Equipment for detecting warpage of glass substrate

Abstract

The utility model relates to the technical field of packaging testing in the integrated circuit industry, and discloses equipment for detecting warping of a glass substrate. The loading and unloading platform comprises a placing mechanism for placing a to-be-tested glass substrate and a y-direction transplanting mechanism for driving the placing mechanism to move in the y direction; the three-axis detection platform comprises a y-direction moving mechanism, an x-direction moving mechanism and a z-direction moving mechanism, the y-direction moving mechanism is used for moving a detection mechanism for detecting the warping degree of the glass substrate in the y direction, the x-direction moving mechanism is used for moving the detection mechanism in the x direction, the z-direction moving mechanism is used for moving the detection mechanism in the z direction, and the detection mechanism is located above the glass substrate. And when the glass substrate is detected by the detection mechanism, the projection of the detection mechanism on the upper surface of the rack coincides with the projection of the glass substrate on the upper surface of the rack. According to the equipment, positioning detection of the glass substrate can be rapidly completed, and manual visual inspection is completely replaced.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit packaging and testing, and particularly relates to a device for detecting the warpage of a glass substrate. Background Art

[0002] As advanced process chips are getting closer and closer to the physical limit, that is, entering the post-Moore era, semiconductors are beginning to shift from process nodes to advanced packaging. Compared with traditional organic substrate materials such as PCB printed circuit boards, glass substrates have denser wiring, higher signal performance, ultra-low roughness, a larger packaging area and thus higher economic benefits. The glass substrate itself is very cheap and reusable, but there are still challenges in thermal expansion, stacking, stress and processing.

[0003] During the production process of advanced integrated circuit packaging, the glass substrate warps due to factors such as mechanical pressure, stress, and high temperature. Usually, there are two forms of warpage of the glass substrate in advanced integrated circuit packaging: smile and cry. When the above situation occurs and the warpage degree exceeds or is lower than a certain threshold, the glass substrate cannot continue to be produced. Otherwise, it can be normally applied to production. If the glass substrate continues to be produced when it exceeds or is lower than a certain threshold, it usually affects the loading and unloading of automated equipment, interferes with or collides with the internal mechanism of the equipment, resulting in scratches and damage to the chips on the glass substrate, causing the whole glass substrate to crack, scrapping the whole board of chips, or affecting a certain key index in the chip production process of this process, resulting in batch defects of the chips. Therefore, it is necessary to detect the warpage degree of the produced glass substrate to confirm whether it meets the production feeding standard and thus avoid the above problems. Summary of the Utility Model

[0004] The utility model provides a device for detecting the warpage of a glass substrate, which can automatically detect the warpage degree of the glass substrate and reduce the error of manual visual inspection.

[0005] The utility model is realized through the following technical solutions:

[0006] A device for detecting the warpage of a glass substrate, comprising:

[0007] A frame;

[0008] A loading and unloading platform, installed on the upper surface of the frame, comprising a placement mechanism for placing the glass substrate to be tested and a y-direction transplanting mechanism for driving the placement mechanism to move in the y direction;

[0009] The three-axis detection platform is installed on the upper surface of the frame and includes a y-direction moving mechanism for moving the detection mechanism for detecting the warpage of the glass substrate in the y direction, an x-direction moving mechanism for moving the detection mechanism in the x direction, and a z-direction moving mechanism for moving the detection device in the z direction. The detection mechanism is located above the glass substrate, and when the glass substrate is detected by the detection mechanism, the projection of the detection mechanism on the upper surface of the frame coincides with the projection of the glass substrate on the upper surface of the frame.

[0010] As an optimization, the placement mechanism includes a loading plate for carrying the glass substrate. Horizontally arranged x-direction positioning cylinders are respectively provided on two opposite sides of the loading plate, and an x-direction positioning plate is fixedly connected to the telescopic rod of the x-direction positioning cylinder; on two adjacent sides of the side of the loading plate where a certain x-direction positioning cylinder is located, horizontally arranged y-direction positioning cylinders are respectively provided, and a y-direction positioning plate is fixedly connected to the telescopic rod of the y-direction positioning cylinder, and the upper surfaces of the x-direction positioning cylinder and the y-direction positioning cylinder are not higher than the upper surface of the loading plate.

