Boat structure

Abstract

The utility model relates to the field of photovoltaic technology, in particular to a boat structure, and solves the problem that boat pages are easy to damage when a graphite boat is placed on a paddle in the prior art. The boat structure comprises a boat hinge assembly, a plurality of first connecting rods, a plurality of first partition blocks and a plurality of second partition blocks. The second spacer blocks comprise a plurality of middle supporting spacer blocks, the lower ends of the middle supporting spacer blocks form contact surfaces used for making contact with the paddle structure, in the vertical direction, the height of the contact surfaces is smaller than that of the bottom end face of the boat page assembly, and gaps are formed in the positions, located below the second convex lugs, between the adjacent middle supporting spacer blocks. According to the boat structure, the height of the contact face of the middle supporting partition block is smaller than that of the lower side of the second convex lug, when the boat structure is placed on a paddle, the contact face is in contact fit with the paddle, supporting is formed by the middle supporting partition block, the boat page assembly does not make contact with the paddle structure, and the boat page assembly can be effectively prevented from being damaged.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic technology, and particularly to a boat structure. Background Art

[0002] Solar cell power generation is a new type of renewable energy that is green and environmentally friendly. How to fabricate high-efficiency and low-cost solar cells is an urgent problem for each manufacturer at present.

[0003] When the battery wafers are undergoing the surface coating process, the battery wafers need to be inserted onto a graphite boat carrier, and the graphite boat is sent into the furnace tube through a boat pushing mechanism for the coating process. The component used to support the graphite boat in the boat pushing mechanism is called a paddle. When the graphite boat is placed on the paddle, the boat pages will inevitably come into contact with the surface of the paddle. Since the boat pages are relatively thin (usually 2 - 2.5 mm), it is easy to cause damage to the boat pages, affecting the service life of the graphite boat. Replacing the new inner boat pages not only wastes the manufacturing cost but also wastes working hours. Summary of the Utility Model

[0004] In view of this, the embodiments of the present disclosure provide a boat structure, which solves the problem that the boat pages are easily damaged when the graphite boat is placed on the paddle in the related art.

[0005] In a first aspect, the embodiments of the present disclosure provide a boat structure, including: a boat page assembly, including a plurality of first boat pages and a plurality of second boat pages, the plurality of first boat pages and the plurality of second boat pages are alternately arranged in sequence, a gap is formed between the first boat page and the adjacent second boat page, the first boat page is provided with a first lug, the second boat page is provided with a second lug, and the second lug is located below the first lug; a plurality of first connecting rods, perpendicularly arranged with respect to the first boat pages and the second boat pages, and a part of the first connecting rods are connected and cooperated with the plurality of first boat pages at the position of the first lugs, and another part of the first connecting rods are connected and cooperated with the second boat pages at the position of the second lugs; a plurality of first spacers, alternately arranged with the plurality of first lugs, and connected and cooperated with a part of the first connecting rods, the first spacer is in contact and cooperation with the adjacent first lug; a plurality of second spacers, alternately arranged with the plurality of second lugs, and connected and cooperated with a part of the first connecting rods, the second spacer is in contact and cooperation with the adjacent second lug; a plurality of the second spacers include a plurality of intermediate support spacers, a contact surface for contacting with the paddle structure is formed at the lower end of the intermediate support spacer, the height of the contact surface is less than the height of the lower side of the bottom end surface of the boat page assembly, and a gap is formed at the position below the second lug between the adjacent intermediate support spacers.

[0006] In some embodiments, the height difference between the contact surface and the bottom end surface of the boat page assembly and / or the height difference between the contact surface and the lower side of the second boat page is 1 mm - 2 mm.

[0007] In some embodiments, at least part of the first spacer block and / or at least part of the second spacer block is provided with air holes, the extension direction of the air holes is parallel to the extension direction of the first boat page and the second boat page, and in the extension direction of the air holes, the air holes penetrate the first spacer block or the second spacer block.

[0008] In some embodiments, a support tube is disposed in the pore, and an outer wall of the support tube is in contact with an inner wall of the pore.

