Rotatable double-sided target vacuum coating device

Abstract

The utility model belongs to the technical field of target materials, and particularly relates to a rotatable double-sided target material vacuum coating device which comprises a machine body and a target material carrying unit, a rotating mechanism comprises a mounting column, four rectangular grooves are uniformly formed in the mounting column, a clamping assembly comprises two clamping pieces which are symmetrically arranged, the two clamping pieces comprise L-shaped plates matched with the rectangular grooves, and the L-shaped plates are arranged on the mounting column. Step grooves are formed in the front side and the rear side of the L-shaped plate, first springs are installed in the step grooves, locking blocks connected with the first springs are slidably connected into the step grooves, inclined planes are formed in the lower sides of the locking blocks, a plurality of locking grooves matched with the locking blocks are formed in the rectangular groove, and unlocking pieces are installed on the two locking blocks. The positions of the target materials can be driven to be adjusted in the rectangular groove through installation of the two clamping pieces, meanwhile, the multiple target materials can be spliced in the rectangular groove to be used, and the clamping pieces are convenient and fast to operate.

Description

Technical Field

[0001] The utility model belongs to the technical field of target materials, and particularly relates to a rotatable double-sided target vacuum coating device. Background Art

[0002] A vacuum coating device is a device that, in a vacuum environment, energizes a sputtering cathode to ionize argon gas to generate plasma and bombard a target, so that target atoms escape from the surface of the target and are sputtered onto an object to be coated, and a coating is deposited. In a conventional coating process, the target will be continuously consumed, so the target needs to be replenished and replaced every once in a while; due to the use of a rotating device in the vacuum coating machine, there are certain inconveniences in the replacement and installation of the target, so it needs to be improved. Content of the Utility Model

[0003] The purpose of the utility model is to provide a rotatable double-sided target vacuum coating device to solve the problems existing in the background art.

[0004] To achieve the above technical purpose, the technical solution adopted by the utility model is as follows:

[0005] A rotatable double-sided target vacuum coating device includes a machine body and a target carrying unit. A rotating mechanism is rotatably installed inside the machine body, and a driving motor for the rotating mechanism to rotate is installed on the machine body. The rotating mechanism includes a mounting column, and four rectangular grooves are uniformly opened on the mounting column. The target carrying units are respectively installed inside the rectangular grooves, and a clamping component located outside the target carrying unit is installed inside the rectangular grooves;

[0006] The clamping component includes two symmetrically arranged clamping pieces. The two clamping pieces include L-shaped plates that match the rectangular grooves. Step grooves are opened on both the front and rear sides of the L-shaped plates. A first spring is installed inside the step grooves, and a lock block connected to the first spring is slidably connected inside the step grooves. An inclined surface is opened on the lower side of the lock block, and a number of lock grooves matching the lock blocks are opened inside the rectangular grooves. The two lock blocks are provided with unlocking pieces.

[0007] The unlocking piece includes a pull rope fixedly connected to the two lock blocks on the same side, and a holding groove is opened in the middle of the L-shaped plate.

[0008] The target carrying unit includes a magnet, a copper backplane, a cooling mechanism, and a target. The target is installed on one side of the copper backplane, the magnet is installed on the other side of the copper backplane, the cooling mechanism is installed on both sides of the magnet, and the magnet is installed inside the rectangular groove.

[0009] The upper end of the machine body is hermetically and slidably connected with a top cover. A replacement opening matching the rectangular groove is opened at the upper end of the machine body, and two sealing mechanisms matching the mounting column are installed inside the machine body.

[0010] The two sealing mechanisms include arc-shaped sliders slidably connected to the machine body. A sealing gasket matching the mounting post is installed at the lower end of the arc-shaped slider. A sliding groove matching the arc-shaped slider is formed inside the machine body, and a telescopic cylinder matching the arc-shaped slider is installed inside the sliding groove.

[0011] First conductive sheets are connected in series with magnets on the left and right sides of the mounting post. Second conductive sheets matching the positions of the first conductive sheets are installed inside the machine body. The second conductive sheets are electrically connected to electromagnets, and iron sheets magnetically attracted to the electromagnets are installed on the top cover.

[0012] The utility model can drive the target to adjust its position inside the rectangular groove through the installation of two clamping members. At the same time, multiple targets can be spliced inside the rectangular groove for use, and the clamping members are convenient and fast to operate. Brief Description of the Drawings

[0013] The utility model can be further illustrated by the non-limiting embodiments given in the drawings.

