Gas distribution pipeline for stabilizing gas flow

Abstract

The utility model discloses a gas distributing pipeline for stabilizing gas flow. The gas distributing pipeline comprises a main body, a pressure adjusting device and a pressure indicating device, the main body comprises a gas inlet pipeline, and a first gas distribution pipeline and a second gas distribution pipeline which are distributed from the gas inlet pipeline; the gas inlet pipeline is connected with a reaction source; the first gas distribution pipeline is connected with the cavity; the second gas-distributing pipeline is connected with a sucking pump; a pressure indicating device is arranged on the first gas distributing pipeline; the pressure indicating device comprises an indicating strip and two measuring corrugated pipes located on the two sides of the indicating strip. A pressure adjusting device is arranged on the second gas distributing pipeline; the pressure adjusting device comprises a valve element capable of freely sliding in the main body, an adjusting nut arranged outside the valve element in a sleeving mode and connected with the main body in a threaded mode, and a locking device.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a branch gas pipeline. Background Art

[0002] In semiconductor coating equipment, there are various and numerous gas pipelines. The pipelines are crisscrossed and complex. Each pipeline plays a very important role. Among these pipelines, there is a special branch gas pipeline. After starting from the reaction source, it divides into two branches. Each branch of gas is respectively controlled by two atomic layer deposition valves for opening and closing. In the process, it is necessary to continuously and alternately switch the states of the two switches. And the two branches of gas are respectively connected to the cavity and the vacuum pump. Such a situation leads to pressure control in the pipeline when entering the cavity pipeline. When the vacuum pump control valve is opened, the pipeline is evacuated again. When the valves are alternately opened, the pressure also changes alternately, which is very unstable and increases the difficulty of process adjustment. Summary of the Utility Model

[0003] In order to overcome the defects of the prior art, the utility model provides a branch gas pipeline for stabilizing air flow.

[0004] The branch gas pipeline includes:

[0005] A main body, a pressure adjustment device and a pressure indication device;

[0006] The main body includes: an inlet gas pipeline, a first branch gas pipeline and a second branch gas pipeline branched from the inlet gas pipeline; the inlet gas pipeline is connected to the reaction source; the first branch gas pipeline is connected to the chamber; the second branch gas pipeline is connected to the vacuum pump;

[0007] Wherein, a pressure indication device is arranged on the first branch gas pipeline; the pressure indication device includes an indicating strip and two measuring bellows located on both sides of the indicating strip;

[0008] Wherein, a pressure adjustment device is arranged on the second branch gas pipeline; the pressure adjustment device includes a valve core that can freely slide inside the main body, an adjusting nut sleeved outside the valve core and threadedly connected to the main body, and a locking device.

[0009] In one embodiment, one end of each of the two measuring bellows is fixedly connected to the indicating strip, and the other end is fixedly connected to the main body; the two measuring bellows are telescopic.

[0010] In one embodiment, the pressure on one side of the indicating strip is associated with the chamber, and the pressure on the other side of the indicating strip is associated with the gas pressure from the inlet gas pipeline; when the indicating strip is at the zero scale, it means that the pressure in the chamber is balanced with the gas pressure from the inlet gas pipeline.

[0011] In one embodiment, an air joint is further connected below the position of the pressure adjustment device on the second sub-air pipeline, and the air joint is connected to a purge gas source.

[0012] In one embodiment, the air joint is threadedly connected to the main body; during purging, the air joint introduces purge gas into the sub-air pipeline; when purging is not carried out, a sealed connection is formed between the air joint and the main body.

[0013] In one embodiment, the pressure adjustment device further includes an outer ring bellows and an inner ring bellows;

[0014] One end of the valve core is slidably installed inside the main body, and the other end is connected to the outer ring bellows and the inner ring bellows;

[0015] One end of the inner ring bellows is connected to the valve core, and the other end is fixedly connected to the main body. The inner ring bellows is buried inside the second sub-air pipeline of the main body;

[0016] One end of the outer ring bellows is connected to the valve core, and the other end is fixedly connected to the main body. The outer ring bellows is sleeved outside the inner ring bellows, and a sealed annular region is formed between the outer ring bellows and the inner ring bellows; when the purge gas enters from the air joint, the gas in the annular region expands, pushing the valve core in the direction of the air extraction pump.

