Laser power attenuation device and laser equipment

Abstract

The utility model discloses a laser power attenuation device and laser equipment, the laser power attenuation device comprises a base, a gear set, a third gear, an attenuation sheet and an elastic assembly, the gear set comprises a first gear and a second gear which are coaxially arranged, and the first gear and the second gear are coaxially arranged and rotatably arranged on the base; the gear set is arranged on the base and meshed with the third gear rotationally arranged on the base, and the attenuation pieces are arranged on the gear set and the third gear respectively and used for weakening laser. The elastic assembly comprises an elastic piece connected with the first gear and the second gear, and the elastic piece is used for enabling gear teeth of the first gear and the second gear to be staggered in the circumferential direction. In the transmission process, one side of the working tooth groove of the third gear abuts against the working gear teeth of the first gear, the other side of the working tooth groove of the third gear abuts against the working gear teeth of the second gear, the transmission error caused by the gear backlash of the gears is reduced, and the attenuation piece keeps higher precision and stability in the synchronous rotation process.

Description

Technical Field

[0001] This application relates to the field of laser devices, and particularly to a laser power attenuation device and a laser device. Background Art

[0002] A laser attenuator is an optical device or apparatus used to reduce the energy or intensity of a laser beam. In many laser application scenarios, for different requirements, it is necessary to control and adjust the intensity of the laser, and the laser attenuator plays an important role. For example, in scientific research experiments, in order to make the laser energy reach a specific range required by the experiment, a laser attenuator is used to precisely adjust the laser intensity; in industrial production, when the energy required for laser processing needs to be precisely controlled, the laser attenuator can ensure the stability and accuracy of the processing process; in the field of laser safety, in order to avoid damage to the human eye or other sensitive devices caused by high-intensity lasers, a laser attenuator is also used to reduce the laser intensity to a safe range.

[0003] Generally, a laser attenuator uses a synchronous belt drive or a direct drive of a motor to rotate the attenuation sheet. Both of these methods have problems of low precision in continuously attenuating the laser and additional energy fluctuations. In the case of the synchronous belt drive, since the belt itself is an elastic material, combined with the pitch deviation of the general pulley and the backlash between the toothed belt and the pulley after forward and reverse rotation, there is a non-resettable gap after the module is switched. When the motor drives the attenuation sheet alone, the computer controls the synchronous rotation of the two attenuation sheets and the same axisymmetric rotation angle, which requires extremely high precision, is difficult to control, and it is difficult to ensure the stability of its precision. Utility Model Content

[0004] This application proposes a laser power attenuation device and a laser device, so that the attenuation sheet maintains a high precision during rotation.

[0005] This application proposes a laser power attenuation device, including:

[0006] A base;

[0007] A gear set, including a first gear and a second gear arranged coaxially, the first gear and the second gear are rotatably connected to the base;

[0008] A third gear, rotatably arranged on the base, and meshing with the first gear and the second gear respectively;

[0009] Attenuation sheets, respectively arranged on the gear set and the third gear;

[0010] An elastic component, including an elastic member connecting the first gear and the second gear, the elastic member is used to stagger the teeth of the first gear and the second gear along the circumferential direction.

[0011] In some embodiments, the elastic component includes:

[0012] The first mounting member is disposed on one side of the first gear;

[0013] The second mounting member is disposed on the second gear and passes through the first gear and is spaced apart from the first mounting member;

[0014] One end of the elastic member is connected to the first mounting member, and the other end is connected to the second mounting member.

[0015] In some embodiments, the laser power attenuation device includes multiple groups of the elastic components, and the elastic components are symmetrically arranged around the rotation center of the gear set.

[0016] In some embodiments, the laser power attenuation device further includes a motor, and a fourth gear connecting the motor and the gear set, and the fourth gear meshes with the first gear and the second gear respectively.

[0017] In some embodiments, one side of the working tooth groove of the fourth gear abuts against the working tooth of the first gear, and the other side of the working tooth groove of the fourth gear abuts against the working tooth of the second gear.

[0018] In some embodiments, the laser power attenuation device further includes a housing, the base is disposed in the housing and divides the housing into a transmission cavity and an optical cavity, the attenuation sheet is disposed in the optical cavity, and the gear set, the third gear and the elastic components are disposed in the transmission cavity.

[0019] In some embodiments, an incident hole and an exit hole are further provided on the housing, and the attenuation sheet is located between the incident hole and the exit hole.

[0020] In some embodiments, the laser power attenuation device further includes a sensor disposed on one side of the gear shaft, and a detecting member disposed on the gear set, and the sensor is used to detect the position of the detecting member.

[0021] In some embodiments, the laser power attenuation device further includes an encoder connected to the rotating shaft of the motor, and the number of teeth of the first gear is 1 to 5 times the number of teeth of the fourth gear.

