Microscopic confocal Raman spectrometer and light path device thereof

Abstract

The utility model provides a microscopic confocal Raman spectrometer and a light path device thereof, relates to the technical field of optical instruments, and solves the technical problems that an instrument in the prior art cannot stably provide laser with multiple wavelengths, the light path design is complicated, and the instrument is huge in size. The device comprises a white light path assembly, a laser light path assembly, a Raman light path assembly and a microscopic assembly. According to the microscopic confocal Raman spectrometer and the light path device thereof disclosed by the utility model, a laser arranged on a main plane is reduced, the space of a vertical plane is effectively utilized, the space position of the main plane can be greatly saved, the volume of the whole equipment is favorably reduced, and the light path design is simplified; through the arrangement of the laser switching device, independent operation of each laser light path can be ensured, mutual interference is avoided, and laser with multiple wavelengths can be stably provided.

Description

Technical Field

[0001] The utility model relates to the technical field of optical instruments, in particular to a microscopic confocal Raman spectrometer and an optical path device thereof. Background Art

[0002] Raman spectroscopy is a molecular fingerprint spectroscopy technique that mainly characterizes the non-polar chemical bonds of sample molecules. Raman spectrometers have the advantages of fast testing speed, no contact with samples, and basically no need for special sample preparation. However, the excitation efficiency of Raman spectrometers is very low, which is >10 -1 Quantum efficiency, quantum efficiency of Raman spectroscopy <10 -6 Therefore, improving the sensitivity of Raman spectrometer is the key to high-performance Raman spectrometer.

[0003] The confocal Raman microscope combines a Raman spectrometer with a microscope. The specific position and morphology of the sample surface can be observed through a high-power microscope system. The user can choose to test the Raman signal at a specified position in the sample. At the same time, the laser spot can be focused to a sub-micron size, the power density of the laser spot is increased by an order of magnitude, and the Raman excitation efficiency is greatly improved. Therefore, the laser confocal Raman microscope has the characteristics of high sensitivity. In addition, the confocal Raman instrument filters out stray signals around the laser spot through a pinhole, thereby improving the signal-to-noise ratio and spatial resolution.

[0004] At present, the market mainly includes fiber probe Raman instruments and confocal Raman instruments. Fiber probe Raman instruments are mostly single wavelength, with poor sensitivity, and cannot meet the testing needs of a variety of samples. They can only meet specific work needs and are not universal. Confocal Raman instruments are mainly imported equipment, and the current price is 1-2 million yuan per unit, which is very expensive. Due to the complex optical path design of the instrument, it is not only bulky, but also has high requirements for the laboratory environment, which is not easy to use and maintain. Utility Model Content

[0005] The utility model aims to provide a microscopic confocal Raman spectrometer and an optical path device thereof, so as to solve the technical problems in the prior art that the instrument cannot stably provide multiple wavelength lasers, the optical path design is complex and the instrument is bulky.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] An optical path device of a microscopic confocal Raman spectrometer, characterized in that it comprises a white light optical path component, a laser optical path component, a Raman optical path component and a microscopic component, wherein a sample to be measured is arranged below the microscopic component.

[0008] The white light optical path component includes an illumination optical path unit and an imaging optical path unit, wherein the illumination optical path unit is used to output white light to the microscope component so that the sample to be tested is irradiated by the white light, and the imaging optical path unit is used to receive white light image information output by the diffuse reflected light of the sample to be tested through the microscope component;

[0009] The laser optical path assembly includes a laser, an operating optical path unit for transmitting the laser light emitted by each laser to the microscope assembly, and a laser switching device for switching different operating optical path units. The laser includes at least one. When the laser includes at least two, at least two of the lasers are arranged in different planes. The laser switching device can connect the laser with the corresponding operating optical path unit.

[0010] The Raman optical path component is used to receive the Raman signal generated by the laser excitation of the sample to be tested emitted by the laser optical path component and transmit the Raman signal to the spectrum analyzer.