[0009] In some embodiments, a side wall of the support tube is provided with a through hole, the through hole is communicated with the inner hole of the support tube, and the first connecting rod is through the through hole to be connected with the support tube.

[0010] In some embodiments, the cross-sectional shapes of the pores include circular, elliptical, rectangular, diamond, trapezoidal and irregular shapes.

[0011] In some embodiments, a first limiting protrusion is provided on at least one side of the first lug, and the first spacer is provided with a first limiting groove corresponding to the first limiting protrusion, and the first limiting protrusion is located in the first limiting groove; and / or a second limiting protrusion is provided on at least one side of the second lug, and the second spacer is provided with a second limiting groove corresponding to the second limiting protrusion, and the second limiting protrusion is located in the second limiting groove.

[0012] In some embodiments, a plurality of first limiting protrusions are respectively provided on both sides of the first lug, and a plurality of first limiting grooves are correspondingly provided on the first spacer blocks located on both sides of the first lug; and / or a plurality of second limiting protrusions are respectively provided on both sides of the second lug, and a plurality of second limiting grooves are correspondingly provided on the second spacer blocks located on both sides of the second lug.

[0013] In some embodiments, it also includes: a plurality of second connecting rods, which are simultaneously connected and cooperated with a plurality of the first boat pages and a plurality of the second boat pages; a plurality of spacers, which are sleeved on the outside of the second connecting rods and located between adjacent first boat pages and second boat pages, and one end of the spacer is abutted against the adjacent first boat page, and the other end is abutted against the adjacent second boat page.

[0014] In some embodiments, the first connecting rod and the second connecting rod are threaded rods with external threads provided at one end; the boat structure further includes: a nut, threadedly connected to the first connecting rod or the second connecting rod through the external thread, and a plurality of first grooves are provided on one side of the nut close to the first boat page and the second boat page, and the plurality of first grooves are circumferentially arranged around the axis of the nut; an inner gasket, sleeved on the outside of the first connecting rod or the second connecting rod and located on the side of the nut close to the first boat page and the second boat page, and a plurality of second grooves are provided on the side of the inner gasket away from the first boat page and the second boat page, and the plurality of second grooves are circumferentially arranged around the axis of the inner gasket; a spring gasket, located between the nut and the inner gasket, one end of the spring gasket is inclined towards the nut and cooperates with the first groove, and the other end of the spring gasket is towards the inner gasket and cooperates with the second groove.

[0015] In an embodiment provided by the present disclosure, for a boat structure, the height of the contact surface of the intermediate support spacer is less than the height of the lower side of the first boat page and less than the height of the bottom end surface of the boat page assembly. When the boat structure is placed on the paddle, the contact surface contacts and cooperates with the paddle, and the intermediate support spacer is supported by the paddle structure, while the boat page assembly does not contact the paddle structure, which can effectively prevent the boat page assembly from being damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The figure shows a schematic diagram of a paddle structure in the related art.

[0017] Figure 2 The figure shows a schematic diagram of the contact state between a graphite boat and a silicon carbide round bar in the related art.

[0018] Figure 3 The figure shows a front view of a boat structure provided by an embodiment of the present disclosure.

[0019] Figure 4 The figure shows a side view of a boat structure provided by an embodiment of the present disclosure.

[0020] Figure 5 The figure shows a schematic diagram of the contact state between a boat structure provided by an embodiment of the present disclosure and a silicon carbide round bar.

[0021] Figure 6 The figure shows a schematic diagram of air holes in a boat structure provided by an embodiment of the present disclosure.

[0022] Figure 7 The figure shows a schematic diagram of a support tube structure in a boat structure provided by another embodiment of the present disclosure.

[0023] Figure 8 The figure shows a schematic diagram of the connection structure between a first lug and a first spacer in a boat structure provided by another embodiment of the present disclosure.

[0024] Figure 9 The following is a schematic diagram of the connection structure between the second lug and the second spacer block in the boat structure provided by another embodiment of the present disclosure.

[0025] Figure 10 The following is a schematic diagram of the nut, inner gasket and spring gasket in the boat structure provided by another embodiment of the present disclosure from one perspective.

