Silane liquid filling system

Abstract

The utility model discloses a silane liquid filling system which comprises a silane storage tank, a main conveying pipe, a backflow pipe, a filling pipe and a nitrogen replacement pipeline, a liquid outlet of the silane storage tank is communicated with the liquid inlet end of the main conveying pipe, the liquid outlet end of the main conveying pipe is respectively communicated with the liquid inlet end of the backflow pipe and the liquid inlet end of the filling pipe, and the nitrogen replacement pipeline is communicated with the liquid outlet end of the filling pipe. The liquid outlet end of the backflow pipe is communicated with an inlet of the silane storage tank, a liquid pump, an adjusting valve, a first pressure sensor and the nitrogen replacement pipeline are sequentially arranged on the main conveying pipe in the silane flowing direction, and the gas outlet end of the nitrogen replacement pipeline is communicated with the main conveying pipe. And a gas valve is arranged on the nitrogen replacement pipeline. The device has the advantages that the structure is simple, automatic control is realized, the filling efficiency is improved, the filling pressure is reduced, and the leakage risk is reduced.

Description

Technical Field:

[0001] The utility model relates to the technical field of silane liquid filling, and particularly relates to a silane liquid filling system. Background Art:

[0002] Silane gas, as a gas source providing silicon components, can be used to manufacture materials such as high-purity polysilicon, monocrystalline silicon, and silicon-carbon anodes, and is widely used in industries such as integrated circuits, biomedicine, photovoltaic, display panels, semiconductors, microelectronics, and optoelectronics. Due to its high purity and the ability to achieve fine control, it has become an irreplaceable special gas required by the above industries. With the continuous development of the chemical industry and the rich downstream industries in the gas industry, the demand for silane gas has been increasing year by year.

[0003] Silane gas is a colorless, highly reactive, and compressible gas under normal temperature and pressure. However, the unique self-ignition and explosiveness of silane gas make it a highly dangerous gas, and there are significant safety risks during transportation. The existing filling and transportation technology is to vaporize and pressurize silane gas and fill it into steel cylinders or manifolded trailers for transportation. Therefore, the existing filling and transportation technology has the following problems: 1. When filling silane gas, a compressor is required for pressurization, and the filling pressure is as high as 13 - 15 MPa. The leakage risk increases under high pressure. Once leaked, it may cause fires and explosions, posing a serious threat to the lives and property safety of personnel; 2. The overall filling system to the transportation system involves high-precision equipment such as high-precision compressors, nitrogen displacement systems, precision control systems, and waste gas emission and recovery systems. The equipment structure is complex, and the operation and maintenance costs are high. Summary of the Utility Model:

[0004] The purpose of the utility model is to provide a silane liquid filling system with a simple connection structure, improved filling efficiency, and enhanced safety.

[0005] The utility model is implemented by the following technical solutions: The purpose of this patent is to provide a silane liquid filling system, which includes a silane storage tank, a transportation main pipe, a reflux pipe, a filling pipe, and a nitrogen displacement pipeline; the liquid outlet of the silane storage tank is communicated with the liquid inlet end of the transportation main pipe, the liquid outlet end of the transportation main pipe is respectively communicated with the liquid inlet ends of the reflux pipe and the filling pipe, the liquid outlet end of the reflux pipe is communicated with the inlet of the silane storage tank, a liquid pump, a regulating valve, a first pressure sensor, and the nitrogen displacement pipeline are sequentially arranged on the transportation main pipe along the silane flow direction, the gas outlet end of the nitrogen displacement pipeline is communicated with the transportation main pipe, and a gas valve is arranged on the nitrogen displacement pipeline;

[0006] A first cut-off valve, a nitrogen purity detector, a gas discharge pipe, and a second cut-off valve are sequentially arranged on the reflux pipe along the gas flow direction. The gas inlet end of the gas discharge pipe is communicated with the reflux pipe, and a first discharge valve is arranged on the gas discharge pipe;

[0007] A silane detector and a filling valve are successively arranged on the filling pipe;

[0008] The signal output ends of the first pressure sensor, the nitrogen purity detector and the silane detector are all connected to the signal input end of the controller through signals, and the signal output end of the controller is respectively connected to the signal input ends of the liquid pump, the regulating valve, the gas valve, the first cut-off valve, the second cut-off valve, the first discharge valve and the filling valve through signals.

[0009] Furthermore, it further includes a second pressure sensor and a second discharge valve; a condenser is connected and arranged at the top of the silane storage tank, the second pressure sensor is arranged on the silane storage tank, and the second discharge valve is arranged at the air outlet of the condenser; the signal output end of the second pressure sensor is connected to the signal input end of the controller through signals, and the signal output end of the controller is connected to the signal input end of the second discharge valve through signals.