[0022] This application also proposes a laser device, including the above-mentioned laser power attenuation device, and the laser device further includes a machine table for mounting the laser power attenuation device.

[0023] The laser power attenuation device in this application includes a base, a gear set, a third gear, an attenuation sheet, and an elastic component. The gear set includes a first gear and a second gear arranged coaxially. The two are arranged coaxially and rotatably provided on the base, and are respectively engaged with the third gear rotatably provided on the base. The attenuation sheets are respectively arranged on the gear set and the third gear for weakening the laser. The elastic component includes an elastic member connecting the first gear and the second gear. The elastic member is used to stagger the teeth of the first gear and the second gear along the circumferential direction. During the transmission process, one side of the working tooth groove of the third gear abuts against the working tooth of the first gear, and the other side of the working tooth groove of the third gear abuts against the working tooth of the second gear, reducing the transmission error caused by the backlash of the gear, and enabling the attenuation sheet to maintain higher precision and stability during the synchronous rotation process. Brief Description of the Drawings

[0024] Figure 1 is a schematic structural diagram of the laser power attenuation device in an embodiment of this application;

[0025] Figure 2 is a schematic structural diagram of the laser power attenuation device in another embodiment of this application;

[0026] Figure 3 is a cross-sectional view of the laser power attenuation device in an embodiment of this application;

[0027] Figure 4 is a schematic structural diagram of the gear set in an embodiment of this application;

[0028] Figure 5 is a partially enlarged view of the gear set in an embodiment of this application.

[0029] Reference Signs Description:

[0030] 10. Base; 11. Housing; 12. Incident Hole; 13. Exit Hole; 14. Radiator; 15. Mounting Bracket; 21. First Gear; 22. Second Gear; 221. Boss; 23. Third Gear; 24. Fourth Gear; 25. First Main Shaft; 26. Second Main Shaft; 27. Mounting Seat; 31. First Mounting Member; 32. Second Mounting Member; 33. Elastic Member; 40. Attenuation Sheet; 51. Motor; 61. Sensor; 62. Detection Member;

[0031] The realization of the purpose, functional features, and advantages of this application will be further described with reference to the embodiments and the accompanying drawings. Detailed Embodiments

[0032] The following will clearly and completely describe the solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts belong to the scope of protection of the present application.

[0033] It should be noted that all directional indications such as up, down, left, right, front, back... in the embodiments of the present application are only used to explain the relative positional relationship and movement conditions between components in a specific posture as shown in the accompanying drawings. If this specific posture changes, the directional indications will also change accordingly.

[0034] It should also be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may be an intermediate element at the same time. When an element is referred to as "connected to" another element, it can be directly connected to the other element or there may be an intermediate element at the same time.

[0035] In addition, the descriptions involving "first", "second", etc. in the present application are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present application.

[0036] The present application provides a laser power attenuation device. Refer to Figures 1 to 5, the laser power attenuation device includes: a base 10; a gear set including a first gear 21 and a second gear 22 coaxially arranged, the first gear 21 and the second gear 22 being rotatably connected to the base 10; a third gear 23 rotatably arranged on the base 10 and meshing with the first gear 21 and the second gear 22 respectively; an attenuation sheet 40 respectively arranged on the gear set and the third gear 23; an elastic component including an elastic member 33 connecting the first gear 21 and the second gear 22, the elastic member 33 being used to stagger the teeth of the first gear 21 and the second gear 22 along the circumferential direction. The teeth of the first gear 21 and the teeth of the second gear 22 are staggered in the circumferential direction, and the width of the exposed part where the teeth are staggered is much smaller than the tooth width. This part is mainly used to compensate for the backlash. During the transmission process, one side of the working tooth groove of the third gear 23 abuts against the working tooth of the first gear 21, and the other side of the working tooth groove of the third gear 23 abuts against the working tooth of the second gear 22, reducing the transmission error caused by the backlash of the gear and enabling the attenuation sheet 40 to maintain higher precision and stability during synchronous rotation. When the gear set rotates forward or reverses, the staggered teeth always abut against the teeth of the third gear 23, theoretically eliminating the backlash.

[0037] In this embodiment, a first main shaft 25 and a second main shaft 26 parallel to each other are rotatably arranged on the base 10, and both are rotatably connected to the base 10 through bearings. The first main shaft 25 and the second main shaft 26 penetrate through the base 10. The first gear 21 is arranged on the first main shaft 25, and a cylindrical boss 221 is further provided on one side surface of the first gear 21. The second gear 22 is arranged on the boss 221 and is rotatably connected to the boss 221. The third gear 23 is arranged on the second main shaft 26 and meshes with the first gear 21 and the second gear 22. Mounting seats 27 are provided at the ends of the first main shaft 25 and the second main shaft 26 far from the above three gears, and an attenuation sheet 40 is provided on each mounting seat 27. This laser power attenuation device can drive the gears to rotate through a motor 51, and the attenuation sheet 40 always maintains a mirror image movement during rotation. It should be noted that due to the existence of the elastic member 33, there is still a certain amount of rotational allowance between the first gear 21 and the second gear 22 to avoid jamming with the third gear 23.

