Filtering tank for single crystal furnace

By designing a filter unit assembly including filter element assembly, mounting plate and anti-turn plate in a filter can for single crystal furnace, the leakage problem caused by loosening of the filter unit connection is solved, and better filtration effect and sealing are achieved.

CN222983983UActive Publication Date: 2025-06-17ZHEJIANG JINGTAI SEMICON CO LTD
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Patent Information

Application Number
CN202421965056.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-14
Publication Date
2025-06-17
Estimated Expiration
2034-08-14

AI Technical Summary

Technical Problem

The existing single crystal furnace filter canister can easily cause loosening of the connection of the filter unit and leaking due to long-term gas impact or external vibration, resulting in unclear filtration and poor filtration effect.

Method used

A filter unit assembly including a filter element assembly, a filter element mounting plate and a filter element anti-turn plate is designed. The longitudinal locking force is provided through the filter element anti-turn plate to prevent the filter element lock nut from loosening, and double protection is formed through the inner sealing ring and the outer sealing ring to enhance the sealing property.

Benefits of technology

Effectively prevent leakage at the docking point of the filter element, improve the sealing and protection of the filtering effect, and ensure the stability and efficiency of the filtration process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a filtering tank for a single crystal furnace. The technical problem to be solved by the utility model is to provide the filtering tank for the single crystal furnace. According to the technical scheme, the filter tank comprises a filter tank supporting frame, a filter tank body and a filter unit assembly, the filter unit assembly comprises a filter element assembly, a filter element mounting disc and a filter element anti-rotating disc, and the filter element assembly comprises a filter element, a filter element locking nut and a filter element sealing gasket. The filter element comprises a filter element pipe body and a pipe body butt joint boss, filter holes are formed in the filter element pipe body, the filter element mounting disc comprises a mounting disc body, and disc body through holes are formed in the mounting disc body at intervals around an arc. The filter element anti-rotation disc has the advantages that the filter element anti-rotation disc can enable the filter element locking nut to obtain longitudinal locking force, and the filter element locking nut is effectively prevented from loosening due to long-term impact or vibration, so that leakage occurs at the butt joint of the filter element, and the protective property is better.
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Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, and particularly relates to a filter tank for a single crystal furnace. Background Art

[0002] During the production process of a single crystal furnace, a large amount of high-temperature gas will be generated, and these gases may contain impurities and harmful substances. In order to protect the environment and ensure the smooth progress of production, the single crystal furnace is usually equipped with a filter tank to filter out these impurities. The function of the filter tank is to filter out the impurities in the high-temperature gas to purify the discharged gas. In order to improve the filtration speed and efficiency of the existing filter tank for single crystal furnaces and facilitate the subsequent cleaning and maintenance, the internal filter unit adopts a split structure design. It is found in actual use that this structure is prone to looseness at the connection of the filter units due to the influence of long-term gas impact or external vibration, etc., and then leakage occurs, resulting in incomplete filtration and poor filtration effect, and improvements and optimizations are made for this. Content of the Utility Model

[0003] To solve the above problems, the technical problem to be solved by the utility model is to provide a filter tank for a single crystal furnace.

[0004] The technical solution adopted by the filter tank for the single crystal furnace of the utility model: It includes a filter tank support frame, a filter tank body arranged on the filter tank support frame, and a filter unit assembly detachably arranged in the filter tank body. It is characterized in that the filter unit assembly includes a filter core assembly, a filter core mounting disc, and a filter core anti-rotation disc. The filter core assembly includes a filter core, a filter core locking nut, and a filter core gasket. The filter core includes a filter core tube body and a tube body docking boss. Filter holes are arranged in the filter core tube body. The filter core mounting disc includes a mounting disc body. The mounting disc body is provided with disc body through holes for the upper end of the filter core tube body to pass through at intervals around an arc. The filter core gasket is sleeved on the tube body docking boss and fits on the back of the mounting disc body. The filter core locking nut is threadedly connected and fixed to the upper end of the filter core tube body, and its bottom fits on the front of the mounting disc body;

