Swing type flushing device

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses a swing type flushing device which comprises a supporting frame, a swing assembly and a flushing part. The swing assembly comprises a motor and a swing frame. The swing frame is arranged on the outer side of the supporting frame in a swing mode along the vertical face. The swing frame is used for placing a substrate sheet; the motor is arranged on the supporting frame, is in transmission connection with the swing frame and is used for driving the swing frame to swing; the flushing part is arranged on the outer side of the supporting frame, and a water outlet is formed in the inner side of the flushing part. According to the swing type flushing device provided by the scheme, in the process of flushing the substrate slice, the swing frame and the substrate slice can be driven by the motor to swing along the vertical plane, so that the surface of the substrate slice is uniformly flushed, the uniform flushing effect of the substrate slice can be improved, and the cleaning efficiency of the substrate slice can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a swing-type flushing device. Background Art

[0002] Indium phosphide substrates are widely used in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other radio frequency devices.

[0003] In the process of manufacturing substrate sheets, it is generally necessary to clean the surface of the substrate sheet with a cleaning solution for multiple times. The specific process is to rinse the substrate sheet with a chemical agent or put the substrate sheet into a chemical agent, and then use high-purity water to rinse the surface of the substrate sheet.

[0004] In the conventional flushing method, the substrate sheet is generally fixed and then flushed by a flushing member. However, the distances from the flushing member on the surface of the substrate sheet are not uniform, so the flushing effect at different locations on the surface of the substrate sheet is not uniform. Utility Model Content

[0005] In view of this, the purpose of the present application is to provide a swing-type washing device for solving the problem of uneven washing effect at various locations on the surface of a substrate sheet.

[0006] In order to achieve the above technical purpose, the present application provides a swing-type flushing device, comprising: a support frame, a swing assembly and a flushing member;

[0007] The swing assembly comprises: a motor and a swing frame;

[0008] The swing frame is swingably arranged on the outer side of the support frame along a vertical plane;

[0009] The swing frame is used for placing the substrate sheet;

[0010] The motor is arranged on the support frame and is transmission-connected with the swing frame to drive the swing frame to swing;

[0011] The flushing component is arranged on the outside of the supporting frame, and a water outlet is arranged on the inside of the flushing component.

[0012] Further, the support frame, the swing assembly and the flushing member each include a plurality;

[0013] A plurality of the support frames are arranged in a circle;

[0014] The plurality of swing components are arranged on the plurality of support frames in a one-to-one correspondence;

[0015] A plurality of flushing parts are arranged in a circle around the outer periphery of the plurality of support frames.

[0016] Further, it also includes a rotating column and a second motor;

[0017] The rotating column is rotatably arranged;

[0018] The second motor is drivingly connected to the rotating column and is used to drive the rotating column to rotate;

[0019] A plurality of the support frames are arranged in a circumferential manner around the rotating column.

[0020] Further, the swinging assembly includes a plurality of the swinging frames;

[0021] The plurality of the swinging frames are arranged at intervals in sequence from top to bottom;

[0022] The motor is drivingly connected to the plurality of the swinging frames.

[0023] Further, the swinging assembly further includes: a connecting rod;

[0024] The connecting rod connects the plurality of the swinging frames, and the connecting rod is swingably connected to the support frame;

[0025] The motor is drivingly connected to the connecting rod.

[0026] Further, the swinging assembly further includes: a transmission wheel;

[0027] A strip-shaped groove is arranged on the connecting rod;

[0028] An eccentric rod is eccentrically arranged on the transmission wheel;

[0029] The transmission wheel is rotatably arranged on the support frame;

[0030] The eccentric rod is movably arranged on the strip-shaped groove;

[0031] The motor is drivingly connected to the transmission wheel and is used to drive the transmission wheel to rotate so as to drive the connecting rod to swing in a vertical plane.

