High-speed moving device for chip testing

Abstract

The utility model discloses a high-speed moving device for chip testing. The high-speed moving device comprises a bottom plate; the working table is movably arranged on the bottom plate, and the working table can bear and fix a chip; the guide assembly comprises a sliding seat and a main body, the sliding seat is arranged on the bottom plate, the main body is arranged on the sliding seat in a lifting mode, and the workbench is arranged at the top of the main body; the voice coil motor comprises a mover part and a stator part, the stator part has magnetism and is located on the bottom plate, the mover part is provided with a coil and is connected to the bottom of the workbench, the stator part is provided with a slot, and the mover part is matched with the slot in an inserted mode. The device has the advantages of being small in size, small in occupied space and capable of reducing energy consumption.

Description

Technical Field

[0001] The utility model relates to the field of chip testing, in particular to a high-speed moving device for chip testing. Background Art

[0002] The probe station is mainly used for chip testing. During the testing process, since the needle card or the probe is usually fixedly arranged, the probe station needs to drive the chip to move step by step, and the probe station needs to move up and down at high frequency and high speed to drive the chip to contact the probe, so as to complete the chip testing.

[0003] In the related art, the up and down movement of the probe station is generally driven by a motor to rotate a lead screw. The probe station is rotatably connected to the lead screw, so that the rotation of the lead screw drives the probe station to lift. Since the lead screw structure has high precision, the precision of the up and down movement of the chip is relatively high.

[0004] However, due to the structural limitation of the probe station, it is usually large in volume and heavy in its own weight. If it is necessary to achieve high-speed operation by the way of driving the lead screw by a motor, only a motor with a larger power can be used to drive the lead screw to rotate, which results in a further increase in the volume of the overall structure, an increase in the occupied space, and thus an increase in energy consumption. Summary of the Utility Model

[0005] The utility model aims to at least solve one of the technical problems existing in the prior art. For this purpose, the utility model provides a high-speed moving device for chip testing, which has the effects of small volume, small occupied space and reduced energy consumption.

[0006] A high-speed moving device for chip testing according to an embodiment of the utility model includes: a bottom plate; a workbench movably arranged on the bottom plate, the workbench being capable of carrying and fixing a chip; a guiding component, which includes a sliding seat and a main body, the sliding seat is arranged on the bottom plate, the main body is arranged on the sliding seat in a liftable manner, and the workbench is arranged on the top of the main body; a voice coil motor, which includes a mover part and a stator part, the stator part has magnetism and is located on the bottom plate, the mover part is provided with a coil and is connected to the bottom of the workbench, the stator part is provided with a slot, and the mover part is inserted and matched with the slot.

[0007] A high-speed moving device for chip testing according to an embodiment of the present utility model has at least the following beneficial effects: When the workbench needs to move up and down at high frequency and high speed, a current is applied to the stator part. The current is input into the coil, causing a magnetic field to be generated around the coil. The magnetic field repels the magnetic field of the stator part, so that the stator part generates an upward thrust on the mover part, causing the mover part to drive the workbench upward and thus drive the chip upward. When the current is disconnected, the magnetic field around the coil disappears, so that the force between the stator part and the mover part disappears, and the stator part returns to the slot again, causing the workbench to descend due to its own gravity and thus drive the chip to descend. By repeating the above steps, the workbench can be lifted and lowered at high frequency and high speed. At the same time, since the voice coil motor has a small volume and high precision, the volume of the overall high-speed moving device is reduced, thereby improving the efficiency of chip testing. Moreover, there is no contact between the coil and the stator part, so there is no wear and resistance from the slot wall during the movement of the coil, resulting in a small moving load and further reducing energy consumption.

[0008] According to some embodiments of the present utility model, the sliding seat includes two oppositely arranged fixing plates. Guide rails are arranged on the fixing plates in the vertical direction. The main body is located between the two fixing plates and is slidably matched with the guide rails.

[0009] According to some embodiments of the present utility model, the high-speed moving device includes an elastic component, which is arranged between the workbench and the fixing plate. The elastic component is used to provide a supporting force for the workbench to reduce the force exerted by the workbench on the mover part.

[0010] According to some embodiments of the present utility model, the elastic component includes a connecting rod and a sleeve. A receiving groove is opened at the top of the fixing plate. The sleeve is arranged in the receiving groove. One end of the connecting rod is connected to the workbench, and the other end is inserted and matched with the sleeve. Both the connecting rod and the sleeve have magnetism and are of the same name magnetic poles.