[0017] In one embodiment, the pressure adjustment device further includes: a telescopic bellows and a return spring;

[0018] The telescopic bellows and the return spring are arranged between the adjusting nut and the valve core; the telescopic bellows is used to isolate gas; the return spring resets the position of the valve core after purging is completed.

[0019] In one embodiment, the adjusting nut is rotated to change the narrowing or widening of the gas inlet channel in the valve core, thereby changing the pressure of the reaction source gas entering from the inlet pipeline, and further moving the indicating bar in the pressure indicating device to the desired target position.

[0020] In one embodiment, the locking device includes: a locking block, a fixing screw and a locking spring;

[0021] The upper part of the locking block has a dovetail groove. The locking block is installed on the dovetail-shaped slide rail of the main body, so that the locking block slides along the slide rail; a locking spring is installed between one side of the locking block and the main body; the fixing screw is threadedly installed on the lower part of the locking block to play a role in locking and fixing.

[0022] In one embodiment, the sub-gas pipeline further includes:

[0023] An air inlet through which the intake pipeline is connected to the reaction source;

[0024] A detection port through which the first sub-gas pipeline is connected to the chamber;

[0025] An air outlet through which the second sub-gas pipeline is connected to the air extraction pump.

[0026] The structure of the sub-gas pipeline for stabilizing the air flow in the present utility model is ingenious and can effectively control the pressure of the pipeline. By rotating the adjusting nut of the sub-gas pipeline, the air pressure at the air inlet is changed, so that the swing of the indicating bar is controlled within a normal range. When pipeline purging is required, high-pressure gas is injected into the gas connector, causing the valve core to move to the right, and the internal channel of the valve core is fully opened, losing the throttling pressure control function. When the purging is completed, the pressure inside the gas connector is released, and under the action of the return spring, the valve core returns to its original position, and normal processes can be carried out. Description of the Drawings

[0027] The above-mentioned utility model content of the present utility model and the following specific implementation manners will be better understood when read in conjunction with the accompanying drawings. It should be noted that the drawings are only examples of the claimed utility model. In the drawings, the same reference numerals represent the same or similar elements.

[0028] Figure 1 Showing the front view of the sub-gas pipeline for stabilizing the air flow according to an embodiment of the present utility model;

[0029] Figure 2 Showing the cross-sectional view of the sub-gas pipeline for stabilizing the air flow according to an embodiment of the present utility model;

[0030] Figure 3 Showing the three-dimensional view of the sub-gas pipeline for stabilizing the air flow according to an embodiment of the present utility model;

[0031] Figure 4 Showing the front view of the sub-gas pipeline for stabilizing the air flow according to an embodiment of the present utility model;

[0032] Figure 5 Showing the cross-sectional view of the sub-gas pipeline for stabilizing the air flow according to an embodiment of the present utility model;

[0033] Figure 6 Showing the enlarged view of the locking block and its surrounding components according to an embodiment of the present utility model;

[0034] Figure 7A Showing the front view of the main body according to an embodiment of the present utility model;

[0035] Figure 7B Shows a cross-sectional view of the main body in the AB-AB direction according to an embodiment of the present utility model;

[0036] Figure 7C Shows Figure 7B a cross-sectional view of the AC-AC direction of;

[0037] Figure 8A Shows the front view of the locking block according to an embodiment of the present utility model;

[0038] Figure 8B Shows a cross-sectional view of the locking block in the AB-AB direction according to an embodiment of the present utility model;

[0039] Figure 8C Shows the top view of the locking block according to an embodiment of the present utility model;