[0011] As an optimization, the upper surfaces of the x-direction positioning plate and the y-direction positioning plate are not higher than the upper surface of the loading plate, and limiting columns are respectively fixed on the x-direction positioning plate and the y-direction positioning plate. The axis of the limiting column is perpendicular to the upper surface of the frame, and the upper surface of the limiting column is higher than the upper surface of the loading plate; or the upper surfaces of the x-direction positioning plate and the y-direction positioning plate are higher than the upper surface of the loading plate.

[0012] As an optimization, the y-direction transplanting mechanism includes a first servo motor and a first linear guide fixed on the upper surface of the frame. The output shaft of the first servo motor is fixedly connected to the screw of the first ball screw, and the screw of the first ball screw passes through one side of the first linear guide and extends into the cavity inside the first linear guide, and the screw of the first ball screw is rotatably connected to the first linear guide. The axes of the screw of the first ball screw and the first linear guide are both parallel to the y direction. First long holes are respectively opened on the opposite sides in the length direction of the first linear guide. Opposite sides of the nut of the first ball screw are respectively fixedly provided with first extension parts, and the two first extension parts extend out of the first linear guide through the corresponding first long holes and are fixedly connected to a connecting plate fixed to the bottom of the loading plate.

[0013] As an optimization, a first bearing seat is fixedly connected to the upper surface of the frame, and the screw of the first ball screw is fixed in the inner ring of the first bearing seat; or a first bearing is fixedly installed on one side of the first linear guide close to the first servo motor, and the screw of the first ball screw is fixedly connected to the inner ring of the first bearing.

[0014] As an optimization, the y-direction moving mechanism includes second servo motors respectively located on the two x-direction sides of the y-direction transplanting mechanism and second linear guide rails relatively fixed to the outer shells of the second servo motors. The output shaft of the second servo motor is fixedly connected to the screw rod of the second ball screw, and the screw rod of the second ball screw passes through one side of the second linear guide rail and extends into the cavity inside the second linear guide rail. The screw rod of the second ball screw is rotatably connected to the second linear guide rail. The axes of the screw rod of the second ball screw and the second linear guide rail are both parallel to the y direction. Second long holes are respectively formed on the opposite two sides in the length direction of the second linear guide rail. Opposite sides of the nut of the second ball screw are respectively fixedly provided with second extension parts. The two second extension parts of each nut of the second ball screw respectively extend out of the second linear guide rail through the corresponding second long holes and are respectively fixedly connected to a first connecting block.

[0015] As an optimization, heightening blocks are respectively fixedly connected to the bottoms of the two second linear guide rails.

[0016] As an optimization, the x-direction moving mechanism includes a second connecting block, a third servo motor, and a third linear guide rail relatively fixed to the outer shell of the third servo motor. The two ends of the second connecting block are respectively fixedly connected to the two first connecting blocks, and the length direction of the second connecting block is parallel to the x direction. The output shaft of the third servo motor is fixedly connected to the screw rod of the third ball screw, and the screw rod of the third ball screw passes through one side of the third linear guide rail and extends into the cavity inside the third linear guide rail. The screw rod of the third ball screw is rotatably connected to the third linear guide rail. The axes of the screw rod of the third ball screw and the third linear guide rail are both parallel to the x direction. Third long holes are respectively formed on the opposite two sides in the length direction of the third linear guide rail. Opposite sides of the nut on the third ball screw are respectively provided with third extension parts. The two third extension parts extend out of the third linear guide rail through the corresponding third long holes and are respectively fixedly connected to a third connecting block.

[0017] As an optimization, the z-direction moving mechanism includes a fourth servo motor and a fourth linear guide rail relatively fixed to the outer shell of the fourth servo motor. The third connecting block is fixedly connected to the fourth linear guide rail. The output shaft of the fourth servo motor is vertically oriented towards the upper surface of the frame and fixedly connected to the screw of the fourth ball screw. The screw of the fourth ball screw passes through one side of the fourth linear guide rail and extends into the cavity inside the fourth linear guide rail. The screw of the fourth ball screw is rotatably connected to the fourth linear guide rail. The axes of the screw of the fourth ball screw and the fourth linear guide rail are both parallel to the z-direction. Opposite sides of the fourth linear guide rail in the length direction are respectively provided with fourth long holes. Opposite sides of the nut of the fourth ball screw are respectively fixedly provided with fourth extension parts. The two fourth extension parts extend out of the fourth linear guide rail through the corresponding fourth long holes and are fixedly connected to the detection mechanism through connecting pieces.

