Anti-static ion fan for chip manufacturing

Abstract

The utility model relates to the technical field of chip manufacturing, and discloses an anti-static ion fan for chip manufacturing, which comprises a fan body, a filter frame is detachably mounted on one side of the fan body, an ion ring is arranged on the other side of the fan body, and a plurality of ion needles are annularly arranged on the inner side of the ion ring. According to the technical scheme, the straight rod can move rightwards along the sliding groove, the spring is compressed at the same time, the straight rod drives the sliding block to move along with the straight rod, the sliding block drives the protection frame to move rightwards, the protection frame is separated from the ion ring, and therefore a worker can maintain an ion needle on the ion ring conveniently; the spherical rod moves to the right inclined surface of the wedge block, so that the wedge block loses supporting force, the wedge block moves downwards, the first filter plate and the second filter plate are further conveniently disassembled and cleaned, the first filter plate, the second filter plate and the protection frame are disassembled in a linkage manner, and the disassembly and maintenance efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip manufacturing, in particular to an anti-static ion blower for chip manufacturing. Background Technique

[0002] An integrated circuit that manufactures a circuit on the surface of a semiconductor chip is also called a thin-film integrated circuit. Another type of thick-film integrated circuit is a miniaturized circuit composed of independent semiconductor devices and passive components integrated into a substrate or a circuit board. When manufacturing a chip, it is necessary to perform anti-static treatment on the machines used for chip production. When performing the treatment, an ion fan is required to perform anti-static treatment on the machines.

[0003] After retrieval, the publication number is (CN112503008B), which discloses an anti-static ion blower for chip manufacturing, including a box body, a filter box, an ion ring, a support block, a protection frame, support legs, cushion blocks, protection rods, non-woven fabrics and filter plates. The right end of the box body is hinged with a filter box. The inner part of the left end of the box body is fixedly sleeved with an ion ring. A support block is fixedly connected inside the box body. The outer side of the left end of the box body is clamped with a protection frame. The lower end of the box body is fixedly connected with support legs. The lower end of the filter box is fixedly connected with cushion blocks. Protection rods are fixedly connected inside the protection frame.

[0004] When implementing this technical solution, at least the following defects still exist: Although this invention can reduce the dust in the air by the number of ions in the air and facilitate the cleaning of the ion needles, both the filter plate and the protection frame are respectively installed with a plurality of fasteners, resulting in too cumbersome disassembly of the filter plate and the ion needles, thus affecting the maintenance efficiency of the ion blower and urgently needing improvement. Therefore, we propose an anti-static ion blower for chip manufacturing. Content of the Utility Model

[0005] The purpose of the utility model is to provide an anti-static ion blower for chip manufacturing, and solve the problems raised in the background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: An anti-static ion blower for chip manufacturing, including a blower body, a filter frame is detachably installed on one side of the blower body, an ion ring is arranged on the other side of the blower body, a plurality of ion needles are annularly arranged inside the ion ring, a first filter plate and a second filter plate are respectively arranged on both sides of the inner cavity of the filter frame, and a straight rod is movably arranged at the lower end of the blower body;

[0007] A slider is welded to one end of the straight rod, a slide groove is provided on one side of the lower end of the fan body, a wedge block is movably installed at the lower end of the filter frame, and locking grooves are provided on both sides of the upper end of the wedge block. A spherical rod is welded to the top of the other end of the straight rod, and the upper end of the spherical rod is fitted with the lower end of the wedge block, and a protective frame is welded to the upper end of the slider, and the protective frame is sleeved on the outside of the ion ring.

[0008] By adopting the above technical scheme, the straight rod can be moved to the right along the slide groove while compressing the spring, so that the straight rod drives the slider to move along, and the slider drives the protective frame to move to the right, so that the protective frame is separated from the ion circle, thereby facilitating the staff to maintain the ion needle on the ion circle. In addition, during the movement of the straight rod to the right, the spherical rod can be moved to the right inclined surface of the wedge block, so that the wedge block loses its supporting force and moves downward, further facilitating the disassembly and cleaning of the first filter plate and the second filter plate, thereby completing the disassembly of the first filter plate, the second filter plate and the protective frame in a linked manner, thereby improving the disassembly and maintenance efficiency.