[0040] Figure 8D Shows the isometric view of the locking block according to an embodiment of the present utility model. Detailed implementation manners

[0041] The following details the detailed features and advantages of the present utility model in the specific implementation manners. The content is sufficient for any person skilled in the art to understand the technical content of the present utility model and implement it accordingly. And according to the description, claims and drawings disclosed in this specification, those skilled in the art can easily understand the relevant purposes and advantages of the present utility model. Although the description of the present utility model will be introduced in conjunction with the preferred embodiments, this does not mean that the features of this utility model are limited to this implementation manner. On the contrary, the purpose of introducing the utility model in conjunction with the implementation manner is to cover other alternatives or modifications that may extend based on the claims of the present utility model. In order to provide a deep understanding of the present utility model, many specific details will be included in the following description. The present utility model can also be implemented without these details. In addition, in order to avoid confusing or obscuring the key points of the present utility model, some specific details will be omitted in the description.

[0042] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0043] In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal", and "vertical" used in the following description should be understood as the orientations shown in this section and the related drawings. Such relative terms are for convenience of description only and do not represent that the devices described need to be manufactured or operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.

[0044] It can be understood that although terms such as "first", "second", "third", etc. may be used herein to describe various components, channels, components, regions, layers, and / or parts, these components, channels, components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers, and / or parts. In addition, the terms "first", "second", "third" are for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] As shown in this application and the claims, unless the context clearly indicates an exception, words such as "a", "an", "one", and / or "the" are not specifically singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0046] In some embodiments, numbers are used to describe the components and property quantities. It should be understood that such numbers used for the description of embodiments are modified by the modifiers "about", "approximate", or "substantially" in some examples. Unless otherwise stated, "about", "approximate", or "substantially" indicate that the said numbers allow a variation of ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, and this approximate value can change according to the characteristics required by individual embodiments. In some embodiments, the numerical parameters should consider the specified significant digits and adopt the method of retaining the general number of digits. Although the numerical ranges and parameters used to confirm the breadth of the scope in some embodiments of this application are approximate values, in specific embodiments, such numerical settings are as precise as possible within the feasible range.

[0047] Meanwhile, this application uses specific words to describe the embodiments of this application. Such as "one embodiment", "an embodiment", and / or "some embodiments" mean a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that the "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more at different positions in this specification is not necessarily the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.

[0048] Figure 1 The front view of the sub-gas pipeline for stabilizing air flow according to an embodiment of the present utility model is shown. Figure 2 The cross-sectional view of the sub-gas pipeline for stabilizing air flow according to an embodiment of the present utility model is shown. Figure 3 The perspective view of the sub-gas pipeline for stabilizing air flow according to an embodiment of the present utility model is shown.

[0049] As Figures 1 - 3 shown, the sub-gas pipeline for stabilizing air flow of the present utility model has an air inlet and two air distribution ports. The air inlet can be used to receive a process gas source. One of the two air distribution ports is used to connect to an air extraction pump, and the other air distribution port is used to connect to a chamber. Of course, the two air distribution ports can also be used to connect to other devices. Those skilled in the art should understand that the present utility model is not limited to the specific devices or gases connected to the three ports.

[0050] Figure 4 The front view of the sub-gas pipeline for stabilizing air flow according to an embodiment of the present utility model is shown. Figure 5 The cross-sectional view of the sub-gas pipeline for stabilizing air flow according to an embodiment of the present utility model is shown.

[0051] Combined Figure 4 and Figure 5 , the sub-gas pipeline for stabilizing air flow of the present utility model includes an air inlet 1, a locking spring 2, a locking block 3, a fixing screw 4, an indicating strip 5, a measuring bellows 6, a detection port 7, an outer ring bellows 8, a valve core 9, an air joint 10, an adjusting nut 11, a main body 12, an air outlet 13, an inner ring bellows 14, a telescopic bellows 15, and a return spring 16.

