Glass substrate baking oven door leaf sealing structure

Abstract

The utility model discloses a door leaf sealing structure of a glass substrate baking oven, which comprises a baking oven body, a plurality of oven body windows are arranged on the baking oven body, each oven body window corresponds to a door leaf, a sealing heat insulation base plate is arranged on the periphery of each oven body window, and the sealing heat insulation base plates are fixedly arranged on the baking oven body. A door leaf seal is installed on the sealing heat insulation base plate, and the door leaf seal is a sealing strip with a cavity. And a sealing cavity transverse rib is arranged in the sealing cavity. Sealing ribs are arranged on the sealing face of the door leaf seal, and an installation clamping groove is formed in the installation end of the door leaf seal. And the door leaf seal is mounted on the sealing heat insulation base plate through the zigzag mounting plate and the insertion mounting plate. The body of the zigzag mounting plate is provided with a limiting folding edge, and the insertion mounting plate is provided with an inclined insertion edge. The sealing structure has the characteristics of excellent sealing performance and long service life, and is suitable for the baking oven furnace of the glass substrate of the flat panel display.

Description

Technical Field

[0001] The utility model relates to a baking oven device for coating a photoresist on the surface of a heat-cured glass substrate, in particular to a sealing structure for a material inlet and outlet door and window of a substrate baking oven. Background Art

[0002] The glass substrate of liquid crystal display is an important component of flat panel display devices. The key factor affecting the baking quality of glass substrate is the stability of baking temperature. The low heating temperature or heating temperature fluctuation in the baking chamber of the baking furnace causes uneven baking, which makes the solvent in the photoresist film on the glass substrate unable to fully volatilize. The solvent is not fully volatilized in the under-baked area. The unexposed part is also dissolved during exposure and development to form floating glue or deform the pattern. Over-baking causes the film to warp and harden. The pattern will not be displayed during development or the bottom film will remain on the pattern. The uneven baking temperature will also cause thermal stress on the glass substrate due to the temperature gradient, resulting in cracking or breaking of the substrate glass, reducing the baking yield.

[0003] The furnace body of the glass substrate baking box furnace is provided with a plurality of furnace windows for inputting or removing substrate glass, and an openable door leaf unit is provided on the furnace window. At present, the sealing between the door leaf unit and the furnace window for inputting and discharging materials is achieved by a rubber sealing strip installed on the furnace body. The sealing strip of this solid structure is not elastic enough and cannot ensure that the sealing and fitting parts of the door leaf are in close contact, which directly affects the sealing performance of the door leaf. At the same time, the existing sealing strip is directly installed around the high-temperature furnace window. The hardness of the rubber seal working in a high-temperature environment for a long time will become hard, resulting in deformation of the seal and weakening of the compression resistance, and reducing the tightness of the seal; at the same time, the elasticity of the seal in a high-temperature environment is weakened, which is easy to cause heat leakage in the baking cavity and cause instability of the baking temperature. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the utility model is to provide a glass substrate baking furnace door leaf sealing structure with excellent sealing performance and long service life.

[0005] In order to solve the above technical problems, the glass substrate baking furnace door leaf sealing structure of the utility model includes a baking furnace body, a plurality of furnace body windows are arranged on the baking furnace body, each furnace body window corresponds to a door leaf, and a sealing heat insulation pad is arranged around the furnace body window, the sealing heat insulation pad is fixedly installed on the baking furnace body, and a door leaf seal is installed on the sealing heat insulation pad, and the door leaf seal is a sealing strip with a cavity.

[0006] Preferably, the door leaf seal body has a sealing cavity, in which a sealing cavity transverse rib is arranged.

[0007] Preferably, a sealing ridge is provided on the sealing surface of the door leaf seal, and a mounting groove is provided at the mounting end of the door leaf seal.

[0008] Preferably, the door leaf seal is mounted on the sealing and heat-insulating pad via a folded mounting plate and an inserted mounting plate.

[0009] Preferably, a limited folding edge is provided on the body of the folding mounting plate, and an inclined insertion edge is provided on the insertion mounting plate.

[0010] Preferably, the door leaf seal is made of silicone rubber or fluororubber, and the sealing insulation pad is a muscovite board.

