Cleaning pipeline structure, vacuum chamber and equipment machine table

Abstract

The utility model provides a cleaning pipeline structure, a vacuum chamber and an equipment machine table. A first output port of a water supply pipeline, a first connector of a middle pipeline, a third output port of a compressed air access pipeline and a third connector of a chamber cooling pipeline are communicated with one another through a first four-way valve; a second input port of the drainage pipeline, a second connector of the middle pipeline, a fourth input port of the compressed air discharge pipeline and a fourth connector of the cavity cooling pipeline are communicated with one another through a second four-way valve. The compressed air inlet pipeline and the compressed air outlet pipeline are connected with the water supply pipeline, the drainage pipeline, the middle pipeline and the cavity cooling pipeline, the valves are arranged, the valves are controlled to switch cooling and cleaning functions, the pipelines connected with the compressed air do not need to be disassembled and assembled, the use efficiency is improved, and the pipeline blocking possibility is reduced; and meanwhile, the pipeline structure does not need to be frequently disassembled and assembled, the integrally-formed fixed pipeline structure is adopted, the pipeline structure is high in reliability and long in service life, potential safety hazards are reduced, and the product maintenance cost is reduced.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor equipment, and in particular relates to a cleaning pipeline structure, a vacuum chamber and an equipment platform. Background Art

[0002] Scanning electron microscope (SEM) detection equipment is a high-precision scanning electronic defect detection equipment used for high-resolution microscopic morphology analysis. Since this type of equipment needs to use an electron gun to excite the electron beam to the sample to excite the sample and obtain information about the microscopic morphology of the material by collecting secondary electrons from the excited sample, it is necessary to maintain a high vacuum degree in the chamber of the electron optical system to ensure the normal operation of the electron optical system. The vacuum degree in the chamber is generally required to be maintained at 10 -5 -10 -7 Torr. Usually, SEM machines use three-stage pumps - dry pump, turbo pump, and ion pump - to maintain graded vacuum, and the turbo pump will dissipate a lot of heat. At the same time, the machine needs to use an electron gun to excite the electron beam to the sample. The excitation and working conditions of the electron gun generally require high voltage, so it will also dissipate a lot of heat to form high temperature.

[0003] In the SEM machine, the molecular pump and electron gun will generate high temperature when they work normally, so the machine needs to be cooled down. Generally, PCW (Process Cooling Water) from the facility or the machine's own chiller and coolant are used for circulating refrigeration and cooling.

[0004] Among them, when using the machine's own cooler and coolant for circulating refrigeration and cooling, the cooling needs of the machine can be met. However, since the coolant and filter need to be replaced regularly, additional expenses will be added. At the same time, the cooler itself is prone to malfunction, resulting in abnormal problems such as machine alarms and cooling failures.

[0005] The cooling requirements of the machine can also be met by using the PCW provided by the factory facilities. However, since the PCW pipeline inside the SEM machine is too thin (outer diameter is 1 / 4 foot), with a slow flow rate and a high temperature, it will cause the number of bacterial colonies in the water in the PCW pipeline at the factory end to exceed the standard. The long-term accumulation of colonies will form flocculent substances, which accumulate near the float of the flowmeter in the PCW pipeline at the factory end and are likely to block the pipeline. Currently, generally, the connection point between the pipeline at the machine end and the PCW pipeline at the factory end is removed, and then a compressed air pipeline is connected to access CDA (Clean Dry Air, compressed air) to clean the pipeline at the machine end. The bacteria and debris in the PCW pipeline at the factory end are removed by shutting down the PCW at the factory end and disassembling the flowmeter. However, the frequent removal and installation of the pipeline are likely to cause abnormalities at the pipeline connection point, such as leakage points and other safety hazards, which are time-consuming, laborious and have a high risk.

[0006] Therefore, there is an urgent need for a cleaning pipeline that can meet the cooling requirements of the machine while reducing the occurrence of failures, improving the cleaning efficiency, and reducing the safety risks.

[0007] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solutions of the present application and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well-known to those skilled in the art just because these solutions are described in the background art part of the present application. Summary of the Invention

[0008] In view of the above-mentioned disadvantages of the prior art, the purpose of the present utility model is to provide a cleaning pipeline structure, a vacuum chamber and an equipment machine, which are used to solve the problems of low cleaning efficiency and poor reliability of the cooling pipeline of the machine in the prior art.

[0009] To achieve the above purpose and other related purposes, the present utility model provides the following technical solutions:

[0010] In the first aspect, the present utility model provides a cleaning pipeline structure, which includes: a water supply pipeline, a drainage pipeline, an intermediate pipeline, a compressed air access pipeline, a compressed air discharge pipeline, a chamber cooling pipeline, a first four-way valve and a second four-way valve. The water supply pipeline, the chamber cooling pipeline and the drainage pipeline are used to access a cooling medium to cool the chamber to be cooled where the chamber cooling pipeline is located;

[0011] The water supply pipeline includes a first input port and a first output port, the intermediate pipeline includes a first interface and a second interface, the drainage pipeline includes a second input port and a second output port, the compressed air access pipeline includes a third input port and a third output port, the compressed air discharge pipeline includes a fourth input port and a fourth output port, the chamber cooling pipeline includes a third interface and a fourth interface, the first four-way valve includes a first valve port, a second valve port, a third valve port and a fourth valve port, and the second four-way valve includes a fifth valve port, a sixth valve port, a seventh valve port and an eighth valve port;

[0012] The first output port of the water supply pipeline, the first interface of the intermediate pipeline, the third output port of the compressed air access pipeline, and the third interface of the chamber cooling pipeline are interconnected through the first valve port, the second valve port, the third valve port, and the fourth valve port of the first four-way valve; the second input port of the drainage pipeline, the second interface of the intermediate pipeline, the fourth input port of the compressed air discharge pipeline, and the fourth interface of the chamber cooling pipeline are interconnected through the fifth valve port, the sixth valve port, the seventh valve port, and the eighth valve port of the second four-way valve.