[0026] Figure 11 The following is a schematic diagram of the nut, inner gasket and spring gasket in the boat structure provided by another embodiment of the present disclosure from another perspective.

[0027] Reference numerals:

[0028] 100, paddle structure; 101, silicon carbide round bar; 102, paddle fixing seat; 103, paddle clamp; 200, boat page; 300, boat structure; 310, first boat page; 311, first lug; 312, first limiting protrusion; 320, second boat page; 321, second lug; 322, second limiting protrusion; 330, first connecting rod; 340, first spacer block; 341, air hole; 342, first limiting groove; 350, second spacer block; 351, gap; 352, second limiting groove; 353, support tube; 354, contact surface; 360, second connecting rod; 361, spacer sleeve; 370, nut; 371, first groove; 380, inner gasket; 381, second groove; 390, spring gasket. Detailed implementation manners

[0029] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present disclosure without creative efforts shall fall within the protection scope of the present disclosure.

[0030] Figure 1 The following is a schematic diagram of the paddle structure 100 in the related art, which includes three silicon carbide round bars 101, a paddle fixing seat 102 and a paddle clamp 103. The three silicon carbide round bars 101 are arranged side by side and connected by the paddle fixing seat 102 and the paddle clamp 103 to form a platform for supporting the graphite boat.

[0031] Figure 2 The following is a schematic diagram of the contact state between the graphite boat and the silicon carbide round bar 101 in the related art. As Figure 2 shown, when the conventional graphite boat is placed on the platform, the boat page 200 in the graphite boat contacts the silicon carbide round bar 101 and is prone to damage. The boat structure of the embodiment of the present disclosure aims to solve the above problems.

[0032] Figure 3 The front view of the boat structure 300 according to an embodiment of the present disclosure is shown. Figure 4 The side view of the boat structure 300 according to an embodiment of the present disclosure is shown. Figure 5 The schematic diagram of the contact state between the boat structure 300 and the silicon carbide rod 101 according to an embodiment of the present disclosure is shown. As Figures 3 to 5 shown, the boat structure 300 of the embodiment of the present disclosure includes a boat page assembly, a plurality of first connecting rods 330, a plurality of first spacers 340, and a plurality of second spacers 350.

[0033] The boat page assembly includes a plurality of first boat pages 310 and a plurality of second boat pages 320 that are vertically arranged and parallel to each other. The extending directions of the first boat pages 310 and the second boat pages 320 are horizontal. The arrangement directions of the plurality of first boat pages 310 and the arrangement directions of the plurality of second boat pages 320 are both perpendicular to the extending directions of the first boat pages 310 and the second boat pages 320. The plurality of first boat pages 310 and the plurality of second boat pages 320 are alternately arranged in sequence. An interval is formed between the first boat page 310 and the adjacent second boat page 320.

[0034] The first boat page 310 is provided with a first lug 311. Specifically, both ends of each first boat page 310 in the extending direction are provided with a first lug 311. The extending direction of the first lug 311 is the same as the extending direction of the first boat page 310, and the heights of the first lugs 311 of each first boat page 310 are the same.

[0035] The second boat page 320 is provided with a second lug 321. Specifically, both ends of each second boat page 320 in the extending direction are provided with a second lug 321. The extending direction of the second lug 321 is the same as the extending direction of the second boat page 320, and the heights of the second lugs 321 of each second boat page 320 are the same. The second lug 321 is located below the first lug 311.

[0036] The plurality of first connecting rods 330 are vertically arranged with respect to the first boat pages 310 and the second boat pages 320. And part of the first connecting rods 330 are connected and cooperated with the plurality of first boat pages 310 at the position of the first lugs 311, and another part of the first connecting rods 330 are connected and cooperated with the second boat pages 320 at the position of the second lugs 321. At least one first through hole is respectively provided on the first lug 311 and the second lug 321. The first through holes of the plurality of first lugs 311 are aligned with each other. Part of the first connecting rods 330 simultaneously pass through the first through holes of the plurality of first lugs 311 to realize the mutual connection of the plurality of first boat pages 310. Similarly, the first through holes of the plurality of second lugs 321 are aligned with each other. Part of the first connecting rods 330 simultaneously pass through the first through holes of the plurality of second lugs 321 to realize the mutual connection of the plurality of second boat pages 320.