[0052] Among them, the locking block 3, the fixing screw 4, and the locking spring 2 form a locking device. The locking spring 2, the locking block 3, the fixing screw 4, the outer ring bellows 8, the valve core 9, the air joint 10, the adjusting nut 11, the inner ring bellows 14, the telescopic bellows 15, and the return spring 16 form a pressure adjusting device. The measuring bellows 6 and the indicating strip 5 form a pressure indicating device.

[0053] Figure 7A The front view of the main body according to an embodiment of the present utility model is shown. Figure 7B The cross-sectional view of the main body in the AB-AB direction according to an embodiment of the present utility model is shown. Figure 7C Shown Figure 7B the cross-sectional view in the AC-AC direction of

[0054] The main body 12 includes an intake pipeline, a first sub-gas pipeline, and a second sub-gas pipeline.

[0055] The intake pipeline is connected to the air inlet 1, and the air inlet 1 is connected to a reaction source. In one embodiment, the air inlet 1 is welded to the air inlet 1.

[0056] The first branch pipeline is connected to the detection port 7 and the pressure control chamber. In one embodiment, the detection port 7 is welded to the first branch gas pipeline.

[0057] The second branch pipeline is connected to the air outlet 13 and the air extraction pump. In one embodiment, the air outlet 13 is welded to the second branch gas pipeline.

[0058] A pressure adjustment device is provided on the second branch gas pipeline of the main body 12.

[0059] A pressure indicating device is provided on the first branch gas pipeline of the main body 12.

[0060] The main body 12 is further connected with a gas joint 13 on the second branch gas pipeline, which is located under the pressure adjustment device. This gas joint is connected to the purging gas source. In one embodiment, the gas joint 13 is threadedly connected to the main body 12. When purging is not carried out, a sealed state is formed between the gas joint 13 and the main body 12.

[0061] In one embodiment, the pressure indicating device includes an indicating bar 5 and measuring bellows 6 located on both sides of the indicating bar 5. There are two measuring bellows. One end of each measuring bellows 6 is fixedly connected to the indicating bar, and the other end is fixedly connected to the main body 12. The measuring bellows 6 has elasticity. One side of the indicating bar 5 close to the detection port is associated with the chamber pressure, and one side of the indicating bar 5 close to the air inlet is associated with the gas pressure of the reaction source. When the indicating bar is at the zero scale, it means that the chamber pressure is consistent with the gas pressure of the reaction source entering the air inlet. If the chamber pressure is greater than the reaction gas pressure, the indicating bar 5 moves towards the air inlet side; if the chamber pressure is less than the gas source pressure, the indicating bar 5 moves towards the detection port side.

[0062] In one embodiment, the pressure adjustment device includes a locking spring 2, a locking block 3, a fixing screw 4, an outer ring bellows 8, a valve core 9, an adjusting nut 11, an inner ring bellows 14, a telescopic bellows 15, and a return spring 16.

[0063] In one embodiment, one end of the valve core 9 is installed inside the main body 12 and can slide freely. The other end of the valve core 9 is connected to the outer ring bellows 8 and the inner ring bellows 14.

[0064] One end of the inner ring bellows 14 is connected to the valve core 9, and the other end is fixedly connected to the main body. The inner ring bellows 14 is buried inside the second branch gas pipeline of the main body 12.

[0065] One end of the outer ring bellows 8 is connected to the valve core 9, and the other end is fixedly connected to the main body.

[0066] The outer bellows 8 is sleeved outside the inner bellows 8, and a sealed annular region is formed between the two. When the purging gas enters from the gas joint 10, the gas in the annular region expands, pushing the valve core in the direction of the air outlet 13.

[0067] The adjusting nut 11 is threadedly connected to the main body 12 and can be rotated for fine adjustment. The adjusting nut 11 is sleeved outside the valve core 9, and a telescopic bellows 15 and a return spring 16 are arranged between the two. The telescopic bellows 15 is used to isolate the gas. Rotating the adjusting nut 11 changes the size of the air inlet channel in the valve core 9 to increase or decrease, thereby changing the pressure of the gas entering from the air inlet, and further moving the indicating bar in the pressure indicating device to the desired target position.