[0018] As an optimization, the detection mechanism includes a detector or a camera that shoots downward.

[0019] Compared with the prior art, the present utility model has the following advantages and beneficial effects:

[0020] The equipment of the present utility model can quickly complete the positioning and detection of the glass substrate, completely replacing manual visual inspection. Description of the Drawings

[0021] The drawings described herein are used to provide a further understanding of the embodiments of the present utility model, form a part of this application, and do not constitute a limitation to the embodiments of the present utility model. In the drawings:

[0022] Figure 1 It is a schematic structural diagram of a device for detecting the warpage of a glass substrate according to the present utility model;

[0023] Figure 2 is Figure 1 a schematic structural diagram from another angle;

[0024] Figure 3 is a schematic structural diagram of (the first, second, third, fourth) servo motors, (the first, second, third, fourth) ball screws, (the first, second, third, fourth) linear guide rails, (the first, second, third, fourth) extension parts;

[0025] Figure 4 is a schematic structural diagram of one type of the loading and unloading platform;

[0026] Figure 5 is a schematic structural diagram of another type of the loading and unloading platform;

[0027] Figure 6 is a schematic diagram of the shape of the blanking plate;

[0028] Figure 7 It is an overall schematic diagram of a device equipped with a dust cover and a machine door.

[0029] Labels and corresponding component names in the drawings:

[0030] 1 - Frame, 2 - Loading and unloading platform, 2a - First servo motor, 2b - First linear guide rail, 2c - Screw of the first ball screw, 2d - Nut of the first ball screw, 2e - First long slot, 2f - First extension part, 2g - Loading plate, 2h - X - direction positioning cylinder, 2i - X - direction positioning plate, 2j - Limit post, 2k - Y - direction positioning plate, 2l - Connecting plate, 3 - Y - direction moving mechanism, 3a - Second servo motor, 3b - Second linear guide rail, 3c - Screw of the second ball screw, 3d - Nut of the second ball screw, 3e - Second long slot, 3f - Second extension part, 4 - X - direction moving mechanism, 4a - Third servo motor, 4b - Third linear guide rail, 4c - Screw of the third ball screw, 4d - Nut of the third ball screw, 4e - Third long slot, 4f - Third extension part, 5 - Z - direction moving mechanism, 5a - Fourth servo motor, 5b - Fourth linear guide rail, 5c - Screw of the fourth ball screw, 5d - Nut of the fourth ball screw, 5e - Fourth long slot, 5f - Fourth extension part, 6 - Glass substrate, 7 - First connection block, 8 - Second connection block, 9 - Third connection block, 10 - Detection mechanism. Detailed implementation manners

[0031] To make the objectives, technical solutions, and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with embodiments and the drawings. The illustrative embodiments and descriptions of the present utility model are only used to explain the present utility model and are not intended to limit the present utility model.

[0032] Embodiment 1 of the present invention provides a device for detecting the warping of a glass substrate 6, as Figures 1 - 3 shown, including:

[0033] Frame 1;

[0034] Loading and unloading platform 2, installed on the upper surface of the frame 1, including a placement mechanism for placing the glass substrate 6 to be tested and a Y - direction transplanting mechanism for driving the placement mechanism to move in the Y - direction;

[0035] The three-axis detection platform is installed on the upper surface of the frame 1 and includes a y-direction moving mechanism 3 for moving the detection mechanism 10 for detecting the warpage of the glass substrate 6 in the y direction, an x-direction moving mechanism 4 for moving the detection mechanism 10 in the x direction, and a z-direction moving mechanism 5 for moving the detection device in the z direction. The detection mechanism 10 includes a detector or a camera that shoots downward. Detecting the warpage of the glass substrate by a detector or a camera is a prior art. What is protected here is the structure of the device, so it will not be elaborated further. The detection mechanism 10 is located above the glass substrate 6. When the glass substrate 6 is detected by the detection mechanism 10, the projection of the detection mechanism 10 on the upper surface of the frame 1 coincides with the projection of the glass substrate 6 on the upper surface of the frame 1. When detecting, the coincidence of the projection of the detection mechanism on the upper surface of the frame 1 and the projection of the glass substrate 6 on the upper surface of the frame 1 can ensure that the detection mechanism can detect all parts of the glass substrate.

