Neutralizer

Abstract

The utility model provides a neutralizer. The neutralizer comprises a body, a water inlet pipe and a water outlet pipe, the ceramic cavity is arranged in the body; the electrode fixing ceramic is arranged in the ceramic cavity; and the ion collecting electrode is arranged on the electrode fixing ceramic, and the ion collecting electrode is positioned between the ceramic cavity and the electrode fixing ceramic. The electrode fixing ceramic is arranged outside the ion collecting electrode, so that the ion collecting electrode is fixed in the ceramic cavity. Therefore, the ion collecting electrode is prevented from being directly exposed at high temperature, the ion collecting electrode is prevented from being deformed at high temperature to cause difficult starting of the neutralizer and ionization stop by utilizing the fixing effect of the electrode fixing ceramic, and the production efficiency and the product quality are further improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment, and particularly to a neutralizer. Background Art

[0002] An ion source is a device that ionizes neutral atoms or molecules and extracts an ion beam current from them. It is an indispensable component of various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, and neutral beam injectors in controlled fusion devices. It extracts a positively charged ion beam. To avoid charge accumulation on the target or processing surface area and reduce the space charge in the ion beam to continue extracting ions, it is necessary to neutralize the charge of the ion beam.

[0003] The radio frequency neutralizer emits electrons to the ion beam extracted by the ion source to neutralize the charge in the ion beam, preventing charge accumulation on the target surface or causing an increase in the space charge of the ion beam, which affects the quality and application effect of the ion beam. Therefore, the quality of the neutralizer directly affects the working effect of the ion source.

[0004] However, in actual use, the radio frequency neutralizer ionizes the gas and generates a large amount of heat. After working for a long time, the temperature of the neutralizer reaches several hundred degrees Celsius, which causes the nickel alloy ion collection electrode to be prone to deformation. This will lead to unstable ionization effect of the neutralizer or even interruption of the ionization work, and it is necessary to open the cavity to process the installation of the ion collection electrode, seriously affecting the production efficiency and product quality. Utility Model Content

[0005] In view of the above deficiencies of the prior art, the purpose of this application is to provide a neutralizer to overcome the above technical problems.

[0006] In a first aspect, this application provides a neutralizer, including: a body;

[0007] A ceramic cavity, which is arranged in the body;

[0008] An electrode fixing ceramic, which is arranged in the ceramic cavity;

[0009] An ion collection electrode, which is arranged on the electrode fixing ceramic, and the ion collection electrode is located between the ceramic cavity and the electrode fixing ceramic.

[0010] In a possible embodiment, the electrode fixing ceramic is provided with a mounting member, and the ion collection electrode is fixed on the electrode fixing ceramic through the mounting member.

[0011] In a possible embodiment, the electrode fixing ceramic is of a circular tube structure.

[0012] In a possible embodiment, the mounting member is a strip-shaped protrusion.

[0013] In a possible embodiment, the number of the strip-shaped protrusions is four.

[0014] In a possible embodiment, the four strip-shaped protrusions are evenly distributed on the electrode fixing ceramic.

[0015] In a possible embodiment, the body includes: a housing, a base, a sustaining electrode, and a radio frequency component;

[0016] The sustaining electrode is disposed on the housing;

[0017] The radio frequency component is located inside the housing and disposed on the base, and the ceramic cavity is disposed inside the radio frequency component;

[0018] The base is connected to the housing.

[0019] In a possible embodiment, a ceramic cover plate with a central opening and a pressing block are further disposed inside the housing;

[0020] The ceramic cover plate covers the ceramic cavity;

[0021] The pressing block is disposed between the ceramic cover plate and the housing.

[0022] In a possible embodiment, a gas isolator is further included. One end of the gas isolator is located below the base, and the other end of the gas isolator sequentially passes through the base and the ceramic cavity and is connected to the ion collection electrode.

[0023] In a possible embodiment, the radio frequency component includes a radio frequency coil and a coil fixing ceramic;

[0024] The radio frequency coil is installed inside the coil fixing ceramic;

[0025] The coil fixing ceramic is fixed on the base.

[0026] Advantageous effects:

[0027] A neutralizer provided by the present application fixes the ion collection electrode in the ceramic cavity by installing an electrode fixing ceramic outside the ion collection electrode. Thereby, the ion collection electrode is prevented from being directly exposed to high temperatures, and the fixing effect of the electrode fixing ceramic is utilized to prevent the ion collection electrode from deforming at high temperatures, resulting in difficulties in starting the neutralizer and ionization stopping, and further improving production efficiency and product quality. Description of the Drawings

[0028] Figure 1 It is a schematic cross-sectional structure diagram of a neutralizer provided by an embodiment of the present application;

[0029] Figure 2 is Figure 1 a partial structural schematic diagram of

[0030] Figure 3 is Figure 1 a partial explosion schematic diagram of

[0031] Reference numerals in the drawings: 100 - neutralizer; 110 - body; 111 - outer shell; 112 - base; 113 - maintenance electrode; 114 - RF component; 1141 - RF coil; 1143 - coil fixing ceramic; 115 - ceramic cover plate; 116 - pressing block; 120 - ceramic cavity; 130 - electrode fixing ceramic; 131 - mounting part; 140 - ion collection electrode; 150 - gas isolator. Detailed implementation manners

[0032] For ease of understanding this application, the following will describe this application more comprehensively with reference to the relevant drawings. The drawings show preferred embodiments of this application. However, this application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the disclosure of this application more thoroughly understood.