[0037] A plurality of first spacer blocks 340 and a plurality of first lugs 311 are alternately arranged. There is one first spacer block 340 between every two adjacent first lugs 311, and the first lug 311 is in contact and cooperation with the adjacent first spacer block 340. The first spacer block 340 is in through connection and cooperation with a part of the first connecting rods 330. Specifically, the first connecting rods 330 that are in through connection and cooperation with the first lugs 311 simultaneously pass through the through holes on the plurality of first spacer blocks 340, realizing the through connection and cooperation between the first spacer blocks 340 and a part of the first connecting rods 330, and further realizing the relative fixation between the first spacer blocks 340 and the first lugs 311.

[0038] A plurality of second spacer blocks 350 and a plurality of second lugs 321 are alternately arranged. There is one second spacer block 350 between every two adjacent second lugs 321, and the second lug 321 is in contact and cooperation with the adjacent second spacer block 350. The second spacer block 350 is in through connection and cooperation with a part of the first connecting rods 330. Specifically, the second connecting rods 360 that are in through connection and cooperation with the second lugs 321 simultaneously pass through the through holes on the plurality of second spacer blocks 350, realizing the through connection and cooperation between the second spacer blocks 350 and a part of the second connecting rods 360, and further realizing the relative fixation between the second spacer blocks 350 and the second lugs 321.

[0039] The plurality of second spacer blocks 350 include a plurality of intermediate support spacer blocks. The intermediate support spacer blocks are located in the middle position among the plurality of second spacer blocks 350. The lower end of the intermediate support spacer block forms a contact surface 354. The contact surfaces 354 of the plurality of intermediate support spacer blocks are located in the same plane. The height of the contact surface 354 is less than the height of the lower side of the first blade 310 and less than the height of the bottom end face of the blade assembly. The contact surface 354 is used to contact the paddle structure 100 to form support for the boat structure 300.

[0040] Combined Figure 5 with the fact that the height of the contact surface 354 is less than the bottom end face of the blade assembly, therefore, the height of the contact surface 354 is less than the height of the lower side of the first blade 310 and less than the height of the lower side of the second blade 320. When the contact surface 354 contacts the silicon carbide round bar 101 in the paddle structure 100, intervals are formed between the first blade 310 and the second blade 320 and the silicon carbide round bar 101, which can avoid damage caused by extrusion deformation of the first blade 310 and the second blade 320.

[0041] In addition, a gap 351 is formed at the position below the second lug 321 between adjacent intermediate support spacer blocks. Thus, it can be avoided that the adjacent intermediate support spacer blocks support each other and affect the tightness of the fit between the intermediate support spacer blocks and the second lugs 321. In addition, the gap 351 can also be used as a gas flow channel, reducing the obstruction of the intermediate support spacer blocks and the second lugs 321 to the air flow, which is beneficial to improving the gas field uniformity.

[0042] Optionally, the height difference between the contact surface 354 and the bottom end face of the boat page assembly is 1 mm - 2 mm, such as 1 mm, 1.5 mm, or 2 mm. When the lower side of the first boat page 310 constitutes the bottom end face of the boat page assembly, the height difference between the contact surface 354 and the lower side of the first boat page 310 is 1 mm - 2 mm; when the lower side of the second boat page 320 constitutes the bottom end face of the boat page assembly, the height difference between the contact surface 354 and the lower side of the second boat page 320 is 1 mm - 2 mm. When the lower sides of the first boat page 310 and the second boat page 320 are on the same horizontal plane and jointly constitute the bottom end face of the boat page assembly, the height difference between the contact surface 354 and the lower side of the first boat page 310 and the height difference between the contact surface 354 and the lower side of the second boat page 320 are both 1 mm - 2 mm. Within this range, it can not only play a role in protecting the boat pages, but also ensure the connection strength between the intermediate support spacer and the second lug 321, which is beneficial to ensuring the stability of the structure.