[0013] In a second aspect, the present utility model provides a cleaning pipeline structure, which includes: a water supply pipeline, a drainage pipeline, an intermediate pipeline, a compressed air access pipeline, a compressed air discharge pipeline, a chamber cooling pipeline, a first two-way valve, a second two-way valve, a third two-way valve, a fourth two-way valve, a fifth two-way valve, a sixth two-way valve, and a seventh two-way valve. The water supply pipeline, the chamber cooling pipeline, and the drainage pipeline are used to access a cooling medium to cool the chamber to be cooled where the chamber cooling pipeline is located;

[0014] The water supply pipeline includes a first input port and a first output port, the intermediate pipeline includes a first interface and a second interface, the drainage pipeline includes a second input port and a second output port, the compressed air access pipeline includes a third input port and a third output port, the compressed air discharge pipeline includes a fourth input port and a fourth output port, and the chamber cooling pipeline includes a third interface and a fourth interface;

[0015] The first output port of the water supply pipeline, the first interface of the intermediate pipeline, the third output port of the compressed air access pipeline, and the third interface of the chamber cooling pipeline are interconnected with each other, and the second input port of the drainage pipeline, the second interface of the intermediate pipeline, the fourth input port of the compressed air discharge pipeline, and the fourth interface of the chamber cooling pipeline are interconnected with each other;

[0016] The first output port of the water supply pipeline is provided with the first two-way valve, the second input port of the drainage pipeline is provided with the second two-way valve, the third output port of the compressed air access pipeline is provided with the third two-way valve, the fourth input port of the compressed air discharge pipeline is provided with the fourth two-way valve, the third interface of the chamber cooling pipeline is provided with the fifth two-way valve, the fourth interface of the chamber cooling pipeline is provided with the sixth two-way valve, and the intermediate pipeline is provided with the seventh two-way valve.

[0017] In a third aspect, the present utility model provides a cleaning pipeline structure, which includes: a water supply pipeline, a drainage pipeline, an intermediate pipeline, a compressed air access pipeline, a compressed air discharge pipeline, a chamber cooling pipeline, a first two-way valve, a second two-way valve, a third two-way valve, a fourth two-way valve, a fifth two-way valve, a sixth two-way valve, an eighth two-way valve and a ninth two-way valve. The water supply pipeline, the chamber cooling pipeline and the drainage pipeline are used to access a cooling medium to cool a chamber to be cooled where the chamber cooling pipeline is located;

[0018] The water supply pipeline includes a first input port and a first output port, the intermediate pipeline includes a first interface and a second interface, the drainage pipeline includes a second input port and a second output port, the compressed air access pipeline includes a third input port and a third output port, the compressed air discharge pipeline includes a fourth input port and a fourth output port, and the chamber cooling pipeline includes a third interface and a fourth interface;

[0019] The first output port of the water supply pipeline, the first interface of the intermediate pipeline, the third output port of the compressed air access pipeline and the third interface of the chamber cooling pipeline are interconnected, and the second input port of the drainage pipeline, the second interface of the intermediate pipeline, the fourth input port of the compressed air discharge pipeline and the fourth interface of the chamber cooling pipeline are interconnected;

[0020] The first output port of the water supply pipeline is provided with the first two-way valve, the second input port of the drainage pipeline is provided with the second two-way valve, the third output port of the compressed air access pipeline is provided with the third two-way valve, the fourth input port of the compressed air discharge pipeline is provided with the fourth two-way valve, the third interface of the chamber cooling pipeline is provided with the fifth two-way valve, the fourth interface of the chamber cooling pipeline is provided with the sixth two-way valve, the first interface of the intermediate pipeline is provided with the eighth two-way valve, and the second interface of the intermediate pipeline is provided with the ninth two-way valve.

[0021] Optionally, the intermediate pipeline, the compressed air access pipeline, the compressed air discharge pipeline, the water supply pipeline and the drainage pipeline are made of the same material.

[0022] Optionally, the inner diameters of the intermediate pipeline, the compressed air access pipeline, the compressed air discharge pipeline, the water supply pipeline and the drainage pipeline are the same.

[0023] Optionally, the intermediate pipeline, the compressed air access pipeline, the compressed air discharge pipeline, the water supply pipeline and the drainage pipeline are of an integrally formed structure.

[0024] Optionally, a flow meter is further provided on the drainage pipeline.

[0025] Optionally, the cleaning pipeline structure further includes a first connection pipeline and a second connection pipeline; the third interface of the chamber cooling pipeline is communicated with the first connection pipeline, and the third interface of the chamber cooling pipeline is communicated with the first output port of the water supply pipeline, the first interface of the intermediate pipeline, and the third output port of the compressed air access pipeline through the first connection pipeline; the fourth interface of the chamber cooling pipeline is communicated with the second connection pipeline, and the fourth interface of the chamber cooling pipeline is communicated with the second input port of the drainage pipeline, the second interface of the intermediate pipeline, and the fourth input port of the compressed air discharge pipeline through the second connection pipeline.