[0005] A tank body filter cavity is arranged in the filter tank body. An inner edge of the tank body for mounting and fixing the mounting disc body is arranged in the tank body filter cavity. Nut anti-rotation docking holes are arranged at intervals around an arc on the front of the filter core locking nut. The filter core anti-rotation disc includes an anti-rotation disc body. Anti-rotation disc through holes corresponding to the disc body through holes and for the upper end of the filter core tube body to pass through are arranged on the anti-rotation disc body. Waist-shaped fixing holes for docking with the nut anti-rotation docking holes are arranged at intervals around an arc outside the anti-rotation disc through holes on the anti-rotation disc body.

[0006] The overall assembly of the filter unit further includes an inner sealing ring and an outer sealing ring. An inner sealing ring installation groove for positioning the inner sealing ring is provided on the inner retaining edge of the tank body. An under-wrap edge of the mounting disc corresponding to the inner retaining edge of the tank body is provided on the disc body of the mounting disc. The outer sealing ring is wrapped outside the disc body of the mounting disc and placed on the inner retaining edge of the tank body.

[0007] The disc body of the mounting disc is provided with mounting disc mounting holes arranged at intervals around an arc outside the under-wrap edge of the mounting disc. The inner retaining edge of the tank body is provided with tank body docking holes corresponding to the mounting disc mounting holes. The disc body of the anti-rotation disc is provided with tightening relief holes corresponding to the mounting disc mounting holes.

[0008] The disc body of the mounting disc is provided with a mounting disc limiting sleeve portion outside the through hole of the disc body. A mounting disc sealing limiting groove for limiting the filter element sealing gasket is formed inside the mounting disc limiting sleeve portion.

[0009] The number of the nut anti-rotation docking holes is 3, and the number of the kidney-shaped fixing holes is 2.

[0010] The outer wall of the filter element locking nut is provided with nut locking holes arranged at intervals around an arc and vertically communicating with the nut anti-rotation docking holes.

[0011] The disc body of the anti-rotation disc is provided with a lifting lug.

[0012] The advantages of the filter tank for single crystal furnace of the present utility model are as follows: The filter element anti-rotation disc can enable the filter element locking nut to obtain a longitudinal locking force, effectively preventing the filter element locking nut from loosening due to long-term impact or vibration, so as to avoid leakage at the docking part of the filter element, and the protection performance is better; The inner sealing ring and the outer sealing ring form a double protection between the disc body of the mounting disc and the inner retaining edge of the tank body, effectively preventing leakage, further strengthening the sealing performance, and the overall filtering effect is better. Brief Description of the Drawings

[0013] The following further describes the present utility model in detail with reference to the drawings and specific embodiments.

[0014] Figure 1 is a schematic structural view of the filter tank for single crystal furnace of the present utility model;

[0015] Figure 2 is an exploded view of the overall assembly of the filter unit of the present utility model;

[0016] Figure 3 is a schematic structural view of the filter element assembly of the present utility model;

[0017] Figure 4 is a schematic structural view of the filter element of the present utility model;

[0018] Figure 5It is a schematic diagram of the back structure of the filter element mounting disc of the present utility model;

[0019] Figure 6 It is a schematic diagram of the structure of the filter tank body of the present utility model;

[0020] Figure 7 It is a schematic diagram of the structure of the filter element locking nut of the present utility model;

[0021] Figure 8 It is a schematic diagram of the front structure of the filter element anti-rotation disc of the present utility model. Detailed implementation manners

