the support member 111 and the lens barrel 12, so that the support member 111 can rotate on the lens barrel 12 to fix the position of the rotation axis of the rotation mechanism 11 and be coaxial with the optical axis of the light beam incident on the second beam splitter 6, ensuring that the rotation mechanism 11 can rotate around the rotation axis.

[0086] Moreover, the installation method of the installation component 112 between the support member 111 and the lens barrel 12 is a detachable installation, which is convenient for quickly disassembling and installing the support member 111 and the lens barrel 12, thereby facilitating the repair or replacement of the structural components to improve the practicability.

[0087] In the present utility model, the driving component 113 can drive the support member 111 to rotate around the rotation axis, so that the angle of the light beam incident on the second beam splitter 6 changes, thereby changing the angle at which the light beam reflected by the second beam splitter 6 enters the objective lens 7.

[0088] As described above, by setting the rotating mechanism 11, the overall light-emitting detection part is connected and supported by the support member 111, and the driving component 113 provides power for the rotation of the rotating mechanism 11. The support member 111 and the lens barrel 12 are detachably installed through the installation component 112. On the one hand, it is convenient to quickly disassemble and install the support member 111 and the lens barrel 12, thus facilitating the repair or replacement of structural components to improve practicability. On the other hand, it can limit the rotation of the support member 111 on the lens barrel 12, so that the rotation axis of the rotating mechanism 11 is coaxial with the optical axis of the light beam incident on the second beam splitter 6. Thus, the overall light-emitting detection part can rotate synchronously with the rotation of the support member 111 to adjust the angle of the light beam emitted from the light-emitting detection part, change the angle of the light beam incident on the second beam splitter 6, and finally adjust the angle of the focused laser line segment to improve the anti-interference ability of the system.

[0089] As Figure 5 and Figure 6 shown, the installation component 112 includes:

[0090] The installation member 1121 is arranged on the support member 111 and the lens barrel 12 and is used to connect the support member 111 and the lens barrel 12 to install the rotating mechanism 11 and the lens barrel 12;

[0091] The installation groove 1122 is opened on one side of the lens barrel 12 close to the support member 111 and is used to snap-fit and install the installation member 1121 to limit the position of the rotation axis of the rotating mechanism 11.

[0092] In the present utility model, in order to facilitate the installation between the support member 111 and the lens barrel 12, the installation member 1121 is arranged in the support member 111 and the installation groove 1122, and the installation groove 1122 is opened on the lens barrel 12. The support member 111 and the lens barrel 12 are installed by the cooperation of the installation member 1121 and the installation groove 1122. While improving the installation stability, the installation member 1121 can also rotate in the installation groove 1122 to realize the stable rotation of the support member 111 on the lens barrel 12.

[0093] As Figures 6-8 shown, the installation member 1121 includes:

[0094] At least one set of telescopic members 1123 is arranged on the outer surface of the installation member 1121 and is used to adjust the telescopic length so that the telescopic members 1123 can be installed into the installation groove 1122;

[0095] The clamping groove 1124 is opened on the inner surface of the installation groove 1122 and is adapted to the telescopic members 1123, and is used to limit the rotation trajectory of the telescopic members 1123 so that the installation member 1121 can rotate in the installation groove 1122;

[0096] At least one set of positioning grooves 1125, which are opened on the side of the clamping groove 1124 close to the mounting member 1121 and extend to the outside of the lens barrel 12, are used to provide space for the telescopic member 1123 to enter the clamping groove 1124.

[0097] In the present utility model, by providing a telescopic telescopic member 1123 to adjust the telescopic length, when the telescopic member 1123 is in the retracted state, it is convenient for the telescopic member 1123 to enter the clamping groove 1124 through the positioning groove 1125, and then adjust the telescopic member 1123 to be in the extended state, so that the telescopic member 1123 is clamped in the clamping groove 1124 and cannot be removed through the positioning groove 1125, improving the stability of the telescopic member 1123 installed in the clamping groove 1124. By utilizing the telescopic characteristics of the telescopic member 1123, it is convenient to detachably install the mounting member 1121 and the mounting groove 1122, thus facilitating disassembly and assembly.