[0026] In a fourth aspect, the present utility model provides a vacuum chamber, which includes any one of the above-mentioned cleaning pipeline structures, and the chamber cooling pipeline in the cleaning pipeline structure is located in the vacuum chamber to provide a cooling medium for cooling the vacuum chamber; the vacuum chamber further includes a molecular pump for evacuating the vacuum chamber.

[0027] In a fifth aspect, the present utility model provides an equipment machine platform, which includes the above-mentioned vacuum chamber.

[0028] As described above, the cleaning pipeline structure, the vacuum chamber and the equipment machine platform of the present utility model have the following beneficial effects:

[0029] The present utility model connects the compressed air access pipeline, the compressed air discharge pipeline with the water supply pipeline, the drainage pipeline, the intermediate pipeline and the chamber cooling pipeline and sets valves to control the valve to switch the cooling and cleaning functions, without disassembling and assembling the pipeline for accessing compressed air, improving the use efficiency and reducing the possibility of pipeline blockage;

[0030] The pipeline structure of the present utility model does not need to be frequently disassembled and assembled, and uses an integrally formed fixed pipeline structure, making the pipeline structure reliable and long-lived, reducing potential safety hazards and lowering the product maintenance cost. Description of the Drawings

[0031] Figure 1 It shows a schematic structural diagram of the cleaning pipeline structure of Embodiment 1 of the present utility model.

[0032] Figure 2 It shows a schematic diagram of a pipeline structure for using a cooler and coolant provided by a machine for circulating refrigeration and cooling in the prior art.

[0033] Figure 3 It shows a schematic diagram of the piping structure of the prior art using the PCW piping provided by the factory for cooling.

[0034] Figure 4 Shown is a structural schematic diagram of an example of a cleaning pipeline structure in Example 1 of the utility model.

[0035] Figure 5 Shown is a structural schematic diagram of the cleaning pipeline structure of Example 2 of the present utility model.

[0036] Figure 6 Shown is a structural schematic diagram of the cleaning pipeline structure of Example 3 of the present utility model.

[0037] Component number description

[0038] 10. Chamber to be cooled; 11. Water supply pipeline; 12. Drainage pipeline; 121. Flow meter; 13. Intermediate pipeline; 14. Compressed air access pipeline; 15. Compressed air discharge pipeline; 16. Chamber cooling pipeline; 1711. First four-way valve; 1712. Second four-way valve; 1721. First two-way valve; 1722. Second two-way valve; 1723. Third two-way valve; 1724. Fourth two-way valve; 1725. Fifth two-way valve; 1726. Sixth two-way valve; 1727. Seventh two-way valve; 1728. Eighth two-way valve; 1729. Ninth two-way valve; 181. Cooling medium input direction; 182. Cooling medium output direction; 191. First connecting pipeline; 192. Second connecting pipeline;

[0039] 21. Cooler; 22. Coolant; 23. Filter; 24. Compressed air pipeline; 251. Float; 252. Flocculent; 261. First valve; 262. Second valve. DETAILED DESCRIPTION

[0040] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0041] When describing the embodiments of the present invention in detail, for the convenience of description, the schematic diagrams showing the device structure may be enlarged locally in a non-general proportion, and the schematic diagrams are only examples and should not limit the scope of protection of the present invention herein. In addition, in actual production, three-dimensional spatial dimensions including length, width, and depth should be included.

[0042] For the convenience of description, spatial relationship terms such as "under", "below", "lower than", "beneath", "above", "on" may be used herein to describe the relationship between one element or feature shown in the drawings and other elements or features. It will be understood that these spatial relationship terms are intended to cover other directions of the device in use or operation, in addition to the directions depicted in the drawings.

[0043] In the context of the present application, the structure in which the first feature is "above" the second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0044] It should be noted that the diagrams provided in this embodiment only illustrate the basic concept of the present invention in a schematic manner. Therefore, only the components related to the present invention are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation may be arbitrarily changed, and the component layout type may also be more complex.

[0045] Embodiment 1:

[0046] This embodiment provides a cleaning pipeline structure, as Figure 1 shown, the cleaning pipeline structure includes: a water supply pipeline 11, a drainage pipeline 12, an intermediate pipeline 13, a compressed air access pipeline 14, a compressed air discharge pipeline 15, a chamber cooling pipeline 16, a first four-way valve 1711, and a second four-way valve 1712. The water supply pipeline 11, the chamber cooling pipeline 16, and the drainage pipeline 12 are used to access a cooling medium to cool the chamber 10 where the chamber cooling pipeline 16 is located;

[0047] The water supply pipeline 11 includes a first input port and a first output port. The intermediate pipeline 13 includes a first interface and a second interface. The drainage pipeline 12 includes a second input port and a second output port. The compressed air access pipeline 14 includes a third input port and a third output port. The compressed air discharge pipeline 15 includes a fourth input port and a fourth output port. The chamber cooling pipeline 16 includes a third interface and a fourth interface. The first four-way valve 1711 includes a first valve port, a second valve port, a third valve port, and a fourth valve port. The second four-way valve 1712 includes a fifth valve port, a sixth valve port, a seventh valve port, and an eighth valve port;

[0048] The first output port of the water supply pipe 11, the first interface of the intermediate pipe 13, the third output port of the compressed air access pipe 14, and the third interface of the chamber cooling pipe 16 are interconnected through the first valve port, the second valve port, the third valve port, and the fourth valve port of the first four-way valve 1711; the second input port of the drainage pipe 12, the second interface of the intermediate pipe 13, the fourth input port of the compressed air discharge pipe 15, and the fourth interface of the chamber cooling pipe 16 are interconnected through the fifth valve port, the sixth valve port, the seventh valve port, and the eighth valve port of the second four-way valve 1712.