[0011] In the above structure, since the door leaf seal is a sealing strip with a cavity, the elasticity and sealing deformation of the sealing strip can be effectively increased, which not only increases the area of ​​the sealing fitting surface and stabilizes the sealing effect, but also can effectively compensate and avoid the adverse effects of the door leaf deformation on the sealing effect, and is particularly suitable for the reliable sealing of slender strip door leaves. At the same time, the cavity is set in the sealing strip, which improves the heat-resisting effect of the sealing strip. Therefore, the sealing strip with a sealing cavity can greatly improve the sealing quality and reliability, thereby stabilizing the baking quality of the baking oven. In addition, since the door leaf seal is installed on the baking oven body through a sealing heat-insulating pad, the high temperature of the baking oven body will harden the hardness of the seal, resulting in sealing deformation and extrusion failure. The high temperature will also cause the elasticity of the sealing ring to weaken and be difficult to restore to its original state. The weakening of the elasticity will also reduce the tightness of the sealing strip, increasing the risk of leakage. After the utility model is provided with a sealing heat-insulating pad between the door leaf seal and the baking oven body, the influence of the high temperature of the baking oven on the door leaf seal is blocked, which not only ensures the sealing elasticity and pressure resistance, but also effectively slows down the aging speed of the seal, which not only stabilizes the sealing performance, but also prolongs the service life of the seal. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The sealing structure of the door leaf of the glass substrate baking furnace of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0013] Figure 1 It is a three-dimensional structural diagram of the furnace body of the glass substrate baking furnace;

[0014] Figure 2 yes Figure 1 A partial enlarged view of the door leaf side of the middle baking oven;

[0015] Figure 3 yes Figure 2 Three-dimensional structural diagram of the middle door leaf seal;

[0016] Figure 4 yes Figure 2 A three-dimensional structural diagram of the middle sealing and heat-insulating pad;

[0017] Figure 5yes Figure 2 Partial diagram of the installation structure of the middle door leaf seal;

[0018] Figure 6 yes Figure 5 Partial cross-sectional structural diagram of the middle door leaf seal;

[0019] Figure 7 yes Figure 5 A three-dimensional structural diagram of the center-folded mounting plate;

[0020] Figure 8 yes Figure 5 Insert the three-dimensional structure diagram of the mounting plate.

[0021] In the figure, 1 is a baking furnace body, 2 is a door opening and closing mechanism, 3 is a door, 4 is a blower, 5 is a heater, 6 is a door seal, 7 is a sealing insulation pad, 8 is a furnace body window partition, 9 is a furnace body window, 10 is a folded mounting plate, 11 is an insert mounting plate, 12 is a sealing cavity transverse rib, 13 is a sealing convex ridge, and 14 is an installation slot. DETAILED DESCRIPTION

[0022] like Figure 1 As shown, several groups of heaters 5 and blowers 4 are installed on the right side of the baking furnace body 1 of the glass substrate baking furnace. The heater 5 is an electric heater. The side of the baking furnace body 1 is also provided with a preheating air supply port and an inspection window. Several furnace windows 9 for inputting or taking out glass substrates are arranged in parallel on the front side (inlet and outlet side) of the baking furnace body 1. Each furnace window 9 is arranged horizontally and parallel to each other. A door leaf 3 that can be opened or closed is arranged on the furnace window 9. The length of the door leaf 3 on the furnace window 9 is 4000mm, and the height of the door leaf is 120mm, forming a slender strip door leaf. A door leaf opening and closing drive mechanism 2 is arranged at both ends of each door leaf 3.

[0023] like Figure 2 As shown, a plurality of furnace window partitions 8 are installed in parallel at the front chamber position of the baking chamber of the baking furnace body 1. The adjacent furnace window partitions 8 and the window edge of the baking furnace body 1 form a furnace window 9 of the baking furnace. Each furnace window 9 corresponds to a grid layer of a glass rack in the baking chamber. The glass substrate is fed into or taken out of the corresponding glass rack grid layer through the furnace window 9 for feeding and discharging. A sealing heat insulation pad 7 is fixedly installed on the outer periphery of each furnace window 9, and a door leaf seal 6 is fixedly installed on the sealing heat insulation pad 7.

