Efficient vacuum degree measuring instrument

Abstract

The high-efficiency vacuum degree measuring instrument comprises a main body and a measuring mechanism, the main body comprises a placing rack, the center of the upper end face of the placing rack is connected with a base, the center of the upper end face of the base is connected with a communicating pipe, the communicating pipe is T-shaped, the upper end of the communicating pipe is connected with a vacuum chamber, and the upper end of the vacuum chamber is connected with an exhaust pipe; the measuring mechanism comprises a plurality of three-way pipes, one ends of the three-way pipes are all connected with the outer side of the vacuum chamber, and the ends, away from the vacuum chamber, of the three-way pipes are all provided with control valves. The upper ends of the three-way pipes are connected with connecting pipes, the upper ends of three of the connecting pipes are provided with thin-film capacitor vacuum gauges, and the upper ends of the thin-film capacitor vacuum gauges are connected with joints; the high-efficiency vacuum degree measuring instrument can achieve the purpose of improving the measurement vacuum degree of a plurality of objects to be detected, so that the measurement efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum degree measuring equipment, in particular to a high-efficiency vacuum degree measuring instrument. Background Art

[0002] The vacuum tester is mainly used to quantitatively measure the vacuum degree in the arc extinguishing chamber of various types of vacuum switches. It uses a single-chip computer as the main control unit and the test process is fully automated. In principle, it changes the method of using current peak value for calibration of similar products at home and abroad, and uses ion charge for calibration, which effectively suppresses the interference of pulse power supply during the test and makes the test more stable and reliable.

[0003] Based on the above, the inventors found that the following problems exist: most of the existing vacuum degree measuring instruments can only detect one object to be measured, and it is not convenient to perform vacuum degree detection on multiple objects to be measured at the same time as needed, resulting in low measurement efficiency. Therefore, in view of this, the inventors studied and improved the existing structure and defects, and provided a high-efficiency vacuum degree measuring instrument, in order to achieve the purpose of having more practical value. Utility Model Content

[0004] In order to solve the above technical problems, the embodiment of the utility model provides an efficient vacuum measuring instrument, which is specifically implemented by the following technical solutions:

[0005] A high-efficiency vacuum degree measuring instrument comprises a main body and a measuring mechanism, wherein the main body comprises a placement rack, a base is connected to the center of the upper end surface of the placement rack, a connecting pipe is connected to the center of the upper end surface of the base, the connecting pipe is in a "T" shape, the upper end of the connecting pipe is connected to a vacuum chamber, the upper end of the vacuum chamber is connected to an exhaust pipe, the inner bottom end of the placement rack is connected to a vacuum pump, the input end of the vacuum pump is connected to the end of the exhaust pipe away from the vacuum chamber, the measuring mechanism comprises a plurality of three-way pipes, one end of the plurality of three-way pipes are connected to the outside of the vacuum chamber, and the plurality of three-way pipes are provided with a control valve at the end away from the vacuum chamber, the upper ends of the plurality of three-way pipes are connected to connecting pipes, wherein the upper ends of three of the connecting pipes are provided with thin film capacitor vacuum gauges, and the upper ends of the thin film capacitor vacuum gauges are connected to joints.

[0006] By adopting the above technical scheme, a thin film capacitor vacuum gauge is arranged at the upper end of the connecting tube. Since there are several connecting tubes, it is convenient to clamp the same number of thin film capacitor vacuum gauges as the number of devices to be measured on the connecting tube according to the number of devices to be measured, and then connect the thin film capacitor vacuum gauge with the measuring probe through the joint at the upper end of the thin film capacitor vacuum gauge, so as to detect the vacuum degree of the object to be measured through the measuring probe, and by arranging several three-way pipes, the several three-way pipes are all connected to the vacuum chamber and communicated with the vacuum chamber, and a control valve is arranged at one end of the three-way pipe. Since there are several three-way pipes, there are several control valves, which is convenient to open the control valve at the three-way pipe clamped with the thin film capacitor vacuum gauge as needed, and since the vacuum chamber and the vacuum pump are connected by the exhaust pipe, when the vacuum pump is working, it is convenient to evacuate the vacuum chamber, and the vacuum degree of the object to be measured is measured under the action of the three-way pipe, the connecting pipe and the thin film capacitor vacuum gauge.