[0049] The molecular pump and electron gun contained in the SEM machine in the prior art will generate high temperature during normal operation, so the machine needs to be cooled down. Generally, PCW (Process Cooling Water) of the facility or the machine's own chiller 21 (Chiller) and coolant 22 (Coolant) are used for circulating refrigeration and cooling. Figure 2 As shown, when the machine's own cooler 21 and coolant 22 are used for circulating refrigeration and cooling, the coolant 22 and filter 23 need to be replaced regularly, which will increase additional expenses. The cooler 21 itself is also prone to failure, resulting in abnormal problems such as machine alarms and cooling failure. When the PCW pipeline provided by the factory is used for cooling, Figure 3 As shown, since the machine-end PCW pipeline (chamber cooling pipeline 16) designed inside the SEM machine is too thin (outer diameter is 1 / 4 foot) and has a slow flow rate and a high temperature, the number of bacterial colonies in the water in the machine-end PCW pipeline and the plant-end PCW pipeline (water supply pipeline 11 and drainage pipeline 12) will exceed the standard. Long-term accumulation of colonies will form flocs 252, which will accumulate near the float 251 of the flow meter 121 of the plant-end PCW pipeline, easily blocking the pipeline. It is necessary to remove the connection point between the machine-end pipeline and the plant-end PCW pipeline, and then connect the compressed air pipeline 24 to CDA (Clean Dry Air, compressed air) to clean the machine-end pipeline, and shut down the plant-end PCW and dismantle the flow meter 121 to remove the bacteria and debris in the plant-end PCW pipeline. The frequent removal and installation of pipelines can easily cause abnormalities in the pipeline connection points and potential safety hazards such as leakage points, which is time-consuming, labor-intensive and risky.

[0050] The utility model connects a middle pipeline 13 between a water supply pipeline 11 and a drainage pipeline 12 of a PCW pipeline at the factory service end, connects a compressed air access pipeline 14 and a compressed air discharge pipeline 15 to other pipelines, and sets a first four-way valve 1711 and a second four-way valve 1712 to control the connection between pipelines. Thus, the connection relationship between the pipelines at the factory service end, the pipelines at the machine end, and the compressed air pipelines can be controlled by controlling the opening and closing states of the valve ports of the four-way valves, so as to realize the flexible switching of the pipeline cooling function and different pipeline cleaning functions, without removing the pipelines, and the cleaning frequency can be increased to reduce the accumulation of sundries in the pipelines, reduce the abnormal condition of pipeline blockage, and the switching is convenient and fast, time-saving and labor-saving, with strong safety, improving the cleaning efficiency and safety reliability of the pipeline cleaning structure.

[0051] Specifically, since the diameter of the PCW pipeline at the machine end in the vacuum chamber containing the molecular pump is thinner, it is easier to block the cooling pipeline and requires frequent disassembly and assembly of the pipeline for cleaning. Therefore, the pipeline cleaning structure in this embodiment is mainly used to solve the problem of cleaning the cooling pipeline of the vacuum chamber containing the molecular pump, but the pipeline cleaning structure in this embodiment can also be used to solve the problem of cleaning the cooling pipelines of other suitable structures.

[0052] Specifically, the usage method of the pipeline cleaning structure is as follows: 1) Open the third valve port and the fourth valve port of the first four-way valve 1711 and the seventh valve port and the eighth valve port of the second four-way valve 1712, close other valve ports, and use compressed air to clean the PCW pipeline (chamber cooling pipeline 16) at the machine end; 2) Open the first valve port and the second valve port of the first four-way valve 1711 and the fifth valve port and the sixth valve port of the second four-way valve 1712, close other valve ports, and introduce a cleaning medium into the PCW pipeline (water supply pipeline 11 and drainage pipeline 12) at the factory service end for cleaning; 3) Open the first valve port and the fourth valve port of the first four-way valve 1711 and the fifth valve port and the eighth valve port of the second four-way valve 1712, close other valve ports, and introduce a cooling medium into the chamber cooling pipeline 16 at the machine end through the cooling medium input direction 181 of the water supply pipeline 11 at the factory service end to cool the chamber 10 to be cooled, and discharge the cooling medium from the chamber cooling pipeline 16 at the machine end through the cooling medium output direction 182 of the drainage pipeline 12 at the factory service end. Other valve port opening and closing states can also be adopted for other connection methods, which are all within the protection scope of the utility model.

[0053] In one embodiment, double-pass valves can be additionally provided at each pipeline port according to requirements to improve the fault tolerance rate of the valves, and various deformations of the valve forms and positions are within the protection scope of this application.

[0054] In one embodiment, the materials of the intermediate pipe 13, the compressed air access pipe 14, the compressed air discharge pipe 15, the water supply pipe 11, and the drain pipe 12 are the same.

