Vibration reduction motion platform and welding equipment

Abstract

The utility model belongs to the technical field of machining, and relates to a vibration reduction motion platform which comprises a base, a motion workbench and a first driving device. The moving workbench is arranged on the base in a sliding mode. The first driving device comprises a driving motor and at least one vibration reduction assembly; the driving motor comprises a stator and a rotor, one end of the rotor is connected with the moving workbench to drive the moving workbench to move, and the other end of the rotor is connected with the stator which is slidably arranged on the base. The vibration reduction assembly comprises a vibration reduction support, a vibration reduction piece, flexible pieces and damping pieces, the vibration reduction support is fixed to the base and located on one side of the stator, the vibration reduction piece is fixedly connected to the stator, and in the moving direction of the rotor, the two opposite sides of the vibration reduction piece are connected to the vibration reduction support through the flexible pieces and the damping pieces respectively. The utility model further relates to welding equipment adopting the vibration reduction motion platform. According to the technical scheme, the impact on the base when the stator is stressed can be reduced, and the positioning precision of the motion workbench can be improved.

Description

Technical Field

[0001] This application relates to the field of processing technology, and more specifically, to a vibration-damping motion platform and a welding device. Background Art

[0002] With the rapid development of the electronics industry, the production demand for microelectronic devices is increasing continuously. In the field of semiconductor packaging, wire bonding technology is a key process. The driving motor and the motion platform are the basic components of the wire bonding machine. The accuracy and stability of the driving motor are crucial for the welding quality. In the prior art during the welding process, the reaction force generated by the moving components in the motion platform acts on the linear motor, affecting its positioning accuracy and thus the welding quality. When the driving motor drives the motion platform to move, the reaction force generated by the movement of the motion platform is transmitted to the base and then through the base to the pedestal of the wire bonding machine connected to the motion platform, causing vibration of the wire bonding machine, especially obvious under high-speed movement, which will affect the positioning accuracy of the motion platform and thus the welding quality. Summary of the Utility Model

[0003] The technical problem to be solved by the embodiments of this application is that the reaction force generated by the moving components in the motion platform acts on the linear motor, affecting its positioning accuracy.

[0004] To solve the above technical problem, the embodiments of this application provide a vibration-damping motion platform, adopting the following technical solutions:

[0005] A vibration-damping motion platform includes a pedestal, a motion workbench, and a first driving device;

[0006] The motion workbench is slidably arranged on the pedestal;

[0007] The first driving device includes a driving motor and at least one vibration-damping component;

[0008] The driving motor includes a stator and a rotor. One end of the rotor is connected to the motion workbench to drive the motion workbench to move, and the other end is connected to the stator. The stator is slidably arranged on the pedestal;

[0009] The vibration-damping component includes a vibration-damping bracket, vibration-damping sheets, flexible members, and damping members. The vibration-damping bracket is fixed to the pedestal and located on one side of the stator. The vibration-damping sheets are fixedly connected to the stator, and in the movement direction of the rotor, opposite sides of the vibration-damping sheets are each connected to the vibration-damping bracket through a set of the flexible members and the damping members.

[0010] Further, the stator is slidably connected to the pedestal through a first guide rail assembly;

[0011] The first guide rail assembly includes a pair of first guide rails and at least two pairs of first sliders arranged on the first guide rails. Each of the first sliders is connected to the stator, and the first sliders are evenly distributed on the end face of the stator.

[0012] Further, the first driving device further includes a counterweight member, and the counterweight member is detachably arranged on the stator.

[0013] Further, the flexible member is a spring or rubber;

[0014] The damping member is a damper or a buffer.

[0015] Further, the vibration damping moving platform further includes a second driving device, and the moving workbench includes a first workbench and a second workbench that are slidably connected;

[0016] The structure of the second driving device is the same as that of the first driving device, and has different driving directions. The first workbench is slidably arranged on the base, and the mover of the first driving device is connected to the first workbench to drive the first workbench and the second workbench to move in a first direction, and the mover of the second driving device is connected to the second workbench to drive the second workbench to move in a second direction.

[0017] Further, the mover of the second driving device is connected to the second workbench through a second guide rail assembly;

[0018] The second guide rail assembly includes a second guide rail and a second slider that are slidably connected. The second guide rail and the second slider are respectively connected to the second workbench and the mover of the second driving device, and the second guide rail is arranged parallel to the moving direction of the mover of the first driving device to achieve decoupling of the second workbench from the first workbench when the second workbench moves alone.