[0007] Furthermore, an exhaust cavity is provided at the inner bottom of the thin film capacitance vacuum gauge, and a gauge is connected to the inner center of the thin film capacitance vacuum gauge, a metal elastic film is connected to the inner part of the gauge, and a fixed electrode is embedded in the center of the upper end surface of the gauge.

[0008] By adopting the above technical scheme, under the action of the gauge and the metal elastic film, the interior of the thin film capacitance vacuum gauge is isolated into an exhaust chamber and a measuring chamber. The exhaust chamber is connected to the vacuum chamber through a connecting pipe and a three-way pipe, and the measuring chamber can be connected to the measuring probe through a joint. When the metal elastic film is deformed under the action of the pressure difference, it will cause the capacitance to change under the cooperation of the fixed electrode, so that the vacuum degree of the object to be detected can be measured by the measuring probe.

[0009] Furthermore, a first clamping ring is provided on the outer side of the connection between the upper end of the connecting tube and the bottom end of the thin film capacitor vacuum gauge, a second clamping ring is hingedly provided inside the first clamping ring, and a sealing gasket is provided on the adjacent side of the first clamping ring and the second clamping ring. By adopting the above technical scheme, after the upper end of the connecting tube is fitted with the bottom end of the thin film capacitor vacuum gauge, due to the hinge between the first clamping ring and the second clamping ring, it is convenient to open the first clamping ring and the second clamping ring, and put the first clamping ring and the second clamping ring on the outer side of the connection between the connecting tube and the thin film capacitor vacuum gauge, and then close the first clamping ring and the second clamping ring, so that the inner upper end of the first clamping ring fits with the upper end face of the bottom end of the thin film capacitor vacuum gauge, and the inner bottom end of the second clamping ring fits with the bottom end face of the upper end of the connecting tube, and at the same time, the adjacent side of the first clamping ring and the second clamping ring fits, and a sealing gasket is provided on the adjacent side of the first clamping ring and the second clamping ring, so as to improve the sealing between the first clamping ring and the second clamping ring.

[0010] Furthermore, a pair of first thread grooves are provided inside one side of the first clamping ring, a pair of second thread grooves are provided inside one side of the second clamping ring, and bolts are connected between the first thread grooves and the second thread grooves at the same level.

[0011] By adopting the above technical solution, since a pair of first thread grooves are provided on the first clamping ring and a pair of second thread grooves are provided on the second clamping ring, when the bolt is inserted into the first thread groove and the second thread groove at the same level and rotated, it is easy to achieve the connection and fixation between the first clamping ring and the second clamping ring.

[0012] Furthermore, sealing rings are embedded in the upper ends of several of the connecting tubes, and the upper ends of three of the sealing rings are tightly fitted with the bottom end of the thin film capacitance vacuum gauge.

[0013] By adopting the above technical solution, since a sealing ring is embedded inside the upper end of the connecting tube, the sealing of the connection between the connecting tube and the thin film capacitance vacuum gauge is ensured.

[0014] Furthermore, the upper end surface of the placement rack is connected to a nitrogen chamber at one side close to the base, and a nitrogen inlet connector and a nitrogen outlet connector are respectively provided on two sides of the outside of the nitrogen chamber.

[0015] By adopting the above technical solution, the nitrogen chamber is connected to a nitrogen tank storing nitrogen through a nitrogen inlet joint, so that nitrogen is easily transported into the nitrogen chamber and discharged through the nitrogen outlet joint.

[0016] Furthermore, a gate valve is connected between one side of the connecting pipe and one end of the nitrogen outlet connector.