[0010] Advantages of the present utility model: The connection structure of the present utility model is simple and easy to implement. First, nitrogen is used to displace air and moisture in the pipeline, then silane liquid is introduced to displace nitrogen in the pipeline, and then the tank body of the tanker is filled, realizing automatic control, improving the filling efficiency, and at the same time realizing the filling of silane liquid. The filling pressure is reduced, the leakage risk is reduced, and the safety is improved; and the equipment purchase and maintenance costs are reduced. Description of the drawings:

[0011] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0012] Figure 1 It is a schematic diagram of the overall structure of the present utility model.

[0013] Silane storage tank 1, transportation main pipe 2, reflux pipe 3, filling pipe 4, nitrogen displacement pipeline 5, second pressure sensor 6, second discharge valve 7, liquid pump 8, regulating valve 9, first pressure sensor 10, gas valve 11, first cut-off valve 12, nitrogen purity detector 13, gas discharge pipe 14, second cut-off valve 15, first discharge valve 16, silane detector 17, filling valve 18, condenser 19, controller 20. Specific implementation manners:

[0014] Embodiment: As Figure 1As shown in the figure, a silane liquid filling system includes a silane storage tank 1, a transportation main pipe 2, a reflux pipe 3, a filling pipe 4, a nitrogen displacement pipeline 5, a second pressure sensor 6 and a second discharge valve 7. The liquid outlet of the silane storage tank 1 is communicated with the liquid inlet end of the transportation main pipe 2. The liquid outlet end of the transportation main pipe 2 is respectively communicated with the liquid inlet ends of the reflux pipe 3 and the filling pipe 4. The liquid outlet end of the reflux pipe 3 is communicated with the inlet of the silane storage tank 1. Along the silane flow direction on the transportation main pipe 2, a liquid pump 8, a regulating valve 9, a first pressure sensor 10 and a nitrogen displacement pipeline 5 are sequentially arranged. The gas outlet end of the nitrogen displacement pipeline 5 is communicated with the transportation main pipe 2. A gas valve 11 is arranged on the nitrogen displacement pipeline 5. Along the gas flow direction on the reflux pipe 3, a first cut-off valve 12, a nitrogen purity detector 13, a gas discharge pipe 14 and a second cut-off valve 15 are sequentially arranged. The gas inlet end of the gas discharge pipe 14 is communicated with the reflux pipe 3. A first discharge valve 16 is arranged on the gas discharge pipe 14. A silane detector 17 and a filling valve 18 are sequentially arranged on the filling pipe 4. A condenser 19 is communicated with the top of the silane storage tank 1. A second pressure sensor 6 is arranged on the silane storage tank 1. A second discharge valve 7 is arranged at the gas outlet of the condenser 19.

[0015] The signal output ends of the first pressure sensor 10, the second pressure sensor 6, the nitrogen purity detector 13 and the silane detector 17 are all connected with the signal input end of the controller 20 through signals. The signal output end of the controller 20 is respectively connected with the signal input ends of the liquid pump 8, the regulating valve 9, the gas valve 11, the first cut-off valve 12, the second cut-off valve 15, the first discharge valve 16, the second discharge valve 7 and the filling valve 18 through signals.

[0016] The pipelines of this device are all made of 316L stainless steel pipes, with the level of EP grade, having extremely high corrosion resistance and can be used under harsh conditions to ensure the cleanliness of filling. All valves of this device adopt imported pneumatic diaphragm valves, with the material of 316L and the level of EP grade.

[0017] The cost of the equipment in the filling system of the present utility model is about between 4 million and 7 million. The price of the existing silane gas filling equipment is between 20 million and 45 million. Obviously, the cost of using the silane liquid filling system in the present utility model is cheaper.

[0018] Working principle:

[0019] (1) Connect the pipelines: Seal and connect the liquid outlet end of the filling pipe 4 to the liquid inlet of the transportation tank of the tank truck.

[0020] (2) Replace gas impurities: The controller 20 controls the gas valve 11, the first cut-off valve 12, and the first discharge valve 16 to open, and nitrogen is introduced into the transportation main pipe 2, the filling pipe 4, and the reflux pipe 3 for nitrogen replacement. Impurities such as air and moisture in the pipeline are discharged from the gas discharge pipe 14; the nitrogen purity detector 13 continuously detects the nitrogen purity in the reflux pipe 3 and transmits the signal to the controller 20. When the nitrogen purity reaches more than 99%, the controller 20 controls the gas valve 11 and the first discharge valve 16 to close.

