Brittle material ceramic substrate laser drilling clamp

By designing a laser drilling fixture for ceramic substrates, the combination of vacuum adsorption plate and hydraulic rods is used to solve the dust problem and substrate damage problem during laser drilling of ceramic substrates, and the processing accuracy and efficiency are improved.

CN222944735UActive Publication Date: 2025-06-06JIANGSU ADVANCED LIGHT SOURCE TECH RES INST CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202421075064.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-16
Publication Date
2025-06-06
Estimated Expiration
2034-05-16

AI Technical Summary

Technical Problem

During the laser drilling process of ceramic substrates, due to the brittleness of the ceramic substrate, a large amount of dust is easily generated, resulting in processing errors and damage to the laser equipment. At the same time, the tape is unstable, which can easily lead to substrate damage.

Method used

A brittle material ceramic substrate laser drilling fixture was designed, using a vacuum adsorption plate with small holes on the surface and a hollow chamber and a bent tube in the middle. Combining the hydraulic rod and the hinge, a rotatable and liftable structure was formed. The combination of the vacuum adsorption plate and the hydraulic rod was used to achieve stable fixation of the ceramic substrate and effective dust removal.

Benefits of technology

Effectively prevent the impact of dust on laser processing, avoid dust damaging laser equipment, reduce damage to ceramic substrates, and improve processing accuracy and efficiency.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN222944735U_ABST
    Figure CN222944735U_ABST
Patent Text Reader

Abstract

The utility model relates to the technical field of laser drilling clamps, and discloses a brittle material ceramic substrate laser drilling clamp which comprises a vacuum adsorption plate, small holes are fully distributed in the surface of the vacuum adsorption plate, a cavity is formed in the middle of the vacuum adsorption plate, the small holes are communicated with the cavity, and the vacuum adsorption plate is provided with a cavity. The bottom of the cavity chamber is communicated with two bent pipes, the bottom ends of the bent pipes are communicated with the other end of the cavity chamber, the two sides of the vacuum adsorption plate are each provided with a first protruding cylinder, the outer side of each first cylinder is provided with a first bolt for preventing falling, the bottom plate is in a hook shape, and the bottom plate is provided with a second bolt for preventing falling. Two rectangular protrusions are arranged on the two sides of the lower portion of the bottom plate, and each rectangular protrusion is provided with a second protruding cylinder. According to the utility model, the influence of dust on laser processing can be effectively prevented, the damage of a ceramic-based material caused by fixing by using an adhesive tape can be avoided, and the processing precision and the processing efficiency are improved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of laser drilling fixtures, in particular to a laser drilling fixture for a brittle material ceramic substrate. Background Art

[0002] At present, ceramic substrates are mainly processed by laser, mainly laser drilling, laser cutting, laser scribing, etc. In the current laser processing of ceramic substrates, most of them are fixed with tape, which may cause the substrate material to break when the ceramic substrate is removed, especially for very thin ceramic-based materials, whose physical properties are particularly brittle, and the ceramic substrate fixed with tape is not stable. Under its laser processing, it is easy to vibrate, resulting in processing errors and reduced precision.

[0003] During the laser drilling process of ceramic substrates, due to the properties of ceramic-based materials, there will often be a lot of dust. Powder accumulation will lead to processing errors, and the powder can easily damage the laser galvanometer. Utility Model Content

[0004] In order to make up for the above shortcomings, the utility model provides a laser drilling fixture for brittle material ceramic substrates, aiming to improve the problem in the prior art that during the laser drilling process of ceramic substrates, due to the properties of the ceramic-based materials, a large amount of dust often appears, the powder accumulation will cause processing errors, and the powder is also easy to damage the laser galvanometer.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a laser drilling fixture for a brittle material ceramic substrate, comprising a vacuum adsorption plate, the surface of the vacuum adsorption plate is covered with small holes, there is a cavity in the middle of the vacuum adsorption plate, the small holes are connected to the cavity, the bottom of the cavity is connected to two curved elbows, the bottom end of the elbow is connected to the other end of the cavity, there is a protruding cylinder on each side of the vacuum adsorption plate, the outer side of the cylinder is a bolt to prevent falling off, the right side of the vacuum adsorption plate is rotatably connected to a hinge, the left side of the hinge is fixedly connected to a base plate, the left side of the bottom of the base plate is rotatably connected to a hydraulic rod, and the output end of the hydraulic rod is rotatably connected to the left side of the bottom of the vacuum adsorption plate.

[0006] As a further description of the above technical solution:

[0007] The bottom plate is hook-shaped, and has two rectangular protrusions on both sides below the bottom plate. There is a protruding cylinder 2 on each of the rectangular protrusions, and the outer side of the cylinder 2 is a bolt 2.