[0017] By adopting the above technical solution, since the gate valve is connected between the connecting pipe and the nitrogen outlet joint, when the gate valve is opened, the nitrogen inside the nitrogen chamber can enter the vacuum chamber through the nitrogen outlet joint and the connecting pipe, and the nitrogen can generate air flow through high-speed injection, and can enter the vacuum chamber with the flow of gas and then be pumped out, which can effectively improve the vacuum degree and reduce the impact of gas.

[0018] Compared with the prior art, the utility model has the following beneficial effects: the high-efficiency vacuum degree measuring instrument, by arranging a thin film capacitance vacuum gauge at the upper end of a connecting tube, since there are a plurality of connecting tubes, it is convenient to clamp the same number of thin film capacitance vacuum gauges as the number of devices to be measured on the connecting tube according to the number of devices to be measured, and then connect the thin film capacitance vacuum gauge with the measuring probe through the joint at the upper end of the thin film capacitance vacuum gauge, so as to perform vacuum degree detection on the object to be measured through the measuring probe, by arranging a plurality of three-way pipes, the plurality of three-way pipes are all connected to the vacuum chamber and communicated with the vacuum chamber, and a control valve is arranged at one end of the three-way pipe, since there are a plurality of three-way pipes, a plurality of control valves are arranged, so it is convenient to open the control valve at the three-way pipe clamped with the thin film capacitance vacuum gauge as needed, since the vacuum chamber and the vacuum pump are connected by an exhaust pipe, when the vacuum pump is working, it is convenient to evacuate the vacuum chamber, and the vacuum degree of the object to be measured is measured under the action of the three-way pipe, the connecting pipe and the thin film capacitance vacuum gauge. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A three-dimensional structure diagram of a high-efficiency vacuum degree measuring instrument provided by the utility model Figure 1 ;

[0020] Figure 2 A three-dimensional structure diagram of a high-efficiency vacuum degree measuring instrument provided by the utility model Figure 2 ;

[0021] Figure 3 A schematic diagram of the three-dimensional structure of a vacuum chamber of a high-efficiency vacuum degree measuring instrument provided by the utility model;

[0022] Figure 4 A schematic diagram of the exploded three-dimensional structure of a thin-film capacitance vacuum gauge and a connecting pipe of a high-efficiency vacuum degree measuring instrument provided by the utility model;

[0023] Figure 5 The utility model provides a schematic diagram of the front cross-sectional structure of a thin film capacitance vacuum gauge of a high-efficiency vacuum degree measuring instrument.