[0036] The frame 1 serves as a carrier for the loading and unloading platform 2 and the three-axis detection platform, and is used to fix the loading and unloading platform 2 and the three-axis detection platform. At the same time, a dust-proof cover and / or a sound-proof cover can be provided on the frame 1 to cover the loading and unloading platform 2 and the three-axis detection platform. Only a machine door for the loading and unloading platform 2 to enter and exit needs to be provided at the corresponding position. At the same time, the corresponding buttons, alarm lights, and displays can be set on the frame 1 and / or the dust-proof cover and / or the sound-proof cover, as Figure 7 shown. This is a prior art and will not be elaborated further.

[0037] Next, the corresponding platform structure will be specifically introduced.

[0038] As Figure 4 shown, in this embodiment, the placement mechanism includes a loading plate 2g for carrying the glass substrate 66. Horizontally arranged x-direction positioning cylinders 2h are respectively provided on two opposite sides of the loading plate 2g, and an x-direction positioning plate 2i is fixedly connected to the telescopic rod of the x-direction positioning cylinder 2h. Horizontally arranged y-direction positioning cylinders are provided on two adjacent sides of the side of the loading plate 2g where a certain x-direction positioning cylinder 2h is located. A y-direction positioning plate 2k is fixedly connected to the telescopic rod of the y-direction positioning cylinder, and the upper surfaces of the x-direction positioning cylinder 2h and the y-direction positioning cylinder are not higher than the upper surface of the loading plate 2g.

[0039] Here, it should be noted that the "horizontal" mentioned in the present invention refers to the horizontal plane formed by the x direction and the y direction. The setting of x, y, and z can refer to Figure 1 the coordinates. Grooves with openings on one side are respectively provided at the four edges of the upper surface of the loading plate 2g and are recessed downward. The cylinders of the (x-direction, y-direction) positioning cylinders are correspondingly embedded in the grooves, and the telescopic rods of the positioning cylinders face the open ends.

[0040] The telescopic rods of the x-direction positioning cylinders 2h on the opposite sides are arranged in opposite directions. The axis of the telescopic rod of the x-direction positioning cylinder 2h is parallel to the x-direction. The telescopic rods of the y-direction positioning cylinders on the opposite sides are arranged in opposite directions. The axis of the telescopic rod of the y-direction positioning cylinder is parallel to the y-direction.

[0041] In this embodiment, the upper surfaces of the x-direction positioning plate 2i and the y-direction positioning plate 2k are not higher than the upper surface of the feeding plate 2g. Limit posts 2j are respectively fixed on the x-direction positioning plate 2i and the y-direction positioning plate 2k. The axis of the limit post 2j is perpendicular to the upper surface of the frame 1, and the upper surface of the limit post 2j is higher than the upper surface of the feeding plate 2g.

[0042] When it is necessary to place the glass substrate 6, extend the telescopic rods of the x-direction positioning cylinder 2h and the y-direction positioning cylinder respectively, and then place the glass substrate 6 randomly on the feeding plate 2g as long as it is placed between the x-direction positioning plate 2i and the y-direction positioning plate 2k. After the placement is completed, control the telescopic rods of the x-direction positioning cylinder 2h and the y-direction positioning cylinder to contract. After the telescopic rods of the x-direction positioning cylinder 2h and the y-direction positioning cylinder contract to the set position, the limit posts 2j on the four sides are in contact with the glass substrate 6, and the glass substrate 6 can be positioned and clamped. The specific means of controlling the telescopic rods of the x-direction positioning cylinder 2h and the y-direction positioning cylinder to contract to which specific position is the conventional setting of those skilled in the art and is not the technology considered by the present utility model. At the same time, in order to make the positioning of the glass substrate 6 more accurate, multiple limit posts 2j can be provided on the side. The glass substrate 6 can be positioned in the x-direction by the x-direction positioning cylinders 2h on the opposite sides, the glass substrate 6 can be positioned in the y-direction by the y-direction positioning cylinders on the opposite sides, and the glass substrate 6 can be clamped by the limit posts 2j in four directions.