[0011] According to some embodiments of the present utility model, the high-speed moving device includes a rotating component, which is arranged on the bottom plate. The rotating component is used to drive the workbench to rotate along its own axis.

[0012] According to some embodiments of the present utility model, the rotating component includes a rotating plate and a bearing component. The sliding seat is arranged on the rotating plate. An avoidance groove is penetrated through the top of the bottom plate. The rotating plate is located in the avoidance groove, and the bearing component is located between the rotating plate and the bottom plate.

[0013] According to some embodiments of the present utility model, the high-speed moving device includes a driving assembly for driving the rotating plate to rotate. The driving assembly includes a motor, a first synchronous pulley, a first synchronous belt, a second synchronous pulley, a second synchronous belt, and a third synchronous pulley. The motor is disposed on the bottom plate. The first synchronous belt is located between the output shaft of the motor and the first synchronous pulley. The first synchronous pulley and the second synchronous pulley rotate coaxially. The second synchronous belt is located between the second synchronous pulley and the third synchronous pulley. The third synchronous pulley is fixedly disposed at the bottom of the rotating plate, and the diameter of the third synchronous pulley is larger than that of the second synchronous pulley.

[0014] According to some embodiments of the present utility model, the diameter of the second synchronous pulley is smaller than that of the first synchronous pulley.

[0015] According to some embodiments of the present utility model, a position sensor is disposed on the bottom plate, and the position sensor is used to detect the rotation angle of the rotating plate.

[0016] According to some embodiments of the present utility model, the high-speed moving device includes a grating scale, and the grating scale is disposed on the sliding seat, and the grating scale is used to monitor the relative position between the main body and the sliding seat. Description of the Drawings

[0017] Figure 1 is a schematic diagram of the overall structure of an embodiment of the present application;

[0018] Figure 2 is a schematic cross-sectional view of the overall structure in an embodiment of the present application;

[0019] Figure 3 is an exploded schematic diagram of a voice coil motor in an embodiment of the present application;

[0020] Figure 4 is a schematic diagram of the structure of the driving assembly in an embodiment of the present application.

[0021] Description of the Reference Numerals: 100, bottom plate; 110, outer pressing plate; 200, workbench; 311, fixing plate; 3111, accommodating groove; 320, main body; 330, guide rail; 340, slider; 400, voice coil motor; 410, mover part; 420, stator part; 421, slot; 500, grating scale; 600, elastic component; 610, connecting rod; 620, sleeve; 710, rotating plate; 711, inner pressing plate; 721, crossed roller bearing; 810, motor; 820, first synchronous pulley; 830, first synchronous belt; 840, second synchronous pulley; 850, second synchronous belt; 860, third synchronous pulley; 900, position sensor. Detailed Embodiments

[0022] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where like or similar reference numerals denote like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model, and should not be construed as limiting the present utility model.

[0023] In the description of the present utility model, it should be understood that with respect to the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

[0024] In the description of the present utility model, if the first and second are described only for the purpose of distinguishing technical features, they should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0025] In the description of the present utility model, unless otherwise clearly defined, terms such as setting, installation, and connection should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meanings of the above terms in the present utility model in combination with the specific content of the technical solution.

[0026] The following will further elaborate on this application with reference to the attached Figures 1-4 drawings.

[0027] A high-speed moving device for chip testing proposed in an embodiment of the present utility model, referring to Figure 1 and Figure 2 , includes a bottom plate 100 and a workbench 200. The workbench 200 is disposed on the bottom plate 100 in a liftable manner. The workbench 200 is used to carry and fix the chip. Since the probe or the probe card is fixedly arranged, the chip is lifted and lowered by the lifting of the workbench 200, so that the probe abuts against the chip, thereby testing the chip.

[0028] It can be understood that in some embodiments of the present utility model, referring to Figure 1 and Figure 2 , the high-speed moving device includes a guiding component. The guiding component is used to drive the workbench 200 to lift and lower, so as to drive the chip to lift and lower. Specifically, the guiding component includes a sliding seat and a main body 320. The sliding seat is disposed on the bottom plate 100, and the main body 320 is disposed on the sliding seat in a liftable manner. The workbench 200 is disposed on the top of the main body 320. The main body 320 slides relative to the sliding seat to drive the workbench 200 to lift and lower.