[0024] In the figure: 100, main body; 1001, placement rack; 1002, base; 1003, connecting pipe; 1004, vacuum chamber; 1005, exhaust pipe; 1006, vacuum pump; 1007, nitrogen chamber; 1008, nitrogen inlet connector; 1009, plug valve; 200, measuring mechanism; 2001, three-way pipe; 2002, control valve; 2003, connecting pipe; 2004, sealing ring; 2005, film capacitance vacuum gauge; 2006, exhaust chamber; 2007, gauge; 2008, metal elastic film; 2009, fixed electrode; 2010, connector; 2011, first clamping ring; 2012, second clamping ring; 2013, sealing pad; 2014, bolt. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] See also Figure 1 - Figure 5 The utility model provides a technical solution: a high-efficiency vacuum degree measuring instrument, including a main body 100 and a measuring mechanism 200, the main body 100 includes a placing frame 1001, the center of the upper end surface of the placing frame 1001 is connected with a base 1002, the center of the upper end surface of the base 1002 is connected with a connecting pipe 1003, the connecting pipe 1003 is in a "T" shape, the upper end of the connecting pipe 1003 is connected with a vacuum chamber 1004, the upper end of the vacuum chamber 1004 is connected with an exhaust pipe 1005, the bottom end of the placing frame 1001 is connected with a vacuum pump 1006, the vacuum pump 100 The input end of the 300 tube 6 is connected to the end of the exhaust pipe 1005 away from the vacuum chamber 1004, the measuring mechanism 200 includes a plurality of three-way tubes 2001, one end of each of the three-way tubes 2001 is connected to the outside of the vacuum chamber 1004, and each of the three-way tubes 2001 is provided with a control valve 2002 at one end away from the vacuum chamber 1004, and the upper ends of the three-way tubes 2001 are connected to connecting tubes 2003, wherein the upper ends of the three connecting tubes 2003 are provided with film capacitance vacuum gauges 2005, and the upper ends of the film capacitance vacuum gauges 2005 are connected to joints 2010, through A thin film capacitance vacuum gauge 2005 is arranged at the upper end of the connecting tube 2003. Since a plurality of connecting tubes 2003 are arranged, it is convenient to clamp the same number of thin film capacitance vacuum gauges 2005 as the number of the objects to be measured on the connecting tube 2003 according to the number of the objects to be measured, and then connect the thin film capacitance vacuum gauge 2005 to the measuring probe through the joint 2010 at the upper end thereof, so as to detect the vacuum degree of the objects to be measured through the measuring probe. By arranging a plurality of three-way pipes 2001, the plurality of three-way pipes 2001 are connected to the vacuum chamber 1004 and communicate with the vacuum chamber 1004, and the three-way pipes 2001 are connected to the vacuum chamber 1004. A control valve 2002 is arranged at one end of 01. Since a plurality of three-way pipes 2001 are arranged, a plurality of control valves 2002 are arranged. It is convenient to open the control valve 2002 at the three-way pipe 2001 equipped with a thin film capacitor vacuum gauge 2005 as needed. Since the vacuum chamber 1004 and the vacuum pump 1006 are connected by the exhaust pipe 1005, when the vacuum pump 1006 is working, it is convenient to evacuate the vacuum chamber 1004, and the vacuum degree of the object to be measured is measured under the action of the three-way pipe 2001, the connecting pipe 2003 and the thin film capacitor vacuum gauge 2005.

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1-Figure 5The utility model provides a technical solution: an exhaust cavity 2006 is provided at the bottom end of the film capacitance vacuum gauge 2005, and a gauge 2007 is connected to the center of the film capacitance vacuum gauge 2005, a metal elastic film 2008 is connected to the inside of the gauge 2007, a fixed electrode 2009 is embedded at the center of the upper end surface of the gauge 2007, a first clamping ring 2011 is provided on the outer side of the connection between the upper end of the connecting tube 2003 and the bottom end of the film capacitance vacuum gauge 2005, a second clamping ring 2012 is hingedly connected to the inside of the first clamping ring 2011, a sealing gasket 2013 is provided on the adjacent side of the first clamping ring 2011 and the second clamping ring 2012, a pair of first thread grooves are opened inside one side of the first clamping ring 2011, and the second clamping ring 2012 is provided with a sealing gasket 2013. 2, a pair of second thread grooves are provided inside one side, a bolt 2014 is connected between the first thread groove and the second thread groove at the same level, a sealing ring 2004 is embedded inside the upper ends of the plurality of connecting pipes 2003, wherein the upper ends of three sealing rings 2004 are tightly fitted with the bottom ends of the thin film capacitor vacuum gauge 2005, the upper end surface of the placement rack 1001 is connected with a nitrogen chamber 1007 at a side close to the base 1002, a nitrogen inlet connector 1008 and a nitrogen outlet connector 2010 are respectively provided on both sides of the outside of the nitrogen chamber 1007, a plug valve 1009 is connected between one side of the connecting pipe 1003 and one end of the nitrogen outlet connector 2010, when the upper end of the connecting pipe 2003 is fitted with the bottom end of the thin film capacitor vacuum gauge 2005, due to the A clamping ring 2011 and a second clamping ring 2012 are hinged to facilitate opening the first clamping ring 2011 and the second clamping ring 2012, and the first clamping ring 2011 and the second clamping ring 2012 are sleeved on the outer side of the connection between the connecting pipe 2003 and the thin film capacitance vacuum gauge 2005, and then the first clamping ring 2011 and the second clamping ring 2012 are closed to make the adjacent sides of the first clamping ring 2011 and the second clamping ring 2012 fit together, and the adjacent sides of the first clamping ring 2011 and the second clamping ring 2012 are both provided with sealing gaskets 2013 to improve the sealing between the first clamping ring 2011 and the second clamping ring 2012. When the bolt 2014 is inserted into the first thread groove and the second thread groove at the same level and rotated, it is convenient to achieve the first The connection between the clamping ring 2011 and the second clamping ring 2012 is fixed. Under the action of the gauge 2007 and the metal elastic film 2008, the interior of the thin film capacitance vacuum gauge 2005 is isolated into an exhaust chamber 2006 and a measuring chamber. The exhaust chamber 2006 is connected to the vacuum chamber 1004 through the connecting pipe 2003 and the three-way pipe 2001. The measuring chamber can be connected to the measuring probe through the joint 2010. When the metal elastic film 2008 is deformed under the action of the pressure difference, it will cause the capacitance to change under the cooperation of the fixed electrode 2009, so that the vacuum degree of the object to be detected is measured by the measuring probe. Through the nitrogen inlet joint 1008, the nitrogen chamber 1007 is connected to the nitrogen tank storing nitrogen, which is convenient for transporting nitrogen to the inside of the nitrogen chamber 1007.When the gate valve 1009 is opened, the nitrogen in the nitrogen chamber 1007 can enter the vacuum chamber 1004 through the nitrogen outlet joint and the connecting pipe 1003. The nitrogen can generate air flow through high-speed injection, and can enter the vacuum chamber 1004 with the flow of gas, and then be pumped out, which can effectively improve the vacuum degree, thereby reducing the impact of gas.