[0043] In this embodiment, the y-direction transplanting mechanism includes a first servo motor 2a and a first linear guide 2b fixed on the upper surface of the frame 1. The output shaft of the first servo motor 2a is fixedly connected to the screw rod 2c of the first ball screw. The screw rod 2c of the first ball screw passes through one side of the first linear guide 2b and extends into the cavity inside the first linear guide 2b. The screw rod 2c of the first ball screw is rotatably connected to the first linear guide 2b. Specifically, a first bearing seat can be fixedly connected to the upper surface of the frame 1, and the screw rod 2c of the first ball screw is fixed in the inner ring of the first bearing seat. A through hole for the first ball screw to pass through is provided on one side surface of the first linear guide 2b close to the first servo motor 2a, or a first bearing is fixedly installed on one side of the first linear guide 2b close to the first servo motor 2a. The screw rod 2c of the first ball screw is fixedly connected to the inner ring of the first bearing, and the outer ring of the first bearing is fixed to the side surface of the first linear guide 2b close to the first servo motor 2a. As Figure 3 shown, the second method is adopted in this embodiment, that is, a first bearing is fixedly installed on one side of the first linear guide 2b close to the first servo motor 2a. The screw rod 2c of the first ball screw is fixedly connected to the inner ring of the first bearing, and the outer ring of the first bearing is fixed to the side surface of the first linear guide 2b close to the first servo motor 2a.

[0044] The axes of the screw rod 2c of the first ball screw and the first linear guide 2b are both parallel to the y direction. First long holes 2e are respectively provided on the opposite sides in the length direction of the first linear guide 2b. Opposite sides of the nut 2d of the first ball screw are respectively fixedly provided with first extension parts 2f. The two first extension parts 2f extend out of the first linear guide 2b through the corresponding first long holes 2e and are fixedly connected to a connecting plate 2l fixed to the bottom of the feeding plate 2g.

[0045] The connecting plate 2l is fixed at the middle position of the bottom of the material feeding plate 2g, so that the material feeding plate 2g can be kept balanced. The first servo motor 2a rotates to drive the screw 2c of the first ball screw to rotate. The nut is limited by the first extension part 2f. Thus, the rotation of the screw 2c of the first ball screw drives the nut to move along the axial direction of the screw 2c of the first ball screw, thereby driving the connecting plate 2l to move along the axial direction of the first ball screw, that is, driving the connecting plate 2l to move along the axial direction of the first linear guide 2b. In this way, the material feeding plate 2g can be driven to move along the axial direction of the first linear guide 2b, so that the material feeding plate 2g can be moved out or returned, thus realizing the technical solution of loading and unloading. In order to facilitate placing the glass substrate 6 onto the material feeding plate 2g and taking the glass substrate 6 from the material feeding plate 2g, the edges of both sides of the material feeding plate 2g on both sides of the x-direction positioning cylinder 2h can be recessed inward to form artificial material taking avoidance positions, and the edge of the side of the y-direction positioning cylinder close to the material unloading direction is recessed inward to form a robotic arm material taking avoidance position. The robotic arm material taking avoidance position is set according to the actual structure of the robotic arm, such as Figure 6 shown.

[0046] Next, the three-axis detection platform will be introduced.

[0047] In this embodiment, the y-direction moving mechanism 3 includes second servo motors 3a respectively located on the x-direction two sides of the y-direction transplanting mechanism and second linear guides 3b relatively fixed to the outer shells of the second servo motors 3a, that is, the outer shells of the second servo motors 3a are fixedly connected to the second linear guides 3b by conventional means, such as by screws, etc.