[0033] The descriptions of the following embodiments refer to the attached drawings to illustrate specific embodiments in which this application can be implemented. The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meaning. And the "connection" and "coupling" mentioned in this application, unless otherwise specified, both include direct and indirect connection (coupling). The directional terms mentioned in this application, for example, "up", "down", "front", "back", "left", "right", "inside", "outside", "side", etc., are only references to the directions in the attached drawings. Therefore, the directional terms are used to better and more clearly illustrate and understand this application, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and thus cannot be construed as a limitation to this application.

[0034] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations. It should be noted that the terms "first", "second", etc. in the description, claims, and drawings of the present application are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "include", "may include", "comprise", or "may comprise" used in the present application indicate the existence of the corresponding functions, operations, elements, etc. disclosed, and do not limit one or more other functions, operations, elements, etc. In addition, the term "include" or "comprise" means the existence of the corresponding features, numbers, steps, operations, elements, components, or combinations thereof disclosed in the specification, and does not exclude the existence or addition of one or more other features, numbers, steps, operations, elements, components, or combinations thereof, and is intended to cover non-exclusive inclusion.

[0035] As Figures 1 to 3 shown, this embodiment provides a neutralizer 100, which includes: a main body 110, a ceramic cavity 120, an electrode fixing ceramic 130, and an ion collection electrode 140.

[0036] Wherein, the ceramic cavity 120 is disposed inside the main body 110.

[0037] Optionally, the ceramic cavity 120 has a cylindrical structure.

[0038] Wherein, the electrode fixing ceramic 130 is disposed inside the ceramic cavity 120. The electrode fixing ceramic 130 is used to fix the ion collection electrode 140.

[0039] Optionally, the electrode fixing ceramic 130 is provided with a mounting member 131, and the ion collection electrode 140 is fixed on the electrode fixing ceramic 130 through the mounting member 131.

[0040] Optionally, the electrode fixing ceramic 130 has a circular tube structure, that is, the upper and lower bottom surfaces of the electrode fixing ceramic 130 are through.

[0041] Optionally, the wall thickness of the electrode fixing ceramic 130 is 2 mm.

[0042] It can be understood that by setting the wall thickness of the electrode fixing ceramic 130 to 2 mm, the electrode fixing ceramic 130 can not only protect the ion collection electrode 140, but also does not affect the operation of the neutralizer 100.

[0043] Optionally, the mounting member 131 is a strip-shaped protrusion.

[0044] Optionally, the number of the strip-shaped protrusions is four, and the four strip-shaped protrusions are evenly distributed on the electrode fixing ceramic 130, that is, the four strip-shaped protrusions are evenly distributed on the outer wall of the electrode fixing ceramic 130.

[0045] Of course, in actual use, the number of the strip-shaped protrusions may also be one, two, three or more, and no specific limitation is made here.

[0046] It can be understood that in order to be fixed on the strip-shaped protrusion, a clamping groove matching the strip-shaped protrusion is formed on the inner wall of the ion collection electrode 140.

[0047] Of course, the ion collection electrode 140 can also be clamped with the strip-shaped protrusion by an opening method, and no specific limitation is made here.

[0048] It should be noted that no matter which of the above methods the ion collection electrode 140 is fixed on the electrode fixing ceramic 130, at least one clamping groove / opening is provided.

[0049] It can be understood that the ceramic cavity 120 and the ion collection electrode 140 form an insulated ionization chamber.

[0050] In a possible embodiment, the body 110 includes: a housing 111, a base 112, a sustaining electrode 113 and a radio frequency component 114.

[0051] Wherein, the base 112 is connected to the housing 111.

[0052] Optionally, the base 112 and the housing 111 are made of a metal material to form a metal shielding layer, so that on the one hand, it can prevent the high-frequency electric field from reacting with the external gas and reduce the output power of the radio frequency power supply; on the other hand, it can shield the electric field interference of the external high-voltage electron gun, radio frequency ion source, etc.

[0053] Optionally, the sustaining electrode 113 is arranged on the housing 111.