[0011] Furthermore, the laser includes a first laser and at least one second laser, the first laser is arranged on a first plane, and the at least one second laser is arranged on a second plane, and the operating optical path unit corresponding to the at least one second laser also includes a laser transmission component for transmitting the laser light of the at least one second laser to the first plane, and the laser transmission component includes a total reflection lens group and a light-through hole, and the laser light emitted by the at least one second laser is reflected by the total reflection lens group and reaches the first plane through the light-through hole.

[0012] Furthermore, it also includes an optical path switching device for switching the white light optical path component and the laser optical path component, the optical path switching device includes a linear motor a, a track a, a 45° reflector, a 45° reflector bracket and a bracket slide a, wherein the bracket slide a is provided with a first light through hole and a second light through hole, and the optical path switching device can transmit the laser emitted by the laser optical path component to the microscope component through the first light through hole or transmit the white light emitted by the white light optical path component to the microscope component through the second light through hole,

[0013] The 45° reflector bracket is slidably provided on the bracket slide a, and the 45° reflector bracket is provided with the 45° reflector. The moving end of the linear motor is connected to the bracket slide a, and can drive the 45° reflector on the bracket slide to be above the first light hole or above the second light hole.

[0014] Furthermore, the illumination optical path assembly includes an illuminator, a focusing lens, an aperture, a shaping lens group and a semi-transparent and semi-reflective mirror, and the white light emitted by the illuminator is sequentially transmitted to the microscope assembly through the focusing lens, the aperture, the shaping lens group and the semi-transparent and semi-reflective mirror;

[0015] The camera optical path component includes a total reflection mirror a, an imaging lens and an image acquisition module. The microscope component receives the diffusely reflected light emitted by the sample to be tested, and converges the light to the image acquisition module through the semi-transparent and semi-reflective mirror, the total reflection mirror a and the imaging lens in sequence.

[0016] Furthermore, the operating optical path unit includes an attenuator, a beam expander, a total reflection mirror b and a filter. The laser emitted by the laser passes through the attenuator, the beam expander, the total reflection mirror b and the filter in sequence and is then transmitted to the microscope component.

[0017] Furthermore, the Raman optical path component includes a Raman signal filtering module and a Raman signal transmission component, the Raman information filtering device is a high-pass filter, and the Raman signal transmission component is used to receive light filtered by the Raman information filtering device.

[0018] Furthermore, the Raman signal transmission component includes a Raman signal collecting lens group, an optical fiber and an adjustment bracket for adjusting the position and deflection angle of the optical fiber. The Raman signal is transmitted to the optical fiber in sequence through the filter and the Raman signal collecting lens group. The optical fiber is connected to the spectrum analyzer to transmit the Raman information to the spectrum analyzer.

[0019] Furthermore, the Raman signal transmission component includes a confocal pinhole, an incident pinhole focusing mirror and an exit pinhole collimating mirror, and the Raman signal sequentially passes through the incident pinhole focusing mirror, the confocal pinhole and the exit pinhole collimating mirror to transmit the Raman information to the spectrometer.

[0020] Furthermore, the laser switching device includes a linear motor b, a track b and a support slide b, the filter and the high-pass filter are arranged on the support slide b, the support slide b is arranged on the track b, and the moving end of the linear motor b is connected to the support slide b to push the support slide b to slide on the track b.

[0021] Furthermore, it also includes a microscopic confocal Raman spectrometer of any of the above optical path devices.

[0022] The beneficial effects of the utility model are:

[0023] (1) The optical path device of the microscopic confocal Raman spectrometer of the present invention comprises a white light optical path component, a laser optical path component, a Raman optical path component and a microscopic component, wherein the white light optical path component comprises an illumination optical path unit and an imaging optical path unit, wherein the illumination optical path unit is convenient for white light illumination of the sample, and the imaging optical path unit is convenient for transmitting the white light image of the sample; the laser optical path component comprises a laser, an operating optical path unit for transmitting the laser light emitted by each of the lasers to the microscopic component, and a laser switching device for switching different operating optical path units, wherein the laser comprises at least one, and when the laser comprises at least two, at least two The lasers are arranged on different planes, and the laser switching device can connect the lasers with the corresponding operating optical path units. Such an arrangement reduces the number of lasers arranged on the main plane, effectively utilizes the space of the facade, and can greatly save the spatial position of the main plane, which is not only conducive to reducing the volume of the overall equipment, but also simplifies the optical path design; the setting of the laser switching device can ensure that each laser optical path component operates independently without interfering with each other, thereby realizing the stable provision of multiple wavelength lasers; the setting of the Raman optical path facilitates the transmission of the Raman signal generated after the laser excites the sample to the spectrometer, and finally outputs the Raman spectrum information.

