Multilayer substrate

Abstract

A multilayer substrate is provided. The centers of the plurality of first columnar conductors, the centers of the plurality of second columnar conductors, the centers of the plurality of third columnar conductors, and the centers of the plurality of fourth columnar conductors are arranged at predetermined pitches in first to fourth rows extending in the X-axis direction, respectively. The second row is positioned closer to the negative direction of the Y axis than the first row. The fourth row is positioned closer to the negative direction of the Y axis than the third row. When viewed in the Z-axis direction, a plurality of first X-axis positions showing the positions of the centers of the plurality of first columnar conductors on the X-axis and a plurality of second X-axis positions showing the positions of the centers of the plurality of second columnar conductors on the X-axis are alternately arranged in the X-axis direction. When viewed in the Z-axis direction, a plurality of third X-axis positions showing the positions of the centers of the plurality of third columnar conductors on the X-axis and a fourth X-axis position showing the positions of the centers of the plurality of fourth columnar conductors on the X-axis are alternately arranged in the X-axis direction.

Description

Technical Field

[0001] The utility model relates to a multi-layer substrate with a signal conductor layer. Background Art

[0002] As a previous invention involving a multilayer substrate, for example, a transmission line described in Patent Document 1 is known. The transmission line includes a signal line, two ground conductors, and a plurality of GND vias. The signal line extends in the front-to-back direction. The signal line is located between the two ground conductors in the up-down direction. The two ground conductors are electrically connected by the plurality of GND vias. Some of the GND vias among the plurality of GND vias are arranged in the front-to-back direction to the left of the signal line. In addition, the remaining GND vias among the plurality of GND vias are arranged in the front-to-back direction to the right of the signal line.

[0003] Prior Art Literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2010-28306 Utility Model Content

[0006] Problems to be solved by utility models

[0007] In addition, in the transmission line described in Patent Document 1, there is a demand to suppress the radiation of noise to the outside of the transmission line and the intrusion of noise into the inside of the transmission line (hereinafter referred to as improvement of shielding properties).

[0008] Therefore, an object of the present invention is to provide a multilayer substrate capable of improving shielding properties.

[0009] Technical solutions to solve problems

[0010] A multilayer substrate according to one embodiment of the present invention comprises:

[0011] A laminate having a structure in which a plurality of insulating layers are laminated in the Z-axis direction;

[0012] a first signal conductor layer provided in the laminate and having a linear shape when viewed in the Z-axis direction;

[0013] a first ground conductor layer located closer to the first signal conductor layer in the negative direction of the Z axis and overlapping the first signal conductor layer when viewed in the Z axis direction; and

[0014] a plurality of first columnar conductors, a plurality of second columnar conductors, a plurality of third columnar conductors, and a plurality of fourth columnar conductors, which penetrate the insulating layer located closer to the negative direction of the Z axis than the first signal conductor layer in the Z axis direction, and are located closer to the positive direction of the Z axis than the first ground conductor layer.

[0015] The direction in which the first signal conductor layer extends is defined as an X-axis direction.

[0016] A direction perpendicular to the X-axis direction and the Z-axis direction is defined as a Y-axis direction,

[0017] The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the first ground conductor layer.

[0018] When viewed in the Z-axis direction, the centers of the plurality of first columnar conductors are located closer to the positive direction of the Y-axis than the first signal conductor layer, and the plurality of first columnar conductors are arranged at a given pitch in a first column extending along the X-axis direction.

[0019] When viewed in the Z-axis direction, the centers of the plurality of second columnar conductors are located closer to the positive direction of the Y-axis than the first signal conductor layer, and the plurality of second columnar conductors are arranged at the given pitch in a second row extending along the X-axis direction.

[0020] When viewed in the Z-axis direction, the centers of the plurality of third columnar conductors are located closer to the negative direction of the Y-axis than the first signal conductor layer, and the plurality of third columnar conductors are arranged at the given pitch in a third row extending along the X-axis direction.

[0021] When viewed in the Z-axis direction, the centers of the plurality of fourth columnar conductors are located closer to the negative direction of the Y-axis than the first signal conductor layer, and the plurality of fourth columnar conductors are arranged at the given pitch in a fourth column extending along the X-axis direction.

[0022] The second column is located closer to the negative direction of the Y axis than the first column.

[0023] The fourth column is located closer to the negative direction of the Y axis than the third column.

[0024] When viewed in the Z-axis direction, a plurality of first X-axis positions indicating positions of centers of the plurality of first columnar conductors on the X-axis and a plurality of second X-axis positions indicating positions of centers of the plurality of second columnar conductors on the X-axis are alternately arranged in the X-axis direction,

[0025] When viewed in the Z-axis direction, a plurality of third X-axis positions indicating positions of centers of the plurality of third columnar conductors on the X-axis and a fourth X-axis position indicating positions of centers of the plurality of fourth columnar conductors on the X-axis are alternately arranged in the X-axis direction,

[0026] a distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is shorter than a distance from the third X-axis position to the second X-axis position closest to the third X-axis position among the plurality of second X-axis positions,

[0027] A distance from the 4th X-axis position to the 2nd X-axis position closest to the 4th X-axis position among the plurality of 2nd X-axis positions is shorter than a distance from the 4th X-axis position to the 1st X-axis position closest to the 4th X-axis position among the plurality of 1st X-axis positions.

[0028] Utility Model Effect

[0029] According to the multi-layer substrate of the present invention, it is possible to improve the shielding properties. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is an exploded perspective view of the multi-layer substrate 10 .

[0031] Figure 2 It is a plan view of the insulating layer 16 c of the multi-layer substrate 10 .

[0032] Figure 3 is a cross-sectional view of the multi-layer substrate 10 .

[0033] Figure 4 This is a front view of the multi-layer substrate 10 when in use.

[0034] Figure 5 It is a plan view of the insulating layer 16c of the multi-layer substrate 10a.

[0035] Figure 6 It is a plan view of the insulating layer 16c of the multi-layer substrate 10b.

[0036] Figure 7 It is a plan view of the insulating layer 16c of the multilayer substrate 10c.

[0037] Figure 8 It is a plan view of the insulating layer 16c of the multi-layer substrate 10d.

[0038] Fig. 9 It is a plan view of the insulating layer 16c of the multi-layer substrate 10e.

[0039] Fig.10It is a plan view of the insulating layer 16c of the multilayer substrate 10f.

[0040] Fig.11 It is a plan view of the insulating layer 16c of the multi-layer substrate 10g.

[0041] Fig.12 is an exploded view of the multi-layer substrate 10h.

[0042] Fig.13 is a cross-sectional view of the multi-layer substrate 10h.

[0043] Fig.14 It is an exploded perspective view of the multi-layer substrate 10i.

[0044] Description of Reference Numerals

[0045] 10, 10a~10i: multi-layer substrate;

[0046] 12: laminate;

[0047] 16a-16d: insulator layer;

[0048] 18a, 18b: protective layer;

[0049] 20, 21: signal conductor layer;

[0050] 22, 24, 28, 28a, 28b, 30, 30a, 30b, 32, 32a, 32b, 34, 34a, 34b, 36: ground conductor layer;

[0051] 26a, 26b: signal terminals;

[0052] A1: Interval 1;

[0053] A2: Interval 2;

[0054] A3: Interval 3;

[0055] L1: Column 1;

[0056] L2: Column 2;

[0057] L3: Column 3;

[0058] L4: Column 4;

[0059] L5: column 5;

[0060] L6: Column 6;

[0061] p1: 1st X-axis position;

[0062] p2: 2nd X-axis position;

[0063] p3: 3rd X-axis position;

[0064] p4: 4th X-axis position;

[0065] p5: 5th X-axis position;

[0066] p6: 6th X-axis position;

[0067] v1, v2, v11 to v16, v11a to v11d, v12a to v12d, v13a to v13d, v14a to v14d, v15c, v16c: columnar conductors. DETAILED DESCRIPTION

[0068] (Implementation Method)

[0069] [Structure of multi-layer substrate]

[0070] Hereinafter, the structure of the multilayer substrate 10 according to the embodiment of the present invention will be described with reference to the drawings. Figure 1 It is an exploded perspective view of the multi-layer substrate 10 . Figure 2 It is a plan view of the insulating layer 16 c of the multi-layer substrate 10 . Figure 3 is a cross-sectional view of the multi-layer substrate 10. Figure 3 , a cross section perpendicular to the left-right direction is shown. Figure 4 1 is a front view of the multilayer substrate 10 when in use. Figure 1 as well as Figure 2 In FIG. 1 , only representative columnar conductors v11 to v14 among the plurality of columnar conductors v11 to v14 are denoted by reference numerals.

[0071] In this specification, directions are defined as follows. The stacking direction of the stacked body 12 of the multi-layer substrate 10 is defined as the up-down direction. In addition, the up-down direction is consistent with the Z-axis direction. The upper direction is the positive direction of the Z-axis. The lower direction is the negative direction of the Z-axis. In addition, the direction in which the signal conductor layer 20 of the multi-layer substrate 10 extends is defined as the left-right direction. The left-right direction is consistent with the X-axis direction. The left-right direction is orthogonal to the up-down direction. In addition, the direction orthogonal to the up-down direction and the left-right direction is defined as the front-back direction. The front-back direction is consistent with the Y-axis direction. In addition, the upper direction and the lower direction of the up-down direction may be swapped, the left direction and the right direction of the left-right direction may be swapped, and the front direction and the rear direction of the front-back direction may be swapped.