[0008] As a further description of the above technical solution:

[0009] The hydraulic rod can be reciprocated and extended, and the two sides of the hydraulic rod are circular rings, and the circular rings are rotatably connected to the two sides of the vacuum adsorption plate, and the two sides of the cylinder and the bottom plate can rotate relative to each other.

[0010] As a further description of the above technical solution:

[0011] The hinge is connected to the vacuum adsorption plate and the bottom plate respectively through bolts, and the hinge can rotate freely through the vacuum adsorption plate.

[0012] As a further description of the above technical solution:

[0013] A vacuum generator is arranged above the vacuum adsorption plate.

[0014] The utility model has the following beneficial effects:

[0015] 1. The utility model is suitable for ceramic substrates of different sizes and laser drilling at different angles. It can effectively prevent the influence of dust on laser processing, avoid the damage of dust to the laser galvanometer, and avoid the damage of ceramic base materials caused by fixing with tape, thereby improving the processing accuracy and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of a laser drilling fixture for a brittle material ceramic substrate proposed by the utility model;

[0017] Figure 2 This is a cross-sectional schematic diagram of a laser drilling fixture for a brittle material ceramic substrate proposed by the utility model;

[0018] Figure 3 It is a schematic diagram of hydraulic rod;

[0019] Figure 4 It is a schematic diagram of bolt and cylinder;

[0020] Figure 5 Schematic diagram of bolt and cylinder.

[0021] Legend:

[0022] 1. Vacuum adsorption plate; 2. Bottom plate; 3. Hydraulic rod; 4. Hinge; 11. Small hole; 12. Cavity; 13. Bend pipe; 14. Cylinder 1; 15. Bolt 1; 21. Cylinder 2; 22. Bolt 2; 31. Ring. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Please see attached Figure 1 - Attachment Figure 3 , The utility model provides an embodiment: a laser drilling fixture for a brittle material ceramic substrate, comprising a vacuum adsorption plate 1, the surface of the vacuum adsorption plate 1 is covered with small holes 11, there is a cavity 12 in the middle of the vacuum adsorption plate 1, the small hole 11 is connected to the cavity 12, the bottom of the cavity 12 is connected to two curved elbows 13, the bottom end of the elbow 13 is connected to the other end of the cavity 12, there is a protruding cylinder 14 on each side of the vacuum adsorption plate 1, the outer side of the cylinder 14 is a bolt 15 to prevent falling off, the bottom plate 2 is hook-shaped, there are two rectangular protrusions on both sides of the bottom of the bottom plate 2, there is a protruding cylinder 21 on each of the rectangular protrusions, the outer side of the cylinder 21 is a bolt 22, the right side of the vacuum adsorption plate 1 is rotatably connected with a hinge 4, the left side of the hinge 4 is fixedly connected with the bottom plate 2, the left side of the bottom of the bottom plate 2 is rotatably connected with a hydraulic rod 3, and the output end of the hydraulic rod 3 is rotatably connected with the left side of the bottom of the vacuum adsorption plate 1;

[0025] Specifically, the vacuum adsorption plate 1 is a tool with an exquisite design, and its surface is covered with numerous small holes 11, which are evenly distributed and used to enhance the adsorption force. In the central part of the vacuum adsorption plate 1, there is a cavity 12, which is the key structure of the vacuum adsorption plate 1, and it plays the role of storing and transmitting negative pressure. These small holes 11 do not exist in isolation, but are interconnected with the middle cavity 12 to form a complex internal channel network. This design enables when negative pressure is generated inside the cavity 12, the adsorption force can be evenly transmitted to the entire surface of the vacuum adsorption plate 1 through these small holes 11, so as to firmly adsorb various materials. At the bottom of the cavity 12, two curved elbows 13 are set. The design of these elbows 13 is to improve the flow efficiency of the fluid and reduce pressure loss. The bottom end of the elbow 13 is interconnected with the other end of the cavity 12, ensuring the balance of air pressure inside the cavity 12 and enhancing the stability and adsorption effect of the vacuum adsorption plate 1.

[0026] Please see attached Figure 4 - Attachment Figure 5The hydraulic rod 3 can be reciprocated and extended, and the two sides of the hydraulic rod 3 are rings 31, and the rings 31 are rotatably connected to the two sides of the vacuum adsorption plate 1, and the two sides of the cylinder 14 and the bottom plate 2 can rotate with each other. The hinge 4 is connected to the vacuum adsorption plate 1 and the bottom plate 2 through the bolt 15, and the hinge 4 can rotate freely through the vacuum adsorption plate 1. A vacuum generator is arranged above the vacuum adsorption plate 1;

[0027] Specifically, the hydraulic rod 3 is designed to be able to perform reciprocating telescopic motion to achieve specific functions or adjustments. The hydraulic rod 3 is configured with rings 31 at both ends. These rings 31 play a key role because they form rotating connection points with the two sides of the vacuum adsorption plate 1. This design allows the hydraulic rod 3 to maintain stability during operation while allowing the necessary freedom of movement. The design of the rings 31 also takes into account the coordinated work with the vacuum adsorption plate 1 to ensure that the two can flexibly rotate relative to each other. The two sides of the cylinder 14 and the bottom plate 2 are also designed to rotate relative to each other. This design increases the flexibility of the entire structure, so that in different situations, the cylinder 14 and the bottom plate 2 can be adjusted as needed to adapt to different operating requirements or external conditions.