[0024] (2) The optical path device of the microscopic confocal Raman spectrometer in the utility model and the setting of the optical path switching device facilitate switching between the white light transmitted by the white light optical path component and the laser transmitted by the laser optical path component, so that on the basis that each laser optical path is an independent optical path, the white light optical path and the laser optical path are also set as independent optical paths, and the optical path design is further optimized to improve the sensitivity of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 This is a schematic diagram of the structure of the optical path device of the microscopic confocal Raman spectrometer in the utility model;

[0027] Figure 2 This is a schematic diagram of the elevation structure of the white light path component in Example 1 of the utility model;

[0028] Figure 3 This is a schematic diagram of the elevation structure of the laser light path component in Example 1 of the utility model;

[0029] Figure 4This is a schematic diagram of the elevation structure of the Raman optical path component in Example 1 of the utility model;

[0030] Figure 5 This is a schematic diagram of the planar structure of the Raman optical path component in Example 1 of the utility model;

[0031] Figure 6 This is a schematic diagram of the planar structure of the first operating optical path unit in Embodiment 1 of the utility model;

[0032] Figure 7 It is a schematic diagram of the planar structure of the second operating optical path unit in Embodiment 1 of the utility model;

[0033] Figure 8 It is a schematic diagram of the planar structure of the third operating optical path unit in Embodiment 1 of the utility model;

[0034] Fig. 9 This is a schematic diagram of the optical path switching device in Example 1 of the utility model;

[0035] Fig.10 This is a schematic diagram of the installation of a 45° reflector in the optical path switching device in Example 1 of the utility model;

[0036] Fig.11 This is a schematic diagram of a Raman signal transmission component in Example 2 of the present utility model;

[0037] Fig.12 This is a test chart of the Raman signal intensity of the microscopic confocal Raman spectrometer of the utility model;

[0038] Fig.13 This is a signal-to-noise ratio test chart of the utility model microscopic confocal Raman spectrometer.

[0039] In the figure

[0040] 1. White light path component; 11. Illuminator; 12. Focusing lens; 13. Aperture; 14. Shaping lens group; 15. Semi-transparent and semi-reflective mirror; 16. Total reflection mirror a; 17. Imaging lens; 18. Image acquisition module;

[0041] 2. Laser optical path assembly; 201. First laser L1; 202. Second laser L2; 203. Third laser L3; 211. First operating optical path unit; 221. First attenuator; 222. Second attenuator; 223. Third attenuator; 231. First beam expander; 232. Second beam expander; 233. Third beam expander; 241. First total reflection mirror b; 242. Second total reflection mirror b; 243. Third total reflection mirror b; 251. First optical filter; 252. Second optical filter; 253. Third optical filter; 26. Laser switching device; 261. Linear motor b; 262. Track b; 263. Support slide b; 271. First total reflection lens group; 272. Second total reflection lens group; 281. Light hole a; 282. Light hole b;

[0042] 3. Raman optical path component; 301. first high-pass filter; 302. second high-pass filter; 303. third high-pass filter; 31. Raman signal collection lens group; 32. optical fiber; 33. adjustment bracket;

[0043] 34. Confocal pinhole; 35. Two-dimensional adjustable bracket; 36. Incident pinhole focusing mirror; 37. Incident pinhole focusing mirror bracket; 38. Exit pinhole collimator; 39. Exit pinhole collimator bracket;

[0044] 4. Microscope assembly; 41. Focusing assembly; 42. Objective lens;

[0045] 5. Spectrum analyzer; 51. Spectrum analyzer mounting frame;

[0046] 6. Optical path switching device; 61. Linear motor a; 62. Track a; 63. 45° reflector; 64. 45° reflector bracket; 65. Bracket slide a; 66. First light hole; 67. Second light hole;

[0047] 7. Sample table;

[0048] 8. Install the plate. DETAILED DESCRIPTION

[0049] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model.