[0019] Further, a first position feedback assembly is arranged between the stator and the mover, a second position feedback assembly is arranged between the first workbench and the base, and a third position feedback assembly is arranged between the first workbench and the second workbench;

[0020] The first position feedback assembly is used to feedback the relative position between the stator and the mover in real time, the second position feedback assembly is used to feedback the position of the first workbench in real time, and the third position feedback assembly is used to feedback the position of the second workbench in real time.

[0021] Further, the first position feedback assembly, the second position feedback assembly, and the third position feedback assembly all include a position reading component and a grating scale;

[0022] Among them, the position reading component and the grating scale in the first position feedback component are respectively fixed to the stator and the mover, the position reading component and the grating scale in the second position feedback component are respectively fixed to the first workbench and the base, and the position reading component and the grating scale in the third position feedback component are respectively fixed to the second workbench and the first workbench.

[0023] Further, the first direction and the second direction are perpendicular to each other.

[0024] In order to solve the above technical problems, the embodiments of the present application provide a welding device, which adopts the following technical solutions:

[0025] A welding device, which includes the above-mentioned vibration damping motion platform.

[0026] Compared with the prior art, the embodiments of the present application mainly have the following beneficial effects:

[0027] When the mover of the first driving device of the present application pushes the moving workbench, the reaction force received by the first driving device causes the stator to move in the opposite direction, that is, the reaction force does not directly act on the base, which can reduce the impact on the base when the stator is stressed. The vibration damping component provided on one side of the stator provides buffering for the stator, and the stator makes a reciprocating oscillating motion on the base, which can further reduce the impact of the stator on the base and is beneficial to improving the positioning accuracy; in addition, the vibration damping component is provided as an independent component on one side of the stator. On the one hand, it can simplify the structure of the driving motor, and on the other hand, it is convenient for the disassembly and replacement of the vibration damping component, with high flexibility. Description of the Drawings

[0028] In order to more clearly illustrate the solutions in the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0029] Figure 1 It is a schematic structural diagram of the vibration damping motion platform provided by an embodiment of the present application;

[0030] Figure 2 It is a schematic structural diagram of the first driving device provided by an embodiment of the present application;

[0031] Figure 3 It is a schematic structural diagram of the vibration damping motion platform provided by another embodiment of the present application;

[0032] Figure 4 It is a schematic structural diagram of the first guide rail assembly on the vibration damping motion platform provided by an embodiment of the present application;

[0033] Figure 5 Schematic diagram of the vibration damping motion platform structure provided by another embodiment of the present application.

[0034] Reference numerals:

[0035] Base 100, moving workbench 200, first workbench 210, second workbench 220, first driving device 300, driving motor 310, vibration damping assembly 320, stator 311, rotor 312, vibration damping bracket 321, vibration damping sheet 322, flexible member 323, damping member 324, first guide rail assembly 330, first guide rail 331, first slider 332, counterweight 340, second driving device 400, second guide rail assembly 410, second guide rail 411, second slider 412, first position feedback assembly 500, second position feedback assembly 600, third position feedback assembly 700. Detailed implementation manners

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion. The terms "first", "second", etc. in the specification and claims of this application or the above drawings are used to distinguish different objects and not to describe a specific order.

[0037] Reference to "embodiment" herein means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of this application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0038] In order to enable those skilled in the art of this technology to better understand the solution of this application, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings.

[0039] The embodiment of this application provides a vibration damping motion platform, such as Figure 1 and Figure 2As shown, the vibration damping motion platform includes a base 100, a motion workbench 200, and a first driving device 300; the motion workbench 200 is slidably disposed on the base 100; the first driving device 300 includes a driving motor 310 and at least one vibration damping component 320; the driving motor 310 includes a stator 311 and a rotor 312, one end of the rotor 312 is connected to the motion workbench 200 to drive the motion workbench 200 to move, and the other end is connected to the stator 311, and the stator 311 is slidably disposed on the base 100.

[0040] The vibration damping component 320 includes a vibration damping bracket 321, a vibration damping sheet 322, a flexible member 323, and a damping member 324. The vibration damping bracket 321 is fixed to the base 100 and is located on one side of the stator 311. The vibration damping sheet 322 is fixedly connected to the stator 311. In the moving direction of the rotor 312, each of the opposite two sides of the vibration damping sheet 322 is connected to the vibration damping bracket 321 through a set of the flexible member 323 and the damping member 324. Specifically, as Figure 2 shown, one end of the vibration damping sheet 322 is detachably connected to the stator 311, and the other end is in a sheet shape. This sheet-shaped structure is perpendicular to the moving direction of the rotor 312. On both sides of the sheet-shaped structure, a flexible member 323 and a damping member 324 are connected to each side. The flexible member 323 and the damping member 324 have the functions of vibration damping and energy absorption. Initially, the flexible members 323 and the damping members 324 on both sides of the vibration damping sheet 322 are in a balanced state. When the stator 311 receives a reaction force and moves, this balance is broken. The flexible members 323 and the damping members 324 on one side are compressed, and those on the other side are stretched. Thereby, a restoring force is generated to make the stator 311 reciprocate until it returns to the balanced state again.