[0024] like Figure 3 , Figure 4As shown, the sealing heat-insulating pad 7 is in the form of an elongated rectangular frame, and the shape of the elongated rectangular frame matches the shape of the door leaf 3. The sealing heat-insulating pad 7 is made of muscovite board, and can also be made of commonly used heat-resistant materials such as foam plastic board or glass fiber board. A door leaf seal 6, which is also in the form of an elongated rectangular frame, is fixedly mounted on the outer surface of the sealing heat-insulating pad 7. The door leaf seal 6 is made of silicone rubber or fluororubber, and can also be made of other heat-resistant silicone.

[0025] like Figure 5 , Figure 6 , Figure 7 and Figure 8 As shown, the sealing side of the door leaf seal 6 is a semi-cylindrical surface, and a plurality of strip-shaped sealing ridges 13 are arranged along the length direction on the semi-cylindrical sealing surface. The cylindrical surface structure can increase the sealing deformation and extrusion amount, and the sealing ridges 13 can increase the sealing contact pressure and tightness, thereby achieving the effect of enhancing and stabilizing the sealing effect. A mounting groove 14 with an opening toward the furnace window is arranged on the installation side of the door leaf seal 6. A sealing cavity is arranged on the body of the door leaf seal 6, and the setting of the sealing cavity can not only enhance the elasticity of the sealing strip, but also has a certain heat insulation effect. A sealing cavity cross rib 12 is also arranged in the sealing cavity of the door leaf seal 6, and the sealing cavity cross rib 12 can improve the stability of the sealing deformation.

[0026] The body of the folding mounting plate 10 is provided with a limited folding edge; the inserting mounting plate 11 is provided with an inclined inserting edge. When the door leaf seal 6 is installed, the limited folding edge on the folding mounting plate 10 can calibrate and control the installation position of the door leaf seal 6, and the inserting edge of the inserting mounting plate 11 is just inserted into the installation card slot 14 of the door leaf seal 6. The folding mounting plate 10 and the inserting mounting plate 11 are fixedly installed on the sealing and heat-insulating pad 7 by connecting screws; this installation structure can accurately install the position of the door leaf seal 6, and is convenient for the installation and removal of the door leaf seal 6. The folding mounting plate 10 and the inserting mounting plate 11 are made of heat-resistant stainless steel.

[0027] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. According to the content of this specification, many modifications and changes can be made. This specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the utility model, so that technicians in the relevant technical field can understand and use the utility model well. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the utility model.

Claims

1. A glass substrate baking furnace door leaf sealing structure, comprising a baking furnace body (1), a plurality of furnace body windows (9) are arranged on the baking furnace body (1), and a door leaf (3) is movably arranged on each furnace body window (9), characterized in that: A sealing heat-insulating pad (7) is arranged around the furnace body window (9), and the sealing heat-insulating pad (7) is fixedly installed on the baking furnace body (1). A door leaf seal (6) is installed on the sealing heat-insulating pad (7), and the door leaf seal (6) is a sealing strip with a cavity.

2. The glass substrate baking furnace door leaf sealing structure according to claim 1, characterized in that: The body of the door leaf seal (6) is provided with a sealing cavity, in which a sealing cavity transverse rib (12) is arranged.

3. The glass substrate baking furnace door leaf sealing structure according to claim 1, characterized in that: A sealing ridge (13) is provided on the sealing surface of the door leaf seal (6), and a mounting groove (14) is provided at the mounting end of the door leaf seal (6).

4. The glass substrate baking furnace door leaf sealing structure according to claim 3, characterized in that: The door leaf seal (6) is installed on the sealing and heat-insulating pad (7) via a folding mounting plate (10) and an insert mounting plate (11).

5. The glass substrate baking furnace door leaf sealing structure according to claim 4, characterized in that: The main body of the folding installation plate (10) is provided with a limited folding edge, and the insertion installation plate (11) is provided with an inclined insertion edge, which is inserted into the installation card groove (14) of the door leaf seal (6).

6. The glass substrate baking furnace door leaf sealing structure according to claim 1, characterized in that: The door leaf seal (6) is made of silicone rubber or fluororubber, and the sealing heat insulation pad (7) is a muscovite board.

Images