[0050] Example 1

[0051] An optical path device of a microscopic confocal Raman spectrometer, such as Figure 1-Figure 10As shown, it includes a white light optical path component 1 , a laser optical path component 2 , a Raman optical path component 3 and a microscope component 4 , wherein the microscope component 4 includes a focusing component 41 and an objective lens 42 .

[0052] The white light path component 1 includes an illumination light path unit and a camera light path unit. The illumination light path unit includes an illuminator 11, a focusing lens 12, an aperture 13, a shaping lens group 14 and a semi-transparent and semi-reflective mirror 15. In this embodiment, the illuminator 11 is an LED lamp. The white light beam emitted by the LED lamp is focused by the focusing lens 12, passes through the aperture 13, and then is shaped by the shaping lens group 14 to meet the Kohler illumination requirements. The beam is reflected by the semi-transparent and semi-reflective mirror 15 to the objective lens 42 of the microscope component 4. The objective lens 42 focuses the beam on the sample for white light illumination of the sample. The camera optical path unit includes a total reflection mirror a16, an imaging lens 17 and an image acquisition module 18. Since the objective lens 42 illuminates the light beam onto the sample, the diffuse reflected light of the sample is collected by the objective lens 42, passes through the semi-transparent and semi-reflective mirror 15 and reaches the total reflection mirror a16, and the vertical light is reflected by the total reflection mirror a16 as horizontal light. The horizontal light is converged on the image acquisition module 18 through the imaging lens 17. In this embodiment, the image acquisition module 18 is a CCD camera, and the white light image of the sample can be read out by CCD software, and all components of the white light optical path assembly 1 are arranged on a different plane from the first laser, specifically, above the plane where the first laser is located, so as to further utilize the vertical space and achieve the purpose of controlling the volume of the overall equipment.

[0053] The laser optical path component 2 includes a laser, an operating optical path unit for transmitting the laser light emitted by each laser to the microscope component 4, and a laser switching device 26 for switching different operating optical path units. The operating optical path unit includes an attenuator, a beam expander, a total reflection mirror b, and a filter. The laser light emitted by the laser passes through the attenuator, the beam expander, the total reflection mirror b, and the filter in sequence and is then transmitted to the microscope component 4; the attenuator is an interference filter, which can purify the laser light to prevent the laser plasma stray line signal from interfering with the Raman test; the beam expander can shape and expand the laser light to the required diameter so that the light spot after being focused by the objective lens 42 can reach the optical diffraction limit; the total reflection mirror b is used for turning the optical path, and the reflectivity of the total reflection mirror b used is greater than 98%; the filter is an Edge dichroic filter, which can not only reflect the laser light in the laser optical path component 2, but also can be used to reflect the excitation laser light and transmit the Raman signal in the Raman optical path component 3. The laser switching device 26 includes a linear motor b261, a track b262 and a support slide b263, the filter is arranged on the support slide b263, the support slide b263 is arranged on the track b262, and the moving end of the linear motor b261 is connected to the support slide b263 to push the support slide b263 to slide on the track b262. The laser switching device 26 is controlled by the linear motor b261, and the automatic switching of the laser optical path components can be realized through the control program.