[0068] The return spring 16 is used to reset the position of the valve core after purging.

[0069] Figure 6 Shows an enlarged view of the locking block and its surrounding components according to an embodiment of the present invention. Figure 8A Shows the front view of the locking block according to an embodiment of the present invention. Figure 8B Shows the cross-sectional view of the locking block in the AB-AB direction according to an embodiment of the present invention. Figure 8C Shows the top view of the locking block according to an embodiment of the present invention. Figure 8D Shows the isometric view of the locking block according to an embodiment of the present invention.

[0070] Combined Figure 6 , Figures 8A - 8D , the upper part of the locking block 3 has a dovetail groove, and the locking block 3 is installed on the dovetail slide rail of the main body 12, so that the locking block 3 can slide along the slide rail. A locking spring 2 is installed between one side of the locking block 3 and the main body. The fixing screw 4 is threadedly installed at the lower part of the locking block 3 to play a role in locking and fixing. Specifically, after the adjusting nut 11 is finely adjusted, the locking spring 2 pushes the locking block 3 in the direction of the air outlet. Since the fixing screw 4 is fixed on the locking block 3, the fixing screw 4 also moves accordingly until it abuts against the adjusting nut 11, thereby locking its position.

[0071] The working mode of the sub-air pipeline of the present utility model is as follows: Connect the sub-air pipeline of the present utility model to the pipeline, connect the air inlet to the chemical source, connect the air outlet to the pressure control chamber, and connect the air outlet to the pump to carry out the normal process. At this time, it is found that the indicator bar swings alternately with the valve state. The indicator bar is used to judge whether the pressure of the air inlet is consistent with the pressure of the controlled gas (chamber pressure). By adjusting the adjusting nut, the pressure of the air inlet is adjusted, so as to reach a balance point, so that when the valve is switched, the pressure of the air inlet remains stable. When pipeline purging is required, high-pressure gas is injected into the air joint, so that the valve core moves to the right, and the internal channel of the valve core is fully opened, losing the throttling pressure control function. When the purging is over, the internal pressure of the air joint is removed, and under the action of the return spring, the valve core returns to its original position and normal process can be carried out.

[0072] Specifically, when the indicator bar is at the left end, it means that the pressure of the controlled gas is greater than the pressure of the air inlet. At this time, the pressure of the air inlet needs to be increased. Then rotate the adjusting nut to adjust the valve core, so that the air inlet channel becomes smaller, and then the gas is throttled and the pressure increases. The indicator bar moves towards the middle. Continue to adjust until the condition position is met (the fluctuation within the middle two lines is qualified). When purging is required, compressed air is injected into the air joint, and the whole valve core moves to the right, and the channel is fully opened. At this time, normal purging can be carried out. When the purging is over, the compressed air is discharged, and it returns to its original position under the action of the spring, and normal production activities can be carried out.

[0073] The terms and expressions used above are only for description, and the present utility model should not be limited to these terms and expressions. The use of these terms and expressions does not mean excluding any equivalent features of the illustration and description (or part of them). It should be recognized that various modifications that may exist should also be included within the scope of the claims. Other modifications, variations and substitutions may also exist. Accordingly, the claims should be regarded as covering all such equivalents.

[0074] Similarly, it should be noted that, in order to simplify the expression of the disclosure of the present application and thus help the understanding of one or more embodiments of the utility model, in the foregoing description of the embodiments of the present application, sometimes multiple features are merged into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of the present application are more than those mentioned in the claims.

[0075] Also, it should be pointed out that although the present utility model has been described with reference to the current specific embodiments, those of ordinary skill in the art in this technical field should recognize that the above embodiments are only used to illustrate the present utility model, and various equivalent changes or substitutions can be made without departing from the spirit of the present utility model. Therefore, as long as the changes and modifications of the above embodiments are within the scope of the spirit of the present utility model, they will fall within the scope of the claims of the present application.