[0022] As Figure 1-8 shown, the filter tank for single crystal furnace related to the present utility model includes a filter tank support frame 1, a filter tank body 2 provided on the filter tank support frame 1, and a filter unit assembly 3 detachably provided in the filter tank body 2. The filter unit assembly 3 includes a filter element assembly 5, a filter element mounting disc 6, and a filter element anti-rotation disc 7. The filter element assembly 5 includes a filter element 11, a filter element locking nut 12, and a filter element gasket 13. The filter element 11 includes a filter element tube body 15 and a tube body docking boss 17. A filter hole 16 is provided in the filter element tube body 15. The filter element mounting disc 6 includes a mounting disc body 19. The mounting disc body 19 is provided with disc body through holes 20 at intervals around an arc for the upper end of the filter element tube body 15 to pass through. The filter element gasket 13 is sleeved on the tube body docking boss 17 and is attached to the back of the mounting disc body 19. The filter element locking nut 12 is threadedly connected and fixed to the upper end of the filter element tube body 15, and its bottom is attached to the front of the mounting disc body 19. A tank body filter cavity 14 is provided in the filter tank body 2. An inner tank edge 22 for mounting and fixing the mounting disc body 19 is provided in the tank body filter cavity 14. Nut anti-rotation docking holes 23 are provided at intervals around an arc on the front of the filter element locking nut 12. The filter element anti-rotation disc 7 includes an anti-rotation disc body 25. An anti-rotation disc through hole 26 corresponding to the disc body through hole 20 and for the upper end of the filter element tube body 15 to pass through is provided on the anti-rotation disc body 25. Waist-shaped fixing holes 27 docked with the nut anti-rotation docking holes 23 are provided at intervals around an arc outside the anti-rotation disc through hole 26 on the anti-rotation disc body 25. The filter element anti-rotation disc 7 can enable the filter element locking nut 12 to obtain a longitudinally arranged locking force, effectively preventing the filter element locking nut 12 from loosening due to long-term impact or vibration, so as to prevent leakage at the filter element docking place, and the protection performance is better.

[0023] The overall assembly 3 of the filtering unit further includes an inner sealing ring 8 and an outer sealing ring 9. An inner sealing ring mounting groove 30 for positioning the inner sealing ring 8 is provided on the inner edge 22 of the tank body. An under-edge 31 of the mounting disc corresponding to the inner edge 22 of the tank body is provided on the disc body 19 of the mounting disc. The outer sealing ring 9 is wrapped outside the disc body 19 of the mounting disc and placed on the inner edge 22 of the tank body. The inner sealing ring 8 and the outer sealing ring 9 form a double protection between the disc body 19 of the mounting disc and the inner edge 22 of the tank body, effectively preventing leakage, further strengthening the sealing performance, and making the overall filtering effect better.

[0024] The disc body 19 of the mounting disc is provided with mounting disc mounting holes 33 arranged at intervals around an arc outside the under-edge 31 of the mounting disc. The inner edge 22 of the tank body is provided with tank body docking holes 34 corresponding to the mounting disc mounting holes 33. The anti-rotation disc body 25 is provided with tightening relief holes 35 corresponding to the mounting disc mounting holes 33, so that the inner sealing ring 8 can seal and protect the leakage at the screw connection of the disc body 19 of the mounting disc. The structural design is more reasonable and the safety is higher.

[0025] The disc body 19 of the mounting disc is provided with a mounting disc limiting sleeve portion 37 outside the through-hole 20 of the disc body. A mounting disc sealing limiting groove 38 for limiting the filter element gasket 13 is formed inside the mounting disc limiting sleeve portion 37, further strengthening the firm and reliable installation of the filter element gasket 13 and preventing loosening.

[0026] The number of the nut anti-rotation docking holes 23 is 3, and the number of the kidney-shaped fixing holes 27 is 2, so that the docking is more flexible after installation.

[0027] The outer wall of the filter element locking nut 12 is provided with nut locking holes 28 vertically communicating with the nut anti-rotation docking holes 23 at intervals around an arc, further improving the locking effect of the connection between the filter element locking nut 12 and the filter element tube body 15.