[0098] As Figure 9 shown, the telescopic member 1123 includes:

[0099] A telescopic base 1126, which is fixedly arranged on the mounting member 1121 and corresponds to the positioning groove 1125 one by one;

[0100] A telescopic plate 1127, which is telescopically arranged on the side of the telescopic base 1126 away from the mounting member 1121, is used to adjust the extended length of the telescopic plate 1127 through the adjusting component 1128, so that the telescopic member 1123 is installed in the clamping groove 1124.

[0101] In the present utility model, by utilizing the corresponding relationship between the telescopic base 1126 and the positioning groove 1125, the mounting between the mounting member 1121 and the mounting groove 1122 is made tight, improving the reliability and stability of the installation. And the telescopic plate 1127 can move in the telescopic base 1126 under the drive of the adjusting component 1128 to control the telescopic state of the telescopic member 1123, thus facilitating the detachable installation of the mounting member 1121 and the mounting groove 1122.

[0102] The adjusting component 1128 includes:

[0103] A lead screw 1129, which is rotatably arranged in the telescopic base 1126 and is threadedly connected to the telescopic plate 1127, is used to make the telescopic plate 1127 telescopic under the limit of the telescopic base 1126 by rotating the lead screw 1129, so as to adjust the length of the telescopic member 1123;

[0104] An adjusting column 11210, which is rotatably arranged on the telescopic base 1126, one end extends to the outside of the telescopic base 1126, and the other end is fixedly provided with a first bevel gear 11211, is used to cooperate with the second bevel gear 11212 at the end of the lead screw 1129 to drive the lead screw 1129 to rotate, so as to move the telescopic plate 1127.

[0105] In the present utility model, the bottom end of the lead screw 1129 is rotatably arranged in the telescopic seat 1126, the top end of the lead screw 1129 extends into the telescopic plate 1127 and is threadedly connected to a preset thread groove in the telescopic plate 1127, and the telescopic plate 1127 is slidably arranged in the telescopic seat 1126 to realize the limiting effect on the telescopic plate 1127, and the first bevel gear 11211 meshes with the second bevel gear 11212.

[0106] In the present utility model, by rotating the adjusting column 11210, the rotation of the first bevel gear 11211 is realized, so that by driving the rotation of the second bevel gear 11212 meshing therewith, the rotation of the lead screw 1129 is realized, and by the rotation of the lead screw 1129, the telescopic movement of the telescopic plate 1127 in the telescopic seat 1126 is realized to adjust the telescopic state of the telescopic member 1123 and realize installation and disassembly.

[0107] The driving assembly 113 includes:

[0108] A driving motor, whose output shaft is connected to the support member 111, and the axial symmetry axis of the output shaft is coaxial with the rotation axis of the rotation mechanism 11.

[0109] In the present utility model, the form of driving the drive includes but is not limited to this form of driving motor, and it can also be other driving sources that can drive the support member 111 to rotate or a manual rotation method, all of which fall within the protection scope of this application.

[0110] As above, through the setting of the rotation mechanism 11, the telescopic plate 1127 is controlled to telescopic in the telescopic seat 1126 by the adjusting assembly 1128 to adjust the telescopic length of the telescopic member 1123 and control the telescopic state of the telescopic member 1123, so as to facilitate the detachable installation of the installation member 1121 and the installation groove 1122, and thus facilitate disassembly and assembly for maintenance or replacement. When the telescopic member 1123 is clamped with the clamping groove 1124 in the extended state, the telescopic member 1123 can be stably and rotatably arranged in the clamping groove 1124, so that the position of the rotation axis of the rotation mechanism 11 is restricted, ensuring that the rotation of the rotation mechanism 11 can meet the angle adjustment requirements of the final focusing laser line segment, and improving the anti-interference ability of the system.