[0072] First, refer to Figure 1 , the structure of the multilayer substrate 10 is described. The multilayer substrate 10 transmits high-frequency signals. The multilayer substrate 10 is used to electrically connect two circuits in electronic devices such as smart phones. Figure 1As shown, the multilayer substrate 10 includes a laminate 12, protective layers 18a and 18b, a signal conductor layer 20, ground conductor layers 22, 24, 28, 30, 32, and 34, signal terminals 26a and 26b, columnar conductors v1 and v2, and a plurality of columnar conductors v11 to v14.

[0073] The stack 12 has a plate shape. Therefore, the stack 12 has an upper main surface and a lower main surface. The upper main surface and the lower main surface of the stack 12 have a rectangular shape with long sides extending in the left-right direction. Therefore, the length of the stack 12 in the left-right direction is longer than the length of the stack 12 in the front-back direction. The stack 12 has flexibility.

[0074] like Figure 1 As shown, the laminate 12 has a structure in which insulating layers 16a to 16d are stacked in the vertical direction (Z-axis direction). The insulating layers 16a to 16d are arranged in order from top to bottom. The insulating layers 16a to 16d respectively have an upper main surface and a lower main surface. The material of the insulating layers 16a to 16d is a thermoplastic resin. The thermoplastic resin is, for example, a liquid crystal polymer.

[0075] The high-frequency signal is transmitted in the signal conductor layer 20. The signal conductor layer 20 (first signal conductor layer) is provided in the laminate 12. In the present embodiment, the signal conductor layer 20 is located on the upper main surface of the insulating layer 16c. The signal conductor layer 20 has a linear shape extending in the left-right direction when viewed in the up-down direction (Z-axis direction). In the present embodiment, the signal conductor layer 20 has a straight line shape.

[0076] like Figure 1 As shown, the ground conductor layer 22 is provided in the laminate 12. The ground conductor layer 22 (fifth ground conductor layer) is located above the signal conductor layer 20 (first signal conductor layer) (positive direction of the Z axis), and overlaps with the signal conductor layer 20 (first signal conductor layer) when viewed in the up-down direction (Z axis direction). In the present embodiment, the ground conductor layer 22 is located on the upper main surface of the insulating layer 16a. In addition, the ground conductor layer 22 covers substantially the entire upper main surface of the insulating layer 16a. The ground potential is connected to the ground conductor layer 22.

[0077] like Figure 1As shown, the ground conductor layer 24 is provided in the laminate 12. The ground conductor layer 24 (first ground conductor layer) is located below (in the negative direction of the Z axis) the signal conductor layer 20 (first signal conductor layer), and overlaps with the signal conductor layer 20 (first signal conductor layer) when viewed in the up-down direction (Z axis direction). In the present embodiment, the ground conductor layer 24 is located on the lower main surface of the insulating layer 16d. In addition, the ground conductor layer 24 covers substantially the entire lower main surface of the insulating layer 16d. The ground potential is connected to the ground conductor layer 24. The signal conductor layer 20, the ground conductor layer 22, and the ground conductor layer 24 as described above have a stripline structure.

[0078] like Figure 1 As shown, ground conductor layers 28 and 30 are provided in the laminate 12. The ground conductor layers 28 and 30 are located on the upper main surface of the insulating layer 16b. The ground conductor layer 28 is located in front of the signal conductor layer 20. The ground conductor layer 30 is located in the rear of the signal conductor layer 20. The ground conductor layers 28 and 30 have a linear shape extending in the left-right direction.

[0079] like Figure 1 As shown, the ground conductor layers 32 and 34 are provided in the laminate 12. The ground conductor layers 32 and 34 are located on the upper main surface of the insulating layer 16c. Therefore, the vertical position of the ground conductor layers 32 and 34 is the same as the vertical position of the signal conductor layer 20. The ground conductor layer 32 is located in front of the signal conductor layer 20. The ground conductor layer 34 is located in the rear of the signal conductor layer 20. The ground conductor layers 32 and 34 have a linear shape extending in the left-right direction.

[0080] The signal terminal 26a is provided at the left end of the laminate 12. More specifically, the signal terminal 26a is located on the upper main surface of the insulator layer 16a. The signal terminal 26a overlaps the left end of the signal conductor layer 20 when viewed in the vertical direction. The signal terminal 26a has a rectangular shape when viewed in the vertical direction. The signal terminal 26a is an external terminal for inputting and outputting high-frequency signals. The signal terminal 26a does not contact the ground conductor layer 22.

[0081] The columnar conductor v1 electrically connects the signal terminal 26a and the left end of the signal conductor layer 20. In more detail, the columnar conductor v1 penetrates the insulating layers 16a and 16b in the vertical direction. The upper end of the columnar conductor v1 is in contact with the signal terminal 26a. The lower end of the columnar conductor v1 is in contact with the left end of the signal conductor layer 20. The structure of the signal terminal 26b and the columnar conductor v2 is symmetrical with the structure of the signal terminal 26a and the columnar conductor v1, so the description is omitted.

[0082] Observe in the up and down direction (Z-axis direction), such as Figure 2As shown, the center of the plurality of columnar conductors v11 is located in front of the signal conductor layer 20 (in the positive direction of the Y axis). The centers of the plurality of columnar conductors v11 are arranged at a given pitch P0 in the first column L1 extending in the left-right direction (X-axis direction). The plurality of columnar conductors v11 have a structure in which four columnar conductors penetrating the insulating layer 16a to 16d in the vertical direction are connected in the vertical direction. Thus, the plurality of columnar conductors v11 electrically connect the ground conductor layer 22, the ground conductor layer 24, the ground conductor layer 28, and the ground conductor layer 32.

[0083] Here, the plurality of columnar conductors v11 each include a columnar conductor v11c. The plurality of columnar conductors v11c (first columnar conductor) penetrate the insulating layer 16c located below (negative direction of the Z axis) the signal conductor layer 20 (first signal conductor layer) in the up-down direction (Z axis direction). Thus, the plurality of columnar conductors v11c (first columnar conductor) are located above (positive direction of the Z axis) the ground conductor layer 24 (first ground conductor layer). When viewed in the up-down direction (Z axis direction), the centers of the plurality of columnar conductors v11c (first columnar conductor) are located in front of (positive direction of the Y axis) the signal conductor layer 20 (first signal conductor layer), and are arranged at a given pitch P0 in the first column L1 extending in the left-right direction (X axis direction).

[0084] As described above, the plurality of columnar conductors v11c (first columnar conductors) are part of the plurality of columnar conductors v11, and are therefore electrically connected to the ground conductor layer 22 (first ground conductor layer) and the ground conductor layer 24 (fifth ground conductor layer). In addition, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v11c (first columnar conductors) are in contact with the ground conductor layer 32 (second ground conductor layer). Therefore, the plurality of columnar conductors v11c are electrically connected to the ground conductor layer 32.

[0085] Observe in the up and down direction (Z-axis direction), such as Figure 2 As shown, the centers of the plurality of columnar conductors v12 are located in front of the signal conductor layer 20 (in the positive direction of the Y axis). The centers of the plurality of columnar conductors v12 are arranged at a given pitch P0 in the second column L2 extending in the left-right direction (in the X-axis direction). The second column L2 is located behind the first column L1 (in the negative direction of the Y axis). Figure 3 As shown, the plurality of columnar conductors v12 have a structure in which four columnar conductors vertically penetrate the insulating layers 16 a to 16 d and are connected in the vertical direction. Thus, the plurality of columnar conductors v12 electrically connect the ground conductor layer 22 and the ground conductor layer 24 .

[0086] Here, the plurality of columnar conductors v12 each include a columnar conductor v12c. The plurality of columnar conductors v12c (second columnar conductor) penetrate the insulating layer 16c located below (negative direction of the Z axis) the signal conductor layer 20 (first signal conductor layer) in the up-down direction (Z axis direction). Thus, the plurality of columnar conductors v12c (first columnar conductor) are located above (positive direction of the Z axis) the ground conductor layer 24 (first ground conductor layer). When viewed in the up-down direction (Z axis direction), the centers of the plurality of columnar conductors v12c (second columnar conductor) are located in front (positive direction of the Y axis) of the signal conductor layer 20 (first signal conductor layer), and are arranged at a given pitch P0 in the second column L2 extending in the left-right direction (X axis direction).

[0087] As described above, the plurality of columnar conductors v12c (second columnar conductors) are part of the plurality of columnar conductors v12, and are therefore electrically connected to the ground conductor layer 22 (fifth ground conductor layer) and the ground conductor layer 24 (first ground conductor layer). In addition, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v12c (second columnar conductors) are in contact with the ground conductor layer 32 (second ground conductor layer). Therefore, the plurality of columnar conductors v12c are electrically connected to the ground conductor layer 32.

[0088] In addition, if Figure 2 As shown, when viewed in the up-down direction (Z-axis direction), a plurality of first X-axis positions p1 indicating the positions of the centers of the plurality of columnar conductors v11c (first columnar conductor) in the left-right direction (X-axis) and a plurality of second X-axis positions p2 indicating the positions of the centers of the plurality of columnar conductors v12c (second columnar conductor) in the left-right direction (X-axis) are alternately arranged in the left-right direction (X-axis direction). In the present embodiment, the plurality of first X-axis positions p1 and the plurality of second X-axis positions p2 are alternately arranged in the left-right direction (X-axis direction) at a pitch that is half of the given pitch P0.