[0043] Combined Figure 3 with Figure 6 , in some embodiments of the present disclosure, at least part of the first spacer 340 and / or at least part of the second spacer 350 are provided with air holes 341. The extending direction of the air holes 341 is parallel to the extending direction of the first boat page 310 and the second boat page 320, and in the extending direction of the air holes 341, the air holes 341 penetrate through the first spacer 340 or the second spacer 350. Preferably, all the first spacers 340 and all the second spacers 350 are provided with air holes 341.

[0044] Through the air holes 341, the communication between the positions outside the first spacer 340 and the second spacer 350 and the positions of the first boat page 310 and the second boat page 320 can be realized, reducing the obstructive effect of the first spacer 340 and the second spacer 350 on the gas, making the distribution of the gas field more uniform, and improving the consistency of the coating.

[0045] Optionally, the cross-sectional shape of the air holes 341 includes circular, oval, rectangular, diamond, and trapezoidal.

[0046] Optionally, the cross-sectional shape of the air holes 341 is rectangular, and the corner positions are arc-shaped corners. Thus, the shape of the air holes 341 can be more adapted to the shapes of the first spacer 340 and the second spacer 350, improving the thickness uniformity of different positions of the first spacer 340 and the second spacer 350 outside the air holes 341, reducing stress concentration, and minimizing the obstructive effect on the process gas to the greatest extent.

[0047] Combined Figure 7, in some embodiments of the present disclosure, a support tube 353 is disposed within the air hole 341, and the outer wall of the support tube 353 is in contact with the inner wall of the air hole 341. The cross-sectional shape of the support tube 353 is adapted to the cross-sectional shape of the air hole 341, so that the outer wall of the support tube 353 is in close contact with the inner wall of the air hole 341. Using the support tube 353 for support can increase the structural strength of the first partition block 340 or the second partition block 350, and prevent the first partition block 340 or the second partition block 350 from being damaged when subjected to a large external force.

[0048] Optionally, a through hole is provided on the side wall of the support tube 353, and the through hole communicates with the inner hole of the support tube 353. The first connecting rod 330 is inserted through the through hole and is in insertion fit with the support tube 353. In the extending direction of the first connecting rod 330, the through hole penetrates through the support tube 353, so that the first connecting rod can pass through the support tube 353. Preferably, the diameter of the through hole is equal to the diameter of the first connecting rod, so that the first connecting rod 330 can be in close fit with the support tube 353.

[0049] By connecting the support tube 353 with the first connecting rod 330, the direct acting force between the first connecting rod 330 and the first partition block 340 or the second partition block 350 can be reduced, and the damage risk can be lowered.

[0050] Combined with Figure 8 , in some embodiments of the present disclosure, at least one side of the first lug 311 is provided with a first limiting protrusion 312, the first partition block 340 is provided with a first limiting groove 342 corresponding to the first limiting protrusion 312, and the first limiting protrusion 312 is located within the first limiting groove 342.

[0051] Combined with Figure 9 , in some embodiments of the present disclosure, at least one side of the second lug 321 is provided with a second limiting protrusion 322, the second partition block 350 is provided with a second limiting groove 352 corresponding to the second limiting protrusion 322, and the second limiting protrusion 322 is located within the second limiting groove 352.

[0052] Optionally, the extending direction of the first limiting protrusion 312 is parallel to the extending direction of the first blade 310 and the second blade 320, and the extending direction of the second limiting protrusion 322 is parallel to the extending direction of the first blade 310 and the second blade 320.

[0053] Optionally, first limiting protrusions 312 are respectively provided on both sides of the first lug 311, and second limiting protrusions 322 are respectively provided on both sides of the second lug 321. Further, a plurality of first limiting protrusions 312 are respectively provided on both sides of the first lug 311, and a plurality of second limiting protrusions 322 are respectively provided on both sides of the second lug 321.