[0055] By setting the same pipe materials as above, the cleaning pipeline structure of the present utility model is easily integrated, thereby improving the reliability of the cleaning pipeline structure and reducing the possibility of leakage.

[0056] In one embodiment, the inner diameters of the intermediate pipe 13, the compressed air access pipe 14, the compressed air discharge pipe 15, the water supply pipe 11, and the drain pipe 12 are the same.

[0057] By setting the same inner diameters of the above pipelines, the integrated connection between the pipelines is facilitated, and the possibility of leakage between the pipelines is reduced.

[0058] In one embodiment, the inner diameter of the chamber cooling pipe 16 is 1 / 4 foot (inch), and the inner diameters of the water supply pipe 11 and the drain pipe 12 are 1 / 2 foot. Specifically, other suitable inner diameters can also be selected for the pipes.

[0059] In one embodiment, the intermediate pipe 13, the compressed air access pipe 14, the compressed air discharge pipe 15, the water supply pipe 11, and the drain pipe 12 are of an integrally formed structure.

[0060] By setting the above pipelines to be of an integrally formed structure, the present utility model avoids the leakage risk caused by connecting the pipelines, can achieve seamless connection, and greatly improves the reliability and service life of the cleaning pipeline structure.

[0061] In one embodiment, as Figure 1 shown, the drain pipe 12 is further provided with a flow meter 121.

[0062] Through the design of the cleaning pipeline structure described above, when the flow meter 121 is provided in the drain pipe 12, it will not accumulate near the float 251 of the flow meter 121, thereby improving the measurement accuracy of the flow meter 121.

[0063] In one embodiment, as Figure 4As shown in the figure, the cleaning pipeline structure further includes a first connecting pipeline 191 and a second connecting pipeline 192; the third interface of the chamber cooling pipeline 16 is communicated with the first connecting pipeline 191, and the third interface of the chamber cooling pipeline 16 is communicated with the first output port of the water supply pipeline 11, the first interface of the intermediate pipeline 13, and the third output port of the compressed air access pipeline 14 through the first connecting pipeline 191; the fourth interface of the chamber cooling pipeline 16 is communicated with the second connecting pipeline 192, and the fourth interface of the chamber cooling pipeline 16 is communicated with the second input port of the drainage pipeline 12, the second interface of the intermediate pipeline 13, and the fourth input port of the compressed air discharge pipeline 15 through the second connecting pipeline 192.

[0064] In the utility model, by providing the first connecting pipeline 191 and the second connecting pipeline 192 as the connecting pipelines between the chamber cooling pipeline 16 at the machine end and the water supply pipeline 11 and the drainage pipeline 12 at the factory end, a flow buffering effect can be achieved, further avoiding uneven flow velocity caused by excessive flow change when directly converting from the cooling water pipeline to the thinner pipeline at the machine end, thereby improving the cooling efficiency. Specifically, the pipe diameter of the first connecting pipeline 191 can gradually decrease from the first output port to the third interface, and the pipe diameter of the second connecting pipeline 192 can gradually decrease from the second input port to the fourth interface.

[0065] Embodiment 2:

[0066] This embodiment provides a cleaning pipeline structure, which is basically the same as other features of the cleaning pipeline structure in Embodiment 1, and the difference lies in:

[0067] As Figure 5 As shown in the figure, the cleaning pipeline structure includes: a water supply pipeline 11, a drainage pipeline 12, an intermediate pipeline 13, a compressed air access pipeline 14, a compressed air discharge pipeline 15, a chamber cooling pipeline 16, a first two-way valve 1721, a second two-way valve 1722, a third two-way valve 1723, a fourth two-way valve 1724, a fifth two-way valve 1725, a sixth two-way valve 1726, and a seventh two-way valve 1727. The water supply pipeline 11, the chamber cooling pipeline 16, and the drainage pipeline 12 are used to access a cooling medium to cool the chamber 10 where the chamber cooling pipeline 16 is located;

[0068] The water supply pipeline 11 includes a first input port and a first output port, the intermediate pipeline 13 includes a first interface and a second interface, the drainage pipeline 12 includes a second input port and a second output port, the compressed air access pipeline 14 includes a third input port and a third output port, the compressed air discharge pipeline 15 includes a fourth input port and a fourth output port, and the chamber cooling pipeline 16 includes a third interface and a fourth interface;

[0069] The first outlet of the water supply pipe 11, the first interface of the intermediate pipe 13, the third outlet of the compressed air access pipe 14, and the third interface of the chamber cooling pipe 16 are interconnected. The second inlet of the drain pipe 12, the second interface of the intermediate pipe 13, the fourth inlet of the compressed air discharge pipe 15, and the fourth interface of the chamber cooling pipe 16 are interconnected;

[0070] The first outlet of the water supply pipe 11 is provided with the first double-pass valve 1721, the second inlet of the drain pipe 12 is provided with the second double-pass valve 1722, the third outlet of the compressed air access pipe 14 is provided with the third double-pass valve 1723, the fourth inlet of the compressed air discharge pipe 15 is provided with the fourth double-pass valve 1724, the third interface of the chamber cooling pipe 16 is provided with the fifth double-pass valve 1725, the fourth interface of the chamber cooling pipe 16 is provided with the sixth double-pass valve 1726, and the intermediate pipe 13 is provided with the seventh double-pass valve 1727.