[0038] In some embodiments, refer to Figures 1 to 5, the elastic component includes: a first mounting member 31 disposed on one side of the first gear 21; a second mounting member 32 disposed on the second gear 22 and passing through the first gear 21 and spaced apart from the first mounting member 31; one end of the elastic member 33 is connected to the first mounting member 31, and the other end is connected to the second mounting member 32. In this embodiment, the first mounting member 31 is threadedly connected to the first gear 21, and the second mounting member 32 is threadedly connected to the second gear 22. The first gear 21 is further provided with an avoidance hole for avoiding the second mounting member 32, and the ends of the first mounting member 31 and the second mounting member 32 are further provided with hanging holes, and the elastic member 33 can be a spring with its end disposed in the above-mentioned hanging holes. The teeth of the first gear 21 and the teeth of the second gear 22 are offset in the circumferential direction, and the width of the exposed part of the offset teeth is much smaller than the tooth width, and this part is mainly used to compensate for the backlash.

[0039] Further, the laser power attenuation device has a plurality of sets of the elastic components, and the elastic components are symmetrically arranged around the rotation center of the gear set. Arranging a plurality of sets of elastic components can ensure that the center of mass of the mechanism composed of the gear set and the body elastic components is centered during rotation, and avoid jitter caused by eccentricity affecting the rotation accuracy. Of course, the central stacking of a plurality of sets of elastic components can also ensure the circumferential force balance of the first gear 21 and the second gear 22.

[0040] In some embodiments, referring to Figures 1 to 5 , the laser power attenuation device further includes a motor 51, and a fourth gear 24 connecting the motor 51 and the gear set, and the fourth gear 24 meshes with the first gear 21 and the second gear 22 respectively. In this embodiment, a mounting frame 15 is provided on the base 10, the main body of the motor 51 is disposed on the mounting frame 15, its rotating shaft is disposed downward on the base 10, and the fourth gear 24 is disposed on the rotating shaft. One side of the working tooth groove of the fourth gear 24 abuts against the working teeth of the first gear 21, and the other side of the working tooth groove of the fourth gear 24 abuts against the working teeth of the second gear 22. The fourth gear 24 meshes with the gear set, and can also reduce the transmission error caused by the backlash of the fourth gear 24.

[0041] In some embodiments, referring to Figures 1 to 5 , the laser power attenuation device further includes a housing 11, the base 10 is disposed in the housing 11 and divides the housing 11 into a transmission cavity and an optical cavity, the attenuation sheet 40 is disposed in the optical cavity, and the gear set, the third gear 23 and the elastic components are disposed in the transmission cavity. In this embodiment, the attenuation sheet 40 is isolated from other components through the base 10, which can prevent impurities such as oil stains and dust on other components from entering the optical cavity, so as not to affect the laser quality.

[0042] In addition, an incident hole 12 and an exit hole 13 are further provided on the housing 11, and the attenuation sheet 40 is located between the incident hole 12 and the exit hole 13. It can be arranged in the laser optical path. After the laser enters from the incident hole 12 and is weakened by the attenuation sheet 40, it then exits from the exit hole 13. Since the two attenuation sheets 40 always maintain mirror-image movement, after the laser beam enters at a certain angle and refracts through one of the attenuation sheets 40, the optical path will deviate from the original optical path. After passing through the other attenuation sheet 40, the laser beam refracts again, and the optical path is restored and exits along the straight line where the incident light is located.

[0043] In some embodiments, referring to Figures 1 to 5 , the laser power attenuation device further includes a sensor 61 provided on one side of the gear shaft and a detector 62 provided on the gear set. The sensor 61 is used to detect the position of the detector 62. The sensor 61 can be an optoelectronic sensor 61. The detector 62 can be arranged on the first main shaft 25 and can rotate along with the first main shaft 25. When the first detector 62 moves to the position of the optoelectronic sensor 61, the signal of the sensor 61 changes, and thus it can be used to position the attenuation sheet 40. Further, the laser power attenuation device further includes an encoder connected to the rotating shaft of the motor 51. The encoder and the sensor 61 can be used to detect the rotation angle of the attenuation sheet 40, and the two can be mutually calibrated. The encoder can be used to detect the rotation angle of the motor 51. Since the number of teeth of the first gear 21 is 1 to 5 times that of the fourth gear 24. The larger transmission ratio can further improve the transmission accuracy and facilitate the closed-loop control of the rotation angle and speed of the attenuation sheet 40.