[0054] By means of the cooperation between the first limiting protrusion 312 and the first limiting groove 342 and the cooperation between the second limiting protrusion 322 and the second limiting groove 352, the tightness between the first lug 311 and the first spacer block 340 and between the second lug 321 and the second spacer block 350 can be increased, thereby achieving the transmission of force between the first lug 311 and the first spacer block 340 and between the second lug 321 and the second spacer block 350, reducing the pressure on the connection position between the first lug 311 and the first connecting rod 330 and the connection position between the second lug 321 and the first connecting rod 330, further preventing the first boat leaf 310 and the second boat leaf 320 from being damaged, and facilitating the positioning between the first lug 311 and the first spacer block 340 and between the second lug 321 and the second spacer block 350.

[0055] Combination Figure 3 and Figure 4 In some embodiments of the present disclosure, the boat structure 300 further includes a plurality of second connecting rods 360 and a plurality of spacers 361 .

[0056] The first boat leaf 310 is provided with a plurality of second through holes at a position outside the first lug 311 and the second boat leaf 320 is provided with a plurality of second through holes at a position outside the second lug 321, respectively. The plurality of second connecting rods 360 are disposed at different positions of the boat leaf assembly. Each second connecting rod 360 is disposed in a direction perpendicular to the first boat leaf 310 and the second boat leaf 320 and penetrates through the second through holes of the plurality of first boat leaves 310 and the plurality of second boat leaves 320, thereby being connected and matched with the plurality of first boat leaves 310 and the plurality of second boat leaves 320 at the same time.

[0057] The spacer 361 is sleeved outside the second connecting rod 360 and is located between the adjacent first boat pages 310 and the adjacent second boat pages 320 . One end of the spacer 361 abuts against the adjacent first boat page 310 , and the other end abuts against the adjacent second boat page 320 .

[0058] In this embodiment, each second connecting rod 360 extends from one side of the boat leaf assembly to the other side, and the second connecting rod 360 is located between the adjacent first boat leaf 310 and the second boat leaf 320 and is sleeved with a spacer 361. Under the action of the second connecting rod 360 and the spacer 361, the relative position of the first boat leaf 310 and the second boat leaf 320 can be fixed, and the structural stability of each position of the boat structure 300 can be maintained.

[0059] Combination Figure 10 and Figure 11 In some embodiments of the present disclosure, the first connecting rod 330 and the second connecting rod 360 are threaded rods with external threads at one end, and the ends of the first connecting rod 330 and the second connecting rod 360 that are away from the external threads are heads of the threaded rods.

[0060] The boat structure 300 further includes a nut 370, an inner gasket 380, and a spring washer 390. Among them, the nut 370 is threadedly connected to the end of the first connecting rod 330 or the second connecting rod 360 through the external thread of the first connecting rod 330 or the second connecting rod 360. A plurality of first grooves 371 are provided on one side of the nut 370 close to the first boat page 310 and the second boat page 320, and the plurality of first grooves 371 are circumferentially arranged around the axis of the nut 370. The inner gasket 380 is sleeved on the outer side of the first connecting rod 330 or the second connecting rod 360 and is located on the side of the nut 370 close to the first boat page 310 and the second boat page 320. A plurality of second grooves 381 are provided on the side of the inner gasket 380 away from the first boat page 310 and the second boat page 320, and the plurality of second grooves 381 are circumferentially arranged around the axis of the inner gasket 380. The spring washer 390 is located between the nut 370 and the inner gasket 380. One end of the spring washer 390 is inclined towards the nut 370 and cooperates with the first groove 371, and the other end of the spring washer 390 is towards the inner gasket 380 and cooperates with the second groove 381.

[0061] In this embodiment, the spring washer 390 is a spiral structure. When the nut 370 is tightened, the inner gasket 380 fits against the first boat page 310 or the second boat page 320, the spring washer 390 is compressed, one end of the spring washer 390 is embedded in the first groove 371, and the other end is embedded in the second groove 381. At this time, under the elastic force of the spring washer 390, the friction between the internal thread of the nut 370 and the external thread at the end of the first connecting rod 330 or the second connecting rod 360 can be increased, which plays a role in preventing the nut 370 from loosening. Moreover, the cooperation between the spring washer 390 and the first groove 371 and the second groove 381 can block the reverse rotation of the nut 370 to further play a role in preventing loosening.