[0014] Figure 1 It is a schematic structural diagram of a rotatable double-sided target vacuum coating device of the utility model;

[0015] Figure 2 It is a first cross-sectional structural diagram of a rotatable double-sided target vacuum coating device of the utility model;

[0016] Figure 3 It is a second cross-sectional structural diagram of a rotatable double-sided target vacuum coating device of the utility model;

[0017] Figure 4 is Figure 3 an enlarged structural diagram of part A in

[0018] Figure 5 It is a third cross-sectional structural diagram of a rotatable double-sided target vacuum coating device of the utility model.

[0019] The main component symbols are explained as follows:

[0020] Machine body 1, drive motor 11, mounting post 12, rectangular groove 14, L-shaped plate 15, first spring 16, lock block 17, pull rope 18, magnet 2, copper backplane 21, cooling mechanism 22, target 23, top cover 24, arc-shaped slider 25, telescopic cylinder 26, first conductive sheet 27, second conductive sheet 28, electromagnet 29, iron sheet 30. Detailed Embodiments

[0021] In order to enable those skilled in the art to better understand the utility model, the technical solutions of the utility model will be further described below with reference to the drawings and embodiments.

[0022] Example 1: As Figures 1-5 shown, a rotatable double-sided target vacuum coating device of the present utility model includes a machine body 1 and a target loading unit. A rotating mechanism is rotatably installed inside the machine body 1, and a driving motor 11 for rotating the rotating mechanism is installed on the machine body 1. The rotating mechanism includes a mounting column 12, and four rectangular grooves 14 are evenly opened on the mounting column 12. The target loading units are respectively installed inside the rectangular grooves 14, and a clamping component located outside the target loading unit is installed inside the rectangular grooves 14;

[0023] The clamping component includes two symmetrically arranged clamping pieces. The two clamping pieces include L-shaped plates 15 that match the rectangular grooves 14. Step grooves are opened on both the front and rear sides of the L-shaped plates 15. A first spring 16 is installed inside the step grooves, and a locking block 17 connected to the first spring 16 is slidably connected inside the step grooves. An inclined surface is opened on the lower side of the locking block 17, and a number of locking grooves matching the locking blocks 17 are opened inside the rectangular grooves 14. An unlocking component is installed on the two locking blocks 17.

[0024] During use, the driving motor 11 can drive the mounting column 12 to rotate, thereby changing the target loading units inside different rectangular grooves 14 to work. In this way, different targets can be quickly used for vacuum coating. When replacing the target, the insertion of the locking block 17 and the locking groove is released through the unlocking component, and then the L-shaped plate 15 can be driven to move out of the rectangular groove 14. When the two L-shaped plates 15 are simultaneously disconnected, the target is also released from the abutment with the horizontal plate of the L-shaped plate 15. Then, the target can be directly taken out from the rectangular groove 14 for replacement. Then, a new target is placed on the upper end of the horizontal plate of the L-shaped plate 15. At this time, a force that makes the two L-shaped plates 15 approach each other is applied, so that the target is clamped inside the two L-shaped plates 15 and then the target is driven to move into the rectangular groove 14. Then, the inclined surface of the locking block 17 overcomes the restoring force of the first spring 16 and enters the rectangular groove 14. Then, the whole slides inside the rectangular groove so that the four locking blocks 17 are all aligned with the locking grooves, and the connection is completed by entering the locking grooves under the restoring force of the first spring 16. In this way, the target can be stably installed inside the rectangular groove under the abutment of the L-shaped plate 15, and can adapt to targets of different sizes. At the same time, the position of the target can also be adjusted.

[0025] The present utility model can drive the target to adjust its position inside the rectangular groove through the installation of two clamping pieces. At the same time, multiple targets can also be spliced and used inside the rectangular groove, and the clamping pieces are convenient and fast to operate.

[0026] Embodiment 2: On the basis of Embodiment 1, a further improvement is made. The unlocking member includes a pull rope 18 fixedly connected to two lock blocks 17 on the same side. A holding groove is formed in the middle of the L-shaped plate 15. In the initial state, the two lock blocks 17 are separated from each other under the action of the first spring 16, and the pull rope 18 is in a taut state. When unlocking is required, the pull rope 18 can be pulled to drive the lock blocks 17 to approach each other, so as to disconnect the connection with the lock groove.

[0027] The target carrier unit includes a magnet 2, a copper backplane 21, a cooling mechanism 22 and a target 23. The target 23 is installed on one side of the copper backplane 21, the magnet 2 is installed on the other side of the copper backplane 21, the cooling mechanism is installed on both sides of the magnet 2, and the magnet 2 is installed inside the rectangular groove 14. The magnet 2 is used to provide a magnetic field to confine electrons, usually a permanent magnet, placed behind the target 23; the cooling mechanism 22 is filled with cooling water, the copper backplane 21 is cooled by the cooling water, and the target 23 is cooled by heat transfer through the copper backplane 21. The prior art will not be elaborated here.