[0009] Optionally, a slope is provided at the lower end of the wedge block, and a limit strip is fixedly installed at the upper edge of the wedge block.

[0010] By adopting the above technical solution, it is convenient to set the limiting strip so that the limiting strip can limit the position of the wedge block, thereby avoiding the situation where the wedge block is separated from the filter frame.

[0011] Optionally, a spring is fixedly installed in the inner cavity of the slide groove, and the other end of the spring is fixedly connected to the slider.

[0012] By adopting the above technical solution, it is convenient to set the spring so that the spring can drive the slider to reset, thereby limiting each component.

[0013] Optionally, the size of the slider matches the size of the slide groove, and the slider is slidably connected to the slide groove.

[0014] By adopting the above technical solution, it is convenient to ensure the stability of the movement of the straight rod by cooperating with the sliding block and the sliding groove.

[0015] Optionally, the lower ends of the first filter plate and the second filter plate are movably connected to the locking groove.

[0016] By adopting the above technical solution, it is convenient to engage and limit the first filter plate and the second filter plate through the setting of the engaging groove.

[0017] Optionally, a circular ring is welded to the other end of the straight rod, and a positioning pin is provided on the other side of the lower end of the fan body. The positioning pin passes through the middle of the circular ring and is movably connected to the lower end of the fan body.

[0018] By adopting the above technical solution, it is convenient to cooperate the positioning pin with the ring, so as to facilitate the limitation of the position of the straight rod.

[0019] Compared with the prior art, the beneficial effects of the technical solution of the present application are as follows:

[0020] Through the blower body, ion ring, straight rod, protection frame, wedge block, spherical rod and positioning pin arranged in the technical solution of the present application, the straight rod can move to the right along the chute, while compressing the spring. The straight rod drives the slider to move accordingly, and the slider drives the protection frame to move to the right, so that the protection frame is separated from the ion ring, thus facilitating the maintenance of the ion needles on the ion ring by the staff. Also, during the process of the straight rod moving to the right, the spherical rod can move to the right inclined surface of the wedge block, so that the wedge block loses the supporting force and moves downward, further facilitating the disassembly and cleaning of the first filter plate and the second filter plate, and thus completing the disassembly of the first filter plate, the second filter plate and the protection frame in a linked manner, improving the disassembly and maintenance efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] By reading the detailed description of the non-restrictive embodiments with reference to the following drawings, other features, objects and advantages of the present utility model will become more obvious:

[0022] Figure 1 It is a schematic diagram of the overall structure of an ion blower for chip manufacturing with anti-static function of the present utility model;

[0023] Figure 2 It is a partial enlarged structural schematic diagram of part A of an ion blower for chip manufacturing with anti-static function of the present utility model.

[0024] In the figure: 1, blower body; 11, filter frame; 12, ion ring; 13, first filter plate; 14, second filter plate; 2, straight rod; 21, slider; 22, protection frame; 23, chute; 24, spring; 3, wedge block; 31, engaging groove; 32, limiting strip; 33, spherical rod; 4, ring; 5, positioning pin. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] Please refer to Figure 1-2 , the present utility model provides a technical solution: an ion blower for chip manufacturing with anti-static function, including a blower body 1, a filter frame 11 is detachably installed on one side of the blower body 1, an ion ring 12 is arranged on the other side of the blower body 1, a plurality of ion needles are annularly arranged inside the ion ring 12, a first filter plate 13 and a second filter plate 14 are respectively arranged on both sides of the inner cavity of the filter frame 11, and a straight rod 2 is movably arranged at the lower end of the blower body 1;

[0026] One end of the straight rod 2 is welded with a slider 21. On one side of the lower end of the fan body 1, a chute 23 is provided. The lower end of the filter frame 11 is movably installed with a wedge block 3. On both sides of the upper end of the wedge block 3, engaging grooves 31 are provided. Above the other end of the straight rod 2, a spherical rod 33 is welded, and the upper end of the spherical rod 33 is in contact with the lower end of the wedge block 3. The upper end of the slider 21 is welded with a protection frame 22. The protection frame 22 is sleeved outside the ion ring 12. The size of the slider 21 is adapted to the size of the chute 23, and the slider 21 is slidably connected to the chute 23, which is convenient for ensuring the stability of the movement of the straight rod 2 through the cooperation of the slider 21 and the chute 23. The lower ends of the first filter plate 13 and the second filter plate 14 are movably connected to the engaging grooves 31, which is convenient for clamping and limiting the first filter plate 13 and the second filter plate 14 through the setting of the engaging grooves 31. The other end of the straight rod 2 is welded with a ring 4. On the other side of the lower end of the fan body 1, a positioning pin 5 is provided. The positioning pin 5 passes through the middle of the ring 4 and is movably connected to the lower end of the fan body 1, which is convenient for limiting the position of the straight rod 2 through the cooperation of the positioning pin 5 and the ring 4.