[0021] (3) Replace nitrogen: The controller 20 controls the regulating valve to open to 30% within 95 minutes and fully open at 10 minutes. The valve opening process should be slow to prevent sudden opening, which may cause the silane flow rate to be uncontrollable and impact the pipeline and valves. Over time, the valve sealing performance will decline, and there is a risk of silane leakage; and the second cut-off valve 15 is controlled to open, and the nitrogen in the transportation main pipe 2, the filling pipe 4, and the reflux pipe 3 is replaced with silane; the silane detector 17 continuously detects the silane concentration in the filling pipe 4 and transmits the signal to the controller 20. When the silane concentration reaches more than 99.9999%, the controller 20 controls the first cut-off valve 12 and the second cut-off valve 15 to close; the mixture of silane and nitrogen discharged enters the condenser 19 for condensation, and the condensed silane liquid falls into the silane storage tank 1; the second pressure sensor 6 continuously detects the pressure in the silane storage tank 1 and transmits the signal to the controller 20. When the detected pressure in the silane storage tank 1 reaches more than 80% of its design pressure, the controller 20 controls the second discharge valve 7 to open to urgently discharge the uncondensed nitrogen; when the detected pressure in the silane storage tank 1 is lower than 80% of its design pressure, the controller 20 controls the second discharge valve 7 to close.

[0022] (4) Fill silane liquid: The controller 20 controls the filling valve 18 to open and controls the liquid pump 8 to start to fill the silane liquid into the tank body of the tank truck. After the filling amount of the silane liquid in the tank body of the tank truck reaches the requirement, the filling valve 18 and the regulating valve 9 are controlled to close, and the liquid pump 8 is stopped. At the same time, the first cut-off valve 12 and the second cut-off valve 15 are controlled to close to keep the reflux pipe 3 always connected to the silane storage tank 1 to prevent overpressure caused by the vaporization of the low-temperature silane liquid in the transportation main pipe 2, the filling pipe 4, and the reflux pipe 3; the first pressure sensor 10 continuously detects the pressure in the transportation main pipe 2 and transmits the signal to the controller 20, and the controller 20 controls the opening degree of the regulating valve 9 to keep the pressure in the transportation main pipe 2 at 1.0 - 1.2 Mpa.

[0023] The maximum filling capacity of silane gas during transportation is 4.2 tons of silane per vehicle. For the transportation of liquid silane, the filling capacity can be 21 - 23 tons per vehicle. The transportation volume of liquid silane is more than 5 times that of gaseous silane. Calculated based on a transportation cost of 5 - 10 yuan per kilometer and a transportation distance of 1000 kilometers, for transporting the same mass of silane, the transportation cost of gaseous silane is 25,000 - 50,000 yuan, while that of liquid silane is 5,000 - 10,000 yuan; this greatly reduces the transportation cost of silane.

[0024] The connection structure of the present utility model is simple and easy to implement, enabling automatic control, improving the filling efficiency. At the same time, the filling of liquid silane is achieved, the filling pressure is reduced, the risk of leakage is decreased, and the safety is improved; moreover, the equipment purchase and maintenance costs are reduced.

[0025] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A silane liquid filling system, characterized in that: It includes a silane storage tank, a transport main pipe, a reflux pipe, a filling pipe and a nitrogen replacement pipeline; the liquid outlet of the silane storage tank is connected to the liquid inlet end of the transport main pipe, the liquid outlet end of the transport main pipe is respectively connected to the reflux pipe and the liquid inlet end of the filling pipe, the liquid outlet end of the reflux pipe is connected to the inlet of the silane storage tank, a liquid pump, a regulating valve, a first pressure sensor and the nitrogen replacement pipeline are sequentially arranged on the transport main pipe along the flow direction of silane, the gas outlet end of the nitrogen replacement pipeline is connected to the transport main pipe, and a gas valve is arranged on the nitrogen replacement pipeline; A first shut-off valve, a nitrogen purity detector, a gas discharge pipe and a second shut-off valve are sequentially arranged on the reflux pipe according to the gas flow direction, an air inlet end of the gas discharge pipe is connected to the reflux pipe, and a first discharge valve is arranged on the gas discharge pipe; A silane detector and a filling valve are sequentially arranged on the filling tube; The signal output ends of the first pressure sensor, the nitrogen purity detector and the silane detector are all connected to the signal input end of the controller through signals, and the signal output end of the controller is respectively connected to the signal input ends of the liquid pump, the regulating valve, the gas valve, the first shut-off valve, the second shut-off valve, the first discharge valve and the filling valve through signals.

2. A silane liquid filling system according to claim 1, characterized in that: It also includes a second pressure sensor and a second discharge valve; a condenser is connected to the top of the silane storage tank, the second pressure sensor is arranged on the silane storage tank, and a second discharge valve is arranged at the air outlet of the condenser; the signal output end of the second pressure sensor is connected to the signal input end of the controller through a signal, and the signal output end of the controller is connected to the signal input end of the second discharge valve through a signal.

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