[0028] The anti-rotation disc body 25 is provided with a lifting lug 39, which is convenient for installation and disassembly.

[0029] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention are all included in the protection scope of the present invention.

Claims

1. A filter tank for a single crystal furnace, comprising a filter tank support frame (1), a filter tank body (2) arranged on the filter tank support frame (1), and a filter unit assembly (3) detachably arranged in the filter tank body (2), characterized in that: The filter unit assembly (3) comprises a filter element assembly (5), a filter element mounting plate (6) and a filter element anti-rotation plate (7); the filter element assembly (5) comprises a filter element (11), a filter element locking nut (12) and a filter element sealing gasket (13); the filter element (11) comprises a filter element tube body (15) and a tube body docking boss (17); a filter hole (16) is provided in the filter element tube body (15); the filter element mounting plate (6) comprises a mounting plate body (19); the mounting plate body (19) is provided with plate body through holes (20) for the upper end of the filter element tube body (15) to pass through at intervals around a circular arc; the filter element sealing gasket (13) is sleeved on the tube body docking boss (17) and is affixed to the back of the mounting plate body (19); the filter element locking nut (12) is threadedly connected and fixed to the upper end of the filter element tube body (15) and its bottom is affixed to the front of the mounting plate body (19); The filter tank body (2) is provided with a tank body filter cavity (14), the tank body filter cavity (14) is provided with a tank body retaining edge (22) for fixing the mounting plate body (19), the front side of the filter element locking nut (12) is provided with nut anti-rotation docking holes (23) at intervals around a circular arc, the filter element anti-rotation disk (7) comprises an anti-rotation disk body (25), the anti-rotation disk body (25) is provided with an anti-rotation disk through hole (26) corresponding to the disk body through hole (20) and used for the upper end of the filter element tube body (15) to pass through, and the anti-rotation disk body (25) is provided with waist-shaped fixing holes (27) at intervals around a circular arc outside the anti-rotation disk through hole (26) and connected to the nut anti-rotation docking holes (23).

2. The filter tank for single crystal furnace according to claim 1, characterized in that: The filter unit assembly (3) further comprises an inner sealing ring (8) and an outer sealing ring (9); an inner sealing ring mounting groove (30) for positioning the inner sealing ring (8) is provided on the inner rib (22) of the tank body; a mounting plate lower rim (31) corresponding to the inner rib (22) of the tank body is provided on the mounting plate body (19); and the outer sealing ring (9) is wrapped around the outer side of the mounting plate body (19) and placed on the inner rib (22) of the tank body.

3. The filter tank for single crystal furnace according to claim 2, characterized in that: The mounting plate body (19) is provided with mounting plate mounting holes (33) arranged at intervals around a circular arc outside the mounting plate lower rim (31), the inner rib (22) of the tank body is provided with tank body docking holes (34) corresponding to the mounting plate mounting holes (33), and the anti-rotation plate body (25) is provided with tightening clearance holes (35) corresponding to the mounting plate mounting holes (33).

4. The filter tank for single crystal furnace according to claim 1, characterized in that: The mounting disc body (19) is provided with a mounting disc limiting sleeve (37) outside the disc body through hole (20), and the mounting disc limiting sleeve (37) is formed with a mounting disc sealing limiting groove (38) for limiting the filter element sealing gasket (13).

5. The filter tank for single crystal furnace according to claim 1, characterized in that: The number of the nut anti-rotation docking holes (23) is three, and the number of the waist-shaped fixing holes (27) is two.

6. The filter tank for single crystal furnace according to claim 1, characterized in that: The outer wall of the filter core locking nut (12) is provided with nut locking holes (28) at intervals around a circular arc and vertically communicated with the nut anti-rotation docking hole (23).

7. The filter tank for single crystal furnace according to claim 1, characterized in that: The anti-rotation disc body (25) is provided with a lifting lug (39).