[0089] In addition, the distance l1 from the center of the columnar conductor v11c (first columnar conductor) to the center of the columnar conductor v12c (second columnar conductor) closest to the columnar conductor v11c (first columnar conductor) among the plurality of columnar conductors v12c (second columnar conductor) is longer than the distance d11 in the left-right direction (Y-axis direction) between the first column L1 and the second column L2. The distance l1 from the center of the columnar conductor v11c (first columnar conductor) to the center of the columnar conductor v12c (second columnar conductor) closest to the columnar conductor v11c (first columnar conductor) among the plurality of columnar conductors v12c (second columnar conductor) is longer than the diameter r1 of the columnar conductor v11c (first columnar conductor) and the diameter r2 of the columnar conductor v12c (second columnar conductor). In the present embodiment, the diameter r2 is equal to the diameter r1.

[0090] Observe in the up and down direction (Z-axis direction), such as Figure 2 As shown, the centers of the plurality of columnar conductors v13 are located behind the signal conductor layer 20 (in the negative direction of the Y axis). The centers of the plurality of columnar conductors v13 are arranged at a given pitch P0 in the third row L3 along the left-right direction (X axis direction). Figure 3 As shown, the plurality of columnar conductors v13 have a structure in which four columnar conductors vertically penetrate the insulating layers 16a to 16d and are connected in the vertical direction. Thus, the plurality of columnar conductors v13 electrically connect the ground conductor layers 22 , 24 , 30 , and 34 .

[0091] Here, the plurality of columnar conductors v13 each include a columnar conductor v13c. The plurality of columnar conductors v13c (third columnar conductors) penetrate the insulating layer 16c located below (negative direction of the Z axis) the signal conductor layer 20 (first signal conductor layer) in the up-down direction (Z axis direction). Thus, the plurality of columnar conductors v13c (third columnar conductors) are located above (positive direction of the Z axis) the ground conductor layer 24 (first ground conductor layer). When viewed in the up-down direction (Z axis direction), the centers of the plurality of columnar conductors v13c (third columnar conductors) are located behind (negative direction of the Y axis) the signal conductor layer 20 (first signal conductor layer), and are arranged at a given pitch P0 in the third column L3 along the left-right direction (X axis direction).

[0092] As described above, the plurality of columnar conductors v13c (third columnar conductors) are part of the plurality of columnar conductors v13, and are therefore electrically connected to the ground conductor layer 22 (first ground conductor layer) and the ground conductor layer 24 (fifth ground conductor layer). In addition, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v13c (third columnar conductors) are in contact with the ground conductor layer 34. Therefore, the plurality of columnar conductors v13c are electrically connected to the ground conductor layer 34.

[0093] Observe in the up and down direction (Z-axis direction), such as Figure 2As shown, the centers of the plurality of columnar conductors v14 are located behind the signal conductor layer 20 (in the negative direction of the Y axis). The centers of the plurality of columnar conductors v14 are arranged at a given pitch P0 in the 4th column L4 extending in the left-right direction (in the X-axis direction). The 4th column L4 is located behind the 3rd column L3 (in the negative direction of the Y axis). The distance d2 in the left-right direction (in the Y-axis direction) between the 2nd column L2 and the 4th column L4 is equal to the distance d1 in the left-right direction (in the Y-axis direction) between the 1st column L1 and the 3rd column L3. Furthermore, the distance L13 in the left-right direction (in the Y-axis direction) between the signal conductor layer 20 (the 1st signal conductor layer) and the 3rd column L3 is equal to the distance L12 in the left-right direction (in the Y-axis direction) between the signal conductor layer 20 (the 1st signal conductor layer) and the 2nd column L2. The distance L14 between the signal conductor layer 20 (first signal conductor layer) and the fourth column L4 in the left-right direction (Y-axis direction) is equal to the distance L11 between the signal conductor layer 20 (first signal conductor layer) and the first column L1 in the left-right direction (Y-axis direction). Figure 3 As shown, the plurality of columnar conductors v14 have a structure in which four columnar conductors vertically penetrate the insulating layers 16 a to 16 d and are connected in the vertical direction. Thus, the plurality of columnar conductors v14 electrically connect the ground conductor layer 22 and the ground conductor layer 24 .

[0094] Here, the plurality of columnar conductors v14 each include a columnar conductor v14c. The plurality of columnar conductors v14c (the fourth columnar conductor) penetrates the insulating layer 16c located below (in the negative direction of the Z axis) the signal conductor layer 20 (the first signal conductor layer) in the up-down direction (Z axis direction). Thus, the plurality of columnar conductors v14c (the fourth columnar conductor) are located above (in the positive direction of the Z axis) the ground conductor layer 24 (the first ground conductor layer). When viewed in the up-down direction (Z axis direction), the centers of the plurality of columnar conductors v14c (the fourth columnar conductor) are located behind (in the negative direction of the Y axis) the signal conductor layer 20 (the first signal conductor layer), and are arranged at a given pitch P0 in the fourth column L4 extending in the left-right direction (X axis direction).

[0095] As described above, the plurality of columnar conductors v14c (the fourth columnar conductor) is a part of the plurality of columnar conductors v14, and is therefore electrically connected to the ground conductor layer 22 (the fifth ground conductor layer) and the ground conductor layer 24 (the first ground conductor layer). In addition, the upper ends (the ends in the positive direction of the Z axis) of the plurality of columnar conductors v14c (the fourth columnar conductor) are in contact with the ground conductor layer 34. Therefore, the plurality of columnar conductors v14c are electrically connected to the ground conductor layer 34.

[0096] In addition, if Figure 2As shown, when viewed in the up-down direction (Z-axis direction), a plurality of third X-axis positions p3 indicating the positions of the centers of the plurality of columnar conductors v13c (third columnar conductors) in the left-right direction (X-axis) and a plurality of fourth X-axis positions p4 indicating the positions of the centers of the plurality of columnar conductors v14c (fourth columnar conductors) in the left-right direction (X-axis) are alternately arranged in the X-axis direction. In the present embodiment, the plurality of third X-axis positions p3 and the plurality of fourth X-axis positions p4 are alternately arranged in the X-axis direction at a pitch that is half of the given pitch P0.

[0097] In addition, the plurality of columnar conductors v13c (third columnar conductors) overlap with the plurality of columnar conductors v11c (first columnar conductors) when viewed in the front-back direction (Y-axis direction). That is, the third X-axis position p3 coincides with the first X-axis position p1. The columnar conductor v14c (fourth columnar conductor) overlaps with the columnar conductor v12c (second columnar conductor) when viewed in the front-back direction (Y-axis direction). That is, the fourth X-axis position p4 coincides with the second X-axis position p2.

[0098] In addition, the distance l2 from the center of the columnar conductor v13c (third columnar conductor) to the center of the columnar conductor v14c (fourth columnar conductor) closest to the columnar conductor v13c (third columnar conductor) among the plurality of columnar conductors v14c (fourth columnar conductor) is longer than the distance d12 in the left-right direction (Y-axis direction) of the third column L3 and the fourth column L4. The distance l2 from the center of the columnar conductor v13c (third columnar conductor) to the center of the columnar conductor v14c (fourth columnar conductor) closest to the columnar conductor v13c (third columnar conductor) among the plurality of columnar conductors v14c (fourth columnar conductor) is longer than the diameter r3 of the columnar conductor v13c (third columnar conductor) and the diameter r4 of the columnar conductor v14c (fourth columnar conductor). In the present embodiment, the diameter r4 is equal to the diameter r3.

[0099] The ground conductor layers 22, 24, 28, 30, 32, 34 and the signal terminals 26a, 26b are formed by, for example, etching a metal foil provided on the upper main surface or the lower main surface of the insulating layers 16a to 16d. The metal foil is, for example, a copper foil.

[0100] The columnar conductors v1, v2, and v11 to v14 are, for example, via-hole conductors. The via-hole conductors are made by forming through-holes in the insulating layers 16a to 16d, filling the through-holes with a conductive paste, and sintering the conductive paste. The columnar conductors v1, v2, and v11 to v14 are made of a mixture of resin and metal.

[0101] The protective layer 18a covers the upper main surface of the laminate 12. Thus, the protective layer 18a protects the grounding conductor layer 22. However, the protective layer 18a is provided with openings h1 to h6. The opening h1 overlaps with the signal terminal 26a when viewed in the up and down direction. Thus, the signal terminal 26a is exposed to the outside from the multilayer substrate 10. The opening h2 is located before the opening h1. A portion of the grounding conductor layer 22 is exposed to the outside from the multilayer substrate 10 via the opening h2. The opening h3 is located after the opening h1. A portion of the grounding conductor layer 22 is exposed to the outside from the multilayer substrate 10 via the opening h3. Thus, a portion of the grounding conductor layer 22 functions as a grounding terminal. In addition, the structure of the openings h4 to h6 is symmetrical with the structure of the openings h1 to h3, so the description is omitted.

[0102] The protective layer 18b covers the lower main surface of the laminated body 12. Thus, the protective layer 18b protects the ground conductor layer 24. The protective layers 18a and 18b are, for example, barrier layers.