[0048] The output shaft of the second servo motor 3a is fixedly connected to the screw 3c of the second ball screw, and the screw 3c of the second ball screw passes through one side of the second linear guide 3b and extends into the cavity inside the second linear guide 3b, and the screw 3c of the second ball screw is rotatably connected to the second linear guide 3b. The axes of the screw 3c of the second ball screw and the second linear guide 3b are both parallel to the y-direction. Second long slots 3e are respectively formed on the opposite two sides in the length direction of the second linear guide 3b. Opposite two sides of the nut 3d of the second ball screw are respectively fixedly provided with second extension parts 3f. The two second extension parts 3f of each nut 3d of the second ball screw respectively extend out of the second linear guide 3b through the corresponding second long slots 3e and are respectively fixedly connected to a first connecting block 7.

[0049] The second servo motor 3a rotates, driving the screw 3c of the second ball screw to rotate. The nut is limited by the second extension part 3f, so that the rotation of the screw 3c of the second ball screw drives the nut to move axially along the screw 3c of the second ball screw, thereby driving the first connecting block 7 to move axially along the second ball screw, that is, driving the first connecting block 7 to move axially along the second linear guide 3b, so as to detect the technical solution of the mechanism 10 moving in the y direction.

[0050] In order to make the height of the detection mechanism 10 higher than that of the glass substrate 6 to be detected, in this embodiment, height increasing blocks are respectively fixedly connected to the bottoms of the two second linear guides 3b, so that the longitudinal (z-direction) height of the detection mechanism 10 can be increased.

[0051] The x-direction moving mechanism 4 includes a second connecting block 8, a third servo motor 4a, and a third linear guide 4b relatively fixed to the housing of the third servo motor 4a, that is, the housing of the third servo motor 4a is fixedly connected to the third linear guide 4b by conventional means, such as by screws. The two ends of the second connecting block 8 are respectively fixedly connected to the two first connecting blocks 7, and the length direction of the second connecting block 8 is parallel to the x direction. In this way, the movement of the first connecting block 7 axially along the second linear guide 3b is equivalent to driving the second connecting block 8 to move axially along the second linear guide 3b.

[0052] The output shaft of the third servo motor 4a is fixedly connected to the screw 4c of the third ball screw, and the screw 4c of the third ball screw passes through one side of the third linear guide 4b and extends into the cavity in the third linear guide 4b, and the screw 4c of the third ball screw is rotatably connected to the third linear guide 4b. In this embodiment, a bearing is installed on one side of the third linear guide 4b close to the third servo motor 4a, and the screw 4c of the third ball screw is rotatably connected to the third linear guide 4b through this bearing. The axes of the screw 4c of the third ball screw and the third linear guide 4b are both parallel to the x direction. Third long holes 4e are respectively opened on the opposite sides in the length direction of the third linear guide 4b. Third extension parts 4f are respectively provided on the opposite sides of the nut 4d of the third ball screw. The two third extension parts 4f extend out of the third linear guide 4b through the corresponding third long holes 4e and are respectively fixedly connected to the third connecting block 9.

[0053] The third servo motor 4a rotates, driving the screw 4c of the third ball screw to rotate. The nut is limited by the third extension 4f, so that the rotation of the screw 4c of the third ball screw drives the nut to move along the axial direction of the screw 4c of the third ball screw, thereby driving the third connecting block 9 to move along the axial direction of the screw 4c of the third ball screw, that is, driving the third connecting block 9 to move along the axial direction of the third linear guide 4b, so as to detect the technical solution that the mechanism 10 moves in the x direction.

[0054] The z-direction moving mechanism 5 includes a fourth servo motor 5a and a fourth linear guide 5b that is relatively fixed to the housing of the fourth servo motor 5a. That is, the housing of the fourth servo motor 5a is fixedly connected to the fourth linear guide 5b by conventional means, such as by screws. The third connecting block 9 is fixedly connected to the fourth linear guide 5b. In this way, when the third connecting block 9 moves in the x direction, it can drive the fourth linear guide 5b to move in the x direction, thereby driving the detection mechanism 10 to move in the x direction.