[0062] In addition, through the extrusion of the spring washer 390 on the inner gasket 380, it can be ensured that the first boat page 310 and the first spacer 340 and the second boat page 320 and the second spacer 350 are always in a tightly fitting state. On the one hand, it is beneficial to the current conduction between the first boat pages 310 and between the second boat pages 320 during the radio frequency power supply discharge process. On the other hand, it can increase the friction between the first boat page 310 and the first spacer 340 and between the second boat page 320 and the second spacer 350, and avoid damage to the positions where the first boat page 310 and the second boat page 320 are connected to the first connecting rod 330 and the second connecting rod 360 due to force.

[0063] In some embodiments of the present disclosure, the first spacer 340 and the second spacer 350 are graphite spacers, which play a conduction role during the radio frequency power supply discharge process. The first connecting rod 330 and the second connecting rod 360 are ceramic rods, and the spacer sleeve 361 is a ceramic sleeve, to prevent conduction between the first boat page 310 and the second boat page 320.

[0064] In some embodiments of the present disclosure, the plurality of second partition blocks 350 further include limiting partition blocks located on both sides of the plurality of intermediate support partition blocks, and the limiting partition blocks are provided with downward limiting portions. When the boat structure 300 is placed on the paddle structure 100 and the intermediate support partition blocks come into contact with the silicon carbide round bar 101, the limiting partition blocks located on both sides of the plurality of intermediate support partition blocks can cooperate with the silicon carbide round bar 101 for limiting, preventing the boat structure 300 from sliding laterally, which is beneficial to ensuring the use safety.

[0065] For the boat structure 300 of the embodiments of the present disclosure, through structural optimization, the boat pages do not directly contact the silicon carbide round bar 101, which prolongs the service life of the boat pages, and has less blockage to the process gas, which is beneficial to making the gas field distribution in the furnace body more uniform and the coating consistency better. Compared with the graphite boat in the related art, it also has the advantages of more stable structure and the like.

[0066] The expressions such as "one embodiment" and "embodiment" mentioned in the specification indicate that the described embodiments may include specific features, structures or characteristics, but not necessarily each embodiment includes such specific features, structures or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when combining specific features, structures or characteristics with an embodiment, implementing such features, structures or characteristics in combination with other embodiments, whether explicitly or implicitly described, is within the knowledge scope of those skilled in the art.

[0067] It should be understood that the terms "on...", "above...", and "over..." in the present disclosure should be interpreted in the broadest manner, so that "on..." not only means "directly on something", but also includes the meaning of "on something" with intermediate features or layers therebetween, and "above..." or "over..." not only includes the meaning of "above" or "over" something, but also may include the meaning of "above" or "over" something with no intermediate features or layers therebetween (i.e., directly on something).

[0068] In addition, for the convenience of description, spatial relative terms may be used in the text, such as "below", "beneath", "under", "above", "over", etc., to describe the relationship of one component or feature relative to other components or features as shown in the figure. The spatial relative terms are intended to include different orientations of the components in use or operation in addition to the orientation shown in the drawings. The device may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive words used in the text may be interpreted accordingly.

[0069] It should be noted that, in this document, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the existence of additional identical elements in the process, method, article or device comprising the said element.

[0070] The above are only the preferred embodiments of the present disclosure, and are not intended to limit the present disclosure. Any modifications, equivalent replacements, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.