[0041] When the rotor 312 of the first driving device 300 of the present application pushes the motion workbench, the reaction force received by the first driving device 300 causes the stator 311 to move in the opposite direction, that is, the reaction force does not directly act on the base 100, which can reduce the impact on the base 100 when the stator 311 is stressed. The vibration damping component 320 provided on one side of the stator 311 provides buffering for the stator 311. The stator 311 makes a reciprocating oscillating motion on the base. The vibration damping component 320 absorbs the reaction force received by the stator 311, which can further reduce the impact of the stator 311 on the base 100, and is beneficial to improving the positioning accuracy of the driving device and the motion workbench; in addition, the vibration damping component 320 is provided as an independent component on one side of the stator 311. On the one hand, the structure of the driving motor 310 can be simplified, and on the other hand, it is convenient for the disassembly and replacement of the vibration damping component 320, with high flexibility.

[0042] In one embodiment, as Figure 3As shown, the vibration damping motion platform further includes a second driving device 400. The motion workbench includes a first workbench 210 and a second workbench 220 that are slidably connected. The structure of the second driving device 400 is the same as that of the first driving device 300, but they have different driving directions. Specifically, the second driving device 400 has the same structural components as the first driving device 300. To adapt to the overall structure of the motion platform, the components of the second driving device 400 may differ from the similar components in the first driving device 300 in terms of size and installation position. For example, the size of the mover of the second driving device 400 is larger than that of the first driving device 300. Another example is that based on the moving direction of the mover, the vibration damping assembly of the second driving device 400 is arranged on the right side of the stator, while the vibration damping assembly 320 of the first driving device 300 is arranged on the left side of the stator 311.

[0043] In this embodiment, the first workbench 210 is slidably arranged on the base 100. The mover 312 of the first driving device 300 is connected to the first workbench 210 to drive the first workbench 210 and the second workbench 220 to move in a first direction. The mover of the second driving device 400 is connected to the second workbench 220 to drive the second workbench 220 to move in a second direction.

[0044] In other embodiments, the vibration damping motion platform may further have more driving devices. The driving directions of the driving devices are different. Correspondingly, the motion workbench may include multiple sub-platforms that are sequentially slidably connected, and each sub-platform is connected to each driving device in a one-to-one correspondence.

[0045] In this embodiment, by providing two or more driving devices, more flexible motion control can be provided for the motion workbench to meet the actual processing needs.

[0046] For the sake of simplicity in description, when describing the structure of the driving device, the following embodiments will exemplarily elaborate on the specific structure of the first driving device 300.

[0047] In one embodiment, as Figure 4 shown, the stator 311 is slidably connected to the base 100 through a first guide rail assembly 330. The first guide rail assembly includes a pair of first guide rails 331 arranged in pairs and at least two pairs of first sliders 332 arranged on the first guide rails. Each of the first sliders is connected to the stator 311, and each of the first sliders is evenly distributed on the end face of the stator 311. Correspondingly, the second driving device 400 may also include a first guide rail assembly, and there may be differences in size and quantity.

[0048] In this embodiment, two first guide rails are used to connect with at least four first sliders between the stator 311 and the base 100. The uniformly distributed second sliders support the stator 311. The first guide rails and the first sliders provide sufficient supporting force to support the stator 311, thereby improving the stiffness of the stator 311. At the same time, sufficient strength is provided in the rotational direction of the relative movement direction of the stator 311 to prevent the stator 311 from generating rotational movement during movement, ensuring the consistency of movement.

[0049] In one embodiment, as Figure 5 shown, the first driving device 300 further includes a counterweight 340. The counterweight 340 is detachably arranged on the stator 311, and different weights of counterweights 340 can be disassembled and replaced as needed. In this embodiment, the counterweight 340 is assembled on the stator 311, which can adjust the speed and amplitude of the stator 311 during reverse movement. And since both the damper 324 and the flexible member 323 are flexible links, they have the functions of vibration reduction and energy absorption. By reasonably calculating the mass of the counterweight 340 and the coefficients of the damper 324 and the flexible member 323, the optimal coefficients can be obtained to minimize the force transmitted to the base 100. Correspondingly, the second driving device 400 may also include a counterweight 340, and there may be differences in size and weight.