[0027] The lower end of the wedge block 3 is provided with an inclined surface, and a limiting strip 32 is fixedly installed on the upper edge of the wedge block 3, which is convenient for limiting the position of the wedge block 3 through the setting of the limiting strip 32 and avoiding the separation of the wedge block 3 from the filter frame 11.

[0028] A spring 24 is fixedly installed in the inner cavity of the chute 23, and the other end of the spring 24 is fixedly connected to the slider 21, which is convenient for the spring 24 to drive the slider 21 to reset through the setting of the spring 24, so as to limit each component.

[0029] During maintenance, first take out the positioning pin 5 between the ring 4 and the fan body, and then push the straight rod 2 to move to the right, so that the straight rod 2 moves to the right along the chute 23, while compressing the spring 24. The straight rod 2 drives the slider 21 to move accordingly, and the slider 21 drives the protection frame 22 to move to the right, so that the protection frame 22 is separated from the ion ring 12, which is convenient for the staff to maintain the ion needles on the ion ring 12. At the same time, during the process of the straight rod 2 moving to the right, the spherical rod 33 on the straight rod 2 moves accordingly, so that the spherical rod 33 moves to the right inclined surface of the wedge block 3, so that the wedge block 3 loses the supporting force, and the wedge block 3 moves downward, which further facilitates the disassembly and cleaning of the first filter plate 13 and the second filter plate 14, so as to complete the disassembly of the first filter plate 13, the second filter plate 14 and the protection frame 22 in a linked manner, and improve the disassembly and maintenance efficiency.

Claims

1. An antistatic ion blower for chip manufacturing, comprising a blower body (1), characterized in that: A filter frame (11) is detachably mounted on one side of the fan body (1), an ion ring (12) is arranged on the other side of the fan body (1), a plurality of ion needles are arranged in a ring shape inside the ion ring (12), a first filter plate (13) and a second filter plate (14) are respectively arranged on both sides of the inner cavity of the filter frame (11), and a straight rod (2) is movably arranged at the lower end of the fan body (1); A slider (21) is welded to one end of the straight rod (2), a slide groove (23) is provided on one side of the lower end of the fan body (1), a wedge block (3) is movably mounted on the lower end of the filter frame (11), and engaging grooves (31) are provided on both sides of the upper end of the wedge block (3), a spherical rod (33) is welded to the upper part of the other end of the straight rod (2), and the upper end of the spherical rod (33) is fitted with the lower end of the wedge block (3), and a protective frame (22) is welded to the upper end of the slider (21), and the protective frame (22) is sleeved on the outer side of the ion ring (12).

2. The antistatic ion blower for chip manufacturing according to claim 1, characterized in that: The lower end of the wedge block (3) is provided with an inclined surface, and the upper end edge of the wedge block (3) is fixedly mounted with a limit strip (32).

3. The antistatic ion blower for chip manufacturing according to claim 1, characterized in that: A spring (24) is fixedly installed in the inner cavity of the slide groove (23), and the other end of the spring (24) is fixedly connected to the slider (21).

4. The antistatic ion blower for chip manufacturing according to claim 1, characterized in that: The size of the slider (21) matches the size of the slide groove (23), and the slider (21) is slidably connected to the slide groove (23).

5. The antistatic ion blower for chip manufacturing according to claim 1, characterized in that: The lower ends of the first filter plate (13) and the second filter plate (14) are movably connected to the engaging groove (31).

6. The antistatic ion blower for chip manufacturing according to claim 1, characterized in that: A circular ring (4) is welded to the other end of the straight rod (2), and a positioning pin (5) is provided on the other side of the lower end of the fan body (1). The positioning pin (5) passes through the middle of the circular ring (4) and is movably connected to the lower end of the fan body (1).

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