Claims

1. A boat structure, characterized in that: include: A boat leaf assembly, comprising a plurality of first boat leaves and a plurality of second boat leaves, wherein the plurality of first boat leaves and the plurality of second boat leaves are alternately arranged in sequence, a gap is formed between the first boat leaves and the adjacent second boat leaves, the first boat leaves are provided with a first lug, the second boat leaves are provided with a second lug, and the second lug is located below the first lug; A plurality of first connecting rods are arranged perpendicularly to the first boat leaf and the second boat leaf, and some of the first connecting rods are engaged with the plurality of the first boat leaves at the first lug position, and another portion of the first connecting rods are engaged with the second boat leaf at the second lug position; A plurality of first spacers are alternately arranged with the plurality of first lugs and are interlocked with part of the first connecting rods, and the first spacers are in contact with and in cooperation with adjacent first lugs; A plurality of second spacers are alternately arranged with the plurality of second lugs and are interlocked with part of the first connecting rods, and the second spacers are in contact with and engaged with adjacent second lugs; The multiple second spacers include multiple intermediate support spacers, and the lower ends of the intermediate support spacers form a contact surface for contacting the paddle structure. In the vertical direction, the height of the contact surface is smaller than the height of the bottom end surface of the boat and paddle assembly, and a gap is formed between adjacent intermediate support spacers at a position below the second lug.

2. The boat structure according to claim 1, characterized in that: The height difference between the contact surface and the bottom end surface of the boat-leaf assembly is 1mm-2mm.

3. The boat structure according to claim 1 or 2, characterized in that: At least part of the first spacer block and / or at least part of the second spacer block is provided with air holes, the extension direction of the air holes is parallel to the extension direction of the first boat leaf and the second boat leaf, and in the extension direction of the air holes, the air holes penetrate the first spacer block or the second spacer block.

4. The boat structure according to claim 3, characterized in that: A support tube is arranged in the air hole, and the outer wall of the support tube is in contact with the inner wall of the air hole.

5. The boat structure according to claim 4, characterized in that: The side wall of the support tube is provided with a penetration hole, the penetration hole is communicated with the inner hole of the support tube, and the first connecting rod is penetrated and matched with the support tube through the penetration hole.

6. The boat structure according to claim 3, characterized in that: The cross-sectional shapes of the pores include circle, ellipse, rectangle, diamond and trapezoid.

7. The boat structure according to claim 1 or 2, characterized in that: A first limiting protrusion is disposed on at least one side of the first lug, and the first spacer is provided with a first limiting groove corresponding to the first limiting protrusion, and the first limiting protrusion is located in the first limiting groove; And / or, a second limiting protrusion is provided on at least one side of the second lug, and the second spacer is provided with a second limiting groove corresponding to the second limiting protrusion, and the second limiting protrusion is located in the second limiting groove.

8. The boat structure according to claim 7, characterized in that: A plurality of first limiting protrusions are respectively arranged on both sides of the first lug, and a plurality of first limiting grooves are correspondingly arranged on the first spacer blocks located on both sides of the first lug; And / or, a plurality of the second limiting protrusions are respectively provided on both sides of the second lug, and a plurality of the second limiting grooves are correspondingly provided on the second spacer blocks located on both sides of the second lug.

9. The boat structure according to claim 1 or 2, characterized in that: Also includes: A plurality of second connecting rods are connected and matched with a plurality of the first boat pages and a plurality of the second boat pages at the same time; A plurality of spacers are sleeved on the outside of the second connecting rod and located between the adjacent first boat pages and the second boat pages, one end of the spacer abuts against the adjacent first boat page, and the other end abuts against the adjacent second boat page.

10. The boat structure according to claim 9, characterized in that: The first connecting rod and the second connecting rod are threaded rods with external threads at one end; The boat structure further comprises: A nut, threadedly connected to the first connecting rod or the second connecting rod through the external thread, a plurality of first grooves are provided on a side of the nut close to the first boat leaf and the second boat leaf, and the plurality of first grooves are circumferentially arranged around the axis of the nut; An inner gasket is sleeved on the outer side of the first connecting rod or the second connecting rod and is located on a side of the nut close to the first boat leaf and the second boat leaf, and a plurality of second grooves are provided on a side of the inner gasket away from the first boat leaf and the second boat leaf, and the plurality of second grooves are circumferentially arranged around the axis of the inner gasket; A spring washer is located between the nut and the inner washer, one end of the spring washer is inclined toward the nut and cooperates with the first groove, and the other end of the spring washer is toward the inner washer and cooperates with the second groove.

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