[0028] A top cover 24 is hermetically and slidably connected to the upper end of the body 1. A replacement opening matching the rectangular groove 14 is formed in the upper end of the body 1. Two sealing mechanisms matching the mounting posts 12 are installed inside the body 1. During normal use, the top cover 24 hermetically closes the replacement opening. When the target needs to be replaced, it drives the sealing mechanism to abut against the side of the mounting post 12, so that the space between its upper side and the body 1 is isolated from the inside of the body 1, and thus the target can be replaced through the replacement opening.

[0029] The two sealing mechanisms include arc-shaped sliders 25 slidably connected to the body 1. A sealing pad matching the mounting post 12 is installed at the lower end of the arc-shaped slider 25. A sliding groove matching the arc-shaped slider 25 is formed inside the body 1, and a telescopic cylinder 26 matching the arc-shaped slider 25 is installed inside the sliding groove.

[0030] When the mounting post 12 rotates, the arc-shaped slider 25 is located inside the sliding groove and does not abut against the side of the mounting post 12, which facilitates the rotation of the mounting post 12. When operation is required at the replacement opening, the telescopic cylinder 26 is started to drive the arc-shaped slider 25 to move downward, so that the sealing pad abuts against the side of the mounting post 12 to complete the sealing.

[0031] On the left and right sides of the installation column 12, a first conductive sheet 27 is connected in series with the magnet 2. A second conductive sheet 28 that matches the position of the first conductive sheet 27 is installed inside the body 1. The second conductive sheet 28 is electrically connected to an electromagnet 29, and an iron sheet 30 that is magnetic to the electromagnet 29 is installed on the top cover 24. When the upper target carrier unit is vertically upward, the first conductive sheet 27 is aligned with and abuts against the second conductive sheet 28. At this time, if the target carrier unit is in a working state, the current of the magnet 2 will connect the first conductive sheet 27 and the second conductive sheet 28, thereby supplying power to the electromagnet 29, making it magnetically attracted to the iron sheet 30 and unable to drive the top cover 24 to move. When the target carrier unit is in a non-working state, it can drive the top cover 24 to move, which is more secure.

[0032] The above embodiments only exemplarily illustrate the principles and effects of the present invention, rather than limiting the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A rotatable double-sided target vacuum coating device, comprising a body and a target carrying unit, wherein a rotating mechanism is rotatably installed inside the body, and a driving motor for rotating the rotating mechanism is installed on the body, characterized in that: The rotating mechanism comprises a mounting column, the mounting column is evenly provided with four rectangular grooves, the target material carrying units are respectively installed inside the rectangular grooves, and a clamping assembly located outside the target material carrying unit is installed inside the rectangular grooves; The clamping assembly includes two symmetrically arranged clamping members, and the two clamping members include L-shaped plates matching the rectangular grooves. Step grooves are provided on the front and rear sides of the L-shaped plates, and a first spring is installed inside the step groove. A locking block connected to the first spring is slidably connected inside the step groove, and an inclined surface is provided on the lower side of the locking block. A plurality of locking grooves matching the locking blocks are provided inside the rectangular groove, and unlocking members are installed on the two locking blocks.

2. The rotatable double-sided target vacuum coating device according to claim 1, characterized in that: The unlocking member comprises a pull rope fixedly connected to two locking blocks on the same side, and a holding groove is provided in the middle of the L-shaped plate.

3. The rotatable double-sided target vacuum coating device according to claim 1, characterized in that: The target material carrying unit includes a magnet, a copper backing plate, a cooling mechanism and a target material. The target material is installed on one side of the copper backing plate, the magnet is installed on the other side of the copper backing plate, the cooling mechanism is installed on both sides of the magnet, and the magnet is installed inside the rectangular groove.

4. The rotatable double-sided target vacuum coating device according to claim 2, characterized in that: The upper end of the machine body is sealingly and slidably connected with a top cover, the upper end of the machine body is provided with a replacement port matching the rectangular groove, and two sealing mechanisms matching the mounting columns are installed inside the machine body.

5. The rotatable double-sided target vacuum coating device according to claim 4, characterized in that: The two sealing mechanisms include an arc-shaped slider slidably connected to the body, a sealing pad matching the mounting column is installed at the lower end of the arc-shaped slider, a sliding groove matching the arc-shaped slider is opened inside the body, and a telescopic cylinder matching the arc-shaped slider is installed inside the sliding groove.

6. The rotatable double-sided target vacuum coating device according to claim 5, characterized in that: The left and right sides of the mounting column are connected in series with the magnet with a first conductive sheet, the body is installed with a second conductive sheet matching the position of the first conductive sheet, the second conductive sheet is electrically connected to an electromagnet, and the top cover is installed with an iron sheet that is magnetic to the electromagnet.

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