[0054] It should be noted that corresponding small hole channels are formed between the sustaining electrode 113 and the ceramic cavity 120, and the channels are used for extracting electrons. The sustaining electrode 113 is connected to the positive potential of an external power supply, and the ion collection electrode 140 is connected to the negative potential of the external power supply.

[0055] Optionally, the radio frequency component 114 is located inside the housing 111 and arranged on the base 112, and the ceramic cavity 120 is arranged inside the radio frequency component 114.

[0056] Optionally, the RF component 114 includes an RF coil 1141 and a coil fixing ceramic 1143; the RF coil 1141 is installed inside the coil fixing ceramic 1143; the coil fixing ceramic 1143 is fixed on the base 112.

[0057] It should be noted that the RF coil 1141 is used to connect to an RF power supply, and the RF coil 1141 is connected to the ground wire through an RF lead-out wire.

[0058] Optionally, a ceramic cover plate 115 with a central opening and a pressing block 116 are further provided inside the housing 111; the ceramic cover plate 115 covers the ceramic cavity 120; the pressing block 116 is provided between the ceramic cover plate 115 and the housing 111.

[0059] That is to say, the ceramic cover plate 115 is fixed on the ceramic cavity 120 by the pressing block 116.

[0060] In a possible embodiment, the neutralizer 100 further includes a gas isolator 150. One end of the gas isolator 150 is located below the base 112, and the other end of the gas isolator 150 sequentially passes through the base 112 and the ceramic cavity 120 and is connected to the ion collection electrode 140.

[0061] It can be understood that in actual use, the ion collection electrode 140 and the ceramic cavity 120 can be fixed on the base 112 of the neutralizer 100 by nuts.

[0062] It should be noted that the gas isolator 150 is used to introduce the working gas into the ceramic cavity 120, and the gas isolator 150 isolates the transmission of the power supply.

[0063] In summary, the neutralizer provided in this embodiment fixes the ion collection electrode in the ceramic cavity by installing an electrode fixing ceramic outside the ion collection electrode. Thereby, the ion collection electrode is prevented from being directly exposed to high temperatures, and the fixing effect of the electrode fixing ceramic is utilized to prevent the ion collection electrode from deforming at high temperatures, resulting in difficulties in starting the neutralizer and ionization stop, and further improving production efficiency and product quality.

[0064] It should be understood that terms such as "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of the embodiments of the present application, "a plurality" means two or more unless otherwise specifically defined.

[0065] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of this application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0066] It should be understood that the application of this application is not limited to the above examples. For those of ordinary skill in the art, improvements or transformations can be made according to the above description. All such improvements and transformations should fall within the protection scope of the appended claims of this application. Those of ordinary skill in the art can understand all or part of the processes of implementing the above embodiments, and the equivalent changes made according to the claims of this application still fall within the scope covered by this application.

Claims

1. A neutralizer, characterized in that: include: ontology; A ceramic cavity, wherein the ceramic cavity is disposed in the body; An electrode fixing ceramic, wherein the electrode fixing ceramic is arranged in the ceramic cavity; The ion collecting electrode is arranged on the electrode fixing ceramic, and the ion collecting electrode is located between the ceramic cavity and the electrode fixing ceramic.

2. The neutralizer according to claim 1, characterized in that: The electrode fixing ceramic is provided with a mounting piece, and the ion collecting electrode is fixed on the electrode fixing ceramic through the mounting piece.

3. The neutralizer according to claim 2, characterized in that: The electrode fixing ceramic is a round tube structure.

4. The neutralizer according to claim 2, characterized in that: The mounting piece is a strip-shaped protrusion.

5. The neutralizer according to claim 4, characterized in that: The number of the strip-shaped protrusions is 4.

6. The neutralizer according to claim 5, characterized in that: The four strip-shaped protrusions are evenly distributed on the electrode fixing ceramic.

7. The neutralizer according to any one of claims 1 to 6, characterized in that: The body comprises: a housing, a base, a sustaining electrode and a radio frequency component; The sustaining electrode is disposed on the housing; The radio frequency component is located in the housing and is arranged on the base, and the ceramic cavity is arranged in the radio frequency component; The base is connected to the shell.

8. The neutralizer according to claim 7, characterized in that: The shell is also provided with a ceramic cover plate with a central opening and a pressing block; The ceramic cover plate is disposed on the ceramic cavity; The pressing block is arranged between the ceramic cover plate and the shell.

9. The neutralizer according to claim 8, characterized in that: It also includes a gas isolator, one end of which is located below the base, and the other end of which passes through the base and the ceramic cavity in sequence to be connected to the ion collecting electrode.

10. The neutralizer according to claim 7, characterized in that: The radio frequency component includes a radio frequency coil and a coil fixing ceramic; The radio frequency coil is installed in the coil fixing ceramic; The coil fixing ceramic is fixed on the base.

Images