[0111] As Figures 1-2 shown, the light modulation part includes:

[0112] A laser 1, connected to the support member 111, for providing a light beam;

[0113] A cylindrical lens 2, connected to the support member 111, for modulating the light beam emitted by the laser 1 into an elliptical light beam;

[0114] A baffle 3, connected to the support member 111, for blocking half of the elliptical light beam so that the light beam propagates on one side of the main axis.

[0115] In the present utility model, the light beam emitted by the laser 1 is a parallel light beam. Specifically, it can be a circular parallel light beam or an elliptical parallel light beam. Preferably, a circular parallel light beam is adopted in the present utility model, and the light beam type is a single-wavelength laser beam.

[0116] The cylindrical lens 2 can compress the circular parallel light beam emitted by the laser 1 in one direction, making it an elliptical light beam that diverges in the curvature direction of the cylindrical lens 2 and is collimated in the non-curvature direction.

[0117] Through the setting of the baffle 3, when the elliptical light beam is converged by the objective lens 7 on the surface of the sample to be measured, it may be a focused laser line segment or a semi-elliptical light spot that is blocked by half. Therefore, it is possible to distinguish whether the sample to be measured is above or below the focus of the objective lens 7 according to the blocked part to determine the defocus direction, so as to determine the movement direction of the objective lens 7.

[0118] The light output detection part further includes:

[0119] A reflecting mirror 4, which is connected to the support member 111 and is used to reflect half of the light beam that is not blocked by the baffle 3;

[0120] A first beam splitter 5, which is connected to the support member 111 and is used to transmit the light beam reflected by the reflecting mirror 4 and reflect the reflected light beam returned from the sample surface to the focus detection lens 9;

[0121] In the present utility model, the functions of the reflecting mirror 4 and the first beam splitter 5 are both used to adjust the light beam direction and angle.

[0122] In the present utility model, the focusing optical path of the light output detection part is as follows:

[0123] The circular parallel laser light beam emitted by the laser 1, after being modulated by the cylindrical lens 2, becomes an elliptical light beam that diverges in the curvature direction of the cylindrical lens 2 and is collimated in the non-curvature direction. The elliptical light beam passes through the baffle 3 and propagates on one side of the main axis, and then passes through the reflecting mirror 4 and passes through the first beam splitter 5 and reaches the second beam splitter 6 after being reflected by the surface of the reflecting mirror 4. After being reflected by the second beam splitter 6, it enters the objective lens 7 and falls on the surface of the sample to be measured under the converging action of the objective lens 7. Due to the reflection of the surface of the sample to be measured, the light beam returns to the objective lens 7 again and exits from the objective lens 7. Under the action of the focus detection lens 9, it converges on the photosensitive surface of the image sensor and is received to form a laser image, and the gray information and centroid calculation information of the laser image are obtained to calculate the defocus amount for automatic focusing and determine whether the focusing is successful.

[0124] On the other hand, the present utility model provides an electronic device, including the microscopic imaging device as described above.

[0125] In the description of this specification, the descriptions referring to terms such as "one embodiment", "example", "specific example", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0126] The above has shown and described the basic principles, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments, and what is described in the above embodiments and the specification is only to illustrate the principle of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements fall within the scope of the present utility model claimed.

Claims

1. An automatic focusing device, characterized in that: include: The objective lens adjustment part includes an objective lens for passing through the defocus detection light beam and the image acquisition light beam of the surface of the sample to be tested, a microscopic image sensor for acquiring the image of the surface of the sample to be tested, and a driving member for controlling the objective lens to move along the main axis direction, so that the focus of the objective lens shared by the microscopic image sensor and the autofocus sensor is located on the surface of the sample to be tested; The light-emitting detection unit includes a light modulation unit that emits a semi-elliptical light beam, a focus detection lens that calculates the focus of the objective lens and the surface of the sample to be measured, and an autofocus sensor; A second beam splitter, located in front of the objective lens and installed in the lens barrel, is used to reflect the semi-elliptical light beam emitted by the light modulation unit to the objective lens; The rotating mechanism is equipped with a light output detection part, and its rotation axis is coaxial with the optical axis of the light beam incident to the second beam splitter. By rotating the semi-elliptical light beam to the other side along the optical axis of the light beam incident to the second beam splitter, the angle of the light beam reflected by the second beam splitter entering the objective lens is adjusted, so that all the focusing laser line segments originally located at the height defect on the surface of the sample to be measured are rotated out of the height defect area along the optical axis of the light beam incident to the second beam splitter, and the part of the focusing laser line segments rotated out of the height defect area is used to judge and calculate the defocus amount.