[0071] In this embodiment, the four-way valve in Embodiment 1 is replaced with multiple double-pass valves, so as to avoid the need for large-scale replacement of pipelines due to the damage of a single four-way valve, and only need to replace the individual double-pass valves to complete the repair, improving the repair efficiency of the cleaning pipeline structure; at the same time, since the water supply pipe 11 and the drain pipe 12 at the factory end already have the first valve 261 and the second valve 262 respectively (corresponding to the functions of the first double-pass valve 1721 and the second double-pass valve 1722 in this embodiment), the valve settings can be coordinated with their own valves.

[0072] Specifically, since the diameter of the PCW pipeline at the machine end in the vacuum chamber containing the molecular pump is thinner, it is more likely to cause blockage of the cooling pipeline and require frequent disassembly and assembly of the pipeline for cleaning. Therefore, the cleaning pipeline structure in this embodiment is mainly used to solve the cleaning problem of the cooling pipeline in the vacuum chamber containing the molecular pump, but the cleaning pipeline structure in this embodiment can also be used to solve the cleaning problem of the cooling pipeline of other suitable structures.

[0073] Specifically, the usage method of the cleaning pipeline structure is as follows: 1) Open the third two-way valve 1723, the fourth two-way valve 1724, the fifth two-way valve 1725, and the sixth two-way valve 1726, close other two-way valves, and use compressed air to clean the PCW pipeline (chamber cooling pipeline 16) at the machine end; 2) Open the first two-way valve 1721, the second two-way valve 1722, and the seventh two-way valve 1727, close other valve ports, and introduce a cleaning medium into the PCW pipeline (water supply pipeline 11 and drainage pipeline 12) at the plant end for cleaning; 3) Open the first two-way valve 1721, the second two-way valve 1722, the fifth two-way valve 1725, and the sixth two-way valve 1726, close other valve ports, and introduce a cooling medium into the PCW pipeline (chamber cooling pipeline 16) at the machine end through the PCW pipeline (water supply pipeline 11 and drainage pipeline 12) at the plant end to cool the chamber 10 to be cooled. Other valve port switching states can also be adopted for other connection methods, all within the protection scope of the present utility model.

[0074] Embodiment 3:

[0075] This embodiment provides a cleaning pipeline structure, which is basically the same as other features of the cleaning pipeline structure in Embodiment 2, and the difference lies in:

[0076] As Figure 6 shown, the cleaning pipeline structure includes: a water supply pipeline 11, a drainage pipeline 12, an intermediate pipeline 13, a compressed air access pipeline 14, a compressed air discharge pipeline 15, a chamber cooling pipeline 16, a first two-way valve 1721, a second two-way valve 1722, a third two-way valve 1723, a fourth two-way valve 1724, a fifth two-way valve 1725, a sixth two-way valve 1726, an eighth two-way valve 1728, and a ninth two-way valve 1729. The water supply pipeline 11, the chamber cooling pipeline 16, and the drainage pipeline 12 are used to access a cooling medium to cool the chamber 10 where the chamber cooling pipeline 16 is located;

[0077] The water supply pipeline 11 includes a first input port and a first output port, the intermediate pipeline 13 includes a first interface and a second interface, the drainage pipeline 12 includes a second input port and a second output port, the compressed air access pipeline 14 includes a third input port and a third output port, the compressed air discharge pipeline 15 includes a fourth input port and a fourth output port, and the chamber cooling pipeline 16 includes a third interface and a fourth interface;

[0078] The first outlet of the water supply pipe 11, the first interface of the intermediate pipe 13, the third outlet of the compressed air access pipe 14, and the third interface of the chamber cooling pipe 16 are interconnected. The second inlet of the drain pipe 12, the second interface of the intermediate pipe 13, the fourth inlet of the compressed air discharge pipe 15, and the fourth interface of the chamber cooling pipe 16 are interconnected;

[0079] The first outlet of the water supply pipe 11 is provided with the first two-way valve 1721, the second inlet of the drain pipe 12 is provided with the second two-way valve 1722, the third outlet of the compressed air access pipe 14 is provided with the third two-way valve 1723, the fourth inlet of the compressed air discharge pipe 15 is provided with the fourth two-way valve 1724, the third interface of the chamber cooling pipe 16 is provided with the fifth two-way valve 1725, the fourth interface of the chamber cooling pipe 16 is provided with the sixth two-way valve 1726, the first interface of the intermediate pipe 13 is provided with the eighth two-way valve 1728, and the second interface of the intermediate pipe 13 is provided with the ninth two-way valve 1729.

[0080] In this embodiment, the seventh two-way valve 1727 in Embodiment 2 is split into the eighth two-way valve 1728 at the first interface and the ninth two-way valve 1729 at the second interface to respectively control the flow at both ends of the intermediate pipe 13, so as to play a dual insurance role and improve the reliability of the intermediate pipe 13.

[0081] Specifically, since the diameter of the PCW pipeline at the machine end in the vacuum chamber containing the molecular pump is thinner, it is easier to block the cooling pipeline and requires frequent disassembly and assembly of the pipeline for cleaning. Therefore, the cleaning pipeline structure in this embodiment is mainly used to solve the cleaning problem of the cooling pipeline in the vacuum chamber containing the molecular pump, but the cleaning pipeline structure in this embodiment can also be used to solve the cleaning problem of the cooling pipelines of other suitable structures.