[0029] Specifically, the working principle of the high-efficiency vacuum degree measuring instrument is as follows: when in use, the same number of thin film capacitance vacuum gauges 2005 as the number of objects to be measured are clamped on the connecting tube 2003; when the upper end of the connecting tube 2003 is attached to the bottom end of the thin film capacitance vacuum gauge 2005, the first clamping ring 2011 and the second clamping ring 2012 are hinged to facilitate opening the first clamping ring 2011 and the second clamping ring 2012, and the first clamping ring 2011 and the second clamping ring 2012 are sleeved on the outer side of the connection between the connecting tube 2003 and the thin film capacitance vacuum gauge 2005, and then the first clamping ring 2011 and the second clamping ring 2012 are closed. 2011 and the second clamping ring 2012, so that the adjacent sides of the first clamping ring 2011 and the second clamping ring 2012 are fitted, and the adjacent sides of the first clamping ring 2011 and the second clamping ring 2012 are both provided with sealing gaskets 2013, so as to improve the sealing performance between the first clamping ring 2011 and the second clamping ring 2012. When the bolt 2014 is inserted into the first thread groove and the second thread groove at the same level and rotated, it is convenient to realize the connection and fixation between the first clamping ring 2011 and the second clamping ring 2012, and it is convenient to open the control valve at the three-way pipe 2001 clamped with the film capacitance vacuum gauge 2005 as needed. 2002, since the vacuum chamber 1004 and the vacuum pump 1006 are connected by the exhaust pipe 1005, when the vacuum pump 1006 is working, it is convenient to evacuate the vacuum chamber 1004. Under the action of the gauge 2007 and the metal elastic film 2008, the interior of the film capacitance vacuum gauge 2005 is isolated into an exhaust chamber 2006 and a measuring chamber. The exhaust chamber 2006 is connected to the vacuum chamber 1004 through the connecting pipe 2003 and the three-way pipe 2001, and the measuring chamber can be connected to the measuring probe through the joint 210. When the metal elastic film 2008 is deformed under the action of the pressure difference, it will cooperate with the fixed electrode 2009. Under the action, the capacitance changes, so that the vacuum degree of the object to be detected is measured by the measuring probe, and the nitrogen chamber 1007 is connected to the nitrogen tank storing nitrogen through the nitrogen inlet connector 1008, so as to facilitate the delivery of nitrogen to the inside of the nitrogen chamber 1007. When the gate valve 1009 is opened, the nitrogen inside the nitrogen chamber 1007 is convenient to enter the vacuum chamber 1004 through the nitrogen outlet connector and the connecting pipe 1003. The nitrogen can generate air flow through high-speed injection, and can enter the vacuum chamber 1004 with the flow of gas, and then be pumped out, which can effectively improve the vacuum degree, thereby reducing the impact of gas.