[0028] Working principle: The surface of the vacuum adsorption plate 1 is covered with small holes 11. There is a cavity 12 in the middle of the vacuum adsorption plate 1. The small holes 11 are connected to the cavity 12. There are two curved elbows 13 at the bottom of the cavity 12. The elbows 13 are connected to the cavity 12. In this way, vacuum adsorption can be ensured. The small holes 11 can absorb dust. The bottom plate 2 is hook-shaped. The bottom plate 2 and the vacuum adsorption plate 1 are connected to each other through hinges 4. The vacuum adsorption plate 1 can rotate freely. The vacuum adsorption plate 1 can be parallel to the bottom plate 2 at the lowest. Figure 4 and Figure 5 As shown, the hydraulic rod 3 can be reciprocated and extended, and there are circular rings 31 on both sides of the hydraulic rod 3. There are protruding cylinders 14 and 21 on both sides of the vacuum adsorption plate 1 and the bottom plate 2, respectively. The circular rings 31 on both sides of the hydraulic rod 3 can be connected to the cylinders 14 and 21, and the bolts 15 and 22 are respectively connected and locked with the cylinders 14 and 21 to prevent the hydraulic rod 3 from falling off. In this way, it can be ensured that the vacuum adsorption plate 1 can be driven to rise when the hydraulic rod 3 reciprocates. The vacuum generator is connected to the bend pipe 13 under the vacuum adsorption plate 1, and the vacuum adsorption plate 1 starts vacuum. The ceramic substrate is adsorbed on the vacuum adsorption plate 1, and the hydraulic rod 3 reciprocates to drive the vacuum adsorption plate 1 to rise. When the vacuum adsorption plate 1 rises to the specified angle, the laser processing begins, and the dust is sucked away through the small holes 11 to improve the processing accuracy. At the end of the processing, the hydraulic rod 3 returns to the initial position, the vacuum adsorption plate 1 returns to the initial parallel position, and the vacuum is released.

[0029] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A laser drilling fixture for a brittle material ceramic substrate, comprising a vacuum adsorption plate (1), characterized in that: The surface of the vacuum adsorption plate (1) is covered with small holes (11). There is a cavity (12) in the middle of the vacuum adsorption plate (1). The small holes (11) and the cavity (12) are connected to each other. Two curved elbows (13) are connected to the bottom of the cavity (12). The bottom end of the elbow (13) is connected to the other end of the cavity (12). There is a protruding cylinder (14) on each side of the vacuum adsorption plate (1). The outer side of the cylinder (14) is a bolt (15) to prevent it from falling off. The right side of the vacuum adsorption plate (1) is rotatably connected to a hinge (4). The left side of the hinge (4) is fixedly connected to a bottom plate (2). The left side of the bottom of the bottom plate (2) is rotatably connected to a hydraulic rod (3). The output end of the hydraulic rod (3) is rotatably connected to the left side of the bottom of the vacuum adsorption plate (1).

2. The laser drilling fixture for a brittle material ceramic substrate according to claim 1 is characterized in that: The bottom plate (2) is hook-shaped, and has two rectangular protrusions on both sides below the bottom plate (2). Each of the rectangular protrusions has a protruding cylinder (21), and the outer side of the cylinder (21) is a bolt (22).

3. The laser drilling fixture for a brittle material ceramic substrate according to claim 1, characterized in that: The hydraulic rod (3) can be reciprocated and extended, and the two sides of the hydraulic rod (3) are circular rings (31). The circular rings (31) are rotatably connected to the two sides of the vacuum adsorption plate (1), and the two sides of the cylinder (14) and the bottom plate (2) can rotate relative to each other.

4. The laser drilling fixture for a brittle material ceramic substrate according to claim 1, characterized in that: The hinge (4) is connected to the vacuum adsorption plate (1) and the bottom plate (2) respectively through bolts (15), and the hinge (4) can rotate freely through the vacuum adsorption plate (1).

5. The laser drilling fixture for a brittle material ceramic substrate according to claim 1, characterized in that: A vacuum generator is arranged above the vacuum adsorption plate (1).