[0032] Further, it further includes an air inflation frame;

[0033] The air inflation frame is arranged outside the support frame, and an air inflation port is arranged on the inner side of the air inflation frame.

[0034] Further, a water flushing port facing the swinging frame is arranged on the support frame.

[0035] Further, an inclined surface is arranged on the support frame;

[0036] The swinging frame is arranged on the inclined surface.

[0037] Further, an inclined installation groove is arranged on the swinging frame;

[0038] The installation groove is used for the inclined placement of the lining negative film.

[0039] It can be seen from the above technical scheme that the present application provides a swinging flushing device, comprising: a support frame, a swinging assembly and a flushing piece; the swinging assembly comprises: a motor and a swinging frame; the swinging frame is swingably arranged on the outside of the support frame along a vertical plane; the swinging frame is used to place a substrate sheet; the motor is arranged on the support frame and is transmission-connected to the swinging frame to drive the swinging frame to swing; the flushing piece is arranged on the outside of the support frame, and a water outlet is arranged on the inside of the flushing piece.

[0040] The swing-type washing device provided in this solution can drive the swing frame and the substrate sheet to swing along the vertical plane through a motor during the washing process of the substrate sheet, so that the surface of the substrate sheet is evenly washed, which can improve the uniformity of the substrate sheet washing effect and improve the cleaning efficiency of the substrate sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0042] Figure 1 A schematic diagram of the overall structure of a swing-type flushing device provided in an embodiment of the present application;

[0043] Figure 2 A schematic diagram of a swing assembly of a swing-type flushing device provided in an embodiment of the present application;

[0044] In the figure: 10, support frame; 11, flushing port; 12, inclined plane; 20, swing assembly; 21, motor; 22, swing frame; 23, connecting rod; 231, strip groove; 24, transmission wheel; 241, eccentric rod; 30, flushing part; 31, water outlet; 40, rotating column; 50, second motor; 60, air flushing frame; 61, air flushing port. DETAILED DESCRIPTION

[0045] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0046] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0047] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0048] See also Figure 1 A swing-type flushing device provided in an embodiment of the present application includes: a support frame 10, a swing assembly 20 and a flushing member 30.

[0049] The swing assembly 20 includes: a motor 21 and a swing frame 22; the swing frame 22 is swingably arranged on the outside of the support frame 10 along a vertical plane; the swing frame 22 is used to place a substrate sheet; the motor 21 is arranged on the support frame 10 and is transmission-connected to the swing frame 22 to drive the swing frame 22 to swing; the flushing member 30 is arranged on the outside of the support frame 10, and a water outlet 31 is arranged on the inner side of the flushing member 30.

[0050] In this solution, taking the fixed setting of the swing frame 22 as an example, the water outlet 31 on the flushing part 30 can be set at a position facing the swing frame 22; in the process of the flushing part 30 flushing the swing frame 22, the motor 21 drives the swing frame 22 to swing back and forth along the vertical plane, so that the surface of the substrate sheet can be evenly contacted with the cleaning liquid flushed out of the water outlet 31, thereby improving the cleaning efficiency and cleaning effect of the substrate sheet.

[0051] In one embodiment, the support frame 10, the swing assembly 20 and the flushing component 30 each include multiple; multiple support frames 10 are arranged in a circle; multiple swing assemblies 20 are arranged on the multiple support frames 10 in a one-to-one correspondence; multiple flushing components 30 are arranged in a circle on the outer periphery of the multiple support frames 10.

[0052] In this embodiment, multiple support frames 10 are provided to place multiple substrate sheets, thereby further improving the cleaning efficiency of the substrate sheets.

[0053] As an implementation manner, the swing flushing device may further include a rotating column 40 and a second motor 50; the rotating column 40 is rotatably arranged; the second motor 50 is drivingly connected to the rotating column 40 for driving the rotating column 40 to rotate; a plurality of support frames 10 are arranged in a circumferential manner around the rotating column 40.