[0030] The above description is only the preferred implementation of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A high-efficiency vacuum measuring instrument, characterized in that: The device comprises a main body (100) and a measuring mechanism (200), wherein the main body (100) comprises a placing frame (1001), wherein the center of the upper end surface of the placing frame (1001) is connected to a base (1002), wherein the center of the upper end surface of the base (1002) is connected to a connecting pipe (1003), wherein the connecting pipe (1003) is in a "T" shape, wherein the upper end of the connecting pipe (1003) is connected to a vacuum chamber (1004), wherein the upper end of the vacuum chamber (1004) is connected to an exhaust pipe (1005), wherein the inner bottom end of the placing frame (1001) is connected to a vacuum pump (1006), wherein the input end of the vacuum pump (1006) is connected to an exhaust pipe (1005) and the exhaust pipe (1006) is connected to an exhaust pipe (1006). The measuring mechanism (200) comprises a plurality of three-way tubes (2001), one end of each of the three-way tubes (2001) being connected to the outside of the vacuum chamber (1004), and each of the three-way tubes (2001) being provided with a control valve (2002) at one end of the three-way tubes (2001) being away from the vacuum chamber (1004), and the upper ends of each of the three-way tubes (2001) being connected to a connecting tube (2003), wherein the upper ends of three of the connecting tubes (2003) being provided with a thin film capacitance vacuum gauge (2005), and the upper ends of each of the thin film capacitance vacuum gauges (2005) being connected to a joint (2010).

2. A high-efficiency vacuum degree measuring instrument according to claim 1, characterized in that: The inner bottom end of the thin film capacitance vacuum gauge (2005) is provided with an exhaust cavity (2006), and the inner center of the thin film capacitance vacuum gauge (2005) is connected with a gauge tube (2007), the inner part of the gauge tube (2007) is connected with a metal elastic film (2008), and the upper end center of the gauge tube (2007) is embedded with a fixed electrode (2009).

3. A high-efficiency vacuum degree measuring instrument according to claim 2, characterized in that: A first clamping ring (2011) is provided on the outer side of the connection between the upper end of the connecting tube (2003) and the bottom end of the thin film capacitance vacuum gauge (2005), a second clamping ring (2012) is hingedly connected inside the first clamping ring (2011), and sealing gaskets (2013) are provided on adjacent sides of the first clamping ring (2011) and the second clamping ring (2012).

4. A high-efficiency vacuum degree measuring instrument according to claim 3, characterized in that: A pair of first thread grooves are provided inside one side of the first clamping ring (2011), and a pair of second thread grooves are provided inside one side of the second clamping ring (2012), and bolts (2014) are connected between the first thread grooves and the second thread grooves at the same level.

5. A high-efficiency vacuum degree measuring instrument according to claim 4, characterized in that: A sealing ring (2004) is embedded inside the upper ends of the plurality of connecting tubes (2003), wherein the upper ends of three of the sealing rings (2004) are tightly fitted to the bottom end of the thin film capacitance vacuum gauge (2005).

6. A high-efficiency vacuum degree measuring instrument according to claim 1, characterized in that: The upper end surface of the placement rack (1001) is connected to a nitrogen chamber (1007) at one side close to the base (1002), and a nitrogen inlet connector (1008) and a nitrogen outlet connector (2010) are respectively provided on two sides of the outside of the nitrogen chamber (1007).

7. A high-efficiency vacuum degree measuring instrument according to claim 6, characterized in that: A gate valve (1009) is connected between one side of the connecting pipe (1003) and one end of the nitrogen outlet connector (2010).

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