[0044] This application also proposes a laser device, including the above-mentioned laser power attenuation device. The laser device further includes a machine platform for mounting the laser power attenuation device. This laser device can be used in the Micro-LED laser lift-off process. Its common laser source is a quasi-external excimer laser with a pulse width in the nanosecond order of magnitude, and its laser energy density is mostly within the order of magnitude of 102 MJ / cm 2 level. After the laser beam passes through the laser attenuation device, high-precision continuous attenuation laser can be obtained, and no additional energy fluctuation will be introduced. Of course, this laser power attenuation device can be implanted into any laser optical path system for electronically controlled laser attenuation.

[0045] The working principle of the laser power attenuation device in the embodiment of this application is as follows:

[0046] The laser power attenuation device in this application includes a base 10, a gear set, a third gear 23, an attenuation sheet 40, and an elastic component. The gear set includes a first gear 21 and a second gear 22 arranged coaxially. The two are arranged coaxially and rotatably provided on the base 10, and are respectively meshed with the third gear 23 rotatably provided on the base 10. The attenuation sheet 40 is respectively arranged on the gear set and the third gear 23 for weakening the laser. The elastic component includes an elastic member 33 connecting the first gear 21 and the second gear 22. The elastic member 33 is used to stagger the teeth of the first gear 21 and the second gear 22 along the circumferential direction. During the transmission process, one side of the working tooth groove of the third gear 23 abuts against the working tooth of the first gear 21, and the other side of the working tooth groove of the third gear 23 abuts against the working tooth of the second gear 22, reducing the transmission error caused by the backlash of the gear, so that the attenuation sheet 40 maintains higher precision and stability during the synchronous rotation process.

[0047] The above are only partial or preferred embodiments of this application. Neither the text nor the drawings can limit the scope of protection of this application. Any equivalent structural transformation made by using the content of the specification and drawings of this application under the overall concept of this application, or any direct / indirect application in other related technical fields is included in the scope of protection of this application.

Claims

1. A laser power attenuation device, characterized in that: include: Pedestal; A gear set, comprising a first gear and a second gear arranged coaxially, wherein the first gear and the second gear are rotatably connected to the base; a third gear, rotatably disposed on the base and meshing with the first gear and the second gear respectively; Attenuation plates, respectively arranged on the gear set and the third gear; The elastic component comprises an elastic member connecting the first gear and the second gear, wherein the elastic member is used to stagger the gear teeth of the first gear and the second gear along the circumferential direction.

2. The laser power attenuation device according to claim 1, characterized in that: The elastic component comprises: A first mounting member, disposed on one side of the first gear; a second mounting member, disposed on the second gear, passing through the first gear and spaced apart from the first mounting member; One end of the elastic member is connected to the first mounting member, and the other end is connected to the second mounting member.

3. The laser power attenuation device according to claim 2, characterized in that: The laser power attenuation device comprises a plurality of sets of elastic components, and the elastic components are symmetrically arranged around the rotation center of the gear set.

4. The laser power attenuation device according to any one of claims 1 to 3, characterized in that: The laser power attenuation device further comprises a motor, and a fourth gear connecting the motor and the gear set, wherein the fourth gear is meshed with the first gear and the second gear respectively.

5. The laser power attenuation device according to claim 4, characterized in that: One side of the working tooth groove of the fourth gear abuts against the working gear teeth of the first gear, and the other side of the working tooth groove of the fourth gear abuts against the working gear teeth of the second gear.

6. The laser power attenuation device according to claim 1, characterized in that: The laser power attenuation device also includes a shell, the base is arranged in the shell and separates the shell into a transmission cavity and an optical cavity, the attenuation plate is arranged in the optical cavity, and the gear set, the third gear and the elastic component are arranged in the transmission cavity.

7. The laser power attenuation device according to claim 6, characterized in that: The shell is also provided with an incident hole and an exit hole, and the attenuation sheet is located between the incident hole and the exit hole.

8. The laser power attenuation device according to claim 7, characterized in that: The laser power attenuation device further comprises a sensor arranged on one side of the gear shaft and a detection member arranged on the gear set, wherein the sensor is used to detect the position of the detection member.

9. The laser power attenuation device according to claim 4, characterized in that: The laser power attenuation device further comprises an encoder connected to the rotating shaft of the motor, and the number of teeth of the first gear is 1 to 5 times the number of teeth of the fourth gear.

10. A laser device, characterized in that: The laser device comprises the laser power attenuation device according to any one of claims 1 to 9, and the laser equipment further comprises a platform for installing the laser power attenuation device.

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