[0029] Among them, referring toFigure 1 With Figure 2 , the sliding seat includes two oppositely arranged fixing plates 311. The fixing plates 311 are vertically arranged on the bottom plate 100, and the main body 320 is located between the two fixing plates 311. Guide rails 330 are arranged on the fixing plates 311 in the vertical direction. Two sliders 340 are respectively arranged on both sides of the main body 320. The two sliders 340 are respectively in sliding fit with the two guide rails 330. Thus, by sliding the sliders 340 relative to the guide rails 330, the main body 320 slides relative to the sliding seat to drive the workbench 200 to move up and down.

[0030] It can be understood that in some embodiments of the present utility model, referring to Figure 2 With Figure 3 , the high-speed moving device includes a voice coil motor 400. The voice coil motor 400 is used to provide the driving ability for the high-frequency and high-speed lifting of the workbench 200. The voice coil motor 400 is arranged between the bottom plate 100 and the workbench 200. Specifically, the voice coil motor 400 includes a mover part 410 and a stator part 420. The stator part 420 has magnetism and is fixedly arranged on the bottom plate 100. The mover part 410 is provided with a coil and one end of the mover part 410 is connected to the bottom of the workbench 200. A slot 421 is opened at the top of the stator part 420. The mover part 410 is in plug-in fit with the slot 421. When an electric current is passed through the stator part 420, the current is input into the coil, so that a magnetic field will be generated around the coil. The magnetic field repels the magnetic field of the stator part 420, so that the stator part 420 generates an upward moving thrust on the mover part 410, making the mover part 410 drive the workbench 200 to move upward, thereby driving the chip to move upward; when the current is disconnected, the magnetic field around the coil disappears, so that the acting force between the stator part 420 and the mover part 410 disappears, and the stator part 420 returns to the slot 421 again, making the workbench 200 descend by its own gravity, and then driving the chip to descend. Repeating the above steps can realize the high-frequency and high-speed lifting of the workbench 200. At the same time, since the volume of the voice coil motor 400 is small and the precision is high, the volume of the overall high-speed moving device is reduced, thereby improving the efficiency of chip testing. And there is no contact between the coil and the stator part 420, so there is no wear and resistance from the slot wall of the slot 421 when the coil moves, making the moving load small and further reducing the energy consumption.

[0031] It can be understood that in some embodiments of the present utility model, referring to Figure 1 , the high-speed moving device includes a grating scale 500. The grating scale 500 is arranged on the sliding seat. The grating scale 500 is used to monitor the relative position between the main body 320 and the sliding seat. When the workbench 200 is lifting, the grating scale 500 can detect the position of the main body 320 relative to the sliding seat, so as to feedback the driving situation of the voice coil motor 400, and further ensure the operation precision.

[0032] It can be understood that in some embodiments of the present utility model, referring to Figure 1 and Figure 2 , the high-speed moving device includes an elastic component 600. The elastic component 600 is arranged between the workbench 200 and the fixing plate 311. The elastic component 600 is used to provide a supporting force for the workbench 200 to reduce the acting force exerted by the workbench 200 on the mover part 410. Specifically, the elastic component 600 includes a connecting rod 610 and a sleeve 620. A receiving groove 3111 is formed at the top of the fixing plate 311. The sleeve 620 is received in the receiving groove 3111. One end of the connecting rod 610 is fixedly connected to the workbench 200, and the other end is inserted and matched with the sleeve 620. Both the connecting rod 610 and the sleeve 620 have magnetism and are like-named magnetic poles. When the connecting rod 610 and the sleeve 620 approach each other, a repulsive force will be generated between them, so that the sleeve 620 generates an upward moving thrust on the connecting rod 610, so that the thrust of the connecting rod 610 can offset part of the gravity of the workbench 200, thereby reducing the acting force of the workbench 200 on the mover part 410, so that the load of the voice coil motor 400 is reduced, and further the energy consumption is reduced.

[0033] It can be understood that in some embodiments of the present utility model, referring to Figure 1 and Figure 2 , the high-speed moving device includes a rotating component. The rotating component is arranged on the bottom plate 100. The rotating component is used to drive the workbench 200 to rotate along its own axis, so that when the probe tests one position of the chip, the relative position between the chip and the probe can be adjusted through the rotating component, so that the probe can test other positions of the chip.