[0103] The multilayer substrate 10 as described above has flexibility. Figure 4 As shown, the multilayer substrate 10 is capable of bending. Specifically, the multilayer substrate 10 has a first section A1, a second section A2, and a third section A3. The first section A1, the second section A2, and the third section A3 are arranged in sequence from left to right when the multilayer substrate 10 is not bent. Moreover, the second section A2 is bent in a downward direction relative to the first section A1. On the other hand, the first section A1 and the third section A3 are not bent. However, the first section A1 and the third section A3 may also be slightly bent. In this case, the radius of curvature of the first section A1 and the radius of curvature of the third section A3 are larger than the radius of curvature of the second section A2. In addition, the multilayer substrate 10 may be bent by elastic deformation, may be bent by plastic deformation, or may be bent by both elastic deformation and plastic deformation.

[0104] [Effect]

[0105] According to the multilayer substrate 10, it is possible to achieve improved shielding performance. More specifically, as a method for improving the shielding performance of the transmission line described in Patent Document 1, for example, shortening the distance between the plurality of GND vias in the front-to-back direction can be cited. In this case, there arises a problem of peeling off in the insulating layer and a problem of increased difficulty in manufacturing the transmission line.

[0106] Therefore, in the multilayer substrate 10, a plurality of columnar conductors v11c and a plurality of columnar conductors v12c are arranged in a zigzag shape. Specifically, when viewed in the up-down direction, the centers of the plurality of columnar conductors v11c are arranged at a given pitch P0 in the first column L1. When viewed in the up-down direction, the centers of the plurality of columnar conductors v12c are arranged at a given pitch P0 in the second column L2. Moreover, the second column L2 is located at a position later than the first column L1. Furthermore, when viewed in the up-down direction, a plurality of first X-axis positions p1 indicating the positions of the centers of the plurality of columnar conductors v11c in the left-right direction and a plurality of second X-axis positions p2 indicating the positions of the centers of the plurality of columnar conductors v12c in the left-right direction are arranged alternately in the left-right direction. By arranging the plurality of columnar conductors v11c and the plurality of columnar conductors v12c in a zigzag shape, the distance between the columnar conductors v11c and the columnar conductors v12c in the left-right direction can be shortened without shortening the distance l1 from the center of the columnar conductor v11c to the center of the columnar conductor v12c. As a result, noise becomes easy to pass between the columnar conductor v11c and the columnar conductor v12c. Therefore, according to the multilayer substrate 10, it is possible to achieve improved shielding. Furthermore, since the distance l1 from the center of the columnar conductor v11c to the center of the columnar conductor v12c does not need to be shortened, it is possible to suppress the peeling of the insulating layers 16a to 16d, and the difficulty of manufacturing the multilayer substrate 10 is not likely to increase.

[0107] In the multilayer substrate 10, the plurality of columnar conductors v13c and the plurality of columnar conductors v14c are arranged in a zigzag shape similarly to the plurality of columnar conductors v11c and the plurality of columnar conductors v12c. Thus, according to the multilayer substrate 10, it is possible to achieve improved shielding. Furthermore, it is possible to suppress peeling in the insulating layers 16a to 16d, and the difficulty of manufacturing the multilayer substrate 10 is not likely to increase.

[0108] In the multilayer substrate 10, the characteristic impedance generated in the signal conductor layer 20 can be suppressed from deviating from a given characteristic impedance. In more detail, the columnar conductor v11c is located in front of the columnar conductor v12c. The columnar conductor v13c is located in front of the columnar conductor v14c. Moreover, the columnar conductor v13c overlaps with the columnar conductor v11c when viewed in the left-right direction. The columnar conductor v14c overlaps with the columnar conductor v12c when viewed in the left-right direction. Therefore, the distance between the columnar conductor v11c and the columnar conductor v13c, and the distance between the columnar conductor v12c and the columnar conductor v14c take close values. As a result, the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v11c and the capacitance generated between the signal conductor layer 20 and the columnar conductor v13c, and the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v12c and the capacitance generated between the signal conductor layer 20 and the columnar conductor v14c take close values. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided and the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided take close values. Therefore, in the multilayer substrate 10, the characteristic impedance generated in the signal conductor layer 20 can be suppressed from deviating from a given characteristic impedance (for example, 50Ω).

[0109] In particular, in the multilayer substrate 10, the distance d2 between the second column L2 and the fourth column L4 in the left-right direction is equal to the distance d1 between the first column L1 and the third column L3 in the left-right direction. The sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v11c and the capacitance generated between the signal conductor layer 20 and the columnar conductor v13c, and the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v12c and the capacitance generated between the signal conductor layer 20 and the columnar conductor v14c take closer values. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided and the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided take closer values. Therefore, in the multilayer substrate 10, the characteristic impedance generated in the signal conductor layer 20 can be effectively suppressed from deviating from the given characteristic impedance.

[0110] In the multilayer substrate 10, the distance L13 between the signal conductor layer 20 (the first signal conductor layer) and the third column L3 in the left-right direction (Y-axis direction) is equal to the distance L12 between the signal conductor layer 20 (the first signal conductor layer) and the second column L2 in the left-right direction (Y-axis direction). The distance L14 between the signal conductor layer 20 (the first signal conductor layer) and the fourth column L4 in the left-right direction (Y-axis direction) is equal to the distance L11 between the signal conductor layer 20 (the first signal conductor layer) and the first column L1 in the left-right direction (Y-axis direction). As a result, the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v11c and the capacitance generated between the signal conductor layer 20 and the columnar conductor v13c, and the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v12c and the capacitance generated between the signal conductor layer 20 and the columnar conductor v14c become equal. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided becomes equal to the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided. Therefore, in the multilayer substrate 10, the characteristic impedance generated in the signal conductor layer 20 can be suppressed from deviating from a given characteristic impedance.

[0111] In the multi-layer substrate 10 , the signal conductor layer 20 has a linear shape. This shortens the length of the signal conductor layer 20 , thereby reducing the DC resistance value of the signal conductor layer 20 .

[0112] (First Modification)

[0113] Hereinafter, a multilayer substrate 10a according to a first modification will be described with reference to the drawings. Figure 5 It is a plan view of the insulating layer 16c of the multi-layer substrate 10a.

[0114] The multilayer substrate 10a is different from the multilayer substrate 10 in that the signal conductor layer 20 meanders. The period of the meandering is a given pitch P0. As a result, the distance L111 from the signal conductor layer 20 to the columnar conductor v11c and the distance L113 from the signal conductor layer 20 to the columnar conductor v13c become equal. The distance L112 from the signal conductor layer 20 to the columnar conductor v12c and the distance L114 from the signal conductor layer 20 to the columnar conductor v14c become equal. As a result, the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v11c and the capacitance generated between the signal conductor layer 20 and the columnar conductor v13c, and the sum of the capacitance generated between the signal conductor layer 20 and the columnar conductor v12c and the capacitance generated between the signal conductor layer 20 and the columnar conductor v14c become equal. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided becomes equal to the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided. Therefore, in the multilayer substrate 10a, the characteristic impedance generated in the signal conductor layer 20 can be suppressed from deviating from the given characteristic impedance. In addition, the other structures of the multilayer substrate 10a are the same as those of the multilayer substrate 10, and therefore the description thereof is omitted.

[0115] (Second Modification)

[0116] Hereinafter, a multilayer substrate 10b according to a second modification will be described with reference to the drawings. Figure 6 It is a plan view of the insulating layer 16c of the multi-layer substrate 10b.

[0117] The multilayer substrate 10b is different from the multilayer substrate 10 in that the plurality of columnar conductors v13c do not overlap with the plurality of columnar conductors v11c when viewed in the front-to-back direction, and the columnar conductor v14c does not overlap with the columnar conductor v12c when viewed in the left-right direction. That is, the third X-axis position p3 does not coincide with the first X-axis position p1. The fourth X-axis position p4 does not coincide with the second X-axis position p2.

[0118] However, the third X-axis position p3 cannot deviate greatly from the first X-axis position p1 in the left-right direction. Therefore, the distance D1 from the third X-axis position p3 to the first X-axis position p1 closest to the third X-axis position p3 among the plurality of first X-axis positions p1 is shorter than the distance D2 from the third X-axis position p3 to the second X-axis position p2 closest to the third X-axis position p3 among the plurality of second X-axis positions p2. In the present embodiment, the distance D1 from the third X-axis position p3 to the first X-axis position p1 closest to the third X-axis position p3 among the plurality of first X-axis positions p1 is less than 1 / 4 of the given pitch P0. Furthermore, a distance D1 from the 3rd X-axis position p3 to the 1st X-axis position p1 closest to the 3rd X-axis position p3 among the multiple first X-axis positions p1 is less than half of a distance D11 in the X-axis direction from the columnar conductor v13c (3rd columnar conductor) to the columnar conductor v14c (4th columnar conductor) closest to the columnar conductor v13c (3rd columnar conductor) among the multiple columnar conductors v14c (4th columnar conductor).