[0055] The output shaft of the fourth servo motor 5a is arranged vertically towards the upper surface of the frame 1 and is fixedly connected to the screw 5c of the fourth ball screw. The screw 5c of the fourth ball screw passes through one side of the fourth linear guide 5b and extends into the cavity inside the fourth linear guide 5b. The screw 5c of the fourth ball screw is rotatably connected to the fourth linear guide 5b. In this embodiment, a bearing is installed on one side of the fourth linear guide 5b close to the fourth servo motor 5a, and the screw 5c of the fourth ball screw is rotatably connected to the fourth linear guide 5b through this bearing.

[0056] The axes of the screw 5c of the fourth ball screw and the fourth linear guide 5b are both parallel to the z direction. Fourth long holes 5e are respectively opened on the opposite sides in the length direction of the fourth linear guide 5b. Fourth extensions 5f are respectively fixedly provided on the opposite sides of the nut 5d of the fourth ball screw. The two fourth extensions 5f extend out of the fourth linear guide 5b through the corresponding fourth long holes 5e and are fixedly connected to the detection mechanism 10 through connecting pieces.

[0057] In order to keep the relative positions of the screws of the (first, second, third, fourth) ball screws unchanged, a bearing seat can be arranged inside the cavity of the corresponding linear guide. The end of the screw of the ball screw far from the servo motor is fixedly connected to the inner ring of the bearing seat, or a bearing can be additionally installed on the side of the linear guide far from the servo motor, and the end of the screw of the ball screw far from the servo motor is fixedly connected to the inner ring of the bearing.

[0058] Embodiment 2

[0059] The only difference from Embodiment 1 is that the upper surfaces of the x-direction positioning plate 2i and the y-direction positioning plate 2k are higher than the upper surface of the material feeding plate 2g. When the glass substrate 6 is placed on the material feeding plate 2g, the side edges of the glass substrate 6 are in contact with the positioning plates.

[0060] The specific embodiments described above further elaborate on the purpose, technical solutions, and beneficial effects of the present invention. It should be understood that the above are only specific embodiments of the present invention and are not used to limit the protection scope of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A device for detecting warpage of a glass substrate, characterized in that: include: frame; A loading and unloading platform is installed on the upper surface of the frame, and includes a placement mechanism for placing the glass substrate to be tested and a y-direction transfer mechanism for driving the placement mechanism to move in the y-direction; A three-axis detection platform is installed on the upper surface of the frame, and includes a y-direction moving mechanism for moving a detection mechanism for detecting the warpage of the glass substrate in the y-direction, an x-direction moving mechanism for moving the detection mechanism in the x-direction, and a z-direction moving mechanism for moving the detection mechanism in the z-direction. The detection mechanism is located above the glass substrate, and when the glass substrate is detected by the detection mechanism, the projection of the detection mechanism on the upper surface of the frame coincides with the projection of the glass substrate on the upper surface of the frame.

2. The device for detecting warpage of a glass substrate according to claim 1, characterized in that: The placing mechanism includes a placing plate for carrying the glass substrate, wherein two opposite sides of the placing plate are respectively provided with horizontally arranged x-direction positioning cylinders, and the telescopic rod of the x-direction positioning cylinder is fixedly connected with the x-direction positioning plate; two adjacent sides of the side of the placing plate where a certain x-direction positioning cylinder is located are respectively provided with horizontally arranged y-direction positioning cylinders, and the telescopic rod of the y-direction positioning cylinder is fixedly connected with the y-direction positioning plate, and the upper surfaces of the x-direction positioning cylinder and the y-direction positioning cylinder are not higher than the upper surface of the placing plate.

3. The device for detecting warpage of a glass substrate according to claim 2, characterized in that: The upper surfaces of the x-axis positioning plate and the y-axis positioning plate are not higher than the upper surface of the discharge plate, and limiting columns are respectively fixed on the x-axis positioning plate and the y-axis positioning plate, the axes of the limiting columns are perpendicular to the upper surface of the frame, and the upper surface of the limiting columns is higher than the upper surface of the discharge plate; or the upper surfaces of the x-axis positioning plate and the y-axis positioning plate are higher than the upper surface of the discharge plate.