[0034] It can be understood that in some embodiments of the present utility model, the rotating component includes a rotating plate 710 and a bearing component. The sliding seat is arranged on the rotating plate 710. A avoiding groove is formed through the top of the bottom plate 100. The rotating plate 710 is located in the avoiding groove, and the bearing component is located between the rotating plate 710 and the bottom plate 100. In this embodiment, the bearing component is a crossed roller bearing 721. The crossed roller bearing 721 is arranged on the groove wall of the avoiding groove. An inner pressing plate 711 is arranged at the edge of the rotating plate 710. The inner pressing plate 711 is arranged along the circumference of the rotating plate 710. An outer pressing plate 110 is arranged on the bottom plate 100. The outer pressing plate 110 is arranged along the circumference of the avoiding groove. The inner pressing plate 711 is fixedly connected to the inner ring of the crossed roller bearing 721, and the outer pressing plate 110 is fixedly connected to the outer ring of the crossed roller bearing 721. Thus, the rotating plate 710 can rotate relative to the bottom plate 100 along the axis of the rotating plate 710 through the crossed roller bearing 721.

[0035] In some embodiments, referring to Figure 1 and Figure 2, the rotating plate 710 is coaxially distributed with the workbench 200. After the probe tests a position of the chip, the sliding seat is driven to rotate by the rotating plate 710, so as to drive the main body 320 to rotate, and further drive the workbench 200 to rotate, so that the chip can rotate relative to the probe to the position to be tested.

[0036] It can be understood that, in some embodiments of the present invention, referring to Figure 2 and Figure 4 , the high-speed moving device includes a driving component, and the driving component is used to drive the rotating plate 710 to rotate along its own axis. Specifically, the driving component includes a motor 810, a first synchronous pulley 820, a first synchronous belt 830, a second synchronous pulley 840, a second synchronous belt 850 and a third synchronous pulley 860. The motor 810 is arranged on one side of the bottom plate 100. The first synchronous belt 830 is located between the output shaft of the motor 810 and the first synchronous pulley 820. The first synchronous pulley 820 and the second synchronous pulley 840 rotate coaxially. The second synchronous belt 850 is located between the second synchronous pulley 840 and the third synchronous pulley 860. The third synchronous pulley 860 is fixedly arranged at the bottom of the rotating plate 710 and rotates coaxially with the rotating plate 710. Thus, when it is necessary to rotate the rotating plate 710, through the transmission of the first synchronous belt 830 by the rotation of the motor 810, the first synchronous pulley 820 rotates. The first synchronous pulley 820 drives the second synchronous pulley 840 to rotate. Thus, through the transmission of the first synchronous belt 830, the third synchronous pulley 860 is driven to rotate, and further the rotating plate 710 is driven to rotate.

[0037] It can be understood that, in some embodiments of the present invention, referring to Figure 2 and Figure 4 , the diameter of the third synchronous pulley 860 is larger than that of the second synchronous pulley 840, so that the transmission ratio between the motor 810 and the third synchronous pulley 860 is reduced. And the diameter of the second synchronous pulley 840 is smaller than that of the first synchronous pulley 820, so as to further reduce the transmission ratio between the motor 810 and the third synchronous pulley 860, and further improve the accuracy of the rotation angle of the rotating plate 710. In this embodiment, the transmission ratio between the motor 810 and the third synchronous pulley 860 is 30:1, that is, when the motor 810 rotates 30 circles, the rotating plate 710 rotates 1 circle. At the same time, in this embodiment, the rotation angle range of the rotating plate 710 is ±15°. All the positions to be tested on the chip can be tested by rotating a relatively small angle.

[0038] It can be understood that, in some embodiments of the present invention, referring to Figure 1, a position sensor 900 is provided on the bottom plate 100. The position sensor 900 is used to detect the rotation angle of the rotating plate 710. When the driving component drives the rotating plate 710 to rotate to the position required by the chip, the rotation angle of the rotating plate 710 can be sensed by the position sensor 900, so as to feedback the sensing signal to the controller, thereby ensuring the driving accuracy of the motor 810.

[0039] The implementation principle of the present utility model is as follows: When the workbench 200 needs to move up and down at high frequency and high speed, current is applied to the stator part 420. The current is input into the coil, so that a magnetic field will be generated around the coil. The magnetic field repels the magnetic field of the stator part 420, so that the stator part 420 generates an upward moving thrust on the mover part 410, causing the mover part 410 to drive the workbench 200 to move upward, thereby driving the chip to move upward; When the current is disconnected, the magnetic field around the coil disappears, so that the acting force between the stator part 420 and the mover part 410 disappears, and the stator part 420 returns to the slot 421 again, causing the workbench 200 to descend by its own gravity, thereby driving the chip to descend. Repeat the above steps to realize the high-frequency and high-speed lifting of the workbench 200. At the same time, since the voice coil motor 400 has a small volume and high precision, the volume of the overall high-speed moving device is reduced, thereby improving the efficiency of chip testing. Moreover, there is no contact between the coil and the stator part 420, so there is no wear and resistance from the slot wall of the slot 421 when the coil moves, resulting in a small moving load and further reducing the energy consumption.