[0119] Similarly, the 4th X-axis position p4 cannot deviate greatly from the 2nd X-axis position p2 in the left-right direction. Therefore, the distance D3 from the 4th X-axis position p4 to the 2nd X-axis position p2 closest to the 4th X-axis position p4 among the plurality of 2nd X-axis positions p2 is shorter than the distance D4 from the 4th X-axis position p4 to the 1st X-axis position p1 closest to the 4th X-axis position p4 among the plurality of 1st X-axis positions p1. In the present embodiment, the distance D3 from the 4th X-axis position p4 to the 2nd X-axis position p2 closest to the 4th X-axis position p4 among the plurality of 2nd X-axis positions p2 is less than 1 / 4 of the given pitch P0. Furthermore, a distance D3 from the 4th X-axis position p4 to the 2nd X-axis position p2 closest to the 4th X-axis position p4 among the multiple second X-axis positions p2 is less than half of a distance D11 in the left-right direction (X-axis direction) from the columnar conductor v13c (3rd columnar conductor) to the columnar conductor v14c (4th columnar conductor) closest to the columnar conductor v13c (3rd columnar conductor) among the multiple columnar conductors v14c (4th columnar conductor).

[0120] According to the multilayer substrate 10b, the deviation of the third X-axis position p3 relative to the first X-axis position p1 is limited. As a result, the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v11c and v13c are provided and the characteristic impedance generated in the signal conductor layer 20 in the section where the columnar conductors v12c and v14c are provided take close values. Therefore, in the multilayer substrate 10b, the characteristic impedance generated in the signal conductor layer 20 can be suppressed from deviating from the given characteristic impedance. The other structures of the multilayer substrate 10b are the same as those of the multilayer substrate 10.

[0121] (Third Modification)

[0122] Hereinafter, a multilayer substrate 10c according to a third modification will be described with reference to the drawings. Figure 7 It is a plan view of the insulating layer 16c of the multilayer substrate 10c.

[0123] The multilayer substrate 10c is different from the multilayer substrate 10 in that the diameter r1 of the columnar conductor v11c (first columnar conductor) is larger than the diameter r2 of the columnar conductor v12c (second columnar conductor), and the diameter r4 of the columnar conductor v14c (fourth columnar conductor) is larger than the diameter r3 of the columnar conductor v13c (third columnar conductor). That is, the diameter of the columnar conductor v11c located at a position far from the signal conductor layer 20 among the columnar conductors v11c and v12c is larger. The diameter of the columnar conductor v14c located at a position far from the signal conductor layer 20 among the columnar conductors v13c and v14c is larger. As a result, it is possible to achieve an improvement in shielding performance while suppressing an increase in capacitance generated between the signal conductor layer 20 and the columnar conductors v11c to v14c. The other structures of the multilayer substrate 10c are the same as those of the multilayer substrate 10, and therefore description thereof is omitted.

[0124] (Fourth Modification)

[0125] Hereinafter, a multilayer substrate 10d according to a fourth modification will be described with reference to the drawings. Figure 8 It is a plan view of the insulating layer 16c of the multi-layer substrate 10d.

[0126] The multilayer substrate 10d is different from the multilayer substrate 10 in that, when viewed in the front-to-back direction (Y-axis direction), a portion of the columnar conductor v12c (second columnar conductor) overlaps a portion of the columnar conductor v11c (first columnar conductor), and when viewed in the front-to-back direction (Y-axis direction), a portion of the columnar conductor v14c (fourth columnar conductor) overlaps a portion of the columnar conductor v13c (third columnar conductor). As a result, in the multilayer substrate 10d, shielding properties can be improved. In addition, the other structures of the multilayer substrate 10d are the same as those of the multilayer substrate 10, so the description is omitted.

[0127] (Fifth Modification)

[0128] Hereinafter, a multilayer substrate 10e according to a fifth modification will be described with reference to the drawings. Fig. 9 It is a plan view of the insulating layer 16c of the multi-layer substrate 10e.

[0129] The multilayer substrate 10e is different from the multilayer substrate 10 in the shape of the ground conductor layers 32 and 34. More specifically, the distance D111 between the ground conductor layer 32 (second ground conductor layer) and the signal conductor layer 20 (first signal conductor layer) in the front-to-back direction (Y-axis direction) at the first X-axis position p1 is longer than the distance D112 between the ground conductor layer 32 (second ground conductor layer) and the signal conductor layer 20 (first signal conductor layer) in the front-to-back direction (Y-axis direction) at the second X-axis position p2. In addition, the distance D114 between the ground conductor layer 34 and the signal conductor layer 20 in the front-to-back direction at the fourth X-axis position p4 is longer than the distance D113 between the ground conductor layer 34 and the signal conductor layer 20 in the front-to-back direction at the third X-axis position p3. As a result, the capacitance generated between the signal conductor layer 20 and the ground conductor layers 32 and 34 can be reduced. In addition, the other structures of the multilayer substrate 10e are the same as those of the multilayer substrate 10, and thus the description thereof is omitted. Furthermore, the ground conductor layers 28 and 30 may have the same shape as that of the ground conductor layers 32 and 34 .

[0130] (Sixth Modification)

[0131] Hereinafter, a multilayer substrate 10f according to a sixth modification will be described with reference to the drawings. Fig.10 It is a plan view of the insulating layer 16c of the multilayer substrate 10f.

[0132] The multilayer substrate 10f is different from the multilayer substrate 10 in that it includes a plurality of ground conductor layers 32a, a plurality of ground conductor layers 32b, a plurality of ground conductor layers 34a, and a plurality of ground conductor layers 34b instead of the ground conductor layers 32 and 34. The plurality of ground conductor layers 32a (third ground conductor layers) are in contact with the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v11c (first columnar conductors). The plurality of ground conductor layers 32a are not in contact with each other. The plurality of ground conductor layers 32b (fourth ground conductor layers) are in contact with the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v12c (second columnar conductors). The plurality of ground conductor layers 32b are not in contact with each other.

[0133] In addition, a plurality of grounding conductor layers 34a are respectively connected to the upper ends of a plurality of columnar conductors v13c. A plurality of grounding conductor layers 34a are not connected to each other. A plurality of grounding conductor layers 34b are respectively connected to the upper ends of a plurality of columnar conductors v14c. A plurality of grounding conductor layers 34b are not connected to each other. The areas of the grounding conductor layers 32a, 32b, 34a, 34b are smaller than the areas of the grounding conductor layers 32, 24. Therefore, according to the multilayer substrate 10f, the capacitance generated between the signal conductor layer 20 and the grounding conductor layers 32a, 32b, 34a, 34b can be reduced. In addition, the other structures of the multilayer substrate 10f are the same as those of the multilayer substrate 10, so the description is omitted. In addition, the multilayer substrate 10f can also have grounding conductor layers 28a, 28b, 30a, 30b having the same shape as the grounding conductor layers 32a, 32b, 34a, 34b.

[0134] (Seventh Modification)

[0135] Hereinafter, a multilayer substrate 10g according to a seventh modification will be described with reference to the drawings. Fig.11 It is a plan view of the insulating layer 16c of the multi-layer substrate 10g.

[0136] The multilayer substrate 10g is different from the multilayer substrate 10 in that it further includes a signal conductor layer 21, columnar conductors v15 and v16, and a ground conductor layer 36. The signal conductor layer 21 (second signal conductor layer) is provided in the laminate 12. The signal conductor layer 21 (second signal conductor layer) is located behind the third column L3 and the fourth column L4 (negative direction of the Y axis), and has a linear shape parallel to the signal conductor layer 20 (first signal conductor layer) when viewed from the top and bottom direction (Z axis direction). The ground conductor layer 24 (first ground conductor layer) is provided in the laminate 12. Fig.11 The signal conductor layer 21 (not shown) overlaps with the signal conductor layer 21 (second signal conductor layer) when viewed in the up-down direction (Z-axis direction).

[0137] When viewed in the vertical direction (Z-axis direction), the center of the plurality of columnar conductors v15 is located behind the signal conductor layer 21. The centers of the plurality of columnar conductors v15 are arranged at a given pitch P0 in the fifth column L5 along the left-right direction. The plurality of columnar conductors v15 have a structure in which four columnar conductors penetrating the insulating layer 15a to 15d in the vertical direction are connected in the vertical direction. Thus, the plurality of columnar conductors v15 electrically connect the ground conductor layer 22, the ground conductor layer 24, and the ground conductor layer 36.

[0138] The ground conductor layer 36 is provided in the laminated body 12. The ground conductor layer 36 is located on the upper main surface of the insulating layer 16c. The ground conductor layer 36 is located behind the signal conductor layer 21. The ground conductor layer 36 has a linear shape extending in the left-right direction.

[0139] Here, the plurality of columnar conductors v15 each include a columnar conductor v15c. The plurality of columnar conductors v15c (fifth columnar conductor) penetrates the insulating layer 16c located below (negative direction of the Z axis) the signal conductor layer 21 (second signal conductor layer) in the up-down direction (Z axis direction). Thus, the plurality of columnar conductors v15c (fifth columnar conductor) are located above (positive direction of the Z axis) the ground conductor layer 24 (first ground conductor layer). When viewed in the up-down direction (Z axis direction), the centers of the plurality of columnar conductors v15c (fifth columnar conductor) are located behind (negative direction of the Y axis) the signal conductor layer 21 (second signal conductor layer), and are arranged at a given pitch P0 in the fifth column L5 along the left-right direction (X axis direction).

[0140] As described above, the plurality of columnar conductors v15c (fifth columnar conductors) are part of the plurality of columnar conductors v15, and are therefore electrically connected to the ground conductor layer 22 (first ground conductor layer) and the ground conductor layer 24 (fifth ground conductor layer). In addition, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v15c (fifth columnar conductors) are in contact with the ground conductor layer 36. Therefore, the plurality of columnar conductors v15c are electrically connected to the ground conductor layer 36.