[0082] Specifically, the usage method of the cleaning pipeline structure is as follows: 1) Open the third two-way valve 1723, the fourth two-way valve 1724, the fifth two-way valve 1725, and the sixth two-way valve 1726, close other two-way valves, and use compressed air to clean the PCW pipeline (chamber cooling pipeline 16) at the machine end; 2) Open the first two-way valve 1721, the second two-way valve 1722, the eighth two-way valve 1728, and the ninth two-way valve 1729, close other valve ports, and introduce a cleaning medium into the PCW pipeline (water supply pipeline 11 and drainage pipeline 12) at the plant end for cleaning; 3) Open the first two-way valve 1721, the second two-way valve 1722, the fifth two-way valve 1725, and the sixth two-way valve 1726, close other valve ports, and introduce a cooling medium into the PCW pipeline (chamber cooling pipeline 16) at the machine end through the PCW pipeline (water supply pipeline 11 and drainage pipeline 12) at the plant end to cool the chamber 10 to be cooled. Other valve port switching states can also be adopted for other connection methods, all within the protection scope of the present utility model.

[0083] Embodiment 4:

[0084] This embodiment provides a vacuum chamber, which includes the cleaning pipeline structure according to any one of Embodiments 1-3. The chamber cooling pipeline in the cleaning pipeline structure is located inside the vacuum chamber to provide a cooling medium for cooling the vacuum chamber; the vacuum chamber further includes a molecular pump, and the molecular pump is used to evacuate the vacuum chamber.

[0085] Since there will be a PCW pipeline with a thinner pipeline at the machine end in a vacuum chamber containing a molecular pump (corresponding to the chamber cooling pipeline in the present utility model), using the cleaning pipeline structure of the present utility model in such a vacuum chamber can better reflect the solution to the problem of frequent cleaning required for pipeline blockage caused by its thin pipeline. The cleaning pipeline structure of the present utility model is more suitable for cleaning the cooling pipeline of such a vacuum chamber containing a molecular pump.

[0086] Embodiment 5:

[0087] This embodiment provides a device machine platform, which includes the vacuum chamber in Embodiment 4.

[0088] In one embodiment, the device machine platform is a scanning electron microscope (SEM, Scan Electron Microscope) detection device machine platform.

[0089] Specifically, since a turbomolecular pump for evacuating is required in the SEM equipment machine table, and an electron gun with a large heat dissipation capacity is also needed, the machine table of this type of equipment has the characteristics of a high cooling speed and relatively thin cooling pipelines at the machine table end, and is more likely to cause problems of blocked cooling pipelines. The use of the cleaning pipeline structure of the present utility model can better reflect its improvement in the cleaning efficiency of this type of pipeline and the reduction of safety risks; the cleaning pipeline structure of the present utility model can also be applied to the cleaning of cooling pipelines of other suitable equipment machine tables.

[0090] In summary, for the cleaning pipeline structure, vacuum chamber and equipment machine table of the present utility model, compressed air can be connected to the pipeline, the compressed air discharge pipeline is connected to the water supply pipeline, the drainage pipeline, the intermediate pipeline and the chamber cooling pipeline and valves are set to control the valve to switch the cooling and cleaning functions. There is no need to disassemble and assemble the pipeline for accessing compressed air, the use efficiency is improved, and the possibility of pipeline blockage is reduced; at the same time, the pipeline structure does not need to be frequently disassembled and assembled, and an integrally formed fixed pipeline structure is used, so that the pipeline structure has strong reliability, long service life, reduces potential safety hazards and reduces the product maintenance cost.

[0091] Therefore, the present utility model effectively overcomes various disadvantages in the prior art and has high industrial utilization value.

[0092] The above embodiments are only illustrative of the principles and effects of the present utility model, and are not used to limit the present utility model. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present utility model. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present utility model should still be covered by the claims of the present utility model.

Claims

1. A cleaning pipeline structure, characterized in that: The cleaning pipeline structure comprises: a water supply pipeline, a drainage pipeline, an intermediate pipeline, a compressed air access pipeline, a compressed air discharge pipeline, a chamber cooling pipeline, a first four-way valve and a second four-way valve, wherein the water supply pipeline, the chamber cooling pipeline and the drainage pipeline are used to access a cooling medium to cool the chamber to be cooled where the chamber cooling pipeline is located; The water supply pipeline includes a first input port and a first output port, the intermediate pipeline includes a first interface and a second interface, the drainage pipeline includes a second input port and a second output port, the compressed air access pipeline includes a third input port and a third output port, the compressed air discharge pipeline includes a fourth input port and a fourth output port, the chamber cooling pipeline includes a third interface and a fourth interface, the first four-way valve includes a first valve port, a second valve port, a third valve port and a fourth valve port, and the second four-way valve includes a fifth valve port, a sixth valve port, a seventh valve port and an eighth valve port; The first output port of the water supply pipe, the first interface of the intermediate pipe, the third output port of the compressed air access pipe, and the third interface of the chamber cooling pipe are interconnected through the first valve port, the second valve port, the third valve port, and the fourth valve port of the first four-way valve; the second input port of the drainage pipe, the second interface of the intermediate pipe, the fourth input port of the compressed air discharge pipe, and the fourth interface of the chamber cooling pipe are interconnected through the fifth valve port, the sixth valve port, the seventh valve port, and the eighth valve port of the second four-way valve.