4. The device for detecting warpage of a glass substrate according to claim 2, characterized in that: The y-direction transplanting mechanism includes a first servo motor and a first linear guide fixed to the upper surface of the frame, the output shaft of the first servo motor is fixedly connected to the screw of the first ball screw, and the screw of the first ball screw passes through one side of the first linear guide and extends into the cavity in the first linear guide, and the screw of the first ball screw is rotatably connected relative to the first linear guide, the axes of the screw of the first ball screw and the first linear guide are parallel to the y-direction, and first elongated holes are respectively opened on opposite sides in the length direction of the first linear guide, and first extensions are respectively fixedly provided on opposite sides of the nut of the first ball screw, and the two first extensions extend out of the first linear guide through the corresponding first elongated holes and are fixedly connected to the connecting plate fixed at the bottom of the discharge plate.

5. The device for detecting warpage of a glass substrate according to claim 4, characterized in that: A first bearing seat is fixedly connected to the upper surface of the frame, and the screw of the first ball screw is fixed in the inner ring of the first bearing seat, or a first bearing is fixedly installed on the side of the first linear guide rail close to the first servo motor, and the screw of the first ball screw is fixedly connected to the inner ring of the first bearing.

6. The device for detecting warpage of a glass substrate according to claim 1, characterized in that: The y-axis moving mechanism includes a second servo motor respectively located on both sides of the x-axis of the y-axis transplanting mechanism and a second linear guide fixed relatively to the housing of the second servo motor, the output shaft of the second servo motor is fixedly connected to the screw of the second ball screw, and the screw of the second ball screw passes through one side of the second linear guide and extends into the cavity in the second linear guide, and the screw of the second ball screw is rotatably connected relative to the second linear guide, the axes of the screw of the second ball screw and the second linear guide are parallel to the y-axis, second elongated holes are respectively opened on the opposite sides in the length direction of the second linear guide, second extensions are respectively fixedly provided on the opposite sides of the nut of the second ball screw, and the two second extensions of the nut of each second ball screw extend out of the second linear guide through the corresponding second elongated holes and are fixedly connected to a first connecting block.

7. The device for detecting warpage of a glass substrate according to claim 6, characterized in that: The bottoms of the two second linear guide rails are respectively fixedly connected with heightening blocks.

8. The device for detecting warpage of a glass substrate according to claim 6, characterized in that: The x-axis moving mechanism includes a second connecting block, a third servo motor and a third linear guide fixed relatively to the housing of the third servo motor, the two ends of the second connecting block are respectively fixedly connected to the two first connecting blocks, and the length direction of the second connecting block is parallel to the x-axis, the output shaft of the third servo motor is fixedly connected to the screw of the third ball screw, and the screw of the third ball screw passes through one side of the third linear guide and extends into the cavity in the third linear guide, and the screw of the third ball screw is rotatably connected relative to the third linear guide, the axes of the screw of the third ball screw and the third linear guide are both parallel to the x-axis, third elongated holes are respectively opened on the opposite sides in the length direction of the third linear guide, and third extensions are respectively provided on the opposite sides of the nut on the third ball screw, and the two third extensions extend out of the third linear guide through the corresponding third elongated holes and are respectively fixedly connected to the third connecting block.

9. The device for detecting warpage of a glass substrate according to claim 8, characterized in that: The z-direction moving mechanism includes a fourth servo motor and a fourth linear guide fixed relatively to the housing of the fourth servo motor, the third connecting block is fixedly connected to the fourth linear guide, the output shaft of the fourth servo motor is arranged vertically toward the direction of the upper surface of the frame and is fixedly connected to the screw of the fourth ball screw, and the screw of the fourth ball screw passes through one side of the fourth linear guide and extends into the cavity in the fourth linear guide, and the screw of the fourth ball screw is rotatably connected relative to the fourth linear guide, the axes of the screw of the fourth ball screw and the fourth linear guide are parallel to the z-direction, and fourth long holes are respectively opened on opposite sides in the length direction of the fourth linear guide, and fourth extension parts are respectively fixedly provided on opposite sides of the nut of the fourth ball screw, and the two fourth extension parts extend out of the fourth linear guide through the corresponding fourth long holes and are fixedly connected to the detection mechanism through a connecting piece.

10. The device for detecting warpage of a glass substrate according to claim 1, characterized in that: The detection mechanism includes a detector or a camera that shoots downward.

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