[0141] When viewed in the up-down direction (Z-axis direction), the center of the plurality of columnar conductors v16 is located behind the signal conductor layer 21 (in the negative direction of the Y-axis). The centers of the plurality of columnar conductors v16 are arranged at a given pitch P0 in the 6th column L6 extending in the left-right direction (X-axis direction). The 6th column L6 is located behind the 5th column L5 (in the negative direction of the Y-axis). The plurality of columnar conductors v16 have a structure in which four columnar conductors that penetrate the insulating layer 16a to 16d in the up-down direction are connected in the up-down direction. Thus, the plurality of columnar conductors v16 electrically connect the grounding conductor layer 22 and the grounding conductor layer 24.

[0142] Here, the plurality of columnar conductors v16 each include a columnar conductor v16c. The plurality of columnar conductors v16c (the sixth columnar conductor) penetrates the insulating layer 16c located below (in the negative direction of the Z axis) the signal conductor layer 21 (the second signal conductor layer) in the up-down direction (Z axis direction). Thus, the plurality of columnar conductors v16c (the sixth columnar conductor) are located above (in the positive direction of the Z axis) the ground conductor layer 24 (the first ground conductor layer). When viewed in the up-down direction (Z axis direction), the centers of the plurality of columnar conductors v16c (the sixth columnar conductor) are located behind (in the negative direction of the Y axis) the signal conductor layer 21 (the second signal conductor layer), and are arranged at a given pitch P0 in the sixth column L6 extending in the left-right direction (X axis direction).

[0143] As described above, the plurality of columnar conductors v16c (sixth columnar conductors) are part of the plurality of columnar conductors v16, and are therefore electrically connected to the ground conductor layer 22 (fifth ground conductor layer) and the ground conductor layer 24 (first ground conductor layer). In addition, the upper ends (ends in the positive direction of the Z axis) of the plurality of columnar conductors v16c (sixth columnar conductors) are in contact with the ground conductor layer 36. Therefore, the plurality of columnar conductors v16c are electrically connected to the ground conductor layer 36.

[0144] In addition, when viewed in the up-down direction (Z-axis direction), a plurality of fifth X-axis positions p5 indicating the positions of the centers of the plurality of columnar conductors v15c (fifth columnar conductors) in the left-right direction (X-axis) and a plurality of sixth X-axis positions p6 indicating the positions of the centers of the plurality of columnar conductors v16c (sixth columnar conductors) in the left-right direction (X-axis) are alternately arranged in the X-axis direction. In the present embodiment, the plurality of fifth X-axis positions p5 and the plurality of sixth X-axis positions p6 are alternately arranged in the X-axis direction at a pitch that is half the given pitch P0.

[0145] In addition, the plurality of columnar conductors v15c (fifth columnar conductors) overlap with the plurality of columnar conductors v13c (third columnar conductors) when viewed in the front-back direction (Y-axis direction). That is, the fifth X-axis position p5 coincides with the third X-axis position p3. The columnar conductor v16c (sixth columnar conductor) overlaps with the columnar conductor v14c (fourth columnar conductor) when viewed in the left-right direction (Y-axis direction). That is, the sixth X-axis position p6 coincides with the fourth X-axis position p4.

[0146] In addition, the 5th X-axis position p5 may not coincide with the 3rd X-axis position p3. However, the 5th X-axis position p5 cannot deviate greatly in the left-right direction relative to the 3rd X-axis position p3. Therefore, the distance from the 5th X-axis position p5 to the 3rd X-axis position p3 closest to the 5th X-axis position p5 among the plurality of 3rd X-axis positions p3 is shorter than the distance from the 5th X-axis position p5 to the 4th X-axis position p4 closest to the 5th X-axis position p5 among the plurality of 4th X-axis positions p4.

[0147] In addition, the 6th X-axis position p6 may not coincide with the 4th X-axis position p4. However, the 6th X-axis position p6 cannot deviate significantly in the left-right direction relative to the 4th X-axis position p4. Therefore, the distance from the 6th X-axis position p6 to the 4th X-axis position p4 closest to the 6th X-axis position p6 among the plurality of 4th X-axis positions p4 is shorter than the distance from the 6th X-axis position p6 to the 3rd X-axis position p3 closest to the 6th X-axis position p6 among the plurality of 3rd X-axis positions p3. The other structures of the multilayer substrate 10g are the same as those of the multilayer substrate 10, and thus the description thereof is omitted.

[0148] (Eighth Modification)

[0149] Hereinafter, a multilayer substrate 10h according to an eighth modification will be described with reference to the drawings. Fig.12 is an exploded view of the multilayer substrate 10h. Fig.12 In the embodiment, the protective layers 18a and 18b are omitted. Fig.13 is a cross-sectional view of the multi-layer substrate 10h.

[0150] The multilayer substrate 10h is different from the multilayer substrate 10 in the structure of the columnar conductors v11 to v14. The columnar conductors v11 to v14 have a zigzag shape when viewed in the left-right direction.

[0151] The plurality of columnar conductors v11 include columnar conductors v11a to v11d, respectively. The columnar conductors v11a to v11d penetrate the insulating layers 16a to 16d in the up-down direction, respectively. The plurality of columnar conductors v11a, the plurality of columnar conductors v11c, and the plurality of columnar conductors v11d are arranged at a given pitch P0 in the first column L1. The plurality of columnar conductors v11b are arranged at a given pitch P0 in the second column L2. The plurality of columnar conductors v11a, the plurality of columnar conductors v11b, the plurality of columnar conductors v11c, and the plurality of columnar conductors v11d are respectively located at the first X-axis position p1.

[0152] The plurality of columnar conductors v12 respectively include columnar conductors v12a to v12d. The columnar conductors v12a to v12d respectively penetrate the insulating layers 16a to 16d in the up-down direction. The plurality of columnar conductors v12a, the plurality of columnar conductors v12c, and the plurality of columnar conductors v12d are arranged at a given pitch P0 in the second column L2. The plurality of columnar conductors v12b are arranged at a given pitch P0 in the first column L1. The plurality of columnar conductors v12a, the plurality of columnar conductors v12b, the plurality of columnar conductors v12c, and the plurality of columnar conductors v12d are respectively located at the second X-axis position p2.

[0153] The plurality of columnar conductors v13 include columnar conductors v13a to v13d, respectively. The columnar conductors v13a to v13d penetrate the insulating layers 16a to 16d in the up-down direction, respectively. The plurality of columnar conductors v13a, the plurality of columnar conductors v13c, and the plurality of columnar conductors v13d are arranged at a given pitch P0 in the third column L3. The plurality of columnar conductors v13b are arranged at a given pitch P0 in the fourth column L4. The plurality of columnar conductors v13a, the plurality of columnar conductors v13b, the plurality of columnar conductors v13c, and the plurality of columnar conductors v13d are respectively located at the third X-axis position p3.

[0154] The plurality of columnar conductors v14 include columnar conductors v14a to v14d, respectively. The columnar conductors v14a to v14d penetrate the insulating layers 16a to 16d in the up and down directions, respectively. The plurality of columnar conductors v14a, the plurality of columnar conductors v14c, and the plurality of columnar conductors v14d are arranged at a given pitch P0 in the 4th column L4. The plurality of columnar conductors v14b are arranged at a given pitch P0 in the 3rd column L3. The plurality of columnar conductors v14a, the plurality of columnar conductors v14b, the plurality of columnar conductors v14c, and the plurality of columnar conductors v14d are respectively located at the 4th X-axis position p4. The other structures of the multilayer substrate 10h are the same as those of the multilayer substrate 10, and therefore the description thereof is omitted.

[0155] (9th Modification)

[0156] Hereinafter, a multilayer substrate 10i according to a ninth modification will be described with reference to the drawings. Fig.14 It is an exploded perspective view of the multi-layer substrate 10i.

[0157] The multilayer substrate 10i differs from the multilayer substrate 10 in that it does not include the ground conductor layer 22. In the multilayer substrate 10i, the signal conductor layer 20 and the ground conductor layer 24 have a microstrip line structure. The other structures of the multilayer substrate 10i are the same as those of the multilayer substrate 10, and thus description thereof is omitted.

[0158] (Other Embodiments)

[0159] The multilayer substrate of the present invention is not limited to the multilayer substrates 10 and 10a to 10i, and can be modified within the scope of the gist thereof. In addition, the structures of the multilayer substrates 10 and 10a to 10i can be arbitrarily combined.

[0160] In addition, the protective layers 18a and 18b are not essential components. In addition, either the protective layer 18a or the protective layer 18b may be provided.

[0161] In addition, the ground conductor layers 28 , 30 , 32 , and 34 are not essential components.

[0162] In addition, the distance d12 between the second row L2 and the fourth row L4 in the front-rear direction may be equal to the distance d11 between the first row L1 and the third row L3 in the front-rear direction.

[0163] In addition, the diameter r1 of the columnar conductor v11c may be smaller than the diameter r2 of the columnar conductor v12c. The diameter r4 of the columnar conductor v14c may be smaller than the diameter r3 of the columnar conductor v13c.

[0164] The utility model of the present application has the following structure.