[0054] In this embodiment, the second motor 50 can drive the rotating column 40 to rotate, thereby driving a plurality of support frames 10 to rotate and adjusting the relative positions of the support frames 10 and the flushing member 30. Specifically, the motor 21 can drive the lining piece to swing along the vertical plane, while the second motor 50 can drive the lining piece to rotate along the horizontal plane. Therefore, the position relationship between the lining piece and the flushing member 30 can be adjusted by the motor 21 and the second motor 50 before cleaning, and the lining piece can be driven to move in the vertical and horizontal directions during the cleaning process, thereby effectively improving the cleaning effect and cleaning efficiency of the lining piece.

[0055] Moreover, after the cleaning of the lining piece is completed, the second motor 50 can drive the support frame 10 to rotate to realize the throwing off of the cleaning liquid on the lining piece.

[0056] In one embodiment, the swing assembly 20 includes a plurality of swing frames 22; the plurality of swing frames 22 are sequentially arranged at intervals from top to bottom. The motor 21 is drivingly connected to the plurality of swing frames 22, that is, the motor 21 can drive the plurality of swing frames 22 to swing simultaneously.

[0057] As an implementation manner, please refer to Figure 1 and Figure 2 , the swing assembly 20 further includes: a connecting rod 23; the connecting rod 23 connects the plurality of swing frames 22, and the connecting rod is swingably connected to the support frame 10; the motor 21 is drivingly connected to the connecting rod 23. That is, the motor 21 drives the plurality of swing frames 22 to swing simultaneously by driving the connecting rod 23 to swing.

[0058] Further, the swing assembly 20 further includes: a transmission wheel 24; a strip-shaped groove 231 is provided on the connecting rod 23; an eccentric rod 241 is eccentrically provided on the transmission wheel 24; the transmission wheel 24 is rotatably arranged on the support frame 10; the eccentric rod 241 is movably arranged in the strip-shaped groove 231; the motor 21 is drivingly connected to the transmission wheel 24 for driving the transmission wheel 24 to rotate to drive the connecting rod 23 to swing along the vertical plane. Among them, the eccentric rod 241 refers to a rod eccentrically arranged with respect to the rotation axis of the transmission wheel 24.

[0059] That is, in this embodiment, the transmission wheel 24 and the connecting rod 23 form a crank and connecting rod mechanism; the motor 21 only needs to drive the transmission wheel 24 to rotate to drive the connecting rod 23 to swing up and down along the vertical plane. In application, the connecting rod 23 can be rotatably connected to the swing frame 22.

[0060] In another embodiment, it further includes an air blowing rack 60; the air blowing rack 60 is arranged outside the support rack 10, and an air blowing port 61 is arranged on the inner side of the air blowing rack 60.

[0061] The air blowing rack 60 can dry the washed substrate wafers. Specifically, the air blowing rack 60 can be started after the second motor 50 drives the support rack 10 to rotate so that the cleaning liquid on the surface of the substrate wafers is thrown off, and the gas blown out by the air blowing rack 60 can be nitrogen.

[0062] In other embodiments, a water flushing port 11 facing the swing rack 22 is arranged on the support rack 10.

[0063] The water outlet 31 is used to flush one end face of the substrate wafer, and the water flushing port 11 is used to flush the other end face of the substrate wafer. Thus, the front and back surfaces of the substrate wafer can be flushed simultaneously through the water outlet 31 and the water flushing port 11, so that the process of turning over the substrate wafer can be omitted in the actual application process to improve production efficiency.

[0064] Correspondingly, a water pipe communicating with each water flushing port 11 is arranged inside the support rack 10.

[0065] In one embodiment, an inclined surface 12 is arranged on the support rack 10; the swing rack 22 is arranged on the inclined surface 12. And, an inclined installation groove 221 can be arranged on the swing rack 22; the installation groove 221 is used for placing the substrate wafer obliquely.