[0050] In this embodiment, the counterweight 340 is a metal alloy part such as iron or steel, so that a relatively small volume can provide a large counterweight, which is beneficial to ensuring the structural compactness of the first driving device 300.

[0051] In one embodiment, two flexible members 323 are coaxially arranged, and two flexible members 323 are also coaxially arranged. The flexible member 323 is a spring or rubber; the damper 324 is a damper or a buffer.

[0052] In one embodiment, the moving workbench can be a rotating motor ball screw drive platform, or a voice coil motor, a linear motor drive platform, etc.

[0053] In one embodiment, referring back to Figure 3 , the mover of the second driving device 400 is connected to the second workbench 220 through a second guide rail assembly 410; the second guide rail assembly includes a second guide rail 411 and a second slider 412 that are slidably connected. The second guide rail and the second slider are respectively connected to the second workbench 220 and the mover of the second driving device 400, and the second guide rail is arranged parallel to the movement direction of the mover 312 of the first driving device 300 to achieve decoupling of the second workbench 220 during independent movement from the first workbench 210.

[0054] In one embodiment, referring back to Figure 5, a first position feedback component 500 is provided between the stator 311 and the rotor 312 of the first driving device 300, a second position feedback component 600 is provided between the first workbench 210 and the base 100, and a third position feedback component 700 is provided between the first workbench 210 and the second workbench 220; the first position feedback component 500 is used to feedback the relative position between the stator 311 and the rotor 312 in real time, the second position feedback component 600 is used to feedback the position of the first workbench 210 in real time, and the third position feedback component 700 is used to feedback the position of the second workbench 220 in real time. Correspondingly, a first position feedback component 500 can also be provided between the stator and the rotor of the second driving device to achieve the same function in another moving direction.

[0055] In this embodiment, while monitoring the positions of the first workbench 210 and the second workbench 220, the relative positions between the stators and the rotors of the first driving device 300 and the second driving device 400 are also monitored in real time. Control can be performed based on the detected data, so that the driving efficiency is the highest, and the positioning accuracy of the moving workbench is further improved, which can achieve a positioning accuracy of the micron level.

[0056] Further, the first position feedback component 500, the second position feedback component 600, and the third position feedback component 700 all include a position reading component and a grating scale; wherein, the position reading component and the grating scale in the first position feedback component 500 are respectively fixed to the stator 311 and the rotor 312, the position reading component and the grating scale in the second position feedback component 600 are respectively fixed to the first workbench 210 and the base 100, and the position reading component and the grating scale in the third position feedback component 700 are respectively fixed to the second workbench 220 and the first workbench 210.

[0057] Specifically, by reading the relative position between the rotor 312 and the stator 311 through the position reading component and giving it to the controller, the highest driving efficiency of the first driving device 300 and the second driving device 400 can be obtained, and by reading the positions of the first workbench 210 and the second workbench 220 through the position reading component and giving it to the controller, the movements in two driving directions can be positioned to improve the positioning accuracy.

[0058] In one embodiment, the first direction and the second direction are preferably perpendicular to each other, forming an XY linear platform, that is Figure 5 a linear platform having two driving directions in the X direction and the Y direction as shown. Of course, in other embodiments, the first direction and the second direction may not be perpendicular.

[0059] For the above embodiments, the following is taken as an example Figure 5Taking the X direction (the moving direction of the mover 312 of the first driving device 300) as an example, combined with Figure 5 to illustrate the principle of the reaction force compensation of the stator 311 of the present invention: when the first driving device 300 drives the first workbench 210 and the second workbench 220 to move simultaneously in the X direction, the mover 312 of the first driving device 300 generates reaction forces on the stator 311 that are equal in magnitude and opposite in direction, causing the stator 311 to slide along the first guide rail. The sliding direction of the stator 311 is opposite to the moving direction of the first workbench 210. During the reverse movement of the stator 311, the damping member 324 at one end buffers it, causing it to gradually decelerate and avoiding a direct impact on the base 100 due to a rigid connection. At the same time, the flexible member 323 at the same end is compressed and contracted, storing the kinetic energy of the stator 311 in the X direction. When the speed of the stator 311 decreases to zero, the flexible member 323 rebounds, ejecting the stator 311. The moving direction after ejection is the same as the moving direction of the first workbench 210. Repeating this process, during the movement of the first workbench 210, the stator 311 will perform a reciprocating oscillating movement near the initial position under the action of the flexible member 323 and the damping member 324. Due to friction and losses during the movement, the amplitude of the oscillating movement of the stator 311 will gradually decrease until it stops moving, and there will be no large acceleration, so there will be no sudden impact on the base 100. Since the reaction force received by the base 100 is very small and can hardly cause vibration of the base 100, the positioning accuracy and measurement accuracy of the moving workbench are improved. The movement principle of the second driving device 400 is the same as that of the first driving device 300. Therefore, in Figure 5 the Y direction shown, there will also be no large acceleration, avoiding a sudden impact on the base 100.