Claims

1. A gas distribution pipeline for stabilizing gas flow, characterized in that: The gas distribution pipeline comprises: Main body, pressure regulating device and pressure indicating device; The main body comprises: an air intake pipeline, a first air branch pipeline and a second air branch pipeline branched from the air intake pipeline; the air intake pipeline is connected to a reaction source; the first air branch pipeline is connected to a chamber; and the second air branch pipeline is connected to an air pump; Wherein, the pressure indicating device is arranged on the first gas distribution pipeline; the pressure indicating device comprises an indicating strip and two measuring bellows located on both sides of the indicating strip; Wherein, the pressure regulating device is arranged on the second air distribution pipeline; the pressure regulating device comprises a valve core which can slide freely inside the main body, an adjusting nut which is sleeved outside the valve core and threadedly connected to the main body, and a locking device.

2. The gas distribution pipeline for stabilizing gas flow according to claim 1, characterized in that: One end of each of the two measuring bellows is fixedly connected to the indicator strip, and the other end is fixedly connected to the main body; the two measuring bellows are retractable.

3. The gas distribution pipeline for stabilizing gas flow according to claim 1, characterized in that: The pressure on one side of the indicator bar is associated with the chamber, and the pressure on the other side of the indicator bar is associated with the gas pressure from the intake pipe; when the indicator bar is at the zero scale, it indicates that the pressure of the chamber is balanced with the gas pressure from the intake pipe.

4. The gas distribution pipeline for stabilizing gas flow according to claim 1, characterized in that: The second gas distribution pipeline is also connected to a gas joint below the position of the pressure regulating device, and the gas joint is connected to a purge gas source.

5. The gas distribution pipeline for stabilizing gas flow according to claim 4, characterized in that: The gas connector is connected to the main body via threads; when purging is performed, the gas connector introduces purging gas into the gas distribution pipeline; when purging is not performed, the gas connector and the main body are sealed.

6. The gas distribution pipeline for stabilizing gas flow according to claim 4, characterized in that: The pressure regulating device comprises an outer ring bellows and an inner ring bellows; One end of the valve core is slidably installed inside the main body, and the other end is connected to the outer ring bellows and the inner ring bellows; One end of the inner ring bellows is connected to the valve core, and the other end is fixedly connected to the main body, and the inner ring bellows is buried inside the second air distribution pipeline of the main body; One end of the outer ring bellows is connected to the valve core, and the other end is fixedly connected to the main body. The outer ring bellows is sleeved outside the inner ring bellows, and a sealed annular area is formed between the outer ring bellows and the inner ring bellows. When the purge gas enters from the gas joint, the gas in the annular area expands, pushing the valve core to move toward the vacuum pump.

7. The gas distribution pipeline for stabilizing gas flow according to claim 1, characterized in that: The pressure adjustment device also includes: a telescopic bellows and a return spring; The telescopic bellows and the reset spring are arranged between the adjusting nut and the valve core; the telescopic bellows is used to isolate the gas; and the reset spring resets the position of the valve core after the purging is completed.

8. The gas distribution pipeline for stabilizing gas flow according to claim 1, characterized in that: The locking device comprises: a locking block, a fixing screw and a locking spring; The upper part of the locking block is provided with a dovetail groove, and the locking block is installed on the dovetail slide rail of the main body so that the locking block slides along the slide rail; the locking spring is installed between one side of the locking block and the main body; the fixing screw is installed at the lower part of the locking block through a thread to play a locking and fixing role.

9. The gas distribution pipeline for stabilizing gas flow according to claim 1, characterized in that: Also includes: An air inlet, through which the air inlet pipeline is connected to a reaction source; A detection port, through which the first gas distribution pipeline is connected to the chamber; An air outlet, wherein the second air distribution pipeline is connected to the air pump through the air outlet.

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