[0066] Specifically, the normal direction of the inclined surface 12 is inclined upward. The water outlet direction of the water outlet 31 can be perpendicular to the inclined surface 12. By arranging the inclined surface 12 for the swing rack 22 to be obliquely placed along the inclined surface, the cleaning liquid flowing through the upper substrate wafer during the cleaning process will also flow through the lower substrate wafer, so as to improve the utilization rate of the cleaning liquid to save the cleaning liquid. Similarly, the inclined installation groove 221 helps the cleaning liquid to flow downward, further improving the utilization rate of the cleaning liquid.

[0067] The above are the preferred embodiments of the present application and are not used to limit the present invention. Although the present application has been described in detail with reference to the examples, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing examples, or perform equivalent replacements on some of the technical features. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A swing-type flushing device, characterized in that: include: A support frame (10), a swing assembly (20) and a flushing member (30); The swing assembly (20) comprises: a motor (21) and a swing frame (22); The swing frame (22) is swingably arranged on the outer side of the support frame (10) along a vertical plane; The swing frame (22) is used for placing substrate sheets; The motor (21) is arranged on the support frame (10) and is in transmission connection with the swing frame (22) so as to drive the swing frame (22) to swing; The flushing component (30) is arranged outside the support frame (10), and a water outlet (31) is arranged inside the flushing component (30).

2. The swing-type flushing device according to claim 1, characterized in that: The support frame (10), the swing assembly (20) and the flushing component (30) each include a plurality; The plurality of support frames (10) are arranged in a circular manner; The plurality of swing assemblies (20) are arranged on the plurality of support frames (10) in a one-to-one correspondence; A plurality of flushing components (30) are arranged in a circular manner around the outer periphery of the plurality of support frames (10).

3. The swing-type flushing device according to claim 2, characterized in that: It also includes a rotating column (40) and a second motor (50); The rotating column (40) is rotatably arranged; The second motor (50) is drivingly connected to the rotating column (40) and is used to drive the rotating column (40) to rotate; The plurality of support frames (10) are arranged on the rotating column (40) in a circular manner.

4. The swing-type flushing device according to claim 1, characterized in that: The swing assembly (20) comprises a plurality of swing frames (22); The plurality of swing frames (22) are arranged in sequence and spaced apart from top to bottom; The motor (21) is drivingly connected to a plurality of the swing frames (22).

5. The swing-type flushing device according to claim 4, characterized in that: The swing assembly (20) further comprises: a connecting rod (23); The connecting rod (23) is connected to a plurality of the swing frames (22), and the connecting rod is swingably connected to the support frame (10); The motor (21) is drivingly connected to the connecting rod (23).

6. The swing-type flushing device according to claim 5, characterized in that: The swing assembly (20) further comprises: a transmission wheel (24); The connecting rod (23) is provided with a strip groove (231); An eccentric rod (241) is eccentrically arranged on the transmission wheel (24); The transmission wheel (24) is rotatably disposed on the support frame (10); The eccentric rod (241) is movably disposed on the strip-shaped groove (231); The motor (21) is drivingly connected to the transmission wheel (24) and is used to drive the transmission wheel (24) to rotate so as to drive the connecting rod (23) to swing along a vertical plane.

7. The swing-type flushing device according to claim 1, characterized in that: Also included is an air-filled frame (60); The air charging frame (60) is arranged outside the support frame (10), and an air charging port (61) is arranged inside the air charging frame (60).

8. The swing-type flushing device according to claim 1, characterized in that: The support frame (10) is provided with a flushing port (11) facing the swing frame (22).

9. The oscillating flushing device according to any one of claims 1 to 8, characterized in that: The support frame (10) is provided with an inclined surface (12); The swing frame (22) is arranged on the inclined surface (12).

10. The swing-type flushing device according to claim 9, characterized in that: The swing frame (22) is provided with an obliquely arranged mounting groove (221); The mounting groove (221) is used for the substrate sheet to be placed obliquely.

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