[0060] The embodiment of the present application also provides a welding device. The welding device includes the vibration-damping moving platform described in the above embodiment and has corresponding technical effects, which will not be elaborated here.

[0061] Obviously, the embodiments described above are only a part of the embodiments of the present application, rather than all of the embodiments. The accompanying drawings show the preferred embodiments of the present application, but do not limit the patent scope of the present application. The present application can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosed content of the present application more thorough and comprehensive. Although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing specific embodiments or perform equivalent replacements for some of the technical features. Any equivalent structure directly or indirectly using the content of the specification and drawings of the present application in other related technical fields is equally within the scope of the patent protection of the present application.

Claims

1. A vibration reduction motion platform, characterized in that: It includes a base, a moving workbench and a first driving device; The moving workbench is slidably arranged on the base; The first drive device includes a drive motor and at least one vibration reduction assembly; The driving motor comprises a stator and a mover, one end of the mover is connected to the moving workbench to drive the moving workbench to move, and the other end is connected to the stator, and the stator is slidably arranged on the base; The vibration reduction assembly includes a vibration reduction bracket, a vibration reduction plate, a flexible member and a damping member. The vibration reduction bracket is fixed to the base and is located on one side of the stator. The vibration reduction plate is fixedly connected to the stator, and in the movement direction of the mover, the two opposite sides of the vibration reduction plate are each connected to the vibration reduction bracket through a group of the flexible member and the damping member.

2. The vibration reduction motion platform according to claim 1, characterized in that: The stator is slidably connected to the base via a first guide rail assembly; The first guide rail assembly includes first guide rails arranged in pairs and at least two pairs of first sliders arranged on the first guide rails, each of the first sliders is connected to the stator, and each of the first sliders is evenly distributed on the end surface of the stator.

3. The vibration reduction motion platform according to claim 2, characterized in that: The first driving device further comprises a counterweight, and the counterweight is detachably arranged on the stator.

4. The vibration reduction motion platform according to claim 2, characterized in that: The flexible member is a spring or rubber; The damping element is a damper or a buffer.

5. The vibration reduction motion platform according to any one of claims 1 to 4, characterized in that: The vibration reduction motion platform further comprises a second driving device, and the motion workbench comprises a first workbench and a second workbench which are slidably connected; The structure of the second driving device is the same as that of the first driving device, and has a different driving direction. The first workbench is slidably arranged on the base. The mover of the first driving device is connected to the first workbench to drive the first workbench and the second workbench to move in the first direction. The mover of the second driving device is connected to the second workbench to drive the second workbench to move in the second direction.

6. The vibration reduction motion platform according to claim 5, characterized in that: The mover of the second driving device is connected to the second workbench through a second guide rail assembly; The second guide rail assembly includes a second guide rail and a second slider that are slidably connected, and the second guide rail and the second slider are respectively connected to the second workbench and the mover of the second driving device, and the second guide rail is arranged parallel to the movement direction of the mover of the first driving device to achieve decoupling of the second workbench from the first workbench when the second workbench moves alone.

7. The vibration reduction motion platform according to claim 5, characterized in that: A first position feedback component is provided between the stator and the mover, a second position feedback component is provided between the first workbench and the base, and a third position feedback component is provided between the first workbench and the second workbench; The first position feedback component is used for real-time feedback of the relative position of the stator and the mover, the second position feedback component is used for real-time feedback of the position of the first workbench, and the third position feedback component is used for real-time feedback of the position of the second workbench.

8. The vibration reduction motion platform according to claim 7, characterized in that: The first position feedback component, the second position feedback component and the third position feedback component all include a position reading component and a grating ruler; Among them, the position reading component and the grating ruler in the first position feedback component are respectively fixed to the stator and the mover, the position reading component and the grating ruler in the second position feedback component are respectively fixed to the first workbench and the base, and the position reading component and the grating ruler in the third position feedback component are respectively fixed to the second workbench and the first workbench.

9. The vibration reduction motion platform according to claim 5, characterized in that: The first direction and the second direction are perpendicular to each other.

10. A welding device, characterized in that: The welding equipment comprises the vibration-damping motion platform according to any one of claims 1 to 9.

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