2. An automatic focusing device according to claim 1, characterized in that: The rotating mechanism comprises: A support member connected to the light detection unit and used to support the light detection unit; A mounting assembly, used for detachably mounting the support member and the lens barrel to limit the position of the rotating axis of the rotating mechanism; The driving assembly is used to drive the rotating mechanism to rotate around the rotating axis so that the semi-elliptical light beam rotates to other sides along the optical axis of the light beam incident on the second beam splitter.

3. An automatic focusing device according to claim 2, characterized in that: The installation assembly includes: A mounting member, arranged on the support member and the lens barrel, and used to connect the support member and the lens barrel to mount the rotating mechanism and the lens barrel; The mounting groove is arranged on a side of the lens barrel close to the supporting member and is used for clamping and mounting the mounting member to limit the position of the rotating axis of the rotating mechanism.

4. An automatic focusing device according to claim 3, characterized in that: The mounting member comprises: At least one set of telescopic members, arranged on the outer surface of the mounting member, for adjusting the telescopic length so that the telescopic members can be installed in the mounting groove; A clamping groove is provided on the inner surface of the installation groove and is adapted to the telescopic member, and is used to limit the rotation trajectory of the telescopic member so that the installation member can rotate in the installation groove; At least one group of positioning grooves is arranged on one side of the clamping groove close to the mounting member and extends to the outside of the lens barrel, so as to provide space for the telescopic member to enter the clamping groove.

5. An automatic focusing device according to claim 4, characterized in that: The telescopic member comprises: The telescopic seat is fixedly arranged on the mounting member and corresponds one to one with the positioning groove; The telescopic plate is telescopically arranged on a side of the telescopic seat away from the mounting member, and is used to adjust the extension length of the telescopic plate through an adjustment component so that the telescopic member can be installed in the clamping groove.

6. An automatic focusing device according to claim 5, characterized in that: The adjustment component comprises: A screw rod is rotatably disposed in the telescopic seat and is threadedly connected to the telescopic plate, and is used to allow the telescopic plate to be extended and retracted under the limit of the telescopic seat by rotating the screw rod, so as to adjust the length of the telescopic member; The adjusting column is rotatably arranged on the telescopic seat, one end of which extends to the outside of the telescopic seat, and the other end is fixedly provided with a first bevel gear for cooperating with the second bevel gear at the end of the screw rod to drive the screw rod to rotate so as to move the telescopic plate.

7. An automatic focusing device according to any one of claims 2 to 6, characterized in that: The drive assembly comprises: The output shaft of the driving motor is connected to the supporting member, and the axial symmetry axis of the output shaft is coaxial with the rotating axis of the rotating mechanism.

8. An automatic focusing device according to any one of claims 2 to 6, characterized in that: The light modulation unit comprises: A laser, connected to the support, for providing a light beam; A cylindrical lens is connected to the support member and is used to modulate the light beam emitted by the laser into an elliptical light beam; The baffle is connected to the support and is used for blocking half of the elliptical light beam so that the light beam propagates on one side of the main axis.

9. An automatic focusing device according to claim 8, characterized in that: The light output detection unit further includes: A reflector, connected to the support, for reflecting the half of the light beam not blocked by the baffle; A first beam splitter, connected to the support, for transmitting the light beam reflected by the reflector and reflecting the reflected light beam returned from the sample surface to the focusing lens; The second beam splitter is connected to the support member and is used for reflecting the light beam transmitted from the first beam splitter to the objective lens and reflecting the reflected light beam returned from the sample surface to the first beam splitter.

10. An electronic device, characterized in that: It comprises the autofocus device as described in any one of claims 1 to 9.

Images