[0040] The above are all the preferred embodiments of this application, and the protection scope of this application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of this application should be covered within the protection scope of this application.

Claims

1. A high-speed mobile device for chip testing, characterized in that: include: Bottom plate (100); A workbench (200) is movably disposed on the base plate (100), and the workbench (200) is capable of carrying and fixing chips; A guide assembly, comprising a sliding seat and a main body (320), wherein the sliding seat is arranged on the bottom plate (100), the main body (320) is arranged on the sliding seat in a liftable manner, and the workbench (200) is arranged on the top of the main body (320); A voice coil motor (400) comprises a mover part (410) and a stator part (420), wherein the stator part (420) is magnetic and is located on the base plate (100), the mover part (410) is provided with a coil and is connected to the bottom of the workbench (200), the stator part (420) is provided with a slot (421), and the mover part (410) is plugged into and matched with the slot (421).

2. The high-speed mobile device for chip testing according to claim 1, characterized in that: The sliding seat comprises two fixed plates (311) arranged opposite to each other, a guide rail (330) is provided on the fixed plates (311) in a vertical direction, and the main body (320) is located between the two fixed plates (311) and is slidably matched with the guide rail (330).

3. The high-speed mobile device for chip testing according to claim 2, characterized in that: The high-speed moving device comprises an elastic component (600) which is arranged between the workbench (200) and the fixed plate (311), and the elastic component (600) is used to provide a supporting force for the workbench (200) so as to reduce the force applied by the workbench (200) to the mover part (410).

4. The high-speed mobile device for chip testing according to claim 3, characterized in that: The elastic component (600) comprises a connecting rod (610) and a sleeve (620); a receiving groove (3111) is provided on the top of the fixing plate (311); the sleeve (620) is arranged in the receiving groove (3111); one end of the connecting rod (610) is connected to the workbench (200), and the other end is plugged into and matched with the sleeve (620); the connecting rod (610) and the sleeve (620) are both magnetic and have the same magnetic poles.

5. The high-speed mobile device for chip testing according to claim 1, characterized in that: The high-speed moving device comprises a rotating assembly, which is arranged on the base plate (100) and is used to drive the workbench (200) to rotate along its own axial direction.

6. The high-speed mobile device for chip testing according to claim 5, characterized in that: The rotating assembly comprises a rotating plate (710) and a bearing member, the sliding seat is arranged on the rotating plate (710), a avoiding groove is provided through the top of the bottom plate (100), the rotating plate (710) is located in the avoiding groove, and the bearing member is located between the rotating plate (710) and the bottom plate (100).

7. The high-speed mobile device for chip testing according to claim 6, characterized in that: The high-speed moving device comprises a driving assembly for driving the rotating plate (710) to rotate, the driving assembly comprising a motor (810), a first synchronous wheel (820), a first synchronous belt (830), a second synchronous wheel (840), a second synchronous belt (850) and a third synchronous wheel (860), the motor (810) is arranged on the bottom plate (100), the first synchronous belt (830) is located between the output shaft of the motor (810) and the first synchronous wheel (820), the first synchronous wheel (820) and the second synchronous wheel (840) rotate coaxially, the second synchronous belt (850) is located between the second synchronous wheel (840) and the third synchronous wheel (860), the third synchronous wheel (860) is fixedly arranged at the bottom of the rotating plate (710), and the diameter of the third synchronous wheel (860) is larger than the diameter of the second synchronous wheel (840).

8. The high-speed mobile device for chip testing according to claim 7, characterized in that: The diameter of the second synchronous wheel (840) is smaller than the diameter of the first synchronous wheel (820).

9. The high-speed mobile device for chip testing according to claim 6, characterized in that: A position sensor (900) is provided on the bottom plate (100), and the position sensor (900) is used to detect the rotation angle of the rotating plate (710).

10. The high-speed mobile device for chip testing according to claim 1, characterized in that: The high-speed moving device comprises a grating ruler (500), wherein the grating ruler (500) is arranged on the sliding seat, and the grating ruler (500) is used to monitor the relative position between the main body (320) and the sliding seat.

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