2. A cleaning pipeline structure, characterized in that: The cleaning pipeline structure comprises: a water supply pipeline, a drainage pipeline, an intermediate pipeline, a compressed air access pipeline, a compressed air discharge pipeline, a chamber cooling pipeline, a first two-way valve, a second two-way valve, a third two-way valve, a fourth two-way valve, a fifth two-way valve, a sixth two-way valve and a seventh two-way valve, wherein the water supply pipeline, the chamber cooling pipeline and the drainage pipeline are used to access a cooling medium to cool the chamber to be cooled where the chamber cooling pipeline is located; The water supply pipeline includes a first input port and a first output port, the intermediate pipeline includes a first interface and a second interface, the drainage pipeline includes a second input port and a second output port, the compressed air access pipeline includes a third input port and a third output port, the compressed air discharge pipeline includes a fourth input port and a fourth output port, and the chamber cooling pipeline includes a third interface and a fourth interface; The first output port of the water supply pipe, the first interface of the intermediate pipe, the third output port of the compressed air access pipe and the third interface of the chamber cooling pipe are connected to each other, and the second input port of the drainage pipe, the second interface of the intermediate pipe, the fourth input port of the compressed air discharge pipe and the fourth interface of the chamber cooling pipe are connected to each other; The first output port of the water supply pipe is provided with the first two-way valve, the second input port of the drainage pipe is provided with the second two-way valve, the third output port of the compressed air access pipe is provided with the third two-way valve, the fourth input port of the compressed air discharge pipe is provided with the fourth two-way valve, the third interface of the chamber cooling pipe is provided with the fifth two-way valve, the fourth interface of the chamber cooling pipe is provided with the sixth two-way valve, and the intermediate pipe is provided with the seventh two-way valve.

3. A cleaning pipeline structure, characterized in that: The cleaning pipeline structure comprises: a water supply pipeline, a drainage pipeline, an intermediate pipeline, a compressed air access pipeline, a compressed air discharge pipeline, a chamber cooling pipeline, a first two-way valve, a second two-way valve, a third two-way valve, a fourth two-way valve, a fifth two-way valve, a sixth two-way valve, an eighth two-way valve and a ninth two-way valve, wherein the water supply pipeline, the chamber cooling pipeline and the drainage pipeline are used to access a cooling medium to cool the chamber to be cooled where the chamber cooling pipeline is located; The water supply pipeline includes a first input port and a first output port, the intermediate pipeline includes a first interface and a second interface, the drainage pipeline includes a second input port and a second output port, the compressed air access pipeline includes a third input port and a third output port, the compressed air discharge pipeline includes a fourth input port and a fourth output port, and the chamber cooling pipeline includes a third interface and a fourth interface; The first output port of the water supply pipe, the first interface of the intermediate pipe, the third output port of the compressed air access pipe and the third interface of the chamber cooling pipe are connected to each other, and the second input port of the drainage pipe, the second interface of the intermediate pipe, the fourth input port of the compressed air discharge pipe and the fourth interface of the chamber cooling pipe are connected to each other; The first output port of the water supply pipe is provided with the first two-way valve, the second input port of the drainage pipe is provided with the second two-way valve, the third output port of the compressed air access pipe is provided with the third two-way valve, the fourth input port of the compressed air discharge pipe is provided with the fourth two-way valve, the third interface of the chamber cooling pipe is provided with the fifth two-way valve, the fourth interface of the chamber cooling pipe is provided with the sixth two-way valve, the first interface of the intermediate pipe is provided with the eighth two-way valve, and the second interface of the intermediate pipe is provided with the ninth two-way valve.

4. The cleaning pipeline structure according to any one of claims 1 to 3, characterized in that: The intermediate pipe, the compressed air inlet pipe, the compressed air outlet pipe, the water supply pipe and the drainage pipe are made of the same material.

5. The cleaning pipeline structure according to any one of claims 1 to 3, characterized in that: The inner diameters of the intermediate pipeline, the compressed air inlet pipeline, the compressed air outlet pipeline, the water supply pipeline and the drainage pipeline are the same.

6. The cleaning pipeline structure according to any one of claims 1 to 3, characterized in that: The intermediate pipe, the compressed air inlet pipe, the compressed air outlet pipe, the water supply pipe and the drainage pipe are an integrally formed structure.

7. The cleaning pipeline structure according to any one of claims 1 to 3, characterized in that: The drainage pipeline is also provided with a flow meter.

8. The cleaning pipeline structure according to any one of claims 1 to 3, characterized in that: The cleaning pipeline structure also includes a first connecting pipe and a second connecting pipe; the third interface of the chamber cooling pipe is connected to the first connecting pipe, and the third interface of the chamber cooling pipe is connected to the first output port of the water supply pipe, the first interface of the intermediate pipe, and the third output port of the compressed air access pipe through the first connecting pipe; the fourth interface of the chamber cooling pipe is connected to the second connecting pipe, and the fourth interface of the chamber cooling pipe is connected to the second input port of the drainage pipe, the second interface of the intermediate pipe, and the fourth input port of the compressed air discharge pipe through the second connecting pipe.

9. A vacuum chamber, characterized in that: The vacuum chamber includes the cleaning pipeline structure described in any one of claims 1-8, and the chamber cooling pipeline in the cleaning pipeline structure is located in the vacuum chamber to provide cooling medium to the vacuum chamber for cooling; the vacuum chamber also includes a molecular pump, which is used to evacuate the vacuum chamber.

10. A device, characterized in that: The equipment platform includes the vacuum chamber described in claim 9.

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