[0165] (1) A multi-layer substrate comprising:

[0166] A laminate having a structure in which a plurality of insulating layers are laminated in the Z-axis direction;

[0167] a first signal conductor layer provided in the laminate and having a linear shape when viewed in the Z-axis direction;

[0168] a first ground conductor layer located closer to the first signal conductor layer in the negative direction of the Z axis and overlapping the first signal conductor layer when viewed in the Z axis direction; and

[0169] a plurality of first columnar conductors, a plurality of second columnar conductors, a plurality of third columnar conductors, and a plurality of fourth columnar conductors, which penetrate the insulating layer located closer to the negative direction of the Z axis than the first signal conductor layer in the Z axis direction, and are located closer to the positive direction of the Z axis than the first ground conductor layer.

[0170] The direction in which the first signal conductor layer extends is defined as an X-axis direction.

[0171] A direction perpendicular to the X-axis direction and the Z-axis direction is defined as a Y-axis direction,

[0172] The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the first ground conductor layer.

[0173] When viewed in the Z-axis direction, the centers of the plurality of first columnar conductors are located closer to the positive direction of the Y-axis than the first signal conductor layer, and the plurality of first columnar conductors are arranged at a given pitch in a first column extending along the X-axis direction.

[0174] When viewed in the Z-axis direction, the centers of the plurality of second columnar conductors are located closer to the positive direction of the Y-axis than the first signal conductor layer, and the plurality of second columnar conductors are arranged at the given pitch in a second row extending along the X-axis direction.

[0175] When viewed in the Z-axis direction, the centers of the plurality of third columnar conductors are located closer to the negative direction of the Y-axis than the first signal conductor layer, and the plurality of third columnar conductors are arranged at the given pitch in a third row extending along the X-axis direction.

[0176] When viewed in the Z-axis direction, the centers of the plurality of fourth columnar conductors are located closer to the negative direction of the Y-axis than the first signal conductor layer, and the plurality of fourth columnar conductors are arranged at the given pitch in a fourth column extending along the X-axis direction.

[0177] The second column is located closer to the negative direction of the Y axis than the first column.

[0178] The fourth column is located closer to the negative direction of the Y axis than the third column.

[0179] When viewed in the Z-axis direction, a plurality of first X-axis positions indicating positions of centers of the plurality of first columnar conductors on the X-axis and a plurality of second X-axis positions indicating positions of centers of the plurality of second columnar conductors on the X-axis are alternately arranged in the X-axis direction,

[0180] When viewed in the Z-axis direction, a plurality of third X-axis positions indicating positions of centers of the plurality of third columnar conductors on the X-axis and a fourth X-axis position indicating positions of centers of the plurality of fourth columnar conductors on the X-axis are alternately arranged in the X-axis direction,

[0181] a distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is shorter than a distance from the third X-axis position to the second X-axis position closest to the third X-axis position among the plurality of second X-axis positions,

[0182] A distance from the 4th X-axis position to the 2nd X-axis position closest to the 4th X-axis position among the plurality of 2nd X-axis positions is shorter than a distance from the 4th X-axis position to the 1st X-axis position closest to the 4th X-axis position among the plurality of 1st X-axis positions.

[0183] (2) The multilayer substrate according to (1), wherein

[0184] The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is less than 1 / 4 of the given spacing,

[0185] A distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is less than 1 / 4 of the given pitch.

[0186] (3) The multilayer substrate according to (1), wherein

[0187] a distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions being less than half of a distance in the X-axis direction from the third columnar conductor to the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors,

[0188] A distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is less than half of a distance in the X-axis direction from the third columnar conductor to the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors.

[0189] (4) The multilayer substrate according to (1), wherein

[0190] The third columnar conductor overlaps with the first columnar conductor when viewed in the Y-axis direction.

[0191] The fourth columnar conductor overlaps the second columnar conductor when viewed in the Y-axis direction.

[0192] (5) The multilayer substrate according to any one of (1) to (4), wherein

[0193] A distance between the second column and the fourth column in the Y-axis direction is equal to a distance between the first column and the third column in the Y-axis direction.

[0194] (6) The multilayer substrate according to any one of (1) to (5), wherein

[0195] A distance from the center of the first columnar conductor to the center of the second columnar conductor closest to the first columnar conductor among the plurality of second columnar conductors is longer than a distance between the first column and the second column in the Y-axis direction.

[0196] A distance from the center of the third columnar conductor to a center of the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors is longer than a distance between the third column and the fourth column in the Y-axis direction.

[0197] (7) The multilayer substrate according to any one of (1) to (6), wherein

[0198] A distance from the center of the first columnar conductor to the center of the second columnar conductor closest to the first columnar conductor among the plurality of second columnar conductors is longer than a diameter of the first columnar conductor and a diameter of the second columnar conductor.

[0199] A distance from the center of the third columnar conductor to the center of the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors is longer than a diameter of the third columnar conductor and a diameter of the fourth columnar conductor.

[0200] (8) The multilayer substrate according to any one of (1) to (7), wherein

[0201] The diameter of the first columnar conductor is larger than the diameter of the second columnar conductor.

[0202] The diameter of the fourth columnar conductor is larger than the diameter of the third columnar conductor.

[0203] (9) The multilayer substrate according to any one of (1) to (8), wherein

[0204] When viewed in the Y-axis direction, a portion of the second columnar conductor overlaps a portion of the first columnar conductor.

[0205] When viewed in the Y-axis direction, a portion of the fourth columnar conductor overlaps a portion of the third columnar conductor.

[0206] (10) The multilayer substrate according to any one of (1) to (9), wherein

[0207] The multilayer substrate further comprises a second ground conductor layer.

[0208] Ends of the plurality of first columnar conductors in the positive direction of the Z axis and ends of the plurality of second columnar conductors in the positive direction of the Z axis are in contact with the second ground conductor layer.

[0209] (11) The multilayer substrate according to (10), wherein

[0210] A distance between the second ground conductor layer and the first signal conductor layer in the Y-axis direction at the first X-axis position is longer than a distance between the second ground conductor layer and the first signal conductor layer in the Y-axis direction at the second X-axis position.

[0211] (12) The multilayer substrate according to any one of (1) to (11), wherein

[0212] The multi-layer substrate further comprises:

[0213] a plurality of third ground conductor layers respectively connected to the ends of the plurality of first columnar conductors in the positive direction of the Z axis; and

[0214] The plurality of fourth ground conductor layers are in contact with the ends of the plurality of second columnar conductors in the positive direction of the Z axis, respectively.

[0215] (13) The multilayer substrate according to any one of (1) to (12), wherein

[0216] The multi-layer substrate further comprises:

[0217] The fifth ground conductor layer is located closer to the first signal conductor layer in the positive direction of the Z axis than the first signal conductor layer, and overlaps with the first signal conductor layer when viewed in the Z axis direction.

[0218] The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the fifth ground conductor layer.

[0219] (14) The multilayer substrate according to any one of (1) to (13), wherein

[0220] The distance between the first signal conductor layer and the third column in the Y-axis direction is equal to the distance between the first signal conductor layer and the second column in the Y-axis direction.

[0221] A distance between the first signal conductor layer and the fourth column in the Y-axis direction is equal to a distance between the first signal conductor layer and the first column in the Y-axis direction.

[0222] (15) The multilayer substrate according to (14), wherein

[0223] The first signal conductor layer has a linear shape.

[0224] (16) The multilayer substrate according to any one of (1) to (15), wherein

[0225] The multi-layer substrate further comprises:

[0226] a second signal conductor layer provided in the laminate and located closer to the negative direction of the Y axis than the third column and the fourth column, and having a line shape parallel to the first signal conductor layer when viewed from the Z axis direction; and

[0227] a plurality of fifth columnar conductors and a plurality of sixth columnar conductors which penetrate the insulating layer located closer to the negative direction of the Z axis than the second signal conductor layer in the Z axis direction, and are located closer to the positive direction of the Z axis than the first ground conductor layer.

[0228] The first ground conductor layer overlaps with the second signal conductor layer when viewed in the Z-axis direction.

[0229] The plurality of fifth columnar conductors and the plurality of sixth columnar conductors are electrically connected to the first ground conductor layer.

[0230] When viewed in the Z-axis direction, the centers of the plurality of fifth columnar conductors are located closer to the negative direction of the Y-axis than the second signal conductor layer, and the plurality of fifth columnar conductors are arranged at the given pitch in a fifth row extending along the X-axis direction.

[0231] When viewed in the Z-axis direction, the centers of the plurality of sixth columnar conductors are located closer to the negative direction of the Y-axis than the second signal conductor layer, and the plurality of sixth columnar conductors are arranged at the given pitch in a sixth column extending in the X-axis direction.

[0232] The sixth column is located closer to the negative direction of the Y axis than the fifth column.

[0233] When viewed in the Z-axis direction, a plurality of fifth X-axis positions indicating positions of centers of the plurality of fifth columnar conductors on the X-axis and a plurality of sixth X-axis positions indicating positions of centers of the plurality of sixth columnar conductors on the X-axis are alternately arranged in the X-axis direction.

[0234] A distance from the fifth X-axis position to the third X-axis position closest to the fifth X-axis position among the plurality of third X-axis positions is shorter than a distance from the fifth X-axis position to the fourth X-axis position closest to the fifth X-axis position among the plurality of fourth X-axis positions.

[0235] A distance from the 6th X-axis position to the 4th X-axis position closest to the 6th X-axis position among the plurality of 4th X-axis positions is shorter than a distance from the 6th X-axis position to the 3rd X-axis position closest to the 6th X-axis position among the plurality of 3rd X-axis positions.