[0054] The Raman optical path component 3 includes a Raman signal filtering module and a Raman signal transmission component. The Raman information filtering device is a high-pass filter. The Raman signal transmission component includes a Raman signal collection lens group 31, an optical fiber 32, and an adjustment bracket 33 for adjusting the position and deflection of the optical fiber. The Raman signal passes through the high-pass filter and the Raman signal collection lens group 31 in sequence and converges to the optical fiber 32. The optical fiber 32 transmits the Raman information to the spectrum analyzer 5. The high-pass filter is used to filter out the excitation light interference signal in the Raman signal again; the Raman signal collection lens group 31 is used to focus the Raman signal on the optical fiber. In this embodiment, the Raman signal collection lens group 31 can be telescopically adjusted to adjust the distance to adjust the position focused on the optical fiber to achieve the best collection efficiency of the Raman signal; the adjustment bracket 33 is used to adjust the position and deflection of the optical fiber. Specifically, the adjustment bracket 33 adopts a four-dimensional optical fiber adjustment bracket; the optical fiber 32 is used to transmit the Raman signal to the spectrometer and has the function of pinhole filtering stray light; the spectrum analyzer 5 is used to split and detect Raman light and output Raman spectrum information. In this embodiment, the Raman signal is collected by backscattering (in the opposite direction of the excitation light). Specifically, when the laser excites the sample, the Raman light with the Raman signal is generated. After the Raman light passes through the filter, the excitation light signal is filtered out again by the high-pass filter, and then the Raman light is converged on the optical fiber 32 through the Raman signal collection lens group 31. The optical fiber 32 transmits the Raman signal to the spectrometer 5, and the spectrometer 5 detects the Raman spectrum by spectrophotometry. In order to better perform double filtering on the Raman light, the high-pass filter and the filter are simultaneously arranged on the bracket slide b263, and each group of filters in the laser running optical path assembly is equipped with a high-pass filter. In particular, when a small spectrometer 5 is used, the spectrometer 5 can be built into the instrument; when a large spectrometer 5 is used, the spectrometer 5 is external, and both models are connected by optical fiber. In this embodiment, a small spectrometer 5 is used, which is installed in the device through the spectrometer mounting frame 51.

[0055] In this embodiment, it also includes an optical path switching device 6 for switching the white light optical path component 1 and the laser optical path component 2 to reach the microscope component 4, the optical path switching device 6 includes a linear motor a61, a track a62, a 45° reflector 63, a 45° reflector bracket 64, and a bracket slide a65, wherein the bracket slide a65 is provided with a first light hole 66 and a second light hole 67, the laser emitted by the laser optical path component is transmitted to the microscope component 4 through the first light hole 66, and the white light emitted by the white light optical path component 1 is transmitted to the microscope component 4 through the second light hole 67, the 45° reflector 63 is arranged above the first light hole 66; the 45° reflector 63 is arranged on the bracket slide a65 through the 45° reflector bracket 65; the moving end of the linear motor 61a is connected to the bracket slide a65, pushing the bracket slide a65 to slide on the track a62.

[0056] In this embodiment, the laser includes a first laser and a second laser. Specifically, the first laser is a first laser L1 201, the second laser is a second laser L2 202 and a third laser L3 203. Correspondingly, the operating optical path unit includes a first operating optical path unit 211, a second operating optical path unit and a third operating optical path unit. The first laser L1 201 is arranged on a first plane, i.e., a main plane, and the second laser L2 202 and the third laser L3 are arranged on a second plane. Specifically, the first laser L1 201 is arranged above the mounting plate 8 in the instrument, and the second laser L2 202 and the third laser L3 203 are arranged below the mounting plate 8, respectively. This can save more space, is conducive to the miniaturization of the device, and is convenient for arranging the optical elements on the main plane without overlapping.

[0057] like Figure 6 As shown, it is a schematic diagram of the planar structure of the first operating optical path unit 211. The laser emitted from the first laser L1 201 passes through the first attenuator 221, the first beam expander 231, the first total reflection mirror b241, and the first filter 251 in sequence. At this time, the linear motor a61 pushes the bracket slide a65, so that the first light hole 66 is located directly above the objective lens 42, and the linear motor b is in a retracted state, so that the laser passes through the first filter 251 and is transmitted to the objective lens 42 through the first light hole 66.