[0236] (17) The multilayer substrate according to any one of (1) to (16), wherein

[0237] The plurality of first X-axis positions and the plurality of second X-axis positions are alternately arranged at a pitch that is half the given pitch in the X-axis direction.

Claims

1. A multi-layer substrate, It is characterized in that have: A laminate having a structure in which a plurality of insulating layers are laminated in the Z-axis direction; a first signal conductor layer provided in the laminate and having a linear shape when viewed in the Z-axis direction; a first ground conductor layer located closer to the first signal conductor layer in the negative direction of the Z axis than the first signal conductor layer, and overlapping the first signal conductor layer when viewed in the Z axis direction; and a plurality of first columnar conductors, a plurality of second columnar conductors, a plurality of third columnar conductors, and a plurality of fourth columnar conductors, which penetrate the insulating layer located closer to the negative direction of the Z axis than the first signal conductor layer in the Z axis direction, and are located closer to the positive direction of the Z axis than the first ground conductor layer. The direction in which the first signal conductor layer extends is defined as an X-axis direction. A direction perpendicular to the X-axis direction and the Z-axis direction is defined as a Y-axis direction, The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the first ground conductor layer. When viewed in the Z-axis direction, the centers of the plurality of first columnar conductors are located closer to the positive direction of the Y-axis than the first signal conductor layer, and the plurality of first columnar conductors are arranged at a given pitch in a first column extending along the X-axis direction. When viewed in the Z-axis direction, the centers of the plurality of second columnar conductors are located closer to the positive direction of the Y-axis than the first signal conductor layer, and the plurality of second columnar conductors are arranged at the given pitch in a second row extending along the X-axis direction. When viewed in the Z-axis direction, the centers of the plurality of third columnar conductors are located closer to the negative direction of the Y-axis than the first signal conductor layer, and the plurality of third columnar conductors are arranged at the given pitch in a third row extending along the X-axis direction. When viewed in the Z-axis direction, the centers of the plurality of fourth columnar conductors are located closer to the negative direction of the Y-axis than the first signal conductor layer, and the plurality of fourth columnar conductors are arranged at the given pitch in a fourth column extending along the X-axis direction. The second column is located closer to the negative direction of the Y axis than the first column. The fourth column is located closer to the negative direction of the Y axis than the third column. When viewed in the Z-axis direction, a plurality of first X-axis positions indicating positions of centers of the plurality of first columnar conductors on the X-axis and a plurality of second X-axis positions indicating positions of centers of the plurality of second columnar conductors on the X-axis are alternately arranged in the X-axis direction, When viewed in the Z-axis direction, a plurality of third X-axis positions indicating positions of centers of the plurality of third columnar conductors on the X-axis and a fourth X-axis position indicating positions of centers of the plurality of fourth columnar conductors on the X-axis are alternately arranged in the X-axis direction, a distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is shorter than a distance from the third X-axis position to the second X-axis position closest to the third X-axis position among the plurality of second X-axis positions, A distance from the 4th X-axis position to the 2nd X-axis position closest to the 4th X-axis position among the plurality of 2nd X-axis positions is shorter than a distance from the 4th X-axis position to the 1st X-axis position closest to the 4th X-axis position among the plurality of 1st X-axis positions.

2. The multilayer substrate according to claim 1, It is characterized in that The distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions is less than 1 / 4 of the given spacing, A distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is less than 1 / 4 of the given pitch.

3. The multi-layer substrate according to claim 1, It is characterized in that a distance from the third X-axis position to the first X-axis position closest to the third X-axis position among the plurality of first X-axis positions being less than half of a distance in the X-axis direction from the third columnar conductor to the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors, A distance from the fourth X-axis position to the second X-axis position closest to the fourth X-axis position among the plurality of second X-axis positions is less than half of a distance in the X-axis direction from the third columnar conductor to the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors.

4. The multi-layer substrate according to claim 1, It is characterized in that The third columnar conductor overlaps with the first columnar conductor when viewed in the Y-axis direction. The fourth columnar conductor overlaps the second columnar conductor when viewed in the Y-axis direction.

5. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that A distance between the second column and the fourth column in the Y-axis direction is equal to a distance between the first column and the third column in the Y-axis direction.

6. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that A distance from the center of the first columnar conductor to the center of the second columnar conductor closest to the first columnar conductor among the plurality of second columnar conductors is longer than a distance between the first column and the second column in the Y-axis direction. A distance from the center of the third columnar conductor to a center of the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors is longer than a distance between the third column and the fourth column in the Y-axis direction.

7. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that A distance from the center of the first columnar conductor to the center of the second columnar conductor closest to the first columnar conductor among the plurality of second columnar conductors is longer than a diameter of the first columnar conductor and a diameter of the second columnar conductor. A distance from the center of the third columnar conductor to the center of the fourth columnar conductor closest to the third columnar conductor among the plurality of fourth columnar conductors is longer than a diameter of the third columnar conductor and a diameter of the fourth columnar conductor.

8. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that The diameter of the first columnar conductor is larger than the diameter of the second columnar conductor. The diameter of the fourth columnar conductor is larger than the diameter of the third columnar conductor.

9. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that When viewed in the Y-axis direction, a portion of the second columnar conductor overlaps a portion of the first columnar conductor. When viewed in the Y-axis direction, a portion of the fourth columnar conductor overlaps a portion of the third columnar conductor.

10. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that The multilayer substrate further comprises a second ground conductor layer. Ends of the plurality of first columnar conductors in the positive direction of the Z axis and ends of the plurality of second columnar conductors in the positive direction of the Z axis are in contact with the second ground conductor layer.

11. The multi-layer substrate according to claim 10, It is characterized in that A distance between the second ground conductor layer and the first signal conductor layer in the Y-axis direction at the first X-axis position is longer than a distance between the second ground conductor layer and the first signal conductor layer in the Y-axis direction at the second X-axis position.

12. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that The multi-layer substrate further comprises: a plurality of third ground conductor layers respectively connected to the ends of the plurality of first columnar conductors in the positive direction of the Z axis; and The plurality of fourth ground conductor layers are in contact with the ends of the plurality of second columnar conductors in the positive direction of the Z axis, respectively.

13. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that The multi-layer substrate further comprises: The fifth ground conductor layer is located closer to the first signal conductor layer in the positive direction of the Z axis than the first signal conductor layer, and overlaps with the first signal conductor layer when viewed in the Z axis direction. The plurality of first columnar conductors, the plurality of second columnar conductors, the plurality of third columnar conductors, and the plurality of fourth columnar conductors are electrically connected to the fifth ground conductor layer.

14. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that The distance between the first signal conductor layer and the third column in the Y-axis direction is equal to the distance between the first signal conductor layer and the second column in the Y-axis direction. A distance between the first signal conductor layer and the fourth column in the Y-axis direction is equal to a distance between the first signal conductor layer and the first column in the Y-axis direction.

15. The multi-layer substrate according to claim 14, It is characterized in that The first signal conductor layer has a linear shape.

16. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that The multi-layer substrate further comprises: a second signal conductor layer provided in the laminate and located closer to the negative direction of the Y axis than the third column and the fourth column, and having a line shape parallel to the first signal conductor layer when viewed from the Z axis direction; and a plurality of fifth columnar conductors and a plurality of sixth columnar conductors which penetrate the insulating layer located closer to the negative direction of the Z axis than the second signal conductor layer in the Z axis direction, and are located closer to the positive direction of the Z axis than the first ground conductor layer. The first ground conductor layer overlaps with the second signal conductor layer when viewed in the Z-axis direction. The plurality of fifth columnar conductors and the plurality of sixth columnar conductors are electrically connected to the first ground conductor layer. When viewed in the Z-axis direction, the centers of the plurality of fifth columnar conductors are located closer to the negative direction of the Y-axis than the second signal conductor layer, and the plurality of fifth columnar conductors are arranged at the given pitch in a fifth row extending along the X-axis direction. When viewed in the Z-axis direction, the centers of the plurality of sixth columnar conductors are located closer to the negative direction of the Y-axis than the second signal conductor layer, and the plurality of sixth columnar conductors are arranged at the given pitch in a sixth column extending in the X-axis direction. The sixth column is located closer to the negative direction of the Y axis than the fifth column. When viewed in the Z-axis direction, a plurality of fifth X-axis positions indicating positions of centers of the plurality of fifth columnar conductors on the X-axis and a plurality of sixth X-axis positions indicating positions of centers of the plurality of sixth columnar conductors on the X-axis are alternately arranged in the X-axis direction. A distance from the fifth X-axis position to the third X-axis position closest to the fifth X-axis position among the plurality of third X-axis positions is shorter than a distance from the fifth X-axis position to the fourth X-axis position closest to the fifth X-axis position among the plurality of fourth X-axis positions. A distance from the 6th X-axis position to the 4th X-axis position closest to the 6th X-axis position among the plurality of 4th X-axis positions is shorter than a distance from the 6th X-axis position to the 3rd X-axis position closest to the 6th X-axis position among the plurality of 3rd X-axis positions.

17. The multilayer substrate according to any one of claims 1 to 4, It is characterized in that The plurality of first X-axis positions and the plurality of second X-axis positions are alternately arranged at a pitch that is half the given pitch in the X-axis direction.

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