[0058] like Figure 7As shown, it is a schematic diagram of the planar structure of the second operating optical path unit. The laser emitted from the second laser L2 202 passes through the second attenuator 222, the second beam expander 232, the first total reflection lens group 271, the light hole a281, the second total reflection mirror b242, and the second filter 252 in sequence. At this time, the linear motor a61 pushes the bracket slide a65, so that the first light hole 66 is located directly above the objective lens 42, and the linear motor b pushes the bracket slide b263, so that the laser passes through the second filter 252 and is transmitted to the objective lens 42 through the first light hole 66.

[0059] like Figure 8 As shown, it is a schematic diagram of the planar structure of the third operating optical path unit. The laser emitted from the third laser L3 203 passes through the third attenuator 223, the third beam expander 233, the second total reflection lens group 272, the light hole b282, the third total reflection mirror b243, and the third filter 253 in sequence. At this time, the linear motor a61 pushes the bracket slide a65, so that the first light hole 66 is located directly above the objective lens 42, and the linear motor b pushes the bracket slide b263, so that the laser passes through the third filter 253 and is transmitted to the objective lens 42 through the first light hole 66.

[0060] Example 2

[0061] The difference between this embodiment and embodiment 1 is that: Fig.11 As shown, the Raman signal transmission component is set as a fixed pinhole, specifically, including a confocal pinhole 34, an incident pinhole focusing mirror 36 and an exit pinhole collimator 38. The pinhole diameter of the confocal pinhole 34 is 100 μm, and it is installed in the device through a two-dimensional adjustable bracket 35; the incident pinhole focusing mirror 36 is installed in the device through an incident pinhole focusing mirror bracket 37, and the incident pinhole focusing mirror bracket 37 can adjust the position of the incident pinhole focusing mirror 36 forward and backward; the exit pinhole collimator 38 is installed in the device through an exit pinhole collimator bracket 39, and the exit pinhole collimator bracket 39 can adjust the position of the exit pinhole collimator 38 forward and backward. In this embodiment, the Raman light is emitted from the objective lens 42 and passes through the high-pass filter, enters the incident pinhole focusing mirror 36, and then after being focused by the confocal pinhole 34, enters the exit pinhole collimator 38 to become parallel light and is transmitted to the spectrum analyzer 5. Compared with Example 1, the Raman signal transmission component in this embodiment has a lower transmission loss rate of Raman light.

[0062] Taking a single crystal silicon wafer as an example, the Raman signal intensity tested by the microscopic confocal Raman spectrometer of the utility model at an integration time of 1 s is as follows: Fig.12 As shown, it can be seen that the Raman signal test value is strong, reaching 30,000 in 1s integration, and the noise is low and the background is very clean, which shows that the optical design of this equipment is very stable.

[0063] Taking a single crystal silicon wafer as an example, the silicon third-order peak is tested by the microscopic confocal Raman spectrometer of the utility model at an integration time of 20 seconds and repeated 15 times. In this field, the silicon third-order peak is used to evaluate the signal-to-noise ratio of the device, such as Fig.13 As shown, it can be seen that the device can obtain the third-order peak of silicon, which further illustrates that the system has high sensitivity.

[0064] All components of the microscopic confocal Raman spectrometer of the utility model are rigidly coupled, and the laboratory environment requirements are not high. All the equipment components can be built into the host, and the anti-vibration ability is strong; and most of the components of the equipment can be made of domestic components, which greatly reduces the price of the equipment. When using the microscopic confocal Raman spectrometer of the utility model, one laser or multiple lasers can be set according to the needs of the experiment.

[0065] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. An optical path device of a microscopic confocal Raman spectrometer, characterized in that: It includes a white light optical path component, a laser optical path component, a Raman optical path component and a microscope component, and a sample to be tested is arranged below the microscope component. The white light optical path component includes an illumination optical path unit and an imaging optical path unit, wherein the illumination optical path unit is used to output white light to the microscope component so that the sample to be tested is irradiated by the white light, and the imaging optical path unit is used to receive white light image information output by the diffuse reflected light of the sample to be tested through the microscope component; The laser optical path assembly includes a laser, an operating optical path unit for transmitting the laser light emitted by each laser to the microscope assembly, and a laser switching device for switching different operating optical path units. The laser includes at least one. When the laser includes at least two, at least two of the lasers are arranged in different planes. The laser switching device can connect the laser with the corresponding operating optical path unit. The Raman optical path component is used to receive the Raman signal generated by the laser excitation of the sample to be tested emitted by the laser optical path component and transmit the Raman signal to the spectrum analyzer.

2. The optical path device according to claim 1, characterized in that: Furthermore, the laser includes a first laser and at least one second laser, the first laser is arranged on a first plane, and the at least one second laser is arranged on a second plane, and the operating optical path unit corresponding to the at least one second laser also includes a laser transmission component for transmitting the laser light of the at least one second laser to the first plane, and the laser transmission component includes a total reflection lens group and a light-through hole, and the laser light emitted by the at least one second laser is reflected by the total reflection lens group and reaches the first plane through the light-through hole.

3. The optical path device according to claim 1, characterized in that: It also includes an optical path switching device for switching the white light optical path component and the laser optical path component, the optical path switching device includes a linear motor a, a track a, a 45° reflector, a 45° reflector bracket and a bracket slide a, wherein the bracket slide a is provided with a first light through hole and a second light through hole, and the optical path switching device can transmit the laser emitted by the laser optical path component to the microscope component through the first light through hole or transmit the white light emitted by the white light optical path component to the microscope component through the second light through hole, The 45° reflector bracket is slidably provided on the bracket slide a, and the 45° reflector bracket is provided with the 45° reflector. The moving end of the linear motor is connected to the bracket slide a, and can drive the 45° reflector on the bracket slide to be above the first light hole or above the second light hole.

4. The optical path device according to claim 1, characterized in that: The illumination optical path unit comprises an illuminator, a focusing lens, an aperture, a shaping lens group and a semi-transparent and semi-reflective mirror, and the white light emitted by the illuminator is sequentially transmitted to the microscope assembly through the focusing lens, the aperture, the shaping lens group and the semi-transparent and semi-reflective mirror; The camera optical path unit includes a total reflection mirror a, an imaging lens and an image acquisition module. The microscope component receives the diffusely reflected light emitted by the sample to be tested, and converges it to the image acquisition module through the semi-transparent and semi-reflective mirror, the total reflection mirror a and the imaging lens in sequence.

5. The optical path device according to claim 1, characterized in that: The operating optical path unit includes an attenuator, a beam expander, a total reflection mirror b and a filter. The laser light emitted by the laser passes through the attenuator, the beam expander, the total reflection mirror b and the filter in sequence and is then transmitted to the microscope component.

6. The optical path device according to claim 5, characterized in that: The Raman optical path component includes a Raman signal filtering module and a Raman signal transmission component. The Raman signal filtering module is a high-pass filter. The Raman signal transmission component is used to receive light filtered by the Raman signal filtering module.

7. The optical path device according to claim 6, characterized in that: The Raman signal transmission component includes a Raman signal collecting lens group, an optical fiber and an adjustment bracket for adjusting the position and deflection angle of the optical fiber. The Raman signal is transmitted to the optical fiber through the filter and the Raman signal collecting lens group in sequence. The optical fiber is connected to a spectrum analyzer to transmit the Raman signal to the spectrum analyzer.

8. The optical path device according to claim 6, characterized in that: The Raman signal transmission component includes a confocal pinhole, an incident pinhole focusing mirror and an exit pinhole collimating mirror. The Raman signal is transmitted to the spectrum analyzer through the incident pinhole focusing mirror, the confocal pinhole and the exit pinhole collimating mirror in sequence.

9. The optical path device according to claim 6, characterized in that: The laser switching device includes a linear motor b, a track b and a support slide b. The filter and the high-pass filter are arranged on the support slide b. The support slide b is arranged on the track b. The moving end of the linear motor b is connected to the support slide b to push the support slide b to slide on the track b.

10. A microscopic confocal Raman spectrometer, characterized in that: The optical path device comprises any one of claims 1 to 9.

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